KR100780033B1 - Apparatus for bloking thermal of metal boat - Google Patents

Abstract

The present invention relates to a heat shielding device of a metal boat, the configuration of which is the upper and lower body is opened and the inner space is provided, the refrigerant passage is formed in the body, the casing in which the metal boat is located in the inner space; And an upper cover having a plate coupled to be detachably attached to an upper portion of the casing, and an ejection opening for ejecting a gaseous metal on one side of the plate, the upper cover having a refrigerant passage formed therein.

According to the present invention, it is possible to block the heat generated while heating the metal boat to prevent the continuous temperature rise in the chamber.

Therefore, there is an effect that can protect the accessories and the substrate formed from a material having a weak heat resistance, in particular, a heat resistance, such as O-rings in the chamber from high heat.

Metal boat. Thermal barrier. Euro. Sealing member. Top cover.

Description

Thermal barrier device for metal boats {Apparatus for bloking thermal of metal boat}

1 is a perspective view of a heat shield of the metal boat according to the present invention.

FIG. 2 is an exploded perspective view of the heat shield shown in FIG. 1.

Figure 3 is an exploded perspective view of the upper cover of the heat shield of the metal boat according to the invention.

Figure 4 is a side view of the coupling state of the top cover shown in FIG.

5 is a state diagram used in the heat shield of the metal boat according to the invention.

** Explanation of symbols for main parts of drawings **

100: casing 110: body

120: Euro 130: flange

200: upper cover 210: plate

220: Euro 221: two-stage groove

222: sealing member 230: spout

300: metal boat mounting member 310: extension portion

320: outlet 330: flange

340: support portion 400: metal boat

410: cavity

The present invention relates to a metal boat heat shield device, and more particularly, to a heat shield device for a metal boat that can block the heat generated while heating the metal boat to prevent a continuous temperature rise in the chamber.

Recently, with the rapid development of information and communication technology and the expansion of the market, flat panel displays have been in the spotlight as display devices. Such flat panel displays include liquid crystal displays, plasma display panels, organic light emitting diodes, and the like.

Among them, the organic light emitting device has very good advantages such as fast response speed, lower power consumption than conventional liquid crystal display, light weight, ultra thin without needing a back light device, and high brightness. As a result, it is attracting attention as a next generation display device.

In the organic light emitting device, an anode film, an organic thin film, and a cathode film are sequentially coated on a substrate, and a suitable energy difference is formed in the organic film by emitting a voltage between the anode and the cathode, thereby emitting light by itself. That is, the electrons and holes injected are recombined, and the excitation energy remaining as light is generated. In this case, since the wavelength of light generated according to the amount of the dopant of the organic material may be adjusted, full color may be realized.

Although the detailed structure of the organic light emitting diode is not shown in the drawing, an anode, a hole injection layer, a hole transport layer, an emission layer, and an electron transport layer are deposited on a substrate. A layer, an electron injection layer, and a cathode are stacked in this order. In this case, ITO (Indium Tin Oxide) having a small sheet resistance and good permeability is mainly used as the anode. And an organic thin film is composed of a hole injection layer, a hole transport layer, light emitting layer, an electron transport layer, the electron injection layer, the multi-layer to increase the light emitting efficiency, an organic material used for the light emitting layer is Alq _3, TPD, PBD, m-MTDATA, TCTA. In addition, a LiF-Al metal film is used as the cathode.

Therefore, in order to manufacture an organic light emitting device, LiF-Al metal used as a cathode must be deposited. Referring to Figure 1 describes a conventional metal deposition apparatus as follows.

In the state in which the substrate is brought into the chamber, a solid evaporation source such as an aluminum wire or a block is supplied to the metal boat, and the metal boat is heated by a heater to vaporize the evaporation source and deposited on the substrate.

In the conventional metal deposition apparatus as described above, the metal boat must be heated in order to vaporize the evaporation source, but the exhaust apparatus is not provided in the chamber. Therefore, while the deposition process is performed, the temperature in the chamber continues to rise, so that various components included in the chamber are damaged by heat. In particular, the material of the O-ring or sealing member is more lethal because it is formed of a material having a weak heat resistance, there was a problem that adversely affects the organic thin film patterned on the substrate.

The present invention has been made to solve the above problems, an object of the present invention is to provide a thermal cut-off device of a metal boat that can block the heat generated while heating the metal boat to prevent the continuous temperature rise in the chamber. .

In order to solve the above technical problem, the heat shield device of the metal boat according to the present invention has an upper and a lower body and an inner space is provided, and a refrigerant passage is formed in the body, wherein the metal boat is located in the inner space. Casing; And an upper cover having a plate coupled to be detachably attached to an upper portion of the casing, and an ejection opening for ejecting a gaseous metal on one side of the plate, the upper cover having a refrigerant passage formed therein.

In addition, the refrigerant flow path formed in the casing or the upper cover is preferably formed by forming a groove recessed in a plurality of steps, the sealing member of the shape corresponding to the upper end of the plurality of stepped grooves.

In addition, the metal boat mounting member is provided in the inner space of the casing, it is preferable that the extension portion surrounding the cavity of the metal boat mounted on the metal boat mounting member is further provided.

Hereinafter, with reference to the accompanying drawings will be described in detail the configuration and operation of the heat shield device of the metal boat according to the present invention.

1 and 2, the heat shield of the metal boat according to the present invention is composed of a casing 100 and the upper cover 200 surrounding the metal boat.

The casing 100 is formed of a body 110 having an upper and a lower opening in an approximately rectangular parallelepiped shape. That is, it is formed with four side walls. In addition, the wall of the body 110 is formed with a refrigerant passage 120 in communication in a zigzag shape. The metal boat is mounted in the inner space of the casing 100. In addition, a flange 130 is formed below the casing 100 so as to be fixed to the lower inner wall of the vacuum chamber.

The upper cover 200 is detachably coupled to an upper surface of the casing 100 having an upper portion thereof, and has a shape of a plate 210 having a thickness. In the center of the plate 210, a spout 230 for ejecting a metal in a vapor state is formed. Like the casing 100, the plate 210 has a refrigerant passage 220 formed therein.

As shown in the enlarged view of FIG. 2, the refrigerant passage 220 of the upper cover 200 forms a recess 221 recessed in the plate 210 to have two steps. The groove 221 is sealed by welding the sealing member 222 having a shape such as an area and a thickness corresponding to the upper groove among the steps of the step. As a result, the lower groove of the two steps is a refrigerant flow path 220. The groove 221 having the two-step height can be easily formed by using a gun drill or the like. The refrigerant passage 120 formed in the body 110 of the casing 100 may also be formed in the same manner as described above.

In particular, the upper cover 200 is fixed to the casing 100 by fastening a plurality of bolts in a state seated on the upper surface of the casing 100, it is also possible to remove.

Refrigerant flow paths 120 and 220 of the casing 100 and the upper cover 200 are connected to a refrigerant inlet and a refrigerant outlet (not shown) for introducing or discharging the refrigerant.

3 and 4, a metal boat mounting unit 300 for mounting the metal boat 400 is further added to the inner space of the casing 100. The metal boat mounting portion 300 is a plate-shaped support portion 340 for mounting the metal boat 400 in the inner space of the casing 100, the ejection openings of the support portion 340 and the upper cover 200 ( An extension portion 310 interposed between the 230 and a flange 320 for fixing the extension portion 310 and the support portion 340 to the upper cover 200. In particular, the extension 310 is formed to surround the cavity 410 of the metal boat 400, the mounting hole 331 for mounting the metal boat 400 is cut.

Referring to Figure 5 will be described in detail the operation of the thermal cutoff device of the metal boat according to the present invention.

The casing 100 is fixed to the lower inner wall of the vacuum chamber 10 by fastening a bolt to the flange 130, and is also fastened to the upper cover 200 by fastening the bolt. An airtight holding member (not shown) may be interposed on the contact surface between the casing 100 and the upper cover 200 and the contact surface between the casing 100 and the chamber 10. In this state, the metal boat 400 is mounted on the support part 340 of the mounting part 300, and power is applied to the electrode part 420 to heat the metal boat 400 to melt the metal. As such, while heating the metal boat 400, the refrigerant is circulated through the inlets and outlets connected to the refrigerant passages 120 and 220 of the casing 100 and the upper cover 200. As a result, heat generated while heating the metal boat 400 may be blocked to prevent the temperature of the entire vacuum chamber 10 from rising.

In addition, molten metal may melt and flow in the cavity 410 of the metal boat 400 by an appropriate amount or more. In this case, since the extension 310 surrounds the cavity 410, the chamber 10 may flow. Overflowing to the lower part of is prevented.

According to the present invention, it is possible to block the heat generated while heating the metal boat to prevent the continuous temperature rise in the chamber.

Therefore, there is an effect that can protect the accessories and the substrate formed from a material having a weak heat resistance, in particular, a heat resistance, such as O-rings in the chamber from high heat.

In addition, while guiding the metal in the gaseous state ejected from the metal boat, there is an effect of preventing the molten metal from overflowing.

Claims (4)

A casing having an upper and a lower opening and an inner space formed therein, and a refrigerant passage formed in the body, wherein a metal boat is located in the inner space or the lower portion of the casing; And The upper cover is detachably coupled to the upper portion of the casing, and a gas outlet is provided on one side of the plate gas ejection, the upper cover formed with a refrigerant flow path; The refrigerant flow path formed in the casing or the upper cover is formed by forming a groove recessed in a plurality of steps, the heat shield device of the metal boat, characterized in that formed by combining the sealing member of the shape corresponding to the upper end of the plurality of stepped grooves. delete The method of claim 1, Heat shielding device of a metal boat, characterized in that the metal boat mounting member is provided in the inner space of the casing. The method of claim 3, wherein Heat shielding device of a metal boat, characterized in that the extension further surrounding the cavity of the metal boat mounted to the metal boat mounting member.

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