KR102132297B1 - Swing type in-line manufacturing system for organic light emitting device - Google Patents

Abstract

The present invention relates to a swing type inline manufacturing system of an organic light emitting device capable of depositing various organic materials, comprising: a first organic material deposition unit capable of depositing a first organic material on a target substrate; A transfer device for transferring the target substrate; A second organic material deposition unit capable of depositing a second organic material on the target substrate transferred by the transfer device; including, the first organic material deposition unit, a first deposition chamber; And a linear deposition device for an organic light-emitting device that is installed inside the first deposition chamber and is long installed from a rotational axis so that it can swing onto the target substrate. The linear deposition device for an organic light-emitting device includes: A space for accommodating or guiding the first organic material is formed, and an organic material outlet through which the evaporated first organic material is discharged is formed on one side so that the first organic material can be deposited on the substrate, and is formed to be long in the longitudinal direction as a whole. Become linear body; And a planar heater attached planarly to the surface of the linear body so as to heat the first organic material.

Description

Swing type in-line manufacturing system for organic light emitting device}

The present invention relates to a swing type inline manufacturing system of an organic light emitting device, and more particularly, to a swing type inline manufacturing system of an organic light emitting device capable of depositing various organic materials.

In general, an organic light emitting device injects electrons and holes into the organic light emitting layer interposed between these two electrodes from a cathode injecting electrons and an anode injecting holes, respectively. , It is a display device that emits light when the exciton, in which the injected electrons and holes are combined, falls from the excited state to the ground state.

Because the organic light emitting device is driven by this principle, it has recently been attracting attention as a flat panel display device because it has the advantage of reducing the volume and weight of the device because it does not require a separate light source unlike the conventional thin film liquid crystal display device.

Typically, the organic light emitting layer of the organic electroluminescent device includes a plurality of functional layers (hole injection layer, hole transport layer, light emitting layer, electron transport layer, electron injection layer, etc.), and light emission through combination and arrangement of such functional layers Performance will be further improved.

In the manufacture of an organic light emitting device having the above-described configuration, it is common that the organic light emitting layer is formed by depositing an organic light emitting material on a substrate using a thermal vacuum deposition process.

The organic light emitting material forming the organic light emitting layer is located in a solid state inside the crucible including heating means capable of heating the entire body on the bottom and side surfaces. At this time, when the heating means provided in the crucible moves inside the chamber in which the vacuum is maintained to heat the crucible, the organic light emitting material located inside the crucible is sublimated by heating. The organic light-emitting material thus sublimated is evaporated through the outlet of the crucible, and is selectively deposited on the substrate through a shadow mask having a plurality of openings located above the outlet of the crucible, thereby forming an organic emission layer on the substrate.

The crucible used to deposit the organic light-emitting material using the thermal vacuum deposition on the substrate is characterized in that it is heated to a high temperature by a heating means mounted therein, so that it is not deformed at high temperature and heat transfer to the source material is smooth. It is preferably made of a relatively light material so that cleaning can proceed smoothly after the thermal vacuum deposition process. Therefore, the crucible is usually made of a ceramic material, graphite.

It is an object of the present invention that various organic substances can be sequentially deposited in a swing type, and wastes by preventing the organic light-emitting material sublimated in the crucible from being rapidly cooled in the process of being guided in the direction of the target substrate and being trapped elsewhere than the target substrate. It is possible to reduce the organic matter, improve the deposition efficiency of expensive organic materials, and facilitate the induction of sublimated organic luminescent materials to improve the deposition properties to the target substrate, and make the width of the extension narrower than the width of the base. By improving the deposition uniformity of the deposited organic material layer, it is possible to improve the ease of installation, adhesion, durability and thermal uniformity of parts when manufacturing parts by using a flexible surface heater, and flexible glass that is a clean material It is to provide a swing-type inline manufacturing system of an organic light emitting device that can prevent product defects by preventing the generation of foreign substances due to a heating layer by using a layer in a planar heater. However, these problems are exemplary, and the scope of the present invention is not limited thereby.

Swing type inline manufacturing system of an organic light emitting device according to the spirit of the present invention for solving the above problems, a first organic material deposition unit capable of depositing a first organic material on a target substrate; A transfer device for transferring the target substrate; And a second organic material deposition unit capable of depositing a second organic material on the target substrate transferred by the transfer device, wherein the first organic material deposition unit comprises: a first deposition chamber; And a linear deposition device for an organic light-emitting device that is installed inside the first deposition chamber and is long installed from a rotational axis so that it can swing onto the target substrate. The linear deposition device for an organic light-emitting device includes: A space for accommodating or guiding the first organic material is formed, and an organic material outlet through which the evaporated first organic material is discharged is formed on one side so that the first organic material can be deposited on a substrate, and is formed long in the longitudinal direction as a whole. Become linear body; And a planar heater attached planarly to the surface of the linear body so as to heat the first organic material.

In addition, according to the present invention, the linear body has a first cylindrical shape or a cylindrical shape as a whole, the base portion of which a slit is formed on one side; An extension part having an overall quadrangular shape having a second width narrower than the first width, and having an opening formed at one side to be connected to the slit of the base part; And a nozzle installed at the organic outlet of the extension.

In addition, according to the present invention, the planar heater comprises: a first glass layer in the form of a flexible film; It is formed on the first glass layer, the heating layer in the form of a flexible film that is heated by receiving power; And a second glass layer formed on the heating layer and in the form of a flexible film.

Further, according to the present invention, a sealing portion connecting the first glass layer and the second glass layer may be formed so that the heating layer is sealed by the first glass layer and the second glass layer.

Further, according to the present invention, the sealing portion may be a third glass layer in the form of a flexible film.

In addition, the linear type manufacturing apparatus of the organic light emitting device according to the present invention horizontally supports the linear body downwardly so that the organic material can be deposited downward on the substrate through the organic material outlet, and the organic material evaporated in the vertical direction. An organic material supply pipe in which a bent portion is formed to be supplied and supplied to the inner space of the linear body in a horizontal direction; And a crucible vertically connected to the organic material supply pipe and heating the organic material source therein.

In addition, according to the present invention, the organic material supply pipe includes a first organic material supply pipe installed on one side of the linear body, and the crucible may include a first crucible connected to the first organic material supply pipe; .

In addition, the linear type manufacturing apparatus of the organic light emitting device according to the present invention, the linear body swinging the substrate while the organic body to be deposited so that the organic body or the substrate is transported relative to each other; further comprising a can do.

As described above, in the swing-type inline manufacturing system of the organic light emitting device of the present invention, various organic materials can be sequentially deposited in a swing type, and the organic light-emitting material sublimated in the crucible is rapidly in the process of being directed toward the target substrate. By cooling and preventing trapping elsewhere other than the target substrate, it is possible to reduce wasted organic matter, improve the deposition efficiency of expensive organic matter, and facilitate the induction of sublimated organic luminescent materials to improve the deposition properties to the target substrate. It can be improved, and the width of the extension can be made narrower than the width of the base to improve the deposition uniformity of the deposited organic layer, and the ease of installation, adhesion, and durability of the parts when manufacturing parts using a flexible surface heater And by improving the thermal uniformity, by using a clean glass material, a flexible glass layer to prevent the occurrence of foreign matter due to the heating layer has the effect of preventing product defects. Of course, the scope of the present invention is not limited by these effects.

1 is a side view conceptually showing a swing type inline manufacturing system of an organic light emitting device according to some embodiments of the present invention.
FIG. 2 is a plan view conceptually showing a swing type inline manufacturing system of the organic light emitting device of FIG. 1.
FIG. 3 is an external perspective view showing a linear type manufacturing apparatus of an organic light emitting device of the swing type inline manufacturing system of the organic light emitting device of FIG. 1.
4 is an exploded perspective view of a component of a linear type manufacturing apparatus of an organic light emitting device of the swing type inline manufacturing system of the organic light emitting device of FIG. 1.
5 is a cross-sectional view showing a planar heater of a linear type manufacturing apparatus of an organic light emitting device of the swing type inline manufacturing system of the organic light emitting device of FIG. 1.
FIG. 6 is a perspective view of a use state showing a linear type manufacturing apparatus of an organic light emitting device of the swing type inline manufacturing system of the organic light emitting device of FIG. 1.
7 is a side view showing a linear type manufacturing apparatus of an organic light emitting device of the swing type inline manufacturing system of the organic light emitting device of FIG. 6.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are provided to more fully describe the present invention to those of ordinary skill in the art, and the following embodiments can be modified in various other forms, and the scope of the present invention is as follows. It is not limited to the Examples. Rather, these embodiments are provided to make the present disclosure more faithful and complete, and to fully convey the spirit of the present invention to those skilled in the art. In addition, the thickness or size of each layer in the drawings is exaggerated for convenience and clarity of explanation.

The terminology used herein is used to describe a specific embodiment and is not intended to limit the present invention. As used herein, singular forms may include plural forms unless the context clearly indicates otherwise. Also, as used herein, “comprise” and/or “comprising” specifies the shapes, numbers, steps, actions, elements, elements and/or the presence of these groups. And does not exclude the presence or addition of one or more other shapes, numbers, actions, elements, elements and/or groups.

Hereinafter, embodiments of the present invention will be described with reference to the drawings schematically showing ideal embodiments of the present invention. In the drawings, for example, depending on the manufacturing technique and/or tolerance, deformations of the illustrated shape can be expected. Therefore, embodiments of the inventive concept should not be interpreted as being limited to a specific shape of the region shown in this specification, but should include, for example, a change in shape resulting from manufacturing.

Hereinafter, a swing type inline manufacturing system of an organic light emitting device according to various embodiments of the present invention will be described in detail with reference to the drawings.

1 is a side view conceptually illustrating a swing type inline manufacturing system 2000 of an organic light emitting device according to some embodiments of the present invention. And, FIG. 2 is a plan view conceptually showing the swing type inline manufacturing system 2000 of the organic light emitting device of FIG. 1.

First, as shown in FIGS. 1 and 2, the swing type inline manufacturing system 2000 of the organic light emitting device according to some embodiments of the present invention can largely deposit the first organic material on the target substrate 1. A first organic material deposition unit (E1), a second organic material deposition unit (E2) capable of depositing a second organic material on the target substrate (1), and a third organic material may be deposited on the target substrate (1). It may include a third organic material deposition unit (E3) and the transfer device 50 for transferring the target substrate (1).

Here, the first organic material deposition unit (E1) is installed inside the first deposition chamber (C1) and the first deposition chamber (C1), on the target substrate (1) by the motor (MT) of Figure 6 It may include a linear deposition device 400 for an organic light-emitting device that is installed long from the rotating shaft (S) so that it can swing.

Therefore, according to the swing type inline manufacturing system 2000 of the organic light emitting device of the present invention, as well as various organic materials, that is, R, G, and B light emitting layers, a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection Various organic materials constituting a layer can be sequentially deposited on the substrate by equipment inline.

In more detail, for example, the first organic material deposition unit E1 may be installed inside the first deposition chamber C1 and the first deposition chamber C1 and swing on the target substrate 1. So it may include a linear deposition device 400 for an organic light emitting device that is installed to extend from the rotating shaft (S) rotated by the motor (MT).

Here, the second organic material deposition unit E2 may also include a second deposition chamber C2 and a linear deposition device 200 for an organic light emitting device, and the third organic material deposition unit E3 may also be a third A deposition chamber C3 and a linear deposition device 300 for an organic light emitting device may be included.

3 is an external perspective view showing a linear type manufacturing apparatus 400 of an organic light emitting device of a swing type inline manufacturing system 2000 of an organic light emitting device according to some embodiments of the present invention. And, FIG. 4 is an exploded perspective view of a component of the linear type manufacturing apparatus 400 of the organic light emitting device of the swing type inline manufacturing system 2000 of the organic light emitting device of FIG. 1.

First, as illustrated in FIGS. 3 and 4, the linear type manufacturing apparatus 400 of an organic light emitting device according to some embodiments of the present invention may largely include a linear body 10 and a planar heater 20. Can.

For example, as illustrated in FIGS. 3 and 4, the linear body 10 is formed in a cylindrical shape in which an internal space A capable of accommodating organic substances for organic light emitting elements or guiding evaporated organic substances is formed. Can be

In addition, for example, as shown in FIGS. 3 and 4, the linear body 10 has an organic material outlet 10a through which the organic material evaporated on one side is discharged so that the organic material can be deposited on the substrate 1. It is formed, it can be formed long in the longitudinal direction as a whole.

More specifically, for example, as illustrated in FIG. 4, the linear body 10 is a cylindrical or square cylindrical shape having a first width W1, and a base portion on which a slit S is formed on one side. (11), the first width (W1) has a second width (W2) narrower than the overall shape of a rectangular cylinder, the opening (12a) is connected to the slit (S) of the base portion 11 on one side It may include an extended portion 12 formed and a nozzle 13 installed in the organic material outlet (10a) of the extended portion (12).

Here, the substrate 1 or the target substrate may be various substrates capable of forming an organic light emitting device, and the substrate 1 is partially deposited on the entire surface or a pattern can be formed using a mask M It can be deposited.

Therefore, the organic light-emitting material sublimated by the crucible, that is, the organic material is primarily stored inside the base portion 11 of the linear body 10 having a wider width, and when the pressure of the internal organic material is increased, it is relatively narrow. It can be moved directionally along the extension portion 12 having a width, thereby passing through the organic material outlet 10a and being guided in the direction of the substrate 1 by the nozzle.

The linear body 10 has sufficient strength and durability to support the planar heater 20 to be described later, and is not limited to the drawings and can be applied in a wide variety of shapes and types. In addition, the linear body 10 may be made of various materials such as metal, ceramic, resin, graphite, or the like, which has excellent thermal conductivity so that the heat energy received from the planar heater 20 can be transferred to the organic material.

On the other hand, for example, as shown in Figures 3 and 4, the planar heater 20 is attached to the surface of the linear body 10 so as to heat the organic material, it is flexible to be easily attached It may be a heater formed of a material.

Therefore, the planar heater 20 is not only capable of performing heating evenly over a large area, but also is made of a flexible material and can be actively attached along the surface of the linear body 10.

Therefore, the performance of the product can be greatly improved because the heat transfer efficiency and the thermal uniformity are superior to the method of attaching a heater made of a solid material.

In addition, due to the planar heater 20, the organic light-emitting material sublimated in the crucible to be described later is rapidly cooled in the process of being guided in the direction of the substrate 1 and is prevented from being trapped elsewhere except the substrate 1, which is wasted. It is possible to reduce organic substances, improve the deposition efficiency of expensive organic substances, and facilitate the induction of sublimated organic luminescent materials, thereby improving the deposition properties to the substrate 1, and The second width W2 may be made narrower than the first width W1 of the base 11 to improve the deposition uniformity of the deposited organic material layer, and parts using the planar heater 20 of a flexible material Ease of installation during manufacture, adhesion and durability of components and thermal uniformity can be improved.

5 is a cross-sectional view showing the planar heater 20 of the linear type manufacturing apparatus 400 of the organic light emitting device of the swing type inline manufacturing system 2000 of the organic light emitting device of FIG. 1.

More specifically, for example, as shown in FIG. 5, the planar heater 20 is formed on the first glass layer 21 and the first glass layer 21 in the form of a flexible film, It may be formed on the heating layer 23 in the form of a flexible film that is heated by receiving power and the heating layer 23, and may include a second glass layer 22 in the form of a flexible film.

In addition, for example, as shown in FIG. 5, the first glass layer 21 and the so that the heating layer 23 is sealed by the first glass layer 21 and the second glass layer 22. A sealing portion 24 connecting the second glass layer 22 may be formed.

The sealing part 24 may be a third glass layer 241 in a flexible film form, and the first glass layer 21, the second glass layer 22, and the second glass All of the layers 241 can be simultaneously made of the same material. However, it is not necessarily limited to this, and can be manufactured in a wide variety of ways.

The flexible glass layer may be made of a very thin glass layer that reinforces ductility without breaking, or may be manufactured by a method of forming a carbon bonding layer or adding various resin composites to further reinforce ductility to the glass layer. .

In addition, the heating layer 23 may be formed in the form of a heating wire, a heating planar body, a heating plate, a heating heating wire, etc. so that heat can be generated by receiving power, and the material of the heating layer 23 is, for example, resistance heating This can be made of a material such as nickel, chromium, copper, stainless steel, iron, chromium, alumina, molybdenum or a metal or alloy.

In addition, for example, in FIG. 4, although the planar heater 20 is installed only on the lower surface and the left and right sides of the linear body 10, the organic material is installed in the vicinity of the nozzle 13 as well as the front and rear surfaces. (1) can be sufficiently heated.

In addition, the planar heater 20 may be attached to the surface of several pieces instead of a single piece, and various adhesive materials having excellent thermal conductivity may be applied therebetween.

Therefore, the sealing part 24 can protect the heating layer 23 from external substances, and prevent foreign substances that may be generated in the heating layer 23 from leaking to the outside. It can make it possible to produce quality products.

FIG. 6 is a perspective view showing the use of the linear type manufacturing apparatus 400 of the organic light emitting device of the swing type inline manufacturing system 2000 of the organic light emitting device of FIG. 1, and FIG. 7 is a swing type inline of the organic light emitting device of FIG. 6. It is a side view showing the linear type manufacturing apparatus 400 of the organic light emitting element of the manufacturing system 2000.

6 and 7, the linear type manufacturing apparatus 400 of the organic light emitting device of the swing type inline manufacturing system 2000 of the organic light emitting device according to some embodiments of the present invention includes: The linear body 10 is horizontally supported downwardly so as to be deposited downward on the substrate 1 through the organic material outlet 10a, and the organic material evaporated in the vertical direction is supplied to the linear body 10 to be The organic material supply pipe 30 in which the bent portion R is formed so as to be supplied in the horizontal direction to the interior space A and the organic material supply pipe 30 are vertically connected, and a crucible 40 for heating the organic material source therein It may further include.

More specifically, for example, as shown in FIG. 6, the organic material supply pipe 30 may include a first organic material supply pipe 31 installed on the left side of the linear body 10.

In addition, for example, as shown in FIG. 6, the crucible 40 may include a first crucible 41 connected to the first organic material supply pipe 31.

Therefore, the linear deposition apparatus 400 for the organic light emitting device can be swinged onto the target substrate 1 by the motor MT, and while being swinged or swinged, organic matter can be deposited downward. have.

In addition, for example, as shown in Figure 7, the linear type manufacturing apparatus 400 of the organic light emitting device according to some embodiments of the present invention, the linear body 10 swings the substrate 1 while the It may further include a transfer device 50 for transferring the substrate 1 relative to each other so that the organic material can be deposited.

Various devices such as various transport arms, transport robots, transfers, and conveyors may be applied to the transport device 50. In the drawings, a substrate transport device for transporting the substrate 1 is illustrated. In addition, the linear body 10 ) Can be applied to a variety of transfer devices.

Accordingly, as shown in FIGS. 6 and 7, the organic material sublimated from the crucible 40 while the substrate 1 or the linear body 10 is relatively transferred to each other by the transfer device 50 is the It can be supplied to the linear body 10 along the organic material supply pipe 30, the organic material is guided in the direction of the extending portion 12 from the base portion 11 of the linear body 10, the nozzle 13 ) May be deposited downward on the substrate 1.

Therefore, by using the linear type manufacturing apparatus 400 of the organic light emitting device according to some embodiments of the present invention, the organic material can be deposited on the substrate 1 in a top-down manner without running the bottom-up substrate as it is. .

That is, the organic light-emitting material sublimated in the crucible 40 is rapidly cooled in the process of being guided downward in the direction of the substrate 1 to prevent trapping elsewhere other than the target substrate, thereby reducing wasted organic matter and being flexible By using the planar heater 20 of the material to improve the ease of installation, adhesion and durability and thermal uniformity of the parts when manufacturing parts, and using a clean glass flexible glass layer for the planar heater 20 Product defects can be prevented by preventing the generation of foreign substances due to the heating layer.

The present invention has been described with reference to the embodiments shown in the drawings, but these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

1: Target substrate
M: Mask
1-1: First organic matter
1-2: Second organic matter
1-3: Third organic matter
E1: first organic material deposition unit
E2: second organic material deposition unit
E3: third organic material deposition unit
C1: first deposition chamber
C2: Second deposition chamber
C3: Third deposition chamber
10: linear body
10a: organic matter outlet
A: interior space
11: Base part
12: Extension
12a: opening
13: nozzle
20: planar heater
S: Slit
21: first glass layer
22: second glass
23: heating layer
24: sealing part
241: third glass layer
R: bend
30: organic matter supply pipe
31: 1st organic material supply pipe
40: crucible
41: 1st crucible
50: conveying device
MT: Motor
S: rotating shaft
400, 500, 600: an organic light emitting device linear type manufacturing apparatus
2000: Swing type inline manufacturing system of organic light emitting device

Claims (8)

A first organic material deposition unit capable of depositing a first organic material on a target substrate;
A transfer device for transferring the target substrate;
It includes; a second organic material deposition unit capable of depositing a second organic material on the target substrate transferred by the transfer device;
The first organic material deposition unit,
A first deposition chamber; And
Included in the linear deposition apparatus for an organic light emitting device is installed inside the first deposition chamber, is installed long from the rotating shaft so that it can swing on the target substrate;
The linear vapor deposition device for an organic light emitting device,
A space for accommodating or guiding the first organic material is formed therein, and an organic material outlet through which the evaporated first organic material is discharged is formed on one side of the substrate so that the first organic material can be deposited, and in the longitudinal direction as a whole A long linear body; And
Includes a surface heater attached to the surface of the linear body in a plane so as to heat the first organic material;
The linear vapor deposition device for an organic light emitting device,
Deposits organic matter top down while swinging or while swinging,
The linear body,
A base having a first width and having a first cylindrical shape, a slit on one side;
An extension part having an overall quadrangular shape having a second width narrower than the first width, and an opening portion formed on one side to be connected to the slit of the base part; And
A nozzle installed at the organic outlet of the extension;
Including,
The planar heater,
A first glass layer in the form of a flexible film;
It is formed on the first glass layer, the heating layer in the form of a flexible film that is heated by receiving power; And
A second glass layer formed on the heating layer and in the form of a flexible film;
Including, swing type inline manufacturing system of an organic light emitting device. delete delete According to claim 1,
A swing type inline manufacturing system for an organic light emitting device, wherein a sealing portion connecting the first glass layer and the second glass layer is formed so that the heating layer is sealed by the first glass layer and the second glass layer. The method of claim 4,
The sealing portion, the third glass layer in the form of a flexible film, swing type inline manufacturing system of an organic light emitting device. According to claim 1,
The linear body is horizontally supported downwardly so that the organic material can be deposited downward on the substrate through the organic material outlet, and the organic material evaporated in the vertical direction is supplied and bent to be supplied horizontally to the inner space of the linear body. An organic material supply pipe in which the addition is formed; And
A crucible vertically connected to the organic material supply pipe and heating an organic material source therein;
Further comprising, swing type inline manufacturing system of an organic light emitting device. The method of claim 6,
The organic material supply pipe includes a first organic material supply pipe installed on the left side of the linear body.
The crucible, the first crucible connected to the first organic material supply pipe; including, swing type inline manufacturing system of an organic light emitting device. According to claim 1,
A transfer device for transferring the linear body or the substrate relative to each other so that the organic material can be deposited while the linear body swings the substrate;
Further comprising, swing type inline manufacturing system of an organic light emitting device.

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