KR101084333B1 - Deposition source for manufacturing organic electroluminescence display panel and deposition apparatus having the same - Google Patents

Abstract

Evaporation source for producing an organic light emitting display panel according to the present invention is a crucible in which the organic material is accommodated; A nozzle part formed of an induction heating material which is discharged toward the substrate by heating the evaporated organic material in the crucible; And an induction heating wire wound around the nozzle to induce the induced current.

Description

Evaporation source for organic electroluminescent display panel and vapor deposition apparatus including the same {DEPOSITION SOURCE FOR MANUFACTURING ORGANIC ELECTROLUMINESCENCE DISPLAY PANEL AND DEPOSITION APPARATUS HAVING THE SAME}

The present invention relates to an evaporation source for manufacturing an organic light emitting display panel for depositing an organic material or a metal material on a substrate, and a deposition apparatus including the same.

Recently, with the rapid development of information and communication technology and the expansion of the market, flat panel displays have been in the spotlight as display devices. Such flat panel display devices include liquid crystal displays, plasma display panels, and organic electroluminescence display panels.

Such a display element, such as an organic light emitting display panel, has a structure in which an organic thin film having a light emitting function or the like is interposed between a cathode electrode and a cathode electrode of a thin film structure. In the manufacture of the organic light emitting display panel, a process of depositing an organic material and a metal material for forming the organic thin film on a substrate is performed. As a method of forming an organic thin film of the organic light emitting display panel, a vacuum deposition method is widely used.

The vacuum deposition method is a method of forming a thin film having a predetermined thickness on a substrate by applying heat to an evaporation source provided in a vacuum chamber using a resistance heater to evaporate the organic material or metal material contained therein toward the substrate.

However, in the case of organic matter, the solidified matter is cooled and solidified while passing through the nozzle part of the evaporation source, and the solidified organic matter blocks the nozzle hole. In order to prevent such a solidification phenomenon, an attempt has recently been made to heat a nozzle part by winding a resistance coil for preventing solidification in the nozzle part. However, since the nozzle portion is heated by heat conducted from the resistive coil, the temperature of the resistive coil is higher than that of the nozzle portion. That is, the resistive coil must be heated to a temperature higher than the temperature at which the nozzle portion is to be heated, and the high heat of the resistive coil is radiated to the substrate and the mask to heat the substrate and the mask.

In particular, since the resistive coil wound around the nozzle part is located close to the substrate and the mask, high heat radiant heat is transmitted to the substrate and the mask, thereby causing thermal deformation of the substrate and the mask. Not only the precision of the process is lowered but also the defect rate of the substrate is increased.

In addition, there is an attempt to install the heat shield plate on one side of the evaporation source facing the substrate to prevent the high temperature heat of the nozzle portion from being transferred to the substrate or the mask, but even if the heat shield plate is installed, radiant heat of the resistance heater wound around the nozzle unit Silver is not transferred to the substrate or mask as it is and does not prevent the substrate and mask from heating up.

Meanwhile, a process of depositing a metal material on a substrate is required to manufacture an organic light emitting display panel. A metal deposition source heated by a resistive heater is used to deposit such a metal material on a substrate. However, since a resistive heater is easily heated by a high temperature because the metal material must be heated to a high temperature (about 1700 ° C.) compared to an organic material. Deterioration and disconnection have a short lifespan.

The present invention has been made in view of the foregoing, and includes an evaporation source for manufacturing an organic light emitting display panel which can prevent the substrate or mask from being heated while effectively preventing the deposition material from solidifying in the nozzle portion. Its purpose is to provide a deposition apparatus.

Another object of the present invention is to provide an evaporation source for manufacturing an organic light emitting display panel which can extend the life of the evaporation source, and a deposition apparatus including the same.

Evaporation source for manufacturing an organic light emitting display panel according to the present invention for achieving the object as described above is a crucible containing an organic material; A nozzle part formed of an induction heating material which is discharged toward the substrate by heating the evaporated organic material in the crucible; And an induction heating wire wound around the nozzle to induce the induced current.

According to an embodiment of the present invention, a hollow part is formed in the induction heating wire, and a cooling fluid flows through the hollow part.

In addition, the induction heating material is an intermetallic compound (IMC) including ceramic, boron nitride (BN) and titanium (Ti).

According to another embodiment of the present invention, the crucible may include an accommodating part in which an organic material is accommodated; And a guide part provided in an upper and lower direction on the upper part of the accommodating part to guide the organic material evaporated from the accommodating part to the nozzle part, wherein the induction heating wire is wound around the nozzle part. Induction heating wire; And a second induction heating wire wound around the guide unit, wherein the first and second induction heating wires are supplied with current by different high frequency power sources.

On the other hand, the object as described above is a metal material is accommodated, is formed of an induction heating material to be heated by an induction current to evaporate the metal material, the nozzle portion for discharging the evaporated metal material toward the substrate is provided Crucible; And an induction heating wire wound around the crucible so as to induce an induction current in the crucible, which may be achieved by an evaporation source for manufacturing an organic light emitting display panel.

In addition, the above object is a vacuum chamber in which the substrate is disposed; An evaporation source disposed in the vacuum chamber to deposit organic material on the substrate, wherein the evaporation source includes a crucible in which organic material is accommodated; A nozzle unit provided in the crucible so as to face the substrate, the organic material heated and evaporated from the crucible being discharged toward the substrate and formed of an induction heating material heated by an induction current; And an induction heating wire wound around the nozzle unit to induce the induced current to the nozzle unit.

According to the problem solving means described above, by heating the nozzle portion by winding the induction heating wire to the nozzle portion formed of the induction heating material, it is possible to reduce the heat transferred to the substrate and the mask while preventing the nozzle portion from being clogged by the organic material. It is possible to prevent the substrate and the mask from being thermally deformed.

In addition, by forming a hollow portion in which a cooling fluid flows inside the induction heating wire, it is possible to significantly lower the temperature of the induction heating wire, thereby minimizing heat transferred to the substrate and the mask, thereby reducing the thermal deformation of the substrate and the mask. It can be prevented at the source.

In addition, by using an intermetallic compound (IMC) including ceramic, boron nitride (BN) and titanium (Ti) as the induction heating material, the organic material is prevented from reacting with the nozzle part. It is possible to prevent the organic material to be deposited on the substrate to be deteriorated or contaminated, thereby reducing the defective rate of the organic light emitting display panel.

Meanwhile, in a vertical evaporation source in which the crucible is formed of a receiving portion and a guide portion, each of the nozzle portion and the guide portion is wound by heating each of the first and second induction heating wires connected to different high frequency power supplies, thereby heating the thermal deformation of the substrate and the mask. In addition, the temperature of the nozzle unit and the guide unit can be controlled separately, thereby improving deposition efficiency and reducing power consumption.

On the other hand, by heating the evaporation source for depositing a metal material with an induction heating wire, it is possible to prevent the phenomenon that the resistance heater is easily damaged by high heat, thereby extending the life of the evaporation source.

1 is a view schematically showing an evaporation source for manufacturing an organic light emitting display panel according to an embodiment of the present invention;
2 is an enlarged perspective view of the nozzle unit of FIG. 1;
3 is a cross-sectional view taken along line III-III of FIG. 2;
4 is a view schematically showing an evaporation source for manufacturing an organic light emitting display panel according to another embodiment of the present invention;
5 is a view schematically showing an evaporation source for manufacturing an organic light emitting display panel according to another embodiment of the present invention;
FIG. 6 is a view schematically illustrating a deposition apparatus for manufacturing an organic light emitting display panel to which the evaporation source of FIG. 5 is applied.

Hereinafter, an evaporation source for manufacturing an organic light emitting display panel and a deposition apparatus including the same according to an embodiment of the present invention will be described in detail.

1 to 3, an evaporation source according to an embodiment of the present invention is for evaporating an organic material and depositing the same on a substrate 1, facing a crucible 10 in which an organic material is accommodated, and facing the substrate 1. To include a plurality of nozzle unit 20 provided on one surface of the crucible 10, and the induction heating wire 30 is wound around the nozzle unit (20).

The crucible 10 is provided with a resistance heating unit 11, and the organic material contained in the crucible 10 is heated and evaporated by the resistance heating unit 11. The organic material evaporated from the crucible 10 is discharged to the substrate 1 through the nozzle unit 20 and deposited on the substrate 1. Of course, the substrate 1 is integrated with a mask to form an organic thin film having a predetermined pattern.

Conventionally, the evaporated organic material is cooled while passing through the nozzle part 20, and the cooled organic material is solidified to block the nozzle part 20. In order to solve this problem, there has been an attempt to heat the nozzle unit 20 by the resistance heating wire, but since the resistance heating wire is first heated and then conducts heat to the nozzle unit 20, the nozzle unit 20 is used. Not only the efficiency of heating is lowered, but also high radiation heat generated from the resistance heating wire is directly transmitted to the substrate 1 or the mask, which may cause various problems such as thermal deformation of the substrate 1 or the mask. In view of this point, the present embodiment adopts a method of winding the induction heating wire 30 in the nozzle unit 20 to directly heat the nozzle unit 20.

For the induction heating, the nozzle unit 20 is made of a material that is heated by an induced current, that is, an induction heating material having a constant electric conductivity. As the induction heating material, an intermetallic compound (IMC), silicon carbide (SiC, silicon carbide), graphite, or the like may be used. In this embodiment, the nozzle unit 20 is formed of an intermetallic compound. More specifically, the nozzle unit 20 is formed of an intermetallic compound containing a ceramic, boron nitride (BN, Boron Nitride), titanium (Ti) component. The intermetallic compound composed of ceramic, boron nitride, and titanium is a material also called intermetallic ceramic, and is suitable for the nozzle unit 20 because it is not reactive with organic matter. On the other hand, although the nozzle unit 20 may be formed of graphite, graphite may not only cause carbon powder to contaminate organic matters, but also have side effects such that internal gas is released to the outside by heating.

The induction heating wire 30 is for heating the nozzle unit 20 by inducing a current to the plurality of nozzle units 20, and is wound around the plurality of nozzle units 20, and is wound on the high frequency power source 31. Electrically connected. When a high frequency current is supplied from the high frequency power supply 31 to the induction heating wire 30 by the above configuration, the induction heating wire 30 generates a magnetic field, and the magnetic field is applied to the nozzle unit 20. Will induce a differential current. As such, the nozzle unit 20 in which the secondary current is induced generates heat by its resistance component. Meanwhile, heat is generated in the nozzle unit 20, but high heat is not generated in the induction heating wire 30 by itself. Therefore, it is possible to minimize the radiant heat transmitted to the substrate 1 or the mask by the existing resistance heating wire. In particular, since the conventional resistance heating wire heats the nozzle part in a conductive manner, the temperature of the resistance heating wire is formed higher than the temperature of the nozzle part, and the high resistance heating wire emits radiant heat to heat the substrate 1 or the mask. . However, as in this embodiment, by heating the nozzle unit 20 by the induction heating wire 30, the induction heating wire 30 is lower than the temperature of the nozzle unit 20, thereby the existing substrate ( 1) or to reduce the heat transferred to the mask.

 In particular, the induction heating wire 30, as shown in FIG. 3, is a tubular shape formed with a hollow portion 31 therein, the cooling portion (CF) such as cooling water flows through the hollow portion 31. . The induction heating wire 30 may be electrically connected to the high frequency power source 31 while the inside thereof is connected to a fluid pump not shown, and the fluid pump may be set to be driven while the evaporation source is driven. Can be. In addition, the cooling fluid CF may be designed to be cooled while passing through a radiator provided outside the deposition apparatus. As such, the temperature of the induction heating wire 30 is further lowered by the cooling fluid CF, thereby minimizing heat transferred to the substrate 1 and the mask.

In addition, the induction heating wire 30 may be wound to be in contact with the nozzle unit 20, but may be wound to be spaced apart from the nozzle unit 20. As such, when the induction heating wire 30 is wound in a state spaced apart from the nozzle unit 20, the induction heating wire 30 is free of heat conducted from the nozzle unit 20, and the temperature is further increased. Will be lowered. Therefore, the heat transferred to the substrate 1 and the mask can be minimized.

On the other hand, the heat shield plate 40 is installed on one surface of the crucible 10 facing the substrate (1). The heat transmitted to the substrate 1 and the mask from a part of the crucible 10 and the nozzle unit 20 by the heat shield plate 40 can be further reduced.

4 is a view schematically showing an evaporation source according to another embodiment of the present invention.

The evaporation source according to another embodiment of the present invention is a vertical type, for depositing organic material on the substrate 1 to be transferred vertically.

The crucible 110 of the vertical evaporation source is composed of an accommodating part 111 in which the organic material is accommodated and a guide part 112 for transferring the organic material heated and evaporated from the accommodating part 111 to the nozzle part 120. . The guide part 112 is formed with a plurality of nozzles 120 spaced apart from each other in the vertical direction. The accommodating part 111 is heated by the resistance heating part 114 to evaporate the received organic material.

In the case of such a vertical evaporation source, the heat generated from the nozzle unit 120 as well as the guide unit 112 also greatly affects the substrate 1 and the mask. For this reason, in another embodiment of the present invention, the plurality of nozzles 120 and the guides 112 are formed of induction heating materials, respectively, and the plurality of nozzles 120 and the guides 112, respectively. Each of the first and second induction heating wires (131, 132) was wound on. Each of the first and second induction heating wires 131 and 132 is connected to separate first and second high frequency power sources 141 and 142 to receive current independently. As such, the reason why the nozzle unit 120 and the guide unit 112 are wound by heating separate induction heating wires 131 and 132 is that the nozzle unit 120 and the guide unit 112 have a function thereof. As for this other part, the temperature must be controlled separately. Of course, the nozzle unit 120 and the guide unit 112 may be heated by one induction heating wire and one high-frequency power source, in this case, the part requiring the high temperature of the nozzle unit 120 and the guide unit 112 Since the high-frequency power supply must be controlled in accordance with the power consumption, the evaporated organic material may not be discharged to the outside of the crucible 110 in an optimal state.

5 is a view schematically showing an evaporation source according to another embodiment of the present invention.

In order to manufacture an organic light emitting display panel, not only organic materials but also metal materials such as aluminum and magnesium are deposited. However, in the case of a metallic material, since the crucible 210 is heated by a resistance heating wire, since the heating of the crucible 210 is performed by a high temperature, the resistance heating wire is easily damaged by the high temperature, and the life of the resistance heating wire becomes very short. If the heating wire is damaged, the life of the evaporation source is also shortened.

In order to solve this problem, as shown in FIG. 5, in the present embodiment, a crucible 210 in which a metal material is accommodated is formed of an induction heating material, and an induction heating wire 230 is formed in the crucible 210. Winding. That is, the crucible 210 is heated by the electric current induced by the induction heating wire 230, the induction heating wire 230 is not only in contact with the crucible 210 but the cooling fluid flows therein It is not heated to high temperatures. For this reason, the induction heating line 230 may not be damaged by heat, thereby extending its life, thereby extending the life of the evaporation source.

FIG. 6 schematically shows a deposition apparatus to which an evaporation source is applied according to an embodiment of the present invention, in which an evaporation source 4 is disposed in a vacuum chamber 3 in which a vacuum is formed by a vacuum device 2, and a substrate (above) is placed on the substrate. 1) and a mask are arranged. On the other hand, a shutter 5 is provided between the substrate 1 and the evaporation source 4 to selectively block the evaporation source 4 and the substrate 1.

One; Substrates 10, 110, 210; Crucible
20, 120; Nozzle parts 30 and 230; Induction heating wire
111; Receptacle 112; Guide part
131, 132; First and second induction heating wire

Claims (6)

A crucible adapted to receive the organics and to heat the organics; And
The nozzle unit is configured to discharge the organic material heated and evaporated from the crucible toward the substrate through the nozzle hole.
In the evaporation source for manufacturing an organic light emitting display panel comprising:
The nozzle part includes an induction heating material heated by an induction current to prevent the organic material from being solidified in the nozzle hole of the nozzle part and clogging the nozzle hole. Evaporation source for manufacturing an organic light emitting display panel, characterized in that the induction heating wire is wound. The method of claim 1,
The induction heating wire has a hollow portion formed therein, and an evaporation source for manufacturing an organic light emitting display panel, characterized in that a cooling fluid flows through the hollow portion. The method of claim 1,
The induction heating material is an evaporation source for manufacturing an organic electroluminescent display panel, characterized in that the intermetallic compound (IMC) comprising a ceramic, boron nitride (BN, Boron Nitride) and titanium (Ti) component. The method of claim 1,
The crucible is
Receiving unit containing the organic matter; And
It is provided in the vertical direction on the upper portion of the accommodating portion to guide the organic material evaporated from the accommodating portion, and includes a guide portion formed of induction heating material,
The induction heating wire,
A first induction heating wire wound around the nozzle unit; And
It includes a second induction heating wire wound around the guide portion,
The first and second induction heating wire is an evaporation source for manufacturing an organic light emitting display panel, characterized in that the current is supplied by different high-frequency power source. delete A vacuum chamber in which the substrate is disposed;
An evaporation source disposed in the vacuum chamber to deposit organic materials on the substrate,
The evaporation source,
A crucible adapted to receive the organics and to heat the organics; And
A nozzle unit provided in the crucible so as to face the substrate, and configured to discharge the organic substance heated and evaporated from the crucible toward the substrate through a nozzle hole;
In the deposition apparatus for manufacturing an organic light emitting display panel comprising:
The nozzle part includes an induction heating material heated by an induction current to prevent the organic material from being solidified in the nozzle hole of the nozzle part, and the nozzle part may be configured to induce the induction current. Deposition apparatus for manufacturing an organic light emitting display panel, characterized in that the induction heating wire is wound.

Images