KR102258507B1 - Vertical type evaporation device by induction heating - Google Patents

Abstract

The present invention discloses a vertical induction heating deposition apparatus. The disclosed deposition material is introduced into the inside, and a nozzle body for discharging the deposition material to the side, a crucible that is detachably provided on the nozzle body, and accommodates a material for deposition therein, the nozzle body and the It is characterized in that it comprises an induction heating unit that generates a high frequency to heat the crucible. Accordingly, in the present invention, when the deposition material is heated and deposited on a substrate, which is a processing object, in the organic light emitting diode (OLED) manufacturing process, deposition can be performed in a state in which the substrate is vertically arranged, thereby preventing the substrate from being distorted or warped. .

Description

VERTICAL TYPE EVAPORATION DEVICE BY INDUCTION HEATING

The present invention relates to a vertical induction heating deposition apparatus, and more particularly, in an organic light emitting diode (OLED) manufacturing process, when a deposition material is heated and deposited on a substrate to be processed, it can be deposited in a state in which the substrate is vertically arranged. Therefore, it relates to a vertical induction heating deposition apparatus capable of preventing the substrate from being warped or warped.

In general, as a method for melting a certain substance, there are an indirect heating method of heating a crucible in which the molten substance is accommodated, and a direct heating method of heating the molten substance itself.

The indirect heating method is a method of indirectly heating a material to be melted by induction heating a crucible having a melting temperature much higher than that of the material to be melted. In this method, since a crucible having a much higher melting point than the material to be melted must be used, the crucible and the high-temperature melt chemically react with each other to generate impurities in the melt, which makes the crucible weak.

The direct heating method is a method of heating the material to be melted by inducing itself. This melting method is one of the methods used for high-purity crystal growth because it can maintain a high purity of the melt. In particular, this melting method can be said to be very efficient when it is desired to melt a material having a melting point of 3000K or higher.

Crucible has been used as a means for heating and smelting a metal having a high melting temperature, a means for heating to mix various metal materials, and the like.

On the other hand, OLED is receiving worldwide spotlight as its energy and marketability have been proven not only as a post LCD display but also as a surface light emitting device for high-resolution displays. In particular, in recent years, as the VR (virtual reality) market grows, the need for high-resolution OLEDs used in VR products has also been highlighted, and for this reason, a technique for manufacturing organic thin film patterns of OLEDs is required more finely.

Also, as one of the OLED manufacturing processes, thermal evaporation deposition, in which an organic material is evaporated into a gas in a high vacuum to deposit an organic material on a silicon wafer (substrate), is mainly used. is produced in a dotted or linear shape, so it takes a lot of time to manufacture a large-area OLED device.

CRUCIBLE changes the state of the deposition material through heating so that the deposition material deposited on the surface of the panel is supplied when the display panel is produced in the display manufacturing process using OLED, and the gaseous deposition material is applied to the surface of the panel. It is also used as a means to convey

In recent years, as substrates for OLED manufacturing have become larger, there is a problem in that when a large substrate is horizontally disposed in a deposition process, deformation of the substrate occurs.

Therefore, there is a need to improve this.

On the other hand, Korean Patent Registration No. 10-1474363 (registration date: December 12, 2014) discloses an "OLED evaporator source".

The present invention was created by the above necessity, by vertically arranging a substrate, which is an object to be treated, in an organic light emitting diode (OLED) manufacturing process, and evaporating a deposition material from the side of the substrate to deposit the substrate, thereby deforming the substrate. An object of the present invention is to provide a vertical induction heating deposition apparatus that can prevent

In addition, the present invention allows the crucible that accommodates and heats the deposition material to be detached from the nozzle body to easily supplement the deposition material, or to easily replace the crucible when the deposition material needs to be replenished, thereby improving convenience. An object of the present invention is to provide a vertical induction heating deposition apparatus.

In order to achieve the above object, a vertical induction heating deposition apparatus according to an aspect of the present invention includes a nozzle body in which a deposition material is introduced and discharged laterally, and the nozzle body is detachably provided. and a crucible for accommodating a material for deposition therein, and an induction heating unit that generates a high frequency to heat the nozzle body and the crucible.

In addition, in the present invention, the nozzle body is characterized in that the nozzle unit for discharging the deposition material is arranged up and down, and a detachable opening is provided at the lower end so that the crucible is detachable.

In addition, in the present invention, the nozzle body is provided with a first detachable opening at the lower end so that the crucible is detachable, the inner housing in which the nozzle unit is formed on the side surface, and the inner housing to cover the inner housing and an outer housing having a second detachable opening corresponding to the first detachable opening.

In addition, in the present invention, the nozzle body is characterized in that the diffusion space in which the deposition material evaporated from the crucible is introduced and diffused is gradually expanded from the crucible side to the upper end.

In addition, in the present invention, the crucible is characterized in that it has an evaporation outlet for discharging the deposition material that evaporates therein to the nozzle body.

In addition, the nozzle body in the present invention, the lower end is in contact with the upper surface of the crucible, is formed to be inclined to go to the upper end, characterized in that it further comprises an inclined sidewall forming the diffusion space.

In addition, in the present invention, the nozzle unit is characterized in that the discharge pipe for discharging the deposition material to the outside is disposed to be vertically spaced apart.

In addition, in the present invention, the discharge pipe is characterized in that the distance from each other is gradually widened as the distance from the crucible is increased.

In addition, the discharge pipe in the present invention, characterized in that the greater the distance spaced apart from the crucible, the larger the size of the diameter gradually.

In addition, the induction heating unit in the present invention is characterized in that it comprises a main induction heating member for heating the nozzle body and the crucible together, and an auxiliary induction heating member for heating the nozzle unit.

In addition, in the present invention, the induction heating unit is disposed to be spaced apart in the form of a coil on the outer surface of the nozzle body to be inserted between the discharge pipe, and the distance spaced apart from the lower side of the nozzle body to the upper side is formed to be wider. .

In addition, the induction heating unit in the present invention, the main induction heating member disposed outside the crucible to heat the crucible, and an auxiliary induction heating member for heating the nozzle body characterized in that it comprises.

In addition, in the present invention, the nozzle body includes an external housing having the nozzle part and the detachable opening, into which the vapor deposition material is introduced, and the auxiliary induction heating member is disposed inside the external housing, and an inner housing coupled to the outer housing to heat the outer housing to form a heating space.

In addition, in the present invention, the nozzle body, characterized in that it further comprises a diffusion space between the outer housing and the inner housing to which the deposition material evaporated in the crucible is introduced and diffused.

In addition, in the present invention, the inner housing is characterized in that the upper surface is opened and the upper end is hermetically coupled to the outer housing, and the auxiliary induction heating member is inserted therein.

As described above, in the vertical induction heating deposition apparatus according to an aspect of the present invention, unlike the prior art, in the organic light emitting diode (OLED) manufacturing process, the deposition material is deposited from the side of the substrate in a state in which a large substrate is vertically disposed. Since it can be deposited by vaporizing, it has the effect of preventing the substrate from being deformed during the deposition process.

In addition, in the vertical induction heating deposition apparatus according to the present invention, since the crucible heating the deposition material is detached from the lower end of the nozzle body that diffuses the vaporized deposition material, it is easy to supplement the deposition material in the crucible, or the deposition material It has the effect of being able to easily replace the entire Crucible when replenishment is needed.

In addition, in the vertical induction heating deposition apparatus according to the present invention, since the nozzle body and the crucible for discharging the vaporized deposition material are heated by the auxiliary induction heating member and the main induction heating member, respectively, the vaporization time of the deposition material can be reduced, and , has the effect of improving the diffusion of the vaporized deposition material.

1 is a perspective view illustrating a vertical induction heating deposition apparatus according to a first embodiment of the present invention.
2 is an exploded perspective view illustrating a vertical induction heating deposition apparatus according to a first embodiment of the present invention.
3 is a cross-sectional view of FIG. 1 .
4 is a cross-sectional view for explaining a modified example of the vertical induction heating deposition apparatus according to the first embodiment of the present invention.
5 is a perspective view for explaining another modified example of the vertical induction heating deposition apparatus according to the first embodiment of the present invention.
6 is a cross-sectional view of FIG. 5 for explaining another modified example of the vertical induction heating deposition apparatus according to the first embodiment of the present invention.
7 is a cross-sectional view illustrating a vertical induction heating deposition apparatus according to a second embodiment of the present invention.
8 is a perspective view illustrating a vertical induction heating deposition apparatus according to a second embodiment of the present invention.
9 is an enlarged view illustrating a vertical induction heating deposition apparatus according to a second embodiment of the present invention.
10 is a perspective view illustrating a vertical induction heating deposition apparatus according to a third embodiment of the present invention.
11 is an exploded perspective view illustrating a vertical induction heating deposition apparatus according to a third embodiment of the present invention.
12 is a cross-sectional perspective view illustrating a vertical induction heating deposition apparatus according to a third embodiment of the present invention.
13 is a cross-sectional view illustrating a vertical induction heating deposition apparatus according to a third embodiment of the present invention.

Hereinafter, a preferred embodiment of the vertical induction heating deposition apparatus according to the present invention will be described with reference to the accompanying drawings. In this process, the thickness of the lines or the size of components shown in the drawings may be exaggerated for clarity and convenience of description.

In addition, terms to be described later are terms defined in consideration of functions in the present invention, which may vary according to the intention or custom of users or operators. Therefore, definitions of these terms should be made based on the contents throughout the present specification.

1 is a perspective view illustrating a vertical induction heating deposition apparatus according to a first embodiment of the present invention, and FIG. 2 is an exploded perspective view illustrating a vertical induction heating deposition apparatus according to a first embodiment of the present invention. , FIG. 3 is a cross-sectional view of FIG. 1, FIG. 4 is a cross-sectional view for explaining a modification of the vertical induction heating deposition apparatus according to the first embodiment of the present invention, and FIG. 5 is a cross-sectional view according to the first embodiment of the present invention It is a perspective view for explaining another modified example of the vertical induction heating deposition apparatus, and FIG. 6 is a cross-sectional view of FIG. 5 for explaining another modified example of the vertical induction heating deposition apparatus according to the first embodiment of the present invention.

7 is a cross-sectional view illustrating a vertical induction heating deposition apparatus according to a second embodiment of the present invention, and FIG. 8 is a perspective view illustrating a vertical induction heating deposition apparatus according to a second embodiment of the present invention. and FIG. 9 is an enlarged view of essential parts for explaining a vertical induction heating deposition apparatus according to a second embodiment of the present invention.

In addition, FIG. 10 is a perspective view for explaining a vertical induction heating deposition apparatus according to a third embodiment of the present invention, and FIG. 11 is an exploded view for explaining a vertical induction heating deposition apparatus according to a third embodiment of the present invention. A perspective view, FIG. 12 is a cross-sectional perspective view for explaining a vertical induction heating deposition apparatus according to a third embodiment of the present invention, and FIG. 13 is a vertical induction heating deposition apparatus according to a third embodiment of the present invention. cross section for

First, a vertical induction heating deposition apparatus according to a first embodiment of the present invention will be described in detail with reference to FIGS. 1 to 6 .

1 is a perspective view illustrating a vertical induction heating deposition apparatus according to a first embodiment of the present invention, and FIG. 2 is an exploded perspective view illustrating a vertical induction heating deposition apparatus according to a first embodiment of the present invention. , FIG. 3 is a cross-sectional view of FIG. 1 .

In addition, FIG. 4 is a cross-sectional view for explaining a modification of the vertical induction heating deposition apparatus according to the first embodiment of the present invention, and FIG. 5 is another view of the vertical induction heating deposition apparatus according to the first embodiment of the present invention. It is a perspective view for explaining a modified example, and FIG. 6 is a cross-sectional view of FIG. 5 for explaining another modified example of the vertical induction heating deposition apparatus according to the first embodiment of the present invention.

1 to 3 , the vertical induction heating deposition apparatus 100 according to the first embodiment of the present invention is configured to deposit a deposition material on a substrate 10 in an organic light emitting diode (OLED) manufacturing process. It is installed inside the vacuum chamber (not shown).

For example, the vertical induction heating deposition apparatus 100 according to the first embodiment heats and vaporizes a deposition material in a liquid or powder form, and a wet deposition technique in which the vaporized deposition material is deposited on the substrate 10 . applies to

The vertical induction heating deposition apparatus 100 according to the first embodiment is provided with a nozzle body 110 for diffusing the vaporized deposition material in the vertical direction of the substrate 10 and detachably attached to the nozzle body 110 . and a crucible 120 for accommodating a deposition material for deposition, and an induction heating unit 130 for heating the nozzle body 110 and the crucible 120 .

And in the vertical induction heating deposition apparatus 100 according to the first embodiment, when the crucible 120 is heated by the induction heating unit 130 and the temperature rises, the deposition material accommodated in the crucible 120 . A phase change is made in this gaseous state, and the vaporized deposition material is discharged to the outside while being diffused into the nozzle body 110 to treat the surface of the substrate 10 as a processing object.

In this embodiment, the vertical induction heating deposition apparatus 100 is used in the organic light emitting diode (OLED) manufacturing process as an example, but it can also be used in the field of surface treatment technology such as metal.

The nozzle body 110 for the diffusion of the vaporized deposition material has a rectangular parallelepiped shape elongated in the vertical direction, and the nozzle unit 111 is vertically arranged in the longitudinal direction of the substrate 10 . Through this, processing can be performed in a state in which the substrate 10 is vertically disposed.

In particular, the nozzle body 110 is capable of rapid induction heating and has a structure of more than a double wall made of different materials to improve thermal efficiency by maintaining a heated state for a long time, and the crucible 120 is detachable. .

Specifically, the nozzle body 110 includes an inner housing 113 into which vaporized deposits vaporized in the crucible 120 are introduced, an outer housing 114 for insulating and protecting the inner housing 113, and a crew It includes a detachable opening 115 formed at the lower end of the inner housing 113 and the outer housing 114 so that the sieble 120 can be detached from the inside of the inner housing 113 .

At this time, the nozzle body 110 has a diffusion space 116 in which the inner housing 113 is sealed by the nozzle unit 111 and vaporized deposits are introduced, and the inner housing 113 and the outer housing 114 are It can be made of different materials.

The nozzle unit 111 includes a housing sealing plate 111a coupled to one side of the inner housing 113 and a plurality of discharge pipes 111b arranged in a vertical line on the housing sealing plate 111a.

In addition, as shown in FIG. 4 , the nozzle part 111 has a separation distance L1 of each discharge pipe 111b' so that the vaporized deposits discharged from the inner housing 113 to the outside through the discharge pipe 111b' can be uniformly discharged, as shown in FIG. ) has a different separation distance, and the diameter size of the discharge pipe (111b') is also formed to have various sizes.

Specifically, the discharge pipe (111b') of the nozzle part 111 is the discharge pipe (111b') as it moves away from the crucible 120 with respect to any one discharge pipe (111b') closest to the crucible 120 . It is formed so that the mutually spaced distance of the is gradually widened. That is, the nozzle part 111 is formed to gradually increase the separation distance from the lower side to the upper side of the discharge pipe (111b').

In addition, the discharge pipe (111b) arranged in a vertical line is formed such that the greater the distance spaced apart from the crucible 120, the larger the size of the diameter. That is, the diameter of the discharge pipe (111b') located at the uppermost side of the discharge pipe (111b') is formed to be the largest, and the diameter of the discharge pipe (111b') located at the bottom side is formed to be the smallest. Through this, the vaporized deposits discharged through the discharge pipe 111b' may be uniformly and smoothly discharged from all the discharge pipes 111b'.

The nozzle unit 111 according to the present embodiment may be formed of a metal having excellent thermal conductivity and less generation of impurities, for example, any one or more of tantalum, titanium, and alumina.

An open side of the inner housing 113 is sealed by the nozzle unit 111 , coupled to the inside of the outer housing 114 , and a detachable opening 115 is formed on one side of the lower end. The inner housing 113 may also be formed of any one or more of a metal having excellent thermal conductivity and less generation of impurities, for example, tantalum, titanium, and alumina.

As such, when the inner housing 113 and the nozzle unit 111 are made of metal, it is possible to prevent contamination by impurities in the process of vaporizing the deposition material and the diffusion of the vaporized deposition material.

In addition, the inner housing 113 is mounted in a form in which the crucible 120 inserted into the detachable opening 115 is completely inserted therein. The inner housing 113 is coupled to the outer housing 114 such that the upper and lower, left and right outer surfaces are in contact with the inner surface of the outer housing 114 .

The outer housing 114 is coupled to the inner housing 113 to cover the inner housing 113 , and a detachable opening 115 for detachment of the crucible 120 is provided at the lower end. This, the outer housing 114 is manufactured in a material different from the inner housing 113 so as to properly maintain electrical conductivity to improve the thermal efficiency of the inner housing 113 and the crucible 120 . For example, the outer housing 114 may be formed of quartz, graphite-based, or the like, which has excellent heat resistance, electrical insulation, and heat retention.

In addition, in the nozzle body 110 according to the first embodiment, the inner surface of one side of the outer housing 114 and the rear surface corresponding to the nozzle part 111 of the inner housing 113 are spaced apart from each other to form an insulating space 117 . will do

The detachable opening 115 for detachment of the crucible 120 is one side of the lower end of the inner housing 113 so that the crucible 120 can be completely inserted into the inner housing 113 of the nozzle body 110 . It consists of a first detachable opening 115a formed in the , and a second detachable opening 115b formed on one side of the lower end of the outer housing 114 to communicate with the first detachable opening 115a.

In the nozzle body 110 according to the first embodiment configured as described above, the crucible 120 for heating the deposition material is inserted into the lower end of the inner housing 113 through the detachable opening 115 or the inner housing 113 . Since it can be separated from the crucible 120, the deposition material can be easily supplemented, and the crucible 120 can be easily replaced without replenishment of the deposition material.

In addition, since the nozzle body 110 can separate the inner housing 113 from the outer housing 114, after using a deposition material of a specific component, the inner housing 113 is separated and cleaned, and another deposition material is deposited. becomes available. That is, since only the inner housing 113 can be cleaned and reused without changing the entire nozzle body 110 according to the change of the deposition material, compatibility can be improved.

Crucible 120 for vaporizing the deposition material in the form of liquid or powder is inserted into the lower end of the nozzle body 110 through the detachable opening 115, and is heated by the induction heating unit 130 and accommodated therein. The deposition material is heated.

Crucible 120 according to the first embodiment is formed in a hexahedral shape with an open upper surface, and is heated through heat conduction of the nozzle body 110 .

The induction heating unit 130 is provided on the outer surface of the nozzle body 110 to heat the nozzle body 110 and the crucible 120 , and generates a high frequency to heat the nozzle body 110 .

The induction heating unit 130 includes a main induction heating member 131 provided on the outside of the outer housing 114 to heat the outer housing 114 and the crucible 120 together, and the nozzle unit 111 . It includes an auxiliary induction heating member 133 provided on the side of the nozzle body 110 to heat the discharge pipe (111b).

The main induction heating member 131 is formed in a coil shape to surround the outer housing 114 in the longitudinal direction.

The auxiliary induction heating member 133 heats the discharge pipe 111b to improve the kinetic energy of the vaporized deposit. Through this, the diffusion distance and discharge amount of vaporized deposits can be increased.

Meanwhile, referring to FIGS. 5 and 6 , the induction heating unit 130 ′ according to the present embodiment has a single coil shape to surround the nozzle body 110 in the width direction so as to more effectively heat the discharge pipe 111b. may be formed.

Specifically, the induction heating unit 130 'is disposed to be spaced apart in the form of a coil from the upper end of the nozzle body 110 to the lower end so as to be inserted between the discharge pipe 111b, and the separation distance (L2) from the lower end of the nozzle body 110. is formed to have a separation distance shorter than the separation distance L3 of the upper end. Through this, the lower end of the nozzle body 110 in which the crucible 120 is disposed can be heated more quickly.

The operation of the vertical induction heating deposition apparatus according to the first embodiment of the present invention configured as described above will be described.

When the induction heating member 120 is operated under the control of the controller, a high frequency is oscillated in the induction heating member 120, and the crucible 120 and the nozzle body 110 are heated by the high frequency while the crucible 120 is heated. temperature will rise.

And when the temperature of the crucible 120 is heated to a set temperature, the deposition material accommodated in the crucible 120 is heated and vaporized, and as the vaporized deposition material is diffused into the inner housing 113, the nozzle unit ( 111) is discharged to the vacuum chamber through the discharge pipe (111b).

At this time, since the nozzle body 110 is vertically formed and the discharge pipe 111b is also disposed vertically, the vaporized deposits vaporized in the crucible 120 through the discharge pipe 111b in the vertical direction of the substrate 10 is emitted Therefore, since the deposition process can be performed in a state in which the substrate 10 is vertically disposed, it is possible to prevent the substrate 10 from being deformed when processing the large substrate 10 .

And when all of the deposition material of the crucible 120 is vaporized, the crucible 120 is separated from the nozzle body 110 through the detachable opening 115 at the lower end of the nozzle body 110 to supplement the deposition material or It can be replaced with another crucible 120 .

As described above, in the vertical induction heating deposition apparatus 100 according to the first chamber of the present invention, the discharge pipe 111b is formed in the vertical nozzle body 110 up and down, so that in the organic light emitting diode (OLED) manufacturing process, a large substrate ( 10) is vertically disposed and the deposition material is vaporized from the side of the substrate 10 to be deposited, thereby preventing the substrate 10 from being deformed during the deposition process.

In addition, in the vertical induction heating deposition apparatus 100 according to the first chamber of the present invention, since the crucible 120 for heating the deposition material is detached from the lower end of the nozzle body 110, the crucible 120 It is possible to easily supplement the deposition material or simply replace the entire crucible 120 without supplementing the deposition material, thereby improving the convenience of use. In addition, when changing the deposition material, it can be easily changed and used.

Next, a vertical induction heating deposition apparatus according to a second embodiment of the present invention will be described with reference to FIGS. 7 to 9 .

7 is a cross-sectional view illustrating a vertical induction heating deposition apparatus according to a second embodiment of the present invention, and FIG. 8 is a perspective view illustrating a vertical induction heating deposition apparatus according to a second embodiment of the present invention, 9 is an enlarged view illustrating a vertical induction heating deposition apparatus according to a second embodiment of the present invention.

In describing the vertical induction heating deposition apparatus according to the second embodiment of the present invention, the same reference numerals are used for the same and similar components as the vertical induction heating deposition apparatus according to the first embodiment, and the detailed description thereof will be omitted. do it with

The vertical induction heating deposition apparatus 100 according to the second embodiment of the present invention includes a nozzle body 110 , a crucible 120 , and an induction heating unit 130 , and in the crucible 120 . The vaporized deposit is more uniformly discharged through the discharge pipe (111b) through the inside of the nozzle body (110).

To this end, in the nozzle body 110 according to the second embodiment of the present invention, the expanded space 116 ′ through which the vaporized deposition material evaporated from the crucible 120 is introduced and diffused is formed from the crucible 120 side. It gradually expands toward the top. At this time, the nozzle body 110 has an inclined sidewall 116a for expanding and forming the expanded space 116', and the expanded space 116' is formed by the inclined sidewall 116a.

Due to this, the receiving space that can accommodate the vaporized deposits increases from the lower end to the upper end of the expanded space 116' of the nozzle body 110, so the lower end where the vaporized deposits are discharged quickly and the upper end where the vaporized deposits are discharged is delayed. It is possible to maintain a more uniform discharge of In addition, it is possible to minimize the size of the diffusion space 116 in which the vaporized deposits can be diffused, so that the loss of the vaporized deposits is minimized and uniform discharge is possible.

In addition, the crucible 120 according to the second embodiment of the present invention has an evaporation outlet 121 for concentrating and discharging the deposition material evaporating therein into the expansion space 116 ′ of the nozzle body 110 . do. At this time, the evaporation outlet 121 is formed on one side of the upper surface of the crucible 120 to correspond to the inlet of the expansion space 116'.

A vertical induction heating deposition apparatus according to a third embodiment of the present invention will be described with reference to FIGS. 10 to 13 .

10 is a perspective view illustrating a vertical induction heating deposition apparatus according to a third embodiment of the present invention, and FIG. 11 is an exploded perspective view illustrating a vertical induction heating deposition apparatus according to a third embodiment of the present invention. , FIG. 12 is a cross-sectional perspective view for explaining a vertical induction heating deposition apparatus according to a third embodiment of the present invention, and FIG. 13 is a cross-sectional view for explaining a vertical induction heating deposition apparatus according to a third embodiment of the present invention. to be.

In describing the vertical induction heating deposition apparatus according to the third embodiment of the present invention, the same reference numerals are used for the same and similar components as the vertical induction heating deposition apparatus according to the first embodiment, and the detailed description thereof will be omitted. do it with

The vertical induction heating deposition apparatus 200 according to the third embodiment of the present invention includes a nozzle body 210 , a crucible 220 , and an induction heating unit 230 , and It is formed so that the temperature of the nozzle body 240 can be maintained more effectively while heating is performed more quickly.

To this end, the nozzle body 210 according to the third embodiment has an outer housing 211 in which the crucible 220 is detached from the lower end, a diffusion space 216 is formed therein, and an induction heating unit 230 . and an inner housing 213 for heating the diffusion space 216 using

The outer housing 211 has a nozzle unit 215 for discharging vaporized deposits coupled to one side thereof, and a detachable opening 211a for desorption of the crucible 220 is formed at the lower end thereof. At this time, the nozzle unit 215 includes a housing sealing plate 215a and a discharge pipe 215b, and the housing sealing plate 215a is coupled to seal the open side of the outer housing 211 .

In addition, the outer housing 211 is formed with a housing coupling hole 211b so that the inner housing 213 is inserted therein, and the upper end thereof is sealed with the upper end of the inner housing 213 . At this time, the inner surface of the outer housing 211 and the outer surface of the inner housing 213 are spaced apart to form a diffusion space 216 .

The inner housing 213 is inserted into the outer housing 211 so that the upper end thereof is sealed with the outer housing 211, and a heater installation space portion 213a into which the induction heating unit 230 is inserted is formed. . Through this, the induction heating unit 230 is inserted into the heater installation space 213a of the inner housing 213 to heat the diffusion space 216 of the outer housing 211 from the inside of the inner housing 213 . do.

Therefore, since the diffusion space 216 of the outer housing 211 can be easily and quickly heated using the inner housing 213 , the kinetic energy of the vaporized deposit flowing into the diffusion space 216 , that is, the diffusion is reduced. it can be prevented

The induction heating unit 230 according to the third embodiment has a main induction heating member 231 and an auxiliary induction heating member to heat the diffusion space 216 and the crucible 220 of the nozzle body 210, respectively. (233).

The main induction heating member 231 is disposed on the outside of the crucible 220 so as to individually heat the crucible 220 so that only the crucible 220 can be concentrated and quickly heated.

The auxiliary induction heating member 233 is disposed to be inserted into the inner housing 213 of the nozzle body 210 to heat the inner housing 213 . Through this, only the inner housing 213 can be heated to a set temperature separately from the crucible 220 and the set temperature can be stably maintained.

As such, when the induction heating unit 230 is dividedly formed, it is possible to selectively heat the crucible 220 and the nozzle body 210 while maintaining different heating temperatures while minimizing power consumption.

The vertical induction heating deposition apparatus 200 according to the third room of the present invention configured as described above includes the nozzle body 210 and the crucible 220 for discharging the vaporized deposition material to the auxiliary induction heating member 233. and the main induction heating member 231 can each be heated, so that the vaporization time of the deposition material can be reduced, and the temperature of the nozzle body 210 can be easily maintained to improve the diffusivity of the vaporized deposition material be able to

Although the present invention has been described with reference to the embodiments shown in the drawings, this is only illustrative, and those of ordinary skill in the field to which the technology pertains, various modifications and other equivalent embodiments are possible. I will understand.

Therefore, the true technical protection scope of the present invention should be determined by the claims.

100, 200: vertical induction heating deposition apparatus 110, 210: nozzle body
111, 215: nozzle unit 113, 213: inner housing
114, 211: outer housing 115, 211a: detachable opening
116: diffusion space part 117: heat insulation space part
120, 220: Crucible 121: Evaporation outlet
130, 230: induction heating unit 131, 231: main induction heating member
133, 233: auxiliary induction heating member

Claims (12)

a nozzle body for discharging the deposition material so that the deposition material is introduced into the inside and discharged laterally, the nozzle body having a detachable opening at the lower end; a crucible that is detachably provided on the nozzle body and accommodates a material for deposition therein; and an induction heating unit generating a high frequency to heat the nozzle body and the crucible. Including,
The nozzle body may include: an inner housing having a first detachable opening at a lower end so that the crucible is detachably detachable, and having the nozzle unit formed on a side thereof; and
an outer housing coupled to the inner housing to cover the inner housing and having a second detachable opening corresponding to the first detachable opening;
Vertical induction heating deposition apparatus comprising a.
delete delete The method of claim 1,
The nozzle body is formed to gradually expand from the crucible side toward the upper end of the expanded space in which the deposition material evaporated from the crucible is introduced and diffused,
The crucible is a vertical induction heating deposition apparatus, characterized in that it has an evaporation outlet for discharging the deposition material that evaporates therein to the nozzle body.
The method of claim 4,
The nozzle body, the lower end in contact with the upper surface of the crucible, the vertical induction heating deposition apparatus, characterized in that it further comprises an inclined sidewall formed to go to the upper end inclined to form the expansion space.
The method of claim 1,
The nozzle unit, the discharge pipe for discharging the deposition material to the outside is disposed to be vertically spaced apart,
The discharge pipe, the vertical induction heating deposition apparatus, characterized in that the distance from each other is gradually widened as the distance from the crucible increases.
The method of claim 6,
The discharge pipe, vertical induction heating deposition apparatus, characterized in that the size of the diameter gradually increases as the distance apart from the crucible increases.
The method of claim 1,
The induction heating unit, a main induction heating member for heating the nozzle body and the crucible together; and
an auxiliary induction heating member for heating the nozzle unit;
Vertical induction heating deposition apparatus comprising a.
The method of claim 6,
The induction heating unit is disposed to be spaced apart in a coil shape on the outer surface of the nozzle body so as to be inserted between the discharge pipes, and the distance spaced apart from the lower side of the nozzle body is formed to increase from the lower side to the upper side of the nozzle body. Device.
The method of claim 1,
The induction heating unit, a main induction heating member disposed outside the crucible to heat the crucible; and
an auxiliary induction heating member for heating the nozzle body;
Vertical induction heating deposition apparatus comprising a.
The method of claim 10,
The nozzle body may include: an outer housing having the nozzle unit and the detachable opening, and into which the vapor deposition material is introduced; and
an inner housing coupled to the outer housing to heat the outer housing by disposing the auxiliary induction heating member inside the outer housing to form a heating space;
Vertical induction heating deposition apparatus comprising a.
The method of claim 11,
The nozzle body further includes a diffusion space between the outer housing and the inner housing into which the deposition material evaporated in the crucible is introduced and diffused;
The inner housing has an open upper surface so that an upper end thereof is hermetically coupled to the outer housing, and the auxiliary induction heating member is inserted thereinto.

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