KR102258506B1 - High frequency induction heating device - Google Patents

Abstract

The present invention discloses a high-frequency induction heating device. The disclosed high-frequency induction heating device includes a crucible body accommodating a material for deposition, an induction heating member provided outside the crucible body, and heating the crucible body by generating a high frequency, the crucible The block body is characterized in that it is formed to have a structure of at least a double wall or more by a different material. Therefore, the present invention can prevent the deposition material from being contaminated by impurities when heating and vaporizing the liquid deposition material in the organic light emitting diode (OLED) manufacturing process, and can improve the thermal efficiency when heating the deposition material, and It can be reused by cleaning the sieble body by forming a detachable body.

Description

High-frequency induction heating device {HIGH FREQUENCY INDUCTION HEATING DEVICE}

The present invention relates to a high-frequency induction heating device, and more particularly, it is possible to prevent contamination of the deposition material by impurities when heating and vaporizing the liquid deposition material in an organic light emitting diode (OLED) manufacturing process, and the deposition material It relates to a high-frequency induction heating device that can not only improve thermal efficiency during heating of the device, but also make the crucible body detachably and can be cleaned and reused.

In general, as a method for melting a certain substance, there are an indirect heating method of heating a crucible in which the molten substance is accommodated, and a direct heating method of heating the molten substance itself.

The indirect heating method is a method of indirectly heating a material to be melted by induction heating a crucible having a melting temperature much higher than that of the material to be melted. In this method, since a crucible having a much higher melting point than the material to be melted must be used, the crucible and the high-temperature melt chemically react with each other to generate impurities in the melt, which makes the crucible weak.

The direct heating method is a method of heating the material to be melted by inducing itself. This melting method is one of the methods used for high-purity crystal growth because it can maintain a high purity of the melt. In particular, this melting method can be said to be very efficient when it is desired to melt a material having a melting point of 3000K or higher.

Crucible has been used as a means for heating and smelting a metal having a high melting temperature, a means for heating to mix various metal materials, and the like.

On the other hand, OLED is receiving worldwide spotlight as its energy and marketability have been proven not only as a post LCD display but also as a surface light emitting device for high-resolution displays. In particular, in recent years, as the VR (virtual reality) market grows, the need for high-resolution OLEDs used in VR products has also been highlighted, and for this reason, a technique for manufacturing organic thin film patterns of OLEDs is required more finely.

Also, as one of the OLED manufacturing processes, thermal evaporation deposition, in which an organic material is evaporated into a gas in a high vacuum to deposit an organic material on a silicon wafer (substrate), is mainly used. is produced in a dotted or linear shape, so it takes a lot of time to manufacture a large-area OLED device.

Recently, Crucible (CRUCIBLE) changes the state of the deposition material through heating so that the deposition material deposited on the surface of the panel is supplied when the display panel is produced in the display manufacturing process using OLED, and the gaseous deposition material is converted into a panel. It is also used as a means to transfer to the surface of

However, in the crucible of the prior art as described above, impurities are introduced from the wall, etc. in the process of heating the deposition material, thereby contamination of the deposition material, thermal efficiency is lowered, and operation cost is increased because replacement is made at a specific cycle. There is a problem.

Therefore, there is a need to improve this.

On the other hand, domestic registration patent No. 10-1968819 (registration date: April 8, 2019) discloses "a crucible and a heating assembly including the same".

The present invention was created by the above necessity, and prevents contamination of the deposition material by impurities when heating and vaporizing the liquid deposition material in the organic light emitting diode (OLED) manufacturing process, and heats the deposition material during heating. An object of the present invention is to provide a high-frequency induction heating device that improves thermal efficiency by heating quickly while reducing loss, and can be washed and reused after use.

In order to achieve the above object, a high-frequency induction heating device according to an aspect of the present invention includes a crucible body accommodating a material for deposition, and is provided outside of the crucible body, and generates a high frequency to generate the crucible. It is characterized in that it comprises an induction heating member for heating the sieve body.

In the present invention, the crucible body is characterized in that it is formed to have a structure of at least a double wall or more by the same material or different materials.

In the present invention, the crucible body includes a crucible housing heated by the induction heating member, and is installed inside the crucible housing to accommodate the deposition material, and is made of the same material as the crucible housing or It is characterized in that it includes an inner crucible formed by a different material.

In the present invention, the crucible housing is characterized in that it is formed of any one or more of ceramics, such as quartz, graphite, and composites, and metals, alumina, titanium, and tantalum.

In the present invention, the inner crucible is formed of ceramic and metal.

In the present invention, the crucible housing is provided between an outer liner and the inner crucible so that the inner crucible is seated, and is formed of the same material or a different material as the outer liner to conduct heat. It characterized in that it comprises a heat conduction heater for heating the inner crucible through.

In the present invention, the crucible housing is characterized in that the outer liner is formed of quartz, and the heat conduction heater is formed of ceramic, graphite and metal.

In the present invention, the crucible body is characterized in that the inner crucible is detachably inserted into the crucible housing.

In the present invention, the crucible housing is characterized in that it has a detachable opening so that the inner crucible can be separated and inserted.

In the present invention, the crucible housing is characterized in that the upper surface is opened so that the inner crucible can be separated and inserted to form the detachable opening.

In the present invention, the inner crucible includes a container part for accommodating the deposition material, and a nozzle part coupled to the container part to seal the container part, and having a discharge pipe through which the deposition material is vaporized and discharged. do it with

In the present invention, the nozzle part is characterized in that the discharge pipe is formed to be spaced apart from each other so as to have an equal distance or different distance from the central part of the container part toward both sides.

In the present invention, the jozzle part is characterized in that the separation distance is gradually shortened as the discharge pipe goes from the central part to both sides.

As described above, the high-frequency induction heating device according to one aspect of the present invention has a double-wall structure in which the crucible body heats and vaporizes the liquid deposition material in the organic light emitting diode (OLED) manufacturing process, unlike the prior art. Therefore, it has the effect of preventing the deposition material from being contaminated by foreign substances.

In addition, in the high frequency induction heating device according to the present invention, since the outer liner is formed of quartz, the heat conduction heater is made of graphite, and the inner crucible is formed of metal, the heat loss is reduced while heating the deposition material. It is heated and the temperature of the heated state can be properly maintained, so that it has the effect of improving the thermal efficiency.

In addition, the high frequency induction heating device according to the present invention can separate the inner crucible made of metal from the crucible housing, so it can be reused by cleaning after use according to the change of the deposition material to improve compatibility have an effect

1 is an exploded perspective view for explaining a high frequency induction heating apparatus according to an embodiment of the present invention.
2 is a combined perspective view for explaining a high frequency induction heating apparatus according to an embodiment of the present invention.
3 is a front view of FIG. 2.
4 is a plan view of FIG. 2.
5 is a cross-sectional view taken along line AA of FIG. 3 for explaining a high frequency induction heating apparatus according to an embodiment of the present invention.
6 is a cross-sectional view taken along line BB of FIG. 4 for explaining a high frequency induction heating apparatus according to an embodiment of the present invention.
7 is a perspective view for explaining a high frequency induction heating apparatus according to another embodiment of the present invention.
8 is a cross-sectional view for explaining a high frequency induction heating apparatus according to another embodiment of the present invention.

Hereinafter, a preferred embodiment of a high frequency induction heating apparatus according to the present invention will be described with reference to the accompanying drawings. In this process, the thickness of the lines or the size of components shown in the drawings may be exaggerated for clarity and convenience of description.

In addition, terms to be described later are terms defined in consideration of functions in the present invention, which may vary according to the intention or custom of users or operators. Therefore, definitions of these terms should be made based on the contents throughout the present specification.

1 is an exploded perspective view for explaining a high frequency induction heating device according to an embodiment of the present invention, Figure 2 is a combined perspective view for explaining a high frequency induction heating device according to an embodiment of the present invention, Figure 3 is 2 is a front view, and FIG. 4 is a plan view of FIG. 2 .

In addition, FIG. 5 is a cross-sectional view taken along line AA of FIG. 3 for explaining a high frequency induction heating apparatus according to an embodiment of the present invention, and FIG. 6 is FIG. 4 for explaining a high frequency induction heating apparatus according to an embodiment of the present invention. is a cross-sectional view of the BB line.

In addition, FIG. 7 is a perspective view for explaining a high frequency induction heating apparatus according to another embodiment of the present invention, and FIG. 8 is a cross-sectional view for explaining a high frequency induction heating apparatus according to another embodiment of the present invention.

A high frequency induction heating apparatus according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 6 .

1 to 6 , the high frequency induction heating apparatus 100 according to an embodiment of the present invention heats a liquid deposition material for surface treatment or thin film formation in an organic light emitting diode (OLED) manufacturing process. It is applied to the wet deposition technique that vaporizes it.

In addition, the high-frequency induction heating apparatus 100 according to the present embodiment is used in a high vacuum state, and the liquid deposition material is vaporized and discharged as a gaseous object to be treated.

To this end, the high frequency induction heating apparatus 100 according to the present embodiment includes a crucible body 110 in which a material for deposition is accommodated, and an induction heating member 120 for heating the crucible body 110 . do.

In the high frequency induction heating apparatus 100 according to this embodiment, when the crucible body 110 is heated by the induction heating member 120 and the temperature rises, the deposition material accommodated in the crucible body 110 . A phase change is made to a gaseous state while also being heated, and the gaseous state-changed material is discharged to the outside of the crucible body 110 and supplied as a processing target.

In this embodiment, the high-frequency induction heating apparatus 100 heats and vaporizes the liquid deposition material as an example, but the solid state deposition material may be heated and vaporized, and organic light emitting diode (OLED) manufacturing process Of course, it can be applied to various surface treatment technology fields.

The crucible body 110 for accommodating the deposition material may be formed in a rectangular parallelepiped shape, and is formed to have at least a double-walled structure by different materials to improve thermal efficiency.

Since the crucible body 110 according to this embodiment has a barrier rib structure made of a heterogeneous material, rapid induction heating by the induction heating member 120 is possible, thereby reducing the heating time of the deposition material and heating It is possible to maintain the condition for a reasonable long time. Therefore, the thermal efficiency of the high frequency induction heating apparatus 100 can be improved.

In particular, the crucible body 110 according to this embodiment is detachably mounted inside the crucible housing 111 in which the induction heating member 120 is disposed outside, and the crucible housing 111 . and an inner crucible 113 for accommodating the deposition material. In this case, the crucible body 110 is formed of a material different from the crucible housing 111 and the inner crucible 113 .

For example, in the crucible body 110 according to the present embodiment, the crucible housing 111 has excellent heat resistance, electrical insulation, and heat retention. Quartz, graphite, tantalum, It may be formed of any one or more of titanium and alumina, and the inner crucible 113 may be made of a metal having excellent thermal conductivity and less generation of impurities.

Through this, the crucible body 110 according to the present embodiment can not only rapidly heat and vaporize the deposition material, but also do not generate impurities in the inner crucible 113 in the process of heating and vaporizing the deposition material. Therefore, it is possible to prevent the deposition material from being contaminated by impurities.

In addition, in the crucible body 110 according to the present embodiment, the crucible housing 111 is formed in a double structure by different materials so as to properly maintain electrical conductivity to further improve thermal efficiency.

Specifically, the crucible housing 111 includes an outer liner 111a on which the induction heating member 120 is disposed on the outside, and a heat conduction heater coupled to the inside of the outer liner 111a so that the inner crucible 113 is seated. (111b), and is heated through the heat generated by the induction heating member (120).

At this time, the crucible housing 111 has an upper surface opened so that the inner crucible 113 can be inserted or separated to form a detachable opening 111c.

The crucible housing 111 according to this embodiment may be formed of any one or more of quartz, graphite-based, tantalum, titanium, and alumina. .

For example, in the crucible housing 111 , the outer liner 111a may be made of quartz, and the heat conduction heater 111b may be made of graphite.

As such, in the crucible housing 111, since the outer liner 111a and the heat conduction heater 111b are formed of materials having different physical properties, rapid heating by the outer liner 111a is possible, and the heat conduction heater 111b Through the inner crucible 113, it is possible to quickly conduct heat. In addition, after being heated to a set temperature, the temperature of the crucible body 110 can be appropriately maintained by the heat conduction heater 111b, thereby improving thermal efficiency.

The inner crucible 113 accommodating the deposition material is seated or detachably inserted into the heat conduction heater 111b, and heated through the heat conduction of the crucible housing 111 to heat and vaporize the deposition material.

The inner crucible 113 according to this embodiment includes a container part 113a for accommodating a deposition material, and a nozzle part 113b for sealing the container part 113a to discharge the vaporized deposits. At this time, the inner crucible 113 is formed of a metal material to prevent the deposition material from being contaminated due to the discharge of impurities in the process of heating the deposition material.

Since such an inner crucible 113 can be separated from the crucible housing 111, after the use of a deposition material of a specific component is completed, it can be cleaned and used to deposit another deposition material.

That is, since the inner crucible 113 can be cleaned and reused without changing the entire crucible body 110 according to the change of the deposition material, compatibility can be improved.

The nozzle unit 113b includes a plurality of discharge pipes 113c to discharge the deposition material vaporized in the container unit 113a. At this time, the nozzle portion 113b is formed such that the separation distance L is gradually shortened from the central portion toward both sides of the discharge pipe 113c so that the vaporized deposits are smoothly discharged.

For example, since the inner crucible 113 according to the present embodiment is formed in a rectangular shape, the vaporization of the deposition material proceeds slightly faster in the region of both corners. Therefore, the inner crucible 113 is smoothly discharged from vaporized deposits in all areas through the discharge pipe 113c which is gradually formed with a shorter interval.

The induction heating member 120 according to this embodiment is provided outside the outer liner 111a, and generates a high frequency to heat the crucible body 110 . The induction heating member 120 is provided in the form of a coil to surround the outer surface of the upper end of the outer liner (111a).

The operation of the high frequency induction heating apparatus according to an embodiment of the present invention configured as described above will be described.

When a current is applied to the induction heating member 120 from a power source such as an external current transformer or transformer, the induction heating member 120 oscillates a high frequency, and as the crucible body 110 is heated by the high frequency, the crucible body (110) the temperature rises.

And when the temperature of the crucible body 110 is heated to a set temperature, the liquid deposition material accommodated in the inner crucible 113 is heated and vaporized.

At this time, the temperature of the crucible body 110 is adjusted by controlling the intensity of the current applied to the induction heating member 120 . For example, the stronger the intensity of the current applied to the induction heating member 120, the higher the temperature of the crucible body (110).

And the vaporized deposit vaporized in the inner crucible 113 is supplied to the deposition facility through the discharge pipe (113c).

The high frequency induction heating apparatus 100 according to the present invention as described above includes an inner crucible 113 for accommodating a liquid deposition material and a crucible housing 111 for heating the inner crucible 113 with each other. Since it is made of a different material and installed in a double structure, it is possible to quickly heat the inner crucible 113 while reducing heat loss.

In addition, in the high frequency induction heating apparatus 100 according to the present invention, since the inner crucible 113 for accommodating the deposition material is formed of metal, it is possible to prevent the deposition material from being contaminated by foreign substances when the deposition material is heated. do.

In summary, in the high frequency induction heating apparatus 100 according to the present invention, the outer liner 111a is made of quartz, the heat conduction heater 111b is made of graphite, and the inner crucible 113 is made of metal. Since it has a triple structure, it is possible to not only shorten the heating time of the deposition material while reducing heat loss, but also to properly maintain the temperature of the heated state of the crucible body 110, thereby improving thermal efficiency. .

In particular, in the high frequency induction heating apparatus 100 according to the present invention, since the inner crucible 113 made of metal can be detached from the crucible housing 111, when the deposition material is changed, the inner crucible ( 113) can be separated and washed, and then reused.

Next, a high frequency induction heating apparatus according to another embodiment of the present invention will be described with reference to FIGS. 7 and 8 .

7 is a perspective view illustrating a high frequency induction heating apparatus according to another embodiment of the present invention, and FIG. 8 is a cross-sectional view illustrating a high frequency induction heating apparatus according to another embodiment of the present invention.

In describing the high frequency induction heating apparatus according to another embodiment of the present invention, the same reference numerals are used for the same and similar components as the high frequency induction heating apparatus according to the embodiment, and a detailed description thereof will be omitted.

The high frequency induction heating apparatus 100 according to another embodiment of the present invention is formed by dividing the crucible body 110 and the induction heating member 120 for heating the crucible body 110 .

For example, the high frequency induction heating apparatus 100 according to another embodiment of the present invention is a first crucible assembly 130, a second crucible assembly 140 and a third crucible assembly ( 140), and the second crucible assembly 140 and the third crucible assembly 140 are disposed on both sides of the first crucible assembly 130, respectively.

In addition, the high frequency induction heating apparatus 100 according to another embodiment of the present invention is divided into three first crucible assembly 130 , second crucible assembly 140 , and third crucible assembly 140 . ), a shielding plate 160 is provided between each.

As described above, this is to more uniformly deposit the deposition materials dividedly arranged in the first crucible assembly 130 , the second crucible assembly 140 , and the third crucible assembly 140 . At this time, the first crucible assembly 130 , the second crucible assembly 140 , and the third crucible assembly 140 are attached to the inner crucible 113 on the outer liner 111a without the heat conduction heater 111b. ) can be installed directly.

Although the present invention has been described with reference to the embodiments shown in the drawings, this is only illustrative, and those of ordinary skill in the field to which the technology pertains, various modifications and other equivalent embodiments are possible. I will understand.

Therefore, the true technical protection scope of the present invention should be determined by the claims.

100: high frequency induction heating device 110: crucible body
111: crucible housing 111a: outer liner
111b: heat conduction heater 113: inner crucible
113a: container part 113b: nozzle part
113c: discharge pipe 120: induction heating member
130: first crucible assembly 140: second crucible assembly
150: first crucible assembly 160: shielding plate

Claims (10)

a crucible body accommodating a material for deposition; and an induction heating member provided on the outside of the crucible body and heating the crucible body by generating a high frequency, wherein the crucible body has at least a double wall made of the same material or different materials Formed to have the above structure,
The crucible body is formed of any one or more of ceramics, such as quartz, graphite, and composite, and metals, alumina, titanium, and tantalum, and heated by the induction heating member a crucible housing; and an inner crucible that is formed of ceramic and metal so as to be made of the same material or a different material as that of the crucible housing, and is installed inside the crucible housing to accommodate the deposition material; A sieble is detachably inserted into the crucible housing,
The inner crucible may include a container unit accommodating the deposition material; and a nozzle part coupled to the container part to seal the container part, and having a discharge pipe through which the deposition material is vaporized and discharged.
The nozzle unit, the high frequency induction heating apparatus, characterized in that the discharge pipe is formed to be spaced apart from each other so that the separation distance is gradually shortened from the central portion of the container portion toward both sides.
delete delete The method of claim 1,
The crucible housing may include an outer liner; and
a heat conduction heater provided between the inner crucible and the outer liner so that the inner crucible is seated, and formed of the same material or a different material as the outer liner to heat the inner crucible through heat conduction;
High frequency induction heating device comprising a.
The method of claim 4,
In the crucible housing, the outer liner is formed of quartz, and the heat conduction heater is formed of any one of ceramic, graphite, and metal.
delete The method of claim 1,
The crucible housing, high-frequency induction heating device, characterized in that provided with a detachable opening so that the inner crucible can be separated and inserted.
The method of claim 1,
The crucible housing is a high frequency induction heating device, characterized in that the upper surface is opened so that the inner crucible can be separated and inserted, and a detachable opening is formed. delete delete

Images