KR102509628B1 - High frequency induction heating device - Google Patents

Abstract

The present invention discloses a high-frequency induction heating device. The disclosed high-frequency induction heating apparatus includes a crucible installed inside a chamber and accommodating a material for deposition, an induction heating unit generating high frequency to heat the crucible, and applying external power to the induction heating unit. It is characterized by having a feed-through unit coupled to the chamber and connected to the induction heating unit. Therefore, the present invention can increase the current while lowering the voltage by connecting the induction coil unit for heating the crucible by oscillating high frequency to the feed-through unit in parallel, and the coil cooling unit for circulation of the cooling water is fed with the induction heating unit. Forming through the hollow of the through unit can improve the cooling effect.

Description

High frequency induction heating device {HIGH FREQUENCY INDUCTION HEATING DEVICE}

The present invention relates to a high-frequency induction heating device, and more particularly, an induction coil unit for heating a crucible by oscillating high-frequency waves is connected in parallel to a feed-through unit to increase current while reducing voltage, and circulate cooling water. The present invention relates to a high-frequency induction heating device capable of improving a cooling effect by forming a coil cooling unit through a hollow of an induction heating unit and a feed-through unit.

Generally, as a method for melting a certain material, there are an indirect heating method in which a crucible containing a material to be melted is heated, and a direct heating method in which the material to be melted itself is heated.

The indirect heating method is a method of indirectly heating a material to be melted by induction heating a crucible having a much higher melting temperature than a material to be melted. Since this method requires the use of a crucible having a much higher melting point than the material to be melted, there is a disadvantage in that the crucible and the high-temperature melt chemically react with each other to generate impurities in the melt and make the crucible brittle.

The direct heating method is a method of inducing and heating the material to be melted itself. This melting method is one of the methods used for high-purity crystal growth because it can maintain high purity of the melt. In particular, when melting a material having a melting point of 3000K or more, this melting method can be said to be very efficient.

As such, crucibles have been used as means for heating and smelting metals having high melting temperatures and means for heating to combine various metal materials.

On the other hand, OLED is in the spotlight worldwide as its energy and marketability have been proven not only as a post-LCD display but also as a surface light emitting device for a high-resolution display. In particular, recently, as the VR (virtual reality) market has grown, the need for high-resolution OLEDs used in VR products has also been highlighted, and for this reason, a technique for manufacturing a more finely patterned organic thin film of OLED is required.

In addition, as one of the OLED manufacturing processes, a thermal evaporation deposition process in which organic light emitting materials are vaporized in a high vacuum state to deposit organic materials on a silicon wafer (substrate) is mainly used. It takes a lot of time to manufacture a large-area OLED device because it is manufactured in a point or linear shape.

Crucible changes the state of the deposition material through heating so that the deposition material deposited on the surface of the panel is supplied when display panels are produced in the display manufacturing process using OLED, and the deposition material in the gaseous state is transferred to the surface of the panel. It is also used as a means of communication.

However, when the crucible of the prior art as described above is heated by an induction heating method using a coil, a high voltage is applied to the coil for induction heating, so excessive heat is generated during use, and the size is increased to increase high frequency oscillation. this will happen

Therefore, there is a need to improve this.

On the other hand, Korean Patent Registration No. 10-1968819 (registration date: 2019.04.08) discloses "crucible and heating assembly including the same", and Korean Patent Registration No. 10-1474363 (registration date: 2014.12.12) discloses An "OLED evaporator source" is disclosed.

The present invention was created by the above necessity, and since the applied current can be increased while lowering the voltage by connecting an induction coil unit that oscillates high frequency to a power source in parallel to heat the crucible, the crucible Its purpose is to provide a high-frequency induction heating device capable of improving the heating effect of.

In addition, the present invention forms a hollow coil cooling unit for cooling the induction heating unit, so that there is no need to install a separate facility for cooling water circulation, and the high frequency induction heating can directly circulate the cooling water to improve the cooling effect of the induction heating unit. There is another purpose in providing a device.

In addition, the present invention is a high-frequency induction heating device capable of reducing the number of parts because the feed-through unit for power application can be integrally formed with a cooling water supply line in the form of a hollow part to implement current application and cooling water circulation together as one part. It has another purpose to provide.

In addition, another object of the present invention is to provide a high-frequency induction heating device capable of improving installation workability and maintenance function by separating the feed-through unit from the inside and outside of the vacuum chamber, respectively.

In order to achieve the above object, a high-frequency induction heating apparatus according to an aspect of the present invention is installed inside a chamber and generates a crucible for accommodating a material for deposition, and generating a high frequency to heat the crucible. It is characterized in that it comprises an induction heating unit and a feed-through unit coupled to the chamber and connected to the induction heating unit to apply external power to the induction heating unit.

Further, in the present invention, the induction heating unit is characterized in that it includes an induction coil unit for heating the crucible, and a coil connection terminal unit for connecting the induction coil unit to the feed-through unit in parallel.

Further, in the present invention, the induction coil unit has a hollow body shape, and cooling water circulates therein.

Further, in the present invention, the induction coil unit is formed in a polygonal shape and is formed in a hollow body shape, so that cooling water circulates therein.

Further, in the present invention, the induction coil unit includes a plurality of first coil members connected in parallel to one of the + terminal and - terminal of the coil connection terminal unit, and the other of the + terminal and - terminal of the coil connection terminal unit. It is characterized in that it includes a plurality of second coil members connected in parallel to one terminal, and a plurality of coil connection members respectively connecting the plurality of first coil members and the second coil members.

In the present invention, the induction heating unit may further include a coil cooling unit formed in the induction coil unit to prevent a temperature rise of the induction coil unit and connected to the feed-through unit to circulate cooling water. .

In the present invention, the coil cooling unit is formed by forming the induction coil unit and the coil connection terminal unit in a hollow body shape for circulation of the cooling water, and the cooling water is supplied through the feed-through unit. do.

In addition, in the present invention, the coil connection terminal unit is fixed to the terminal coupling member coupled to the feed-through unit and the induction coil unit is connected to the terminal coupling member, and the induction coil unit and the terminal coupling member are connected in parallel. It is characterized in that it comprises a coil connecting member to.

Further, in the present invention, the terminal coupling member and the coil connection member are characterized in that they are formed in a hollow body shape to supply cooling water for cooling the induction coil unit.

Further, in the present invention, the coil connection member is characterized in that a connection hole portion to which the induction coil unit is coupled is formed.

In addition, in the present invention, the feed-through unit is fixed to the chamber, and is coupled to a flange portion in which a terminal assembly hole portion is formed and penetrates the flange portion from the outside of the chamber, and a power line to which an external power line is connected. It is characterized in that it includes a connection part and a coil terminal connection part coupled to the power line connection part inside the chamber and coupled to the induction heating unit.

Further, in the present invention, the power line connection part and the coil terminal connection part are characterized in that a cooling water supply line is formed to communicate with each other, and mutual coupling parts are sealed so that cooling water for cooling to the induction heating unit can be supplied.

In the present invention, the power line connection part is characterized in that the cooling water supply line is formed, inserted into the terminal assembly hole to be supported by the flange part, and fixed to the flange part by fastening a fixing nut.

In the present invention, the coil terminal connection part is characterized in that the cooling water supply line is formed, coupled to the power line connection part through a joint nut, sealed, and coupled to the induction heating unit by a coupler block.

As described above, in the high frequency induction heating device according to one aspect of the present invention, unlike the prior art, the induction coil unit oscillating high frequency for heating the crucible can be connected in parallel to the feed-through unit for supplying power. Therefore, it is possible to increase the current that can be applied while lowering the voltage applied to the induction coil unit, thereby improving the high-frequency oscillation performance of the induction coil unit, thereby improving the heating effect of the crucible.

In addition, according to the high-frequency induction heating device according to the present invention, since the cooling water supply line is integrally formed inside the coil cooling unit for cooling the induction heating unit and the feed-through unit for supplying cooling water in a hollow shape, the cooling effect can be improved. have a possible effect.

In addition, according to the high-frequency induction heating device according to the present invention, since the hollow cooling water supply line can be integrally formed in the feed-through unit for power application, current application and cooling water circulation can be implemented simultaneously with one component have an effect

In addition, according to the high-frequency induction heating device according to the present invention, since the feed-through unit can be separated from the inside and outside of the vacuum chamber, it has an effect of improving installation workability and maintenance function.

1 is a perspective view for explaining a high-frequency induction heating device according to an embodiment of the present invention.
Figure 2 is a side view of Figure 1;
3 is a perspective view for explaining an induction heating unit according to an embodiment of the present invention.
4 is an enlarged perspective view illustrating an induction heating unit according to an embodiment of the present invention.
5 is a side view illustrating a connection between an induction coil unit and a coil connection terminal unit according to an embodiment of the present invention.
6 is a plan view illustrating a connection state between an induction heating unit and a feed through unit according to an embodiment of the present invention.
7 is a perspective view for explaining a feed-through unit according to an embodiment of the present invention.
8 is a cross-sectional view for explaining a feed-through unit according to an embodiment of the present invention.

Hereinafter, a preferred embodiment of a high-frequency induction heating device according to the present invention will be described with reference to the accompanying drawings. In this process, the thickness of lines or the size of components shown in the drawings may be exaggerated for clarity and convenience of explanation.

In addition, terms to be described later are terms defined in consideration of functions in the present invention, which may vary according to the intention or custom of a user or operator. Therefore, definitions of these terms will have to be made based on the content throughout this specification.

1 is a perspective view for explaining a high-frequency induction heating device according to an embodiment of the present invention, FIG. 2 is a side view of FIG. 1, and FIG. 3 is a perspective view for explaining an induction heating unit according to an embodiment of the present invention. 4 is an enlarged perspective view illustrating an induction heating unit according to an embodiment of the present invention.

5 is a side view showing the connection between an induction coil unit and a coil connection terminal unit according to an embodiment of the present invention, and FIG. 6 describes a connection state between an induction heating unit and a feed-through unit according to an embodiment of the present invention. FIG. 7 is a perspective view for explaining a feed-through unit according to an embodiment of the present invention, and FIG. 8 is a cross-sectional view for explaining a feed-through unit according to an embodiment of the present invention.

1 to 8, the high frequency induction heating device according to an embodiment of the present invention is installed in a vacuum chamber 10 to deposit a surface treatment material on a substrate in an organic light emitting diode (OLED) manufacturing process. .

Such a high-frequency induction heating apparatus may be applied to a wet deposition technique in which liquid or powder deposition material is heated and vaporized, and the vaporized gas deposition material is deposited by discharging the vaporized deposition material toward a substrate for surface treatment.

In this embodiment, the high-frequency induction heating device is applied to an organic light emitting diode (OLED) manufacturing process as an example, but it may be used in the field of surface treatment technology, such as metal.

The high-frequency induction heating device according to the present embodiment includes a crucible 100 for accommodating a deposition material and vaporizing the deposition material through heating, an induction heating unit 200 for heating the crucible 100, and , and a feed-through unit 300 for power supply and cooling water supply of the induction heating unit 200.

In such a high-frequency induction heating device, when power is supplied through the feed-through unit 300 and current is applied to the induction heating unit 200, a high frequency is generated in the induction heating unit 200 to break the crucible 100. As it is heated, the deposition material accommodated in the crucible 100 is vaporized and discharged from the crucible 100 . In addition, the cooling water supplied to the outside through the feed-through unit 300 circulates through the induction heating unit 200 to prevent a temperature increase of the induction heating unit 200 .

The crucible 100 according to the present embodiment is any one of quartz, graphite series, tantalum, titanium, and alumina, which have excellent heat resistance, electrical insulation, and heat retention. It can be formed by the above, and can be formed in a double structure with different materials so that thermal efficiency can be further improved and electrical conductivity can be properly maintained.

The crucible 100 is installed inside the vacuum chamber 10, the induction heating unit 200 is disposed outside, and induction heating is performed through high frequency waves generated from the induction heating unit 200.

The induction heating unit 200 according to this embodiment oscillates a high frequency when current is applied through the feed-through unit 300, and the crucible 100 is heated according to the oscillation of the high frequency. In the induction heating unit 200, a coil that generates high frequency is connected in parallel to a terminal for applying current, so that the voltage applied to the coil can be lowered while increasing the intensity of the current. Since high-frequency oscillation performance can be improved through this, heating performance of the crucible 100 can be improved.

In addition, the induction heating unit 200 is heated to a high temperature during use due to application of power, and stable cooling is possible through the circulation of cooling water, thereby increasing safety in use.

To this end, the induction heating unit 200 according to the present embodiment includes an induction coil unit 210 for heating the crucible 100 by oscillating at a high frequency, and the induction coil unit 210 in parallel with the feed-through unit 300. It includes a coil connection terminal unit 220 for connecting and supplying power, and a coil cooling unit 230 for cooling the induction coil unit 210 .

Due to this, the induction heating unit 200 can significantly lower the voltage generated in the induction coil unit 210 while increasing the value of the current applied to the induction coil unit 210 by more than two times, and the coil cooling unit 230 ) can efficiently cool the temperature of the induction coil unit 210.

The induction coil unit 210 includes a plurality of first coil members 211 connected in parallel to one of the + terminal and - terminal of the coil connection terminal unit 220, the + terminal of the coil connection terminal unit 220, and - A plurality of second coil members 213 connected in parallel to the other one of the terminals, and a plurality of coil connection members respectively connecting the plurality of first coil members 211 and the second coil member 213 ( 215).

In the induction coil unit 210, the first coil member 211 and the second coil member 213 are arranged in a vertical line so as to be located outside the crucible 100, and the first coil member 211 and the second coil member 213 are arranged in a row. The two-coil member 213 and the coil connection member 215 are formed in a hollow body form to form a coil cooling unit 230 for circulation of cooling water.

In addition, the induction coil unit 210 is a rectangular first coil such that the outer surfaces of the first coil member 211 and the second coil member 213 are closer to the outer surface of the crucible 100 and form a uniform surface. The member 211 and the second coil member 213 are formed in a rectangular shape. Through this, it is possible to reduce the separation distance between each of the first coil member 211 and the second coil member 213, so that the strength of the electromagnetic field is increased at the spaced part of the first coil member 211 and the second coil member 213. degradation can be minimized.

In addition, the induction coil unit 210 narrows its width (W) through the first coil member 211 and the second coil member 213 of a rectangular shape, and the corresponding surface of the crucible 100 and the corresponding surface The height (L) can be made wider. Through this, the induction coil unit 210 can increase the height L while preventing the increase in the width W of the first coil member 211 and the second coil member 213, thereby increasing the size while reducing the installation space. can do.

The plurality of first coil members 211 are formed in the shape of a rectangular hollow pipe, and are respectively connected to the coil connection terminal unit 220 and the coil connection member 215 in two vertical rows. For example, each of the first coil members 211 has one end connected in parallel to the (+) terminal of the coil connection terminal unit 220 and the other end connected to the plurality of coil connection members 215 in series, respectively. It can be connected to the second coil member 213 of. In addition, cooling water is circulated into the hollow of the first coil member 211 .

The plurality of second coil members 213 are formed in the form of a rectangular hollow pipe to have the same cross-sectional shape as the first coil member 211, and are respectively positioned below and above the first coil member 211 arranged in parallel. and connected to the coil connection terminal 220 and the coil connection member 215, respectively.

For example, each second coil member 213 has one end connected in parallel to the (-) terminal of the coil connection terminal unit 220 and the other end connected in series to each coil connection member 215 to form a plurality of Each may be connected to the first coil member 211 . Specifically, the upper second coil member 213 among the plurality of second coil members 213 is connected to the first coil member 211 disposed on the upper side among the parallel first coil members 211, and The second coil member 213 is connected to the first coil member 211 disposed on the lower side of the parallel first coil members 211 .

In addition, cooling water for cooling is circulated into the hollow of the second coil member 213 as in the first coil member 211 .

In this way, since the cooling water circulates inside the induction coil unit 210 and cools the second coil member 213 and the first coil member 211, as the induction heating unit 200 operates, the high frequency induction heating device generates It is possible to minimize the diffusion of heat to the outside.

In this embodiment, the induction coil unit 210 is connected in parallel in four rows up and down by two first coil members 211 and two second coil members 213, but it is described as an example. Accordingly, the first coil member 211 and the second coil member 213 may be connected in parallel in three or more rows.

In addition, in the present embodiment, the first coil member 211 and the second coil member 213 are described as having a rectangular shape as an example, but may be formed in an ellipse, a rectangle, or a triangle according to a user's needs.

Two coil connection members 215 are vertically spaced apart from each other so as to connect the first coil member 211 and the second coil member 213 which are vertically arranged in parallel. For example, the coil connection member 215 includes a first connection member 215a for connecting the upper first coil member 211 and the second coil member 213, and the lower first coil member 211 and A second connection member 215b for connecting the second coil member 213 is provided.

At this time, the first connection member 215a and the second connection member 215b each have coupling holes 215b into which the first coil member 211 and the second coil member 213 are inserted, respectively, and the cooling water circulates. It is formed in a hollow shape for The coupling hole 215b has a stepped inner surface into which the ends of the first coil member 211 and the second coil member 213 are inserted so that the ends of the first coil member 211 and the second coil member 213 are accurately inserted. it is formed

Since the induction heating unit 200 configured as above can connect the first coil member 211 and the second coil member 213 disposed vertically using the coil connecting member 215, it can be manufactured in a prefabricated manner. It is possible to manufacture quickly and accurately while preventing the occurrence of defects. That is, productivity can be improved.

The coil connection terminal unit 220 according to the present embodiment is connected to the induction coil unit 210 and the feed-through unit 300 so that the induction coil unit 210 can be connected to the feed-through unit 300 in parallel. Specifically, the coil connection terminal unit 220 includes a terminal coupling member 221 coupled to the (+) terminal and the (-) terminal of the feed-through unit 300, the first coil member 211 and the second coil member. 213 includes a coil connection member 223 coupled to the terminal coupling member 221 so that each is connected in parallel. At this time, in the coil connection terminal part 220, a hollow part is formed in the terminal coupling member 221 and the coil connection member 223 for circulation of cooling water.

The terminal coupling member 221 includes a first coupling member 221a coupled to the (+) terminal of the feed-through unit 300 and a second coupling member 221b coupled to the (-) terminal of the feed-through unit 300. ) is provided. Here, the first coupling member 221a may be connected to the first coil member 211 and the second coupling member 221b may be connected to the second coil member 213 .

The coil connection member 223 is fixed to the terminal coupling member 221 so that the first coil member 211 and the second coil member 213 are connected in parallel. For example, the coil connection member 223 includes a first parallel connection member 223a coupled to the first coupling member 221a so that the first coupling member 221a is vertically connected in parallel, and a second coupling member 221b. is provided with a second parallel connection member (223b) coupled to the second coupling member (221b) so as to be vertically connected in parallel.

In addition, the first parallel connection member 223a and the second parallel connection member 223b have connection holes 223c spaced apart from each other, and the first coil member 211 and the second coil member are formed in the connection hole 223c. (213) are coupled and connected in parallel.

The coil cooling unit according to the present embodiment is provided in the induction heating unit 200 to prevent the temperature of the induction coil unit 210 from rising, and is connected to the feed-through unit 300 so that cooling water is circulated. The coil cooling unit 230 is formed by forming a hollow between the induction coil unit 210 and the coil connection terminal unit 220 so as to be integrally formed with the induction heating unit 200, and through the feed-through unit 300 Cooling water is supplied and circulated. As such, when the coil cooling unit 230 is formed of a hollow structure, there is no need to separately construct and install a cooling water circulation line for cooling water circulation.

Meanwhile, in the induction heating unit 200, each connection portion between the induction coil unit 210 and the coil connection terminal unit 220 may be welded to prevent leakage during circulation of cooling water.

The feed-through unit 300 according to the present embodiment is coupled to the vacuum chamber 10 so that a terminal for power application and a cooling water line for supplying cooling water are integrally formed, and the first parallel connection member of the coil connection member 223 (223a) and the second parallel connection member (223b) are respectively connected. This feed-through unit 300 is configured to be easily assembled and maintained in the vacuum chamber 10 .

Specifically, the feed-through unit 300 includes a flange portion 310 fixed to the vacuum chamber 10 and a power line connection portion 320 coupled from the outside of the vacuum chamber 10 so as to pass through the flange portion 310. , It includes a coil terminal connection part 330 coupled to the power line connection part 320 inside the vacuum chamber 10 and connecting the power line connection part 320 and the coil connection terminal part 220 .

In the feed-through unit 300, a cooling water supply line 340 is formed at the power line connection part 320 and the coil terminal connection part 330 to supply and collect cooling water, and the flange part 310 and the power line connection part 320 ) and the mutual coupling portion of the coil terminal connection part 330 is sealed.

The flange part 310 is inserted into the installation hole of the vacuum chamber 10, and the insulation pipe 311 protecting the power line connection part 320 and the insulation pipe 311 are coupled, and the outer surface of the vacuum chamber 10 A terminal assembly plate 313 is coupled. Two spaced apart terminal assembly holes 315 for assembling the power line connection part 320 are formed in the terminal assembly plate 313, and the power line connection part 320 is inserted from the outside of the vacuum chamber 10.

The power line connector 320 is inserted through the terminal assembly hole 315 so that an external power line is connected, and is fixed to the terminal assembly plate 313 through a fixing nut 321 fastened inside the vacuum chamber 10. do. At this time, the power line connection part 320 is sealed with the terminal assembly plate 313 and the coil terminal connection part 330, respectively, and a cooling water supply line 340 for supplying cooling water is formed.

In addition, the power line connection unit 320 includes a (+) terminal member 323 to which the first coupling member 221a of the coil connection terminal unit 220 is connected through the coil terminal connection unit 330, and the coil terminal connection unit 330. It may be made of a (-) terminal member 325 connected to the second coupling member 221b through.

The coil terminal connection part 330 is sealingly coupled to the power line connection part 320 inside the vacuum chamber 10 and coupled to the power line connection part 320 inside the vacuum chamber 10 through a joint nut 331. .

In addition, the coil terminal connection part 330 is a first coupler block 333 that connects the (+) terminal member 323 of the power line connection part 320 and the first coupling member 221a of the induction heating unit 200. , A second coupler block 335 connecting the (-) terminal member 325 of the power line connection part 320 and the second coupling member 221b of the induction heating unit 200 is provided.

In addition, the coil terminal connection part 330 has a cooling water supply line 340 formed through a hollow part, and is coupled to the power line connection part 320 through a joint nut 331 fastened to the power line connection part 320 to be sealed. .

The high-frequency induction heating device according to the present invention configured as described above includes the first coil member 211 and the second coil member 213 of the induction coil unit 210 that heats the crucible 100 by oscillating high-frequency waves. Since is connected in parallel to the feed-through unit 300 that supplies power through the coil connection terminal unit 220, the voltage applied to the induction coil unit 210 can be lowered while increasing the value of the applied current. Therefore, the high-frequency oscillation performance of the induction coil unit 210 is improved, so that the heating effect of the crucible 100 can be improved.

In addition, in the high-frequency induction heating device according to the present invention, the first coil member 211 and the second coil member 213 of the induction coil unit 210 for heating of the crucible 100 are formed in a hollow rectangular shape. Therefore, it can be installed closer to the outer surface of the crucible 100 while reducing the space between the first coil member 211 and the second coil member 213. Therefore, since the induction of the magnetic field generated by the induction coil unit 210 can be made uniform, the heating effect of the crucible 100 can be further improved while reducing the loss. , heating and cooling are possible while reducing the number of parts, and the cooling effect can be improved.

In addition, in the high-frequency induction heating device according to the present invention, since the hollow cooling water supply line 340 is integrally formed in the feed-through unit 300 for power application, power supply and cooling water circulation are simultaneously performed as one component. In addition, since the feed-through unit 300 can be separated from the inside and outside of the vacuum chamber 10, installation workability and maintenance function can be improved.

The present invention has been described with reference to the embodiments shown in the drawings, but this is only exemplary, and those skilled in the art can make various modifications and equivalent other embodiments. will understand

Therefore, the true technical protection scope of the present invention should be determined by the claims.

100: crucible 200: induction heating unit
210: induction coil unit 211: first coil member
213: second coil member 215: coil connection member
215a: first connecting member 215b: second connecting member
215c: coupling groove part 220: coil connection terminal part
221: terminal coupling member 221a: first coupling member
221b: second coupling member 223: coil connection member
223a: first parallel connection member 223b: second parallel connection member
223c: connection hole part 230: coil cooling part
300: feed-through unit 310: flange part
311: insulation pipe 313: terminal assembly plate
315: terminal assembly hole 320: power line connection
321: fixing nut 323: (+) terminal member
325: (-) terminal member 330: coil terminal connection part
331: joint nut 333: first coupler block
335: second coupler block 340: cooling water supply line

Claims (13)

a crucible installed inside the chamber and accommodating a material for deposition; an induction heating unit generating a high frequency to heat the crucible; And a feed-through unit coupled to the chamber and connected to the induction heating unit to apply external power to the induction heating unit; includes,
The induction heating unit may include an induction coil unit for heating the crucible and circulating cooling water in a hollow body shape; and a coil connection terminal unit connecting the induction coil unit to the feed-through unit in parallel,
The coil connection terminal unit may include a terminal coupling member coupled to the feed through unit; and
A coil connection member fixed to the terminal coupling member to which the induction coil unit is connected and connecting the induction coil unit and the terminal coupling member in parallel;
The high-frequency induction heating device, characterized in that the terminal coupling member and the coil connection member are formed in the form of a hollow body to supply cooling water for cooling the induction coil unit. delete delete According to claim 1,
The induction coil unit is a high-frequency induction heating device, characterized in that formed in a polygonal shape. According to claim 1,
The induction coil unit may include a plurality of first coil members connected in parallel to one of a + terminal and a - terminal of the coil connection terminal unit;
a plurality of second coil members connected in parallel to the other one of the + terminal and the - terminal of the coil connection terminal unit; and
a plurality of coil connection members respectively connecting the plurality of first coil members and the second coil member;
High-frequency induction heating device comprising a. According to claim 1,
The induction heating unit may include: a coil cooling unit formed in the induction coil unit to prevent an increase in temperature of the induction coil unit, and connected to the feed-through unit to circulate cooling water;
High-frequency induction heating device further comprising a. According to claim 6,
The coil cooling unit is formed by forming the induction coil unit and the coil connection terminal unit in a hollow body shape for circulation of the cooling water, and the cooling water is supplied through the feed-through unit. . delete According to claim 1,
The coil connection member is a high-frequency induction heating device, characterized in that the connection hole portion to which the induction coil unit is coupled is formed. According to claim 1,
The feed through unit may include a flange portion fixed to the chamber and having a terminal assembly hole portion formed therein;
a power line connection portion coupled to pass through the flange portion from the outside of the chamber and to which an external power line is connected; and
a coil terminal connection part coupled to the power line connection part inside the chamber and coupled to the induction heating unit;
High-frequency induction heating device comprising a. According to claim 10,
The power line connection part and the coil terminal connection part are formed such that a cooling water supply line is communicated so as to supply cooling water for cooling to the induction heating unit, and a mutually coupled portion is sealed. High-frequency induction heating device. According to claim 11,
The power line connection part is formed with the cooling water supply line, is inserted into the terminal assembly hole so as to be supported by the flange part, and is fixed to the flange part through fastening of a fixing nut. According to claim 11,
The coil terminal connection part is a high-frequency induction heating device, characterized in that the cooling water supply line is formed, coupled to the power line connection part through a joint nut, sealed, and coupled to the induction heating unit by a coupler block.

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