KR101973255B1 - Heating assembly - Google Patents

Abstract

The present invention relates to a heating assembly, a crucible in which a space for accommodating a deposition material according to an aspect of the present invention is formed, and at least one nozzle for guiding the deposition material to the outside is embodied; A coil disposed on the outer side of the crucible and having a high frequency power applied thereto to generate a dynamic magnetic field around the coil current corresponding to the high frequency power; And a magnetic field focusing structure disposed around the coil, wherein the crucible generates an induced current in the outer wall by the dynamic magnetic field, and is generated based on the induced current and the electrical resistance element of the crucible And the heat generated in the crucible rises by the focusing of the dynamic magnetic field formed around the coil by the magnetic field focusing structure. .

Description

HEATING ASSEMBLY

The present invention relates to a heating assembly, and more particularly, to a heating assembly that can focus a magnetic field for induction heating a crucible to control the thermal distribution of the crucible and increase the actual efficiency of vapor deposition.

The crucible is a kind of bowl in which a space capable of containing a substance to be heated by a heating means is formed therein. The crucible is embodied so that it can be heated by a heating means and held at a high temperature. The amount of heat that the crucible has heated can be transferred to the substance contained in the crucible. Accordingly, the material can be heated.

Such crucibles have been utilized in many ways for the heating of materials which must be heated at high temperatures. The above crucibles have been used for the means of heating and smelting a metal having a high melting temperature, the means for heating to blend various metal materials, and the like. Particularly, recently, in the production of a panel for a display device or the like, the crucible is a means for heating and moving the evaporation material deposited on the surface of the panel, and for guiding the evaporation material to the surface of the panel .

However, when the deposition material contained in the crucible is heated to deposit the deposition material on the deposition surface (or the target surface, target surface) of the panel or the like, the deposition material that can be properly formed on the deposition surface Actual efficiency may be important. Therefore, there has been a growing demand for the implementation technology of crucible that can enhance the effectiveness of deposition recently.

An object of the present invention is to provide a heating assembly having a high thermal energy transferred to a deposition material placed on the crucible with respect to energy supplied to a heating means for heating the crucible.

It is another object of the present invention to provide a heating assembly capable of controlling the thermal distribution of the crucible so that the deposition material can be uniformly formed on the deposition surface.

A further object of the present invention is to provide a heating assembly which allows the deposition material to be discharged smoothly through the nozzles of the crucible.

It is to be understood that the present invention is not limited to the above-described embodiments and that various changes and modifications may be made without departing from the spirit and scope of the present invention as defined by the following claims .

According to one aspect of the present invention there is provided a heating assembly for depositing a material on a surface of an object to be vapor deposited, comprising: an outer wall defining an inner space, the outer wall comprising an upper portion and a lower portion, A heating container having a separation structure formed on the outer wall; A coil for forming an induction current in the outer wall so that the heating vessel is heated; A power generator having a power supply line for supplying power to the coil; And a coil connecting member for electrically connecting the coil and the power generator, wherein the coil includes a first coil and a second coil, the coil connecting member includes a first coil connecting member and a second coil connecting member Wherein the power supply line includes a first power supply line and a second power supply line, wherein the first coil has a first positional relationship with the heating container, and the second coil has a first positional relationship with the heating container, Wherein the first coil connecting member is connected to one side of the first coil, one side of the second coil, and the first power supply line, and the second coil connecting member is connected to one side of the first coil, And an electrical detachment structure between the first coil connection member and one side of the first coil, one side of the second coil, or at least one of the first power supply lines, And the second coil connection May be provided with a heating assembly, it characterized in that the material and the second electrically detachable structure in at least one of between the first coil on the other side, or the other side of the second coil is formed.

According to another aspect of the present invention, there is provided a heating apparatus comprising: a heating vessel including an outer wall defining an inner space in which a deposition material is placed; A coil for forming an induction current in the outer wall to heat the heating vessel; A power generator for generating driving power for driving the coil; And a coil connecting member for electrically connecting the coil and the power generator, wherein the outer wall of the heating vessel includes a first region and a second region, Wherein the coil has a first coil and a second coil, the first coil has a first positional relationship with the heating vessel, and the second coil has a first position with respect to the heating vessel and a second position The coil connecting member includes a first coil connecting member and a second coil connecting member, and the first coil connecting member may be provided with a heating assembly electrically connected to one side of the first coil.

It is to be understood that the solution of the problem of the present invention is not limited to the above-mentioned solutions, and the solutions which are not mentioned can be clearly understood by those skilled in the art to which the present invention belongs It will be possible.

According to the present invention, the thermal energy transferred to the deposition material placed on the crucible can be increased with respect to the energy supplied to the heating means for heating the crucible.

According to the present invention, the thermal distribution of the crucible can be controlled so that the deposition material can be uniformly formed on the deposition surface.

According to the present invention, the deposition material can be discharged smoothly through the nozzles of the crucible.

The effects of the present invention are not limited to the effects described above, and the effects not mentioned can be clearly understood by those skilled in the art from the present specification and the accompanying drawings.

1 is a block diagram showing a configuration of a deposition apparatus according to an embodiment of the present application.
Figure 2 is a diagram of a cruise according to one embodiment of the present application.
3 is a view of a protruding nozzle formed in a crucible in accordance with one embodiment of the present application.
4 is a view showing the shape of a coil according to an embodiment of the present application.
5 is a diagram illustrating a crucible and a coil according to one embodiment of the present application.
6 is a view showing an example in which a coil is implemented according to an embodiment of the present application.
7 is a view of a coil disposed near a protrusion nozzle according to an embodiment of the present application.
12 is a conceptual diagram showing a magnetic field generated by a coil according to an embodiment of the present application.
13 is a conceptual diagram showing a magnetic field and a crevice formed in a coil according to an embodiment of the present application.
14 is a diagram showing ferrite placed in a magnetic field according to an embodiment of the present application.
15 is a diagram showing a magnetic field formed around a ferrite, a coil, and a coil according to an embodiment of the present application.
16 is a diagram illustrating ferrite disposed in a heating assembly in accordance with one embodiment of the present application.
FIG. 17 is a graph of the distribution of magnetic field intensity change values according to an embodiment of the present application. FIG.
18 is a cut-away side view of a ferrite included in the outer wall of a crucible in accordance with one embodiment of the present application.
19 is a view showing a shape realized by applying ferrite according to an embodiment of the present application to a deposition apparatus.
20 is a schematic diagram illustrating the thermal distribution of a crucible in accordance with one embodiment of the present application.
Figure 21 is a schematic diagram illustrating the thermal distribution of a crucible in accordance with one embodiment of the present application.
22 is a side sectional view showing an example of a change in the shape of the crucible according to the embodiment of the present application.
23 is a side cut-away view illustrating examples of variations in the thickness of the crucible according to one embodiment of the present application.
Figure 24 is a view of a coil formed on the outside of the crucible in accordance with one embodiment of the present application.
25 is a view of a coil formed on the outside of the crucible according to one embodiment of the present application.
FIG. 26 is a conceptual diagram showing an example in which a coil implemented in a deposition apparatus according to an embodiment of the present application is separately driven.
FIG. 27 is a diagram schematically illustrating the thermal distribution of a crucible according to an embodiment of the present invention. FIG.
28 is a view of ferrite inserted between coils according to one embodiment of the present application;
29 is a view showing various shapes of ferrite according to an embodiment of the present application.
30 is a view showing a ferrite disposed in a form covering the lower surface of a crucible according to an embodiment of the present application.
31 is a view showing the shape of ferrite according to an embodiment of the present application.
32 is a cutaway side view showing a ferrite included in the outer wall of a crucible in accordance with one embodiment of the present application.
33 is a view of ferrite applied to a heating assembly in accordance with an embodiment of the present application.
34 is a view showing that ferrite is formed in a portion of the crucible near the nozzle according to the embodiment of the present application.
Figure 35 is a side view of a crevice according to one embodiment of the present application.
Figure 36 is a diagram of a design of a heating assembly in the Y-axis direction in accordance with an embodiment of the present application.
37 is a diagram of a design of a heating assembly in the Y-axis direction in accordance with one embodiment of the present application.
38 is a diagram of a design of a heating assembly in the Y-axis direction in accordance with one embodiment of the present application.
39 is a diagram of a design of a heating assembly in the Y-axis direction in accordance with an embodiment of the present application.
40 is a view of a heating assembly implemented in combination with embodiments in the Z direction of a crucible in accordance with one embodiment of the present application.
41 is a view of a heating assembly implemented in combination with embodiments in the X, Y, and Z directions of a crucible in accordance with one embodiment of the present application.
Figure 42 is a diagram illustrating the thermal distribution of a crucible in accordance with one embodiment of the present application.
Figure 43 is a diagram illustrating thermal distribution of a time-varying crucible in accordance with one embodiment of the present application.
Figure 44 is a view of a heating assembly having a heat conduction suppression element formed therein according to one embodiment of the present application.
45 is a graph showing controlled thermal equilibrium according to one embodiment of the present application.
Figure 46 is a diagram showing transformers, input lines, and output lines in an external space according to one embodiment of the present application.
Figure 47 is a diagram illustrating a moving heating assembly in accordance with one embodiment of the present application.
Figure 48 is a view of a transformer, a vacuum box, and a heating assembly according to one embodiment of the present application.
Figure 49 is a diagram of a deposition apparatus according to one embodiment of the present application.
50 is a view of a deposition apparatus according to an embodiment of the present application.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to be illustrative of the present invention and not to limit the scope of the invention. Should be interpreted to include modifications or variations that do not depart from the spirit of the invention.

Although the terms used in the present invention have been selected in consideration of the functions of the present invention, they are generally used in general terms. However, the present invention is not limited to the intention of the person skilled in the art to which the present invention belongs . However, if a specific term is defined as an arbitrary meaning, the meaning of the term will be described separately. Accordingly, the terms used herein should be interpreted based on the actual meaning of the term rather than on the name of the term, and on the content throughout the description.

The drawings attached hereto are intended to illustrate the present invention easily, and the shapes shown in the drawings may be exaggerated and displayed as necessary in order to facilitate understanding of the present invention, and thus the present invention is not limited to the drawings.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a detailed description of known configurations or functions related to the present invention will be omitted when it is determined that the gist of the present invention may be obscured.

According to one aspect of the present invention there is provided a heating assembly for depositing a material on a surface of an object to be vapor deposited, comprising: an outer wall defining an inner space, the outer wall comprising an upper portion and a lower portion, A heating container having a separation structure formed on the outer wall; A coil for forming an induction current in the outer wall so that the heating vessel is heated; A power generator having a power supply line for supplying power to the coil; And a coil connecting member for electrically connecting the coil and the power generator, wherein the coil includes a first coil and a second coil, the coil connecting member includes a first coil connecting member and a second coil connecting member Wherein the power supply line includes a first power supply line and a second power supply line, wherein the first coil has a first positional relationship with the heating container, and the second coil has a first positional relationship with the heating container, Wherein the first coil connecting member is connected to one side of the first coil, one side of the second coil, and the first power supply line, and the second coil connecting member is connected to one side of the first coil, And an electrical detachment structure between the first coil connection member and one side of the first coil, one side of the second coil, or at least one of the first power supply lines, And the second coil connection May be provided with a heating assembly, it characterized in that the material and the second electrically detachable structure in at least one of between the first coil on the other side, or the other side of the second coil is formed.

According to another aspect of the present invention, there is provided a heating apparatus comprising: a heating vessel including an outer wall defining an inner space in which a deposition material is placed; A coil for forming an induction current in the outer wall to heat the heating vessel; A power generator for generating driving power for driving the coil; And a coil connecting member for electrically connecting the coil and the power generator, wherein the outer wall of the heating vessel includes a first region and a second region, Wherein the coil has a first coil and a second coil, the first coil has a first positional relationship with the heating vessel, and the second coil has a first position with respect to the heating vessel and a second position The coil connecting member includes a first coil connecting member and a second coil connecting member, and the first coil connecting member may be provided with a heating assembly electrically connected to one side of the first coil.

Further, a heating assembly may be provided, wherein an electrical desorption structure is formed between the first coil connecting member and the first coil.

Further, a protruding nozzle is formed in the first region of the heating vessel, the coil includes a first coil and a second coil, the first coil is disposed close to the protruding nozzle of the heating vessel, And the two coils are disposed close to the second region of the heating vessel.

The power supply line may further include a first power supply line and a second power supply line, and the first power supply line may include a first coil connecting member and a first coil connecting member, The heating assembly being connected to the coil.

Further, the second power supply line may be connected to the second coil, and the second coil connecting member may be connected to the second coil.

Further, a heating assembly may be provided wherein the physical shape of the first coil connecting member and the physical shape of the second coil connecting member are different from each other.

When the power generator generates power, the first driving power is applied to the first coil, the second driving power is applied to the second coil, and the first driving power and the second driving power The heating assembly can be provided at substantially the same time.

Also, a heating assembly may be provided, wherein an electrical property of the first driving power source is different from an electrical property of the second driving power source.

Hereinafter, a heating assembly according to an embodiment of the present invention will be described.

Thin film manufacturing technology is a field of surface treatment technology and is divided into wet method and dry method.

Among the aforementioned thin film manufacturing techniques, wet process thin film production techniques include (1) an electrolytic process in which an object to be processed is electrolyzed by hanging an object to be processed on an anode to form a processed material on the surface of the object, and (2) There is a wet method involving an electroless method using a sensitization process.

The dry process thin film manufacturing techniques include (1) physical vapor deposition (PVD), in which a solid treated material is evaporated in a high vacuum state to form on the surface of the object to be processed, (2) (3) a spraying method in which a to-be-processed material in a liquid state is sprayed onto the surface of the treated material and the treated material is coated on the surface of the treated material.

In the above-described thin film manufacturing techniques, a deposition apparatus 10000 implemented to change the state of a processed material by heating the processed material (in particular, a deposition material) and to guide the processed material to contact the surface of the object to be processed It can be important.

Therefore, the deposition apparatus 10000 of the present invention will be described below.

1. Deposition device

Hereinafter, a deposition apparatus 10000 according to an embodiment of the present application will be described.

A deposition apparatus 10000 according to an embodiment of the present application is an apparatus capable of depositing an evaporation material on a deposition surface. The vapor deposition apparatus 10000 of the present application is configured to increase the temperature of the crucible 3000 of the deposition apparatus 10000 by using a predetermined heating means 5000 to change the deposition material contained in the crucible 3000 into a state change . The state-changed deposition material may be discharged to the outside of the crucible 3000.

A deposition apparatus 10000 according to an embodiment of the present application can be used for the thin film manufacturing techniques described above. In addition, the deposition apparatus 10000 can also be used for simple heating, not for deposition according to the above-described thin film manufacturing techniques.

Hereinafter, the configuration of the deposition apparatus 10000 will be described.

1.1 Configuration of the deposition apparatus

1 is a block diagram showing a configuration of a deposition apparatus according to an embodiment of the present application.

Referring to FIG. 1, a deposition apparatus 10000 according to an embodiment of the present application includes a housing 1000, a crucible 3000, a heating means 5000, a magnetic field focusing structure 7000 as a heating auxiliary means, Other components 9000 may be included.

A space may be formed in the housing 1000 according to an embodiment of the present invention. The crucible 3000, the heating means 5000, the heating auxiliary means, and the other components 9000 can be implemented in the inner space of the housing 1000.

A deposition material, which is a material to be deposited, may be provided in a space formed inside the crucible 3000 according to an embodiment of the present invention. Further, the deposition material may be heated by receiving the heat generated by the heating means (5000).

Various types of materials can be selected as the deposition material that is placed in the inner space of the crucible 3000 according to one embodiment of the present application.

The deposition material may be an organic material. The organic material means a carbon-based compound. The organic material may be selected from the group consisting of i) natural organic substances such as amino acids, proteins, carbohydrates, penicillins and amoxicillin which can be obtained from animals or plants, ii) synthetic organic substances such as plastics artificially produced by humans, and iii) . The present application can heat the crucible 3000 to about 200 ° C so that the organic material is allowed to move freely.

In addition, the deposition material may be a metal material. The metal material may include magnesium (Mg), silver (Ag), aluminum (Al), or the like. The present application is capable of heating the crucible 3000 to a temperature above 1000C so that the metal material is allowed to move freely.

The heating means 5000 according to an embodiment of the present application may heat the crucible 3000 to change the state of the deposition material placed inside the crucible 3000.

The heating auxiliary means according to an embodiment of the present application can assist the heating means 5000 to efficiently heat the crucible 3000. [ As an example of the heating auxiliary means, there may be a magnetic field focusing structure 7000.

Other components 9000 in accordance with one embodiment of the present application may be a passage of a wire capable of supplying power, a power generating device that provides power to the deposition apparatus 10000, and the like. However, for ease of explanation, other components 9000 will not be described here. The deposition apparatus 10000 will be described together with the other components 9000 only when there are special circumstances in which the deposition apparatus 10000 of the present application should be described for other components 9000. [

On the other hand, among the configurations of the deposition apparatus 10000 described above, the assemblies 3000, the heating means 5000, the magnetic flux focusing structures 7000, and / or other configurations that can be realized are collectively referred to as a heating assembly .

Hereinafter, the heating assembly will be described in more detail.

1.1.1 Creepable

Figures 2 (a) - (b) are views showing the crucible according to one embodiment of the present application.

The crucible 3000 according to one embodiment of the present application may include an outer wall 3100, and at least one or more nozzles 3200.

The outer wall 3100 according to an embodiment of the present invention may define a space (hereinafter referred to as an inner space) inside the crucible 3000 as shown in FIG. 2 (b). The inner space may be provided with a deposition material for deposition.

The nozzle 3200 according to one embodiment of the present application may be a path for moving the deposition material. The deposition material placed in the inner space of the crucible 3000 may be phase-changed into a gas phase and / or a plasma state by receiving a sufficient amount of heat from the heating means 5000. The phase-shifted deposition material may be discharged to the outside of the crucible 3000 through the nozzle 3200 as shown in FIG. 2 (a).

The nozzle 3200 according to one embodiment of the present application may be formed on the crucible 3000 with various design specifications.

For example, when a plurality of the nozzles 3200 are formed, the intervals between the plurality of nozzles 3200 may be formed at various intervals. The intervals of the plurality of nozzles 3200 may be equally spaced. Alternatively, the interval between the nozzles 3200 may be gradually narrowed toward the side of the crucible surface.

Further, the shape of the hole of the nozzle 3200 may have various shapes. The shape of the hole of the nozzle may be various shapes such as a rectangular shape, an elliptical shape, etc. as well as a circular shape as shown in the drawings.

Hereinafter, the crucible 3000 of the present application will be described in more detail. Here, for convenience of explanation, one surface on which the nozzle 3200 is formed is referred to as an upper surface, and an opposite surface of the one surface is referred to as a lower surface, and surfaces excluding the upper surface and the lower surface will be referred to as a side surface.

The crucible 3000 according to one embodiment of the present application may have various shapes. For example, referring to FIG. 2 (a), the crucible 3000 may be in the shape of a rectangular parallelepiped. In addition, the crucible 3000 of the present application may be implemented in various forms such as a cone, a sphere, a hexagonal column, a cylinder, and a triangular column. That is, the crucible 3000 according to one embodiment of the present application may be implemented in any shape as long as it includes the deposition material.

Also, according to one embodiment of the present application, a variety of materials can be used to implement the crucible.

The material of the crucible may not be limited to any material, but preferably the material of the crucible 3000 of the present application may be a material having a property of flowing current well.

Also, considering the temperature at which the crucible 3000 is heated by the heating means 5000, the material for realizing the crucible 3000 can be selected. That is, the material of the crucible 3000 may be selected so that the crucible 3000 can perform its function without being melted even at a high temperature.

As shown in FIG. 2 (b), a structure that can open and close the crucible 3000 may be formed in the crucible 3000 according to one embodiment of the present application.

The nozzle 3200 according to an embodiment of the present invention may be embodied as a protruding shape having a predetermined length (hereinafter referred to as a protruding nozzle 3300) outside the cushion 3000.

The projecting nozzle 3300 may be formed in the crucible 3000 in various shapes and materials.

3 is a view of a protruding nozzle formed in a crucible in accordance with one embodiment of the present application.

Referring to FIG. 3, the protrusion nozzle 3300 may be formed in a hexagonal shape. For example, the shape of the protrusion nozzle 3300 is not limited to the illustrated shape, and may be a shape of a cylinder, a triangular prism, a cone, or the like.

In addition, various materials may be selected to implement the protruding nozzle 3300. For example, the projecting nozzle 3300 considers the issue that the joining of the crucible 3000 and the projecting nozzle 3300 becomes unstable due to the thermal expansion of the crucible 3000 when the crucible 3000 is heated The material of the projecting nozzle 3300 can be used. That is, the material of the projecting nozzle 3300 may be the same material as the material of the crucible 3000 so that the same thermal expansion coefficient does not occur.

The heating assembly can be designed so that the evaporation material can be smoothly discharged through the protrusion nozzle according to the embodiment of the present invention.

For example, the material of the protrusion nozzle according to an embodiment of the present invention may be variously selected. A material having a low adhesion property with the deposition material may be selected as the material of the inner surface of the passage of the protruding nozzle. As the passage of the protruding nozzle and the adhesion characteristic of the evaporation material are lowered, the evaporation material can be smoothly discharged to the outside without moving to the protrusion nozzle and moving through the inner passage of the protrusion nozzle.

Further, the shape of the protruding nozzle according to the embodiment of the present application can be variously implemented.

The shape of the internal passage of the protruding nozzle can be varied. For example, the internal passage of the protruding nozzle may be configured to have a predetermined inclination.

1.1.2 Heating means

The deposition apparatus 10000 according to an embodiment of the present application may be provided with a heating means 5000 capable of raising the temperature of the crucible 3000. [

The heating means 5000 may be implemented in various forms. For example, the heating means 5000 according to one embodiment of the present application may include (1) a conventional heating means 5000 such as a pipe capable of supplying thermal steam, and a heating device using fossil fuel, (2) , A heating source (5000) such as a sputtering heating source that heats the target material with a momentum transfer of the momentum, an arc heating source that is heated by an arc, a resistance heating source that heats based on electrical resistance of a wire, and the like.

However, the coil 6000 can be preferably selected as the heating means 5000 of the present application. The coil 6000 can form a dynamic magnetic field that changes in time and space based on the high-frequency coil current flowing in the coil 6000. As a result, the magnetic field formed around the coil 6000 can heat the crucible 3000 by inducing a current in the crucible 3000 and generating heat in the crucible 3000. The operation in which the crucible 6000 is heated by the coil will be described later in detail.

Hereinafter, the coil 6000 will be described in more detail.

The coil 6000 according to one embodiment of the present invention can be implemented with various materials through which a current can flow. For example, a conductor may preferably be selected as the material of the coil 6000. The conductor may include a metal body, a semiconductor, a superconductor, a plasma, graphite, and a conductive polymer. However, various materials of the coil can be selected without being limited to the above.

4 is a view showing the shape of a coil according to an embodiment of the present application.

Referring to FIG. 4, the coil 6000 according to one embodiment of the present application may have various shapes. For example, the coil 6000 can have (1) an open shape implemented as a single loop of a toroidal or ring shape, and (2) a closed shape formed as a plurality of loops in a cylindrical shape with an empty interior . However, the present invention is not limited to the shape of the coil 6000 shown in FIG. 6, and the coil 6000 can be formed in any shape as long as it can generate a magnetic field.

Hereinafter, for convenience of explanation, a portion where a plurality of windings constituting the coil 6000 are seen is referred to as a side portion of a closed shape, and a portion having a hole such as a circle or a square in a coil 6000 of a closed shape is referred to as a coil 6000 ). The definition of the structure of the coil 6000 may be applied to the open shape coil 6000 as well.

The current-carrying windings constituting the coil 6000 according to an embodiment of the present application may have various forms. For example, the shape of the winding can be implemented in various shapes to have various shapes such as a round shape and a rectangular shape.

Also, for example, the thickness of the winding may also vary in thickness depending on the purpose.

Meanwhile, an empty space may be formed inside the winding constituting the coil 6000 according to an embodiment of the present invention. For example, an empty space may be formed inside the coil of the coil 6000 so that a fluid capable of serving as cooling water such as water flows. The fluid flowing along the coil 6000 may have an effect of controlling the temperature so that the coil 6000 does not rise above a certain temperature.

The arrangement of the coil 6000 according to one embodiment of the present application may vary depending on the shape of the coil.

5 is a diagram illustrating a crucible and a coil according to one embodiment of the present application.

Referring to FIG. 5, as an aspect of the arrangement of the coil 6000 according to an embodiment of the present application, when the coil 6000 is a closed shape, the inside of the closed shape coil 6000 has a crosbible 3000 The coil 6000 may be disposed. It may also be a shape that locates the upper or lower portion of the closed shape coil 6000 at the top, side, and / or bottom of the crucible 3000, for example, in addition to the above-described arrangement. In the case of the open shape coil 6000, the above-described closed shape coil 6000 may be disposed. In the case of the coil 6000 of the open shape of a single loop, (3000).

Further, the coil 6000 according to one embodiment of the present application may be arranged corresponding to the structure and / or means formed in the crucible 3000. [

6 is a view showing an example in which a coil is implemented according to an embodiment of the present application.

Referring to FIG. 6, when the nozzle 3200 protrudes from the crucible 3000, the coil 6000 may be disposed up to a position corresponding to the protrusion nozzle 3300 as shown in FIG. When the evaporation material passing through the protrusion nozzle 3300 does not receive a sufficient amount of heat, the evaporation material can not smoothly move the passage of the protrusion nozzle 3300. Accordingly, when the coil is disposed around the protruding nozzle 3300, the coil 6000 supplies a sufficient amount of heat to smoothly move the evaporated material moving in the path of the protruding nozzle 3300 to the evaporated surface .

The heating assembly 2000 according to an embodiment of the present invention may include a first coil 6010 and a second coil 6020.

The first coil 6010 and the second coil 6020 may be separated from each other, but may be electrically or physically connected. For ease of explanation, it is assumed that the first coil 6010 and the second coil 6020 are connected to each other.

The number of turns of the first coil 6010 and the number of turns of the second coil 6020 may be selected such that the number of turns of the first coil 6010 and the number of turns of the second coil 6020 are different from each other. For example, the winding of the second coil 6020 may be larger than the winding of the first coil 6010. The induction currents formed in the coil magnetic field and the crosbible 3000 based on the turns of the first coil 6010 and the second coil 6020 will be described later in detail.

Embodiments of the first coil 6010 and the second coil 6020 may be different from each other. The above-described internal passages may not be formed in at least one of the first coil 6010 and the second coil 6020. That is, the inner coil may be formed in the second coil 6020, while the inner coil may not be formed in the first coil 6010. This is to facilitate the physical separation when the first coil 6010 and the second coil 6020 are physically separated. When the first coil 6010 and the second coil 6020 are formed with internal passages, the internal passages may be separated if the first coil 6010 and the second coil 6020 are separated from each other. When the internal passages are separated, the materials contained in the internal passages can penetrate into the deposition environment. The materials that penetrate into the deposition environment may deteriorate the heating efficiency of the heating assembly 2000 and cause a problem of lowering the durability of the heating assembly 2000. On the contrary, if the internal passage is formed in the second coil 6020 and the internal passage is not formed in the first coil 6010, the above-described problem may not occur.

The first coil 6010 and the second coil 6020 may have different positional relationships with the crosbible 3000. That is, when the first coil 6010 has a first positional relationship with the cradle 3000, the second coil 6020 may have a second positional relationship with the cradle 3000. Hereinafter, different positional relationships between the first coil 6010 and the second coil 6020 will be described.

7 is a view of a coil disposed near a protrusion nozzle according to an embodiment of the present application.

7, the first coil 6010 may be disposed so as to be positioned close to the protruding nozzle of the crosbible 3000, and the second coil 6020 may be disposed on the side of the crosbible 3000 . The first coil 6010 disposed close to the protruding nozzle can generate a larger amount of heat in the protruding nozzle of the crucible 3000 than in the case where the coil is disposed away from the protruding nozzle of the crucible 3000 can do. As the coil is disposed close to the protruding nozzle, the amount of heat generated will be described later in detail in " ". Based on the amount of heat, the evaporation material passing through the protruding nozzle of the crucible 3000 can be supplied with a sufficient amount of heat and smoothly pass through the protruding nozzle. When the evaporation material is deposited on the protrusion nozzle due to the low temperature of the protrusion nozzle, the evaporation material may be moved again by induction heating of the first coil 6010. That is, the deposition material formed on the protruding nozzle may be changed into a state of gas that can smoothly move based on the amount of heat generated in the protruding nozzle by the first coil 6010.

The first coil 6010 and the second coil 6020 may be electrically or physically separated. For example, as shown in FIG. 7, when the upper part of the crucible 3000 is moved so as to be separated from the crucible 3000, the first coil 6010 is connected to the upper end of the crucible 3000 Can be moved with the top. Accordingly, the first coil 6010 physically connected to the second coil 6020 can be moved separately from the second coil 6020. The separated first coil 6010 may be recombined with the second coil 6020 as the upper portion of the crucible 3000 is coupled to the crucible 3000 again. The electrical or physical separation / recombination of the first coil 6010 and the second coil 6020 can be easily performed by a coil connecting member 6011 to be described later. This will be described later in detail.

The first coil 6010 and the second coil 6020 may have different properties.

The first coil 6010 and the second coil 6020 may be implemented so that the electrical characteristics of the first coil 6010 and the second coil 6020 are different from each other. If the first coil 6010 has a first resistance and the second coil 6020 has a second resistance, the first resistance and the second resistance may have different values. By making the first resistance of the first coil 6010 smaller than the second resistance, the electric conductivity of the first coil 6010 can be made larger than the electric conductivity of the second coil 6020. Alternatively, the first coil 6010 may have a first inductance and the second coil 6020 may have a second inductance. The material for realizing the first coil 6010 and the second coil 6020 may be appropriately selected for the electrical properties of the first coil 6010 and the second coil 6020.

The first coil 6010 and the second coil 6020 may be supplied with power for induction heating from the power generator 6030. The first coil 6010 and the second coil 6020 can receive power from the same power generator 6030. Compared with the case where each power supply for driving each coil is provided by supplying power to the first coil 6010 and the second coil 6020 by using one power generator 6030, (2000) can be reduced.

 The first coil 6010 and the second coil 6020 may be connected to the power generator 6030 in parallel. The first coil 6010, the second coil 6020, and the power generator 6030 connected in parallel are referred to as a parallel application module. Hereinafter, the parallel application module will be described. The first coil 6010 in the parallel application module is positioned so as to be close to the protruding nozzle of the crucible 3000 and the second coil 6020 is disposed on the side of the crucible 3000, As shown in FIG.

8 is a circuit diagram of a parallel application module in accordance with one embodiment of the present application.

9 is a diagram illustrating a first coil 6010, a second coil 6020, and a power generator 6030 connected in parallel in accordance with one embodiment of the present application.

8, the parallel application module may include a first coil 6010, a second coil 6020, a coil connecting member 6011, a power generator 6030, and a power supply line 6032.

The technical characteristics of the first coil 6010 and the second coil 6020 are as described above.

The coil connecting member 6011 may be a connecting member that physically or electrically connects at least two of the first coil 6010, the second coil 6020, or the power generator 6030. For the physical or electrical connection, the coil connecting member 6011 may be arranged to be positioned between the first coil 6010, the second coil 6020, or the power generator 6030.

The power generator 6030 may generate power for driving the first coil 6010 and the second coil 6020.

The power supply line may include a first power supply line 6031 and a second power supply line 6032. The power generated by the power generator 6030 can be transmitted to the first coil 6010 or the second coil 6020.

When the first coil 6010 and the second coil 6020 are electrically connected in parallel as described above, the power of the power applied to the first coil 6010 and the second coil 6020 is substantially the same can do. Meanwhile, the first coil 6010 and the second coil 6020 have substantially the same power characteristics, but the first coil 6010 and the second coil 6020 may have different electrical properties. For example, when the first coil 6010 and the second coil 6020 are similarly supplied with power of attribute A, the resistance of the first coil 6010 is the first resistance and the resistance of the second coil 6020 If the resistance is the second resistance, the currents flowing through the first coil 6010 and the second coil 6020 may be different from each other based on the respective resistances.

Hereinafter, the actual first coil 6010, the second coil 6020, and the power generator 6030 connected in parallel will be described in detail.

9, the first coil 6010, the second coil 6020, the coil connecting member 6011, the power generator 6030, and the power supply line 6032 are connected to the heating assembly 2000 And can be practically provided.

The power supply line 6032 may include a first power supply line 6031 and a second power supply line 6032. The first coil 6010, the second coil 6020 and the power generator 6030 may have an electrically parallel relationship by the first power supply line 6031 and the second power supply line 6032 .

The first power supply line 6031 and the second power supply line 6032 may be output from the power generator 6030. The first power supply line 6031 may apply power to the first coil 6010 and the second power supply line 6032 may apply power to the second coil 6020. [ As shown in FIG.

The first power supply line 6031 may include a first power supply line 6031-1 and a first power supply line 6031-2. The first power supply line 6031-1 and the first power supply line 6031-2 can be implemented by branching from the first power supply line 6031. [ The first power supply line 6031-1 may be connected to one side of the first coil 6010 and the second power supply line 6031-2 may be connected to the other side of the first coil 6010. [ Can be connected. The second power supply line 6032 may include a second power supply line 6032-1 and a second power supply line 6032-2. Likewise, the second -1 power supply line 6032-1 and the second -2 power supply line 6032-2 can be implemented by branching from the second power supply line 6032. [ The 2-1 power supply line 6032-1 may be connected to one side of the second coil 6020 and the 2-2 power supply line 6032-2 may be connected to the other side of the first coil 6010 Can be connected.

The one side refers to one region of the coil winding, and the other side refers to a region that is not one side of the coil winding.

As a result, according to the connection relationship, the first coil 6010, the second coil 6020, and the power generator 6030 may have an electrically parallel connection relationship as shown in Fig.

The parallel connection module may further include a coil connecting member 6011. The coil connecting member 6011 may be disposed between the coil and the power supply line 6032 so that the coil provided in the parallel connection module and the power supply line 6032 are electrically connected.

The coil connecting member 6011 may be formed of a material such as a coil provided in the parallel connection module, but may be formed of various materials without being limited thereto. The coil connecting member 6011 may be formed of a material having a lower resistance than the coil. Since the coil connecting member 6011 is realized by a material having a lower resistance than the coil, the coil connecting member 6011 can efficiently transmit power to the coil connected to the coil connecting member 6011.

And a structure that is electrically disconnectable may be formed between the components connected to the coil connecting member 6011. The separable structure may include a predetermined separation groove, a binding structure, and the like. For example, when the coil connecting member 6011 is connected to one side of the first coil, a separating groove that can be separated and connected between one side of the first coil and the coil connecting member 6011 may be formed .

 Accordingly, the coil connecting member 6011 is connected to the coil and the power supply line 6032, and can be separated from the coil and the power supply line 6032.

The coil connecting member 6011 may be embodied in various shapes. Hereinafter, examples of various shapes will be described.

Referring again to FIG. 8, the coil connecting member 6011 may include a first coil connecting member 6011-1 and a second coil connecting member 6011-2. The first coil connecting member 6011-1 is connected to the first coil 6010 and the power supply line 6010 so that the first coil 6010 and the power supply line 6032 can be electrically connected to each other. Line 6032, as shown in FIG. That is, one end of the first coil 6010 may be electrically connected to the first power supply line 6031-1 branched from the first power supply line 6031 . The coil connecting member 6011 is connected to the first coil 6010 and the power supply line 6010 so that the first coil 6010 and the power supply line 6032 can be electrically connected to each other. Line 6032, as shown in FIG. That is, the coil connecting member 6011 can be electrically connected to the second power supply line 6032-1 branched from the second power supply line 6032 at the other side of the first coil 6010 .

As a result, according to the connection relationship, the first coil 6010, the second coil 6020, and the power generator 6030 may have an electrically parallel connection relationship as shown in Fig.

Since the coil connecting member 6011 is provided in the parallel application module, the present application can prevent the first coil 6010, the second coil 6020, and the power supply line 6032 from being easily separated physically or electrically from each other So that it can be easily connected. In order to connect the separated first coil 6010, the second coil 6020 and the power supply line 6032 in the absence of the coil connecting member 6011, the first coil 6010, the second coil 6020, And the power supply line 6032 must have a predetermined shape. That is, the first coil 6010, the second coil 6020, and the power supply line 6032 must have a peculiar shape such as twisted or protruded in various directions. The first coil 6010, the second coil 6020, and the power supply line 6032 having a predetermined shape can increase the complexity of the configuration of the parallel application module. The complexity of the configuration of the increased parallel application module may interfere with the connection of each configuration. In contrast, if the coil connecting member 6011 is provided in the parallel application module, the first coil 6010, the second coil 6020, and the power supply line 6032 need not be implemented in a specific shape, Lt; / RTI > The coil connecting member 6011 is disposed between the first coil 6010, the second coil 6020 and the power supply line 6032 implemented in the simple shape and the first coil 6010, the second coil 6010, 6020, or the power supply line 6032, the configurations of the parallel connection module can be easily connected.

Further, when the configurations of the parallel connection module are separated, they can be easily separated. For example, when the first coil 6010 shown in FIG. 9 is to be separated from the power supply line 6032, the first coil 6010 and the power supply line 6032 are physically or electrically connected The first coil 6010 and the power supply line 6032 can be separated by removing the coil connecting member 6011. [

However, the physical or electrical connection relationship of the parallel connection module as shown in FIG. 9 can make the power supply line 6032 have an excessive length. If the power supply line 6032 output from the power generator 6030 has an excessive length, the deposition operation of the deposition apparatus may be interrupted. This is because the movement of the heating assembly 2000 for the deposition operation can be restricted by the elongated power supply line 6032. In addition, since the power supply line 6032 has an excessive length, the present application may have a problem that the loss of power supplied through the power supply line 6032 becomes abrupt.

In order to solve the above problem, there may be a modification of the parallel application module. The physical or electrical connection of the parallel application module described above was to connect each of the first coil 6010 and the second coil 6020 to the power supply line 6032, 6010 and the second coil 6020 are connected to each other.

10 is a diagram illustrating a first coil 6010, a second coil 6020, and a power generator 6030 according to one embodiment of the present application.

11 is a diagram illustrating a first coil 6010, a second coil 6020, and a power generator 6030 in accordance with one embodiment of the present application.

Referring to FIG. 10, the first coil 6010, the second coil 6020, and the coil connecting member 6011 according to an embodiment of the present application may be physically or electrically connected.

The second coil 6020 may include a first winding and a second winding.

The first coil connecting member 6011-1 may be connected to the first coil and may be connected to one side of the first coil 6010. [ The second coil connecting member 6011-2 may be connected to the second coil and may be connected to the other side of the second coil 6020. [ As shown in FIG. 10, at least one of the first winding or the second winding may be protruded so as to be connected to the coil connecting member 6011. Alternatively, the coil connecting member 6011 may have a bent shape so that the coil connecting member 6011 can be connected to at least one of the first coil and the second coil.

As shown in FIG. 10, the coil includes the first winding and the second winding. However, the first winding and the second winding may not be limited thereto.

10, the first power supply line 6031 may be connected to one side of the second coil 6020 and the second power supply line 6032 to the other side of the second coil 6020.

The power generated from the power generator 6030 is transmitted to the second coil 6020 through the power supply line 6032 and the power supplied to the second coil 6020 is transmitted from the second coil 6020 And may be transmitted to the first coil 6010.

The physical and electrical connection relationships of the first coil 6010 and the second coil 6020 may not be in a precise sense of parallel relationship but the power of the power source applied to the first coil 6010 may be the same as that of the second coil 6020, It can be said to be a broad parallel relationship.

Modifications will be further described below.

Referring to FIG. 11, the first coil 6010, the second coil 6020, and the power supply line 6032 may be electrically or physically connected according to an embodiment of the present invention.

A first coil connecting member 6011-1 may be connected to one side of the first coil 6010 and a second coil connecting member 6011-2 may be connected to the other side of the first coil 6010. [ The first coil connecting member 6011-1 is connected to one side of the second coil 6020 and the first power supply line 6031 and the second coil connecting member 6011-2 is connected to the second coil 6020 ). ≪ / RTI > The second power supply line 6032 may be connected to the other side of the second coil 6020. The power generated from the power generator 6030 can be applied to the first coil 6010 and the second coil 6020.

According to the parallel application module as shown in Figs. 10 and 11, the present application can have the following effects.

The first coil 6010-1 and the second coil 6020 can be easily separated by detaching the first coil connecting member 6011-1 and the second coil connecting member 6011-2. In addition, the first coil 6010, the second coil 6020, and the power supply line 6032 may have a simple shape. Since the first coil 6010 and the second coil 6020 are connected to each other, it is not necessary to apply power to each of the first coil 6010 and the second coil 6020, It may be unnecessary to be excessively long.

On the other hand, a coil not driven by one power generator is referred to as a " separate drive coil ". The " separate drive coil " will be described later in detail.

The coil 6000 according to one embodiment of the present application may be supplied with a variable power source whose electrical property changes. For example, the variable power source may preferably be a high frequency AC power source such as RF, and may be a low frequency AC power source.

As the AC power source is applied to the coil 6000, a current (hereinafter referred to as a coil current) may flow through the coil 6000 according to an embodiment of the present application. The electrical properties of the coil current may be strength, direction, and the like. Therefore, the coil current may change in electrical property corresponding to the AC power. Accordingly, the coil current can be changed instantaneously in accordance with the AC power source.

According to an embodiment of the present invention, a dynamic magnetic field is formed around the coil 6000, and the dynamic magnetic field generates an amount of heat by forming an induction current in the crucible 3000, The coil 6000 may induction-heat the crucible 3000. Hereinafter, the properties of the magnetic field formed by the coil 6000 according to an embodiment of the present invention and the properties of the induced current formed in the crucible 3000 will be described.

1.1.2.1 Properties of the magnetic field

12 is a conceptual diagram showing a magnetic field formed around a coil according to an embodiment of the present application;

Hereinafter, the intensity attribute of the magnetic field 6100 will be described.

(B = 자기선속 밀도, = 투자율/비례상수, H = 자기장의 세기)라는 관계식을 따를 수 있다. 이때, 상기 자기장(6100)이 형성되는 공간의 투자율에 따라 자기장(6100)의 세기값과 자기선속 밀도값은 정확히 매칭되지 않을 수 있다. 다만, 상기 관계식에서 알 수 있듯이, 자기장(6100)의 세기와 자기선속 밀도는 비례관계에 있다. 따라서, 상기 비례관계에 의거하여 본 명세서에서 자기선속 밀도 개념과 자기장의 세기 개념은 실질적으로 동일한 개념으로 한다.The intensity attribute of the magnetic field 6100, according to one embodiment of the present application,

(B = magnetic flux density, = permeability / proportional constant, H = magnetic field strength). At this time, the intensity value of the magnetic field 6100 and the magnetic flux density value may not exactly match according to the permeability of the space where the magnetic field 6100 is formed. However, as can be seen from the relational expression, the intensity of the magnetic field 6100 is in proportion to the magnetic flux density. Therefore, based on the above-described proportional relationship, the concept of the magnetic flux density and the intensity of the magnetic field in this specification are substantially the same concept.

That is, even though there is no specific mention in the description of the present specification, the fact that the magnetic flux 6200 is pressed may mean that the intensity of the magnetic field is large and that the intensity of the magnetic field is large means that the magnetic flux is dense have.

(H = 자기장의 세기, k = 비례상수, I = 발생지에 흐르는 전류, r = 발생지로부터의 거리)라는 자기장(6100)의 세기와 자기장(6100) 발생지와의 관계식을 따를 수 있다. 상기 관계식에 따르면 발생지로부터 거리가 먼 곳에 형성된 자기장(6100)일수록 자기장(6100)의 세기가 작아질 수 있다. 구체적으로, 발생지로부터 먼 거리에 형성된 일정 면적을 지나는 자기선의 수가 적어짐에 따라 자기장(6100)의 세기가 감소 할 수 있는 것이다. 반대로, 코일(6000)에 가까워질수록 자기장(6100)의 세기는 강해질 수 있다. In addition, the intensity attribute of the magnetic field 6100 can be changed according to the distance relation with the magnetic field 6100 source. The magnitude attribute of the magnetic field 6100 is

(H = magnetic field intensity, k = proportional constant, I = current flowing at the source, r = distance from the source) and the magnetic field 6100 source. According to the relational expression, the intensity of the magnetic field 6100 may be smaller as the magnetic field 6100 is formed at a distance from the generation site. Specifically, the intensity of the magnetic field 6100 may decrease as the number of magnetic lines passing through a certain area formed at a distance from the source is decreased. Conversely, the closer to the coil 6000, the stronger the intensity of the magnetic field 6100 can be.

Hereinafter, a dynamic magnetic field formed in the coil 6000 according to one embodiment of the present application will be described.

Referring to FIG. 12, the magnetic field 6100 formed around the coil 6000 of the present application may have a dynamic property.

(H = 자기장의 세기, I = 코일에 흐르는 코일 전류)라는 관계식에 따라, 코일(6000)에 흐르는 다이나믹한 - 시간에 따라 급변하는 - 전류에 대응하여 다이나믹하게 형성될 수 있다.For example, the formed magnetic field 6100 of the present application may change rapidly in direction and intensity properties with time variations in the time axis. The magnetic field 6100 formed on the coil 6000

Can be dynamically formed corresponding to a rapidly-varying current flowing in the coil 6000 in accordance with a relational expression (H = magnetic field strength, I = coil current flowing in the coil).

The dynamic magnetic field is a vectorial concept that includes direction properties as well as intensity properties. Specifically, when one direction among the directions in which the coil current flows according to the variable power source applied to the coil 6000 is (+), the other direction opposite to the direction is negative (-). The coil current continuously changes in the direction from (+) to (-) and from (-) to (+) direction, and at the same time, the intensity of the current also changes continuously. Accordingly, the direction of the magnetic field 6100 can be also changed in one direction or the other direction correspondingly as the coil current rapidly changes in the (+) and (-) directions of the coil current. At the same time, the intensity attribute of the magnetic field 6100 may be determined corresponding to the intensity attribute of the coil current.

As a result, as shown in FIG. 12, a dynamic magnetic field 6100 in which direction and intensity oscillate around the coil 6000 can be formed

Hereinafter, the intensity variation value of the dynamic magnetic field 6100 formed around the coil will be described.

The intensity change value of a dynamic magnetic field is a quantitative concept. The intensity change value of the magnetic field is a change amount of the intensity of the magnetic field per unit time in which the direction of the magnetic field is considered. Specifically, the change value of the magnetic fields formed in the same direction is merely important, but the change value of the magnetic fields formed in the other direction is determined according to the amount of change in the magnetic field intensity in consideration of the direction of the magnetic field.

라는 자기장(6100) 형성 속성이 적용될 수 있다.The intensity change value attribute of the dynamic magnetic field 6100 according to an embodiment of the present application may vary with distance from the coil 6000. [ The intensity of the dynamic magnetic field 6100 is determined by the above-

A magnetic field 6100 may be applied.

The greater the distance from the coil 6000, the smaller the intensity of the magnetic field formed at that distance. Therefore, since the variation width of the strength of the magnetic field to be formed becomes smaller, the intensity variation value of the magnetic field becomes smaller. On the other hand, as the distance from the coil 6000 becomes closer, the intensity variation value of the dynamic magnetic field 6100 becomes larger.

(H = 자기장의 세기, N = 단위 길이당 코일의 권선수)에 따를 수 있다. 이에 따라, 상기 코일의 권선수가 많아질수록 상기 코일에 형성되는 자기장의 세기가 커진다. 상기 자기장의 세기가 커짐에 따라 자기장의 세기 변화값 또한 커지게 된다.In addition, various shapes in which the coil 6000 is implemented can change the intensity change value of the dynamic magnetic field 6100. The intensity of the dynamic magnetic field 6100 is

(H = intensity of magnetic field, N = number of turns of coil per unit length). Accordingly, as the number of windings of the coil increases, the intensity of the magnetic field formed on the coil increases. As the intensity of the magnetic field increases, the intensity change value of the magnetic field also increases.

Hereinafter, the characteristics of the induced current induced in the crosbible 3000 according to the magnetic field formed from the coil 6000 will be described.

1.1.2.2 Properties of induced current

The magnetic field formed in accordance with one embodiment of the subject application described above may induce an induction current in the crucible 3000.

(F = 크루시블의 전자에 작용하는 힘, q = 전자의 전하량, v = 전자의 속도, H = 자기장의 세기)라는 크루시블(3000)의 전자와 코일(6000)이 형성하는 자기장간의 관계식에 따라 설명할 수 있다. 즉, 상기 크루시블(3000)의 전자는 코일(6000)이 생성하는 시공간적으로 급변하는 다이나믹한 자기장에 의해 전기적 힘이 가해질 수 있다. 결과적으로, 상기 전자는 상기 전기적 힘에 의해 운동함으로써, 유도 전류가 발생할 수 있다.For example, the induced current formed is

Between the electrons of the crucible 3000 and the magnetic field formed by the coil 6000, that is, F = force acting on the electrons of the crucible, q = electron charge, v = electron velocity, H = It can be explained by a relational expression. That is, the electrons of the crucible 3000 can be subjected to an electric force by a dynamic magnetic field generated by the coil 6000 in a space-time and rapidly changing manner. As a result, the electrons move by the electrical force, so that an induced current can be generated.

(e = 유도 기전력, B = 자기선속밀도, t=시간) 라는 코일이 형성하는 자기선속과 크루시블에 발생하는 유도기전력 사이의 관계식에 따라 상기 형성되는 유도 전류를 설명할 수 있다. 즉, 상기 코일(6000)이 생성하는 다이나믹한 자기장에 의해 크루시블(3000)에 유도 기전력이 발생할 수 있다. 상기 발생한 기전력에 따라 크루시블(3000)에 상기 유도 전류가 흐를 수 있게 된다.Also, for example,

(e = induced electromotive force, B = magnetic flux density, t = time) can be explained according to the relationship between the magnetic flux formed by the coil and the induced electromotive force generated in the crucible. That is, the induction electromotive force can be generated in the crucible 3000 by the dynamic magnetic field generated by the coil 6000. The induction current can flow to the crucible 3000 according to the generated electromotive force.

According to one embodiment of the present application, a current path of an induction current may be formed in the crucible 3000.

13 is a conceptual diagram showing a magnetic field and a crevice formed in a coil according to an embodiment of the present application.

Referring to FIG. 13, a current path leading to the crucible 3000 according to an embodiment of the present application may be formed on the outer wall 3100 of the crucible 3000. Also, one form of the inductive current path may be in the form of surrounding the outer wall 3100 of the crucible 3000. As another example of the induction current path, a current path of a locally swirling shape may be formed in the outer wall 3100 of the crucible 3000.

In addition, the crosbible 3000 may have a current path of a combination of the paths of the above-described types, and may have a shape of a magnetic field generated by the coil 6000, It is possible to have various types of current paths corresponding to the change.

The properties of the induction current according to an embodiment of the present invention may have various properties depending on the relationship with the coil 6000, the magnetic field formed in the coil 6000, and the crosbible 3000, .

수식에 따라, 단위 시간당 크루시블(3000)에 움직이는 전하량을 의미하는 것일 수 있다. 즉, 본 명세서에서 유도 전류의 세기 의미는 양적인 개념으로써 얼마만큼의 전하가 이동하였다라는 의미를 내포하는 개념임을 밝히는 바이다.In this case, the intensity of the induced current

Depending on the formula, it may mean the amount of charge moving in the clockable unit 3000 per unit time. That is, in this specification, the meaning of the intensity of the induced current is a quantitative concept, which implies the concept of how much charge has moved.

The electrical properties of the induction current induced in the crucible 3000 according to an embodiment of the present invention may vary depending on the properties of the dynamic magnetic field formed in the coil 6000. [

(2)

에 따라, 다이나믹한 자기장의 세기 변화값이 커지면 크루시블(3000)의 전자에 가해지는 힘이 커질 수 있고 전자의 이동에 영향 주는 기전력이 커질 수 있다. 이에 따라 상기 크루시블(3000)에서 이동할 수 있는 전자의 양이 많아져 유도 전류의 세기 속성이 커지게 된다.For example, if the dynamic magnetic field intensity and / or magnetic intensity change value of the present application is increased, the intensity property of the induced current formed can be increased. The above-mentioned relational expression (1)

(2)

The force applied to the electrons of the crucible 3000 can be increased and the electromotive force affecting the movement of the electrons can be increased as the intensity variation value of the dynamic magnetic field increases. As a result, the amount of electrons that can move in the crucible 3000 increases, which increases the strength of the induced current.

In addition, the electrical properties of the induction current induced in the crucible 3000 according to one embodiment of the present application may vary depending on the shape of the crucible 3000.

For example, the intensity of the induced current can be increased when the thickness of the cursive is corresponding to the thickness of the curbable, and the intensity of the induced current can be decreased when the thickness is thin. Depending on the thickness of the crucible 3000, the amount of electrons contained in the thickness can be changed. When the thickness of the crucible 3000 is large, the amount of electrons is larger than the amount of electrons having a relatively small thickness. Accordingly, as the thickness of the crucible 3000 increases, the amount of electrons that can be moved by the magnetic field increases. Therefore, the thicker the crucible 3000, the greater the intensity of the induced current.

Meanwhile, the induction current according to one embodiment of the present application may induce an induction magnetic field once again in the crucible 3000 according to the magnetic field forming property. Also, the induction magnetic field can induce an induction current in the crucible 3000 according to the induction current formation property. That is, the formation of induction current and the induction magnetic field formation event may occur in the crucible 3000 according to one embodiment of the present application.

1.1.2.3 Induction Heating

The crucible 3000 according to one embodiment of the present application can generate heat in various ways.

(P = 발생하는 열량, I = 유도 전류, R = 크루시블의 저항 성분, t = 가열 시간)이라는 관계식을 따를 수 있다. 상기 관계식에 따라 크루시블(3000)에 유도된 유도 전류 및/또는 유도 전류 패스는 크루시블(3000)의 저항 성분에 의하여 열량으로 변환될 수 있다. 이때, 또한 상기 크루시블(3000)에서 발생되는 열량은 유도 전류의 세기가 커짐에 따라 증가하는 것을 알 수 있다.In accordance with one embodiment of the present invention, the amount of heat generated by the combination of the induction current induced in the crucible 3000 and the electrical resistance component of the crucible 3000 may be generated in the crucible 3000. The combination of the induced current and the electromagnetic component

(P = heat generated, I = induced current, R = resistance component of crucible, t = heating time). The induction current and / or induction current path induced in the crucible 3000 according to the relational expression can be converted into a heat quantity by the resistance component of the cushion 3000. At this time, the amount of heat generated in the crucible 3000 increases as the intensity of the induction current increases.

Also, the crucible 3000 may generate heat in the crucible 3000 due to the coupling between the dynamic magnetic field formed around the coil 6000 and the electromagnetic component of the crucible 3000 .

The amount of heat generated by the induction current and / or the dynamic magnetic field in the above-described crucible 3000 will be able to heat the crucible 3000. Since the crucible 3000 is heated by an induction current and a dynamic magnetic field induced by the coil 6000, the heating of the crucible is referred to as induction heating.

In the induction heating according to one embodiment of the present invention, there are various methods as described above. However, according to the induction current formed in the crucible 3000 and the resistance component of the crucible 3000, Will be described only in the case of induction heating.

The various electrical properties of the coil 6000 and the coil 6000, which are one example of the heating means 5000 that can be implemented in the heating assembly, have been described above. Hereinafter, a magnetic field focusing structure 7000 that can be disposed in a heating assembly will be described in accordance with one embodiment of the present application.

1.1.2 Magnetic field focusing structure

The heating assembly according to one embodiment of the present application may have means for assisting the heating means 5000. For example, when the heating means 5000 according to an embodiment of the present invention is a coil 6000, a magnetic field focusing structure 7000 for concentrating a magnetic field formed around the coil 6000 is provided as a heating auxiliary means . At this time, the term "focusing" can be interpreted to mean concentrating the magnetic flux of a magnetic field in an area.

Hereinafter, the ferrite 8000, which is an example of the magnetic field focusing structure 7000, will be described. In the present invention, the ferrite 8000 is described as an example of the magnetic field focusing structure 7000. However, the present invention is not limited thereto, and if it is a means or material capable of focusing the magnetic field, it can be implemented in the heating assembly as the magnetic field focusing structure 7000 .

The ferrite 8000 according to one embodiment of the present application may be implemented in various materials, types, and shapes.

For example, ferrite (8000) is an ionic compound having a spinel structure, and may be formed of iron oxide as a main component and various metal compounds bonded to the main component. The various metal compounds may be bivalent metal ions such as Mn, Zn, Mg, Cu, Ni, and Co. However, the ferrite 8000 in the present invention is not limited to the above-described components, but may be formed of a material having various magnetic field encompassing components.

The ferrite 8000 may be of (1) a liquid type which may exist in a liquid state at room temperature and (2) a solid type which can have a constant shape at room temperature.

The ferrite 8000 may have various shapes such as a shape having a convex projection on at least one surface of a plate shape, a plate shape, a circle shape, an ellipse shape, a spherical shape, and the like.

Hereinafter, the effect of increasing the heating efficiency of the crucible 3000 according to the magnetic field focusing property and the magnetic field focusing property, which are the properties of the ferrite 8000, will be described.

1.1.1.1 Magnetic Field Focusing Properties

Hereinafter, the magnetic field focusing of the ferrite 8000, which is an example of the magnetic field focusing structure 7000 according to the embodiment of the present application, will be described.

14 is a diagram showing ferrite placed in a magnetic field according to an embodiment of the present application.

Referring to FIG. 14, a ferrite 8000 placed in a magnetic field according to an embodiment of the present application may affect the magnetic flux of the magnetic field. For example, the ferrite 8000 can act to pull the magnetic flux generated around the ferrite 8000 into the ferrite 8000, so that the magnetic flux of the magnetic field is formed to be tight around the ferrite 8000.

At this time, depending on the thickness of the ferrite 8000, the influence of the magnetic flux may vary. As the thickness of the ferrite 8000 increases, the magnetic flux that can be formed around the ferrite 8000 can be increased.

The ferrite 8000 may be disposed in the heating assembly of the present application.

The ferrite 8000 disposed in the heating assembly according to one embodiment of the present application may have a magnetic field focusing property that increases the intensity variation value of the dynamic magnetic field that affects the crucible 3000.

15 is a diagram showing a magnetic field formed around a ferrite, a coil, and a coil according to an embodiment of the present application.

15, when a ferrite 8000 according to an embodiment of the present application is disposed in a heating assembly, the ferrite 8000 is arranged such that the magnetic flux of a dynamic magnetic field is applied to the outer wall 3100 of the crucible 3000, As shown in FIG.

The dynamic magnetic flux density formed in the outer wall 3100 of the crucible 3000 may depend on the properties of the ferrite 8000 described above. The ferrite 8000 disposed outside the coil 6000 may attract the magnetic flux generated inside the coil 6000 to push the magnetic flux into the crucible 3000.

Alternatively, the dynamic magnetic flux density formed in the outer wall 3100 of the crucible 3000 may depend on the properties of the ferrite 8000 and the magnetic field forming property. The ferrite 8000 disposed outside the coil 6000 can attract the magnetic flux generated outside the coil 6000 according to the property of the ferrite 8000. [ At the same time, the magnetic line speed formed inside the coil 6000 can be symmetrically pulled to the crucible 3000 according to the magnetic field forming property that the magnetic field is symmetrically formed around the coil 6000. As a result, a magnetic flux of a dynamic magnetic field is formed on the outer wall 3100 of the crucible 3000 with a smooth magnetic flux.

The magnetic flux in the positive direction of the coil 6000 formed on the outer wall of the crucible 3000 increases and the intensity in the negative direction increases simultaneously. As the magnetic field intensity increases in both directions, the variation width of the intensity of the dynamic magnetic field fluctuates correspondingly. That is, the intensity change value of the dynamic magnetic field generated at the outer wall 3100 of the crosbible 3000 becomes larger than when the ferrite 8000 is not disposed.

1.1.1.2 Elevated thermal efficiency

Hereinafter, the elevated heating efficiency of the crucible 3000 will be described when the ferrite 8000 is implemented in the heating assembly according to an embodiment of the present application. In this specification, the heating efficiency means the amount of heat generated in the crucible 3000 relative to the electrical energy input to the coil, which is the heating means 5000 of the present application. That is, when the electric energy input to the coil is the same, the greater the amount of heat generated in the crucible 3000, the greater the heating efficiency (or thermal efficiency).

The heating efficiency of the crucible 3000 in the case of disposing the ferrite 8000 in the heating assembly according to the embodiment of the present application can be raised more than when the ferrite 8000 is not disposed.

16 is a diagram illustrating ferrite disposed in a heating assembly in accordance with one embodiment of the present application.

FIG. 17 is a graph of the distribution of magnetic field intensity change values according to an embodiment of the present application. FIG.

Referring to FIGS. 16A and 16B, the ferrite 8000 according to an embodiment of the present invention may be formed to surround the coil 6000 disposed outside the cruise unit 3000. For example, a ferrite 8000 in a form corresponding to the shape of the coil 6000 disposed in the crucible 3000 may be disposed. Concretely, as shown in FIG. 12, corresponding to the sides of the coils 6000 of a closed shape with a hexagonal close-up shape disposed on the outside of the crucible 3000, slopes opposed to the respective sides are formed inside, Type ferrite 8000 may be disposed.

로, 크루시블(3000)이 배치된다고 해서 크게 달라지지 않을 수 있다.When the ferrite 8000 is disposed outside the coil 6000 as shown in FIG. 16, the heating efficiency of the crucible 3000 according to an embodiment of the present application can be increased. Referring to Figures 17 (a) - (b), the dynamic intensity variation profile of a dynamic magnetic field formed in a coil according to one embodiment of the present application may be varied by the crucibles disposed in the heating assembly. For example, the intensity intensity distribution of the dynamic magnetic field formed inside the coil can be shifted toward the outer wall of the crucible. However, the maximum magnitude of the change value of the magnetic field is

And the crucible 3000 may not be significantly changed.

로 페라이트(8000)가 배치되는 경우 페라이트(8000)가 배치되기 전에 비하여 자기장의 세기 변화값이 상기 외벽에서 커질 수 있다. On the other hand, referring to FIG. 17 (c), the variation intensity distribution of the dynamic magnetic field formed in the coil can be changed by the ferrite 8000 disposed in the heating assembly. For example, The ferrite 8000 may be arranged to surround the outer wall of the crucible by the ferrite 8000 so that the coil formed on the outer wall of the crucible 3000 The intensity in the (+) direction and the intensity in the (-) direction of the dynamic magnetic field of the magnetic field 6000 rise simultaneously. As the magnetic field intensity increases in both directions, the variation width of the intensity of the dynamic magnetic field fluctuates correspondingly. That is, the intensity change value of the magnetic field,

The intensity change value of the magnetic field can be larger in the outer wall than in the case where the ferrite 8000 is disposed in the case where the ferrite 8000 is disposed.

As the intensity change value of the magnetic field increases as described above. The induced current intensity can be further increased in the crucible 3000 after the ferrite 8000 is disposed than the crucible 3000 before the ferrite 8000 is placed.

The amount of heat generated in the crucible 3000 may increase as the intensity of the induction current increases due to the induction heating property described above. As a result, more heat is generated by the coil 6000 in which the ferrite 8000 is disposed than the coil 6000 in which the ferrite 8000 is not disposed, and the heating efficiency of the crucible 3000 can be increased.

Hereinafter, an arrangement example of the ferrite 8000 capable of increasing the heating efficiency of the crucible 3000 will be described.

Referring to FIG. 16 (b), the ferrite 8000 according to an embodiment of the present invention may be embodied as surrounding the upper and lower portions of the coil 6000 disposed in the crucible 3000. For example, in the case of a coil 6000 of a closed shape arranged so as to have a crucible 3000 therein, the ferrite 8000 may be arranged to the upper and lower portions of the closed shape coil 6000.

When the ferrite 8000 is implemented as described above according to an embodiment of the present invention, the effect of focusing the ferrite 8000 on the crucible 3000 up to the dynamic magnetic flux exiting through the upper surface or the lower surface of the coil 6000 Lt; / RTI > As the dynamic magnetic field is focused on the crucible 3000, the heating efficiency of the crucible 3000 is increased.

In addition, the ferrite 8000 according to an embodiment of the present invention is not only disposed outside the crucible 3000, but also may be disposed on the outer surface of the crucible 3000 in order to increase the heating efficiency of the crucible 3000. Or may be arranged in a form to be contained inside.

18 is a cut-away side view of a ferrite included in the outer wall of a crucible in accordance with one embodiment of the present application.

The ferromagnetic layer 8000 is formed on the outer wall 3100 of the crucible 3000 so that a dynamic magnetic field can be focused on the outer wall 3100 of the crucible 3000. As the dynamic magnetic field is concentrated, the heating efficiency of the crucible 3000 may be increased.

The ferrite 8000 according to an embodiment of the present invention may be applied to the crucible 3000 to increase the heating efficiency of the crucible 3000.

19 is a view showing a shape implemented by applying the ferrite according to the embodiment of the present application to the deposition apparatus 10000.

Referring to Figures 19 (a) - (d), a ferrite 8000 according to one embodiment of the present application may be applied to a heating assembly and implemented in a coated form in a heating assembly configuration.

For example, the ferrite 8000 according to one embodiment of the present application may be applied to the inner surface of the outer wall of the housing 1000 surrounding the crucible 3000. Referring to FIG. 15A, the ferrite 8000 may be applied to the inner surface of the outer wall of the housing 1000 surrounding the side surface of the crucible 3000.

The ferrite 8000 according to one embodiment of the present application may also be applied to the crucible 3000. The ferrite 8000 may be applied to the side outer wall 3100 of the crucible 3000 as shown in Fig. 19 (b).

The thickness of the ferrite 8000 applied to the heating assembly according to an embodiment of the present invention may be variously selected according to the design purpose of the deposition apparatus 10000.

If the ferrite 8000 is disposed in the heating assembly as described above according to an embodiment of the present invention, the thermal efficiency of the crucible 3000 increases, and as a result, the amount of heat transferred from the crucible 3000 to the deposition material Can be increased. As a result, the deposition apparatus 10000 can have a high heat output relative to the same input energy by arranging the ferrite 8000, thereby having an effect of efficiently using energy. Further, the deposition apparatus 10000 has sufficient energy to actively move the deposition material in accordance with the high heat output, so that the deposition apparatus 10000 can have an effect of increasing the success rate of forming the deposition material on the deposition surface .

Hereinafter, a method of controlling the thermal distribution of the crucible 3000 to enhance the deposition chamber efficiency (or the deposition success rate) by varying the configuration of the deposition apparatus 10000 of the present application will be described.

In this case, the actual efficiency of the deposition means not only that the deposition material is properly formed on the deposition surface, but also means that the deposition efficiency is formed with a uniform thickness or concentration on the deposition surface.

2. Control of thermal distribution of crucible

It may be an important issue to increase the efficiency of the deposition chamber in which the deposition material is deposited on the deposition surface, in the deposition apparatus 10000 for depositing the deposition material on the deposition surface. In order to increase the deposition success rate, there may be a method of controlling the spatial distribution of the amount of heat provided to the deposition material accommodated in the inner space of the crucible 3000 of the present invention.

For example, (1) the amount of heat distributed in each space of the crucible 3000 can be controlled differently. As a specific example, by increasing the heat quantity distribution around the nozzle 3200 of the crucible 3000 relatively, the temperature of the evaporation material passing through the nozzle 3200 can be increased. As a result, the deposition material is smoothly discharged to the deposition surface through the nozzle 3200 and is formed on the deposition surface, so that the deposition apparatus 10000 can have an effect of increasing the deposition efficiency.

(2) The amount of heat distributed in the space of the crucible 3000 can be controlled uniformly. By uniformly distributing the heat distribution of the curbable, the thermal distribution enables the evaporation materials discharged from the respective nozzles formed in the crucible to move together toward the evaporated surface. Accordingly, the deposition material is uniformly formed on the deposition surface, and the actual efficiency of the deposition can be enhanced.

20 is a schematic diagram illustrating the thermal distribution of a crucible in accordance with one embodiment of the present application.

Figure 21 is a schematic diagram illustrating the thermal distribution of a crucible in accordance with one embodiment of the present application.

For convenience of explanation, the area on the side near the top surface of the crucible 3000 on which the nozzle 3200 is formed will be described as the N area side, and the relatively far area as the F area side.

As described above, the thermal distribution of the crucible 3000 to be achieved in the present invention may be thermal distribution in which the amount of heat on the side of the N region on the side of the crucible 3000 is relatively higher than that on the side of the F region.

In the case of thermal distribution as shown in FIG. 20 (a), the evaporation material can sufficiently pass the nozzle 3200 through the N region side of the crucible 3000, and can be moved to the evaporated deposition surface .

In the case of thermal distribution as shown in FIG. 20 (b), when the evaporation material moves toward the nozzle 3200 in the crucible 3000, the heat is supplied in a natural distribution and smoothly moves to the evaporated deposition surface .

20 (a) to 20 (b), it has been described that the configuration of the heating assembly is controlled so as to have a heat distribution in which the amount of heat generated in the Z axis direction of the crucible side as a whole varies. In addition, it is explained that each constitution is implemented so that the heat generation is divided into the N region near the nozzle, the nozzle and the far F region among the Z axis direction of the crucible side, and the heat generation is different for each region.

However, the thermal distribution of the crucible 3000 is not limited to the above example, and the thermal distribution may be variously generated in the X axis and Y axis directions, Can be implemented.

로 크루시블의 열분포가 형성될 수 있다. 또한, 크루시블의 열분포는 Z축 방향에서의 열량 발생이

로 균일한 크루시블의 열분포로 제어될 수도 있을 것이다.In addition, the thermal distribution of the crucible 3000 to be achieved in the present invention may be uniform thermal distribution generated in the X-axis direction side of the crucible 3000 as shown in FIG. At this time, the amount of heat generated along the Z-axis direction may vary. As described above, in order to increase the heat generation on the side of the crucible on which the nozzle is formed

Thermal distribution of rocuribile can be formed. In addition, the thermal distribution of the crucible causes the generation of heat in the Z-axis direction

It can be controlled by the thermal distribution of uniform crucible.

As described above, the outer wall 3100 of the crucible 3000 is formed so that the spatial distribution of the amount of heat to be supplied to the deposition material accommodated in the inner space of the crucible 3000 can be controlled to a predetermined distribution, The intensity distribution of the induced current induced in the battery can be appropriately controlled. For example, when the horizontal direction and the vertical direction are defined with respect to one heating surface of the four heating surfaces of the crucible 3000, the distribution of the induced current with respect to the one heating surface is the left- Or may be appropriately controlled along the up-down direction.

According to some embodiments of the present application, the shape of the outer wall 3100 of the crucible 3000 may be used to fabricate the crucible 3000 so that the distribution of the induced current is controlled.

According to some embodiments of the present application, the heating assembly may be fabricated such that the distribution of the induced current is controlled using the distance between the crucible 3000 and the coil 6000.

According to some embodiments of the present application, the heating assembly may be fabricated such that the distribution of the induced current is controlled using the arrangement / distribution of the magnetic field focusing portion.

According to some embodiments of the present application, the heating assembly may be manufactured such that the independent control of the coil 6000 is used to control the distribution of the induced current.

Hereinafter, embodiments of the present invention will be described in detail.

Meanwhile, in the drawings and the following description, the nozzle 3200 is shown as being formed in an upward direction, but this does not mean that the deposition equipment is a top-down or bottom-up equipment.

In the following, the shape of the crucible shown in the drawings as a whole is a rectangular parallelepiped having a longitudinal direction, but this is merely an example as described above. The embodiments described below can be applied to heating assemblies having various shapes of crucibles.

2.1 Crucible

The method of controlling the thermal distribution of the crucible 3000 to increase the actual efficiency of the deposition according to an embodiment of the present application may include various implementations of the shape of the crucible 3000. For example, the distance between the side of the crucible 3000 and the coil 6000 may be varied, and the thickness of the crucible 3000 may be different.

Hereinafter, embodiments in which the shape of the crucible 3000 is varied to control the thermal distribution in the crucible 3000 will be described in detail.

2.1.1 Adjustable distance between crucible and coil

In order to control the heat distribution in the crucible 3000 according to one embodiment of the present application, the crucible 3000 is formed so as to have various distance relationships from the coil 6000, which is the heating means 5000 formed .

22 is a side sectional view showing an example of a change in the shape of the crucible according to the embodiment of the present application.

22 (a) to 22 (b), the coil 6000 arranged around the cruise 3000 and the side regions including the sides of the crucible 3000 have different distance relationships, Sible 3000 can be implemented. Specifically, the crucible 3000 includes a crucible 3000 that is closer to the lower surface of the crucible 3000 than the side of the upper surface of the crucible 3000 where the nozzle 3200 is formed, (Hereinafter referred to as " F region side ") of the light guide plate 3000 may be embodied.

Referring again to FIG. 22 (b), the side surface of the crucible 3000 close to the lower surface of the crucible 3000 may be formed with a predetermined inclination. Specifically, the side of the crucible 3000 farthest from the nozzle 3200 formed in the crucible 3000 is the longest distance from the coil 6000, and the side closer to the nozzle 3200 is, The crucible 3000 may be formed such that the distance between the crucible 3000 and the substrate 6000 is short.

)에 따라 F 영역 측면보다 코일(6000)에 가깝게 구현된 크루시블(3000)의 N 영역 측면에 형성되는 다이나믹한 자기장의 세기 변화값이 커질 수 있다. 따라서, 상기 자기장의 세기 변화값에 대응하는 크루시블(3000)에 형성되는 유도 전류의 세기는 F 영역 측면보다 N 영역 측면에서 높게 된다. 따라서, 결과적으로 도 20 (a)를 참조하면, 전술한 것과 같이 크루시블(3000)을 구현하였을 때 노즐(3200)에 가까운 N 영역 측면이 F 영역 측면의 열량보다 높게 형성된 열분포가 되도록 제어할 수 있다.According to an embodiment of the present invention, when the crucible 3000 is implemented as described above, it is possible to control the heat distribution to be such that the side of the N region is formed higher than the heat amount of the side of the F region. The above-described magnetic field forming property (the above-

The intensity change value of the dynamic magnetic field formed on the side of the N region of the crosbible 3000 implemented closer to the coil 6000 than the side of the F region can be increased. Therefore, the intensity of the induced current formed in the crucible 3000 corresponding to the intensity change value of the magnetic field becomes higher at the side of the N region than at the side of the F region. 20 (a), when the crucible 3000 is implemented as described above, the side of the N region close to the nozzle 3200 is controlled to be thermal distribution having a heat amount higher than that of the side of the F region .

As a result, the amount of heat generated at the upper end of the crucible 3000 increases and the temperature can be relatively higher than the lower end. As a result, the deposition material emitted from the crucible 3000 can have a high activation energy and can be directed to the deposition surface through the nozzle 3200 of the crucible 3000 at a high speed.

20 (b), when the outer wall 3100 of the crosbible 3000 is formed to have a slope at the side of the F region, the distance from the coil 6000 continuously changes. Therefore, Thermal distribution may be controlled to be a more natural thermal distribution on the F-domain side.

Accordingly, when the evaporation material moves toward the nozzle 3200 in the crucible 3000, it is possible to receive a naturally increased amount of heat. Accordingly, the deposition material may have an effect of naturally moving to the deposition surface as compared with when the deposition material is discontinuously supplied with heat.

2.1.2 Adjusting outer wall thickness of crucible

By varying the thickness of the outer wall 3100 of the crucible 3000 according to one embodiment of the present invention, the heat distribution within the crucible 3000 can be controlled.

23 is a side cut-away view illustrating examples of variations in the thickness of the crucible according to one embodiment of the present application.

23 (a) to (d), the crucible 3000 according to an embodiment of the present application may be formed to have regions having different thicknesses.

For example, the crucible 3000 may be formed to have a different thickness from a portion (N region side) closer to the nozzle 3200 formed in the crucible 3000 and a relatively far portion (F region side). Specifically, the thickness of the side of the F region of the crucible 3000 can be made thin. Referring to FIG. 23 (a), the outer side of the side of the F region may be formed to be inwardly fined toward the inside of the crucible 3000, and the thickness may be thinner than the side of the N region. Referring to FIG. 19 (b) The inner side wall of the side of the F region of the bellows 3000 may be formed in a shape finely outward of the crucible 3000 so that the thickness of the side of the F region is relatively thinner than the thickness of the side of the N region. Referring to FIG. 23C, the thickness of the side surface of the F region may be formed to be thin from the inner wall toward the outer side from the outer wall 3100 in a form that is fins outwardly from the outer wall 3100 in combination with the above-described shapes.

As described above, the distance from the coil 6000 can be changed by implementing the thickness of the crucible 3000 differently. 23 (a) and 23 (c), the thickness of the side of the F region of the crucible 3000 according to the embodiment of the present application is thinned from the outside to the inside, Can also be distanced.

) 혹은 유도 전류 속성(전술한, 크루시블(3000) 두께)에 따라 도 20 (a)와 같은 N 영역 측면이 F 영역 측면의 열량보다 높게 형성된 열분포가 되도록 제어될 수 있다. 크루시블(3000)의 N 영역 측면에 자기장 세기 변화값이 큰 다이나믹한 자기장이 형성될 수 있다. 상기 자기장의 세기 변화값에 대응하여 크루시블(3000)의 두께가 두꺼운 측부(N 영역 측면)에서 상대적으로 세기가 큰 유도전류가 흐를 수 있다. 세기가 큰 유도 전류에 의하여 N 영역 측면에서의 열량 발생이 커져 크루시블(3000)의 열분포를 상기와 같이 제어할 수 있게 된다.When the crucible 3000 is implemented as described above in accordance with one embodiment of the present application, the crucible 3000 has a magnetic field shaping property (described above,

) Or the induction current property (the thickness of the crucible 3000), the side of the N region as shown in Fig. 20 (a) can be controlled to be the thermal distribution formed higher than the heat amount of the side of the F region. A dynamic magnetic field having a large magnetic field intensity change value can be formed on the side of the N region of the crucible 3000. An induced current having a relatively large intensity can flow through the thick side portion (N region side) of the crucible 3000 corresponding to the intensity change value of the magnetic field. The large amount of heat generated on the side of the N region due to the large induced current makes it possible to control the thermal distribution of the crucible 3000 as described above.

23 (d), as a combination example of the above-described crucible 3000, the crucible 3000 according to one embodiment of the present application has a different thickness and a predetermined angle of inclination Area.

When the crucible 3000 is implemented as described above, the distance from the coil 6000 on the side of the F region of the crucible 3000 can be continuously varied. Accordingly, the N region side is heat distribution having a heat quantity higher than that of the F region side, and it can be controlled to have a more natural heat distribution on the F region side as shown in FIG. 20 (b).

When the crucible 3000 is implemented as described above, since the amount of yara to be supplied to the deposition material passing through the side of the N region is increased, the deposition efficiency can be improved by smoothly guiding to the deposition target surface.

In the foregoing, a method of controlling the heat distribution of the crucible 3000 by varying the implementation shape of the crucible 3000 according to one embodiment of the present application has been described. Hereinafter, a method of controlling the heat distribution of the crucible 3000 by varying the implementation method of the coil 6000 will be described.

Meanwhile, in the above-described drawing, the crucible 3000 is shown inside the coil 6000 of the formed closed shape, but may not be limited thereto.

2.2 Coils

A method of controlling the thermal distribution of the crucible 3000 in order to increase the efficiency of the deposition according to an embodiment of the present invention includes various implementations of the coil 6000. For example, there may be a method of adjusting the winding of the coil 6000, a method of realizing various distances from the crucible 3000, and the like

Embodiments in which the coil 6000 is variously implemented will now be described.

2.2.1 Adjustment of coil winding

Figure 24 is a view of a coil formed on the outside of the crucible in accordance with one embodiment of the present application.

Referring to FIG. 24 (a), the number of windings of the coil 6000 may be arranged differently in the lateral region of the crucible 3000 according to an embodiment of the present application. For example, the distance from the nozzle 3200 of the crucible 3000 to the position of the crucible 3000, which is closer to the nozzle 3200 than the coil 6000 formed in the region of the crucible 3000 The number of windings of the closed shape coil 6000 that affects the region of the N-region 3000 (the N region side) may be larger.

24 (b), the crosbible 3000 may be an embodiment in which the upper side or lower side of the plurality of closed shape coils 6000 is disposed on the side of the N region of the crosbible 3000. [ The winding of the coil 6000 disposed on the side of the N region can be implemented with more coils 6000. [

)에 따라 F 영역 측면보다 배치된 코일(6000)이 권선수가 많게 구현된 크루시블(3000)의 N 영역 측면에 형성된 다이나믹한 자기장의 세기 변화값이 커질 수 있다. 결과적으로, 크루시블(3000)에 형성되는 유도 전류의 세기 또한 F 영역 측면보다 N 영역 측면이 높아지게 된다. 따라서, 결과적으로 도 20 (a)를 참조하면, 전술한 것과 같이 크루시블(3000)이 구현되었을 때 노즐(3200)에 가까운 N 영역 측면이 F 영역 측면의 열량보다 높게 형성된 열분포가 되도록 제어될 수 있다.According to an embodiment of the present invention, when the coil 6000 is implemented as described above, it is possible to control the heat distribution such that the side of the N region is formed higher than the heat amount of the side of the F region. The above-described magnetic field forming property (the above-

The intensity variation value of the dynamic magnetic field formed on the side of the N region of the crosbible 3000 in which the number of windings of the coil 6000 disposed more than the side of the F region is realized can be increased. As a result, the intensity of the induced current formed in the crucible 3000 also becomes higher on the side of the N region than on the side of the F region. Consequently, referring to FIG. 20A, when the crucible 3000 is implemented as described above, the side of the N region close to the nozzle 3200 is controlled to be thermal distribution higher than the heat amount of the side of the F region .

As a result, the amount of heat generated at the upper end of the crucible 3000 increases and the temperature of the crucible 3000 can be relatively higher than that at the lower end. As a result, the deposition material discharged from the crucible 3000 has a high activation energy And can be directed to the deposition surface through the nozzle 3200 of the crucible 3000.

2.2.2 Adjustment of Coil and Crucible Distance

The coil 6000 according to one embodiment of the present application may have various embodiments in terms of the positional relationship with the outer wall 3100 of the crucible 3000.

For example, the coil 6000 according to one embodiment of the present invention may be disposed with a smaller distance formed by the coil 6000 on the other side than the distance formed on one side of the crucible 3000.

25 is a view of a coil formed on the outside of the crucible according to one embodiment of the present application.

Referring to FIG. 25 (a), the distance of the coil 6000 may be different for each side region of the crucible 3000 according to an embodiment of the present application. For example, the distance from the nozzle 3200 of the crucible 3000 to the position of the crucible 3000, which is closer to the nozzle 3200 than the coil 6000 formed in the region of the crucible 3000 The distance of the closed shape coil 6000 that affects the region of the substrate 3000 (N region side) may be formed closer.

25 (b), for example, in the embodiment in which the closely coiled coil 6000 is implemented, the upper and lower portions of the plurality of closed- May be formed at a distance relatively closer to the N-region side of the F-region 3000 than the F-region side.

)에 따라 F 영역 측면보다 가까이 코일(6000)이 구현된 크루시블(3000)의 N 영역 측면에 형성된 자기장의 세기 변화값이 커질 수 있다. 결과적으로, 크루시블(3000)에 형성되는 유도 전류의 세기 또한 F 영역 측면보다 N 영역 측면이 높아지게 된다. 따라서, 결과적으로 도 25 (a)를 참조하면, 전술한 것과 같이 크루시블(3000)을 구현하였을 때 노즐(3200)에 가까운 N 영역 측면이 F 영역 측면의 열량보다 높게 형성된 열분포가 되도록 제어할 수 있다.According to an embodiment of the present invention, when the coil 6000 is implemented as described above, it is possible to control the heat distribution such that the side of the N region is formed higher than the heat amount of the side of the F region. The above-described magnetic field forming property (the above-

The intensity change value of the magnetic field formed on the side of the N region of the cruise 3000 in which the coil 6000 is implemented closer to the side of the F region can be increased. As a result, the intensity of the induced current formed in the crucible 3000 also becomes higher on the side of the N region than on the side of the F region. Consequently, referring to FIG. 25 (a), when the crucible 3000 is implemented as described above, the side of the N region near the nozzle 3200 is controlled to be thermal distribution higher than the heat amount on the side of the F region .

In the foregoing, a method of controlling the heat distribution of the crucible 3000 by varying the shape of the coil 6000 according to an embodiment of the present application has been described. Hereinafter, a method of controlling the thermal distribution of the crucible 3000 by arranging the magnetic field focusing structure 7000 in the heating assembly will be described.

2.2.3 Separate drive coil

The coil 6000 implemented in the deposition apparatus 10000 according to an embodiment of the present invention may be separately driven to control the thermal distribution of the crucible 3000.

26 is a conceptual diagram showing an example in which a coil implemented in the deposition apparatus 10000 according to an embodiment of the present application is separately driven.

FIG. 27 is a diagram schematically illustrating the thermal distribution of a crucible according to an embodiment of the present invention. FIG.

Referring to FIG. 26, the coil 6000 according to one embodiment of the present application may be driven separately. The properties of the variable power source applied to the separately driven coils 6300 and 6400 may be different. The variable power attributes may include frequency and intensity attributes of the power source, and the like.

A plurality of power sources having different properties to be applied to the coil 6000 may be respectively applied from a number of power supply units corresponding to the number of power sources.

 Alternatively, a plurality of power sources having different properties to be applied to the coils 6300 and 6400 may be applied to the coils 6300 and 6400 separately driven through the power source. In the case where the power supply apparatuses are powered by less than a plurality of power supplies, it is necessary to perform electrical processing such as distributing the output lines so as to supply power having different properties to the coils 6300 and 6400 driven separately.

A separate drive coil in accordance with one embodiment of the present application may have a configuration example corresponding to various implementations of the cruise.

Referring to FIG. 26 (a), coils 6300 and 6400 driven differently can be arranged for each region of the cruise. The region of the crucible can be divided into an upper region and a lower region based on a structure in which the implemented crucible is separated. A separate drive 1 coil 6300 may be disposed in the upper region of the cruise, and a separate drive 2 coil 6400 may be disposed in the lower region of the cruise. Therefore, the properties of the magnetic field affecting each region of the crucible are different, and the amount of heat of the crucible generated in the upper region and the lower region of the crucible may be different.

Further, as shown in Fig. 26 (b), the separation structure of the crucible can be realized in a crucible. In the case of the above-described separation structure, the region of the crucible can be divided into the upper region and the lower region based on the separated structure formed on the outer surface of the crucible. As described above, separately driven coils 6300 and 6400 may be disposed in the upper and lower regions of the crucible, respectively.

At this time, in order to increase the amount of heat generated in the vicinity of the nozzle 3200 of the crucible 3000, the coil 6000 disposed in the crucible 3000 according to one embodiment of the present invention is driven separately . The power source frequency and intensity applied to the coil 6000 disposed at the nozzle 3200 portion may be relatively increased.

If the power frequency and / or the intensity of the drive 1 coil 6300 is higher than the drive 2 coil power frequency and / or intensity, the amount of heat generated in the crucible 3000 corresponding to the drive 1 6300 2 < / RTI > The drive 2 coil 6400 can form a relatively strong magnetic field around the drive 1 according to the magnetic field forming property. The intensity of the induction current formed in the nozzle 3200 portion of the crucible 3000 can be increased by the relatively strong magnetic field. As a result, the separately driven coils 6300 and 6400 can be controlled to be the thermal distribution of the crucible 3000 as shown in FIG.

According to the thermal distribution of the crucible 3000, the amount of the evaporation material discharged through the nozzle 3200 of the crucible 3000 can be sufficiently supplied. Accordingly, the deposition material can be smoothly guided to the surface of the deposition target.

Meanwhile, when the frequency of the power source applied to the coil 3000 varies, the respective magnetic fields generated from the independently driven coils 6300 and 6400 may interfere with, interfere with, and / or influence each other. As the magnetic fields are mutually influenced, the strength of the magnetic field formed in the crucible 3000 may be weakened. As a result, the intensity of the induction current formed in the crucible 3000 is lowered and the heating efficiency of the crucible 3000 is lowered.

In order to solve the above-described problems, separately driven coils 6300 and 6400 according to an embodiment of the present invention may be implemented so as not to affect each other.

28 is a view of ferrite inserted between coils according to one embodiment of the present application;

28, a ferrite 8000 may be inserted between each separate drive coil 6300, 6400 to eliminate the mutual interference of the coils 6300, 6400 driven separately in accordance with one embodiment of the present application. have. The magnetic field that interferes with each other may be a magnetic field formed between the separate drive coils 6300 and 6400. [ The magnetic field formed between the separate drive coils 6300 and 6400 is formed in the direction of the other coil 6000 to affect the magnetic field formed in the other coil 6000. Therefore, the ferrite 8000 is inserted between the coils 6300 and 6400, so that the magnetic field formed between the separate driving coils can be focused on the ferrite 8000. When the magnetic field is focused on the ferrite 8000, a kind of shielding effect that a magnetic field can not be formed in the direction of the other coil 6000 may occur. As a result, the inserted ferrite 8000 can eliminate the mutual interference of the separately driven coils 6300 and 6400.

2.3 Ferrite

The ferrite 8000 according to one embodiment of the present application can affect the properties of the magnetic field. For example, ferrite 8000 can affect the strength of the generated magnetic field. Specifically, it affects the magnetic flux constituting the magnetic field, thereby increasing or decreasing the number of magnetic flux passing through a certain area, thereby influencing the strength of the magnetic field.

Hereinafter, various methods of arranging the ferrite 8000 in the heating assembly will be described as a method of controlling the thermal distribution of the crucible 3000 to improve the efficiency of the deposition according to an embodiment of the present invention. For example, the method may include a method of arranging the ferrite 8000 in various shapes, a method of disposing the ferrite 8000 in the outer wall 3100 of the crucible 3000, a method of applying the ferrite 8000 A method of arranging the ferrite 8000 by region, a method of windowing the ferrite 8000, and the like

In the following description, the ferrite 8000 may be realized in a shape having a slope, but the ferrite 8000 may exist in various forms such as a circle, an ellipse or a sphere, It will be possible.

2.3.1 Diversification of Ferrite Layout

The ferrite 8000 according to one embodiment of the present application may be disposed in the crucible 3000 in various forms surrounding the coil 6000.

29 is a view showing various shapes of ferrite according to an embodiment of the present application.

29 (a) to 29 (d), the ferrite 8000 according to an embodiment of the present application may be arranged to cover a part of the upper and / or lower conductor of the coil 6000 of the closed shape. For example, the ferrite 8000 may be disposed so that the lower portion of the closed shape coil 6000 is partially opened as shown in Figs. 29A and 29B. For example, the ferrite 8000 may be disposed such that the upper portion of the coil 6000 of the closed shape is partially opened as shown in Figs. 29 (c) and 29 (d)

When the ferrite 8000 is disposed in the heating assembly as described above according to an embodiment of the present invention, the amount of heat of the N region side or the F region side of the crucible 3000 can be high. The intensity of the magnetic field formed on the side of the N region or the side of the F region of the implemented crosbible 3000 can be increased according to the magnetic field focusing property described above. As a result, the intensity of the induction current formed in the crucible 3000 also becomes higher on the N region side or the F region side. As a result, when the ferrite 8000 is disposed in the heating assembly as described above, the side of the N region near the nozzle 3200 is larger than the heat of the side of the F region or the side of the F region is larger than the heat of the side of the N region So that the thermal distribution can be controlled as described above.

Accordingly, in the case of the heat distribution of the crucible 3000 in which the heat amount on the side of the N region is higher than the heat amount on the side of the F region, the deposition material has a high activation energy, 3200) to the deposition surface. On the other hand, in the case of a heat distribution having a high heat quantity on the side of the F region, the heat source can be sufficiently supplied so that the deposition material shortens the phase change threshold time.

30 is a view showing a ferrite disposed in a form covering the lower surface of a crucible according to an embodiment of the present application.

Referring to FIG. 30, the ferrite 8000 according to an embodiment of the present invention may be disposed so as to completely cover the lower surface of the crucible 3000.

The arrangement of the ferrite 8000 may be such that the heat of the lower surface of the crucible 3000 is larger than that of the crucible 3000 according to the magnetic field focusing characteristics of the ferrite 8000. As the ferrite 8000 converges the magnetic field on the lower surface of the crucible 3000, the intensity change value of the dynamic magnetic field generated on the lower surface of the crucible 3000 becomes relatively larger than the other portions. Correspondingly, the intensity of the induction current generated on the lower surface of the crucible 3000 increases, and the amount of heat generated in accordance with the above-described induction heating property also increases. As a result, the bottom surface of the crucible 3000 on which the deposition material is deposited may be the thermal distribution of the crucible 3000, which generates a relatively larger amount of heat than the top and sides of the crucible 3000.

The ferrite 8000 according to the embodiment of the present application can be arranged such that the heat amount of the N region of the crucible 3000 becomes the heat of the crucible 3000 higher than the heat amount of the F region.

31 is a view showing the shape of ferrite according to an embodiment of the present application.

Referring to FIG. 31 (a), ferrite 8000 according to one embodiment of the present application may be disposed in a heating assembly with different thicknesses. For example, the ferrite 8000 may be arranged such that the thickness of the ferrite 8000 is different depending on the positional area corresponding to the side surface of the crucible 3000. More specifically, the ferrite 8000 has a ferrite 8000 disposed at a position corresponding to the side of the N region with respect to the thickness of the ferrite 8000 disposed at a position corresponding to the side of the F region of the crucible 3000, It can be arranged thickly.

According to the embodiment of the present invention, the arrangement of the ferrite 8000 described above can be such that thermal distribution of the crucible 3000 having a higher heat amount on the side of the N region than the side of the F region can be achieved. The intensity change value of the magnetic field formed on the side of the N region can be increased according to the magnetic field focusing property. Therefore, the intensity of the induction current formed in the crucible 3000 also becomes higher on the side of the N region than on the side of the F region. As a result, as shown in FIG. 20 (a), the N region side having a large induced current intensity may be distributed to the crucible 3000 having a higher heat amount than the F region side heat depending on the induction heating property.

In the above description, an example in which the thickness is varied in the case where the ferrite 8000 is formed in the shape of a plate outside the coil 6000 of the closed shape is described with reference to FIG. 31 (a) The idea that the thickness of the ferrite 8000 is changed in the vicinity of the nozzle 3200 of the crucible 3000 may be applied to the various embodiments of the deposition apparatus 10000.

31 (b), the ferrite 8000 according to an embodiment of the present application may be disposed at different distances from the respective positional areas corresponding to the sides of the crucible 3000. [ For example, the ferrite 8000 may be disposed closer to the N region than the F region of the crucible 3000. For such an arrangement, the ferrite 8000 may be formed so as to be close to the nozzle 3200 portion of the crucible 3000 and slightly tilted away from the other portion.

The arrangement of the inclined ferrite 8000 according to the embodiment of the present application can be such that the thermal distribution of the crucible 3000 having a higher heat quantity on the side of the N region than the side of the F region can be achieved. Depending on the magnetic field focusing property of the ferrite 8000, the magnetic flux may be concentrated on the side of the N region than on the side of the F region. Accordingly, the intensity change value of the magnetic field formed on the side of the N region can be increased. As a result, the intensity of the induced current formed in the crucible 3000 also becomes higher on the side of the N region than on the side of the F region. 16 (a), when the crucible 3000 is implemented as described above, the side of the N region near the nozzle 3200 is formed to be larger than the heat of the side of the F region, It can be controlled to be thermal distribution.

However, in the above embodiment, the ferrite 8000 is formed to have a predetermined inclination so that the ferrite 8000 can be formed close to the nozzle 3200 of the crucible 3000. However, in addition to the embodiment in which the ferrite 8000 is implemented with the inclination, The ferrite 8000 can be formed without being limited to any shape as long as the ferrite 8000 can be formed close to the ferromagnetic layer 3200.

2.3.2 Diversification of Ferrite Layout in Crucible External Wall

The ferrite 8000 arranged in the form of the inner part of the crucible 3000 according to an embodiment of the present invention may be arranged so as to be differently disposed in the inner part of the crucible 3000.

32 is a cutaway side view showing a ferrite included in the outer wall of a crucible in accordance with one embodiment of the present application.

Referring to FIG. 32, when the ferrite 8000 according to an embodiment of the present invention is inserted into the side surface of the crucible 3000, the ferrite 8000 may be arranged differently depending on the area of the side surface. For example, the ferrite 8000 may be disposed on the side of the N region of the crucible 3000.

As described above, the ferrite 8000 arranged according to an embodiment of the present invention can be made to have thermal distribution of the crucible 3000 having a higher heat quantity on the side of the N region than the side of the F region. The ferrite 8000 can increase the intensity change value of the dynamic magnetic field on the side of the N region of the crucible 3000 according to the focusing property. As a result, the intensity of the induced current formed in the crucible 3000 can also be higher on the side of the N region than on the side of the F region. Therefore, it is possible to control the thermal distribution of the crucible 3000 in which the side of the N region near the nozzle 3200 is larger than the heat of the side of the F region, as shown in Fig. 20A.

2.3.3 Diversification of ferrite application

If ferrite is applied according to one embodiment of the present application, it may be implemented in a form that is applied to only a part of the heating assembly.

33 is a view of ferrite 8000 applied to a heating assembly according to one embodiment of the present application.

Referring to Figures 33 (a) to 33 (c), ferrite 8000 is disposed on the inner surface of the outer wall of housing 1000 and / or outer wall 3100 of crucible 3000 to control the heat distribution of crucible 3000 ) Of the surface layer. When the ferrite 8000 is applied to some areas as described above, the intensity change of the magnetic field in a part of the crucible 3000 corresponding to the position where the ferrite 8000 is applied can be increased. As a result, the current intensity distribution induced in the crucible 3000 can be changed, and the amount of heat generated in the crucible 3000 is different. As a result, as shown in FIG. 20 (a) It will be possible to control the thermal distribution.

2.3.4 Ferrite placement in some areas

The ferrite 8000 according to one embodiment of the present application may be disposed in a location area corresponding to a part of the side surface of the crucible 3000.

34 is a view showing that ferrite is formed in a portion of the crucible near the nozzle according to the embodiment of the present application.

Referring to FIG. 34 (a), the ferrite 8000 according to an embodiment of the present application may be disposed only in a location area corresponding to the N area on the side of the crucible 3000. 34 (b), the ferrite 8000 may be disposed at a position corresponding to the N region with an inclination.

When the ferrite 8000 is disposed as described above, the ferrite 8000 can be made to distribute the heat of the crucible 3000 having a higher heat quantity on the side of the N region than on the side of the F region. The ferrite 8000 can increase the magnetic field intensity change value on the N region side depending on the focusing property of the magnetic field. Accordingly, the intensity of the induced current formed in the crucible 3000 is also formed so that the side of the N region is higher than the side of the F region. As a result, referring to FIG. 20, when the crucible 3000 is implemented as described above, it is possible to control the side of the N region close to the nozzle 3200 to be thermal distribution formed so as to be higher than the heat amount of the side of the F region. Accordingly, the thermal efficiency of deposition can be increased by controlling the thermal distribution of the crucible 3000 as described above.

3. Combination example

As described above, the heating assembly may have various implementations and / or arrangements to control the thermal distribution of the crucible 3000 according to one embodiment of the present application.

The technical ideas of the above-described embodiments and / or arrangements according to an embodiment of the present application may be combined into a heating assembly. At this time, the technical idea may mean how the above-mentioned examples will be specifically implemented and / or deployed. That is, a combination of embodiments may be combined with embodiments of the crucible 3000, the coil 6000, and / or the ferrite 8000, which are embodied in various forms as specifically described above, Can be applied.

The various embodiments described above can be implemented in combination. Hereinafter, it will be described that the embodiments of the heating assembly design in the Z-axis direction specifically described above can also be applied in the X-axis and Y-axis directions.

Figure 35 is a side view of a crevice according to one embodiment of the present application.

Referring to FIG. 35, the Z-axis embodiments of each of the above-described heating assemblies are also applied in the X-axis or Y-axis directions to implement the heating assembly.

For example, an example in which the above-described embodiments are applied in the Y-axis direction to implement the heating assembly will be described.

A plurality of regions may be distinguished in the Y-axis direction of the cruise. The region in the Y-axis direction of the cruise can be divided into N regions, and each region will be referred to as a first Y region to an Nth Y region hereinafter.

For the implementation of a heating assembly according to one embodiment of the present application, the heating assembly may be designed based on various embodiments described above such that the thermal distribution properties are assigned to the first Y-th through N-th Y-regions, respectively. For example, the heating assembly may be designed such that the first thermal distribution of the first Y region is formed to be higher than the second thermal distribution of the second Y region.

Hereinafter, examples of the design of the heating assembly in the Y direction will be described.

36-39 are diagrams of a design of a heating assembly in the Y-axis direction in accordance with one embodiment of the present application.

As shown in FIG. 36, the cross-section can be realized by protruding from the side surface of the second Y region such that the side surface of the first Y region is formed closer to the coil than the side surface of the second Y region.

37, the thickness of the outer wall of the crucible in the Y direction is different, so that the thickness of the outer wall of the crucible of the first Y region is thicker than the thickness of the outer wall of the crucible of the second Y region Can be implemented. Further, as shown in FIG. 37 (b), the thickness of the outer wall of the crucible of the second Y region is adjusted, so that the distance from the coil can also be increased.

The coils arranged in the Y direction may be disposed at different distances from the outer wall of the crucible. Referring to FIG. 38, the coils may be disposed close to the first Y region and farther from the second Y region.

Referring to FIG. 39, an embodiment and / or a layout example of the ferrite arranged in the Y direction may be changed according to the Y area. 39 (a), the thickness of the ferrite disposed in the first Y region may be thicker than that of the second Y region. As shown in Fig. 39 (b) May be implemented to be larger than the second Y area. As shown in Figs. 39 (c) to 39 (d), ferrite may be applied or disposed only in the region corresponding to the first Y region.

When the heating assembly is designed according to the above embodiments, the intensity change value of the magnetic field affected by the side surface of the first Y region of the crucible is influenced more than that of the side surface of the second Y region according to the above- . In addition, the intensity of the induced current can be relatively larger in the second Y region than in the second Y region, corresponding to the magnitude of the magnetic field intensity change.

As a result, the amount of heat generated at the side of the first Y region becomes relatively larger than that at the side of the second Y region, so that the first thermal distribution of the first Y region has a higher thermal distribution than the second thermal distribution of the second Y region The crucible could be designed as much as possible.

Meanwhile, it has been described that the heating assembly is designed in the direction of the Y-axis. However, the design examples may be applied to the design of the heating assembly in the X-axis direction.

Although the above description has been made on the example of designing the heating assembly to control only the thermal distribution of the two regions out of the plurality of Y regions, the present invention is not limited to this. Can be utilized. Meanwhile, the intervals of the regions may be variously spaced at equal intervals, different intervals, or random intervals.

The above-described designs may be applied to the heating assembly in one or more combinations of the areas of the respective axes. The deposition apparatus 10000 of the present application may be implemented in combination of all of the above-described embodiments for an optimal embodiment, and only some of the above-described embodiments may be implemented in combination.

Hereinafter, a heating assembly designed in combination with the above-described embodiments will be described.

40 is a view of a heating assembly implemented in combination with embodiments in the Z direction of a crucible in accordance with one embodiment of the present application.

41 is a view of a heating assembly implemented in combination with embodiments in the X, Y, and Z directions of a crucible in accordance with one embodiment of the present application.

Referring to FIG. 40 (a), the embodiment of the above-described crosbible 3000 and the embodiment of the coil 6000 may be applied to the Z1 to Z2 regions, respectively. The side of the crucible 3000 protrudes from the Z1 region which is a side region closer to the nozzle 3200 of the cruise can 3000 than the other far side region Z2 and can be implemented close to the coil 6000. [ Further, a coil 6000 having a large number of windings may be disposed at a corresponding position of the Z1 region. Accordingly, the heat generation of the crucible in the Z1 region near the nozzle 3200 of the crucible 3000 can be made to have a high heat distribution.

Further, as shown in Fig. 40 (b), the deposition apparatus 10000 can be implemented by combining the implementation example of the drive coil 6000, the implementation of the coil 6000, and the ferrite 8000 implementation separately have. The side of the crucible is projected closer to the coil 6000 than the Z2 region in the Z1 region and the coil 6000 disposed in the Z1 and Z2 regions of the cruise 3000 is driven separately and placed in the Y1 region The ferrite 8000 may be disposed over the Z1 to Z2 regions such that the thickness of the ferrite 8000 is larger than that of the ferrite 8000 disposed in the Z2 region. Accordingly, the heat generation of the crucible in the Z1 region near the nozzle 3200 of the crucible 3000 can be made to have a high heat distribution.

Hereinafter, a heating assembly designed for three-dimensional X, Y, Z direction regions will be described.

When the crucible 3000 according to an embodiment of the present invention is formed in a rectangular shape having a longitudinal direction in the Y direction, the amount of heat generated in the crucible 3000 is more likely to occur on the side in the longitudinal direction . Therefore, the amount of heat is different in the region of the X-axis and the region of the Y-axis of the crucible 3000, and the thermal distribution of the crucible may be uneven distribution of heat at both ends in the longitudinal direction. By the thermal distribution of the non-uniform crucible, the deposition material may not be uniformly supplied with a sufficient amount of heat. Accordingly, the deposition material can not move uniformly on the deposition surface, and as a result, the actual efficiency of the deposition can be lowered.

The ferrite 8000 according to one embodiment of the present application can be controlled so that the thermal distribution of the crucible 3000 can be uniform.

The ferrite 8000 according to one embodiment of the present application may be disposed in a part of the region of the Y-axis and the Z-axis of the crucible, and may be disposed in the entire region of the region of the X-axis to design the heating assembly. As a result, it can be placed in the heating assembly in the shape of a ferrite 8000 with a window on the longitudinal side of the crucible as shown in Fig.

The value of the change in the magnetic field intensity affecting the lateral area of the crucible 3000 in the Y direction becomes smaller than in the case where there is no window. Accordingly, the intensity of the induced current in the lateral area of the crucible 3000 in the Y direction can be lower than in the case where there is no window relatively. As a result, the amount of heat generated in the longitudinal side of the crucible 3000 is reduced, and the side surface of the crucible 3000 as shown in FIG. 17 can be controlled so as to have a uniform thermal distribution in the Y direction.

In the foregoing, the heating assembly designed in combination with the various embodiments described above has been described. On the other hand, the embodiments that are applied in combination to implement the deposition apparatus 10000 according to an embodiment of the present application can be combined with various modifications of the above-described embodiments as long as the technical ideas of the embodiments do not change .

Up to now, the deposition apparatus 10000 has been variously implemented in order to solve the problem of increasing the deposition success rate in which the deposition material is deposited on the deposition surface, which is an important issue of the deposition apparatus 10000 described above Examples have been described.

4. Thermal equilibrium control of crucible

Up to now, there have been described methods of designing a heating assembly in accordance with one embodiment of the present application to control the thermal distribution of the crucible angular regions in the X, Y, and Z directions.

Hereinafter, a method of controlling the thermal equilibrium of the crucible of the present application will be described.

The thermal equilibrium of the crucible must be controlled so that the deposition material according to an embodiment of the present application can be smoothly discharged from the crucible.

Figure 42 is a diagram illustrating the thermal equilibrium of the lower surface of the crucible according to one embodiment of the present application.

Referring to Figure 42, the thermal equilibrium of the lower surface of the crucible can be achieved at various calories. For example, the thermal equilibrium can be made at a heat quantity higher than the heat quantity (Tv) at the upstream of the evaporation material as in (b) and (c), or a thermal equilibrium at a heat quantity lower than the heat quantity .

In this case, the thermal equilibrium means that the amount of heat to be supplied is the same as the amount of heat to be discharged, which means that the heat amount according to the time is kept the same. Even in such a thermal equilibrium state, the amount of heat is continuously supplied to the lower surface of the crucible, and the amount of heat is discharged, so that the equilibrium state may be specifically referred to as a dynamic equilibrium state.

Referring again to FIG. 42, in order for the evaporation material to undergo phase transformation and move to the evaporated deposition surface, the thermal equilibrium of the lower surface of the crucible is preferably such that the upper surface of the evaporation material has a higher caloric value (Tv) . The amount of heat that is higher than the amount of heat of the upper side is continuously supplied to the evaporation material, so that the evaporation material continues to phase change and move. Accordingly, the phase-shifted evaporation material continuously moves to the evaporated deposition surface, thereby enabling continuous deposition.

However, when the bottom surface of the crucible is thermally balanced as shown in (c), the amount of heat that is excessively higher than the phase transition heat amount Tv of the deposition material may be supplied. Accordingly, (1) the deposition material is discharged from the nozzles of the crucible at an excessively high rate, so that the deposition material deposited on the deposition surface can not have a sufficient time to be properly seated, Can be dropped. Further, (2) the waste energy can be increased. Therefore, it can be said that the thermal equilibrium as in (c) is inefficient control of the thermal equilibrium of the lower surface of the crucible.

That is, the thermal equilibrium of the lower surface of the crucible may be formed to be appropriately higher than the phase transition heat amount (Tv) of the evaporation material as shown in (b). According to the thermal equilibrium control of the crucible as described above, energy can be efficiently supplied to the evaporation material, and the evaporation material can be deposited on the evaporation surface.

On the other hand, the thermal equilibrium of the top surface of the crucible may be a problem in controlling the thermal equilibrium of the crucible. The most important issue in the operation of the deposition apparatus is whether or not the deposition material supplied with a sufficient amount of heat from the upper portion of the crucible can be smoothly discharged from the nozzle of the crucible and deposited on the deposition surface.

Figure 43 is a diagram illustrating the thermal equilibrium between the top and bottom of a crucible in accordance with one embodiment of the present application.

Referring to Figure 43 (a), the amount of heat generated at the top of the crucible is (1) as the crucible is continuously heated, the high heat generated at the top of the crucible is conducted to the bottom of the crucible And (2) the high heat generated on the top of the crucible can be discharged through the nozzle.

As described above, since the heat conduction continues from the lower portion and the upper portion of the crucible, the lower portion and the upper portion of the crucible can be thermally equilibrated to different calorific values.

 As shown in Fig. 43 (b), the amount of heat of the lower thermal equilibrium of the crucible can be increased from the heat amount of the conventionally designed thermal equilibrium. Conversely, the amount of heat of the thermal equilibrium in the upper part can be formed to be lower than the amount of heat of transition (Tv) of the deposition material by discharging the amount of heat of the upper part to the other space.

That is, even if the evaporation material undergoes phase transition due to a sufficient amount of heat supplied from the lower surface of the crucible, it may be solidified or liquefied in the upper portion of the crucible lower than the phase transition heat amount (Tv) of the evaporation material. The solidified or liquefied deposition material may block the nozzles formed on the top of the crucible and the deposition material may not be smoothly discharged through the nozzles of the crucible.

Alternatively, even if the thermal equilibrium of the crucible is achieved as shown in FIG. 43 (c), the above-mentioned problems of clogging of the nozzle of the crucible may occur.

That is, in the section T, the deposition material on the lower surface of the crucible can be supplied with a sufficient amount of heat and move in phase, but the amount of heat on the upper surface of the crucible is lower than the phase transition heat amount Tv of the deposition material. The deposition material can be solidified or liquefied in the upper part of the substrate. Accordingly, the solidified or liquefied deposition material may block the nozzles formed on the upper portion of the crucible.

According to the thermal equilibrium formed in the crucible, a configuration for solving the problem of clogging of the nozzle of the crucible may be provided in the heating assembly.

Figure 44 is a view of a heating assembly having a heat conduction suppression element formed therein according to one embodiment of the present application.

45 is a graph showing controlled thermal equilibrium according to one embodiment of the present application.

In order to solve the problem of the nozzle clogging, a heat conduction suppression element may be formed in the heating assembly according to an embodiment of the present application.

The heat conduction suppressing structure according to an embodiment of the present application can reduce the amount of heat transferred from the upper portion to the lower portion of the crucible. Accordingly, the amount of heat accumulated on the lower surface of the crucible can be reduced.

Referring to FIG. 44, the heat conduction suppressing structure according to an embodiment of the present application may include a slit, a blocking space, a heat insulating material, and the like. However, the heat conduction suppressing configuration is not limited to the above configuration, and various configurations may exist.

Hereinafter, the heat conduction suppression configuration will be described in detail.

Referring to Figure 44 (a), a slit may be formed on the outer wall of the crucible according to one embodiment of the present application.

Since the slit is formed, the amount of heat generated on the upper portion of the crucible through the slit can not be transmitted to the lower portion, and can be transferred only by the radiation method. That is, a path through which heat accumulated in the upper portion of the crucible can be transmitted downward is reduced. As the heat transferred to the bottom of the crucible decreases, the amount of heat accumulated in the bottom of the crucible can be reduced.

The position of the slit formed in the crucible may preferably be a position near the structure from which the crucible is separated. However, the slits can be formed at various positions of the crucible without being limited thereto. That is, a plurality of slits may be formed, and preferably, a plurality of slits may be formed in the vicinity of the separated structure of the crucible, but the plurality of slits may be located on the outer wall of the crucible .

Further, the slit may be designed in various shapes. As shown, a rectangular slit may be formed in the crucible, but may be formed in various shapes such as triangular, circular, elliptical, and rhombic. In addition, the width and length of the slit may be variously implemented.

In addition, the slit may be designed in various directions. And may be formed from the inside to the outside of the crucible, or from the outside to the inside. In addition, as shown in the drawing, it may be formed at an angle perpendicular to the surface of the cruise, but it is not limited thereto and may be formed at various angles.

44 (b), a blocking space may be formed in the outer wall of the crucible according to an embodiment of the present invention. The amount of heat generated on the upper part of the crucible through the blocking space formed on the outer wall of the crucible can not be transmitted to the lower part but can be transferred only by the radiation method. That is, a path through which heat accumulated in the upper portion of the crucible can be transmitted downward is reduced. As the heat transferred to the bottom of the crucible decreases, the amount of heat accumulated in the bottom of the crucible can be reduced.

The blocking space may be implemented within the outer wall of the crucible in various forms.

For example, referring to FIG. 44 (b), when the upper and lower portions of the crucible are assembled, a separation structure of the crucible may be formed so that a blocking space may be formed inside the outer wall . Accordingly, a blocking space can be formed inside the outer wall of the crucible.

The blocking space may be designed in various shapes. As shown in FIG. 1, a quadrangular empty space may be formed in the crucible, but may be formed in various shapes such as a triangle, a circle, an ellipse, and a rhombus.

The width and length of the blocking space can be variously implemented

A plurality of blocking spaces may be present and appropriately disposed inside the outer wall of the crucible.

The above embodiment is merely an example, and there may be various implementations in which a blocking space is formed on the outer wall of the crucible.

Referring to FIG. 44 (c), a heat insulating member capable of lowering thermal conductivity may be formed on the outer wall of the crucible according to an embodiment of the present invention. The heat insulating material can reduce the amount of heat conducted from the upper portion of the crucible to the lower portion in the middle. As the amount of heat conducted to the bottom of the crucible decreases, the amount of heat accumulated in the bottom of the crucible can be reduced.

The heat insulating member may be formed on the outer wall of the crucible in various forms.

For example, referring to FIG. 44 (c), the heat insulating member may be inserted between the upper portion of the crucible divided by the separating structure and the lower portion of the crucible.

The heat insulating member can be designed in various shapes. As shown in the figure, the rectangular shaped member may be inserted into the outer wall of the crucible. However, the rectangular shaped member may be formed in various shapes such as a triangle, a circle, an ellipse, and a rhombus.

As the material of the heat insulating member, a material having a low thermal conductivity may be selected, and a material having a melting point capable of exhibiting its function at a high temperature of the heat of the heating assembly may be selected.

The width and length of the heat insulating member can be variously implemented

The heat insulating member may be embodied in a plurality, and may be appropriately disposed inside the outer wall of the crucible.

The above embodiment is merely an example, and there may be various implementations in which the heat insulating member is formed on the crucible not limited thereto.

In addition, the heating assembly can be designed to smoothly discharge heat from the lower surface of the crucible according to an embodiment of the present invention.

For example, a radiating fin, a radiator, or the like may be disposed on the lower surface of the crucible, or a radiating paint may be applied. Since the heat dissipation means has a very high thermal conductivity, the heat amount can be smoothly conducted. That is, through the radiating means implemented on the lower surface of the crucible, the amount of heat accumulated in the lower portion of the crucible can be smoothly discharged.

Alternatively, the bottom surface of the crucible may have a wide surface area, so that the amount of heat can be smoothly discharged through the surface area that is widely formed. For example, the lower surface of the crucible can be roughly realized. The lower surface of the roughly implemented crevice can have a larger surface area than the smooth lower surface.

Alternatively, a black body may be formed on the inner surface of the housing opposite to the bottom of the crucible. The black body can absorb radiant heat radiated to the surroundings. Accordingly, radiant heat discharged from the lower portion of the crucible through the inner surface of the housing is absorbed by the black body, and radiant heat can be smoothly discharged through the housing.

However, the present invention is not limited to the above-described embodiments, and there can be a method of controlling the thermal distribution according to the time of the cruise, and each of the embodiments described above for maintaining the thermal distribution of the cruise can be implemented in combination .

Referring to FIG. 45, the thermal equilibrium of the crucible angle region can be appropriately controlled according to an embodiment for controlling the amount of heat transferred on the lower and upper surfaces of the crucible. The thermal equilibrium at the bottom of the crucible can be thermal equilibrium at an adequately high amount of heat rather than the phase transition heat (Tv) of the deposition material. On the other hand, not only the upper calorific value of the crucible can be higher than the phase transition calorie (Tv), but also the thermal equilibrium can be achieved with a calorific value higher than the lower calorific value of the crucible.

Accordingly, the crucible according to one embodiment of the present application is controlled not only to solve the problem of clogging of the nozzle described above, but also to have thermal equilibrium in which the evaporation material can be smoothly discharged from the upper portion of the crucible .

Hereinafter, examples of arrangements of the transformer / current transformer and the transformer / current transformer of the deposition apparatus 10000 will be described.

5. Transformer / Current transformer

Hereinafter, a transformer / current transformer according to one embodiment of the present application will be described.

In order to drive the coils of the heating assembly of the present application, the transformer and / or the current transformer may output a high frequency voltage or current whose direction and intensity change with time. For example, the transformer and / or the current transformer may receive the DC power and convert the AC power into AC power, and apply the converted AC power to the coil.

That is, the transformer / current transformer is a necessary equipment for driving the deposition equipment of the present application. Hereinafter, for convenience of explanation, a transformer and a transformer of the transformer will be described as an example.

In addition, the current of the power source applied to the coil by the transformer according to some embodiments of the present application may have a relatively high value compared to the current of the direct current power source provided to the transformer. That is, the power output by the transformer may be very high current. This is because, as described above, in the deposition apparatus according to the embodiments of the present application, the induction current whose direction and intensity are rapidly changed according to the change of time is utilized on the outer wall of the crucible in order to heat the crucible, The current value of the induction current is increased.

The transformer may be provided with a conductor (hereinafter referred to as an output line 9120) for applying the high current to the coil and a conductor (hereinafter, input line 9110) for supplying an external DC power to the transformer. Through the output line 9120, power output from the transformer can be provided to the coil. Through the input line 9110, a DC power input to the transformer may be provided to the transformer.

However, as described above, a high current can flow through the output line 9120. At this time, the high current combines with the resistive component of the output line 9120 to generate heat, so that a high heating phenomenon may occur in the output line 9120. Accordingly, the output line 9120 may be damaged when the evaporation apparatus according to the embodiment of the present application is used. Therefore, in order to prevent the output line 9120 from being broken, it is necessary to suppress the high heat development phenomenon. Accordingly, in order to further reduce the resistance value of the output line 9120, the output line 9120 of the transformer Thick.

On the other hand, the input line 9110 need not be further lowered in resistance value. Accordingly, it is not necessary to increase the thickness of the input line 9110 at a high cost, and the input line 9110 is formed to be relatively thinner than the output line 9120.

The above-described transformer may have an example of being disposed in several spaces. This will be described below.

The space according to one embodiment of the present application can be divided into an outer space and an inner space. The outer space is a space separated from the inner space in which the evaporated surface, the heating assembly, etc. of the present application are disposed. The inner space may have an environmental property of vacuum. This is to exclude impurities that may affect the process of depositing the phase-change deposition material on the deposition surface using the heating assembly. The outer space separated from the inner space does not need to exclude impurities different from the inner space, and the outer space is a space having a general atmospheric pressure property.

In the inner space of the deposition apparatus, the heating assembly and / or the deposition surface are moved relative to each other, and the deposition operation can be performed. The deposition operation refers to an operation process in which a deposition material is formed on a deposition surface. The relative movement may be a movement of the evaporated surface in a state where the heating assembly is fixed, and the evaporated deposition surface and the heating assembly may move together and have different velocities, or the evaporated deposition surface may be fixed The heating assembly may be moving.

The transformer according to one embodiment of the present application may be fixedly disposed in an outer space of the deposition apparatus.

Figure 46 is a diagram showing transformers, input lines, and output lines in an external space according to one embodiment of the present application.

Referring to FIG. 46, the transformer fixed in the outer space can supply AC power to the coil implemented in the inner space. The transformer fixed to the external space may receive DC power generated by a DC power source provided in the external space through an input line 9110. The transformer may convert the input DC power into a high frequency AC power. The converted high frequency AC power is applied to the output line 9120 of the transformer and the output line 9120 is connected to the coil through the partition wall or the outer wall separating the outer space from the inner space, And provides AC power to the coil through line 9120. [

As described above, when the transformer is fixedly disposed in the external space, some problems may occur.

Figure 47 is a diagram illustrating a moving heating assembly in accordance with one embodiment of the present application.

Referring to FIG. 47, when the transformer is disposed in the external space, the output line 9120 of the transformer may be damaged. When the heating assembly moves while the evaporation operation is performed in the inner space because the transformer is fixed to the outside, deformation such as elongation or bending may occur in the output line 9120 connected to the coil. The output line 9120 may be continuously deformed due to the subsequent deposition operation to cause abrasion and the abrasion may be continued to cause the output line 9120 to be destroyed.

In order to solve this problem, a moving unit for moving the transformer disposed in the outer space corresponding to the movement of the heating assembly may be disposed in the outer space.

Even so, referring again to FIG. 46, when a transformer is disposed in the external space, it may be difficult to realize an outer wall that separates the internal space from the external space.

The outer wall separating the inner space and the outer space must have a structure in which the output line 9120 can be disposed in the inner space from the outer space. Meanwhile, the structure of the outer wall must be formed so as to maintain the vacuum environment property of the inner space. However, the structure should be formed in a through-hole structure in which the outer space and the inner space are connected to each other so that the output line 9120 can be arranged as an inner space in the outer space, and the size of the penetration structure is formed thick as described above The output line 9120 should be considered. Therefore, it is very difficult to realize a structure in which the output line 9120 can pass through the outer wall without deteriorating the vacuum environment property of the inner space.

Accordingly, implementing the penetrating structures of the driving part, the power generating source, and the outer wall for driving the moving part and the moving part, respectively, in the external space may cause a cost problem.

In some embodiments of the present application, in order to solve the above-mentioned problems, the transformer of the present application is disposed inside the deposition apparatus, and 2) the relative positional relationship between the crucible (heating assembly) and the transformer So that it can be fixed.

In order to implement a deposition apparatus according to an embodiment of the present application, the transformer may be fixed to one side of the heating assembly.

Thus, the transformer may be installed inside the deposition apparatus together with the heating assembly, and the positional relationship between the heating assembly and the transformer may be fixed. That is, when the heating assembly moves within the deposition equipment to implement the relative movement between the heating assembly and the deposition surface, the transformer can move together with the movement of the heating assembly.

At this time, since the relative positions between the transformer and the heating assembly are fixed to each other, the problem of destruction of the output line 9120 is no longer caused.

Since the power source for supplying the DC power to the transformer has a problem of being relatively flexible, the problem of destruction of the input line 9110 due to the movement of the transformer may be reduced do.

However, in another embodiment, the transformer and the heating assembly need not necessarily be fixed to each other.

For example, as the heating assembly moves, the deposition equipment may be implemented such that the transformer is also moved synchronously. To this end, the deposition apparatus may be provided with another driving unit separately configured from the driving unit for moving the heating assembly.

Further, even if the transformer is disposed in the inner space, some small problems may remain. If the transformer is installed in a high-vacuum environment, which is an internal space, the vacuum environment may be damaged by the operation of the transformer.

Thus, according to some other embodiments of the present application, the deposition equipment may further include a vacuum box for providing the transformer therein.

Figure 48 is a view of a transformer, a vacuum box, and a heating assembly according to one embodiment of the present application.

Referring to FIG. 48, the vacuum box provided with the transformer may receive power from the driving unit and move in synchronism with the heating assembly. Accordingly, the inner space of the box may be separated from the vacuum environment, thereby damaging the vacuum environment even if the transformer operates, and may not cause the coil to be broken when the heating assembly moves.

In the following, deposition equipment will be described in detail, according to some embodiments of the present application.

Figure 49 is a diagram of a deposition apparatus according to one embodiment of the present application.

Referring to Figure 49, the deposition equipment according to some embodiments of the present application may include a housing, a heating assembly, and a transformer.

The housing may provide a space within which the deposition related configurations may be implemented. A heating assembly, a transformer, and the like. The housing may have a highly airtight outer wall that can distinguish the inner space from the outer space, so that the housing can maintain the inner space of the housing in a high vacuum environment.

The heating assembly may heat the deposition material placed on the crucible using a coil to phase-transition the deposition material and allow the deposited deposition material to be deposited on the deposition surface.

However, the heating assembly may have the configuration of a heating assembly according to some embodiments of the present application as described above, but is not necessarily limited thereto.

The transformer may be provided inside the housing and may be fixed to one side of the heating assembly as described above.

The transformer will be described in more detail.

The output line 9120 provided in the transformer can be connected to the coil with a fixed shape because it is highly rigid as described above. Also, since the transformer is fixed to one side of the heating assembly, the output line 9120 is also connected to the coil, so that the fixed shape can be largely changed even during the deposition of the evaporation material.

Meanwhile, the input line 9110 provided in the transformer may be connected to an external DC power source of the external space through a through hole formed in the outer wall of the housing, extending from the transformer.

As described above, the input line 9110 is relatively low in power than the output line 9120, so that it is unnecessary to form a thick conductor such as the output line 9120, 9110). Even if a lead wire previously arranged as described above is not used, a thin input line 9110 can be disposed through a small through-hole. Also, in response to the movement of the transformer, the input line 9110 may be implemented as a long length.

As described above, since it is flexible compared to the output line 9120 of the input line 9110 as described above, unlike the output line 9120, the problem caused by the breakdown can be minimized.

Further, as described above, when the heating assembly is moved by the driving unit, a driving unit may be separately provided so that the transformer can also be moved in a fixed positional relationship with one side of the heating assembly.

Hereinafter, a deposition apparatus having a vacuum box according to an embodiment of the present application will be described.

50 is a view of a deposition apparatus according to an embodiment of the present application.

Referring to Figure 50, the deposition equipment according to some embodiments of the present application may include a housing, a heating assembly, a transformer, and a vacuum box.

A duplicate description of the above-described configurations will be omitted.

The vacuum box may form a space therein. It may also be a vacuum environment such as the composition inside the housing.

In addition, the vacuum box may include various actuators, wires, and connection members.

According to the present embodiment, the vacuum environment inside the housing due to the operation of the transformer can be eliminated, and the transformer can be provided in the inner space of the vacuum box.

The output line 9120 of the transformer may extend through the through hole implemented in the vacuum box and be connected to the coil.

Alternatively, a high-rigidity bellows or an arm-shaped connection member corresponding to the rigidity of the output line 9120 may be provided in the vacuum box so that the output line 9120 may be connected to the coil. The connecting member may be extended to the coil, and the output line 9120 may be connected to the coil through the connecting member.

The input line 9110 of the transformer may also be connected to an external power source through a through hole implemented in the vacuum box and through a through hole in the outer wall of the housing.

Alternatively, a connection member having low rigidity corresponding to the rigidity of the input line 9110 may be provided in the vacuum box so that the input line 9110 can communicate with the external space. The connecting member may be of sufficient length corresponding to the movement of the heating assembly. Further, since the connecting member is low rigidity, it can move smoothly.

Therefore, the connection member provided in the vacuum box may be formed with an internal space so that a wire can be disposed therein.

Also, as described above, when the heating assembly moves by the driving unit, a driving unit may be separately provided so that the vacuum box having the transformer can be moved in a fixed positional relationship with one side of the heating assembly.

On the other hand, the transformer may malfunction in a high vacuum environment. Therefore, the inner space of the box may have a constant atmospheric pressure property. At this time, the atmospheric pressure environment may be the atmospheric pressure environment.

However, the deposition equipment according to one embodiment of the present application may further include an atmospheric pressure box in addition to the above-described components.

The atmospheric pressure box is separated from the external environment so that the internal environment can be generally set at an atmospheric pressure level.

In addition, the atmospheric pressure box may be provided with the connecting member, the driving unit, the wire, and the like.

In addition, the atmospheric pressure box may further include various sensors to detect an environmental change.

The transformer of the deposition equipment according to the embodiment can be disposed inside the atmospheric box provided in the deposition equipment. By disposing the transformer of the present application in the atmospheric pressure box, all the problems mentioned in this specification can be solved. That is, the example of the transformer arrangement is the most efficient and ideal transformer arrangement example of the present application.

Specifically, when the transformer is disposed in the atmospheric pressure box, it is unnecessary to (1) form a complicated penetrating structure, a driving unit, a power generating unit, and the like on the outer wall, (2) the driving unit is already implemented, (3) Since the atmospheric pressure box can have a positional relationship fixed to one side of the heating assembly and can move, the problem of destruction of the output line 9120 does not occur, (4) (5) Since a constant atmospheric pressure environment is applied to the atmospheric pressure box, there is no problem of malfunction due to the operation of the transformer.

In the above-described heating assembly according to the present invention, the steps constituting the respective embodiments are not essential, and therefore, each embodiment may selectively include the above-described steps. Moreover, each step constituting each embodiment is not necessarily performed according to the order described, and the step described later may be performed before the step described earlier. It is also possible that each step is repeatedly performed during operation.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, It will be apparent to those skilled in the art that changes or modifications may fall within the scope of the appended claims.

1000: housing 2000: heating assembly
3000: Crucible 3100: Outer wall
3200: nozzle 5000: heating means
6000: coil 6100: magnetic field
6200: magnetic flux 8000: ferrite
9000: Other components 9100: Transformers / current transformers
9110: Input line 9120: Output line
10000: Deposition apparatus

Claims (9)

A heating assembly for depositing a material on a surface of a deposition target,
A heating container including an outer wall defining an inner space, wherein the outer wall includes an upper portion and a lower portion, and a separation structure is formed on the outer wall so that the upper portion and the lower portion are separated;
A coil for forming an induction current in the outer wall so that the heating vessel is heated;
A power generator having a power supply line for supplying power to the coil; And
And a coil connecting member for electrically connecting the coil and the power generator,
Wherein the coil includes a first coil and a second coil, the coil connecting member includes a first coil connecting member and a second coil connecting member, and the power supply line is connected to the first power supply line and the second power supply line And
Wherein the first coil has a first positional relationship with the heating vessel and the second coil has a second positional relationship with the heating vessel,
Wherein the first coil connecting member is connected to one side of the first coil, one side of the second coil, and the first power supply line, and the second coil connecting member is connected to the other side of the first coil, Connected to the other side of the coil,
An electrical detachment structure is formed between the first coil connecting member and one side of the first coil, one side of the second coil, or at least one of the first power supply lines, and the second coil connecting member and the second coil connecting member And an electrical desorption structure is formed between at least one of the other side of the first coil and the other side of the second coil.
Heating assembly.
A heating vessel including an outer wall defining an inner space in which the deposition material is placed;
A coil for forming an induction current in the outer wall to heat the heating vessel;
A power generator for generating driving power for driving the coil; And
And a coil connecting member for electrically connecting the coil and the power generator,
Wherein the outer wall of the heating vessel includes a first region and a second region, a separation structure is formed between the first region and the second region,
Wherein the coil includes a first coil and a second coil, the first coil has a first positional relationship with the heating vessel, the second coil has a second positional relationship with the heating vessel,
Wherein the coil connecting member includes a first coil connecting member and a second coil connecting member,
The first coil connecting member is electrically connected to one side of the first coil,
A nozzle is formed in the first region of the heating vessel,
Characterized in that the first coil is disposed close to the nozzle of the heating vessel and the second coil is disposed close to the second region of the heating vessel
Heating assembly.
3. The method of claim 2,
And an electrical desorption structure is formed between the first coil connecting member and the first coil
Heating assembly.
3. The method of claim 2,
Characterized in that the nozzle is a protruding nozzle
Heating assembly.
5. The method of claim 4,
The power generator further includes a power supply line,
Wherein the power supply line includes a first power supply line and a second power supply line,
And the first power supply line is connected to the first coil connecting member and the first coil.
Heating assembly.
6. The method of claim 5,
The second power supply line is connected to the second coil,
And the second coil connecting member is connected to the second coil
Heating assembly.
The method according to claim 6,
Characterized in that a physical shape of the first coil connecting member and a physical shape of the second coil connecting member are different from each other
Heating assembly.
3. The method of claim 2,
When the power generator generates power, the first driving power is applied to the first coil, the second driving power is applied to the second coil,
Wherein the first driving power source and the second driving power source are generated at the same time
Heating assembly.
9. The method of claim 8,
Wherein an electrical property of the first driving power source is different from an electrical property of the second driving power source
Heating assembly.

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