KR101749570B1 - Inductive Heating Linear Evaporation Deposition Apparatus - Google Patents
Inductive Heating Linear Evaporation Deposition Apparatus Download PDFInfo
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- KR101749570B1 KR101749570B1 KR1020150149822A KR20150149822A KR101749570B1 KR 101749570 B1 KR101749570 B1 KR 101749570B1 KR 1020150149822 A KR1020150149822 A KR 1020150149822A KR 20150149822 A KR20150149822 A KR 20150149822A KR 101749570 B1 KR101749570 B1 KR 101749570B1
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- conductive
- nozzle block
- nozzle
- crucible
- conductive crucible
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- H01L51/56—
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- H01L51/0008—
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- H01L2251/56—
Abstract
The present invention provides an induction heating linear evaporation apparatus. The apparatus comprises a vacuum container; A conductive crucible in the form of a rectangular parallelepiped having an open top surface and extending in a first direction and disposed inside the vacuum container and containing the deposition material; A nozzle block which is aligned with the conductive crucible and inserted into the upper surface of the conductive crucible and is formed of a conductor having a rectangular parallelepiped shape including a plurality of through nozzles; A conductive diffusion plate disposed between the nozzle block and the deposition material and diffusing the vapor of the deposition material through the opening; And an induction heating coil extending and extending in the first direction so as to surround the conductive crucible and the nozzle block to induction-heat the conductive crucible, the conductive diffusion plate, and the nozzle block. A depression is formed on a lower surface of the nozzle block, and the conductive diffusion plate is mounted on a lower surface of the depression to provide a buffer space. The nozzle block and the conductive crucible are aligned with each other and coupled to each other so as to be disassembled and coupled with each other. Wherein the through-hole nozzle is spaced apart in the first direction; And a second heat-penetrating nozzle spaced apart in a direction perpendicular to the first direction and disposed in parallel with the first heat-penetrating nozzle.
Description
The present invention relates to a linear evaporation deposition apparatus, and more particularly to an induction heating linear evaporation deposition apparatus for a high deposition rate.
In fabricating an organic light emitting diode (OLED), a process for forming an organic thin film and a process for forming a conductive thin film are required, and evaporation deposition is mainly used for such a thin film forming process.
The organic thin film is heated by flowing electric current to the hot wire wrapping the crucible containing the organic material, and the heat transferred to the crucible raises the temperature of the organic material in the crucible. As the temperature of the organic material rises, the organic material passes through the crucible in the form of gas It is mainly made in such a way that it is deposited on a substrate. Most of the evaporation sources have been used for the production of organic thin films by such thermal evaporation method.
The point evaporation source is an organic material deposited on the substrate. The point near the evaporation source is thick, and the farther substrate is thin, so that the thin film can not be uniformly formed. Therefore, a point evaporation source is provided at a position far from the center of the substrate and a method of rotating the substrate is used. In this case, however, the size of the deposition chamber is increased, the substrate must be held and rotated, and the uniformity of the thin film is not obtained as desired. Since the point evaporation source is installed at a small distance from the center of the substrate, most of the organic material gas ejected from the point evaporation source is deposited in the deposition chamber rather than on the substrate, and the efficiency of using the organic material is remarkably decreased. There is a problem that a plurality of point evaporation sources are placed in the deposition chamber and are used by being rotated by complicated control. In addition, in the case of a large-area substrate, these problems become more serious.
The evaporation source may be classified into a point source, a linear source, and an area source depending on the number and / or arrangement of the injection holes. In recent years, linear evaporation sources have attracted more attention than point sources due to the large-sized substrates, and the length of linear evaporation sources is gradually increasing. The linear evaporation source not only has higher deposition efficiency but also higher deposition rate than the point source. However, a linear evaporation source usually needs a scanning means for scanning the evaporation source left or right or up and down. In the linear evaporation source, it is difficult to control the deposition temperature and the deposition rate, and it is difficult to obtain the uniformity of the deposition. In particular, as the length of the linear evaporation source becomes longer so as to be able to cope with a large-sized substrate, it becomes more difficult to attain uniform deposition uniformity as a whole.
In addition, when the incremental source or the linear evaporation source is replaced, it takes a considerable time until the vacuum is exhausted to the high vacuum after the replacement because the vacuum chamber must be made in a high vacuum. Further, when a spot evaporation source or a linear evaporation source evaporation material is contained in a large amount, the evaporation material can be denatured by heat. Frequent replacement of the deposited material is economically ineffective. Therefore, there is a demand for a linear evaporation apparatus of a new structure for storing a large amount of organic substances and for depositing organic substances.
In order to realize a high deposition rate, a large area induction heating linear evaporation apparatus requires a new crucible structure.
SUMMARY OF THE INVENTION It is an object of the present invention to provide a linear evaporation deposition apparatus for improving the spatial uniformity of a deposited thin film and improving the deposition rate of organic materials.
SUMMARY OF THE INVENTION It is an object of the present invention to provide a linear evaporation deposition apparatus capable of uniformly depositing a large area substrate with high straightness and capable of accommodating a large amount of evaporation material without heat denaturation .
It is an object of the present invention to provide a linear evaporation apparatus for fabricating an organic light emitting device thin film for improving the spatial uniformity of a deposited thin film and improving the efficiency of use of organic materials.
SUMMARY OF THE INVENTION It is an object of the present invention to provide a linear evaporation apparatus for manufacturing a thin film of an organic light emitting device which employs an induction heating structure and a block type nozzle structure to facilitate induction heating and temperature control.
An induction heating linear evaporation apparatus according to an embodiment of the present invention includes a vacuum container; A conductive crucible in the form of a rectangular parallelepiped having an open top surface and extending in a first direction and disposed inside the vacuum container and containing the deposition material; A nozzle block which is aligned with the conductive crucible and inserted into the upper surface of the conductive crucible and is formed of a conductor having a rectangular parallelepiped shape including a plurality of through nozzles; A conductive diffusion plate disposed between the nozzle block and the deposition material and diffusing the vapor of the deposition material through the opening; And an induction heating coil extending and extending in the first direction so as to surround the conductive crucible and the nozzle block to induction-heat the conductive crucible, the conductive diffusion plate, and the nozzle block. A depression is formed on a lower surface of the nozzle block, and the conductive diffusion plate is mounted on a lower surface of the depression to provide a buffer space. The nozzle block and the conductive crucible are aligned with each other and coupled to each other so as to be disassembled and coupled with each other. Wherein the through-hole nozzle is spaced apart in the first direction; And a second heat-penetrating nozzle spaced apart in a direction perpendicular to the first direction and disposed in parallel with the first heat-penetrating nozzle.
In an embodiment of the present invention, the opening of the conductive diffusion plate may be offset and disposed so as not to be disposed in a straight line with the through-hole nozzle.
In one embodiment of the present invention, the through nozzles are arranged symmetrically with respect to the center of the nozzle block, the intervals between the through nozzles are non-uniformly arranged in the first direction, May be offset and arranged so as not to be disposed in a straight line with the through-hole nozzle.
In one embodiment of the present invention, the opening may be disposed at the center of the arrangement plane of the diffusion plate.
In one embodiment of the present invention, the opening may be symmetrically disposed at a portion in contact with the inner side surface of the conductive crucible.
In one embodiment of the present invention, a deposition material covering part disposed inside the conductive crucible and disposed to surround an upper surface of the deposition material may be further included.
In an embodiment of the present invention, the evaporation material cover may move along the inner surface of the conductive crucible as the evaporation material evaporates.
By implementing the high deposition rate, the process time of the deposition process can be reduced and the manufacturing cost of the OLED can be reduced.
1A is a perspective view illustrating an induction heating linear evaporation apparatus according to an embodiment of the present invention.
1B is a longitudinal sectional view of the linear evaporation deposition apparatus of FIG. 1A.
1C is a cross-sectional view of the linear evaporation deposition apparatus of FIG. 1A cut in the width direction.
1D is an exploded perspective view showing the conductive crucible and the nozzle block of FIG. 1A.
FIGS. 2 to 5 are views for explaining the arrangement of the through-nozzles and the arrangement of the openings of the conductive diffusion plate according to other embodiments of the present invention.
Organic light-emitting diodes (OLEDs) are used as display devices such as large-area TVs. The size of such large-area display element substrate is about several meters. In order to deposit an organic thin film or a conductive thin film on such a large area display element substrate, a linear evaporation deposition apparatus is required.
When the linear evaporation apparatus uses an induction heating coil, the induction electric field can penetrate into the conductive crucible and heat the conductor inside. On the other hand, the evaporation material is converted into steam by receiving heat from the heated conductor.
When the conductive crucible is in the form of a box and the deposition material is stored inside the conductive crucible, the deposition material is vaporized by receiving heat from the inner wall of the box-shaped conductive crucible. In the induction heating system, in order to achieve a high deposition rate and a large-area uniform deposition, the induction heating coil is difficult to achieve a complete closed loop and may cause spatially non-uniform heating characteristics. Therefore, a change in the internal structure of the crucible is required to achieve a spatially uniform deposition.
According to an embodiment of the present invention, the nozzle block includes a plurality of through nozzles arranged in a matrix form, and the through nozzles are formed to penetrate through the nozzle block in the form of a hemispherical plate. Accordingly, an increase in the number of the through nozzles can increase the thin film deposition rate.
According to an embodiment of the present invention, a conductive diffusion plate is disposed inside the conductive crucible. The conductive diffusion plate may be directly heated simultaneously with the conductive crucible by the induction heating coil. Accordingly, when the evaporation rate of the evaporation material differs according to the position, the diffusion plate provides vapor to the buffer space through the opening, and the buffer space can provide a more uniform density distribution than the space in which the evaporation material is accommodated have. Therefore, the buffer space can uniformly supply the amount of steam discharged for each through nozzle.
On the other hand, the deposition material may be evaporated in the conductive crucible and then deposited again on the upper surface of the deposition material. Accordingly, the re-deposited evaporation material can be denatured by heat. Therefore, a method for suppressing the re-deposition of the vapor is required. A linear evaporation apparatus according to an embodiment of the present invention includes a deposition material covering part covering the deposition material. The deposition material cover may be formed of a conductive material and may be induction-heated. Vapor moves through the side space between the deposition material lid and the conductive crucible, and the heated deposition material lid can suppress deposition of the vapor. The deposition material lid portion may be configured to be lowered in accordance with evaporation of the deposition material to be in constant contact with the deposition material. In the absence of the evaporation material lid, the evaporation rate depending on the position may depend on the structure and position of the induction heating coil, the amount of the evaporation material depending on the position, and the like. However, the deposition material lid can only allow vapor to escape through a particular location or region and provide the same vapor diffusion path. As a result, stable operation and process reproducibility are improved. Further, the vapor deposition material cover prevents the vapor from being re-deposited on the vapor deposition material again. Therefore, the performance of the deposited thin film can be improved and kept constant.
Further, the nozzle block may have a plate structure having a sufficient thickness such that the aspect ratio of the through nozzles is 5: 1 or more. On the other hand, the nozzle block can be designed to be disassembled / coupled with the conductive crucible. This makes it easy to maintain and repair the conductive crucible.
Further, in order to increase the deposition rate, when the temperature of the conductive crucible is increased, the deposition material providing the organic thin film may be denatured. Therefore, there is a limit to increasing the deposition rate. According to an embodiment of the present invention, a temperature gradient may be provided between the nozzle block and the conductive crucible, and the conductive crucible and the nozzle block may be coupled to each other by a heat insulating member so as to be thermally insulated from each other. Accordingly, the temperature of the conductive crucible can be kept relatively low as compared with the nozzle block, and the vapor entering the buffer space can be prevented from being re-deposited on the evaporation material again while providing a sufficient evaporation rate. The deposition material may decrease with time, and the preliminary space between the bottom of the conductive diffusion plate and the top surface of the deposition material may increase. Accordingly, as the preliminary space increases, the thermodynamic characteristic may be changed, and the deposition rate may decrease. In order to compensate for this, the temperature of the nozzle block is kept constant according to the consumption of the evaporation material, and the temperature of the conductivity value may be set to rise according to consumption of the evaporation material.
According to a modified embodiment of the present invention, the preliminary space can be kept constant in order to keep the deposition rate constant as the deposition material is consumed. Specifically, when the deposition material lid and the diffusion plate are connected to each other by a conductive rod so that the deposition material is consumed with time, the preliminary space is constant, and the buffer space is increased with consumption of the deposition material . Accordingly, the density of the buffer space increases due to thermodynamic characteristics, and a constant deposition rate can be provided.
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments disclosed herein are being provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. In the drawings, the components have been exaggerated for clarity. Like numbers refer to like elements throughout the specification.
1A is a perspective view illustrating an induction heating linear evaporation apparatus according to an embodiment of the present invention.
1B is a longitudinal sectional view of the linear evaporation deposition apparatus of FIG. 1A.
1C is a cross-sectional view of the linear evaporation deposition apparatus of FIG. 1A cut in the width direction.
1D is an exploded perspective view showing the conductive crucible and the nozzle block of FIG. 1A.
Referring to FIGS. 1A to 1D, the induction heating
A
The
In a conventional linear evaporation deposition apparatus, the crucible stores and heats the evaporation material. The linear nozzles are in direct communication with the crucible. In this case, when the crucible has a temperature distribution according to the position, the deposition material at a specific location with a locally high temperature is consumed quickly and the pressure is reduced in the consumed area. Uneven temperature distribution or pressure distribution hinders uniform deposition. In particular, the heating means of the conventional crucible uses a resistive heating wire, and the resistive heating wire can provide a spatial temperature difference depending on the state of contact with the crucible. The resistive heating wire is difficult to decompose and bond to the crucible for recharging.
The spatial uniformity of the deposition rate largely depends on the structure of the induction heating coils 132, 134. The induction heating coils 132 and 134 have the advantage of performing non-contact heating and induction heating of the conductors disposed inside the conductive crucible. It is important that the induction heating coils 132,134 form a complete closed loop for spatially uniform heating. However, it is difficult to form a complete closed loop in terms of the structure of the induction heating coils 132 and 134.
The present invention is characterized in that induction heating is performed using induction heating coils 132 and 134 and a
According to an embodiment of the present invention, the nozzle block
According to one embodiment of the present invention, the conductive crucible
The nozzle block
According to an embodiment of the present invention, the
The width and width of the nozzle block may be the same as the width and width of the conductive crucible. Accordingly, the
According to an embodiment of the present invention, the
The nozzle block
The
The
The
The
In the case of the bottom-up evaporative deposition apparatus, the through-
The
The
The
The
The material of the
The position of the
The
The outlet of the through-
The
The plurality of through
Preferably, the through-
The sum of the cross-sectional areas of the through-
The plurality of through
The through
The diameter of the through-
According to a modified embodiment of the present invention, the density of the
According to a modified embodiment of the present invention, the gap between the neighboring through nozzles may be narrow at both sides in the first direction, and may be large at the center of the through-hole nozzle.
The
The induction heating coils 132 and 134 may induction-heat the
The induction heating coils 132 and 134 may be insulated from the
The vertical distance between the induction heating coils 132 and 134 and the conductive crucible or the vertical distance between the induction heating coils 132 and 134 and the
The
The
FIGS. 2 to 5 are views for explaining the arrangement of the through-nozzles and the arrangement of the openings of the conductive diffusion plate according to other embodiments of the present invention.
Referring to FIG. 2, the through-
Referring to FIG. 3, the through-
Referring to FIG. 4, the through-
Referring to FIG. 5, the through-
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, And all of the various forms of embodiments that can be practiced without departing from the technical spirit.
120: nozzle block
122: Through nozzle
132: nozzle block induction heating coil
134: conductive crucible induction heating coil
144: Vacuum container
160: conductive crucible
161: conductive diffusion plate
163: Deposition material cover
Claims (7)
A conductive crucible in the form of a rectangular parallelepiped having an open top surface and extending in a first direction and disposed inside the vacuum container and containing the deposition material;
A nozzle block which is aligned with the conductive crucible and inserted into the upper surface of the conductive crucible and is formed of a conductor having a rectangular parallelepiped shape including a plurality of through nozzles;
A conductive diffusion plate disposed between the nozzle block and the deposition material and diffusing the vapor of the deposition material through the opening;
An induction heating coil extending in the first direction so as to surround the conductive crucible and the nozzle block and induction-heating the conductive crucible, the conductive diffusion plate, and the nozzle block in a non-contact manner; And
And a support for supporting the induction heating coil,
A depression is formed in a lower surface of the nozzle block,
Wherein the conductive diffusion plate is mounted on a lower surface of the depression to provide a buffer space,
Wherein the nozzle block and the conductive crucible are aligned with each other and coupled to each other so as to be disassembled,
The through-hole nozzle comprises:
A first heat-penetrating nozzle arranged to be spaced apart in the first direction; And
And a second column-through nozzle spaced apart in a direction perpendicular to the first direction and disposed in parallel with the first column-through nozzle,
Wherein the temperature of the nozzle block is independently set higher than the temperature of the conductive crucible.
Further comprising a space temperature regulating unit disposed below the conductive crucible with respect to the induction heating coil and arranged to restrain magnetic flux in a second direction,
Wherein the opening of the conductive diffusion plate is offset so as not to be arranged in a straight line with the through-hole nozzle.
Wherein the through-hole nozzle is symmetrically disposed with respect to the center of the nozzle block,
Wherein a distance between the through nozzles is non-uniformly arranged in the first direction,
And the opening of the conductive diffusion plate is offset so as not to be disposed in a straight line with the through-hole nozzle.
Wherein the opening is disposed at the center of the plane of arrangement of the conductive diffusion plate.
Wherein the opening is symmetrically disposed at a portion in contact with an inner side surface of the conductive crucible.
Further comprising a deposition material cover disposed inside the conductive crucible and disposed to surround an upper surface of the deposition material.
Wherein the evaporation material lid part moves along the inner surface of the conductive crucible as the evaporation material evaporates.
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JP2004052113A (en) * | 2002-07-23 | 2004-02-19 | Samsung Nec Mobile Display Co Ltd | Heating vessel and vapor deposition system using the same |
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JP2004052113A (en) * | 2002-07-23 | 2004-02-19 | Samsung Nec Mobile Display Co Ltd | Heating vessel and vapor deposition system using the same |
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