KR101974005B1 - Inductive Heating Evaporation Deposition Apparatus - Google Patents

Abstract

The present invention provides a linear evaporation deposition apparatus. This linear evaporation deposition apparatus includes a conductive inner crucible 110, a conductive outer crucible 120, a pair of cooling blocks 140, an induction heating coil 130, and an AC power source 156. This linear evaporation deposition apparatus can provide stable evaporation efficiency by providing a temperature gradient in the substrate direction to the outer crucible while providing a temperature difference between the inner crucible and the outer crucible in the induction heated double box structure conductive crucible.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an Inductive Heating Evaporation Deposition Apparatus

The present invention relates to a linear evaporation deposition apparatus, and more particularly to an induction heating linear evaporation deposition apparatus.

The low molecular weight organic EL thin film is heated by flowing electric current to the hot wire wrapping the crucible containing the low molecular organic material and the heat transferred to the crucible raises the temperature of the organic material in the crucible and as the temperature of the organic material is raised, It is mainly made in such a way that it exits the crucible and is deposited on the substrate. Most of the evaporation sources have been used for the production of organic thin films by such thermal evaporation method.

The point evaporation source is an organic material deposited on the substrate. The point near the evaporation source is thick, and the farther substrate is thin, so that the thin film can not be uniformly formed. Therefore, a point evaporation source is provided at a position far from the center of the substrate and a method of rotating the substrate is used. In this case, however, the size of the deposition chamber is increased, the substrate must be held and rotated, and the uniformity of the thin film is not obtained as desired. Since the point evaporation source is installed at a small distance from the center of the substrate, most of the organic material gas ejected from the point evaporation source is deposited in the deposition chamber rather than on the substrate, and the efficiency of using the organic material is remarkably decreased. There is a problem that a plurality of point evaporation sources are placed in the deposition chamber and are used by being rotated by complicated control. In addition, in the case of a large-area substrate, these problems become more serious.

The evaporation source may be classified into a point source, a linear source, and an area source depending on the number and / or arrangement of the injection holes. In recent years, linear evaporation sources have attracted more attention than point sources due to the large-sized substrates, and the length of linear evaporation sources is gradually increasing. The linear evaporation source not only has higher deposition efficiency but also higher deposition rate than the point source. However, a linear evaporation source usually needs a scanning means for scanning the evaporation source left or right or up and down. In the linear evaporation source, it is difficult to control the deposition temperature and the deposition rate, and it is difficult to obtain the uniformity of the deposition. In particular, as the length of the linear evaporation source becomes longer so as to be able to cope with a large-sized substrate, it becomes more difficult to attain uniform deposition uniformity as a whole.

In addition, when the incremental source or the linear evaporation source is replaced, it takes a considerable time until the vacuum is exhausted to the high vacuum after the replacement because the vacuum chamber must be made in a high vacuum. Further, when a spot evaporation source or a linear evaporation source evaporation material is contained in a large amount, the evaporation material can be denatured by heat. Frequent replacement of the deposited material is economically ineffective. Therefore, there is a demand for a linear evaporation apparatus of a new structure for storing a large amount of organic substances and for depositing organic substances.

In addition, the organic material deposition apparatus can use a shadow mask, and a new evaporation source having a linearity for a fine pattern is required. However, in the case of a conventional nozzle, the nozzle is disposed to protrude as an evaporation source, and when the aspect ratio of the nozzle is increased to improve the straightness of the steam, it is difficult to uniformly heat the nozzle by heat conduction. Therefore, a new linear nozzle structure for improving the straightness is required.

Korean Patent Laid-Open No. 10-2016-0099506 discloses a linear evaporation deposition apparatus.

SUMMARY OF THE INVENTION The present invention provides a method for providing stable evaporation efficiency by providing a substrate temperature gradient in an outer crucible while providing a temperature difference between an inner crucible and an outer crucible in an induction heated double-box conductive crucible.

A linear evaporation deposition apparatus according to an embodiment of the present invention includes: a deposition chamber that is extended in a first direction and is disposed inside a vacuum container, accommodates a deposition material in a powder form in a deposition material storage space, A conductive inner crucible containing an inner nozzle of the inner furnace and induction-heating the deposition material to produce steam; A conductive outer crucible extending in the first direction, the conductive outer crucible including a plurality of outer nozzles formed in the first direction, the one surface of the conductive outer crucible facing the substrate and surrounding the conductive inner crucible; A pair of cooling blocks extending from the upper surface of the conductive outer crucible on both sides of the outer nozzle in the first direction; An induction heating coil disposed inside the vacuum vessel to surround the conductive outer crucible and to heat the conductive inner crucible and the conductive outer crucible; And an alternating current source for providing alternating current power to the induction heating coil. Wherein the plurality of inner nozzles are communicated with the deposition material receiving space of the conductive inner crucible and the plurality of inner nozzles are communicated with each other in the direction of the substrate, And the plurality of external nozzles are in communication with the internal nozzles and are disposed apart from each other in the first direction to discharge the vapor, and the conductive The inner crucibles are spaced apart from each other so as not to contact the outer conductive crucible.

In one embodiment of the present invention, the conductive inner crucible may have a predetermined length along the first direction, a predetermined height in a second direction perpendicular to the first direction, and a second direction perpendicular to the first direction and the second direction The outer nozzle may have a rectangular parallelepiped shape having a constant width in the third direction, and the outer nozzle may not be aligned with the inner nozzle.

In one embodiment of the present invention, the conductive outer crucible is disposed on the one side of the conductive outer crucible and extends in the first direction between the pair of cooling blocks, has a width smaller than the width of the conductive outer crucible, And an auxiliary nozzle block including sub nozzles aligned in each of the sub nozzle groups.

In one embodiment of the present invention, the conductive outer crucible includes: an outer crucible lower body portion having a height equal to a height of the conductive inner crucible and extending in the first direction; And an outer crucible upper body portion disassembled from the outer crucible upper body portion and extending in the first direction. Wherein the electric conductivity of the outer crucible lower body portion is smaller than the electrical conductivity of the outer crucible upper body portion and the outer nozzle is arranged in alignment with the upper surface of the outer crucible upper body portion in the first direction, In the first direction.

In one embodiment of the present invention, the induction heating coil has more than four turns, and the top turn of the induction heating coil may be higher than the one side of the conductive outer crucible.

In one embodiment of the present invention, the conductive outer crucible includes: an outer crucible lower body portion having a height equal to a height of the conductive inner crucible and extending in the first direction; And an outer crucible upper body portion disassembled from the outer crucible upper body portion and extending in the first direction. The thickness of the outer crucible lower body portion may be smaller than the thickness of the outer crucible upper body portion and the outer surface of the outer crucible lower body portion may coincide with the outer surface of the outer crucible upper body portion. Wherein a plurality of turns of the induction heating coil are laminated so as to be sequentially aligned in the direction of the substrate and a distance between the induction heating coil and the lower crucible lower body portion may be the same as a distance between the induction heating coil and the upper crucible upper body portion have.

In one embodiment of the present invention, the conductive outer crucible includes: an outer crucible lower body portion having a height equal to a height of the conductive inner crucible and extending in the first direction; And an outer crucible upper body portion disassembled from the outer crucible upper body portion and extending in the first direction. Wherein a thickness of the outer crucible lower body portion is smaller than a thickness of the outer crucible upper body portion, an inner surface of the outer crucible lower body portion coincides with an inner surface of the outer crucible upper body portion, And an interval between the induction heating coil and the lower crucible lower body portion may be greater than an interval between the induction heating coil and the upper crucible upper body portion.

According to an embodiment of the present invention, the outer crucible lower body portion has an isosceles trapezoidal cross-section perpendicular to the first direction, and a long side of the parallel pair of sides is in contact with the outer crucible upper body portion The conductive inner crucible may have an isosceles trapezoidal cross section perpendicular to the first direction and a long side of the parallel pair of sides may be disposed to face the outer crucible upper body portion.

In one embodiment of the present invention, the conductive inner crucible includes: an inner crucible lower body portion extending in the first direction; And an inner crucible upper body portion covering the inner crucible lower body portion so as to be disassembled and disassembled and extending in the first direction. Wherein an electrical conductivity of the inner crucible upper body portion is larger than an electrical conductivity of the inner crucible lower body portion and a gap between the conductive outer crucible and the conductive inner crucible on the side surface and the lower surface of the inner conductive crucible is larger than an upper surface Lt; / RTI >

The evaporation deposition apparatus according to an embodiment of the present invention provides stable evaporation efficiency by providing a temperature gradient in a substrate direction in an outer crucible while providing a temperature difference between an inner crucible and an outer crucible in an induction heated double box structure conductive crucible .

1A is a conceptual diagram illustrating an induction heating evaporation deposition apparatus according to an embodiment of the present invention.
FIG. 1B is a cross-sectional view illustrating the conductive crucible of the induction heating evaporation deposition apparatus of FIG. 1A.
1C is a cut-away view illustrating the conductive crucible of the induction heating evaporation apparatus of FIG. 1A.
FIG. 1D is a cross-sectional view of the conductive crucible of the induction heating evaporation apparatus of FIG. 1A cut in the longitudinal direction. FIG.
2A is a conceptual diagram illustrating an induction heating evaporation deposition apparatus according to another embodiment of the present invention.
FIG. 2B is a cross-sectional view illustrating the conductive crucible of the induction heating evaporation deposition apparatus of FIG. 2A.
2C is a cut-away view illustrating the conductive crucible of the induction heating evaporation deposition apparatus of FIG. 2A.
FIG. 2 (d) is a cross-sectional view of the conductive crucible of the induction heating evaporation apparatus of FIG.
FIGS. 3 to 5 are views illustrating still another embodiment of the present invention.

The induction heating evaporation apparatus includes a crucible having nozzles linearly arranged in the substrate direction. The crucible is heated to a high temperature to prevent the nozzle from clogging. However, the heated crucible may provide radiant heat to the substrate to provide thermal damage to the device on which the substrate is to be formed.

In order to suppress the thermal damage, when the conductive cooling block is disposed around the nozzle, the temperature of the crucible at the position where the cooling block is disposed may be reduced. Therefore, the present invention proposes a conductive crucible with a double box structure for stable temperature control. In a double-box structure of an inner crucible and an outer crucible, the thickness of the outer crucible may have a condition below the skin depth so that it can be heated by induction.

In one embodiment of the present invention, in the linear evaporation deposition apparatus, the conductive crucible has a double tube structure of an inner crucible and an outer crucible. However, the inner crucible and the outer crucible are simultaneously heated by the induction heating coil. It is necessary to heat the outer nozzle around to a temperature higher than that of the inner crucible for efficient discharge of steam.

The inner crucible is sufficiently heated by induction heating to vaporize the deposited evaporation material. The vaporized vapor is discharged toward the substrate through the inner nozzle of the inner crucible and the outer nozzle of the outer crucible. The inner crucible needs to be thermally insulated from the outer crucible, and one part of the outer crucible may have a sufficient distance from the inner crucible as compared with other parts. The upper surface of the outer crucible needs to maintain a relatively high temperature as compared with the other portions.

The outer crucible is divided into an upper body portion and a lower body portion. The upper body portion may be made of a material having a higher electrical conductivity, and the lower body portion may be made of a material having a lower electrical conductivity. Accordingly, the lower body portion is heated by the induction electric field smaller than the upper body portion. Meanwhile, the thickness of the lower body part may be set to be smaller than the skin depth. Accordingly, the induction electric field can induction-heat the inner crucible through the lower body portion. In order to secure a sufficient skin depth, the frequency of the AC power source may be several tens of kHz to several MHz. Accordingly, the outer crucible may have a temperature gradient in the substrate direction.

When the auxiliary nozzle block is mounted on the outer crucible, the auxiliary nozzle block can be made of a material having a high electrical conductivity so that it can be sufficiently heated by the induction electric field.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments disclosed herein are being provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. In the drawings, the components have been exaggerated for clarity. Like numbers refer to like elements throughout the specification.

1A is a conceptual diagram illustrating an induction heating evaporation deposition apparatus according to an embodiment of the present invention.

FIG. 1B is a cross-sectional view illustrating the conductive crucible of the induction heating evaporation deposition apparatus of FIG. 1A.

1C is a cut-away view illustrating the conductive crucible of the induction heating evaporation apparatus of FIG. 1A.

FIG. 1D is a cross-sectional view of the conductive crucible of the induction heating evaporation apparatus of FIG. 1A cut in the longitudinal direction. FIG.

1A to 1D, an induction heating evaporation apparatus 100 includes a conductive inner crucible 110, a conductive outer crucible 120, a pair of cooling blocks 140, an induction heating coil 130, And a power supply 156. The conductive inner crucible 110 extends in the first direction and is disposed inside the vacuum container 150 and accommodates the deposition material 10 in the deposition material storage space and is arranged in the first direction And includes a plurality of inner nozzles 121, and induction-heating the deposition material to generate steam. The conductive outer crucible 110 includes a plurality of outer nozzles 111 formed in the first direction and having a surface facing the substrate 154 and surrounding the conductive inner crucible 120, And extends in the first direction.

A pair of cooling blocks 140 extend in the first direction from the upper surface of the conductive outer crucible 110 at both sides of the outer nozzle. The induction heating coil 130 surrounds the conductive outer crucible 110 inside the vacuum vessel 150 and heats the conductive inner crucible 120 and the conductive outer crucible 110. The AC power supply 156 provides AC power to the induction heating coil 130. The plurality of outer nozzles 111 are formed toward the substrate, and the plurality of inner nozzles 121 are formed toward the substrate direction (z-axis). The plurality of inner nozzles 121 communicate with the deposition material storage space of the conductive inner crucible 120 and are spaced apart from each other in the first direction to discharge the vapor of the deposition material storage space. The plurality of outer nozzles (111) communicate with the inner nozzle (121), and are arranged in the first direction, and discharge the steam. The conductive inner crucible 120 is spaced apart from the conductive outer crucible 110 so as not to contact each other.

The vacuum container 150 may be formed of a conductive material. The vacuum chamber 150 may be a chamber having a rectangular parallelepiped structure extending in the first direction. The vacuum container 150 may be evacuated to a vacuum state by a vacuum pump. The vacuum container 150 may include a substrate holder 152 on the upper side and a substrate 154 mounted on the substrate holder. The substrate 152 is arranged to face the outer nozzle 111.

The vacuum container 150 may include a shadow mask disposed on a front surface of the substrate to perform patterning. The substrate holder 152 is mounted on the inner upper surface of the vacuum container, and the substrate can be mounted on the lower surface of the substrate holder. The evaporation deposition apparatus 100 may be a bottom-up evaporation deposition apparatus.

The substrate may be a glass substrate or a plastic substrate including the organic light emitting diode (154). The substrate may be a rectangular substrate.

The deposition material 10 may be an organic material or a metal used in an organic light emitting diode. Specifically, the organic material may include Tris (8-hydroxyquinolinato) aluminum (Al (C9H6NO) 3). The organic material is a powdery solid at room temperature, and the organic material can be sublimed or evaporated at about 300 degrees Celsius.

The conductive outer crucible 110 is made of metal or carbon and has a rectangular parallelepiped shape extending in the first direction and can accommodate the conductive inner crucible 120. The conductive outer crucible 110 includes an outer crucible lower body portion 110a having a height equal to the height of the conductive inner crucible 120 and extending in the first direction; And an outer crucible upper body portion 110b that is disassembled from the outer crucible lower body portion 110a and extends in the first direction. The electrical conductivity of the outer crucible lower body portion 110a may be less than the electrical conductivity of the outer crucible upper body portion 110b to provide a temperature gradient in the substrate direction. Accordingly, the outer crucible upper body portion 110b can be heated to a higher temperature than the outer crucible lower body portion 110a).

Each of the outer nozzles 111 may be arranged in the first direction on the upper surface of the outer crucible upper body portion 120b. The cooling block 140 may extend in the first direction with the outer nozzle 111 interposed therebetween. The cooling block 140 may interfere with induction heating so that the induction heating coil 130 needs to provide a relatively large amount of power to the outer crucible upper body portion 120b.

The thickness of the outer crucible 110 may be smaller than the depth of the skin so that the induction electric field can be transmitted. The skin depth depends on the driving frequency and electrical conductivity.

The outer crucible lower body portion 110a may have a rectangular column shape with both ends closed and an upper surface opened. The outer crucible lower body portion 110a and the outer crucible upper body portion 110b may be made of different materials. The outer crucible lower body portion 110a may be engaged with the upper crucible upper body portion 110b to provide an inner space.

The outer crucible lower body portion 110a may be heated to a lower temperature than the outer crucible upper body portion 110b by the induction heating coil.

The outer crucible upper body portion 110b may have a rectangular column shape with both ends closed and a lower surface opened. Outer nozzles 111 arranged in the first direction are disposed at the center of the upper surface of the outer crucible upper body portion 110b. The outer nozzle 111 may be a through-hole.

The conductive inner crucible 120 is made of a metal or a carbon material and has a rectangular parallelepiped shape extending in the first direction, and can store the deposition material. The conductive inner crucible 120 has a predetermined length along the first direction, a predetermined height in a second direction perpendicular to the first direction, and a predetermined width in a third direction perpendicular to the first direction and the second direction. May be a rectangular parallelepiped shape. The outer nozzle 111 may not be aligned with the inner nozzle 121.

The conductive inner crucible 120 includes an inner crucible lower body portion 120a extending in the first direction; And an inner crucible upper body portion 120b covering the inner crucible lower body portion so as to be disassembled and disassembled and extending in the first direction. In order to provide a temperature gradient to the conductive inner crucible 120, the electrical conductivity of the inner crucible upper body portion 120b may be greater than the electrical conductivity of the inner crucible lower body portion 120a. The inner crucible upper body portion 120b is selectively maintained at a high temperature and the inner crucible lower body portion is maintained at a relatively low temperature to suppress the denaturation of the evaporation material stored in the inner crucible lower body portion have.

The distance between the conductive outer crucible 110 and the conductive inner crucible 120 on the side surface and the lower surface of the conductive inner crucible 120 may be smaller than the interval on the upper surface of the conductive inner crucible 120. Accordingly, the outer wall of the conductive inner crucible is present in the skin depth and is heated. On the other hand, the distance d on the upper surface of the conductive inner crucible may be sufficiently large. This gap (or space) provides sufficient space for the vapor exiting through the inner nozzle to diffuse. The vapor diffused at the interval maintains a uniform density along the first direction to improve the deposition uniformity. The conductive inner crucible 120 may be heated by an induction electric field generated by the induction heating coil 130. Spacers 158 may be disposed to maintain an appreciable distance between the conductive inner crucible 120 and the outer conductive crucible 110.

 The inner crucible lower body portion 120a may have a rectangular column shape with both ends closed and an upper surface opened. The inner crucible upper body portion 120b may be in the form of a plate extending in the first direction and covering the open upper surface of the inner crucible lower body portion. The inner crucible upper body portion 120b may include an inner nozzle 121 arranged in a first direction. The inner nozzle 121 may be a through-hole.

A pair of cooling blocks 140 may have a tube in which refrigerant flows. The pair of cooling blocks 140 may extend along the first direction, spaced apart or in contact with the conductive outer crucible on the upper surface of the conductive outer crucible side by side with the outer nozzle 111 interposed therebetween. Each of the cooling blocks may have a rectangular parallelepiped shape extending in a first direction and may be formed of a conductor having a relatively low conductivity.

The induction heating coil 130 may have more than four turns and the uppermost turn of the induction heating coil 130 may be higher than the one surface (upper surface) of the conductive outer crucible 110. The induction heating coil 130 has a pipe shape or a strip shape, and the refrigerant can flow into the induction heating coil. In addition, the induction electric field by the induction heating coil 130 can be applied to the conductive outer crucible and the conductive inner crucible in a non-contact manner by uniformly direct heating in the first direction while providing a vertical temperature gradient in the vertical direction (substrate direction or z axis) do. Therefore, the first directional temperature non-uniformity due to the contact is eliminated, the heating stability is improved, and the mechanical structure is simple.

The induction heating coil 130 may be wound to form the closed loop of the conductive outer crucible in a placement plane defined by the first direction and the second direction, and may be wound to form a closed loop by changing the placement plane. The lowermost turn of the induction heating coil may be disposed lower than the upper surface of the outer crucible lower body portion 110a.

The driving frequency of the AC power supply 156 may be several tens of kHz to several MHz. The AC power source may include an impedance matching network for impedance matching. Vapor vaporized in the conductive inner crucible can reach the substrate in the case of an inner nozzle and an outer nozzle against gravity.

The distance between the conductive outer crucible 110 and the conductive inner crucible 120 may be several millimeters or less from the lower surface and the side surface. More specifically, the spacing may be at the order of one millimeter. Meanwhile, the distance between the conductive outer crucible and the conductive inner crucible may be 5 millimeters to tens of millimeters on the upper surface.

The inner nozzle 121 and the outer nozzle 111 are not aligned but may be offset from each other. For example, the inner nozzle 121 may be disposed between a pair of adjacent outer nozzles 111. Accordingly, the vapor discharged through the inner nozzle 111 may be diffused in the space between the conductive inner crucible and the conductive outer crucible, and then discharged through the outer nozzle. Thus, the deposition uniformity can be improved.

2A is a conceptual diagram illustrating an induction heating evaporation deposition apparatus according to another embodiment of the present invention.

FIG. 2B is a cross-sectional view illustrating the conductive crucible of the induction heating evaporation deposition apparatus of FIG. 2A.

2C is a cut-away view illustrating the conductive crucible of the induction heating evaporation deposition apparatus of FIG. 2A.

FIG. 2 (d) is a cross-sectional view of the conductive crucible of the induction heating evaporation apparatus of FIG.

A description overlapping with that described in Fig. 1 will be omitted.

2A and 2B, the induction heating evaporation deposition apparatus 200 includes a conductive inner crucible 120, a conductive outer crucible 110, a pair of cooling blocks 140, an induction heating coil 130, And a power supply 156.

The conductive inner crucible 110 extends in the first direction and is disposed inside the vacuum container 150 and accommodates the deposition material 10 in the deposition material storage space and is arranged in the first direction And includes a plurality of inner nozzles 121, and induction-heating the deposition material to generate steam. The conductive outer crucible 110 includes a plurality of outer nozzles 111 formed in the first direction and having a surface facing the substrate 154 and surrounding the conductive inner crucible 120, And extends in the first direction.

A pair of cooling blocks 140 extend in the first direction from the upper surface of the conductive outer crucible 110 at both sides of the outer nozzle. The induction heating coil 130 surrounds the conductive outer crucible 110 inside the vacuum vessel 150 and heats the conductive inner crucible 120 and the conductive outer crucible 110. The AC power supply 156 provides AC power to the induction heating coil 130. The plurality of outer nozzles 111 are formed toward the substrate, and the plurality of inner nozzles 121 are formed toward the substrate direction (z-axis). The plurality of inner nozzles 121 communicate with the deposition material storage space of the conductive inner crucible 120 and are spaced apart from each other in the first direction to discharge the vapor of the deposition material storage space. The plurality of outer nozzles (111) communicate with the inner nozzle (121), and are arranged in the first direction, and discharge the steam. The conductive inner crucible 120 is spaced apart from the conductive outer crucible 110 so as not to contact each other.

The auxiliary nozzle block 260 is disposed on the one surface (upper surface) of the conductive outer crucible 110 and extends in the first direction between the pair of cooling blocks 140, and is smaller than the width of the conductive outer crucible And auxiliary nozzles 262 each having a width and aligned with the outer nozzles 111, respectively. In order to sufficiently heat the auxiliary nozzle block, the uppermost turn of the induction heating coil may be higher than the upper surface of the auxiliary nozzle block.

The auxiliary nozzles 262 may be aligned with the outer nozzles 111 and may be through holes formed in the substrate direction. The auxiliary nozzles 262 provide sufficient directionality to the vapor to provide precise patterning by the shadow mask disposed on the substrate.

3 is a conceptual diagram illustrating an induction heating evaporation deposition apparatus according to another embodiment of the present invention.

Referring to FIG. 3, the induction heating evaporation apparatus 300 includes a conductive inner crucible 120, a conductive outer crucible 310, a pair of cooling blocks 140, an induction heating coil 130, And a nozzle block 260.

The conductive outer crucible 310 is made of metal or carbon and has a rectangular parallelepiped shape extending in the first direction and can accommodate the conductive inner crucible 120. The conductive outer crucible 310 includes an outer crucible lower body portion 310a having a height equal to the height of the conductive inner crucible 120 and extending in the first direction; And an outer crucible upper body portion 310b that is disassembled from the outer crucible lower body portion 310a and extends in the first direction. The electrical conductivity of the outer crucible lower body portion 310a may be the same as the electrical conductivity of the outer crucible upper body portion 310b.

The thickness t1 of the outer crucible lower body portion 310a is set to be larger than the thickness t1 of the outer crucible upper body portion 310b so that the outer crucible upper body portion 310b is heated more than the outer crucible lower body portion 310a. May be smaller than the thickness t2. The outer surface of the outer crucible lower body portion 310a may coincide with the outer surface of the outer crucible upper body portion 310b.

The plurality of turns of the induction heating coil may be stacked so as to be sequentially aligned in the substrate direction (z-axis). The distance D1 between the induction heating coil 130 and the outer crucible lower body portion 310a may be the same as the distance D2 between the induction heating coil and the outer crucible upper body portion 310b. This difference in thickness allows a more efficient heating of the conductive inner crucible 120 while providing a vertical temperature gradient to the conductive outer crucible 310.

4 is a conceptual diagram illustrating an induction heating evaporation deposition apparatus according to another embodiment of the present invention.

4, the induction heating evaporation deposition apparatus 400 includes a conductive inner crucible 120, a conductive outer crucible 410, a pair of cooling blocks 140, an induction heating coil 130, And a nozzle block 260.

The conductive outer crucible 410 is made of metal or carbon and has a rectangular parallelepiped shape extending in the first direction and can accommodate the conductive inner crucible 120. The conductive outer crucible 410 includes an outer crucible lower body 410a having a height equal to the height of the conductive inner crucible 120 and extending in the first direction; And an outer crucible upper body portion 410b that is disassembled from the outer crucible lower body portion 410a and extends in the first direction. The electrical conductivity of the outer crucible lower body portion 410a may be the same as the electrical conductivity of the outer crucible upper body portion 410b.

The thickness t1 of the outer crucible lower body portion 410a is set to be larger than the thickness t1 of the outer crucible upper body portion 410b so that the outer crucible upper body portion 310b is heated more than the outer crucible lower body portion 310a. And the inner surface of the outer crucible lower body portion 410a may coincide with the inner surface of the outer crucible upper body portion 410b.

The plurality of turns of the induction heating coil may be stacked in order to be aligned in the direction of the substrate. The distance D1 between the induction heating coil 130 and the outer crucible lower body portion 410a may be greater than the distance D2 between the induction heating coil and the outer crucible upper body portion 410b. This difference in thickness allows the conductive inner crucible 120 to be heated more efficiently while providing a vertical temperature gradient to the outer conductive crucible 410.

5 is a conceptual diagram illustrating an induction heating evaporation deposition apparatus according to another embodiment of the present invention.

5, the induction heating evaporation deposition apparatus 500 includes a conductive inner crucible 520, a conductive outer crucible 510, a pair of cooling blocks 140, an induction heating coil 130, And a nozzle block 260.

The conductive outer crucible 510 is made of metal or carbon and has a rectangular parallelepiped shape extending in the first direction and can accommodate the conductive inner crucible 520. The conductive outer crucible 510 includes an outer crucible lower body 510a having a height equal to the height of the conductive inner crucible 520 and extending in the first direction; And an outer crucible upper body portion 510b that is disassembled from the outer crucible lower body portion 510a and extends in the first direction. The electrical conductivity of the outer crucible lower body portion 510a may be the same as the electrical conductivity of the outer crucible upper body portion 510b.

In order to provide a vertical temperature gradient to the conductive outer crucible, the shape of the conductive outer crucible may be changed. In the outer crucible lower body portion 510a, the cross section perpendicular to the first direction may have an isosceles trapezoidal shape. A long side of a parallel pair of sides can be opened. Among the pair of parallel sides, the long side (open side) can contact the outer crucible upper body portion 510b.

The distance D1 between the induction heating coil 130 and the outer crucible lower body portion 510a may be greater than the distance D1 between the induction heating coil and the outer crucible upper body portion 410b. Accordingly, the outer crucible upper body portion 410b can be relatively heated.

The conductive inner crucible 520 includes an inner crucible lower body 520a extending in the first direction; And an inner crucible upper body portion 520b covering the inner crucible lower body portion so as to be disassembled and disassembled and extending in the first direction.

The conductive inner crucible 520 has an isosceles trapezoidal cross section perpendicular to the first direction and a long side of the parallel pair of sides is arranged to face the outer crucible upper body portion 510b or the substrate direction .

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, And all of the various forms of embodiments that can be practiced without departing from the technical spirit.

110: Outside crucible of crucible
120: Lead internal crucible
130: induction heating coil
140: cooling block
150: Vacuum container

Claims (9)

And a plurality of inner nozzles extending in a first direction and disposed inside the vacuum container and accommodating the deposition material in the deposition material storage space and arranged along the first direction and discharging the vapor, A conductive inner crucible for generating the steam;
And a plurality of outer nozzles disposed on the one side of the substrate facing the substrate and surrounding the conductive inner crucible and being induction-heated, formed along the first direction and discharging the vapor, Crucible;
A pair of cooling blocks extending from the upper surface of the conductive outer crucible on both sides of the outer nozzle in the first direction;
An induction heating coil disposed inside the vacuum vessel to surround the conductive outer crucible and to heat the conductive inner crucible and the conductive outer crucible; And
And an AC power supply for providing AC power to the induction heating coil,
Wherein the plurality of external nozzles are formed toward the substrate,
Wherein the plurality of inner nozzles are formed toward the substrate,
Wherein the plurality of inner nozzles communicate with a deposition material storage space of the conductive inner crucible and are spaced apart from each other in the first direction to discharge the vapor of the deposition material storage space,
The plurality of outer nozzles being in communication with the inner nozzle and being spaced apart in the first direction,
Wherein the conductive inner crucibles are spaced apart from each other so as not to contact with the conductive outer crucible,
Wherein the conductive outer crucible is heated to a temperature higher than that of the conductive inner crucible. The method according to claim 1,
Wherein the conductive inner crucible has a predetermined length along the first direction, a predetermined height in a second direction perpendicular to the first direction, and a predetermined width in a third direction perpendicular to the first direction and the second direction, Shape,
Wherein the outer nozzle is not aligned with the inner nozzle. The method according to claim 1,
An auxiliary nozzle disposed on the one surface of the conductive outer crucible and extending in the first direction between the pair of cooling blocks and having a width smaller than the width of the conductive outer crucible and aligned with the outer nozzles, Further comprising an auxiliary nozzle block. The method according to claim 1,
The conductive outer crucible comprises:
An outer crucible lower body portion having a height equal to a height of the conductive inner crucible and extending in the first direction; And
And an outer crucible upper body portion disassembled from the outer crucible upper body portion and extending in the first direction,
The electrical conductivity of the lower crucible lower body portion is smaller than the electrical conductivity of the upper crucible upper body portion,
Wherein the outer nozzle is arranged in the first direction on the upper surface of the outer crucible upper body portion,
Wherein the cooling block extends in the first direction with the outer nozzle interposed therebetween. The method of claim 3,
The induction heating coil has 4 turns or more,
Wherein the uppermost turn of the induction heating coil is higher than the one side of the conductive outer crucible. The method according to claim 1,
The conductive outer crucible comprises:
An outer crucible lower body portion having a height equal to a height of the conductive inner crucible and extending in the first direction; And
And an outer crucible upper body portion disassembled from the outer crucible upper body portion and extending in the first direction,
The thickness of the lower crucible lower body portion is smaller than the thickness of the upper crucible upper body portion,
The outer surface of the outer crucible lower body portion coincides with the outer surface of the outer crucible upper body portion,
Wherein a plurality of turns of the induction heating coil are stacked so as to be sequentially aligned in the direction of the substrate,
Wherein an interval between the induction heating coil and the lower crucible lower body portion is equal to a distance between the induction heating coil and the upper crucible upper body portion. The method according to claim 1,
The conductive outer crucible comprises:
An outer crucible lower body portion having a height equal to a height of the conductive inner crucible and extending in the first direction; And
And an outer crucible upper body portion disassembled from the outer crucible upper body portion and extending in the first direction,
The thickness of the lower crucible lower body portion is smaller than the thickness of the upper crucible upper body portion,
The inner surface of the outer crucible lower body portion coincides with the inner surface of the outer crucible upper body portion,
Wherein a plurality of turns of the induction heating coil are stacked so as to be sequentially aligned in the direction of the substrate,
Wherein an interval between the induction heating coil and the lower crucible lower body portion is larger than an interval between the induction heating coil and the upper crucible upper body portion. The method according to claim 1,
The conductive outer crucible comprises:
An outer crucible lower body portion having a height equal to a height of the conductive inner crucible and extending in the first direction; And
And an outer crucible upper body portion disassembled from the outer crucible upper body portion and extending in the first direction,
The outer crucible lower body portion has an isosceles trapezoidal cross section perpendicular to the first direction,
The long side of the pair of parallel sides is in contact with the outer crucible upper body portion,
The conductive inner crucible has an isosceles trapezoidal cross section perpendicular to the first direction,
Wherein the long sides of the pair of parallel sides are oriented toward the upper crucible upper body portion. The method according to claim 1,
The conductive inner crucible comprises:
An inner crucible lower body portion extending in the first direction; And
And an inner crucible upper body portion covering the inner crucible lower body portion so as to be disassembled and disassembled and extending in the first direction,
The electrical conductivity of the inner crucible upper body portion is larger than the electrical conductivity of the inner crucible lower body portion,
Wherein a distance between the conductive outer crucible and the conductive inner crucible on the side surface and the lower surface of the conductive inner crucible is smaller than an interval on the upper surface of the conductive inner crucible.

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