KR100358727B1 - Apparatus and method for depositing organic matter of vapor phase - Google Patents

Abstract

The present invention is located on the base material seating portion and the base material seating portion for seating the base material to deposit the vapor phase organic matter on the bottom surface of the inner space to dissipate heat to the spraying portion and the inner wall surface for spraying the gas phase organic matter toward the base material mounting portion A deposition chamber including one or more insulating heaters, an organic material chamber including a crucible having an internal space so as to store organic material in a heat-resistant material, and an organic heating heater for heating the crucible therein, and into the organic material chamber. Including a flow rate control unit for controlling the amount and flow rate of the incoming gas, a gaseous phase organic matter transfer tube in the form of a tube to move the gaseous organic matter in the organic chamber to the injection unit, and a vacuum pump to lower the internal pressure of the deposition chamber To provide a vapor phase organic vapor deposition apparatus and a vapor phase organic vapor deposition method that is composed. .

Description

Vapor phase organic vapor deposition method and vapor phase organic vapor deposition apparatus using the same {Apparatus and method for depositing organic matter of vapor phase}

The present invention relates to a vapor phase organic vapor deposition method and a vapor phase organic vapor deposition apparatus using organic materials such as organic compounds, organometallic compounds, and polymers, and more particularly, even when the substrate is not rotated by spraying vapor phase organic matter in the direction of gravity. It is an object of the present invention to provide a vapor phase organic vapor deposition method and a vapor phase organic vapor deposition apparatus using the same, which can reduce the size of a vapor deposition apparatus by forming a thin film at high speed and eliminating components necessary for rotating a substrate.

Recently, the importance of thin film formation technology of organic compounds, organometallic compounds, and functional polymers is increasing in importance, and in addition to the insulating layer materials of semiconductor memories, conductive materials, optoelectronic materials, and organic-luminescence device materials are used in various places. Attention has been focused on its high functionality, such as the use of such materials.

The organic thin film formation methods developed to date include vacuum deposition method, sputtering method, ion-beam deposition method, pulsed laser deposition method, molecular beam deposition method (MBE method), chemical vapor deposition method (CVD), spin coater (Spin-Coater). Various technologies have been developed.

The vacuum evaporation method, which is used as one of the representative basic technologies, is to form a thin film by installing a thermal evaporation source on the lower part of the vacuum chamber and a film forming substrate on the upper part. Looking at the schematic configuration of the organic thin film forming apparatus using the vacuum deposition method, there is a vacuum exhaust machine connected to the vacuum chamber, by using this to maintain a constant vacuum of the vacuum chamber, at least one organic thin film material thermal evaporation source disposed under the vacuum chamber The organic substance which is an organic thin film material is evaporated from it. The thermal evaporation source of the organic thin film material is a cylindrical or rectangular container in which an organic material for film formation is placed. As the container material, quartz, ceramic, etc. are used, and around the container part, a heater with a certain pattern shape is wound around it. When a certain amount of electric power is applied, the temperature around the container rises and the container also heats up, and when the temperature reaches a certain temperature, organic matter is formed. It begins to evaporate. The temperature is detected by a thermocouple for temperature control installed at the bottom or top of the vessel to maintain the organic evaporation material at a constant temperature to achieve the desired evaporation rate. The evaporated organic matter is solidified on the substrate through a continuous process such as adsorption, vapor deposition, and evaporation on the surface of the substrate after evaporation of the glass or wafer material placed at a certain distance from the top of the vessel to form a thin film. to be.

In general, organic compound of organic thin film material has high vapor pressure to vaporize, pyrolysis temperature by heating is close to evaporation temperature, so it is difficult to control stable organic evaporation rate for a long time, so it is difficult to rapidly deposit thin film and heat evaporation source in vacuum chamber. The vaporized organic thin film material released from the vaporized organic thin film material has a directivity corresponding to the CRUCIBLE HOLE (開口 部) shape of the upper part of the thermal evaporation vessel, which is limited to a narrow range and reaches the substrate, thereby forming a uniform organic material formed on a large area substrate. It is difficult to obtain a thin film. In addition, by forming a film while rotating the substrate at a constant speed with a directional correction means to form a uniform thin film of the organic thin film, the radius of rotation becomes large, and the deposition equipment is enlarged to a corresponding size. Because of this formation, the use efficiency of expensive organic materials is very low, resulting in a decrease in productivity.

As such, in the conventional vacuum deposition technique, in forming a product using an organic light emitting device and a functional thin film using an organic thin film, a low film forming speed, a low organic material use efficiency, an organic film layer nonuniformity, a main material (host material) and a coloring material ( It is difficult to manufacture and produce high-quality devices at low cost due to various problems such as difficulty in finely adjusting the amount of dopant material), controlling the temperature of the thermal evaporation source, and difficulty in forming a uniform organic thin film due to the enlargement of the substrate.

Hereinafter, a conventional vacuum deposition apparatus will be described with reference to the accompanying drawings.

1 shows an example of a conventional vacuum deposition apparatus.

According to the conventional vacuum deposition apparatus shown in FIG. 1, as shown in FIG. 1, an appropriate amount of material to be deposited on the molybdenum boat 6 is predicted and put up, and the pressure inside the vacuum chamber 1 is lowered to about 10-6 torr. Then, if the deposition material is a metal using a temperature control device to heat up to near the melting point of the metal, and then finely adjusted again to increase the temperature until vaporization. At this time, when the material on the molybdenum boat 6 begins to evaporate, the previously mounted shutter 5 is opened to deposit the vaporized material molecules on the substrate. In this case, the shutter 5 serves to prevent impurities remaining on the molybdenum boat 6 just before vaporizing the material on the substrate. Such a conventional vacuum deposition apparatus is difficult to predict the exact amount, even if the amount of the thin film is a small amount if the material to be deposited is difficult, there is an uneconomical problem to mount a large amount of material on the molybdenum boat (6) Since it is impossible to induce a vapor in a desired direction, in the case of repeating the above deposition process a lot, the interior of the chamber is contaminated, and it is cumbersome to clean the interior each time, and although not precisely, molybdenum boat 6 The amount of material placed on it, the opening and closing time of the shutter 4, and the evaporation time by temperature control are variables of the thickness control, and it is impossible to finely adjust these variables as a whole.

The present invention has been made to solve the above problems, it is possible to evenly deposit the vapor phase organic matter on a large area of the substrate, the organic thin film can be formed at a high speed and the vapor phase organic vapor deposition method capable of fine-tuning the amount of mixed organic materials and It is an object to provide a vapor organic vapor deposition apparatus using the same.

1 shows an example of a conventional vacuum deposition apparatus.

2A is a plan view of a vapor phase organic vapor deposition apparatus according to the present invention.

FIG. 2B is a cross-sectional view taken along the line “A”-“A” in FIG. 2A.

FIG. 2C is a cross-sectional view taken along the line “B”-“B” in FIG. 2A.

FIG. 2D is a detail view of the organic chamber, which is the “C” portion of FIG. 2B.

3A shows a shape in which the spraying unit moves and sprays gaseous organic matter.

3B illustrates a shape in which the base material seating part on which the base material is seated when the injection part injects gaseous organic matter moves horizontally through a transfer method using an electromagnet.

Figure 3c shows the shape of depositing the gaseous organic matter on the base material using the injection tube.

3d illustrates a shape in which the injection tube rotates and moves up and down and deposits gaseous organic matter on the base metal.

Figure 4a shows the shape of mixing the gaseous organic matter and the carrier gas inside the crucible.

Figure 4b shows the shape of mixing the gaseous organic matter and the carrier gas outside the crucible.

FIG. 5A illustrates the shape of a crucible having a rectangular parallelepiped shape and having one vapor phase organic withdrawal hole at an upper end thereof.

5B illustrates a crucible having a rectangular parallelepiped shape and having a plurality of vapor phase organic withdrawal holes at an upper end thereof.

FIG. 5C illustrates the shape of the crucible having a cylindrical shape and having one vapor phase organic withdrawal hole at its upper end.

5d illustrates a crucible having a cylindrical shape and having a plurality of vapor phase organic withdrawal holes at its upper end.

Figure 6 shows the shape provided with a constant temperature heater outside the gas phase organic matter transfer pipe.

<Description of the symbols for the main parts of the drawings>

10: base material 20: organic matter

100: deposition chamber 110: injection unit

112: guide plate 120: guide rail

122: guide rail support plate 130: heat insulation heater

140: base material seating portion 150: vacuum pump

200: organic matter chamber 210: gaseous organic matter transfer pipe

220: crucible 230: organic material heating heater

240: carrier gas inlet pipe 300: auxiliary chamber

310: moving axis 312: moving block

314: conveying part 320: sealing flange

322 bellows

The vapor phase organic vapor deposition apparatus according to the present invention for achieving the above object has an internal space that is isolated from the outside, and has a base material mounting portion for seating the base material to deposit vapor phase organic matter on the bottom surface of the internal space, A deposition chamber positioned at an upper portion of the seating portion and including a spraying portion for injecting gaseous organic matter toward the base material seating portion, and at least one warming heater for dissipating heat inside the upper wall and the sidewall surface; It has a carrier gas inlet hole formed in the shape of a hole so that the carrier gas carrying gaseous organic matter can be introduced therein, and a gaseous organic matter extraction hole formed in the shape of a hole so that the vapor and carrier gas can be withdrawn. At least one organic chamber including a crucible formed in a shape having an inner space so as to have an inner space and an organic heating heater surrounding the outside of the crucible and heating the crucible to a temperature at which the organic matter is evaporated; A flow rate control unit connected to the carrier gas inlet hole to control an amount and a flow rate of the carrier gas introduced into the organic chamber; It is formed to penetrate the deposition chamber and the organic chamber, the vapor phase organic matter transfer tube formed in the shape of a tube to move the gas phase organic matter in the organic chamber to the injection unit; And a vacuum pump to lower the internal pressure of the deposition chamber.

In addition, the deposition chamber is provided with one or more guide rails in the longitudinal direction of the vapor phase organic matter delivery pipe at the position where the jetting part is mounted so that the jetting part can slide in the longitudinal direction of the vapor phase organic matter delivery pipe, and the injection part contacts the guide rail. It is provided with a guide plate coupled to the guide rail and the structure that allows the sliding movement.

The base mounting portion is provided with an electromagnet moving device so that the base mounting portion can move horizontally on the bottom surface of the deposition chamber.

The deposition chamber is provided with a rotating motor for rotating the injection unit and / or a moving motor for moving the injection unit up and down so that the injection unit can evenly inject gaseous phase organic matter onto the entire base material.

In addition, the gas phase organic feed tube is provided with a constant temperature heater that generates heat on the outer surface of the gas phase organic matter transfer tube so that the temperature is not lowered by the heat while the gaseous organic matter is moved from the organic chamber to the deposition chamber.

In addition, the vapor phase organic vapor deposition method according to the present invention, the heating heater in contact with the outer surface of the organic chamber containing the organic material therein is a step of dissipating heat to heat the organic material above the evaporation temperature; The gas phase organic matter vaporized by the heating heater is moved to the injection unit of the deposition chamber in which the base material to deposit the gas phase organic matter is deposited through the gas phase organic feed tube wrapped in the constant temperature heater that dissipates heat; The gas phase organic material moved to the injection unit is composed of three steps that are injected in the direction of gravity from the top of the base material mounted on the top of the base material mounting portion is deposited on the top surface of the base material.

In the third step, the injection unit is moved horizontally in the longitudinal direction of the gas phase organic matter transport pipe, the base material mounting portion is moved horizontally on the bottom of the organic chamber.

In addition, in the third step, the injection portion is a rotational movement and / or vertical vertical movement in the direction parallel to the upper surface of the base material.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

2A is a plan view of a vapor phase organic vapor deposition apparatus according to the present invention.

The vapor phase organic vapor deposition apparatus of the present embodiment includes a deposition chamber 100 for depositing organic matter on a base material, an organic chamber 200 for heating the organic matter and converting the state into a vapor phase, and an injection unit for injecting vapor phase organic matter in a moving block ( The auxiliary chamber 300 including a driving device for driving the operation of the 110 and the organic material chamber 200.

The deposition chamber 100 has an internal space that is isolated from the outside, and has a structure capable of seating the base material 10 to deposit vapor phase organic matter on the bottom surface of the internal space. In addition, the deposition chamber 100 is located in the upper end of the base material 10, the injection unit 110 for injecting gaseous phase organic matter to the upper surface of the base material 10, and the injection unit 110 in combination with the injection unit ( A guide rail (120) elongated in a straight shape to be coupled with the guide plate (not shown) for guiding the sliding motion of the 110, and the guide rail support plate 122 for fixing and supporting the guide rail 120; Located in the top wall and the side wall surface is configured to include one or more thermal heater 130 to dissipate heat to maintain the temperature inside the deposition chamber 100 above a predetermined temperature.

The organic chamber 200 has a structure for vaporizing the organic substance by applying heat to the organic substance stored therein, is formed in the shape of a tube and is connected to the injection unit 110 through the deposition chamber 100 to the gas phase organic matter transfer pipe. Coupled with 210 is formed to transfer the gaseous organic matter to the injection unit (110).

The auxiliary chamber 300 is coupled to the injection unit 110 in a direction parallel to the guide rail 120 through the deposition chamber 100 to allow the injection unit 110 to move along the guide rail 120. And a moving block 312 coupled to the shaft 310, the moving shaft 310, and coupled to the transfer unit 314 to move in a direction parallel to the guide rail 120, and a gaseous-organic organic feed pipe 210 and The moving shaft 310 is located in a portion penetrating the deposition chamber 100, and both chambers are buffered and isolated while the vacuum degree difference between the high vacuum deposition chamber 100 and the low vacuum or atmospheric auxiliary chamber 300 is buffered and isolated. The sealing flange 320 and the bellows 322 to be connected, and the organic chamber 200 is provided therein.

FIG. 2B is a cross-sectional view taken along the line “A”-“A” in FIG. 2A.

As shown in FIG. 2B, the deposition chamber 100 is provided with a heating heater 130 that maintains the internal temperature of the deposition chamber 100 at a predetermined temperature on the top and side surfaces thereof, and the bottom of the deposition chamber 100. The surface is provided with a base material seating portion 140 for mounting the base material 10 to deposit the organic material, the injection unit 110 for injecting gaseous phase organic matter is located on the base material mounting portion 140. In addition, the lower outer surface of the deposition chamber 100 is provided with a vacuum pump 150 for making the interior of the deposition chamber 100 in a high vacuum.

The lower end of the inside of the auxiliary chamber 300 is provided with an organic material chamber 200 for vaporizing the organic material, and serves as a transport path so that the gaseous organic matter drawn from the organic material chamber 200 can be transported to the injection unit 110. The gaseous organic matter transport pipe 210 is connected to the top of the organic material chamber 200, and the transport unit 314 for controlling the movement of the injection unit 110 is positioned between the organic material chamber 200 and the gaseous organic matter transport pipe 210. By In addition, the auxiliary chamber 300 injects the inert gas into the organic chamber 200 and includes a flow rate control unit for controlling the injection amount of the inert gas. The inert gas injected into the organic chamber 200 serves as a moving medium of the gaseous organic matter, finely controls the transport amount of the gaseous organic matter, and serves to uniformly disperse the gaseous organic matter.

FIG. 2C is a cross-sectional view taken along the line “B”-“B” in FIG. 2A.

As shown in Figure 2c, the guide plate 112 is coupled to the injection unit 110 is coupled to the structure capable of sliding movement with the guide rail 120 for guiding the direction of movement of the injection unit 110, the base material The base material seating portion 140 for seating the 10 includes an electromagnet moving device using the electromagnet 142 to enable fine movement in the horizontal plane direction.

Electromagnet moving device applied to the base material seating unit 140 is configured by citing the technology of the patent application 'deposition apparatus for manufacturing organic electroluminescent device using electromagnet and deposition method using the same' (application number: 10-2001-0077739) It may be, but is not limited thereto. It is also possible to employ a conventional moving device other than the electromagnet moving device.

By adjusting the position of the injection unit 110 along the guide rail 120 and using the electromagnet moving device to adjust the position of the base material mounting unit 140, the position of the injection unit 110 and the base material 10 more accurately It is possible to align, thereby achieving a more accurate and effective gas phase organic injection.

FIG. 2D is a detail view of the organic chamber, which is the “C” portion of FIG.

The organic material chamber 200 is formed in a sealed shape of a heat-resistant material having an internal space for storing organic material, and has a carrier gas inlet hole 222 formed in a hole shape so that a carrier gas for transporting gaseous organic matter can be introduced therein. And a crucible 220 having a vapor phase organic withdrawal hole 224 formed in a hole shape so that organic vapor and carrier gas can be drawn out, and surrounding the outside of the crucible 220 and the temperature of the organic matter to the temperature at which the organic matter evaporates. An organic heating heater 230 for heating the inside is included therein.

The carrier gas inlet pipe 240 formed in a tubular shape and connected to the flow control unit 400 shown in FIG. 2B passes through the organic chamber 200 and has a carrier gas inlet hole 222 formed in the crucible 220. By being connected to, the inert gas injected from the flow control unit 400 is introduced into the crucible 220.

In addition, the gaseous phase organic matter delivery pipe 210 formed in a tubular shape and connected to the injection unit 110 illustrated in FIG. 2B may pass through the organic material chamber 200 to form a carrier gas outlet hole formed in the crucible 220. 224, by being heated by the organic heating heater 230, vaporized organic matter is transferred to the injection unit 110 for injecting gaseous organic matter into the base material.

3 shows various operation forms of the vapor phase organic vapor deposition apparatus according to the present invention.

3A illustrates a shape in which the shower head-shaped spray unit moves and sprays gaseous organic matter.

The injection unit for injecting the gaseous phase organic matter 22 may be manufactured in various shapes in order to inject the gaseous phase organic matter 22 into various shapes so that the gaseous phase organic matter 22 may be uniformly injected. In FIG. 3A, a spraying operation (not shown) is illustrated in which a deposition operation is performed by using a plurality of shower head shaped spraying portions having a small diameter.

When the injection unit 110 is fixed at a predetermined position to inject the gaseous organic matter 22, there is a problem that the gaseous organic matter 22 is not evenly sprayed over the entire base material 10, as shown in Figure 3a When the injection unit 110 for injecting the gaseous phase organic matter 22 to the upper surface of the base metal 10 moves horizontally in the direction of the guide rail and injects the gaseous phase organic matter 22, the gaseous phase organic matter 22 is spread over the entire surface of the base metal 10. Evenly deposited. In this case, when there are two or more kinds of gaseous phase organic matters 22 deposited on the base material 10, the gaseous phase organic matter transfer pipe 210 of the heterogeneous (異種) is transferred to the gaseous phase organic matter transfer pipe 210 to the injection unit 110. It is provided with a mixing tank 250 for mixing the gas phase organic matter 22, so that two or more types of gas phase organic matter can be uniformly mixed. In addition, the inside of the mixing tank 250, one or more diaphragms in order to allow the two or more types of gaseous organic matter 22 is introduced into the mixing tank 250 to be mixed homogeneously while being drawn out of the mixing tank 250. Equipped.

3B illustrates a shape in which a shower head-shaped spray unit moves in a horizontal direction through a transfer method using an electromagnet, in which a base material seating unit seats a base material when spraying gaseous organic matter.

Contrary to the case of FIG. 2A in which the injection unit 110 moves horizontally while the injection unit 110 injects the gaseous phase organic matter 22, the injection unit 110 moves the gaseous phase organic matter 22 as shown in FIG. 3B. When the base material mounting portion 140 on which the base material 10 is seated during the spraying is moved in the horizontal direction, the same effect as that of FIG. 2A in which the vapor phase organic matter 22 is evenly deposited on the upper surface of the base material 10 can be obtained. Will be. In addition, unlike in the case of FIG. 3A in which the injection unit 110 moves by the guide rail, as shown in FIG. 3B, the base material mounting unit 140 is horizontally moved while the injection unit 110 injects the gas phase organic material 22. Since the moving method uses a transfer method using an electromagnet, the movement of the base material mounting part 140 can be more finely controlled.

Figure 3c shows the shape of depositing the gaseous organic matter on the base material using the injection tube.

As illustrated in FIG. 3C, the vapor deposition apparatus using the injection tube 112 transfers the gas phase organic material 22 transferred into the deposition chamber 100 through the mixing tank 250 that uniformly mixes two or more types of gas phase organic materials. , Made of quartz, ceramic or metal and has a structure in which the upper surface of the base material 10 is deposited through the injection tube 112 formed in a tubular shape having a diameter of 3 to 20 mm. The vapor phase organic vapor deposition apparatus using the injection tube 112 forms the organic thin film of a flat and rapid high-speed film.

3d illustrates a shape in which the injection tube rotates and moves up and down and deposits gaseous organic matter on the base metal.

The deposition apparatus illustrated in FIG. 3C includes a rotary motor 114 for rotating the injection tube 112 on the top of the deposition chamber 100 and a vertical moving motor 116 for moving the injection tube 112 up and down vertically. In addition, the injection tube 112 is configured to spray the gas phase organic material 22 to the upper base material 10 while rotating and moving up and down. In addition, the injection tube 112 is formed to have a stepped refraction so that the end of the injection tube 112, which is injected into the gas phase organic matter 22 when the rotary motor 114 is rotated can perform a circular motion. .

Since the position of the injection tube 112 can be freely adjusted by the rotary motor 114 and the vertical movement motor 116, the deposition apparatus shown in FIG. 3C can more uniformly inject the gas phase organic matter.

4 illustrates a process of mixing a carrier gas with gaseous organic substances generated by heating an organic substance.

Figure 4a shows the shape of mixing the gaseous organic matter and the carrier gas inside the crucible.

As shown in FIG. 4A, the vaporized organic material 20 heated and heated by the organic material heating heater 230 is introduced through the carrier gas inlet pipe 240 connected to the inside of the crucible 220 and the crucible 220. ) Are mixed inside. When the gaseous organic matter and the carrier gas are mixed by the method shown in FIG. 4A, since the organic matter is vaporized and mixed with the carrier gas, the gas is easily mixed and the two gases are homogeneously mixed.

Figure 4b shows the shape of mixing the gaseous organic matter and the carrier gas outside the crucible.

The mixing device shown in FIG. 4B is formed in a structure in which a carrier gas inlet pipe 240 is coupled to a gaseous phase organic matter transport pipe 210 positioned outside the organic chamber 200. The organic material 20 heated and vaporized by the organic material heating heater 230 is drawn in through the carrier gas inlet pipe 240 coupled with the vapor phase organic feed pipe 210 while being transported along the vapor phase organic feed pipe 210. Mixed with the carrier gas. Such a mixing device has the advantage that it does not need to make a separate configuration in order to couple the carrier gas inlet pipe 240 to the crucible 220 and the organic material chamber 200 has the advantage of being easy to manufacture.

5 illustrates various shapes of the crucible and the gas phase organic withdrawal hole.

FIG. 5A illustrates the shape of a crucible having a rectangular parallelepiped shape and having one vapor phase organic withdrawal hole at an upper end thereof.

As shown in FIG. 5A, the crucible-shaped crucible 220 is surrounded by an organic heating heater 230 for heating organic matter inside the crucible 220, and a gas phase organic withdrawal hole through which gaseous organic matter is drawn out at an upper end thereof. 222 is provided.

5B illustrates a crucible having a rectangular parallelepiped shape and having a plurality of vapor phase organic withdrawal holes at an upper end thereof.

In order to quickly deposit gaseous organic matter on the base material, a higher flow rate of gaseous organic matter must be taken out. As shown in FIG. 5A, one gaseous organic organic matter withdrawing hole 222 is provided on the top of the crucible 220. There is a problem that can not withdraw the weather organic matter. In order to solve this problem, as shown in Figure 5b having a plurality of gas phase organic withdrawal holes 222 in the upper end of the crucible 220, it is possible to withdraw the gas phase organic matter of a higher flow rate.

FIG. 5C illustrates the shape of the crucible having a cylindrical shape and having one vapor phase organic withdrawal hole at its upper end.

In order to more effectively vaporize the organic material inside the crucible 220, the crucible 220 may be manufactured in various shapes. When the shape of the crucible 220 is made of a rectangular parallelepiped, a large amount of heat is lost because heat generated from the organic heating heater 230 surrounding the crucible 220 is not evenly transmitted to the entire outer surface of the crucible 220. This occurs, and thus there is a problem in that the amount of gaseous phase organic matter generation cannot be precisely controlled. In order to solve this problem, as shown in Figure 5c to make the shape of the crucible 220 in a cylindrical shape so that the heat generated from the organic heating heater 230 can be evenly transmitted to the entire outer surface of the crucible 220. do. By changing the shape of the crucible 220 as described above, the heat generated from the organic heating heater 230 can be used more efficiently, and the amount of gaseous phase organic matter generation can be easily adjusted. In addition, the shape of the crucible 220 is not limited to the rectangular parallelepiped and the cylindrical shape shown in FIG. 5, and may be modified into a polyhedron and a spherical shape.

5d illustrates a crucible having a cylindrical shape and having a plurality of vapor phase organic withdrawal holes at its upper end.

When it is necessary to withdraw gaseous phase organic matters having a higher flow rate from the cylindrical crucible 220 shown in FIG. 5C, a plurality of gaseous organic substance withdrawing holes may be provided in the upper surface of the crucible 220 as in the case of FIG. 5B. Can be.

Figure 6 shows the shape provided with a constant temperature heater outside the gas phase organic matter transfer pipe.

When the gaseous phase organic matter generated in the crucible 220 is cooled through contact with the outside air when the gaseous phase organic matter transport pipe 210 is cooled through the gaseous phase organic matter transport pipe 210, the gaseous phase organic matter flows into the gaseous phase organic matter transport pipe 210. The organic material is also cooled. In this case, if the gaseous organic matter is cooled below a temperature suitable for deposition, a problem arises in that deposition on the base material becomes poor. In order to solve this problem, as shown in FIG. 6, outside the gaseous phase organic matter transport pipe 210, a heating element 262 for generating heat and a constant temperature heating element system 264 for precisely maintaining and controlling a heating temperature are provided. A constant temperature heater 260 is included.

In addition, the constant temperature heater 260 may be provided in the organic chamber 200 to maintain a constant temperature of the organic chamber 200.

As mentioned above, although this invention was demonstrated in detail using the preferable embodiment, the scope of the present invention is not limited to a specific embodiment and should be interpreted by the attached claim. In addition, those of ordinary skill in the art should understand that many modifications and variations are possible without departing from the scope of the present invention.

Using the vapor phase organic vapor deposition method and the vapor phase organic vapor deposition apparatus using the same, the vapor phase organic matter can be uniformly deposited on a large area of the substrate, the organic thin film can be formed at a high speed, and the fine adjustment of the amount of organic material mixture becomes possible. .

In addition, since the gaseous phase organic matter is sprayed only at the site where the gaseous phase organic matter is deposited, it is possible to effectively deposit the gaseous organic matter, and there is an advantage of saving the organic material.

Claims (10)

delete It has an inner space that is isolated from the outside, the base material seating portion for seating the base material to deposit the gaseous organic matter on the bottom surface of the inner space, and is located on the top of the base material seating portion to spray the gas phase organic material toward the base material seating portion And a guide plate coupled to the at least one guide rail in a longitudinal direction at the position at which the injection unit is mounted, and a structure capable of sliding movement together with the guide rail at a portion in contact with the guide rail, and rotating the injection unit. The rotating motor and / or the moving motor for moving the injection unit up and down, and one or more warming heater for dissipating heat in the upper wall and side wall surface, the injection unit by the drive device installed in the moving block A deposition chamber configured to slide along a guide rail and the guide plate; It has one or more carrier gas inlet holes formed in the shape of a hole to introduce the carrier gas carrying the gaseous organic matter, and one or more gaseous organic matter taking out holes formed in the shape of the hole so that the organic vapor and the carrier gas can be withdrawn. At least one organic chamber including a crucible formed in a shape having an internal space to store organic materials, and an organic heating heater surrounding the outside of the crucible and heating the crucible to a temperature at which the organic material is evaporated; A flow rate control unit connected to the carrier gas inlet hole to control an amount and a flow rate of the carrier gas introduced into the organic material chamber; It is formed to penetrate the deposition chamber and the organic chamber, the vapor phase organic matter transport tube formed in the shape of a tube to move the gas phase organic matter in the organic chamber to the injection unit; A vacuum pump for lowering an internal pressure of the deposition chamber; Vapor phase organic vapor deposition apparatus comprising a. delete delete delete delete delete delete A heating heater in contact with the outer surface of the organic chamber including the organic material therein, the first step of dissipating heat to heat the organic material above the evaporation temperature; Vapor phase organic matter vaporized by the heating heater is moved to an injection unit of a deposition chamber in which a base material to deposit vapor phase organic matter is deposited through a vapor organic matter transfer tube wrapped in a constant temperature heater that emits heat; As the spraying unit performs horizontal movement and / or rotational movement in the longitudinal direction of the gaseous phase organic matter transport pipe, the gaseous organic matter moved to the spraying unit is sprayed in the gravity direction from the upper end of the base material mounted on the upper side of the base material seating portion. Step 3 is deposited on the upper surface of the base material; Vapor phase organic vapor deposition method comprising the. The method of claim 9, The base material seating portion of the three steps, Vapor phase organic vapor deposition method characterized in that the horizontal movement on the organic chamber bottom surface.