KR20130043390A - Heating apparatus in ingot grower - Google Patents

Abstract

PURPOSE: A heating apparatus of an ingot growing unit is provided to symmetrically supply heat to a crucible by including a first heating bar to surround the bottom and the side of the crucible. CONSTITUTION: A first heater(200) supplies heat to the bottom and the side of a crucible. A first electrode(300) is installed on the upper side of the crucible and the first heater. The first heater includes a first heating bar(210) and a first side support strip(220). The first heating bar surrounds the bottom and the side of the crucible. The first side support strip is closely installed on the upper side of the crucible in comparison with the lower side of the crucible.

Description

Heating apparatus in ingot grower

The present invention relates to an ingot grower, and more particularly, to a heating apparatus for applying heat to the ingot grower to melt the raw materials of the ingot grower and then grow using seeds.

Many devices for modern precision electronics, such as semiconductor integrated circuits, light emitting diodes, data storage devices, and photodetectors, are typically manufactured from single crystals. For example, semiconductor integrated circuits are fabricated on single crystal silicon substrates, and devices such as light emitting diodes, data storage devices, photodetectors and the like are generally fabricated from sapphire single crystal substrates.

Such substrates are formed by cutting agglomerates called ingots, and Czochralski and Kyropulus methods are widely known as methods for producing such ingots. This method is to lower the silicon or sapphire seed (seed) into the melt in the crucible filled with the raw material is melted, then lifted at a controlled rate to gradually attach the melt to the seed to form an ingot. As such, the equipment for producing an ingot by gradually raising the ingot is called an ingot growing period.

The continuous growth machine operates an electric heater around the crucible containing the raw material to melt the raw material, contacts the molten raw material with the seed, and gradually cools the ingot to grow the seed.

At this time, when the temperature distribution around the crucible is nonuniform, deterioration of the single crystal quality of the ingot occurs and, in severe cases, a defect occurs. That is, when any one of the fast growing during growth, the ingot may be polycrystalline, or the crucible and the ingot may be bonded to generate cracks of the ingot.

In addition, when the temperature difference between the crucible and the heaters surrounding the crucible is severe, due to the difference in thermal expansion, there is a disadvantage that the service life of the crucible or the heater is reduced.

Embodiments of the present invention have been made to solve the above problems, to uniform the temperature distribution around the crucible of the ingot growth machine, to provide a heating device of the ingot growth machine capable of growing a good ingot.

Embodiment of the present invention, in order to solve the above problems, the raw material is melted, the crucible of the upper side is open so that the raw material is attached to the seed and grown; A first heater supplying heat to side and bottom surfaces of the crucible; And a first electrode provided above the first heater and the crucible to supply electricity to the first heater, wherein the first heater is disposed in plural in the circumferential direction of the crucible, and both ends of the first heater are provided. A first heat transfer bar connected to an electrode and formed to surround side and bottom surfaces of the crucible; And a first side support strip for simultaneously connecting and supporting the plurality of first heat transfer bars installed on the side of the crucible, wherein the first side support strip is denser than the lower side at the upper side of the crucible. It provides a heating device of the ingot growth machine.

On the other hand, the present invention is a raw material is melted for another purpose, the crucible of the upper side is open so that the raw material is attached to the seed and grown; A first heater supplying heat to side and bottom surfaces of the crucible; A first electrode provided above the first heater and the crucible to supply electricity to the first heater; A second heater surrounding an upper side of the crucible; And a second electrode for supplying electricity to the second heater, wherein the first heater is disposed in plural in the circumferential direction of the crucible, and both ends of the first heater are connected to the first electrode. It is possible to provide a heating device for an ingot growth machine comprising a; first heat transfer bar formed to wind the surface.

The second heater may include: a second vertical heat transfer bar having one end connected to the second electrode and facing a side of the crucible; And a second horizontal heat transfer bar connected at both ends to the other end of the pair of second vertical heat transfer bars.

A second side support strip for simultaneously connecting and supporting the plurality of second vertical heat transfer bar provided on the side of the crucible; preferably further comprises.

The first heat transfer bar may include: a first vertical heat transfer bar having one end connected to the first electrode and disposed to face a side of the crucible; And a first horizontal heat transfer bar connected to both ends of the pair of the first vertical heat transfer bars and facing the bottom surface of the crucible.

The first horizontal heat transfer bar has an X axis (one direction on the bottom surface at the center of the bottom surface of the crucible is referred to as an 'X axis') and a Y axis (perpendicular to the X axis). It is preferable to connect a pair of first vertical heat transfer bars in a position symmetrical to the other direction on the bottom surface (called 'Y axis').

In order to secure the support shaft insertion space for supporting the bottom surface of the crucible, some of the first horizontal heat transfer bar is bent.

On the other hand, the first horizontal heat transfer bar, the X axis (one direction on the bottom surface in the center of the crucible bottom surface referred to as the 'X axis' and the Y axis (the X axis) A symmetrical horizontal heat transfer bar connecting the pair of first vertical heat transfer bars in a position symmetrical to another direction on the bottom surface perpendicular to the 'Y axis'; And connecting the first vertical heat transfer bar positioned in the interference region causing interference with the support shaft insertion hole supporting the bottom of the crucible and the first vertical heat transfer bar positioned in the other interference region adjacent to the interference region when connecting in a straight line. It may be implemented including a diagonal horizontal heat transfer bar.

The oblique horizontal heat transfer bar is preferably formed to be bent in a direction away from the bottom surface in order to avoid interference with the symmetric horizontal heat transfer bar.

As described above, according to the present invention, various effects including the following can be expected. However, the present invention does not necessarily achieve the following effects.

First, since the first side support strips are densely installed at the upper side of the crucible than the lower side, only the position where the heat generated through the first side support strips densely arranged at the upper side is close to the bottom surface of the crucible is high. This has some advantages.

In addition, due to the second heater, not only can the temperature of the upper side of the crucible be increased, but also the temperature can be rapidly increased during the initial driving, and the temperature can be controlled separately, so that the growth of the single crystal ingot can be made more efficient. There is an advantage that it can.

In addition, due to the arrangement of the first heat transfer bar, not only space can be saved, but heat can also be symmetrically supplied.

1 is a cross-sectional view of the crucible installation portion of the ingot growth machine in which the ingot growth machine heating apparatus of the first embodiment of the present invention is installed;
FIG. 2 is a perspective view of the first heater of FIG. 1.
3 is a front view of the first heat transfer bar of FIG. 2.
4 is a plan view illustrating an arrangement of the first horizontal heat transfer bar of FIG. 1.
5 is a plan view showing the arrangement of the first horizontal heat transfer bar of the second embodiment of the present invention;
6 is a cross-sectional view taken along the cutting line VI-VI of FIG. 5.
Figure 7 is a perspective view of the crucible installation portion of the ingot growth machine of the third embodiment of the present invention
8 is a perspective view of the second heater of FIG. 7;

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view of a crucible mounting portion of an ingot growth machine in which an ingot growth machine heating device according to a first embodiment of the present invention is installed.

As shown in FIG. 1, the ingot growth machine includes a crucible 100 in which raw materials are melted and a lifting rod for fixing and lowering a seed 2, which is grown by attaching the molten raw material 1, to one end. 3), a first heater 200 for supplying heat to the side and bottom surface of the crucible 100, and the first heater 200 and the crucible 100 to supply electricity to the first heater 200. It includes a first electrode 300 provided above.

The crucible 100 is formed of a metal or ceramic material that can withstand high temperatures, and is formed in an open bowl shape. The support shaft 4 for supporting the crucible 100 is provided below the crucible 100.

FIG. 2 is a perspective view illustrating the first heater of FIG. 1.

The first heater 200 is formed to surround the side and the bottom of the crucible so as to supply heat to the side and the bottom of the crucible. However, the present invention is not limited thereto, and may be deformed into a configuration capable of sufficiently supplying heat to side and bottom surfaces. That is, a plurality of first heaters 200 are disposed in the circumferential direction of the crucible 100, and both ends are connected to the first electrode 300, and the first heat transfer bar is formed to surround side and bottom surfaces of the crucible. And a first side support strip 220 for simultaneously connecting and supporting the plurality of first heat transfer bars 210 installed on the side of the crucible 100.

As shown in FIG. 3, the first heater 200 includes a plurality of first heat transfer bars 210 formed in a 'U' shape to surround both side surfaces and the bottom surface of the crucible 100 in the circumferential direction. In this case, both ends of the first heat transfer bar 210 are connected to the electrodes 300 having different polarities.

One end of the first heat transfer bar 210 is connected to the first electrode 300, and a plurality of first vertical heat transfer bars 211 are disposed to face the side surface of the crucible 100 and a pair of the first heat transfer bars 210. Both ends are connected to the other end of the vertical heat transfer bar 211, and include a first horizontal heat transfer bar 212 facing the bottom of the crucible.

The plurality of first horizontal heat transfer bars 212 should be arranged such that there is a space through which the support shaft 4 can pass.

4 is a layout view illustrating an arrangement of a first horizontal heat transfer bar.

First, when the first horizontal heat transfer bar 212 connects the first vertical heat transfer bar 211 which is symmetrical to the center of the support shaft 4 (radial shape), there are too many first horizontal heat transfer bars 121 above the center. ) Overlap, resulting in too much volume. In order to solve such a problem, as shown in FIG. 4, the first horizontal heat transfer bar 212 has an X axis based on the center of the bottom of the crucible (the bottom surface at the center of the bottom surface of the crucible). A pair of first vertical heat transfer bars 211 at positions symmetrical to one direction of the image on the X-axis) and to the Y-axis (the other direction on the bottom surface perpendicular to the X-axis to the Y-axis) Are arranged to connect.

However, in order to secure the support shaft insertion space 5 supporting the bottom surface of the crucible 100, some of the first horizontal heat transfer bars 212 are bent and formed. That is, in FIG. 4, the first horizontal heat transfer bar 212 in the vicinity of the support shaft insertion space 5 is bent.

When the first horizontal heat transfer bar 212 is formed as shown in FIG. 4, the first horizontal heat transfer bar is formed only by two layers of the first horizontal heat transfer bar 212a parallel to the X axis and the first horizontal heat transfer bar 212b parallel to the Y axis. In addition to preventing the 212 from interfering with each other, there is an advantage that the support shaft insertion space 5 can be secured.

In addition, the first horizontal heat transfer bar 212 is arranged to be symmetrical, there is an advantage that the temperature distribution is uniform.

However, since the first horizontal heat transfer bar 212 overlaps the bottom surface of the crucible 100, the temperature near the bottom surface of the crucible 100 is high, whereas the temperature increases toward the top of the side surface of the crucible 100. There is a problem that falls.

In order to solve such a problem, as shown in Figs. 2 and 3, the first side support strip 220 is preferably more densely installed than the lower side in the upper side of the crucible. As a result, there is an advantage that the heat generated through the first side support strip 220 densely arranged on the upper side somewhat relieves the high temperature only at the position adjacent to the bottom surface of the crucible.

As described above, the arrangement of the first horizontal heat transfer bar 212 according to the first embodiment has many advantages such as saving space and uniformity of temperature distribution at the bottom, but has many disadvantages. Since the present invention operates at a very high temperature, the stress is concentrated at the bending portion of the first horizontal heat transfer bar 212, which is easily damaged. Therefore, it is necessary to develop a structure that minimizes the point of bending.

5 is a conceptual view showing a modification of the first horizontal heat transfer bar, showing the structure of the second embodiment of the present invention.

The first horizontal heat transfer bar 1212 of the second embodiment has an X axis (one direction on the bottom surface at the center of the bottom surface of the crucible as the 'X axis') and the Y axis based on the center of the crucible bottom surface. A symmetrical horizontal heat transfer bar 1212a connecting a pair of first vertical heat transfer bars 1211a at positions symmetrical to each other on the bottom surface perpendicular to the X axis (called 'Y axis'), When connected in a straight line, the first vertical heat transfer bar 1211b located in the interference region (I, II, III, IV) causing interference with the support shaft insertion space (5) supporting the bottom surface of the crucible, and the interference region And an oblique horizontal heat transfer bar 1212b for connecting the first vertical heat transfer bar disposed in another interference region adjacent to each other with a diagonal line.

In detail, in FIG. 5, when the first vertical heat transfer bars 1211a and 1211b facing each other with respect to the X axis and the Y axis are connected to each other, an interference area is defined as an interference area with the support shaft insertion space 5. It is defined as (I, II, III, IV), and an area which does not cause interference with the support shaft insertion space 5 is defined as a non-interfering area (V). The symmetrical horizontal heat transfer bar 1212a refers to a pair of first vertical heat transfer bars 1211a positioned in the non-interfering region V so as to be symmetrical with respect to the X and Y axes. The first vertical heat transfer bar 1211b positioned in the adjacent interference region. In FIG. 5, a first vertical heat transfer bar 1211b located in an area I and a first vertical heat transfer bar 1212b located in an area II are connected to each other, and a first vertical heat transfer bar 1211b located in an area III and an IV located in an area IV are illustrated. 1 Connect the vertical heat transfer bar 1211b.

At this time, the oblique horizontal heat transfer bar 1212b is bent in a direction away from the bottom surface in order to avoid interference with the symmetric horizontal heat transfer bar 1212a. That is, as illustrated in FIG. 6, the diagonal horizontal heat transfer bar 1212b is positioned below the symmetric horizontal heat transfer bar 1212a to prevent mutual interference.

As described above, the arrangement of the first horizontal heat transfer bar of the second embodiment enables the support shaft insertion space 5 to be secured while minimizing the bending portion. In particular, the diagonal horizontal heat transfer bar 1212b is disposed below the horizontal heat transfer bar 1212a, so that the lengths of the first vertical heat transfer bars and the horizontal heat transfer bars can be balanced. That is, since the length of the diagonal horizontal heat transfer bar 1212b is shorter than the length of the horizontal heat transfer bar 1212a, the resistance value connected with the first vertical heat transfer bar may vary greatly, but the first horizontal heat transfer bar is positioned below the first vertical heat transfer. The advantage is that the sum of the lengths of the bars is similar.

7 is a conceptual diagram showing a heating apparatus of a third embodiment of the present invention.

In the case of the first embodiment, the temperature distribution above and below the crucible was made uniform by varying the distribution of the first side support strips. However, due to the capacity of the heat transfer bar, the amount of current that can be input to increase the temperature is limited, and the temperature must be raised gradually, which not only has a disadvantage in that it takes a lot of work time. There is a disadvantage that growth is not appropriate even if it is too high.

In order to solve such a problem, the third embodiment has a crucible 100 having an upper side opened so that the raw material is melted and attached to the seed, and the side and bottom surfaces of the crucible 100 are opened. The first heater 200, the first electrode 300 provided on the crucible and the upper side of the crucible to supply electricity to the first heater 200, and the second heater surrounding the upper side of the crucible 100 ( 400 and a second electrode 500 for supplying electricity to the second heater 400.

Since the second heater 400 and the second electrode 500 are different from the first embodiment, and the rest of the configuration is the same, only the second heater 400 and the second electrode 500 will be described in detail.

FIG. 8 is a perspective view illustrating a structure of the second heater of FIG. 7.

One end of the second heater 400 is connected to the second electrode 500, and a plurality of second vertical heat transfer bars 410 are disposed to face the side of the crucible, and a pair of second vertical heat transfer bars ( A second horizontal heat transfer bar 420 having both ends connected to the other end of the 410 and a second side support strip 430 for simultaneously connecting and supporting the plurality of second vertical heat transfer bars 410 installed on the side of the crucible are supported. Include.

The second electrode 500 may be connected to the first electrode 300 by a separate power source to separately drive the power supplied to the second heater 400 from the first heater 200. The second side support strip 430 is formed of a heat conductive material, and not only structurally reinforces the second electrode 500, but also disperses heat.

As described above, the second heater 400 connected to the first heater 200 by a separate power source is provided on the upper side of the crucible 100, so that not only can the temperature be rapidly increased during the initial driving, but also the temperature control is performed. In addition, it is possible to grow the single crystal ingot more efficiently.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention.

100: crucible 200: first heater
300: first electrode 210: first heat transfer bar
220: first side support strip 400: second heater
500: second electrode 410: second vertical heat transfer bar
420: second horizontal heat transfer bar 430: second side support strip
211: first vertical heat transfer bar 212: first horizontal heat transfer bar
1212a: symmetric horizontal heat transfer bar 1212b: diagonal horizontal heat transfer bar

Claims (9)

A crucible in which the raw material is melted and the upper side is opened so that the raw material is attached to the seed and grown;
A first heater supplying heat to side and bottom surfaces of the crucible; And
A first electrode provided above the first heater and the crucible to supply electricity to the first heater;
/ RTI >
The first heater,
A plurality of first heat transfer bars disposed in the circumferential direction of the crucible and connected to both ends of the crucible, and configured to surround side and bottom surfaces of the crucible; And
A first side support strip for simultaneously connecting and supporting the plurality of first heat transfer bars installed on the side of the crucible;
Including,
The first side support strip is the heating device of the ingot growth machine, characterized in that more densely installed than the lower side on the upper side of the crucible.
A crucible in which the raw material is melted and the upper side is opened so that the raw material is attached to the seed and grown;
A first heater supplying heat to side and bottom surfaces of the crucible;
A first electrode provided above the first heater and the crucible to supply electricity to the first heater;
A second heater surrounding an upper side of the crucible; And
A second electrode supplying electricity to the second heater;
/ RTI >
The first heater,
A plurality of first heat transfer bars disposed in a circumferential direction of the crucible, at least one end of which is connected to the first electrode, and supplies heat to side and bottom surfaces of the crucible; .
3. The method of claim 2,
The second heater,
A second vertical heat transfer bar having one end connected to the second electrode and disposed to face a side of the crucible; And
A second horizontal heat transfer bar connected at both ends to a second end of the pair of second vertical heat transfer bars;
Heating apparatus of the ingot growth machine comprising a.
The method of claim 3, wherein
A second side support strip for simultaneously connecting and supporting the plurality of second vertical heat transfer bars installed on the side of the crucible;
Ingot growth apparatus for heating apparatus further comprises a.
The method according to any one of claims 1 to 4,
The first heat transfer bar,
A first vertical heat transfer bar, one end of which is connected to the first electrode and disposed to face a side of the crucible; And
A first horizontal heat transfer bar having both ends connected to the other ends of the pair of first vertical heat transfer bars and installed to face the bottom of the crucible;
Heating apparatus of the ingot growth machine comprising a.
The method of claim 5, wherein
The first horizontal heat transfer bar has an X axis (one direction on the bottom surface at the center of the bottom surface of the crucible is referred to as an 'X axis') and a Y axis (perpendicular to the X axis). And a pair of first vertical heat transfer bars in a symmetrical position in the other direction on the bottom surface, referred to as a 'Y axis'.
The method according to claim 6,
In order to secure the support shaft insertion space for supporting the bottom surface of the crucible, the heating device of the ingot growth machine, characterized in that some of the first horizontal heat transfer bar is formed bent.
The method of claim 5, wherein
The first horizontal heat transfer bar,
X axis (one direction on the bottom surface is called 'X axis' at the center of the bottom surface of the crucible) and Y axis (the other direction on the bottom surface perpendicular to the X axis) A symmetrical horizontal heat transfer bar connecting the pair of first vertical heat transfer bars in a position symmetrical to the 'Y axis';
When connecting in a straight line, diagonally connecting the first vertical heat transfer bar located in the interference region causing interference with the support shaft insertion hole supporting the bottom of the crucible and the first vertical heat transfer bar located in the other interference region adjacent to the interference region in a diagonal line. Diagonal horizontal heat transfer bar;
Heating apparatus of the ingot growth machine comprising a.
The method of claim 8,
The diagonal horizontal heat transfer bar,
In order to avoid interference with the symmetrical horizontal heat transfer bar, the heating apparatus of the ingot growth machine, characterized in that formed in the direction away from the bottom surface.

Images