CN209957886U

CN209957886U - Evaporation source for plane evaporation

Info

Publication number: CN209957886U
Application number: CN201920524937.7U
Authority: CN
Inventors: 不公告发明人
Original assignee: Fujian Huajiacai Co Ltd
Current assignee: Fujian Huajiacai Co Ltd
Priority date: 2019-04-17
Filing date: 2019-04-17
Publication date: 2020-01-17
Anticipated expiration: 2029-04-17

Abstract

The utility model provides an evaporation source of plane evaporation, including heating device, crucible and coating by vaporization board, be provided with connecting tube between the jar mouth of crucible and the bottom surface of coating by vaporization board. The material of adding the coating by vaporization in the crucible earlier, then heat the crucible through heating device for this material is heated gasification or is sublimed. The gas of coating by vaporization gets into the cavity of coating by vaporization board through the water conservancy diversion hole of guide plate in, and the gaseous evenly distributed of rethread dispersion hole on the dispersion board messenger coating by vaporization is in the cavity of coating by vaporization board, then through the discharge gate blowout, carries out the coating film to the base plate. Because whole coating by vaporization board is the gas of a face blowout coating by vaporization simultaneously for can carry out even face source coating by vaporization to outside base plate, improve the efficiency of production.

Description

Evaporation source for plane evaporation

Technical Field

The utility model relates to a crucible evaporation equipment field especially relates to an evaporation source of plane evaporation.

Background

Organic Light-Emitting diodes (abbreviated as OLEDs) have a wide application prospect as a new generation of display technology, and are currently widely used in mobile phones, TVs (televisions) and tablet computers. Meanwhile, flexible OLED panels are also under vigorous development, and flexible OLED products are already available. OLEDs form light emitting structures by vapor depositing materials of various functions onto a substrate. Under the action of an electric field, electrons are injected from the cathode of the organic semiconductor, holes are injected from the anode of the organic semiconductor, and the holes and the electrons are compounded in the light-emitting layer to emit light.

The OLED device is composed of a cathode, an anode and organic layers with different functions, wherein the organic layers are sandwiched between the cathode and the anode, and organic materials are mainly formed into films in a vacuum evaporation mode, namely the organic materials are added into a crucible, heated to sublimate or gasify in a vacuum environment, so that the organic materials are deposited on a substrate, and then the OLED device with multiple layers of films is formed.

The current crucible is mainly a point source and a line source. Because the evaporation range of the point source and the line source is limited, the evaporation range is limited, and therefore the substrate has to move (rotate or translate) relatively to the crucible in the cavity to ensure good uniformity of the evaporated film. However, designing a rotating or translating mechanism inside the vacuum chamber makes the structure of the device complicated, prone to malfunction, and expensive to produce, and therefore, the non-point source development is very important.

SUMMERY OF THE UTILITY MODEL

Therefore, an evaporation source for plane evaporation needs to be provided, and the problem that the existing crucible does not have surface source evaporation is solved.

In order to achieve the above object, the inventor provides an evaporation source for planar evaporation, comprising a heating device, a crucible and an evaporation plate; a cavity is arranged in the evaporation plate, a plurality of discharge ports are formed in the top surface of the evaporation plate, a connecting guide pipe is arranged between a pot opening of the crucible and the bottom surface of the evaporation plate, and the heating device is arranged on the outer side surface of the crucible; the cavity is provided with the dispersion board, be provided with a plurality of dispersion holes on the dispersion board, the dispersion board is located between a plurality of discharge gates and the bottom surface of coating by vaporization board, the jar top of crucible is provided with the guide plate, be provided with a plurality of water conservancy diversion holes on the guide plate, water conservancy diversion hole and dispersion board are used for the gas flow of dispersion guide crucible internal evaporation.

Further, the heating device comprises a heating wire, and the heating wire is arranged around the outer side face of the crucible.

Further, the heating device also comprises a conduit heating wire which is arranged on the outer side surface of the connecting conduit in a surrounding manner.

Further, the coating by vaporization board is provided with the heating splint, the heating splint dress presss from both sides between the top surface and the bottom surface of coating by vaporization board, and the heating splint that are located the top surface run through the discharge gate setting of coating by vaporization board.

Furthermore, a support column is arranged between the dispersion plate and the bottom surface of the cavity of the evaporation plate.

Further, the dispersion holes and the discharge hole are arranged in a staggered mode.

Be different from prior art, above-mentioned technical scheme is earlier to the material of adding the coating by vaporization in the crucible, then heats the crucible through heating device for this material is heated gasification or is sublimed. The gas of coating by vaporization gets into the cavity of coating by vaporization board through the water conservancy diversion hole of guide plate in, and the gaseous evenly distributed and the cavity of coating by vaporization are made to the dispersion hole on the rethread dispersion board in, spout through the discharge gate then, carry out the coating film to the base plate. Because whole coating by vaporization board is the gas of a face blowout coating by vaporization simultaneously for can carry out even face source coating by vaporization to outside base plate, improve the efficiency of production.

Drawings

FIG. 1 is a schematic diagram of an evaporation source for planar evaporation according to an embodiment;

FIG. 2 is a cross-sectional view of a planar evaporation source according to an embodiment;

FIG. 3 is a schematic diagram of a deflector of a planar evaporation source according to an embodiment;

fig. 4 is a schematic diagram illustrating a staggered distribution of discharge ports and dispersion holes of a planar evaporation source according to an embodiment.

Description of reference numerals:

10. a heating device; 11 heating wires; 12. a conduit heater wire; 13. heating the clamping plate;

20. a crucible;

30. evaporating a plate; 31. a cavity; 32. a discharge port; 33. a baffle; 34. a dispersion plate; 331. a flow guide hole; 341. a dispersion hole; 342. a support pillar;

40. connecting a conduit;

Detailed Description

To explain technical contents, structural features, and objects and effects of the technical solutions in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.

Referring to fig. 1, 2, 3 and 4, the present embodiment provides a planar evaporation source, which includes a heating device 10, a crucible 20 and an evaporation plate 30, wherein a cavity 31 is formed inside the evaporation plate, a plurality of discharge holes 32 are formed on the top surface of the evaporation plate, and a connecting conduit 40 is formed between the opening of the crucible and the bottom surface of the evaporation plate. In this embodiment, the entire evaporation source is mainly divided into three parts, which are respectively: a crucible at the bottom, an evaporation plate at the top and a connecting conduit. The crucible of bottom can be for cylindric structure, twines heater strip 11 on the lateral surface of crucible, heats the crucible through the heater strip circular telegram, makes the evaporation coating material gasification or the sublimation of the solid in the crucible then through heat-conduction. A guide plate 33 is also arranged in the crucible, and the guide plate can be arranged according to the cross section shape of the crucible, for example, the cross section of the crucible is circular, and the guide plate is a circular plate; if the cross section of the crucible is rectangular, the guide plate is a rectangular plate, and the guide plate is provided with guide holes 331. In the embodiment, the cylindrical crucible is adopted, so that a plurality of flow guide holes are circumferentially arrayed on the flow guide plate, and the evaporated gas passing through the flow guide plate is uniformly distributed.

Similarly, the connecting conduit is wound with the conduit heating wire 12, which is also an electric heating type heating wire, so that the heating can be carried out by introducing current, and further, the phenomenon of deposition can not occur when the evaporated gas is conveyed. Simultaneously, the heating wire of the conduit and the heating wire can be independently controlled, for example, the power input by a controller, so that the heating temperature of the crucible and the heating temperature of the connecting conduit are different, the energy waste is avoided, and the practicability of the evaporation source is improved.

In order to better disperse the evaporated gas entering the evaporation plate, the connecting pipe is connected to the center of the evaporation plate surface, so that the evaporated gas can be uniformly dispersed in the inner cavity of the evaporation plate. Meanwhile, the dispersion plate 34 is installed in the evaporation plate, and the evaporated gas is dispersed and guided through the dispersion holes 341 of the dispersion plate, so that the purpose of uniformly distributing the evaporated gas in a dispersion and guide manner is achieved. The dispersion holes can be arranged on the dispersion plate in a rectangular array, and the diameters of the dispersion holes are the same; or distribute through central equipartition mode, put the edge distribution of equidistant orientation dispersion board at the central point of dispersion board promptly, and the dispersion hole diameter that is close to central point more is littleer, consequently makes the gaseous evenly distributed in the cavity upper portion of evaporating plate of the gaseous evenly distributed of evaporation in the cavity of evaporating plate behind the dispersion board of evaporation plate. In order to make the dispersion board can be better with the gaseous dispersion water conservancy diversion of evaporation, set up a plurality of support columns 342 between the inner chamber bottom surface of dispersion board and coating by vaporization board in this embodiment, inject the position that the dispersion board placed through the support column, and then make the gaseous dispersion of evaporation more even. And then the evaporated gas is ejected through the discharge hole, so that the aim of coating the external substrate is fulfilled.

The dispersion holes and the discharge holes are arranged in a staggered mode in the embodiment. For example, the dispersing through holes are distributed on the dispersing plate in a rectangular array mode, so that gas evaporated from the top in the crucible body is uniformly distributed and then discharged through the discharge hole. Simultaneously, the discharge gate also carries out the rectangle array and arranges, and the dodging of staggering is made simultaneously with the dispersion through-hole and arranges for any discharge gate can not take place the phenomenon of coincidence with any dispersion through-hole. Therefore, the evaporated gas can be prevented from being directly discharged through the dispersion plate and the discharge port, the purpose that the evaporated gas is uniformly distributed in the crucible body through a flowing path is achieved, and the evaporated gas is ensured to be uniformly discharged. In other embodiments, a plurality of dispersion plates may be installed to control the flow path of the evaporated gas through the through-holes which are staggered with each other. The purpose of uniformly evaporating the substrate is achieved.

During vapor deposition, the evaporation source and the substrate to be coated are placed in a closed space, and the evaporated gas can be uniformly coated on the substrate through vacuum pumping. In order to facilitate heating, the crucible, the connecting conduit and the evaporation plate are made of materials with good thermal conductivity, and the materials can be as follows: metals, graphite, ceramics, etc., wherein the metal may be silver or copper, etc. In this embodiment, be provided with heating splint 13 on the last top surface of evaporating plate rather than the bottom surface down, the heating splint that are located the evaporating plate top surface run through the discharge gate setting of evaporating plate, and the through-hole of dodging is then done to connecting tube to the heating splint that are located the evaporating plate bottom surface to the same reason for the installation of evaporating plate is hugged closely to heating splint. The heating splint can heat the evaporation plate and the discharge hole on the evaporation plate, so that the phenomenon that evaporated gas is deposited in the evaporation plate and/or blocks the discharge hole is avoided, the evaporated gas can be smoothly sprayed out from the discharge hole, and the evaporation efficiency and quality of the evaporation source are improved.

The heating clamping plate can also be made of materials with good heat conductivity, such as metal, graphite, ceramic and the like, wherein the metal can be silver or copper and the like. And the heating splint is internally provided with an electric heating wire which is heated in an independent control mode. Therefore, the evaporation plate only needs to ensure that the temperature of the evaporation plate does not cause the deposition of evaporated gas, thereby achieving the purpose of saving energy and further improving the practicability of the evaporation source.

It should be noted that, although the above embodiments have been described herein, the scope of the present invention is not limited thereby. Therefore, based on the innovative concept of the present invention, the changes and modifications of the embodiments described herein, or the equivalent structure or equivalent process changes made by the contents of the specification and the drawings of the present invention, directly or indirectly apply the above technical solutions to other related technical fields, all included in the protection scope of the present invention.

Claims

1. An evaporation source of plane evaporation, its characterized in that: comprises a heating device, a crucible and an evaporation plate;

a cavity is arranged in the evaporation plate, a plurality of discharge ports are formed in the top surface of the evaporation plate, a connecting guide pipe is arranged between the pot opening of the crucible and the bottom surface of the evaporation plate, and the heating device is arranged on the outer side surface of the crucible;

the cavity is provided with the dispersion board, be provided with a plurality of dispersion holes on the dispersion board, the dispersion board is located between a plurality of discharge gates and the bottom surface of coating by vaporization board, the jar top of crucible is provided with the guide plate, be provided with a plurality of water conservancy diversion holes on the guide plate, water conservancy diversion hole and dispersion board are used for the gas flow of dispersion guide crucible internal evaporation.

2. A planar evaporation source according to claim 1, wherein: the heating device comprises a heating wire, and the heating wire is arranged around the outer side surface of the crucible.

3. A planar evaporation source according to claim 1, wherein: the heating device further comprises a conduit heating wire which is arranged on the outer side surface of the connecting conduit in a surrounding mode.

4. A planar evaporation source according to claim 1, wherein: the coating by vaporization board is provided with the heating splint, the heating splint dress clamp is between the top surface and the bottom surface of coating by vaporization board, and the heating splint that are located the top surface run through the discharge gate setting of coating by vaporization board.

5. A planar evaporation source according to claim 1, wherein: and a support column is arranged between the dispersion plate and the bottom surface of the cavity of the evaporation plate.

6. A planar evaporation source according to claim 1, wherein: the dispersion holes and the discharge hole are arranged in a staggered mode.