CN113957391A - Vacuum coating device adopting core rod heating structure to uniformly distribute metal steam - Google Patents
Vacuum coating device adopting core rod heating structure to uniformly distribute metal steam Download PDFInfo
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- CN113957391A CN113957391A CN202010702098.0A CN202010702098A CN113957391A CN 113957391 A CN113957391 A CN 113957391A CN 202010702098 A CN202010702098 A CN 202010702098A CN 113957391 A CN113957391 A CN 113957391A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Abstract
The invention discloses a vacuum coating device for uniformly distributing metal vapor by adopting a core rod heating structure, which comprises a crucible, wherein an induction heater for heating metal liquid in the crucible to form the metal vapor is arranged on the outer side of the crucible, the top of the crucible is connected with a flow distribution box body through a vapor metal pipeline, a horizontal core rod and a pressure stabilizing plate are arranged in the flow distribution box body, the core rod is positioned below the pressure stabilizing plate, a coating nozzle is arranged at the top of the flow distribution box body, an induction coil is arranged on the outer side of the flow distribution box body, and a pressure regulating valve is arranged on the vapor metal pipeline; a plurality of heating holes are formed in the core rod, resistance wires are arranged in the heating holes, and a plurality of impact grooves are formed in the surface of the core rod, which faces the steam metal pipeline; and the inner wall of the flow distribution box body is provided with a buffer groove, and the buffer groove corresponds to the position of the core rod. The invention can form uniform coating on the surface of the steel plate when the high-temperature steam contacts the low-temperature steel plate.
Description
Technical Field
The invention relates to the technical field of vacuum coating, in particular to a vacuum coating device which adopts a core rod heating structure to uniformly distribute metal steam.
Background
Physical Vapor Deposition (PVD) refers to a process technique in which a metal to be plated is heated under vacuum conditions and deposited in a gaseous state onto a substrate to form a plated film. The heating methods are classified into electric heating (resistive or inductive), electron beam gun heating (EBPVD), and the like. Vacuum coating is widely applied to the industries of electronics, glass, plastics and the like as a surface modification and coating process, and the main advantages of the vacuum coating technology are environmental protection, good coating performance and diversity of coatable substances. The key of the vacuum coating technology applied to the continuous strip steel lies in several aspects of continuous coating production, large-area, high-speed, large-scale production and the like, and from the eighties of the last century, a great deal of research is carried out on the technology by all major steel companies in the world, and with the maturity of hot galvanizing and electrogalvanizing technologies, the technology is paid unprecedented attention and is artificially an innovative surface coating technology.
The key point in the vacuum coating process is how to obtain a coating with uniform thickness by arranging the nozzles. The data disclosed in the present foreign countries mainly include the following aspects:
1) evaporation crucible and flow distribution nozzle integrated structure
European patents BE1009321a6 and BE1009317a61 disclose crucible nozzle structures as shown in fig. 1 and 2, respectively, in the structure of fig. 1, a cover 2 is added on the upper part of a crucible 1, so that a nozzle structure is formed between the upper cover 2 and the furnace wall for direct injection of evaporated metal. In the configuration of fig. 2, the filter plate 3 is then added to the evaporation crucible and then used for the injection of the metal vapor from the top slit nozzle. In the design process of the nozzles of the two devices, one adopts a Laval nozzle structure, the other adopts a convergent nozzle, and the orientation positions of the nozzles are that one sprays laterally and the other sprays vertically.
Related evaporating crucibles and nozzle arrangements are also disclosed in the patents JPS59177370A, US4552092A, and fig. 3 shows a crucible nozzle arrangement with automatic replenishment of molten metal, with a wide outlet for the nozzle 4 and a heater 5 also arranged in the upper part of the crucible for heating of steam and the like. Fig. 4 shows a crucible nozzle structure in which the structure is extended by a side arc 6, spraying laterally, and a heating tube 7 is also arranged on the outside of the crucible wall for heating the wall surface.
2) Split type structure of evaporation crucible and flow distribution nozzle
In patent WO2018/020311a1, a split crucible nozzle structure is disclosed, as shown in fig. 5, in which a crucible is connected at the bottom to a molten metal supply tank 8, the upper part of which feeds a metal vapor through a split duct 9 to a tubular distributor and a front end vapor nozzle, and the metal vapor is then injected through the nozzle at a high speed to a metal plate.
Patent CN103249860A discloses a split type flow distributor and nozzle structure, as shown in fig. 6, steam is sent to an upper horizontal pipe 10 through a pipe, and the top of the horizontal pipe 10 is provided with a porous nozzle for uniformly spraying metal steam on the surface of a metal plate.
In patent CN101175866A, a metal steam distributor and a nozzle form are disclosed, as shown in fig. 7, which shows a cross-sectional form of the nozzle, a wire is wound outside a distributor pipe 11 to realize heating of the pipe, the nozzle part is a square shell, as shown in fig. 8, a circular pipe made of another material is nested inside the square shell 12 for injecting metal steam, and a steam outlet form used by the nozzle is a porous type.
These patents refer to the specific form of the nozzles used in the coating process, but do not indicate the uniformity of the coating applied by these nozzles, which is critical to the subsequent bending and stamping operations.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a vacuum coating device for uniformly distributing metal steam by adopting a core rod heating structure.
In order to achieve the purpose, the invention adopts the following technical scheme:
a vacuum coating device adopting a core rod heating structure to uniformly distribute metal vapor comprises a crucible, wherein an induction heater used for heating metal liquid in the crucible to form the metal vapor is arranged on the outer side of the crucible, the top of the crucible is connected with a flow distribution box body through a steam metal pipeline, a horizontal core rod and a pressure stabilizing plate are arranged in the flow distribution box body, the core rod is positioned below the pressure stabilizing plate, a coating nozzle is arranged at the top of the flow distribution box body, an induction coil is arranged on the outer side of the flow distribution box body, and a pressure regulating valve is arranged on the steam metal pipeline;
a plurality of heating holes are formed in the core rod, resistance wires are arranged in the heating holes, and a plurality of impact grooves are formed in the surface of the core rod, which faces the steam metal pipeline;
and the inner wall of the flow distribution box body is provided with a buffer groove, and the buffer groove corresponds to the position of the core rod.
Preferably, the core rod is in a cylindrical shape of a circle, an ellipse, a trapezoid or a rectangle.
Preferably, the shape of the impact groove is any one and/or combination of a circle, an ellipse, a trapezoid or a rectangle.
Preferably, the impingement slots are arranged in a continuous type arrangement and/or a discontinuous type arrangement.
Preferably, the depth of the impact groove, the distance between the edge of one side of the mandrel and the buffer groove, the depth of the buffer groove and the total power of the resistance wire are set as follows:
when the pressure of the metal steam in the steam metal pipeline is 50000-100000 Pa, the depth of the impact groove is 8-10 mm, the distance between the edge of one side of the core rod and the buffer groove is 4-6 mm, the depth of the buffer groove is 5-6 mm, and the total power of the resistance wire is 15-20 KW;
when the pressure of the metal steam in the steam metal pipeline is 10000-50000 Pa, the depth of the impact groove is 5-8 mm, the distance between the edge of one side of the core rod and the buffer groove is 3-4 mm, the depth of the buffer groove is 4-5 mm, and the total power of the resistance wire is 10-15 KW;
when the pressure of the metal steam in the steam metal pipeline is 1000-10000 Pa, the depth of the impact groove is 2-5 mm, the distance between the edge of one side of the core rod and the buffer groove is 2-3 mm, the depth of the buffer groove is 3-4 mm, and the total power of the resistance wire is 5-10 KW.
Preferably, the pressure stabilizing plate is of a porous structure, and the total pore area S of the pressure stabilizing plateTotal area of poresAnd the area S of the outlet position of the coating nozzleAn outletThe ratio of the components is greater than or equal to 0.1, namely:
Stotal area of pores/SAn outlet≥0.1。
Preferably, the hole pattern on the pressure stabilizing plate is a round hole, a square hole or a triangular hole.
Preferably, the pore trend on the voltage stabilizing plate is a straight line or a curve.
Preferably, the outlet of the coating nozzle is arranged in a slit type or a porous type, and the area S of the outlet position of the coating nozzleAn outletA position S connected with the top of the crucible and the steam metal pipelineInlet portThe ratio of the components is more than or equal to 0.05-5, namely:
San outlet/SInlet port≥0.05～5。
Preferably, when the coating nozzle is in a slit shape, the linear shape of the coating nozzle is a straight line or a curved line, and when the coating nozzle is in a porous shape, the linear shape of the coating nozzle is a rectangle, a circle or a trapezoid.
Preferably, the core rod is connected with the flow distribution box body in a threaded mode or an embedded mode.
The vacuum coating device adopts a core rod heating structure to uniformly distribute metal steam, the metal steam is obtained by melting and evaporating metal liquid by an induction heater through induction heating of a crucible, the metal steam enters a flow distribution box body through a steam metal pipeline, an induction coil is arranged on the outer side of the flow distribution box body to heat, a core rod is arranged in the flow distribution box body, the core rod is fixed in the flow distribution box body in a threaded or embedded mode, and a heating hole is formed in the core rod and used for introducing a resistance wire to heat. And opening the pressure regulating valve after the nozzle and the core rod are heated to the required temperature according to the temperature of the metal steam evaporation, so that the metal steam enters the flow distribution box and impacts the surface of the core rod. The surface of the core rod is provided with an impact groove for guiding metal steam, the impact groove is matched with the interior of the flow distribution box body for flow distribution, the impact groove is used for uniformly and evenly distributing the vertically arriving metal steam to the distribution cavity, the stable pressure plate is arranged in the distribution cavity and used for carrying out secondary distribution on the metal steam entering the distribution cavity, and then the metal steam is sprayed out from the coating nozzle and contacts the pretreated metal plate at a high speed to form a uniform metal coating.
Drawings
FIG. 1 is a schematic illustration of European patent BE1009321A 6;
FIG. 2 is a schematic illustration of European patent BE1009317A 61;
FIG. 3 is a schematic diagram of patent JPS 59177370A;
fig. 4 is a schematic view of patent US 4552092A;
FIG. 5 is a schematic representation of patent WO2018/020311A 1;
FIG. 6 is a schematic illustration of patent CN 103249860A;
FIG. 7 is a schematic illustration of patent CN 101175866A;
FIG. 8 is a schematic view of the square housing of FIG. 7;
FIG. 9 is a schematic view showing the construction of the vacuum coating apparatus of the present invention;
FIG. 10 is a schematic view showing the depth of the impact groove, the distance between the edge of one side of the mandrel and the buffer groove, and the depth of the buffer groove in the vacuum coating apparatus of the present invention;
FIG. 11 is a schematic view showing the classification of the parameter areas in the vacuum deposition apparatus of FIG. 9.
FIG. 12 is a schematic view showing a discontinuous arrangement of the impingement slots on the mandrel in the vacuum deposition apparatus of the present invention;
FIG. 13 is a schematic view showing the arrangement of the impingement slots on the mandrel in a continuous fashion in the vacuum coating apparatus of the present invention.
Detailed Description
The technical scheme of the invention is further explained by combining the drawings and the embodiment.
Referring to fig. 9, the vacuum coating apparatus for uniformly distributing metal vapor by using a mandrel heating structure according to the present invention includes a crucible 13, an induction heater 16 for heating a molten metal 14 in the crucible 13 to form metal vapor 15 is disposed outside the crucible 13, a distribution box 18 is connected to the top of the crucible 13 through a vapor metal pipe 17, a horizontal mandrel 19 and a pressure stabilizing plate 20 are disposed in the distribution box 18, the mandrel 19 is located below the pressure stabilizing plate 20, the mandrel 19 is connected to the distribution box 18 in a threaded manner or an embedded manner, a coating nozzle 21 is disposed at the top of the distribution box 18, an induction coil 22 is disposed outside the distribution box 18, and a pressure regulating valve 23 is disposed on the vapor metal pipe 17.
A plurality of axial heating holes 24 are formed in the core rod 19, resistance wires are arranged in the heating holes 24 and used for heating the core rod 19, and a plurality of impact grooves 25 are formed in the surface, facing the steam metal pipeline 17, of the core rod 19.
The shape of the core rod 19 can be cylindrical with various shapes such as round, oval, trapezoid or rectangle, and the main function is to buffer and distribute the metal vapor 15 entering the distribution box 18 from the vapor metal pipe 17, and then the metal vapor 15 flows along the surface of the core rod 19.
As shown in fig. 12, the impact grooves 25 may be in various shapes (such as circular, oval, trapezoidal and/or rectangular) arranged in a discontinuous manner, the impact grooves 25 greatly increase the roughness of the surface of the mandrel 19 to some extent, so as to form a gas "impact pad", and the metal vapor 15 plays a great role in buffering and rubbing during the impact on the impact grooves 25.
As shown in fig. 13, the impact grooves 25 may be arranged in a continuous manner, and mainly have a structure in which the impact grooves spread from the center toward the edge of the mandrel 19, and the impact grooves 25 may have a structure in which the impact grooves spread linearly, or may have a polygonal line or a curved line.
The inner wall of the distribution box 18 is provided with a buffer groove 26, and the buffer groove 26 corresponds to the position of the core rod 19.
The working process of the vacuum coating device is as follows:
1) the metal block is melted into molten metal 14 in the crucible 13 under the action of the induction heater 16, and the molten metal 14 starts to vaporize under higher superheat degree and low pressure to gradually form metal vapor 15;
2) at the beginning stage, the pressure regulating valve 23 on the steam metal pipeline 17 connected with the crucible 13 is in a closed state, the metal steam 15 in the inner cavity of the crucible 13 is continuously increased along with the continuous vaporization of the molten metal 14, and when the pressure in the inner cavity of the crucible 13 reaches a certain value, the pressure regulating valve 23 is opened to ensure that the metal steam flows out at a certain pressure;
3) at the moment, the induction heater 16 needs to be increased simultaneously so as to supplement the pressure reduced by the opening of the pressure regulating valve 23, and the power range of the induction heater 16 is adjusted so as to keep the pressure of the metal steam 15 in the inner cavity of the crucible 13 in a constant range;
4) after the pressure regulating valve 23 is opened, the metal steam 15 flows forwards along the steam metal pipeline 17, when the metal steam enters the flow distribution box 18, the original high-speed pipeline airflow is subjected to resistance when passing through the core rod 19 due to the action of the core rod 19, and the airflow flows along the surface of the core rod 19;
5) the surface of the core rod 19 is provided with an impact groove 25 for distributing air flow on the surface of the core rod 19 to a position far away from a main air flow stream, the impact groove 25 and a buffer groove 26 are used together to deliver uniform air flow of the metal steam 15 to a distribution cavity, a heating hole 24 for placing a resistance wire is arranged in the core rod 19 and used for heating the core rod 19 in the working process, so that the flowing metal steam 15 is not solidified, and the outer side of the flow distribution box body 18 is provided with an induction coil 22 for heating the whole flow distribution box body 18 so that the metal steam 15 in the flow distribution box body is not solidified in the flow process;
6) the distribution cavity is internally provided with a pressure stabilizing plate 20 for performing secondary buffer distribution on the airflow of the metal steam 15 entering the distribution cavity, and then uniformly discharging the metal steam 15 from a coating nozzle 21 at the top of the distribution box 18;
7) because the outlet of the coating nozzle 21 is narrow, the metal steam 15 forms a larger speed when flowing out, at the moment, the moving pretreatment metal plate 27 is arranged above the coating nozzle, and because the temperature of the metal steam 15 is higher, the metal steam is rapidly solidified when meeting the pretreatment metal plate 27 with lower temperature, and a metal coating 28 is formed.
The pretreated metal plate 27 is cleaned by a plasma device before vacuum coating, and the preheating temperature reaches 80-300 ℃.
Referring to fig. 10 to 11, the depth D1 of the impact groove 25, the distance D2 between the one-side edge of the mandrel 19 and the buffer groove 26, the depth D3 of the buffer groove 26, and the total power setting of the resistance wire are related to the pressure of the metal vapor 15 as follows:
when the pressure of the metal steam 15 in the steam metal pipeline 17 is 50000-100000 Pa, the depth D1 of the impact groove 25 is 8-10 mm, the distance D2 between the edge of one side of the core rod 19 and the buffer groove 26 is 4-6 mm, the depth D3 of the buffer groove 26 is 5-6 mm, and the total power of the resistance wire is 15-20 KW;
when the pressure of metal steam 15 in the steam metal pipeline 17 is 10000-50000 Pa, the depth D1 of the impact groove 25 is 5-8 mm, the distance D2 between the edge of one side of the core rod 19 and the buffer groove 26 is 3-4 mm, the depth D3 of the buffer groove 26 is 4-5 mm, and the total power of the resistance wire is 10-15 KW;
when the pressure of the metal steam 15 in the steam metal pipeline 17 is 1000-10000 Pa, the depth D1 of the impact groove 25 is 2-5 mm, the distance D2 between the edge of one side of the core rod 19 and the buffer groove 26 is 2-3 mm, the depth of the buffer groove 26 is 3-4 mm, and the total power of the resistance wire is 5-10 KW.
The pressure stabilizing plate 20 is provided with a porous structure, and the total pore area S of the pressure stabilizing plate 20Total area of poresAnd the area S of the outlet position of the coating nozzle 21An outletThe ratio of the components is greater than or equal to 0.1, namely:
Stotal area of pores/SAn outlet≥0.1。
The hole pattern on the pressure stabilizing plate 20 is various shapes such as a round hole, a square hole or a triangular hole.
The pore direction of the pressure stabilizer plate 20 is in various forms such as a straight line, a curved line or a multi-layer structure.
The outlet of the coating nozzle 21 is provided with a slit type or a porous type, and the area S of the outlet position of the coating nozzle 21An outletConnecting position S with the top of the crucible 13 and the steam metal pipe 17Inlet portThe ratio of the components is more than or equal to 0.05-5, namely:
San outlet/SInlet port≥0.05～5。
When the plating nozzle 21 is formed in a slit shape, the line shape thereof is a straight line shape or a curved line shape, and when the plating nozzle 21 is formed in a porous shape, the line shape thereof is various shapes such as a rectangular shape, a circular shape, or a trapezoidal shape.
The material of the coating nozzle 21 may be: graphite, ceramic or metal, and other materials that can be processed.
Examples
The surface of the pretreated metal plate 27 is subjected to zinc evaporation, the width of the pretreated metal plate 27 is 1200mm, and after the pretreated metal plate 27 is cleaned and dried, the pretreated metal plate 27 is heated to 150 ℃. The crucible 13 is heated by the induction heater 16 to evaporate zinc, and the power is controlled to make the pressure of the zinc vapor in the crucible 13 reach 30000Pa, and the pressure regulating valve 23 is in a closed state. When the gas pressure in the crucible 13 reaches 30000Pa, the pressure regulating valve 23 is opened, the metal vapor 15 enters the distribution box 18 through the vapor metal pipe 17, and the core rod 19 and the pressure stabilizing plate 20 are arranged in the distribution box 18.
The core rod 19 is provided in a cylindrical shape, and impact grooves 25 are arranged in a discontinuous arrangement on the surface, the depth of the impact grooves 25 is 6mm, and the impact grooves 25 are rectangular grooves, as shown in fig. 12.
The depth of a buffer groove 26 in the flow distribution box body 18 is 4mm, the distance from the edge of the core rod 19 to the inner wall of the buffer groove 26 is 3mm, and the total power of resistance wire arrangement in a heating hole 24 on the core rod 19 is 12 KW.
The pressure-stabilizing plate 20 is of a porous structure STotal area of pores/SAn outlet＝2.5。
The working pressure in the coating nozzle 21 is 20000Pa, the coating nozzle 21 is made of graphite, the outlet of the coating nozzle 21 is in a slit shape and is rectangular, wherein SAn outlet/SInlet port＝0.95。
It should be understood by those skilled in the art that the above embodiments are only for illustrating the present invention and are not to be used as a limitation of the present invention, and that changes and modifications to the above described embodiments are within the scope of the claims of the present invention as long as they are within the spirit and scope of the present invention.
Claims (11)
1. The utility model provides an adopt vacuum coating device of plug heating structure evenly distributed metal vapor which characterized in that: the crucible comprises a crucible, wherein an induction heater used for heating molten metal in the crucible to form metal steam is arranged on the outer side of the crucible, the top of the crucible is connected with a flow distribution box body through a steam metal pipeline, a horizontal core rod and a pressure stabilizing plate are arranged in the flow distribution box body, the core rod is positioned below the pressure stabilizing plate, a coating nozzle is arranged on the top of the flow distribution box body, an induction coil is arranged on the outer side of the flow distribution box body, and a pressure regulating valve is arranged on the steam metal pipeline;
a plurality of heating holes are formed in the core rod, resistance wires are arranged in the heating holes, and a plurality of impact grooves are formed in the surface of the core rod, which faces the steam metal pipeline;
and the inner wall of the flow distribution box body is provided with a buffer groove, and the buffer groove corresponds to the position of the core rod.
2. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure according to claim 1, wherein: the core rod is in a cylindrical shape of a circle, an ellipse, a trapezoid or a rectangle.
3. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure according to claim 1, wherein: the shape of the impact groove is any one and/or various combinations of a circle, an ellipse, a trapezoid or a rectangle.
4. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure according to claim 3, wherein: the impingement slots are arranged in a continuous type arrangement and/or a discontinuous type arrangement.
5. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure according to claim 1, wherein: the depth of the impact groove, the distance between the edge of one side of the core rod and the buffer groove, the depth of the buffer groove and the total power of the resistance wire are set as follows:
when the pressure of the metal steam in the steam metal pipeline is 50000-100000 Pa, the depth of the impact groove is 8-10 mm, the distance between the edge of one side of the core rod and the buffer groove is 4-6 mm, the depth of the buffer groove is 5-6 mm, and the total power of the resistance wire is 15-20 KW;
when the pressure of the metal steam in the steam metal pipeline is 10000-50000 Pa, the depth of the impact groove is 5-8 mm, the distance between the edge of one side of the core rod and the buffer groove is 3-4 mm, the depth of the buffer groove is 4-5 mm, and the total power of the resistance wire is 10-15 KW;
when the pressure of the metal steam in the steam metal pipeline is 1000-10000 Pa, the depth of the impact groove is 2-5 mm, the distance between the edge of one side of the core rod and the buffer groove is 2-3 mm, the depth of the buffer groove is 3-4 mm, and the total power of the resistance wire is 5-10 KW.
6. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure according to claim 1, wherein: the pressure stabilizing plate is of a porous structure, and the total pore area S of the pressure stabilizing plateTotal area of poresAnd the area S of the outlet position of the coating nozzleAn outletThe ratio of the components is greater than or equal to 0.1, namely:
Stotal area of pores/SAn outlet≥0.1。
7. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure according to claim 6, wherein: the hole pattern on the pressure stabilizing plate is a round hole, a square hole or a triangular hole.
8. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure according to claim 7, wherein: the pore trend on the pressure stabilizing plate is a straight line or a curve.
9. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure according to claim 1, wherein: the outlet of the coating nozzle is arranged in a slit shape or a porous shape, and the area S of the outlet position of the coating nozzleAn outletA position S connected with the top of the crucible and the steam metal pipelineInlet portThe ratio of the components is more than or equal to 0.05-5, namely:
San outlet/SInlet port≥0.05～5。
10. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure according to claim 9, wherein: when the coating nozzle is in a slit shape, the linear shape of the coating nozzle is a straight line shape or a curved line shape, and when the coating nozzle is in a porous shape, the linear shape of the coating nozzle is a rectangle, a circle or a trapezoid.
11. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure according to claim 1, wherein: the core rod is connected with the flow distribution box body in a threaded mode or an embedded mode.
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