CN112708855B - Vacuum coating device with diversion type vacuum coating nozzle - Google Patents
Vacuum coating device with diversion type vacuum coating nozzle Download PDFInfo
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- CN112708855B CN112708855B CN201911021320.4A CN201911021320A CN112708855B CN 112708855 B CN112708855 B CN 112708855B CN 201911021320 A CN201911021320 A CN 201911021320A CN 112708855 B CN112708855 B CN 112708855B
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- stabilizing plate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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Abstract
The invention discloses a vacuum coating device with a diversion type vacuum coating nozzle, which comprises a crucible, wherein an induction heater is arranged on the outer side of the crucible, the top of the crucible is connected with a flow distribution box body through a steam pipeline, and the flow distribution box body is connected with a flow distribution box body through a steam pipelineA horizontal pressure stabilizing plate is arranged in the box body, the top of the flow distribution box body is connected with a coating nozzle, and a pressure regulating valve is arranged on the steam pipeline; the pressure stabilizing plate is of a porous structure; a flow guide column is arranged at the connecting position of the flow distribution box body and the steam pipeline, the flow guide column is positioned below the pressure stabilizing plate, and the radial section area S of the flow guide column Diversion And the radial cross-sectional area S of the steam pipeline Inlet port The ratio of the components is greater than or equal to 0.1, namely: s. the Diversion /S Inlet port Not less than 0.1. The invention can form uniform plating on the surface of the steel plate when the high-temperature steam contacts with the low-temperature steel plate.
Description
Technical Field
The invention relates to the technical field of vacuum coating, in particular to a vacuum coating device with a diversion type vacuum coating nozzle.
Background
Physical Vapor Deposition (PVD) refers to a process technique in which a metal to be plated is heated under vacuum conditions and deposited in a gaseous state onto a substrate to form a plated film. The heating methods are classified into electric heating (resistive or inductive), electron beam gun heating (EBPVD), and the like. Vacuum coating is widely applied to the industries of electronics, glass, plastics and the like as a surface modification and coating process, and the main advantages of the vacuum coating technology are environmental protection, good coating performance and diversity of coatable substances. The key of the vacuum coating technology applied to the continuous strip steel lies in several aspects of continuous coating production, large-area, high-speed, large-scale production and the like, and from the eighties of the last century, a great deal of research is carried out on the technology by all major steel companies in the world, and with the maturity of hot galvanizing and electrogalvanizing technologies, the technology is paid unprecedented attention and is artificially an innovative surface coating technology.
The key point in the vacuum coating process is how to obtain a coating with uniform thickness by arranging the nozzles. The current published data in foreign countries mainly includes the following aspects:
1) Evaporation crucible and flow distribution nozzle integrated structure
European patents BE1009321A6 and BE1009317a61 disclose crucible nozzle arrangements as shown in fig. 1 and 2, respectively, in which arrangement fig. 1 the upper part of the crucible 1 is provided with a cover 2, so that a nozzle arrangement is formed between the cover 2 and the furnace wall for direct injection of evaporated metal. In the configuration of fig. 2, the filter plate 3 is then added to the evaporation crucible and then used for the injection of the metal vapor from the top slit nozzle. In the design process of the nozzles of the two devices, one adopts a Laval nozzle structure, the other adopts a convergent nozzle, and the orientation positions of the nozzles are that one sprays laterally and the other sprays vertically.
Related evaporating crucibles and nozzle arrangements are also disclosed in the patents JPS59177370A, US4552092A, fig. 3 shows a nozzle arrangement for crucibles with automatic replenishment of molten metal, with a wide outlet for the nozzle 4 and a heater 5 arranged above the crucible for heating of steam and the like. Fig. 4 shows a crucible nozzle structure in which the structure is extended by a side arc 6, spraying laterally, and a heating tube 7 is also arranged on the outside of the crucible wall for heating the wall surface.
2) Split type structure of evaporation crucible and flow distribution nozzle
In patent WO2018/020311A1, a split crucible nozzle structure is disclosed, as shown in fig. 5, in which a crucible is connected at the bottom to a molten metal supply tank 8, and the upper portion thereof feeds a metal vapor to a tubular distributor and a vapor nozzle at the front end through a split pipe 9, and then the metal vapor is sprayed through the nozzle at a high speed to a metal plate.
Patent CN103249860A discloses a split flow distributor and nozzle structure, as shown in fig. 6, steam is sent to the upper horizontal pipe 10 through a pipe, and the top of the horizontal pipe 10 has a porous nozzle for uniformly spraying metal steam on the surface of the metal plate.
CN101175866A discloses a metal steam distributor and a nozzle, as shown in fig. 7, the cross section of the nozzle is a form, a wire is wound outside a pipe 11 of the distributor to heat the pipe, the nozzle is a square casing, as shown in fig. 8, a circular pipe made of another material is nested inside the square casing 12 to spray metal steam, and a steam outlet used by the nozzle is a porous type.
These patents refer to the specific form of the nozzles used in the coating process, but do not indicate the uniformity of the coating applied by these nozzles, which is critical to the subsequent bending and stamping operations.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a vacuum coating apparatus with a diversion-type vacuum coating nozzle, which can form a uniform jet flow, so that a uniform coating layer is formed on the surface of a steel plate when high-temperature steam contacts a low-temperature steel plate.
In order to realize the purpose, the invention adopts the following technical scheme:
a vacuum coating device with a diversion type vacuum coating nozzle comprises a crucible, wherein an induction heater is arranged on the outer side of the crucible, the top of the crucible is connected with a flow distribution box body through a steam pipeline, a pressure stabilizing plate arranged horizontally is arranged in the flow distribution box body, the top of the flow distribution box body is connected with a coating nozzle, and the steam pipeline is provided with a pressure regulating valve;
the pressure stabilizing plate is of a porous structure;
a flow guide column is arranged above the connection position of the flow distribution box body and the steam pipeline, the flow guide column is positioned below the pressure stabilizing plate, and the radial section area S of the flow guide column Diversion And the radial cross-sectional area S of the steam pipeline Inlet port The ratio of the components is greater than or equal to 0.1, namely:
S diversion /S Inlet port ≥0.1。
The radial section of the flow guide column is circular, triangular, trapezoidal or rectangular, and the flow guide column is positioned above the connection position of the steam pipeline and the flow distribution box body.
The shape of the pore on the voltage stabilizing plate is rectangular, circular or triangular, and the pore trend is a straight line, a curve or a multilayer structure.
The total area S of the pores on the voltage stabilizing plate Total area of pores And the area S of the position of the outlet of the coating nozzle An outlet The ratio of the two is greater than or equal to 0.1, namely:
S total area of pores /S An outlet ≥0.1。
The outlet of the coating nozzle is in a slit shapeOr porous type, and the area S of the outlet position of the coating nozzle An outlet And the radial cross-sectional area S of the steam pipeline Inlet port The ratio of the components is more than or equal to 0.05-5, namely:
S an outlet /S Inlet port ≥0.05～5。
The outlet of the slit type coating nozzle is arranged in a linear shape or a curved shape.
The outlet of the porous coating nozzle is rectangular, circular or trapezoidal.
The coating nozzle is made of graphite, ceramic or metal.
The invention provides a vacuum coating device with a flow guide type vacuum coating nozzle, wherein metal steam is obtained by melting and evaporating an induction crucible, the steam enters a flow distribution box body through a pipeline, a flow guide column and a pressure stabilizing plate are arranged in the flow distribution box body, the flow direction of the metal steam is changed after the metal steam passes through the flow guide column, the gas is favorably subjected to primary distribution, the metal steam is continuously buffered by the pressure stabilizing plate in the flow distribution box body, the metal steam is further subjected to pressure equalization, the metal steam is sprayed out from the coating nozzle after passing through the pressure stabilizing plate to form uniform spraying flow, and when high-temperature metal steam is contacted with a low-temperature steel plate, a uniform coating is formed on the surface of the steel plate.
Drawings
FIG. 1 is a schematic view of the structure of a crucible nozzle of European patent BE1009321A 6;
FIG. 2 is a schematic view of the structure of the crucible nozzle of European patent BE1009317A 61;
FIG. 3 is a schematic view of a crucible nozzle structure of patent JPS 59177370A;
FIG. 4 is a schematic view of the structure of the crucible and nozzle of the patent US 4552092A;
FIG. 5 is a schematic view of the structure of a crucible nozzle of patent WO2018/020311A 1;
FIG. 6 is a schematic structural view of a split-type flow distributor and nozzle of patent CN 103249860A;
figure 7 is a schematic cross-sectional view of a nozzle of patent CN 101175866A;
FIG. 8 is a schematic view of the annular duct structure of the square housing of FIG. 7;
FIG. 9 is a schematic view showing the structure of the vacuum coating apparatus of the present invention;
FIG. 10 is a schematic view of the vacuum deposition apparatus of FIG. 9 illustrating the classification of parameter areas;
FIG. 11 isbase:Sub>A schematic cross-sectional view taken along line A-A of FIG. 9;
FIG. 12 is a schematic cross-sectional view taken along line B-B of FIG. 9;
FIG. 13 is a schematic view of an embodiment of the vacuum coating apparatus of FIG. 9.
Detailed Description
The technical scheme of the invention is further explained by combining the drawings and the embodiment.
Referring to fig. 9 to 12, the vacuum coating apparatus with a diversion type vacuum coating nozzle provided by the present invention includes a crucible 13, a metal liquid 14 is contained in the crucible 13, an induction heater 15 is disposed outside the crucible 13, the top of the crucible 13 is connected to a rectangular distribution box 17 through a steam pipe 16, a pressure regulating valve 18 is disposed on the steam pipe 16, a horizontally disposed pressure stabilizing plate 19 is disposed in the distribution box 17, the pressure stabilizing plate 19 is configured to be a rectangle adapted to the inside of the distribution box 17, and the top of the distribution box 17 is connected to a coating nozzle 20.
Preferably, the pressure-stabilizing plate 19 is provided with a porous structure, the pores 191 on the pressure-stabilizing plate 19 are rectangular, circular (see fig. 11) or triangular, and the pore direction is a straight line, a curve or a multilayer structure.
Preferably, the total aperture area S of all the apertures 191 on the pressure stabilizing plate 19 Total area of pores And the area S of the outlet position of the coating nozzle 20 An outlet The ratio of the two is greater than or equal to 0.1, namely:
S total area of pores /S An outlet ≥0.1。
Preferably, a flow guiding column 21 is further disposed in the flow distribution box 17, the flow guiding column 21 is located above a connection position of the flow distribution box 17 and the steam pipeline 16 and below the pressure stabilizing plate 19, and a radial cross-sectional shape of the flow guiding column 21 may be a circular shape, a triangular shape, a trapezoidal shape, a rectangular shape, or any other shape, and its main function is to block an airflow from directly entering a hole 191 on the pressure stabilizing plate 19 through the steam pipeline 16, but the airflow must pass through the flow guiding column 21 to form a dispersed flow and then enter the pressure stabilizing plate 19, so that a movement path of the airflow is indirectly extended, and a sufficient uniformity is formed before entering the pressure stabilizing plate 19. The diversion column 21 is located below the pressure stabilizing plate 19, so that a flow control area 22 is formed between the diversion column 21 and the pressure stabilizing plate 19.
Referring to fig. 10, the radial cross-sectional area S of the diversion column 21 Diversion And the radial cross-sectional area S of the steam pipeline 16 Inlet The ratio of the two is greater than or equal to 0.1, namely:
S diversion /S Inlet port ≥0.1。
Preferably, the outlet of the coating nozzle 20 is a slit type or a porous type, the outlet of the slit type coating nozzle is a straight line or a curved line, and the outlet of the porous type coating nozzle is a rectangle, a circle or a trapezoid. And the area S of the outlet position of the coating nozzle 20 An outlet And the radial cross-sectional area S of the steam pipeline 16 Inlet port The ratio of the components is more than or equal to 0.05-5, namely:
S an outlet /S Inlet port ≥0.05～5。
Preferably, the internal pressure of the coating nozzle 20 is 500 to 500000Pa during operation.
Preferably, the coating nozzle 20 is made of graphite, ceramic or metal, and other materials that can be processed.
Preferably, the molten metal 14 may contain metals such as zinc, magnesium, aluminum, tin, nickel, copper, iron, and low melting point (less than 2000 ℃) oxides of these elements.
Preferably, the steel plate 100 is cleaned by a plasma device before vacuum coating, and the preheating temperature reaches 80-300 ℃.
The vacuum coating device comprises the following specific use steps:
1) The metal block is melted into molten metal 14 in the crucible 13 under the action of the induction heater 15, and the molten metal 14 starts to vaporize under higher superheat degree and lower pressure to gradually form metal vapor 23;
2) At the beginning, the pressure regulating valve 18 on the steam pipeline 16 connected with the crucible 13 is in a closed state, the steam pressure in the inner cavity of the crucible 13 is continuously increased along with the continuous vaporization of the molten metal 14, when the pressure in the inner cavity of the crucible 13 reaches a certain pressure, the pressure regulating valve 18 is opened to enable the pressure to keep a certain pressure to flow out, at the moment, the induction heater 15 needs to be simultaneously increased to enable the pressure reduced by the opening of the pressure regulating valve 18 to be supplemented, and the power range of the induction heater 15 is adjusted to enable the pressure in the inner cavity of the crucible 13 to be kept in a constant range;
3) After the pressure regulating valve 18 is opened, the metal steam 23 flows forwards along the steam pipeline 16, and when the metal steam enters the flow distribution box body 17, the existing direction of the original high-speed pipeline is changed due to the action of the flow guide column 21, so that dispersion is formed to a certain extent. After that, the dispersed high-speed flow pressure is reduced due to the action of the pressure stabilizing plate 19 and uniformly flows out along the pores 191 on the pressure stabilizing plate 19 and then uniformly flows out from the coating nozzle 20 at the top of the distribution box body 17;
4) Because the outlet of the coating nozzle 20 is narrow, the metal vapor 23 flows out at a high speed, and the steel plate 100 moving above the coating nozzle (as shown in fig. 9 and 13, the steel plate 100 moves from right to left at a certain speed V) at this time, the metal vapor 23 has a high temperature, and is rapidly solidified when encountering the steel plate 100 with a low temperature, so that a uniform metal coating layer 24 is formed.
Examples
As shown in FIG. 13, the surface of the steel sheet 100 was subjected to zinc deposition, the steel sheet 100 was cleaned and dried to have a width of 1000mm, and then the steel sheet 100 was heated to 120 ℃. The zinc is evaporated by adopting an induction heater 15, the zinc in the crucible 13 reaches 20000Pa pressure by controlling power, the pressure regulating valve 18 is in a closed state at the moment, when the gas pressure in the crucible 13 reaches 20000Pa, the pressure regulating valve 18 is opened, the metal steam 23 enters the flow distribution box body 17 through the steam pipeline 16, the radial section of the flow guide column 21 adopts an equilateral triangle, wherein S is Diversion /S Inlet port =0.5, the voltage stabilizing plate 19 is a porous structure, S Total area of pores /S An outlet =3, the internal pressure of the coating nozzle 20 is 5000Pa, the coating nozzle 20 is made of graphite, the outlet of the coating nozzle 20 is slit-shaped, andrectangle, S An outlet /S Inlet port ＝0.95。
It should be understood by those skilled in the art that the above embodiments are only for illustrating the present invention and are not to be used as a limitation of the present invention, and that changes and modifications to the above described embodiments are within the scope of the claims of the present invention as long as they are within the spirit and scope of the present invention.
Claims (2)
1. The utility model provides a vacuum coating device with water conservancy diversion formula vacuum coating nozzle which characterized in that: the crucible comprises a crucible, wherein an induction heater is arranged on the outer side of the crucible, the top of the crucible is connected with a flow distribution box body through a steam pipeline, a pressure stabilizing plate arranged in the horizontal direction is arranged in the flow distribution box body, the top of the flow distribution box body is connected with a coating nozzle, and a pressure regulating valve is arranged on the steam pipeline;
the pressure stabilizing plate is of a porous structure;
a flow guide column is arranged above the connecting position of the flow distribution box body and the steam pipeline, the flow guide column is positioned below the pressure stabilizing plate, and the radial section area S of the flow guide column Diversion And the radial cross-sectional area S of the steam pipeline Inlet The ratio of the components is greater than or equal to 0.1, namely:
S diversion /S Inlet port ≥0.1，
The pore space on the pressure stabilizing plate is rectangular, circular or triangular, the pore space trend is a straight line, a curve or a multilayer structure,
the total area S of the pores on the voltage stabilizing plate Total area of pores And the area S of the nozzle outlet position An outlet The ratio of the two is greater than or equal to 0.1, namely: s. the Total area of pores /S An outlet ≥0.1，
The outlet of the coating nozzle is porous, and the area S of the outlet of the coating nozzle is An outlet And the radial cross-sectional area S of the steam pipeline Inlet The ratio of the two is more than or equal to 0.05-5, namely:
S an outlet /S Inlet ≥0.05～5，
The radial section of the flow guide column is set to be circular, triangular, trapezoidal or rectangular, the flow guide column is positioned above the connecting position of the steam pipeline and the flow distribution box body, and the flow guide column mainly has the function of blocking airflow from directly entering a hole on the pressure stabilizing plate through the steam pipeline, but must form a dispersed flow after passing through the flow guide column and then enter the pressure stabilizing plate, so that the movement path of the airflow is indirectly prolonged, and sufficient uniformity is formed before entering the pressure stabilizing plate; the flow guide column is positioned below the pressure stabilizing plate, so that a flow control area is formed between the flow guide column and the pressure stabilizing plate,
the outlet of the porous coating nozzle is rectangular, circular or trapezoidal.
2. The vacuum coating apparatus with a flow-guiding vacuum coating nozzle of claim 1, wherein: the coating nozzle is made of graphite, ceramic or metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911021320.4A CN112708855B (en) | 2019-10-25 | 2019-10-25 | Vacuum coating device with diversion type vacuum coating nozzle |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911021320.4A CN112708855B (en) | 2019-10-25 | 2019-10-25 | Vacuum coating device with diversion type vacuum coating nozzle |
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| CN112708855A CN112708855A (en) | 2021-04-27 |
| CN112708855B true CN112708855B (en) | 2023-02-10 |
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| CN117888063B (en) * | 2023-12-30 | 2024-07-05 | 绍兴市德鑫包装材料有限公司 | Manufacturing method of vacuum aluminized film |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014168352A1 (en) * | 2013-04-11 | 2014-10-16 | 한국표준과학연구원 | Evaporation deposition apparatus |
| WO2017069369A1 (en) * | 2015-10-23 | 2017-04-27 | 주식회사 파인에바 | Linear evaporation deposition apparatus |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014168352A1 (en) * | 2013-04-11 | 2014-10-16 | 한국표준과학연구원 | Evaporation deposition apparatus |
| WO2017069369A1 (en) * | 2015-10-23 | 2017-04-27 | 주식회사 파인에바 | Linear evaporation deposition apparatus |
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