CN113957389B - Vacuum coating device with porous noise reduction and uniform distribution of metal vapor - Google Patents
Vacuum coating device with porous noise reduction and uniform distribution of metal vapor Download PDFInfo
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- CN113957389B CN113957389B CN202010702677.5A CN202010702677A CN113957389B CN 113957389 B CN113957389 B CN 113957389B CN 202010702677 A CN202010702677 A CN 202010702677A CN 113957389 B CN113957389 B CN 113957389B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a vacuum coating device with multiple holes for reducing noise and uniformly distributing metal vapor, which comprises a crucible, wherein an induction heater for heating metal liquid in the crucible to form metal vapor is arranged on the outer side of the crucible; the inside of the fluid distribution box body is also provided with a vertical porous pipe, the porous pipe is positioned below the pressure stabilizing plate, the lower end of the porous pipe is communicated with the metal steam pipeline, the upper end of the porous pipe is provided with a closed turbulence inhibition chamber, and the side wall of the porous pipe is provided with a plurality of spitting holes; the inner wall of the flow distribution box body is provided with a buffer groove, and the buffer groove corresponds to the discharge hole. When the high-temperature steam is contacted with the low-temperature steel plate, a uniform coating is formed on the surface of the steel plate.
Description
Technical Field
The invention relates to the technical field of vacuum coating, in particular to a vacuum coating device with porous noise reduction and uniform distribution of metal vapor.
Background
Physical Vapor Deposition (PVD) refers to a process technique in which a metallization is heated under vacuum to deposit the metallization in a gaseous state onto a substrate to form a coating. Electric heating (resistive or inductive) and electron beam gun heating (EBPVD) are classified according to the heating mode. Vacuum coating has been widely used in the industries of electronics, glass, plastics, etc. as a surface modification and coating process, and the vacuum coating technology has the main advantages of environmental protection, good coating performance and variety of plateable substances. The key point of the vacuum coating technology for continuous strip steel is that the continuous coating production, large-area, high-speed and large-scale production are carried out, and since the last eighties of century, various large steel companies in the world have carried out a great deal of research on the technology, and along with the maturation of hot galvanizing and electrogalvanizing technologies, the technology is receiving unprecedented importance and is artificially an innovative surface coating technology.
The key point in the vacuum coating process is how to obtain a coating with uniform thickness through the arrangement of nozzles. The data currently disclosed abroad mainly comprise the following aspects:
1) Integral structure of evaporation crucible and flow distribution nozzle
European patent nos. BE1009321A6, BE1009317a61 disclose a crucible nozzle structure as in fig. 1, 2, respectively, in the structure of fig. 1, the upper part of the crucible 1 is provided with a cover 2, so that a nozzle structure is formed between the cover 2 and the furnace wall for direct injection of vaporized metal. In the structure of fig. 2, a filter plate 3 is added to the evaporation crucible, and then a slit nozzle at the top is used for the injection of the metal vapor. In the design process of the two device nozzles, one adopts a Laval nozzle structure, the other adopts a convergent nozzle, and the nozzle is sprayed laterally at one direction position and is sprayed vertically at the other direction position.
The related evaporating crucible and nozzle structure is also disclosed in the JPS59177370A, US4552092a patent, fig. 3 shows a crucible nozzle structure with automatic metal liquid replenishment, the nozzle 4 adopts a wider outlet, and a heater 5 is also arranged at the upper part of the crucible for heating steam and the like. In the structure of the crucible nozzle shown in fig. 4, the structure is unfolded by a side arc 6, the side spraying is performed, and a heating pipe 7 is also arranged on the outer side of the crucible wall for heating the wall surface.
2) Split structure of evaporation crucible and flow distribution nozzle
In patent WO2018/020311A1, a split type crucible nozzle structure is disclosed, as shown in fig. 5, in which a crucible is connected at the bottom with a molten metal supply tank 8, the upper part of which sends metal vapor to a tubular distributor and a front-end vapor nozzle through a split type pipe 9, and then the metal vapor is sprayed to a metal plate through the nozzle at a high speed.
In patent CN103249860a, a split type distributor and nozzle structure is disclosed, as shown in fig. 6, steam is sent into an upper horizontal pipe 10 through a pipe, and a porous nozzle is provided at the top of the horizontal pipe 10 to uniformly spray the metal steam on the surface of the metal plate.
In patent CN101175866a, a metal vapor flow distributor and a nozzle form are disclosed, as shown in fig. 7, the cross-section form of the nozzle is shown, wires are wound on the outside of a pipe 11 of the flow distributor to heat the pipe, the nozzle part is a square shell, as shown in fig. 8, an annular pipe made of another material is nested inside the square shell 12, the annular pipe is used for spraying metal vapor, and a vapor outlet form used by the nozzle is porous.
These patents refer to the specific form of the nozzle during the coating process, but they do not show that the coating process using these nozzles can be performed to a uniform extent, and the uniformity of the coating on the surface of the steel sheet has a critical factor for the subsequent use processes such as bending and stamping.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a vacuum coating device with the functions of reducing noise by multiple holes and uniformly distributing metal vapor, wherein the metal vapor is distributed for the first time by utilizing a porous pipe, the metal vapor is distributed for the second time by utilizing a pressure stabilizing plate, the metal vapor is sprayed out by a coating nozzle, and finally, a uniform coating is formed on the surface of a steel plate.
In order to achieve the above purpose, the invention adopts the following technical scheme:
the vacuum coating device comprises a crucible, wherein an induction heater for heating molten metal in the crucible to form the metal vapor is arranged on the outer side of the crucible, a rectangular flow distribution box body is connected to the top of the crucible through a metal vapor pipeline, a horizontal pressure stabilizing plate is arranged in the flow distribution box body, a coating nozzle is arranged at the top of the flow distribution box body, and a pressure regulating valve is arranged on the metal vapor pipeline;
the inside of the fluid distribution box body is also provided with a vertical porous pipe, the porous pipe is positioned below the pressure stabilizing plate, the lower end of the porous pipe is communicated with the metal steam pipeline, the upper end of the porous pipe is provided with a closed turbulence inhibition chamber, and the side wall of the porous pipe is provided with a plurality of spitting holes;
the inner wall of the flow distribution box body is provided with a buffer groove, and the buffer groove corresponds to the discharge hole.
Preferably, the ejection holes are arranged towards the length direction and/or the width direction of the distributing box body.
Preferably, the length L of the flow distribution box body is 100-500 mm, the width W of the flow distribution box body is 20-100 mm, and when the diameter D of the metal steam pipeline is 15-100 mm, the volume V1 of the turbulence suppression chamber, the volume V2 of the buffer tank and the area S of the discharge hole arranged towards the width direction of the flow distribution box body Short length The area S of the discharge hole arranged in the length direction of the distributing box body Long length The total area S1 of the discharge holes is connected with the top of the crucible and the connection position S of the metal steam pipeline An inlet The relationship of (2) is as follows:
when the metal vapor pressure in the metal vapor pipeline is 50000Pa to 100000Pa, the volume V1 of the turbulence suppressing chamber is = (6-10) S An inlet The volume v2= (4-6) S of the buffer tank An inlet ，S Long length /S Short length =3 to 4, the total area s1= (3 to 4) ×s of the discharge holes An inlet ；
When the metal vapor pressure in the metal vapor pipeline is 10000-50000 Pa, the volume V1 of the turbulence inhibition chamber is = (4-6) S An inlet The volume v2= (2-4) S of the buffer tank An inlet ，S Long length /S Short length =2 to 3, saidTotal area s1= (2 to 3) S of discharge holes An inlet ；
When the metal vapor pressure in the metal vapor pipeline is 1000-10000 Pa, the volume V1 of the turbulence inhibition chamber is = (2-4) S An inlet The volume v2= (1-2) S of the buffer tank An inlet ，S Long length /S Short length =1 to 2, the total area s1= (1 to 2) ×s of the discharge holes An inlet 。
Preferably, the length L of the flow distribution box body is 500-1000 mm, the width W of the flow distribution box body is 30-150 mm, and when the diameter D of the metal steam pipeline is 30-120 mm, the volume V1 of the turbulence suppression chamber, the volume V2 of the buffer tank and the area S of the discharge hole arranged towards the width direction of the flow distribution box body Short length The area S of the discharge hole arranged in the length direction of the distributing box body Long length The total area S1 of the discharge holes is connected with the top of the crucible and the connection position S of the metal steam pipeline An inlet The relationship of (2) is as follows:
when the metal vapor pressure in the metal vapor pipeline is 50000Pa to 100000Pa, the volume V1 of the turbulence suppressing chamber is = (7-12) S An inlet The volume v2= (5-7) S of the buffer tank An inlet ，S Long length /S Short length =4 to 5, the total area s1= (4 to 5) ×s of the discharge holes An inlet ；
When the metal vapor pressure in the metal vapor pipeline is 10000-50000 Pa, the volume V1 of the turbulence inhibition chamber is = (5-7) S An inlet The volume v2= (3-5) S of the buffer tank An inlet ，S Long length /S Short length =4 to 5, the total area s1= (3 to 4) ×s of the discharge holes An inlet ；
When the metal vapor pressure in the metal vapor pipeline is 1000-10000 Pa, the volume V1 of the turbulence inhibition chamber is = (3-5) S An inlet The volume v2= (2-3) S of the buffer tank An inlet ，S Long length /S Short length =3 to 4, the total area s1= (2 to 3) ×s of the discharge holes An inlet 。
Preferably, the length L of the flow distribution box body is 1000-2000 mm, and the flow distribution box bodyThe width W of the buffer tank is 40-160 mm, and when the diameter D of the metal steam pipeline is 40-140 mm, the volume V1 of the turbulence suppressing chamber, the volume V2 of the buffer tank and the area S of the discharge hole arranged towards the width direction of the flow distribution box body Short length The area S of the discharge hole arranged in the length direction of the distributing box body Long length The total area S1 of the discharge holes is connected with the top of the crucible and the connection position S of the metal steam pipeline An inlet The relationship of (2) is as follows:
when the metal vapor pressure in the metal vapor pipeline is 50000Pa to 100000Pa, the volume V1 of the turbulence suppressing chamber is = (8-14) S An inlet The volume v2= (6-8) S of the buffer tank An inlet ，S Long length /S Short length =6 to 7, the total area s1= (5 to 6) ×s of the discharge holes An inlet ；
When the metal vapor pressure in the metal vapor pipeline is 10000-50000 Pa, the volume V1 of the turbulence inhibition chamber is = (6-8) S An inlet The volume v2= (4-6) S of the buffer tank An inlet ，S Long length /S Short length =5 to 6, the total area s1= (4 to 5) ×s of the discharge holes An inlet ；
When the metal vapor pressure in the metal vapor pipeline is 1000-10000 Pa, the volume V1 of the turbulence inhibition chamber is = (3-6) S An inlet The volume v2= (3-4) S of the buffer tank An inlet ，S Long length /S Short length =4 to 5, the total area s1= (3 to 4) ×s of the discharge holes An inlet 。
Preferably, the voltage stabilizing plate is arranged into a porous structure, and the total pore area S of the voltage stabilizing plate Total area of pores Area S at the outlet position of the coating nozzle An outlet The ratio is more than or equal to 0.1, namely:
S total area of pores /S An outlet ≥0.1。
Preferably, the hole pattern on the pressure stabilizing plate is a round hole, a square hole or a triangular hole.
Preferably, the pore trend on the pressure stabilizing plate is a straight line or a curve.
Preferably, the outlet of the coating nozzle is provided withIs arranged into a slit type or a porous type, and the outlet position area S of the coating nozzle An outlet A position S connected with the top of the crucible and the metal steam pipeline An inlet The ratio is more than or equal to 0.05 to 5, namely:
S an outlet /S An inlet ≥0.05～5。
Preferably, when the coating nozzle is arranged in a slit shape, the line shape of the coating nozzle is a straight line shape or a curve shape, and when the coating nozzle is arranged in a porous shape, the line shape of the coating nozzle is a rectangle, a circle or a trapezoid.
Preferably, the porous tube is a rectangular tube or a cylindrical tube.
Preferably, the porous pipe and the metal steam pipeline are connected in a threaded mode or an embedded mode.
Preferably, the hole pattern of the ejection hole is round, square or triangular.
Preferably, the turbulence suppression chamber is rectangular or semicircular.
The invention provides a vacuum coating device with multiple holes for noise reduction and uniform distribution of metal vapor, wherein the metal vapor is obtained by melting metal liquid through crucible induction heating, the metal vapor enters a flow distribution box body through a metal vapor pipeline, a section of reverse porous pipe connected with the metal vapor pipeline is arranged in the flow distribution box body, and a plurality of discharge holes are designed on the surface of the porous pipe. When the metal steam enters the turbulence suppressing chamber at the tail end of the porous pipe from the metal steam pipeline, the metal steam is blocked and returns, and regularly flows out from the discharge holes arranged on the surface of the porous pipe. The metal vapor flowing out from the discharge hole enters the flow distribution box body, then the pressure stabilizing plate is used for carrying out secondary distribution on the metal vapor, and then the metal vapor is sprayed out from the nozzle and is sprayed to the pretreated metal plate at a high speed to form a uniform metal coating.
Drawings
FIG. 1 is a schematic illustration of European patent BE1009321A 6;
FIG. 2 is a schematic diagram of European patent BE1009317A 61;
FIG. 3 is a schematic diagram of patent JPS 59177370A;
fig. 4 is a schematic diagram of patent US4552092 a;
FIG. 5 is a schematic diagram of patent WO2018/020311A 1;
fig. 6 is a schematic diagram of patent CN103249860 a;
fig. 7 is a schematic diagram of patent CN101175866 a;
FIG. 8 is a schematic view of the square housing of FIG. 7;
FIG. 9 is a schematic view of a vacuum coating apparatus according to the present invention;
FIG. 10 is a cross-sectional view taken along the direction A-A in FIG. 9;
FIG. 11 is a schematic view of buffer tank volume, turbulence suppressing chamber volume, and spitting hole area in a flow distribution box in a vacuum coating apparatus of the present invention;
FIG. 12 is a schematic diagram showing the classification of the parameter area in the vacuum coating apparatus of FIG. 9.
Detailed Description
The technical scheme of the invention is further described below with reference to the accompanying drawings and examples.
Referring to fig. 9, the vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor provided by the present invention includes a crucible 13, an induction heater 16 for heating a metal liquid 14 in the crucible 13 to form metal vapor 15 is arranged at the outer side of the crucible 13, a rectangular flow distribution box 18 is connected to the top of the crucible 13 through a metal vapor pipe 17, a horizontal pressure stabilizing plate 19 is arranged in the flow distribution box 18, a coating nozzle 25 is arranged at the top of the flow distribution box 18, and a pressure regulating valve 20 is arranged on the metal vapor pipe 17.
The inside of the distributing box 18 is also provided with a vertical porous pipe 21, the porous pipe 21 is positioned below the pressure stabilizing plate 19, the lower end of the porous pipe 21 is communicated with the metal steam pipeline 20 in a threaded or embedded mode, the upper end of the porous pipe 21 is provided with a closed turbulence inhibiting chamber 22, and the side wall of the porous pipe 21 is provided with a plurality of discharge holes 23.
The porous tube 21 may be a straight tube of various shapes such as rectangular, circular, triangular, etc., and has a main function of distributing the metal vapor 15 buffered in the porous tube 21 for the first time.
The holes of the discharge holes 23 may have various shapes such as a circular shape, a square shape, or a triangular shape, and the main function thereof is to distribute the metal vapor 15 entering the perforated tube 21.
The turbulence suppressing chamber 22 may be rectangular or semicircular in shape, and has a main function of buffering the metal vapor 15 entering the perforated pipe 21 from the metal vapor pipe 18 so as not to directly flow out.
The inner wall of the distributing box 18 is provided with a buffer groove 24, and the buffer groove 24 corresponds to the position of the discharge hole 23.
The working flow of the vacuum coating device of the invention is as follows:
1) The metal block is melted into molten metal 14 in the crucible 13 under the action of the induction heater 16, and the molten metal 14 begins to vaporize under higher superheat degree and low pressure to gradually form metal vapor 15;
2) At the beginning, the pressure regulating valve 20 on the metal steam pipeline 17 connected with the crucible 13 is in a closed state, as the molten metal 14 is continuously vaporized, the metal steam 15 in the inner cavity of the crucible 13 is continuously increased, and when the pressure in the inner cavity of the crucible 13 reaches a certain value, the pressure regulating valve 20 is started to keep a certain pressure to flow out;
3) At this time, the induction heater 16 needs to be increased at the same time, so that the pressure reduced by the opening of the pressure regulating valve 20 is supplemented, and the power range of the induction heater 16 is adjusted, so that the pressure of the metal vapor 15 in the inner cavity of the crucible 13 is kept in a constant range;
4) After the pressure regulating valve 20 is opened, the metal vapor 15 flows forwards along the metal vapor pipeline 17, when the metal vapor enters the flow distribution box 18, the original high-speed metal vapor 15 flowing in a straight line is forced to flow out regularly through the discharge holes 23 on the porous pipe 21 due to the blocking effect of the turbulence inhibiting chamber 22 at the upper end of the porous pipe 21, so that the metal vapor 15 is subjected to first buffer distribution;
5) The porous pipe 21 is communicated with the metal steam pipeline 20 in a threaded or embedded mode, the purpose of uniformly distributing the metal steam 15 is achieved through designing the discharge holes 23 to have different angles or different pore diameters and positions, and the metal steam 15 distributed through the discharge holes 23 enters a distribution cavity formed by the buffer grooves 24;
6) The distribution box 18 is internally provided with a pressure stabilizing plate 19 for carrying out secondary buffer distribution on the metal vapor 15 entering the distribution cavity, and then the uniform metal vapor 15 is uniformly sprayed out from a coating nozzle 25 at the top of the distribution box 18;
7) The outlet of the coating nozzle 25 is narrow, so that a high speed is formed when the metal vapor 15 flows out, and a moving steel plate 26 is arranged above the high speed, so that the metal vapor 15 is quickly solidified when encountering the steel plate 26 with low temperature, and a metal coating 27 is formed.
The molten metal 14 may contain the following ranges: metals such as zinc, magnesium, aluminum, tin, nickel, copper, iron, and the like, and low melting point (below 2000 ℃) oxides of these elements.
The steel plate 26 is cleaned by plasma and other devices before vacuum coating, and the preheating temperature reaches 80-300 ℃.
Referring to fig. 10 to 12, in order to better distribute the metal vapor 15 in the first buffer of the vacuum coating apparatus of the present invention, the discharge holes 23 are disposed toward the length direction and/or the width direction of the distribution box 18.
The length L of the flow distribution box 18 is 100-500 mm, the width W of the flow distribution box 18 is 20-100 mm, and when the diameter D of the metal steam pipeline 17 is 15-100 mm, the volume V1 of the turbulence suppression chamber 22, the volume V2 of the buffer tank 24 and the area S of the discharge hole 23 arranged towards the width of the flow distribution box 18 Short length Area S of discharge hole 23 provided in longitudinal direction of distribution box 18 Long length The total area S1 of the tapping orifice 23 is connected to the top of the crucible 13 and the metal vapor pipe 17 at a position S An inlet The relationship of (2) is as follows:
when the pressure of the metal vapor 15 in the metal vapor pipe 17 is 50000Pa to 100000Pa, the volume v1= (6 to 10) S of the turbulence suppressing chamber 22 An inlet Volume v2= (4-6) S of buffer tank 24 An inlet ，S Long length /S Short length Total area s1= (3 to 4) ×s of discharge holes 23 =3 to 4 An inlet ；
When the pressure of the metal vapor 15 in the metal vapor pipe 17 is 10000-50000 Pa, the volume v1= (4-6) S of the turbulence suppressing chamber 22 An inlet Volume v2= (2-4) S of buffer tank 24 An inlet ，S Long length /S Short length Total area s1= (2 to 3) ×s of discharge holes 23 =2 to 3 An inlet ；
When the pressure of the metal vapor 15 in the metal vapor pipe 17 is 1000-10000 Pa, the volume v1= (2-4) S of the turbulence suppressing chamber 22 An inlet Volume v2= (1-2) S of buffer tank 24 An inlet ，S Long length /S Short length Total area s1= (1-2) ×s of discharge holes 23 =1-2 An inlet 。
The length L of the flow distribution box 18 is 500-1000 mm, the width W of the flow distribution box 18 is 30-150 mm, and when the diameter D of the metal steam pipeline 17 is 30-120 mm, the volume V1 of the turbulence suppression chamber 22, the volume V2 of the buffer tank 24 and the area S of the discharge hole 23 arranged towards the width of the flow distribution box 18 Short length Area S of discharge hole 23 provided in longitudinal direction of distribution box 18 Long length The total area S1 of the tapping orifice 23 is connected to the top of the crucible 13 and the metal vapor pipe 17 at a position S An inlet The relationship of (2) is as follows:
when the pressure of the metal vapor 15 in the metal vapor pipe 17 is 50000Pa to 100000Pa, the volume v1= (7 to 12) S of the turbulence suppressing chamber 22 An inlet Volume v2= (5-7) S of buffer tank 24 An inlet ，S Long length /S Short length Total area s1= (4 to 5) ×s of discharge holes 23 =4 to 5 An inlet ；
When the pressure of the metal vapor 15 in the metal vapor pipe 17 is 10000-50000 Pa, the volume v1= (5-7) S of the turbulence suppressing chamber 22 An inlet Volume v2= (3-5) S of buffer tank 24 An inlet ，S Long length /S Short length Total area s1= (3 to 4) ×s of discharge holes 23 =4 to 5 An inlet ；
When the pressure of the metal vapor 15 in the metal vapor pipe 17 is 1000-10000 Pa, the volume v1= (3-5) S of the turbulence suppressing chamber 22 An inlet Volume v2= (2-3) S of buffer tank 24 An inlet ，S Long length /S Short length Total area s1= (2 to 3) ×s of discharge holes 23 =3 to 4 An inlet 。
The length L of the flow distribution box 18 is 1000-2000 mm, the width W of the flow distribution box 18 is 40-160 mm, and when the diameter D of the metal steam pipeline 17 is 40-140 mm, the volume V1 of the turbulence suppression chamber 22, the volume V2 of the buffer tank 24 and the area S of the discharge hole 23 arranged towards the width of the flow distribution box 18 Short length Discharge holes 23 provided in the length direction of the distribution box 18Area S Long length The total area S1 of the tapping orifice 23 is connected to the top of the crucible 13 and the metal vapor pipe 17 at a position S An inlet The relationship of (2) is as follows:
when the pressure of the metal vapor 15 in the metal vapor pipe 17 is 50000Pa to 100000Pa, the volume v1= (8 to 14) S of the turbulence suppressing chamber 22 An inlet Volume v2= (6-8) S of buffer tank 24 An inlet ，S Long length /S Short length Total area s1= (5 to 6) ×s of discharge holes 23 =6 to 7 An inlet ；
When the pressure of the metal vapor 15 in the metal vapor pipe 17 is 10000-50000 Pa, the volume v1= (6-8) S of the turbulence suppressing chamber 22 An inlet Volume v2= (4-6) S of buffer tank 24 An inlet ，S Long length /S Short length Total area s1= (4 to 5) ×s of discharge holes 23 =5 to 6 An inlet ；
When the pressure of the metal vapor 15 in the metal vapor pipe 17 is 1000-10000 Pa, the volume v1= (3-6) S of the turbulence suppressing chamber 22 An inlet Volume v2= (3-4) S of buffer tank 24 An inlet ，S Long length /S Short length Total area s1= (3 to 4) ×s of discharge holes 23 =4 to 5 An inlet 。
The pressure stabilizing plate 19 is arranged into a porous structure, and the total pore area S of the pressure stabilizing plate 19 Total area of pores Area S at the outlet position of the coating nozzle 25 An outlet The ratio is more than or equal to 0.1, namely:
S total area of pores /S An outlet ≥0.1。
The hole pattern on the pressure stabilizing plate 19 may be a round hole, a square hole, a triangular hole, or the like.
The apertures in the stabilizing plate 19 may be in various forms such as straight lines, curved lines, or a multi-layer structure.
The outlet of the coating nozzle 25 is arranged to be slit-shaped or porous, and the area S of the outlet position of the coating nozzle 25 An outlet A position S connected with the top of the crucible 13 and the metal steam pipe 17 An inlet The ratio is more than or equal to 0.05 to 5, namely:
S an outlet /S An inlet ≥0.05～5。
When the coating nozzle 25 is provided in a slit shape, the line shape thereof is a straight line shape or a curved line shape, and when the coating nozzle 25 is provided in a porous shape, the line shape thereof is a rectangular shape, a circular shape, a trapezoid shape, or the like.
The coating nozzle 25 may be made of: graphite, ceramic or metal, and other materials that may be processed.
Example 1
The surface of the steel plate is galvanized, the width of the steel plate 26 is 300mm, the length L of the flow distribution box 18 is 300mm, the width W of the flow distribution box 18 is 60mm, and the diameter of the metal steam pipeline 17 is 40mm. After the steel plate 26 is washed and dried, the steel plate 26 is heated to 150 ℃. The crucible 13 is heated by the induction heater 16 to evaporate zinc, and the pressure of zinc vapor in the crucible 13 is controlled to 60000Pa by controlling power, and at this time, the pressure regulating valve 20 is in a closed state. When the pressure of the gas in the crucible 13 reaches 60000Pa, the pressure regulating valve 20 is opened, the metal vapor 15 enters the flow distribution box 18 through the metal vapor pipeline 17, and the porous pipe 21 and the pressure stabilizing plate 19 are arranged in the flow distribution box 18.
Volume v1= 7*S of turbulence suppressing chamber 22 on perforated tube 21 An inlet Buffer tank 24 volume v2= 5*S in distribution box 18 An inlet ,S Long length /S Short length Area s1= 3*S of discharge holes 23 in porous tube 21 =3 An inlet 。
The voltage stabilizing plate 19 is of a porous structure, S Total area of pores /S An outlet ＝1.5。
The internal working pressure of the coating nozzle 25 is 55000Pa, the coating nozzle 25 is made of graphite, the outlet of the coating nozzle 25 adopts a slit shape and is rectangular, wherein S is An outlet /S An inlet ＝1.1。
Example 2
The surface of the steel plate is galvanized, the width of the steel plate 26 is 600mm, the length L of the flow distribution box 18 is 600mm, the width W of the flow distribution box 18 is 80mm, and the diameter of the metal steam pipeline 17 is 70mm. After the steel plate 26 is washed and dried, the steel plate 26 is heated to 150 ℃. The crucible 13 is heated by the induction heater 16 to evaporate zinc, and the pressure of zinc vapor in the crucible 13 is controlled to 30000Pa by controlling power, and the pressure regulating valve 20 is in a closed state. When the pressure of the gas in the crucible 13 reaches 30000Pa, the pressure regulating valve 20 is opened, the metal vapor 15 enters the flow distribution box 18 through the metal vapor pipeline 17, and the porous pipe 21 and the pressure stabilizing plate 19 are arranged in the flow distribution box 18.
Volume v1= 6*S of turbulence suppressing chamber 22 on perforated tube 21 An inlet Buffer tank 24 volume v2= 4*S in distribution box 18 An inlet ,S Long length /S Short length Area s1= 3*S of discharge holes 23 in porous tube 21 =4 An inlet 。
The voltage stabilizing plate 19 is of a porous structure, S Total area of pores /S An outlet ＝2.5。
The working pressure inside the coating nozzle 25 is 25000Pa, the coating nozzle 25 is made of graphite, the outlet of the coating nozzle 25 adopts a slit shape and is rectangular, wherein S is An outlet /S An inlet ＝0.95。
Example 3
The surface of the steel plate is galvanized, the width of the steel plate 26 is 1200mm, the length L of the flow distribution box 18 is 1200mm, the width W of the flow distribution box 18 is 130mm, and the diameter of the metal steam pipeline 17 is 100mm. After the steel plate 26 is washed and dried, the steel plate 26 is heated to 150 ℃. The crucible 13 is heated by the induction heater 16 to evaporate zinc, and the pressure of zinc vapor in the crucible 13 is controlled to be 80000Pa by controlling power, and at this time, the pressure regulating valve 20 is in a closed state. When the gas pressure in the crucible 13 reaches 80000Pa, the pressure regulating valve 20 is opened, the metal vapor 15 enters the flow distribution box 18 through the metal vapor pipe 17, and the porous pipe 21 and the pressure stabilizing plate 19 are arranged in the flow distribution box 18.
Volume v1=10×s of turbulence suppressing chamber 22 on porous tube 21 An inlet Buffer tank 24 volume v2= 7*S in distribution box 18 An inlet ,S Long length /S Short length Area s1= 5*S of discharge holes 23 in porous tube 21 =6 An inlet 。
The voltage stabilizing plate 19 is of a porous structure, S Total area of pores /S An outlet ＝3。
The internal working pressure of the coating nozzle 25 is 70000Pa, the coating nozzle 25 is made of graphite, the outlet of the coating nozzle 25 adopts a slit shape and is rectangular, wherein S is An outlet /S An inlet ＝1.5。
It will be appreciated by persons skilled in the art that the above embodiments are provided for illustration only and not for limitation of the invention, and that variations and modifications of the above described embodiments are intended to fall within the scope of the claims of the invention as long as they fall within the true spirit of the invention.
Claims (13)
1. A vacuum coating device with porous noise reduction and uniform distribution of metal vapor is characterized in that: the metal vapor distribution device comprises a crucible, wherein an induction heater for heating molten metal in the crucible to form metal vapor is arranged on the outer side of the crucible, a rectangular flow distribution box body is connected to the top of the crucible through a metal vapor pipeline, a horizontal pressure stabilizing plate is arranged in the flow distribution box body, a coating nozzle is arranged on the top of the flow distribution box body, and a pressure regulating valve is arranged on the metal vapor pipeline;
the inside of the fluid distribution box body is also provided with a vertical porous pipe, the porous pipe is positioned below the pressure stabilizing plate, the lower end of the porous pipe is communicated with the metal steam pipeline, the upper end of the porous pipe is provided with a closed turbulence inhibition chamber, and the side wall of the porous pipe is provided with a plurality of spitting holes;
a buffer groove is arranged on the inner wall of the flow distribution box body, the buffer groove corresponds to the discharge hole,
the voltage stabilizing plate is arranged into a porous structure, and the total pore area S of the voltage stabilizing plate Total area of pores Area S at the outlet position of the coating nozzle An outlet The ratio is more than or equal to 0.1, namely:
S total area of pores /S An outlet ≥0.1。
2. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 1, wherein: the ejection holes are arranged towards the length direction and/or the width direction of the flow distribution box body.
3. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 2, wherein: the length L of the flow distribution box body is 100-500 mm, and the width W of the flow distribution box body20-100 mm, wherein when the diameter D of the metal steam pipeline is 15-100 mm, the volume V1 of the turbulence suppression chamber, the volume V2 of the buffer tank and the area S of the discharge hole arranged towards the width direction of the flow distribution box body Short length The area S of the discharge hole arranged in the length direction of the distributing box body Long length The total area S1 of the discharge holes is connected with the top of the crucible and the connection position S of the metal steam pipeline An inlet The relationship of (2) is as follows:
when the metal vapor pressure in the metal vapor pipeline is 50000Pa to 100000Pa, the volume V1 of the turbulence suppressing chamber is = (6-10) S An inlet The volume v2= (4-6) S of the buffer tank An inlet ，S Long length /S Short length =3 to 4, the total area s1= (3 to 4) ×s of the discharge holes An inlet ；
When the metal vapor pressure in the metal vapor pipeline is 10000-50000 Pa, the volume V1 of the turbulence inhibition chamber is = (4-6) S An inlet The volume v2= (2-4) S of the buffer tank An inlet ，S Long length /S Short length =2 to 3, the total area s1= (2 to 3) ×s of the discharge holes An inlet ；
When the metal vapor pressure in the metal vapor pipeline is 1000-10000 Pa, the volume V1 of the turbulence inhibition chamber is = (2-4) S An inlet The volume v2= (1-2) S of the buffer tank An inlet ，S Long length /S Short length =1 to 2, the total area s1= (1 to 2) ×s of the discharge holes An inlet 。
4. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 2, wherein: the length L of the flow distribution box body is 500-1000 mm, the width W of the flow distribution box body is 30-150 mm, and when the diameter D of the metal steam pipeline is 30-120 mm, the volume V1 of the turbulence suppression chamber, the volume V2 of the buffer tank and the area S of the discharge hole arranged towards the width direction of the flow distribution box body Short length The area S of the discharge hole arranged in the length direction of the distributing box body Long length The total area S1 of the spouting holes and the top and bottom of the crucibleThe metal steam pipeline connecting position S An inlet The relationship of (2) is as follows:
when the metal vapor pressure in the metal vapor pipeline is 50000Pa to 100000Pa, the volume V1 of the turbulence suppressing chamber is = (7-12) S An inlet The volume v2= (5-7) S of the buffer tank An inlet ，S Long length /S Short length =4 to 5, the total area s1= (4 to 5) ×s of the discharge holes An inlet ；
When the metal vapor pressure in the metal vapor pipeline is 10000-50000 Pa, the volume V1 of the turbulence inhibition chamber is = (5-7) S An inlet The volume v2= (3-5) S of the buffer tank An inlet ，S Long length /S Short length =4 to 5, the total area s1= (3 to 4) ×s of the discharge holes An inlet ；
When the metal vapor pressure in the metal vapor pipeline is 1000-10000 Pa, the volume V1 of the turbulence inhibition chamber is = (3-5) S An inlet The volume v2= (2-3) S of the buffer tank An inlet ，S Long length /S Short length =3 to 4, the total area s1= (2 to 3) ×s of the discharge holes An inlet 。
5. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 2, wherein: the length L of the flow distribution box body is 1000-2000 mm, the width W of the flow distribution box body is 40-160 mm, and when the diameter D of the metal steam pipeline is 40-140 mm, the volume V1 of the turbulence suppression chamber, the volume V2 of the buffer tank and the area S of the discharge hole arranged towards the width direction of the flow distribution box body Short length The area S of the discharge hole arranged in the length direction of the distributing box body Long length The total area S1 of the discharge holes is connected with the top of the crucible and the connection position S of the metal steam pipeline An inlet The relationship of (2) is as follows:
when the metal vapor pressure in the metal vapor pipeline is 50000Pa to 100000Pa, the volume V1 of the turbulence suppressing chamber is = (8-14) S An inlet The volume v2= (6-8) S of the buffer tank An inlet ，S Long length /S Short length =6 to 7, the total area s1= (5 to 6) ×s of the discharge holes An inlet ；
When the metal vapor pressure in the metal vapor pipeline is 10000-50000 Pa, the volume V1 of the turbulence inhibition chamber is = (6-8) S An inlet The volume v2= (4-6) S of the buffer tank An inlet ，S Long length /S Short length =5 to 6, the total area s1= (4 to 5) ×s of the discharge holes An inlet ；
When the metal vapor pressure in the metal vapor pipeline is 1000-10000 Pa, the volume V1 of the turbulence inhibition chamber is = (3-6) S An inlet The volume v2= (3-4) S of the buffer tank An inlet ，S Long length /S Short length =4 to 5, the total area s1= (3 to 4) ×s of the discharge holes An inlet 。
6. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 5, wherein: the hole pattern on the pressure stabilizing plate is a round hole, a square hole or a triangular hole.
7. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 6, wherein: and the trend of the pore on the pressure stabilizing plate is a straight line or a curve.
8. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 1, wherein: the outlet of the coating nozzle is arranged to be slit-shaped or porous, and the outlet position area S of the coating nozzle An outlet A position S connected with the top of the crucible and the metal steam pipeline An inlet The ratio is more than or equal to 0.05 to 5, namely:
S an outlet /S An inlet ≥0.05～5。
9. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 8, wherein: when the coating nozzle is arranged in a slit shape, the line shape of the coating nozzle is linear or curved, and when the coating nozzle is arranged in a porous shape, the line shape of the coating nozzle is rectangular, circular or trapezoidal.
10. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 1, wherein: the porous pipe is a rectangular pipe or a cylindrical pipe.
11. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 1, wherein: the porous pipe is connected with the metal steam pipeline in a threaded mode or an embedded mode.
12. The vacuum coating apparatus having the porous noise reduction and uniform distribution of metal vapor according to any one of claims 2 to 5, wherein: the hole pattern of the ejection hole is round, square or triangular.
13. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to any one of claims 3 to 5, wherein: the turbulence suppression chamber is arranged in a rectangular shape or a semicircular shape.
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