CN113957389A - Vacuum coating device with porous noise reduction and uniform distribution of metal steam - Google Patents
Vacuum coating device with porous noise reduction and uniform distribution of metal steam Download PDFInfo
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- CN113957389A CN113957389A CN202010702677.5A CN202010702677A CN113957389A CN 113957389 A CN113957389 A CN 113957389A CN 202010702677 A CN202010702677 A CN 202010702677A CN 113957389 A CN113957389 A CN 113957389A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a vacuum coating device with porous noise reduction and uniform distribution of metal vapor, which comprises a crucible, wherein an induction heater used for heating metal liquid in the crucible to form the metal vapor is arranged on the outer side of the crucible, the top of the crucible is connected with a rectangular flow distribution box body through a metal vapor pipeline, a horizontal pressure stabilizing plate is arranged in the flow distribution box body, a coating nozzle is arranged at the top of the flow distribution box body, and a pressure regulating valve is arranged on the metal vapor pipeline; a vertical perforated pipe is further arranged in the flow distribution box body and is positioned below the pressure stabilizing plate, the lower end of the perforated pipe is communicated with the metal steam pipeline, the upper end of the perforated pipe is provided with a closed turbulence inhibiting chamber, and the side wall of the perforated pipe is provided with a plurality of discharge holes; the inner wall of the flow distribution box body is provided with a buffer groove, and the buffer groove corresponds to the spitting hole. The invention can form uniform coating on the surface of the steel plate when the high-temperature steam contacts the low-temperature steel plate.
Description
Technical Field
The invention relates to the technical field of vacuum coating, in particular to a vacuum coating device with porous noise reduction and uniform distribution of metal steam.
Background
Physical Vapor Deposition (PVD) refers to a process technique in which a metal to be plated is heated under vacuum conditions and deposited in a gaseous state onto a substrate to form a plated film. The heating methods are classified into electric heating (resistive or inductive), electron beam gun heating (EBPVD), and the like. Vacuum coating is widely applied to the industries of electronics, glass, plastics and the like as a surface modification and coating process, and the main advantages of the vacuum coating technology are environmental protection, good coating performance and diversity of coatable substances. The key of the vacuum coating technology applied to the continuous strip steel lies in several aspects of continuous coating production, large-area, high-speed, large-scale production and the like, and from the eighties of the last century, a great deal of research is carried out on the technology by all major steel companies in the world, and with the maturity of hot galvanizing and electrogalvanizing technologies, the technology is paid unprecedented attention and is artificially an innovative surface coating technology.
The key point in the vacuum coating process is how to obtain a coating with uniform thickness by arranging the nozzles. The data disclosed in the present foreign countries mainly include the following aspects:
1) evaporation crucible and flow distribution nozzle integrated structure
European patents BE1009321a6 and BE1009317a61 disclose crucible nozzle structures as shown in fig. 1 and 2, respectively, in the structure of fig. 1, a cover 2 is added on the upper part of a crucible 1, so that a nozzle structure is formed between the upper cover 2 and the furnace wall for direct injection of evaporated metal. In the configuration of fig. 2, the filter plate 3 is then added to the evaporation crucible and then used for the injection of the metal vapor from the top slit nozzle. In the design process of the nozzles of the two devices, one adopts a Laval nozzle structure, the other adopts a convergent nozzle, and the orientation positions of the nozzles are that one sprays laterally and the other sprays vertically.
Related evaporating crucibles and nozzle arrangements are also disclosed in the patents JPS59177370A, US4552092A, and fig. 3 shows a crucible nozzle arrangement with automatic replenishment of molten metal, with a wide outlet for the nozzle 4 and a heater 5 also arranged in the upper part of the crucible for heating of steam and the like. Fig. 4 shows a crucible nozzle structure in which the structure is extended by a side arc 6, spraying laterally, and a heating tube 7 is also arranged on the outside of the crucible wall for heating the wall surface.
2) Split type structure of evaporation crucible and flow distribution nozzle
In patent WO2018/020311a1, a split crucible nozzle structure is disclosed, as shown in fig. 5, in which a crucible is connected at the bottom to a molten metal supply tank 8, the upper part of which feeds a metal vapor through a split duct 9 to a tubular distributor and a front end vapor nozzle, and the metal vapor is then injected through the nozzle at a high speed to a metal plate.
Patent CN103249860A discloses a split type flow distributor and nozzle structure, as shown in fig. 6, steam is sent to an upper horizontal pipe 10 through a pipe, and the top of the horizontal pipe 10 is provided with a porous nozzle for uniformly spraying metal steam on the surface of a metal plate.
In patent CN101175866A, a metal steam distributor and a nozzle form are disclosed, as shown in fig. 7, which shows a cross-sectional form of the nozzle, a wire is wound outside a distributor pipe 11 to realize heating of the pipe, the nozzle part is a square shell, as shown in fig. 8, a circular pipe made of another material is nested inside the square shell 12 for injecting metal steam, and a steam outlet form used by the nozzle is a porous type.
These patents refer to the specific form of the nozzles used in the coating process, but do not indicate the uniformity of the coating applied by these nozzles, which is critical to the subsequent bending and stamping operations.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor, wherein a porous tube is used to distribute metal vapor for the first time, a pressure stabilizing plate is used to distribute metal vapor for the second time, and the metal vapor is sprayed out from a coating nozzle to form a uniform coating on the surface of a steel plate.
In order to achieve the purpose, the invention adopts the following technical scheme:
a vacuum coating device with porous noise reduction and uniform distribution of metal vapor comprises a crucible, wherein an induction heater used for heating metal liquid in the crucible to form the metal vapor is arranged on the outer side of the crucible, the top of the crucible is connected with a rectangular flow distribution box body through a metal vapor pipeline, a horizontal pressure stabilizing plate is arranged in the flow distribution box body, a coating nozzle is arranged at the top of the flow distribution box body, and a pressure regulating valve is arranged on the metal vapor pipeline;
a vertical perforated pipe is further arranged in the flow distribution box body and is positioned below the pressure stabilizing plate, the lower end of the perforated pipe is communicated with the metal steam pipeline, the upper end of the perforated pipe is provided with a closed turbulence inhibiting chamber, and the side wall of the perforated pipe is provided with a plurality of discharge holes;
the inner wall of the flow distribution box body is provided with a buffer groove, and the buffer groove corresponds to the spitting hole.
Preferably, the discharge hole is provided toward a longitudinal direction and/or a width direction of the distribution box.
Preferably, the length L of the distribution box body is 100-500 mm, the width W of the distribution box body is 20-100 mm, and when the diameter D of the metal steam pipeline is 15-100 mm, the volume V1 of the turbulence suppression chamber, the volume V2 of the buffer groove and the area S of the discharge hole arranged in the width direction of the distribution box body are setShort lengthAnd an area S of the discharge hole provided in the longitudinal direction of the distribution boxLong and longThe total area S1 of the spit hole and the connecting position S of the top of the crucible and the metal vapor pipelineInlet portThe relationship of (a) to (b) is as follows:
when the metal steam pressure in the metal steam pipeline is 50000-100000 Pa, the volume V1 of the turbulence suppression chamber is (6-10) SInlet portThe volume V2 of the buffer groove is (4-6) SInlet port，SLong and long/SShort length3-4, and the total area S1 of the discharge hole is (3-4) SInlet port；
When the metal steam pressure in the metal steam pipeline is 10000-50000 Pa, the volume V1 of the turbulence suppression chamber is (4-6) SInlet portThe volume V2 of the buffer tank is (2-4) SInlet port，SLong and long/SShort length2-3, and the total area S1 of the discharge hole is (2-3) SInlet port；
When the metal steam pressure in the metal steam pipeline is 1000-10000 Pa, the volume V1 of the turbulence suppression chamber is (2-4) SInlet portThe volume V2 of the buffer tank is (1-2) SInlet port，SLong and long/SShort length1-2, and the total area S1 of the discharge hole is (1-2) SInlet port。
Preferably, the length L of the distribution box body is 500-1000 mm, the width W of the distribution box body is 30-150 mm, and when the diameter D of the metal steam pipeline is 30-120 mm, the volume V1 of the turbulence suppression chamber, the volume V2 of the buffer groove and the area S of the discharge hole arranged in the width direction of the distribution box body are setShort lengthAnd an area S of the discharge hole provided in the longitudinal direction of the distribution boxLong and longThe total area S1 of the spit hole and the connecting position S of the top of the crucible and the metal vapor pipelineInlet portThe relationship of (a) to (b) is as follows:
when the metal steam pressure in the metal steam pipeline is 50000-100000 Pa, the volume V1 of the turbulence suppression chamber is (7-12) SInlet portThe volume V2 of the buffer groove is (5-7) SInlet port，SLong and long/SShort length4-5, and the total area S1 of the discharge hole is (4-5) SInlet port；
When the metal steam pressure in the metal steam pipeline is 10000-50000 Pa, the volume V1 of the turbulence suppression chamber is (5-7) SInlet portThe volume V2 of the buffer groove is (3-5) SInlet port，SLong and long/SShort length4-5, and the total area S1 of the discharge hole is (3-4) SInlet port；
When the metal steam pipeline is insideWhen the metal steam pressure is 1000-10000 Pa, the volume V1 of the turbulence suppression chamber is (3-5) SInlet portThe volume V2 of the buffer tank is (2-3) SInlet port，SLong and long/SShort length3-4, and the total area S1 of the discharge hole is (2-3) SInlet port。
Preferably, the length L of the distribution box body is 1000-2000 mm, the width W of the distribution box body is 40-160 mm, and when the diameter D of the metal steam pipeline is 40-140 mm, the volume V1 of the turbulence suppression chamber, the volume V2 of the buffer groove and the area S of the discharge hole arranged in the width direction of the distribution box body are setShort lengthAnd an area S of the discharge hole provided in the longitudinal direction of the distribution boxLong and longThe total area S1 of the spit hole and the connecting position S of the top of the crucible and the metal vapor pipelineInlet portThe relationship of (a) to (b) is as follows:
when the metal steam pressure in the metal steam pipeline is 50000-100000 Pa, the volume V1 of the turbulence suppression chamber is (8-14) SInlet portThe volume V2 of the buffer groove is (6-8) SInlet port，SLong and long/SShort length6-7, and the total area S1 of the discharge hole is (5-6) SInlet port；
When the metal steam pressure in the metal steam pipeline is 10000-50000 Pa, the volume V1 of the turbulence suppression chamber is (6-8) SInlet portThe volume V2 of the buffer groove is (4-6) SInlet port，SLong and long/SShort length5-6, and the total area S1 of the discharge hole is (4-5) SInlet port；
When the metal steam pressure in the metal steam pipeline is 1000-10000 Pa, the volume V1 of the turbulence suppression chamber is (3-6) SInlet portThe volume V2 of the buffer tank is (3-4) SInlet port，SLong and long/SShort length4-5, and the total area S1 of the discharge hole is (3-4) SInlet port。
Preferably, the pressure stabilizing plate is of a porous structure, and the total pore area S of the pressure stabilizing plateTotal area of poresAnd the area S of the outlet position of the coating nozzleAn outletThe ratio of (A) to (B) is 0.1 or more, i.e.：
STotal area of pores/SAn outlet≥0.1。
Preferably, the hole pattern on the pressure stabilizing plate is a round hole, a square hole or a triangular hole.
Preferably, the pore trend on the voltage stabilizing plate is a straight line or a curve.
Preferably, the outlet of the coating nozzle is arranged in a slit type or a porous type, and the area S of the outlet position of the coating nozzleAn outletA position S connected with the top of the crucible and the metal vapor pipelineInlet portThe ratio of the components is more than or equal to 0.05-5, namely:
San outlet/SInlet port≥0.05～5。
Preferably, when the coating nozzle is in a slit shape, the linear shape of the coating nozzle is a straight line or a curved line, and when the coating nozzle is in a porous shape, the linear shape of the coating nozzle is a rectangle, a circle or a trapezoid.
Preferably, the porous pipe is a rectangular pipe or a cylindrical pipe.
Preferably, the perforated pipe is connected with the metal steam pipeline in a threaded mode or an embedded mode.
Preferably, the hole pattern of the spitting hole is circular, square or triangular.
Preferably, the turbulence suppression chamber is arranged in a rectangular shape or a semicircular shape.
The invention provides a vacuum coating device with porous noise reduction and uniform distribution of metal vapor, wherein the metal vapor is obtained by melting metal liquid through crucible induction heating, the metal vapor enters a flow distribution box body through a metal vapor pipeline, a section of reverse porous pipe connected with the metal vapor pipeline is arranged in the flow distribution box body, and a plurality of discharge holes are formed in the surface of the porous pipe. When the metal steam enters the turbulence inhibiting chamber at the tail end of the porous pipe from the metal steam pipeline, the metal steam is blocked to return, and the metal steam regularly flows out from the spitting holes arranged on the surface of the porous pipe. And the metal steam flowing out of the spitting hole enters the flow distribution box body, is secondarily distributed by the pressure stabilizing plate, is sprayed out from the nozzle, is sprayed to the pretreated metal plate at a high speed, and forms a uniform metal coating.
Drawings
FIG. 1 is a schematic illustration of European patent BE1009321A 6;
FIG. 2 is a schematic illustration of European patent BE1009317A 61;
FIG. 3 is a schematic diagram of patent JPS 59177370A;
fig. 4 is a schematic view of patent US 4552092A;
FIG. 5 is a schematic representation of patent WO2018/020311A 1;
FIG. 6 is a schematic illustration of patent CN 103249860A;
FIG. 7 is a schematic illustration of patent CN 101175866A;
FIG. 8 is a schematic view of the square housing of FIG. 7;
FIG. 9 is a schematic view showing the construction of the vacuum coating apparatus of the present invention;
FIG. 10 is a cross-sectional view taken along line A-A of FIG. 9;
FIG. 11 is a schematic view showing the volume of the buffer tank, the volume of the turbulence suppression chamber and the area of the discharge hole in the distribution box in the vacuum coating apparatus according to the present invention;
FIG. 12 is a schematic view showing the classification of the parameter areas in the vacuum deposition apparatus of FIG. 9.
Detailed Description
The technical scheme of the invention is further explained by combining the drawings and the embodiment.
Referring to fig. 9, the vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor provided by the present invention includes a crucible 13, an induction heater 16 is disposed outside the crucible 13 for heating the molten metal 14 in the crucible 13 to form the metal vapor 15, the top of the crucible 13 is connected to a rectangular distribution box 18 through a metal vapor pipe 17, a horizontal pressure stabilizing plate 19 is disposed in the distribution box 18, a coating nozzle 25 is disposed at the top of the distribution box 18, and a pressure regulating valve 20 is disposed on the metal vapor pipe 17.
The distribution box 18 is also provided with a vertical porous pipe 21, the porous pipe 21 is positioned below the pressure stabilizing plate 19, the lower end of the porous pipe 21 is communicated with the metal steam pipeline 20 through a screw thread or an embedding mode, the upper end of the porous pipe 21 is provided with a closed turbulence inhibiting chamber 22, and the side wall of the porous pipe 21 is provided with a plurality of discharge holes 23.
The shape of the perforated pipe 21 can be a straight pipe with various shapes such as rectangle, circle, triangle, etc., and the main function is to distribute the metal vapor 15 after entering the perforated pipe 21 for the first time.
The orifice of the discharge hole 23 may have various shapes such as a circle, a square, or a triangle, and has a main function of distributing the metal vapor 15 that enters the perforated pipe 21.
The turbulence suppressing chamber 22 may have various shapes such as a rectangular shape or a semicircular shape, and mainly functions to buffer the metal vapor 15 entering the perforated pipe 21 from the metal vapor pipe 18 so as not to directly flow out.
The inner wall of the distribution box 18 is provided with a buffer groove 24, and the buffer groove 24 corresponds to the position of the discharge hole 23.
The working process of the vacuum coating device is as follows:
1) the metal block is melted into molten metal 14 in the crucible 13 under the action of the induction heater 16, and the molten metal 14 starts to vaporize under higher superheat degree and low pressure to gradually form metal vapor 15;
2) at the beginning stage, the pressure regulating valve 20 on the metal vapor pipeline 17 connected with the crucible 13 is in a closed state, the metal vapor 15 in the inner cavity of the crucible 13 is continuously increased along with the continuous vaporization of the molten metal 14, and when the pressure in the inner cavity of the crucible 13 reaches a certain value, the pressure regulating valve 20 is opened to ensure that the metal vapor flows out at a certain pressure;
3) at the moment, the induction heater 16 needs to be increased simultaneously so as to supplement the pressure reduced by the opening of the pressure regulating valve 20, and the power range of the induction heater 16 is adjusted so as to keep the pressure of the metal steam 15 in the inner cavity of the crucible 13 in a constant range;
4) after the pressure regulating valve 20 is opened, the metal steam 15 flows forwards along the metal steam pipeline 17, and when the metal steam enters the distribution box 18, the high-speed metal steam 15 flowing in a straight line is forced to flow out regularly through the discharge holes 23 on the perforated pipe 21 due to the blocking effect of the turbulence inhibiting chamber 22 at the upper end of the perforated pipe 21, so that the metal steam 15 is subjected to primary buffer distribution;
5) the porous pipe 21 is communicated with the metal steam pipeline 20 in a threaded or embedded mode, the spitting holes 23 are designed to be distributed at different angles or different apertures and positions to achieve the purpose of uniformly distributing the metal steam 15, and the metal steam 15 distributed through the spitting holes 23 enters a distribution cavity formed by a buffer groove 24;
6) a pressure stabilizing plate 19 is arranged in the distribution box 18 and used for carrying out secondary buffer distribution on the metal steam 15 entering the distribution cavity, and then the uniform metal steam 15 is uniformly sprayed out from a coating nozzle 25 at the top of the distribution box 18;
7) because the outlet of the coating nozzle 25 is narrow, the metal steam 15 forms a larger speed when flowing out, at the moment, a moving steel plate 26 is arranged above the coating nozzle, and because the temperature of the metal steam 15 is higher, the metal steam is rapidly solidified when meeting the steel plate 26 with lower temperature, and a metal coating 27 is formed.
The steel plate 26 is cleaned by a plasma device before vacuum coating, and the preheating temperature reaches 80-300 ℃.
Referring to fig. 10 to 12, in order to make the vacuum deposition apparatus of the present invention better perform the first buffer distribution of the metal vapor 15, the discharge holes 23 are disposed in the length direction and/or the width direction of the distribution box 18.
When the length L of the distribution box 18 is 100 to 500mm, the width W of the distribution box 18 is 20 to 100mm, and the diameter D of the metal steam pipe 17 is 15 to 100mm, the volume V1 of the turbulence suppression chamber 22, the volume V2 of the buffer groove 24, and the area S of the discharge hole 23 provided in the width direction of the distribution box 18Short lengthThe area S of the discharge hole 23 provided in the longitudinal direction of the distribution box 18Long and longThe total area S1 of the discharge opening 23, the position S where the top of the crucible 13 and the metal vapor pipe 17 are connectedInlet portThe relationship of (a) to (b) is as follows:
when the pressure of the metal steam 15 in the metal steam pipeline 17 is 50000-100000 Pa, the volume V1 of the turbulence suppression chamber 22 is (6-10) SInlet portThe volume V2 of the buffer tank 24 is (4-6) SInlet port，SLong and long/SShort length3-4, total area of the discharge hole 23S1＝(3～4)*SInlet port；
When the pressure of the metal steam 15 in the metal steam pipeline 17 is 10000-50000 Pa, the volume V1 of the turbulence suppression chamber 22 is (4-6) SInlet portThe volume V2 of the buffer tank 24 is (2-4) SInlet port，SLong and long/SShort length2-3, the total area S1 of the discharge hole 23 is (2-3) SInlet port；
When the pressure of the metal steam 15 in the metal steam pipeline 17 is 1000-10000 Pa, the volume V1 of the turbulence suppression chamber 22 is (2-4) SInlet portThe volume V2 of the buffer tank 24 is (1-2) SInlet port，SLong and long/SShort length1-2, the total area S1 of the discharge hole 23 is (1-2) SInlet port。
When the length L of the distribution box 18 is 500 to 1000mm, the width W of the distribution box 18 is 30 to 150mm, and the diameter D of the metal steam pipe 17 is 30 to 120mm, the volume V1 of the turbulence suppression chamber 22, the volume V2 of the buffer groove 24, and the area S of the discharge hole 23 provided in the width direction of the distribution box 18Short lengthThe area S of the discharge hole 23 provided in the longitudinal direction of the distribution box 18Long and longThe total area S1 of the discharge opening 23, the position S where the top of the crucible 13 and the metal vapor pipe 17 are connectedInlet portThe relationship of (a) to (b) is as follows:
when the pressure of the metal steam 15 in the metal steam pipeline 17 is 50000-100000 Pa, the volume V1 of the turbulence suppression chamber 22 is (7-12) SInlet portThe volume V2 of the buffer tank 24 is (5-7) SInlet port，SLong and long/SShort length4-5, the total area S1 of the discharge hole 23 is (4-5) SInlet port；
When the pressure of the metal steam 15 in the metal steam pipeline 17 is 10000-50000 Pa, the volume V1 of the turbulence suppression chamber 22 is (5-7) SInlet portThe volume V2 of the buffer tank 24 is (3-5) SInlet port，SLong and long/SShort length4-5, the total area S1 of the discharge hole 23 is (3-4) SInlet port；
When the pressure of the metal steam 15 in the metal steam pipeline 17 is 1000-10000 Pa, the volume V1 of the turbulence suppression chamber 22 is (3-5) SInlet portThe volume V2 of the buffer tank 24 is (2-3) SInlet port，SLong and long/SShort length3-4 total of discharge holes 23Area S1 ═ 2 to 3 ═ SInlet port。
When the length L of the distribution box 18 is 1000 to 2000mm, the width W of the distribution box 18 is 40 to 160mm, and the diameter D of the metal steam pipe 17 is 40 to 140mm, the volume V1 of the turbulence suppression chamber 22, the volume V2 of the buffer groove 24, and the area S of the discharge hole 23 provided in the width direction of the distribution box 18Short lengthThe area S of the discharge hole 23 provided in the longitudinal direction of the distribution box 18Long and longThe total area S1 of the discharge opening 23, the position S where the top of the crucible 13 and the metal vapor pipe 17 are connectedInlet portThe relationship of (a) to (b) is as follows:
when the pressure of the metal steam 15 in the metal steam pipeline 17 is 50000-100000 Pa, the volume V1 of the turbulence suppression chamber 22 is (8-14) SInlet portThe volume V2 of the buffer tank 24 is (6-8) SInlet port，SLong and long/SShort length6-7, the total area S1 of the discharge hole 23 is (5-6) SInlet port；
When the pressure of the metal steam 15 in the metal steam pipeline 17 is 10000-50000 Pa, the volume V1 of the turbulence suppression chamber 22 is (6-8) SInlet portThe volume V2 of the buffer tank 24 is (4-6) SInlet port，SLong and long/SShort length5-6, the total area S1 of the discharge hole 23 is (4-5) SInlet port；
When the pressure of the metal steam 15 in the metal steam pipeline 17 is 1000-10000 Pa, the volume V1 of the turbulence suppression chamber 22 is (3-6) SInlet portThe volume V2 of the buffer tank 24 is (3-4) SInlet port，SLong and long/SShort length4-5, the total area S1 of the discharge hole 23 is (3-4) SInlet port。
The pressure stabilizing plate 19 is provided with a porous structure, and the total pore area S of the pressure stabilizing plate 19Total area of poresAnd the area S of the outlet position of the coating nozzle 25An outletThe ratio of the components is greater than or equal to 0.1, namely:
Stotal area of pores/SAn outlet≥0.1。
The hole pattern on the pressure stabilizer plate 19 may be a circular hole, a square hole, a triangular hole, or other various shapes.
The pore direction on the pressure stabilizing plate 19 is in various forms such as a straight line, a curve or a multilayer structure.
Coating nozzle25 is provided with a slit or a porous outlet, and the area S of the outlet of the coating nozzle 25An outletConnecting position S with the top of the crucible 13 and the metal vapor pipe 17Inlet portThe ratio of the components is more than or equal to 0.05-5, namely:
San outlet/SInlet port≥0.05～5。
When the plating nozzle 25 is formed in a slit shape, the line shape thereof is a straight line shape or a curved line shape, and when the plating nozzle 25 is formed in a porous shape, the line shape thereof is various shapes such as a rectangular shape, a circular shape, or a trapezoidal shape.
The coating nozzle 25 may be made of: graphite, ceramic or metal, and other materials that can be processed.
Example 1
The surface of the steel plate is subjected to zinc evaporation plating, the width of the steel plate 26 is 300mm, the length L of the flow distribution box 18 is 300mm, the width W of the flow distribution box 18 is 60mm, and the diameter of the metal steam pipeline 17 is 40 mm. After the steel plate 26 is cleaned and dried, the steel plate 26 is heated to 150 ℃. The crucible 13 is heated by the induction heater 16 to evaporate zinc, and the pressure of zinc vapor in the crucible 13 reaches 60000Pa by controlling the power, and the pressure regulating valve 20 is closed. When the gas pressure in the crucible 13 reaches 60000Pa, the pressure regulating valve 20 is opened, and the metal vapor 15 is introduced into the distribution box 18 through the metal vapor piping 17, and the perforated pipe 21 and the pressure stabilizing plate 19 are disposed in the distribution box 18.
The turbulence suppressing chamber 22 on the porous tube 21 has a volume V1-7SInlet portThe volume V2 of the buffer groove 24 in the distribution box 18 is 5 × SInlet port,SLong and long/S Short length3, the area S1 of the discharge hole 23 in the perforated tube 21 is 3 × SInlet port。
The pressure-stabilizing plate 19 is of a porous structure STotal area of pores/SAn outlet＝1.5。
The working pressure in the coating nozzle 25 is 55000Pa, the coating nozzle 25 is made of graphite, the outlet of the coating nozzle 25 is in a slit shape and is rectangular, wherein SAn outlet/SInlet port＝1.1。
Example 2
The surface of the steel plate is subjected to zinc evaporation plating, the width of the steel plate 26 is 600mm, the length L of the flow distribution box 18 is 600mm, the width W of the flow distribution box 18 is 80mm, and the diameter of the metal steam pipeline 17 is 70 mm. After the steel plate 26 is cleaned and dried, the steel plate 26 is heated to 150 ℃. The crucible 13 is heated by the induction heater 16 to evaporate zinc, and the power is controlled to make the pressure of the zinc vapor in the crucible 13 reach 30000Pa, and the pressure regulating valve 20 is in a closed state. When the gas pressure in the crucible 13 reaches 30000Pa, the pressure regulating valve 20 is opened, the metal vapor 15 enters the distribution box 18 through the metal vapor pipe 17, and the perforated pipe 21 and the pressure stabilizing plate 19 are arranged in the distribution box 18.
The turbulence suppression chamber 22 on the perforated tube 21 has a volume V1-6 × SInlet portThe volume V2 of the buffer groove 24 in the distribution box 18 is 4 × SInlet port,SLong and long/S Short length4, the area S1 of the discharge hole 23 in the perforated tube 21 is 3 × SInlet port。
The pressure-stabilizing plate 19 is of a porous structure STotal area of pores/SAn outlet＝2.5。
The internal working pressure of the coating nozzle 25 is 25000Pa, the coating nozzle 25 is made of graphite, the outlet of the coating nozzle 25 is in a slit shape and is rectangular, wherein SAn outlet/SInlet port＝0.95。
Example 3
The surface of the steel plate is subjected to zinc evaporation plating, the width of the steel plate 26 is 1200mm, the length L of the flow distribution box body 18 is 1200mm, the width W of the flow distribution box body 18 is 130mm, and the diameter of the metal steam pipeline 17 is 100 mm. After the steel plate 26 is cleaned and dried, the steel plate 26 is heated to 150 ℃. The crucible 13 is heated by the induction heater 16 to evaporate zinc, and the power is controlled to make the pressure of the zinc vapor in the crucible 13 reach 80000Pa, and the pressure regulating valve 20 is in a closed state. When the gas pressure in the crucible 13 reaches 80000Pa, the pressure regulating valve 20 is opened, the metal vapor 15 enters the distribution box 18 through the metal vapor pipe 17, and the perforated pipe 21 and the pressure stabilizing plate 19 are arranged in the distribution box 18.
The turbulence suppressing chamber 22 on the porous tube 21 has a volume V1 of 10SInlet portThe volume V2 of the buffer groove 24 in the distribution box 18 is 7 × SInlet port,SLong and long/SShort lengthWith 6, the area S1 of the discharge hole 23 in the perforated tube 21 is 5 × SInlet port。
The pressure-stabilizing plate 19 is of a porous structure STotal area of pores/SAn outlet＝3。
The working pressure in the coating nozzle 25 is 70000Pa, the material of the coating nozzle 25 is graphite, the outlet of the coating nozzle 25 is in a slit shape and is rectangular, wherein SAn outlet/SInlet port＝1.5。
It should be understood by those skilled in the art that the above embodiments are only for illustrating the present invention and are not to be used as a limitation of the present invention, and that changes and modifications to the above described embodiments are within the scope of the claims of the present invention as long as they are within the spirit and scope of the present invention.
Claims (14)
1. The utility model provides a vacuum coating device with porous noise reduction and homogenization distribution metal vapor which characterized in that: the crucible comprises a crucible, wherein an induction heater used for heating molten metal in the crucible to form metal steam is arranged on the outer side of the crucible, the top of the crucible is connected with a rectangular distribution box body through a metal steam pipeline, a horizontal pressure stabilizing plate is arranged in the distribution box body, a coating nozzle is arranged on the top of the distribution box body, and a pressure regulating valve is arranged on the metal steam pipeline;
a vertical perforated pipe is further arranged in the flow distribution box body and is positioned below the pressure stabilizing plate, the lower end of the perforated pipe is communicated with the metal steam pipeline, the upper end of the perforated pipe is provided with a closed turbulence inhibiting chamber, and the side wall of the perforated pipe is provided with a plurality of discharge holes;
the inner wall of the flow distribution box body is provided with a buffer groove, and the buffer groove corresponds to the spitting hole.
2. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 1, wherein: the discharge hole is provided toward the length direction and/or the width direction of the distribution box body.
3. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 2, wherein: the clothThe length L of the flow box body is 100-500 mm, the width W of the flow distribution box body is 20-100 mm, and when the diameter D of the metal steam pipeline is 15-100 mm, the volume V1 of the turbulence suppression chamber, the volume V2 of the buffer groove and the area S of the discharge hole are arranged in the width direction of the flow distribution box bodyShort lengthAnd an area S of the discharge hole provided in the longitudinal direction of the distribution boxLong and longThe total area S1 of the spit hole and the connecting position S of the top of the crucible and the metal vapor pipelineInlet portThe relationship of (a) to (b) is as follows:
when the metal steam pressure in the metal steam pipeline is 50000-100000 Pa, the volume V1 of the turbulence suppression chamber is (6-10) SInlet portThe volume V2 of the buffer groove is (4-6) SInlet port，SLong and long/SShort length3-4, and the total area S1 of the discharge hole is (3-4) SInlet port；
When the metal steam pressure in the metal steam pipeline is 10000-50000 Pa, the volume V1 of the turbulence suppression chamber is (4-6) SInlet portThe volume V2 of the buffer tank is (2-4) SInlet port，SLong and long/SShort length2-3, and the total area S1 of the discharge hole is (2-3) SInlet port；
When the metal steam pressure in the metal steam pipeline is 1000-10000 Pa, the volume V1 of the turbulence suppression chamber is (2-4) SInlet portThe volume V2 of the buffer tank is (1-2) SInlet port，SLong and long/SShort length1-2, and the total area S1 of the discharge hole is (1-2) SInlet port。
4. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 2, wherein: the length L of the distribution box body is 500-1000 mm, the width W of the distribution box body is 30-150 mm, and when the diameter D of the metal steam pipeline is 30-120 mm, the volume V1 of the turbulence inhibiting chamber, the volume V2 of the buffer groove and the direction of the width of the distribution box body are arranged in the area S of the spitting holeShort lengthAnd an area S of the discharge hole provided in the longitudinal direction of the distribution boxLong and longStation, stationThe total area S1 of the spit hole is connected with the top of the crucible and the metal vapor pipeline at the position SInlet portThe relationship of (a) to (b) is as follows:
when the metal steam pressure in the metal steam pipeline is 50000-100000 Pa, the volume V1 of the turbulence suppression chamber is (7-12) SInlet portThe volume V2 of the buffer groove is (5-7) SInlet port，SLong and long/SShort length4-5, and the total area S1 of the discharge hole is (4-5) SInlet port；
When the metal steam pressure in the metal steam pipeline is 10000-50000 Pa, the volume V1 of the turbulence suppression chamber is (5-7) SInlet portThe volume V2 of the buffer groove is (3-5) SInlet port，SLong and long/SShort length4-5, and the total area S1 of the discharge hole is (3-4) SInlet port；
When the metal steam pressure in the metal steam pipeline is 1000-10000 Pa, the volume V1 of the turbulence suppression chamber is (3-5) SInlet portThe volume V2 of the buffer tank is (2-3) SInlet port，SLong and long/SShort length3-4, and the total area S1 of the discharge hole is (2-3) SInlet port。
5. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 2, wherein: the length L of the distribution box body is 1000-2000 mm, the width W of the distribution box body is 40-160 mm, when the diameter D of the metal steam pipeline is 40-140 mm, the volume V1 of the turbulence inhibiting chamber, the volume V2 of the buffer groove and the direction of the width of the distribution box body are arranged, and the area S of the spitting hole is arrangedShort lengthAnd an area S of the discharge hole provided in the longitudinal direction of the distribution boxLong and longThe total area S1 of the spit hole and the connecting position S of the top of the crucible and the metal vapor pipelineInlet portThe relationship of (a) to (b) is as follows:
when the metal steam pressure in the metal steam pipeline is 50000-100000 Pa, the volume V1 of the turbulence suppression chamber is (8-14) SInlet portThe volume V2 of the buffer groove is (6-8) SInlet port，SLong and long/SShort length6-7, and the total area S1 of the discharge hole is (5-6) SInlet port；
When the metal steam pressure in the metal steam pipeline is 10000-50000 Pa, the volume V1 of the turbulence suppression chamber is (6-8) SInlet portThe volume V2 of the buffer groove is (4-6) SInlet port，SLong and long/SShort length5-6, and the total area S1 of the discharge hole is (4-5) SInlet port；
When the metal steam pressure in the metal steam pipeline is 1000-10000 Pa, the volume V1 of the turbulence suppression chamber is (3-6) SInlet portThe volume V2 of the buffer tank is (3-4) SInlet port，SLong and long/SShort length4-5, and the total area S1 of the discharge hole is (3-4) SInlet port。
6. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 1, wherein: the pressure stabilizing plate is of a porous structure, and the total pore area S of the pressure stabilizing plateTotal area of poresAnd the area S of the outlet position of the coating nozzleAn outletThe ratio of the components is greater than or equal to 0.1, namely:
Stotal area of pores/SAn outlet≥0.1。
7. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 6, wherein: the hole pattern on the pressure stabilizing plate is a round hole, a square hole or a triangular hole.
8. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 7, wherein: the pore trend on the pressure stabilizing plate is a straight line or a curve.
9. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 1, wherein: the outlet of the coating nozzle is arranged in a slit type or a porous type, and the coating is carried outArea S of nozzle outletAn outletA position S connected with the top of the crucible and the metal vapor pipelineInlet portThe ratio of the components is more than or equal to 0.05-5, namely:
San outlet/SInlet port≥0.05～5。
10. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 9, wherein: when the coating nozzle is in a slit shape, the linear shape of the coating nozzle is a straight line shape or a curved line shape, and when the coating nozzle is in a porous shape, the linear shape of the coating nozzle is a rectangle, a circle or a trapezoid.
11. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 1, wherein: the porous pipe is a rectangular pipe or a cylindrical pipe.
12. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to claim 1, wherein: the porous pipe is connected with the metal steam pipeline in a threaded mode or an embedded mode.
13. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to any one of claims 2 to 5, wherein: the hole pattern of the spitting hole is round, square or triangular.
14. The vacuum coating apparatus with porous noise reduction and uniform distribution of metal vapor according to any one of claims 3 to 5, wherein: the turbulence suppression chamber is arranged in a rectangular shape or a semicircular shape.
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