CN209957884U

CN209957884U - Crucible device of plane evaporation

Info

Publication number: CN209957884U
Application number: CN201920525000.1U
Authority: CN
Inventors: 不公告发明人
Original assignee: Fujian Huajiacai Co Ltd
Current assignee: Fujian Huajiacai Co Ltd
Priority date: 2019-04-17
Filing date: 2019-04-17
Publication date: 2020-01-17
Anticipated expiration: 2029-04-17

Abstract

The utility model provides a crucible device of plane evaporation, including crucible body, dispersion plate and heating unit. The material of coating by vaporization is added in the heating cavity of the heating column base, and then the heating column base is heated through the heating unit, so that the heating unit can also heat the crucible body in order to avoid the deposition of the material of coating by vaporization in the crucible body. In order to avoid the phenomenon that the material is blocked at the discharge port, a heating unit is also arranged on the top surface of the crucible body to keep the temperature of the evaporated gas. In order to make even a plurality of discharge gates that have the crucible body of gaseous of evaporation discharge, there is the dispersion board at the internally mounted of crucible body, make the gaseous dispersion of evaporation flow to the discharge gate through the dispersion board for every discharge gate gas volume is the same or similar, makes the material uniform deposition of coating by vaporization then on the base plate of crucible body discharge gate department, guarantees that the quality of coating by vaporization is good.

Description

Crucible device of plane evaporation

Technical Field

The utility model relates to a crucible field of organic material coating by vaporization especially relates to a crucible device of plane evaporation.

Background

Organic Light-Emitting diodes (abbreviated as OLEDs) have a wide application prospect as a new generation of display technology, and are currently widely used in mobile phones, TVs (televisions) and tablet computers. Meanwhile, flexible OLED panels are also under vigorous development, and flexible OLED products are already available. OLEDs form light emitting structures by vapor depositing materials of various functions onto a substrate. Under the action of an electric field, electrons are injected from the cathode of the organic semiconductor, holes are injected from the anode of the organic semiconductor, and the holes and the electrons are compounded in the light-emitting layer to emit light.

The OLED device is composed of a cathode, an anode and organic layers with different functions, wherein the organic layers are sandwiched between the cathode and the anode, and organic materials are mainly formed into films in a vacuum evaporation mode, namely the organic materials are added into a crucible, heated to sublimate or gasify in a vacuum environment, so that the organic materials are deposited on a substrate, and then the OLED device with multiple layers of films is formed.

The current crucible is mainly a point source and a line source. Because the evaporation range of the point source and the line source is limited, the evaporation range is limited, and therefore the substrate has to move (rotate or translate) relatively to the crucible in the cavity to ensure good uniformity of the evaporated film. However, designing a rotating or translating mechanism inside the vacuum chamber makes the structure of the apparatus complicated and prone to malfunction, and the production cost is also high.

SUMMERY OF THE UTILITY MODEL

Therefore, a crucible device for plane evaporation needs to be provided, and the problem that the evaporation effect of the existing crucible is poor is solved.

In order to achieve the above object, the inventors provide a crucible apparatus for planar evaporation, comprising a crucible body, a dispersion plate, and a heating unit; the bottom surface of the crucible body is detachably provided with a plurality of heating column feet, each heating column foot is provided with a heating cavity, an opening of each heating cavity is communicated with the inner cavity of the crucible body, and the top of the crucible body is provided with a plurality of discharge holes; the dispersion board sets up at the inner chamber top of crucible body, the dispersion board is used for carrying out the dispersed flow to the gas of evaporating, heating unit sets up on the outside side and/or the top surface of crucible body, heating unit is used for heating the crucible body and/or keeps the temperature of crucible body.

Further, the dispersion plate is provided with a plurality of dispersion through holes.

Further, the discharge hole and the dispersing through holes are arranged in a staggered mode.

Further, the heating unit comprises a column base heating wire and a body heating wire, wherein the column base heating wire is used for being wound and arranged on the outer side of each heating column base, and the body heating wire is wound and arranged on the outer side of the crucible body.

Further, the heating unit still includes the hot plate, the hot plate sets up on the outside top surface of crucible body, and is a plurality of the discharge gate runs through the hot plate setting.

Different from the prior art, the bottom of the crucible body in the technical scheme is provided with a plurality of heating column feet, and the top surface of the crucible body is provided with a plurality of discharge holes. The material of coating by vaporization is added in the heating cavity of the heating column base, and then the heating column base is heated through the heating unit, so that the heating unit can also heat the crucible body in order to avoid the deposition of the material of coating by vaporization in the crucible body. In order to avoid the phenomenon that the material is blocked at the discharge port, a heating unit is also arranged on the top surface of the crucible body to keep the temperature of the evaporated gas. In order to make even a plurality of discharge gates that have the crucible body of gaseous of evaporation discharge, there is the dispersion board at the internally mounted of crucible body, make the gaseous dispersion of evaporation flow to the discharge gate through the dispersion board for every discharge gate gas volume is the same or similar, makes the material uniform deposition of coating by vaporization then on the base plate of crucible body discharge gate department, guarantees that the quality of coating by vaporization is good.

Drawings

FIG. 1 is a cross-sectional view of a planar evaporation crucible apparatus according to an embodiment;

FIG. 2 is a block diagram of a flat evaporation crucible apparatus according to an embodiment;

FIG. 3 is a schematic view showing the staggered arrangement of the discharge port and the dispersion through hole of the planar evaporation crucible device according to the embodiment.

Description of reference numerals:

10. a crucible body; 11. heating the column base; 12. a discharge port;

20. a dispersion plate; 21. dispersing the through holes;

30. a heating unit; 31. column foot heating wires; 32. a body heating wire; 33. heating plates;

Detailed Description

To explain technical contents, structural features, and objects and effects of the technical solutions in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.

Referring to fig. 1, 2 and 3, the present embodiment provides a flat evaporation crucible apparatus, which includes a crucible body 10, a dispersion plate 20 and a heating unit 30. The bottom surface detachable of crucible body is provided with a plurality of heating column bases 11, can be connected through the screw thread between heating column base and the crucible body, perhaps locks through bolt and nut, reaches the purpose of demountable installation on the bottom surface of crucible body. The heating column base is provided with a heating cavity, the opening of the heating cavity is communicated with the inner cavity of the crucible body, and the top of the crucible body is provided with a plurality of discharge holes 12.

When preparing earlier stage, can dismantle the heating column base, add the material of coating by vaporization in the heating cavity to the heating column base of dismantling again, then will heat on column base installation and the crucible body again. And meanwhile, a substrate is placed at the discharge port of the crucible for evaporation to finish the preparation work in the previous stage. When the evaporation plating is carried out, the substrate and the crucible body are placed in a sealed cavity, the sealed cavity is vacuumized by a vacuum pump, when the vacuum degree is lower than 1.0 x 10 < -4 > Pa, the heating column base, the crucible body and the discharge port are respectively heated by the heating unit, so that the material at the heating column base is heated, gasified or sublimated, the evaporated gas is sprayed out through the dispersion plate and the discharge port, when the substrate with relatively low temperature is encountered, the evaporated gas can be deposited on the substrate, and because the whole evaporation plating area completely covers the substrate, the film coating can be completed in the state that the substrate and the evaporated gas are relatively static, and the purpose of coating the substrate is achieved.

Specifically, the heating unit in this embodiment includes a column base heating wire 31 and a body heating wire 32, and both the column base heating wire and the body heating wire are electrically heated heating wires. Because a plurality of heating column feet are arranged at the bottom of the crucible body, a heating wire is wound on each heating column foot, so that the heating control of each heating column foot can be realized, for example, the on-off control of a certain single heating column foot is realized, and the like. In order to improve the effect of vapor deposition, all the heating pins are heated simultaneously. And then reach the heating coating by vaporization of every heating column foot and carry out unified settlement for the material of heating column foot department is heated gasification or is sublimed, and the gas of evaporation can get into the crucible originally internally. The heating wire is also wound on the outer side surface of the crucible body, so that the crucible body is heated, and the phenomenon that evaporated gas is deposited due to the fact that the temperature of the crucible body is low is effectively avoided.

The heating unit in this embodiment further comprises a heating plate 33, which is an outer shell made of a material with good thermal conductivity and in which heating wires are installed, thereby achieving a heating effect. The material with good thermal conductivity can be metal copper, silver and the like, and can also be ceramic, graphene, a heat-conducting silica gel sheet or a heat-conducting insulating sheet and the like. And a plurality of through holes are arranged on the heating plate, and a plurality of discharge holes on the top surface of the crucible body are avoided through the plurality of through holes, so that the heating plate is placed on the top surface of the crucible body, and the side surface of the discharge hole is coated and heated. Consequently, opening through the independent control hot plate and stopping, can heat the discharge gate, avoid the coating by vaporization material deposit of evaporation to cause the jam in discharge gate department, improve the yield of base plate coating by vaporization, improve the efficiency of coating by vaporization simultaneously.

In order to guarantee that the effect of coating by vaporization is good in this embodiment, install a dispersion board in the crucible body. The dispersion plate is provided with a plurality of dispersion through holes 21. The mode that dispersion through-hole can adopt rectangular array distributes on the dispersion board, consequently passes through the dispersion board when the gaseous of evaporation after, can make this gaseous dispersed flow through the dispersion through-hole to make the gaseous evenly distributed of top evaporation in the crucible body, then the discharge gate of rethread discharge. The purpose of carrying out uniform evaporation on the substrate outside the crucible body is achieved.

In order to increase the effect of coating by vaporization in this embodiment, stagger the arrangement to the discharge gate and the dispersion through-hole of crucible body. The discharge ports can also be arranged in a rectangular array, and are staggered and avoided with the dispersing through holes, so that each discharge port cannot coincide with any dispersing through hole. Therefore, the evaporated gas can be prevented from being directly discharged through the dispersion plate and the discharge port, the evaporated gas is uniformly distributed in the crucible body through a flowing path, and the evaporated gas is ensured to be uniformly discharged. In other embodiments, a plurality of dispersion plates may be installed to control the flow path of the evaporated gas through the through-holes which are staggered with each other. The purpose of uniformly evaporating the substrate is achieved.

It should be noted that, although the above embodiments have been described herein, the scope of the present invention is not limited thereby. Therefore, based on the innovative concept of the present invention, the changes and modifications of the embodiments described herein, or the equivalent structure or equivalent process changes made by the contents of the specification and the drawings of the present invention, directly or indirectly apply the above technical solutions to other related technical fields, all included in the protection scope of the present invention.

Claims

1. A crucible device for plane evaporation is characterized in that: comprises a crucible body, a dispersion plate and a heating unit;

the bottom surface of the crucible body is detachably provided with a plurality of heating column feet, each heating column foot is provided with a heating cavity, an opening of each heating cavity is communicated with the inner cavity of the crucible body, and the top of the crucible body is provided with a plurality of discharge holes;

the dispersion board sets up at the inner chamber top of crucible body, the dispersion board is used for carrying out the dispersed flow to the gas of evaporating, heating unit sets up on the outside side and/or the top surface of crucible body, heating unit is used for heating the crucible body and/or keeps the temperature of crucible body.

2. A flat evaporation crucible apparatus as set forth in claim 1, wherein: the dispersion plate is provided with a plurality of dispersion through holes.

3. A flat evaporation crucible apparatus as set forth in claim 2, wherein: the discharge hole and the dispersing through holes are arranged in a staggered mode.

4. A flat evaporation crucible apparatus as set forth in claim 1, wherein: the heating unit comprises column base heating wires and body heating wires, the column base heating wires are used for winding and arranging the outer sides of the heating column bases, and the body heating wires are wound and arranged on the outer sides of the crucible bodies.

5. A flat evaporation crucible apparatus as set forth in claim 1, wherein: the heating unit further comprises a heating plate, the heating plate is arranged on the top surface of the outer side of the crucible body, and the discharge hole penetrates through the heating plate.