KR20180084802A - 마이크로 기계식 요 레이트 센서 및 그 작동 방법 - Google Patents

마이크로 기계식 요 레이트 센서 및 그 작동 방법 Download PDF

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Publication number
KR20180084802A
KR20180084802A KR1020187014200A KR20187014200A KR20180084802A KR 20180084802 A KR20180084802 A KR 20180084802A KR 1020187014200 A KR1020187014200 A KR 1020187014200A KR 20187014200 A KR20187014200 A KR 20187014200A KR 20180084802 A KR20180084802 A KR 20180084802A
Authority
KR
South Korea
Prior art keywords
operation method
yaw rate
rate sensor
micromechanical yaw
micromechanical
Prior art date
Application number
KR1020187014200A
Other languages
English (en)
Inventor
라인하르트 노일
토르스텐 옴스
로베르트 마울
미르코 하타스
크리스챤 회프너
오트-악셀 프뤼츠
벤야민 슈미트
롤프 셰벤
프리트요프 호익
Original Assignee
로베르트 보쉬 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 로베르트 보쉬 게엠베하 filed Critical 로베르트 보쉬 게엠베하
Publication of KR20180084802A publication Critical patent/KR20180084802A/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0242—Gyroscopes

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
KR1020187014200A 2015-11-20 2016-11-09 마이크로 기계식 요 레이트 센서 및 그 작동 방법 KR20180084802A (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE102015222943 2015-11-20
DE102015222943.2 2015-11-20
DE102016213877.4 2016-07-28
DE102016213877.4A DE102016213877A1 (de) 2015-11-20 2016-07-28 Mikromechanischer Drehratensensor und Betriebsverfahren desselben
PCT/EP2016/077041 WO2017084918A1 (de) 2015-11-20 2016-11-09 Mikromechanischer drehratensensor und betriebsverfahren desselben

Publications (1)

Publication Number Publication Date
KR20180084802A true KR20180084802A (ko) 2018-07-25

Family

ID=58693858

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020187014200A KR20180084802A (ko) 2015-11-20 2016-11-09 마이크로 기계식 요 레이트 센서 및 그 작동 방법
KR1020187014196A KR20180084800A (ko) 2015-11-20 2016-11-10 마이크로 기계식 요 레이트 센서 및 그 제조 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020187014196A KR20180084800A (ko) 2015-11-20 2016-11-10 마이크로 기계식 요 레이트 센서 및 그 제조 방법

Country Status (8)

Country Link
US (2) US10753742B2 (ko)
EP (2) EP3377856B1 (ko)
JP (1) JP6632726B2 (ko)
KR (2) KR20180084802A (ko)
CN (2) CN108449949B (ko)
DE (2) DE102016213877A1 (ko)
TW (1) TWI708042B (ko)
WO (2) WO2017084918A1 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019066224A (ja) * 2017-09-29 2019-04-25 セイコーエプソン株式会社 物理量センサー、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器および移動体
RU197326U1 (ru) * 2019-09-26 2020-04-21 Акционерное общество "ГИРООПТИКА" Чувствительный элемент микромеханического гироскопа двухосевого
DE102020202158A1 (de) * 2020-02-19 2021-08-19 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Drehraten-Sensoranordnung, Drehraten-Sensorarray und entsprechendes Herstellungsverfahren

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19523895A1 (de) * 1995-06-30 1997-01-02 Bosch Gmbh Robert Beschleunigungssensor
DE19844686A1 (de) * 1998-09-29 2000-04-06 Fraunhofer Ges Forschung Mikromechanischer Drehratensensor und Verfahren zur Herstellung
DE19937747C2 (de) 1999-08-10 2001-10-31 Siemens Ag Mechanischer Resonator für Rotationssensor
US6513380B2 (en) * 2001-06-19 2003-02-04 Microsensors, Inc. MEMS sensor with single central anchor and motion-limiting connection geometry
CN1291232C (zh) * 2003-07-18 2006-12-20 中国科学院上海微系统与信息技术研究所 一种微型角速度传感器及其制作方法
FI116543B (fi) * 2004-12-31 2005-12-15 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE102007054505B4 (de) * 2007-11-15 2016-12-22 Robert Bosch Gmbh Drehratensensor
FI122397B (fi) * 2008-04-16 2011-12-30 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
CN101441081B (zh) * 2008-12-12 2011-05-04 紫光股份有限公司 一种振动式微机械陀螺
WO2010103093A1 (de) * 2009-03-11 2010-09-16 Continental Teves Ag & Co. Ohg Doppelaxialer drehratensensor
IT1394007B1 (it) * 2009-05-11 2012-05-17 St Microelectronics Rousset Struttura microelettromeccanica con reiezione migliorata di disturbi di accelerazione
DE102009027897B4 (de) 2009-07-21 2023-07-20 Robert Bosch Gmbh Mikromechanischer Drehratensensor
US9097524B2 (en) * 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
JP5560806B2 (ja) * 2010-03-19 2014-07-30 セイコーエプソン株式会社 ジャイロ素子、ジャイロセンサー、および電子機器
JP2011209002A (ja) * 2010-03-29 2011-10-20 Seiko Epson Corp 振動片、角速度センサー、および電子機器
DE102010029630A1 (de) * 2010-06-02 2011-12-08 Robert Bosch Gmbh Drehratensensor
DE102011006427A1 (de) * 2011-03-30 2012-10-04 Robert Bosch Gmbh Drehratensensor und Verfahren zur Kalibrierung eines Drehratensensors
DE102011006394A1 (de) * 2011-03-30 2012-10-04 Robert Bosch Gmbh Drehratensensor
US8833162B2 (en) * 2011-09-16 2014-09-16 Invensense, Inc. Micromachined gyroscope including a guided mass system
US8978475B2 (en) * 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
JP2013213728A (ja) * 2012-04-02 2013-10-17 Seiko Epson Corp ジャイロセンサーおよび電子機器
DE102012207937A1 (de) * 2012-05-11 2013-11-14 Robert Bosch Gmbh Drehratensensor
DE102012219511A1 (de) 2012-10-25 2014-04-30 Robert Bosch Gmbh Mikromechanische Struktur
DE102013212112A1 (de) 2013-06-25 2015-01-08 Robert Bosch Gmbh Drehratensensor mit drei sensitiven Achsen und Verfahren zur Herstellung eines Drehratensensors
US9360319B2 (en) * 2013-09-05 2016-06-07 Freescale Semiconductor, Inc. Multiple sense axis MEMS gyroscope having a single drive mode
EP3184961B1 (en) * 2013-09-30 2021-01-06 Invensense, Inc. Micromachined gyroscope including a guided mass system
CN104457725B (zh) * 2014-11-14 2017-04-05 六安市华海电子器材科技有限公司 高灵敏度体声波硅微陀螺仪
US10330476B2 (en) * 2017-07-12 2019-06-25 Nxp Usa, Inc. Angular rate sensor with in-phase motion suppression structure

Also Published As

Publication number Publication date
US10753743B2 (en) 2020-08-25
EP3377855A1 (de) 2018-09-26
US10753742B2 (en) 2020-08-25
WO2017084918A1 (de) 2017-05-26
CN108449950B (zh) 2021-10-08
EP3377855B1 (de) 2019-09-18
EP3377856B1 (de) 2019-09-18
US20180321039A1 (en) 2018-11-08
CN108449949A (zh) 2018-08-24
TW201730517A (zh) 2017-09-01
CN108449950A (zh) 2018-08-24
JP6632726B2 (ja) 2020-01-22
DE102016213877A1 (de) 2017-05-24
CN108449949B (zh) 2021-05-25
EP3377856A1 (de) 2018-09-26
WO2017084950A1 (de) 2017-05-26
DE102016213870A1 (de) 2017-05-24
JP2018538530A (ja) 2018-12-27
TWI708042B (zh) 2020-10-21
US20190056226A1 (en) 2019-02-21
KR20180084800A (ko) 2018-07-25

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