KR20180077682A - Vacuum laminator - Google Patents

Abstract

Disclosed is a vacuum laminator. According to an embodiment of the present invention, a vacuum laminator comprises a lower chamber, an upper chamber, and a lower pressurized driving device. The lower chamber includes a lower chucking unit which chucks a first object. The upper chamber is arranged in an upper area of the lower chamber, and includes an upper chucking unit which chucks a second object laminated with the first object. The lower pressurized driving device is arranged in a lower chamber area, and pressurizes the lower chucking unit to the upper chucking unit to process laminating work by pressurizing the lower chucking unit to the upper chucking unit when the inside is in a vacuum state by bonding the lower chamber and the upper chamber. The present invention can facilitate maintenance work.

Description

Vacuum Laminator {VACUUM LAMINATOR}

The present invention relates to a vacuum laminator, and more particularly, to a vacuum laminator in which main driving devices can be arranged in a lower region of a device by realizing a laminating operation for an object to proceed with a lower pressing type, unlike the past.

BACKGROUND ART A plurality of printed circuit boards (PCBs), flexible printed circuit boards (FPCBs), and other substrates are printed with a conductive pattern constituting a circuit.

A coverlay film such as a polyimide film is pre-attached to the surface of the substrate to protect the pattern during the manufacturing process of the substrate and the use of the lead frame or the printed wiring board A dry film resist (DFR) or a photosensitive film is adhered to the surface of a substrate to form a photosensitive layer to be used as an etching resist in the manufacture of the laminate, or by a roller or a vacuum laminator LAMINATING.

When laminating a film on a substrate using a roller, it is known that the roller is superior in terms of speed and productivity.

However, in the case of several stacked substrates, there is a curved surface due to grooves and protrusions depending on the pattern shape. When the lamination is performed by the rolling method under such conditions, the film is completely adhered to the substrate and is not laminated There is a drawback that it can become a factor of defective product.

In contrast, the vacuum laminator has the advantage that the quality of laminating can be improved compared to the rolling method because the film is laminated on the substrate through the way of joining the upper and lower chambers. Therefore, research and development of a vacuum laminator to which such a method is applied are actively undergoing.

Meanwhile, the vacuum laminator currently being applied is driven by the upper pressing type, and laminates the object. That is, the upper chamber disposed in the upper region of the lower chamber is downwardly moved toward the lower chamber to be in contact with the lower chamber, and then the upper chucking portion in the upper chamber is secondarily pressed toward the lower chucking portion in the lower chamber, The laminating operation for the chucked object is performed. The manner in which the upper chucking portion in the upper chamber is laminated while being pressed toward the lower chucking portion side in the lower chamber is called the upper pressing type.

However, when the laminating operation is performed on the object by the upper pressing method as described above, most of the driving devices for driving the upper chucking portion toward the lower chucking portion while driving are required to be installed in the upper region of the upper chamber side, There is a problem that the structures for mounting or supporting the main driving devices including the main driving devices must be thick or large and it is difficult to realize the structural stabilization.

Especially, when the upper pressurization type is applied as in the prior art, there is a problem of precise setting, cable processing, maintenance, etc. due to the structural limitation that all of the driving devices, ie, the large structures, must be moved up / down together It is necessary to develop the technology to solve these problems.

Korea Patent Office Application No. 10-2006-0130830

Accordingly, the present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a laminating method and a laminating method for a laminating apparatus, The present invention is to provide a vacuum laminator capable of realizing stabilization as well as enabling precise setting as well as processing cables neatly and facilitating maintenance work more than ever before.

According to an aspect of the present invention, there is provided an image forming apparatus including: a lower chamber having a lower chucking portion for chucking a first object; An upper chamber disposed in an upper region of the lower chamber and having an upper chucking portion chucking a second object to be laminated with the first object; And the lower chucking part is disposed in the lower chamber area so that the lower chucking part is pressed toward the upper chucking part when the lower chamber and the upper chamber are in contact with each other and the inside is kept vacuum, And a lower pressing type driving device for pressing and driving the pressing part to the pressing part.

The lower pressing type driving device includes: a pressing shaft disposed along the vertical direction and providing a pressing force to the lower chucking portion; And a bellows provided between the lower chamber and the pressurizing shaft so as to be extendable to the outside of the pressurizing shaft.

The lower pressing type driving device includes an upper shaft supporting part disposed at a lower portion of the lower chucking part and connected to an upper part of the pressing shaft and supporting the pressing shaft at an upper portion thereof; And a lower shaft support member connected to a lower portion of the pressurizing shaft and supporting the pressurizing shaft at a lower portion thereof.

The lower pressing type driving device may include a power generating portion generating a power to provide a pressing force to the lower chucking portion through the pressing shaft; A ball screw connected to the power generating unit along a direction intersecting the pressing shaft and rotated in the forward and reverse directions by the power generating unit; And a motion converting and transmitting unit connected to the ball screw and the lower shaft supporter and converting the rotational motion of the ball screw into an up and down linear motion of the lower shaft supporter.

The power generating unit includes: a servomotor that can be controlled; And a speed reducer connected to the servo motor and the ball screw, for reducing the rotational force of the servo motor and transmitting the reduced speed to the ball screw.

The motion converting and transmitting unit includes a first inclined press block connected to the ball screw and linearly moved when the ball screw rotates, the first inclined press block having a first inclined surface on one side thereof. And a second inclined press block having a second inclined surface corresponding to the first inclined surface of the first inclined press block and connected to the lower shaft supporter and vertically moved when horizontally moving the first inclined press block, .

Wherein the motion converting and transmitting part includes a linear guide connected to a lower portion of the first inclined press block and guiding a linear motion of the first inclined press block; And an inclined guide disposed on a first inclined surface of the first inclined press block and a second inclined surface of the second inclined press block to guide inclination of the second inclined press block.

And a load cell disposed between the second inclined press block and the lower shaft support and sensing a pressing force of the lower chuck in real time.

And a controller for controlling the operation of the servo motor based on the sensing value of the load cell.

The lower pressing type driving device may further include a plurality of tuning poles disposed between the upper shaft supporter and the lower shaft supporter and aligning the flatness between the lower chucking portion and the upper chucking portion have.

The lower pressing type driving device may further include a plurality of floating joints connected to the lower shaft supporting member and elastically supporting a pressing force transmitted to the lower shaft supporting member.

The lower chucking portion and the upper chucking portion may all be electrostatic chucks (ESC chucks).

A plurality of vacuum holes may be formed in both the lower chucking portion and the upper chucking portion.

And an alignment stage connected to the lower chucking portion and aligning the lower chucking portion.

And a chamber up / down driving unit connected to the upper chamber and driving the upper chamber up / down with respect to the lower chamber.

According to the present invention, the main driving devices can be disposed in the lower area of the device by implementing the laminating operation for the object with the lower pressing type, unlike the past, so that the upper part can be lightly maintained and the structural stabilization can be realized Not only the precision setting can be done, but also the cable can be cleanly processed and the maintenance work can be facilitated more easily than before.

1 is a perspective view of a vacuum laminator according to an embodiment of the present invention.
FIG. 2 is a perspective view of the lower chamber and the lower pressing type driving device region taken in FIG. 1; FIG.
FIG. 3 is a view illustrating a state in which the frame for supporting the lower chamber is removed in FIG. 2 and the interior of the lower chamber is projected. FIG.
Figure 4 is a side view of Figure 3;
5 is a partial cross-sectional view of Fig.
6 is an enlarged view of the area A in Fig.
7 is a control block diagram of a vacuum laminator according to an embodiment of the present invention.
8 to 10 are step-by-step process diagrams of the laminating operation, respectively.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

FIG. 1 is a perspective view of a vacuum laminator according to an embodiment of the present invention. FIG. 2 is a perspective view illustrating an upper chamber and a lower pressure driving device region in FIG. FIG. 4 is a side view of FIG. 3, FIG. 5 is a partial sectional view of FIG. 4, FIG. 6 is an enlarged view of region A of FIG. 8 is a control block diagram of a vacuum laminator according to an embodiment of the present invention, and FIGS. 8 to 10 are process charts of respective steps of a laminating operation.

Referring to these drawings, the vacuum laminator according to the present embodiment realizes a laminating operation for the first and second objects with the lower pressing type, thereby to remove the main driving device, that is, the lower pressing type driving device 150, So that the upper part can be lightly maintained, thereby achieving structural stabilization, as well as being capable of precise setting, as well as being able to handle cables neatly and to facilitate maintenance work more than ever before. And so on.

The vacuum laminator according to the embodiment of the present invention is capable of providing the above-described effects. The vacuum laminator includes a lower chamber 110 having a lower chucking portion 111, a lower chucking portion 111 disposed at an upper region of the lower chamber 110, And a lower pressing type driving device 150 for driving the lower chuck part 111 disposed in the lower area of the device to the upper chuck part 131.

The lower chamber 110 is a structure fixed to the lower region of the vacuum laminator according to the present embodiment. The lower chamber 110 may be a box-type structure having an open upper part as shown in FIG.

The lower chamber 110 can be fixedly mounted to the lower region of the vacuum laminator by the lower chamber supporting frame 113. The lower chamber supporting frame 113 includes a plurality of support frames 113a supported on the ground, a chamber supporting plate 113b supporting the lower chamber 110, a plurality of support frames 113a and a chamber supporting plate 113b 113b) of the buffer bridge (113c). Since the buffer bridge 113c coupled with the spring is applied, the lower chamber 110 is not damaged even if the upper chamber 130 is pressed. The lower chamber supporting frame 113 may be mounted on the base plate 115 as shown in FIG.

In the lower chamber 110, a lower chucking portion 111 for chucking the first object to be laminated (see FIGS. 1 and 8) is provided. Here, the first object may be a variety of Window Glass, OCA, TSP, PANEL, and Buffer Film. 1 shows a state in which the first object is chucked on the lower chucking portion 111. As shown in FIG.

In the lower region of the lower chamber 110, an alignment stage 120 is provided. The alignment stage 120 serves to align the position of the lower chamber 110 to the X axis, the Y axis, and the? Axis. Due to the alignment stage 120, which may be applied by a combination of cylinder, motor and ball screw, the exact position of the lower chamber 110 can be preset before the laminating operation.

A vacuum line (not shown) may be connected to the lower chamber 110. The vacuum line is used to maintain the inside of the upper chamber 130 and the lower chamber 110 in a vacuum state when the upper chamber 130 is operated down to contact the lower chamber 110 as shown in FIG. . After the inside of the upper chamber 130 and the lower chamber 110 are held in vacuum, the laminating operation for the first and second objects proceeds.

The upper chamber 130 is disposed in the upper region of the lower chamber 110 and can be moved up / down relative to the lower chamber 110, as shown in FIGS. 1 and 8 to 10 .

In other words, the upper chamber 130 is operated downward with respect to the lower fixed chamber 110 so that the laminating operation for the first and second objects proceeds. The chamber up / down driving unit 140 is provided so that the upper chamber 130 can be driven up / down. The chamber up / down driving unit 140 is connected to the upper chamber 130 and serves to up / down the upper chamber 130 with respect to the lower chamber 110.

An outer frame 142 is provided around the chamber up / down driving unit 140 as shown in FIG. The inside frame including the chamber up / down driving part 140 can be partially protected by the outer frame 142. [ The chamber up / down driving unit 140 may be implemented by a combination of a motor and a ball screw, and thus a detailed description thereof will be omitted.

The upper chamber 130 may be a box-type structure having an open bottom as opposed to a lower chamber 110, and an upper chuck 130 for chucking a second object (see FIG. 8) A ring portion 131 is provided. As with the first object, the second object may also be a variety of materials such as Window Glass, OCA, TSP, PANEL, and Buffer Film.

In the present embodiment, both the lower chucking portion 111 and the upper chucking portion 131 may be applied as ESC chucks. Of course, it can be considered that only one of the lower chucking portion 111 and the upper chucking portion 131 is applied as an electrostatic chuck (ESC), all of which are within the scope of the present invention.

For reference, the electrostatic chuck ESC serves to fix the first and second objects to the lower chucking portion 111 and the upper chucking portion 131 corresponding to the first and second objects, respectively, by using a static force.

When the positive electrode (+) and the negative electrode (-) are applied to the lower chucking portion 111 and the upper chucking portion 131, electric potentials opposite to each other are charged in the first and second objects, The first and second objects can be fixed by using the principle that a force is generated.

A plurality of vacuum holes (not shown) are formed on the lower chucking portion 111 and the upper chucking portion 131, respectively, which are applied to the electrostatic chuck ESC. For convenience, the vacuum hole is not shown, and the vacuum hole serves to fix the first and second objects to the lower chucking portion 111 and the upper chucking portion 131, respectively, by the vacuum pressure.

As a result, in the standby state, the vacuum chuck of the vacuum chucks provided in the lower chucking portion 111 and the upper chucking portion 131 moves the first and second objects to the lower chucking portion 111 and the upper chucking portion And the first and second objects are fixed to the lower chucking portion 111 and the upper chucking portion 131 by the electrostatic force of the electrostatic chuck ESC in a vacuum state. Therefore, the efficiency of chucking the first and second objects can be increased and the first and second objects can be prevented from being displaced or skewed during the laminating process.

As described above, most of the driving devices for pressing and driving the upper chucking portion 131 toward the lower chucking portion 111 are located on the upper chamber 130 side when the laminating operation is performed on the object with the conventional upper pressing method The structure for mounting or supporting the main driving devices, including the upper chamber 130, must be thick or large, which makes it difficult to realize structural stabilization.

Especially, when the upper pressurization type is applied as in the prior art, there is a problem of precise setting, cable processing, maintenance, etc. due to the structural limitation that all of the driving devices, ie, the large structures, must be moved up / down together The lower pressing type driving device 150 is applied in this embodiment in order to solve this problem.

1 to 5, the lower pressing type driving device 150 is disposed in a lower region of the lower chamber 110, that is, a lower region of the lower chamber 110, and includes a lower chamber 110, The lower chucking portion 111 is pressed toward the upper chucking portion 131 as shown in FIG. 10 so that the lower and upper chucking portions 131 and 132 can be laminating the first and second objects, (111) toward the upper chucking part (131).

The lower pressing driving device 150 includes a pressing shaft 151 disposed along the vertical direction and providing a pressing force to the lower chucking portion 111. The pressing shaft 151 is disposed along the vertical direction and the driving force provided by the power generating portion 156 is provided to the lower chucking portion 111 so that the lower chucking portion 111 is pressed toward the upper chucking portion 131 So that the laminating operation for the first and second objects can be performed.

A bellows 152 is provided around the pressurizing shaft 151. The bellows 152 is provided on the outer side of the pressurizing shaft 151 between the lower chamber 110 and the pressurizing shaft 151 in a stretchable manner. That is, the bellows 152 is provided on the outer side of the pressurizing shaft 151 between the lower chamber 110 and the pressurizing shaft 151 so as to allow up / down driving of the pressurizing shaft 151 Thereby sealing the space between the lower chamber 110 and the pressurizing shaft 151.

An upper shaft support 153 and a lower shaft support 154 are connected to the upper and lower portions of the pressurizing shaft 151, respectively. The upper shaft support 153 is disposed at a lower portion of the lower chucking portion 111 and is connected to the upper portion of the pressurization shaft 151 and serves to support the pressurization shaft 151 from above. The lower shaft support 154 is connected to the lower portion of the pressurization shaft 151 and supports the pressurization shaft 151 from below.

A plurality of tuning poles 171 and a plurality of floating joints 176 are provided between the upper shaft support 153 and the lower shaft support 154.

The tuning pawl 171 is disposed between the upper shaft support 153 and the lower shaft support 154 and functions to alleviate the flatness between the lower chucking portion 111 and the upper chucking portion 131.

The tuning pawl 171 has an axial shaft 171a which is supported by a base 171g whose upper end is connected to the floating joint 176 and whose lower end is coupled to the lower shaft support 154 and whose flange 171e is formed at the center, A bellows support 171d and 171c for supporting the upper and lower ends of the shaft bellows 171b and a collet chuck 173b for tightening the lower end of the axial shaft 171a, A collet chuck 171g, and a nut 171h for restricting the operation of the collet chuck 171g. The lower end of the axial shaft 171a is non-circular in cross section and is coupled to the non-circular hole (not shown) of the base 171g to prevent rotation. The use of the tunneling pawl 171 having such a structure is advantageous in that the position of the axial shaft 171a can be set by the action of the collet chuck 171g at the initial setting.

The floating joint 176 is connected to the lower shaft support 154 and serves to elastically support a pressing force transmitted to the lower shaft support 154.

This floating joint 176 includes a transverse shaft 176a and a spherical bearing 176b that rotatably supports the transverse shaft 176a and allows for a degree of freedom at each position and a spherical bearing 176b that supports the spherical bearing 176b And a joint frame 176d to which the bearing housing 176c is coupled. The joint frame 176d has a lower end connected to the tuning pawl 171 and an upper end connected to the axial shaft 171a of the upper shaft support 153 by a bolt B to form a body.

The lower pressing type driving device 150 includes a power generating portion 156 and a ball screw 159 and a motion converting and transmitting portion 160 as a means for pressing the lower chucking portion 111 toward the upper chucking portion 131, .

The power generating portion 156 is a portion that generates power to provide a pressing force to the lower chucking portion 111 through the pressurizing shaft 151.

The power generating unit 156 is connected to the servo motor 157 and the ball screw 159 which can be controlled and decelerates the rotational force of the servo motor 157 to be transmitted to the ball screw 159 A speed reducer 158 may be provided.

The ball screw 159 is a screw connected to the power generating portion 156 along the direction intersecting the pressing shaft 151 and rotated in the forward and reverse directions by the speed reducer 158 of the power generating portion 156.

The motion converting and transmitting unit 160 is connected to the ball screw 159 and the lower shaft support 154 and converts rotational motion of the ball screw 159 into upward and downward linear motion of the lower shaft support 154, do.

The motion converting and transmitting unit 160 includes a first inclined pressing block 161 connected to the ball screw 159 and linearly moved when the ball screw 159 rotates and having a first inclined face 161a, The first inclined pressing block 161 has a second inclined surface 162a corresponding to the first inclined surface 161a and is connected to the lower shaft support 154. The first inclined pressing block 161 is horizontally moved The second inclined pressing block 162 may be vertically moved.

A linear guide 163 and an inclined guide 164 are provided in the motion converting and transmitting portion 160 so that the first inclined pressing block 161 can be moved in a proper path when the ball screw 159 rotates.

The linear guide 163 is connected to the lower portion of the first inclined pressing block 161 and serves to guide the linear motion of the first inclined pressing block 161. The inclined guide 164 has a first inclined The first inclined surface 161a of the pressing block 161 and the second inclined surface 162a of the second inclined pressing block 162 serve to guide the inclination of the second inclined pressing block 162 . The linear guide 163 and the inclined guide 164 can both be applied as an LM guide.

When the ball screw 159 is rotated in one direction by the operation of the power generating unit 156, the first inclined pushing block 161 is guided by the linear guide 163, The second inclined pressing block 162 is pushed by the action of the inclined guides 164 of the first inclined surface 161a and the second inclined surface 162a and the second inclined pressing block 162 is moved upward . When the second inclined pressing block 162 is vertically moved upward, the lower shaft support 154 is pressed upward, and the pressurizing shaft 151 is moved up to operate the lower chucking portion 111, To the upper chucking part (131).

The servo motor 157 and the speed reducer 158 that can be controlled as described above generate a large output and the motion converting and transmitting unit 160 converts the rotational motion of the ball screw 159 into the up and down linear motion of the lower shaft support 154 It is possible to meet the recent object of preventing bubbles by pressurizing and laminating the first and second objects with a large force.

A load cell 166 for detecting the pressing force of the lower chucking portion 111 in real time is provided between the second inclined pushing block 162 and the lower shaft support 154. This load cell 166 is connected to the controller 180 as shown in FIG.

The controller 180 controls the operation of the servo motor 157 of the lower pressure-driven driving device 150 based on the detection value of the load cell 166. The controller 180 performing such a role may include a central processing unit 181 (CPU), a memory 182 (MEMORY), and a support circuit 183 (SUPPORT CIRCUIT).

The central processing unit 181 is connected to various computer processors that can be industrially applied to control the operation of the servo motor 157 of the lower pressure driven driving device 150 based on the sensed value of the load cell 166 in this embodiment ≪ / RTI >

The memory 182 (MEMORY) is connected to the central processing unit 181. The memory 182 may be a computer readable recording medium and may be located locally or remotely and may be any of various types of storage devices, including, for example, random access memory (RAM), ROM, floppy disk, hard disk, May be at least one or more memories.

The support circuit 183 (SUPPORT CIRCUIT) is coupled with the central processing unit 181 to support the typical operation of the processor. The support circuit 183 may include a cache, a power supply, a clock circuit, an input / output circuit, a subsystem, and the like.

In this embodiment, the controller 180 controls the operation of the servo motor 157 of the lower pressure-driven driving device 150 based on the detection value of the load cell 166. At this time, a series of processes or the like in which the controller 180 controls the operation of the servo motor 157 of the lower pressure-driven driving device 150 based on the detection value of the load cell 166 may be stored in the memory 182 . Typically, a software routine may be stored in the memory 182. The software routines may also be stored or executed by other central processing units (not shown).

Although processes according to the present invention are described as being performed by software routines, it is also possible that at least some of the processes of the present invention may be performed by hardware. As such, the processes of the present invention may be implemented in software executed on a computer system, or in hardware such as an integrated circuit, or in combination of software and hardware.

Hereinafter, the operation of the vacuum laminator according to the present embodiment will be described.

The robot 190 shown in FIG. 1 adsorbs the first and second objects to the first and second adsorption plates 191 and 192 and then moves between the lower chamber 110 and the upper chamber 130 Then, the first and second objects are placed on the lower chucking portion 111 and the upper chucking portion 131.

After the lower chucking portion 111 and the upper chucking portion 131 respectively chuck the first and second objects, the robot 190 peels off the protective film coated on the first and second objects and is taken out. At this time, due to the vacuum state of the vacuum holes provided in the lower chucking portion 111 and the upper chucking portion 131, the lower and upper chucks 110 and 130 are not in contact with each other, And can be chucked to the king portion 111 and the upper chucking portion 131, respectively.

Next, the vision 195 provided on the outside of the apparatus is advanced to the center of the lower chucking portion 111 and the upper chucking portion 131 to recognize the alignment marks of the first and second objects, do. At this time, the upper chucking portion 131 may be a reference.

The error of the lower chucking portion 111 with respect to the upper chucking portion 131 is adjusted by aligning the lower chucking portion 111 with the aligning stage 120 so that an error between the lower chucking portion 111 and the upper chucking portion 131 Can be set.

When the aligning operation is completed, the operation of the chamber up / down driving unit 140 causes the upper chamber 130 to be operated down so as to contact the lower chamber 110 as shown in FIG. When the upper chamber 130 and the lower chamber 110 are in contact with each other, the upper chamber 130 and the lower chamber 110 are maintained in a vacuum atmosphere by vacuum pumping. 9, when the upper chamber 130 and the lower chamber 110 are brought into contact with each other, the lower chucking portion 111 and the upper chucking portion 131 are laminated in a state of being separated by about 10 millimeters (mm) Thereby forming a preparation position.

When the upper chamber 130 and the lower chamber 110 are evacuated, the lower pressing type driving device 150 is operated as shown in FIG. 10 so that the lower chucking portion 111 is pressed toward the upper chucking portion 131, 2 Let the laminating work for the object proceed.

More specifically, when the servo motor 157 is driven, a large output is transmitted to the ball screw 159 through the speed reducer 158 to rotate the ball screw 159 in one direction. When the ball screw 159 is rotated in one direction, the first inclined pressing block 161 is guided by the linear guide 163 and horizontally moved toward the power generating portion 156 side. When the first inclined press block 161 is horizontally moved toward the power generating portion 156, the second inclined press block 162 (the first inclined press block 161) and the second inclined press block 162 The second inclined pressing block 162 is vertically moved upward. When the second inclined pushing block 162 is vertically moved upward, the lower shaft support 154 can be pressed upward, and the pressurizing shaft 151 is operated up by a series of actions, It is possible to press the ring portion 111 toward the upper chucking portion 131. Therefore, the first and second objects can be touched and laminated with strong pressure.

When the laminating operation is completed, the upper chamber 130 is returned to its original position as shown in FIG. 8, the finished product is discharged through the robot, and the laminating operation is performed again according to the above-described method.

According to the present embodiment having the structure and operation as described above, unlike the prior art, by performing the laminating operation for the first and second objects with the lower pressing type, the main driving device, that is, the lower pressing type driving device 150 It is possible to arrange the lower part of the device so that the upper part can be lightly maintained, thereby achieving structural stabilization as well as being capable of precise setting, as well as being able to treat the cable neatly, .

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. It is therefore intended that such modifications or alterations be within the scope of the claims appended hereto.

110: lower chamber 111: lower chuck portion
113: Lower chamber supporting frame 120: Aligning stage
130: upper chamber 131: upper chucking portion
140: chamber up / down driving part 150: lower pressing type driving device
151: pressure shaft 152: bellows
153: Upper shaft support 154: Lower shaft support
156: Power generating unit 157: Servo motor
158: Reduction gear 159: Ball screw
160: motion conversion transfer unit 161: first inclined press block
161a: first inclined surface 162: second inclined press block
162a: second inclined plane 163: straight guide
164: inclination guide 166: load cell
171: Tuning pole 176: Floating joint
180: controller 190: robot
195: Vision

Claims (15)

A lower chamber having a lower chucking portion for chucking the first object;
An upper chamber disposed in an upper region of the lower chamber and having an upper chucking portion chucking a second object to be laminated with the first object; And
The lower chucking part is disposed in the lower chamber area so that the lower chucking part is pressed toward the upper chucking part when the lower chamber is in contact with the upper chamber so that the inside is vacuum- And a lower pressing type driving device for pressing the upper laminating device toward the lower laminating device. The method according to claim 1,
Wherein the lower pressing type driving device comprises:
A pressing shaft disposed along the vertical direction and providing a pressing force to the lower chucking portion; And
And a bellows provided between the lower chamber and the pressurizing shaft so as to be extendable to the outside of the pressurizing shaft. 3. The method of claim 2,
Wherein the lower pressing type driving device comprises:
An upper shaft support disposed at a lower portion of the lower chucking portion and connected to an upper portion of the pressing shaft, the upper shaft supporting portion supporting the pressing shaft at an upper portion thereof; And
Further comprising a lower shaft support member connected to a lower portion of the pressurizing shaft and supporting the pressurizing shaft at a lower portion thereof. The method of claim 3,
Wherein the lower pressing type driving device comprises:
A power generating unit that generates power to provide a pressing force to the lower chucking unit through the pressing shaft;
A ball screw connected to the power generating unit along a direction intersecting the pressing shaft and rotated in the forward and reverse directions by the power generating unit; And
And a motion transducer connected to the ball screw and the lower shaft supporter for converting the rotational motion of the ball screw into a linear motion of the lower shaft supporter. 5. The method of claim 4,
The power generation unit includes:
Servo motor that can be controlled; And
And a speed reducer connected to the servo motor and the ball screw for reducing the rotational force of the servo motor and transmitting the decelerated speed to the ball screw. 5. The method of claim 4,
Wherein the motion conversion /
A first inclined press block connected to the ball screw and linearly moved when the ball screw rotates, the first inclined press block having a first inclined surface on one side; And
And a second inclined press block having a second inclined surface corresponding to the first inclined surface of the first inclined press block and connected to the lower shaft supporter and being vertically moved when horizontally moving the first inclined press block Wherein the vacuum laminator is a vacuum laminator. The method according to claim 6,
Wherein the motion conversion /
A linear guide connected to a lower portion of the first inclined press block and guiding a linear motion of the first inclined press block; And
Further comprising an inclined guide disposed on a first inclined surface of the first inclined press block and a second inclined surface of the second inclined press block to guide the inclination of the second inclined press block. Laminator. The method according to claim 6,
Further comprising a load cell disposed between the second inclined press block and the lower shaft support and sensing a pressing force of the lower chuck in real time. 9. The method of claim 8,
Further comprising a controller for controlling the operation of the servomotor based on a detection value of the load cell. The method of claim 3,
Wherein the lower pressing type driving device comprises:
Further comprising a plurality of tuning poles disposed between the upper shaft support and the lower shaft support to level the flatness between the lower chucking portion and the upper chucking portion. The method of claim 3,
Wherein the lower pressing type driving device comprises:
Further comprising a plurality of floating joints connected to the lower shaft support and resiliently supporting a pressing force transmitted to the lower shaft support. The method according to claim 1,
Wherein the lower chucking portion and the upper chucking portion are both electrostatic chucks (ESC chucks). The method according to claim 1,
Wherein a plurality of vacuum holes are formed in both the lower chucking portion and the upper chucking portion. The method according to claim 1,
Further comprising an alignment stage connected to the lower chucking portion and aligning the lower chucking portion. The method according to claim 1,
Further comprising a chamber up / down driving part connected to the upper chamber and driving the upper chamber up / down with respect to the lower chamber.

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