KR20180069377A - Probe module and array tester including the same - Google Patents

Abstract

Disclosed are a probe module and an array tester including the same. The array tester comprises: a stage for supporting a substrate; a testing module disposed on an upper portion of the stage and configured to test the substrate; and a probe module disposed on the upper portion of the stage and configured to provide a testing signal to electrodes formed on the substrate. The probe module comprises: a probe unit having a bar shape and including probes for providing the testing signal; a base member having an upper surface on which the probe unit is mounted to be able to rotate through a rotary shaft; a rotation driving unit for rotating the probe unit; and a first support member mounted on the probe unit in front of the rotary shaft and supporting the probe unit to prevent the probe unit from sagging downward.

Description

[0001] PROBE MODULE AND ARRAY TESTING DEVICE INCLUDING THE SAME [0002]

Embodiments of the present invention relate to a probe module and an array test apparatus including the probe module. More particularly, the present invention relates to a probe module for applying an inspection signal to the pixel electrodes to inspect a substrate on which display driving circuits including a plurality of pixel electrodes are formed, and an array testing apparatus including the same.

A flat panel display device such as a liquid crystal display (LCD), a plasma display panel (PDP), or an organic light emitting diode (OLED) includes a thin film transistor (TFT) substrate on which driving circuits are formed. As an example, in the case of an LCD substrate, a TFT substrate, a color filter substrate on which color filters and common electrodes are formed, and a liquid crystal and a backlight unit injected between the TFT substrate and the color filter substrate.

In general, an array testing apparatus can be used for detecting whether or not the pixel electrodes of the TFT substrate are defective and includes a stage for supporting the TFT substrate, a light source for illuminating the TFT substrate, A modulator for forming an electric field with the pixel electrodes and transmitting the light emitted from the light source, and an inspection camera for imaging the modulator to determine whether the pixel electrodes of the TFT substrate are defective .

The array testing apparatus may include a probe module for applying an inspection signal to the pixel electrodes. The probe module may include a probe unit extending in a bar shape and a rotation driving unit for rotating the probe unit according to the arrangement of the pixel electrodes. However, since the probe unit is mounted on the rotation driving unit in the form of a cantilever, the probe unit may be sagged downward, and when probes of the probe unit are brought into contact with the pixel electrode, May occur.

In addition, when the rotation driving unit is constructed using a motor, the motor may interfere with the modulator. Specifically, the motor may be disposed above the rotary shaft for rotation of the probe unit, so that the operating range of the modulator may be limited by the motor. As a result, the modulator may interfere with the motor of the rotation driving unit according to the arrangement position of the pixel electrodes, thereby making it impossible to inspect the substrate.

Korean Patent Publication No. 10-2010-0015248 (Published Date: February 12, 2010) Korean Patent Laid-Open Publication No. 10-2012-0110386 (Open date: October 10, 2012)

It is an object of the present invention to provide a probe module and an array test apparatus including the probe module capable of reducing the sagging phenomenon and / or the audible phenomenon of the probe unit.

It is another object of the present invention to provide a probe module capable of preventing interference between a rotary drive for rotation of a probe unit and a modulator for substrate inspection, and an array test apparatus including the probe module.

According to an aspect of the present invention, there is provided a probe module including: a probe unit having a bar shape and providing an inspection signal to electrodes formed on a substrate; and a probe unit mounted rotatably A first support member mounted on the probe unit in front of the rotation shaft and supporting the probe unit to prevent the probe unit from sagging downward; Member.

According to embodiments of the present invention, the probe module further includes a second support member mounted on the probe unit at a rear side of the rotation axis and supporting the probe unit to prevent the probe unit from being lifted upward .

According to embodiments of the present invention, a ball plunger may be used as each of the first and second support members.

According to the embodiments of the present invention, the upper surface of the base member may be provided with a groove into which the balls of the first and second support members are partially inserted.

According to embodiments of the present invention, the probe unit may include a slotted cam slot at the rear end thereof, and the rotation driving unit may include a cam follower inserted into the cam slot, And a drive unit for rotating the probe unit.

According to embodiments of the present invention, the drive unit may include a pneumatic or hydraulic cylinder and a drive arm connecting the pneumatic or hydraulic cylinder with the cam follower.

According to embodiments of the present invention, first and second stoppers for restricting the rotation angle of the probe unit may be disposed on the base member.

According to another aspect of the present invention, there is provided an array testing apparatus including: a stage for supporting a substrate; an inspection module disposed on the stage and inspecting the substrate; And a probe module for providing an inspection signal to the electrodes formed on the substrate. The probe module may include a probe unit having a bar shape and having probes for providing the inspection signal, a base member having an upper surface on which the probe unit is rotatably mounted through a rotary shaft, And a first support member attached to the probe unit in front of the rotation shaft and supporting the probe unit to prevent the probe unit from sagging downward.

According to embodiments of the present invention, the array testing apparatus includes a first gantry unit for supporting the inspection module and moving the inspection module horizontally and vertically, and a second gantry unit for supporting the probe module, And a second gantry unit for moving in the vertical direction.

According to embodiments of the present invention, the inspection module may include: a modulator that generates an electric field with the electrodes of the substrate and changes the light transmission amount according to the magnitude of the electric field; And an inspection camera for capturing the image.

According to embodiments of the present invention, the probe module further includes a second support member mounted on the probe unit at a rear side of the rotation axis and supporting the probe unit to prevent the probe unit from being lifted upward .

According to embodiments of the present invention, a ball plunger may be used as each of the first and second support members.

According to the embodiments of the present invention, the upper surface of the base member may be provided with a groove into which the balls of the first and second support members are partially inserted.

According to embodiments of the present invention, the probe unit may include a slotted cam slot at the rear end thereof, and the rotation driving unit may include a cam follower inserted into the cam slot, And a drive unit for rotating the probe unit.

According to embodiments of the present invention, first and second stoppers for restricting the rotation angle of the probe unit may be disposed on the base member.

According to the embodiments of the present invention as described above, the probe module of the array testing apparatus includes a probe unit for providing an inspection signal, a base member having an upper surface on which the probe unit is rotatably mounted via a rotation shaft, A rotation driving unit for rotating the probe unit, and a first support member mounted on the probe unit in front of the rotation shaft and supporting the probe unit to prevent the probe unit from sagging downward. By disposing the first support member in front of the rotary shaft as described above, the problem that the probe unit is sagged downward due to its own weight can be sufficiently prevented.

The probe module may include a second support member mounted on the probe unit at a rear side of the rotary shaft and supporting the probe unit to prevent the probe unit from being lifted upward. By disposing the second support member behind the rotation axis as described above, the problem that the probe unit is lifted up when the probes of the probe unit are brought into close contact with the substrate can be sufficiently prevented.

In addition, a cam slot is provided at the rear end of the probe unit, and the rotation driving unit can rotate the probe unit by linearly reciprocating the cam follower inserted in the cam slot. The rotation driving unit may include a driving unit for linearly reciprocating the cam follower and a driving arm to which the cam follower is mounted. In particular, since the pneumatic or hydraulic cylinder used as the drive unit does not need to be located above the rotary shaft and the height and size of the drive arm is sufficiently small compared to the motor used in the prior art, Interference with the modulator can be sufficiently prevented. As a result, the types of substrates that can be inspected using the array testing apparatus can be greatly increased, and the utilization of the array testing apparatus can be greatly improved.

1 is a schematic plan view illustrating an array test apparatus including a probe module according to an embodiment of the present invention.
2 is a schematic front view for explaining the array testing apparatus shown in Fig.
3 is a schematic front view for explaining the inspection module shown in Figs. 1 and 2. Fig.
FIGS. 4 and 5 are schematic plan views for explaining the operation of the probe module and the probe unit shown in FIGS. 1 and 2. FIG.
FIG. 6 is a schematic side view for explaining the probe module shown in FIGS. 4 and 5. FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention should not be construed as limited to the embodiments described below, but may be embodied in various other forms. The following examples are provided so that those skilled in the art can fully understand the scope of the present invention, rather than being provided so as to enable the present invention to be fully completed.

In the embodiments of the present invention, when one element is described as being placed on or connected to another element, the element may be disposed or connected directly to the other element, . Alternatively, if one element is described as being placed directly on another element or connected, there can be no other element between them. The terms first, second, third, etc. may be used to describe various items such as various elements, compositions, regions, layers and / or portions, but the items are not limited by these terms .

The terminology used in the embodiments of the present invention is used for the purpose of describing specific embodiments only, and is not intended to be limiting of the present invention. Furthermore, all terms including technical and scientific terms have the same meaning as will be understood by those skilled in the art having ordinary skill in the art, unless otherwise specified. These terms, such as those defined in conventional dictionaries, shall be construed to have meanings consistent with their meanings in the context of the related art and the description of the present invention, and are to be interpreted as being ideally or externally grossly intuitive It will not be interpreted.

Embodiments of the present invention are described with reference to schematic illustrations of ideal embodiments of the present invention. Accordingly, changes from the shapes of the illustrations, e.g., changes in manufacturing methods and / or tolerances, are those that can be reasonably expected. Accordingly, the embodiments of the present invention should not be construed as being limited to the specific shapes of the regions described in the drawings, but include deviations in the shapes, and the elements described in the drawings are entirely schematic and their shapes Is not intended to describe the exact shape of the elements and is not intended to limit the scope of the invention.

FIG. 1 is a schematic plan view for explaining an array test apparatus including a probe module according to an embodiment of the present invention, and FIG. 2 is a schematic front view for explaining the array test apparatus shown in FIG.

1 and 2, a probe module 200 according to an embodiment of the present invention and an array test apparatus 100 including the probe module 200 are configured to perform an inspection process on a substrate 10 on which a plurality of electrodes are formed Can be used. For example, the probe module 200 and the array test apparatus 100 may be used to perform an electrical test on the substrate 10 on which the display driving circuits including the plurality of pixel electrodes are formed. Particularly, the probe module 200 and the array test apparatus 100 can be used for the performance test of the TFT substrate of the display panel.

According to an embodiment of the present invention, the array testing apparatus 100 includes a stage 110 for supporting the substrate 10, a stage 110 disposed above the stage 110, And a probe module 200 disposed at an upper portion of the stage and for providing an inspection signal to the pixel electrodes. The array testing apparatus 100 further includes a first gantry unit 130 for supporting the inspection module 120 and moving the inspection module 120 horizontally and vertically, And a second gantry unit 132 for supporting the probe module 200 in the horizontal and vertical directions.

For example, as shown, the array testing apparatus 100 may include two first gantry units 130, and the first gantry units 130 may include two inspection modules 120 Respectively. The array test apparatus 100 may include four second gantry units 132 and four probe modules 200 may be mounted on the second gantry units 132 .

Although not shown in detail, the first and second gantry units 130 and 132 may be configured to be movable in a first horizontal direction, for example, an X-axis direction, and the inspection modules 120, (Not shown) for moving the probe modules 120 and the probe modules 200 in the second horizontal direction, for example, the Y axis direction, For example, vertical driving parts (not shown) for moving in the Z-axis direction.

3 is a schematic front view for explaining the inspection module shown in Figs. 1 and 2. Fig.

3, each of the inspection modules 120 includes a modulator 122 generating an electric field with the pixel electrodes of the substrate 10 and varying a light transmission amount according to the magnitude of the electric field, And an inspection camera 124 disposed above the modulator 122 and for imaging the modulator 122.

Although not shown in detail, the modulator 122 may change certain physical properties depending on whether the substrate 10 is defective or not. Particularly, when the pixel electrodes of the substrate 10 are normal, an electric field is formed in the modulator 122, and molecules can be arranged in a predetermined direction by the electric field to allow light to pass therethrough. Alternatively, ) Are defective, the electric field is not formed or the intensity of the electric field is lowered, so that the molecular arrangement is not changed and the light can not pass therethrough.

For example, the modulator 122 may include an electrode layer (not shown) in which common electrodes are formed and a light source material layer (not shown) in which physical properties are changed by the electric field. The electrode layer may form an electric field therebetween together with the pixel electrodes of the substrate 10, and the electrooptic material layer may be a PDLC (Polymer Dispersed Liquid Crystal) layer whose molecular arrangement is changed by the electric field. However, the front light material layer is not limited to the PDLC layer but may be formed of various materials such as an inorganic EL (Electro Luminance) layer and a liquid crystal layer.

Specifically, when the pixel electrodes are normal, the molecular arrangement of the electrophoretic material layer is changed in an electric field direction by an electric field formed between the common electrodes and the pixel electrodes, so that light can be transmitted. When the pixel electrodes are defective The light transmittance may be reduced or the light may not be transmitted. That is, the light transmission amount of the modulator 122 may be changed according to the electrical performance of the pixel electrodes. The inspection camera 124 senses the presence or absence of defects of the substrate 10 by imaging the modulator 122 can do.

The inspection camera 124 may include a telecentric lens 126 and a coaxial illumination 128. Although not shown, the light emitted from the coaxial illumination 128 may be reflected toward the modulator 124 via a half lens (not shown) and reflected from the modulator 124 and / or the substrate 10 The detected light can be detected by the inspection camera 124.

Alternatively, the array test apparatus 100 may include a backlight illumination unit disposed under the stage 110, in which case the stage 110 may transmit the light irradiated from the backlight illumination unit The light emitting material may be made of a light emitting material.

FIGS. 4 and 5 are schematic plan views for explaining the operation of the probe module and the probe unit shown in FIGS. 1 and 2, and FIG. 6 is a schematic side view for explaining the probe module shown in FIGS. to be.

Referring to FIGS. 4 to 6, the probe module 200 may be used to apply an inspection signal to the pixel electrodes of the substrate 10. For example, the probe module 200 includes a probe unit 210 having a bar shape and having probes 202 for providing the inspection signal, and a probe unit 210 having the probe unit 210, A base member 220 having an upper surface rotatably mounted thereon, and a rotation driving unit 230 for rotating the probe unit 210.

The probes 202 may be arranged in the longitudinal direction of the probe unit 210 and the rear end of the probe unit 210 may be coupled to the upper surface of the base member 220 by the rotation axis 212 . For example, the rotation axis 212 may penetrate the rear end of the probe unit 210 and may be fastened to the upper surface of the base member 220, A bearing 214 may be disposed between the ends. The base member 220 may be mounted to the second gantry unit 132 so that the probe module 200 can be moved in the horizontal and vertical directions by the second gantry unit 132.

According to an embodiment of the present invention, the probe module 200 may be mounted on the probe unit 210 in front of the rotation axis 212 and may be mounted on the probe unit 210 to prevent the probe unit 210 from sagging downward. And a first support member 240 supporting the first support member 210. For example, a ball plunger may be used as the first support member 240. In particular, the first support member 240 may be mounted on the probe unit 210 such that the ball 240A of the first support member 240 protrudes downward, The ball 240A of the probe unit 240 may be in close contact with the upper surface of the base member 220 to support the probe unit 210. [ As described above, since the probe unit 210 is supported by the first support member 240 in front of the rotary shaft 212, the problem of the probe unit 210 sagging downward due to its own weight can be sufficiently improved.

According to an embodiment of the present invention, the probe module 210 is mounted on the probe unit 210 at a rear side of the rotation axis 212, and the probe unit 210 is attached to the probe unit 210 in order to prevent the probe unit 210 from being lifted upward. And a second support member 242 for supporting the probe unit 210. [ For example, a ball plunger may be used as the second support member 242. Particularly, the second support member 242 can be mounted on the probe unit 210 such that the ball 242A of the second support member 242 protrudes downward, The ball 242A of the probe unit 242 may be in close contact with the upper surface of the base member 220 to support the probe unit 210. [ Since the probe unit 210 is supported by the second support member 242 at the rear of the rotary shaft 212 as described above, the probes 202 of the probe unit 210 are electrically connected to the pixel electrodes The problem that the probe unit 210 is heard upward can be sufficiently improved.

The rotation axis 212 and the first and second support members 240 and 242 are arranged in a triangular shape but the rotation axis 212 and the first and second support members 240 and 242 are arranged in a triangular shape, The configurations of the first and second light sources 240 and 242 may be changed, so that the scope of the present invention is not limited thereto. On the other hand, on the upper surface of the base member 220, grooves (not shown) for guiding the balls 240A and 242A of the first and second support members 240 and 242 when the probe unit 210 rotates 222 may be provided. Specifically, the balls 240A and 242A of the first and second support members 240 and 242 are partially inserted into the groove 222, for example, a part of the bottom of the balls 240A and 242A is inserted .

The rotation driving unit 230 may be connected to the rear end of the probe unit 210 to rotate the probe unit 210. For example, as shown in FIGS. 4 and 5, the probe unit 210 may include a slotted cam slot 216 at the rear end thereof, and the rotation drive unit 230 may include a cam slot 216 And a driving unit 234 that rotates the probe unit 210 by linearly reciprocating the cam follower 232. The driving unit 234 includes a driving unit 234,

The drive unit 234 may be a pneumatic or hydraulic cylinder and the drive unit 234 may include a drive arm 236 connecting the pneumatic or hydraulic cylinder and the cam follower 232. That is, the driving arm 236 can be linearly reciprocated by the hydraulic or pneumatic cylinder, and the cam follower 232 can be mounted to a lower portion of the driving arm 236. Although not shown in detail, the cam follower 232 may include a roller disposed within the cam slot 216. [

The rotation drive unit 230 may rotate the probe unit 210 along the array direction of the pixel electrodes on the substrate 10. Particularly, the rotation angle of the probe unit 210 is set on the base member 220 The first and second stoppers 250 and 252 may be disposed. For example, the first and second stoppers 250 and 252 may limit the rotation angle of the probe unit 210 to 90 degrees.

The probe module 200 of the array test apparatus 100 includes a probe unit 210 for providing an inspection signal and a probe unit 210 for connecting the probe unit 210 to the rotary shaft 212 A rotation driving unit 230 for rotating the probe unit 210 and a probe unit 210 disposed in front of the rotation axis 212. The probe unit 210 includes a base member 220 having an upper surface rotatably mounted on the probe unit 210, And a first support member 240 supporting the probe unit 210 to prevent the probe unit 210 from being sagged downward. By disposing the first support member 240 in front of the rotary shaft 212 as described above, the problem of the probe unit 210 sagging downward due to its own weight can be sufficiently prevented.

The probe module 200 is mounted on the probe unit 210 at the rear of the rotary shaft 212 and supports the probe unit 210 to prevent the probe unit 210 from being lifted upward. 2 support member 242. [ When the probes 202 of the probe unit 210 are brought into close contact with the substrate 10 by disposing the second support member 242 behind the rotation axis 212 as described above, The problem of being heard upwards can be sufficiently prevented.

In addition, a cam slot 216 is provided at the rear end of the probe unit 210, and the rotation driving unit 230 linearly reciprocates the cam follower 232 inserted into the cam slot 216, (Not shown). The rotation driving unit 230 may include a driving unit 234 for linearly reciprocating the cam followers 232 and a driving arm 236 to which the cam followers 232 are mounted. In particular, the pneumatic or hydraulic cylinder used as the drive unit 234 does not need to be located above the rotary shaft 212, and the height and size of the drive arm 236, as compared to the motor used in the prior art The interference with the modulator 122 of the array testing apparatus 100 can be sufficiently prevented. As a result, the number of types of substrates that can be inspected using the array testing apparatus 100 can be greatly increased, and the utilization of the array testing apparatus 100 can be greatly improved.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention as defined in the following claims. It can be understood that.

10: substrate 100: array test apparatus
110: Stage 120: Inspection module
122: Modulator 124: Inspection camera
130: first gantry unit 132: second gantry unit
200: probe module 202: probe
210: probe module 212: rotating shaft
216: cam slot 220: base member
222: groove 230: rotation driving part
232: Cam follower 234: Drive unit
236: drive arm 240: first support member
242: second support member 250: first stopper
242: Second stopper

Claims (15)

A probe unit having a bar shape and providing an inspection signal to electrodes formed on the substrate;
A base member having an upper surface on which the probe unit is rotatably mounted via a rotary shaft;
A rotation driving unit for rotating the probe unit; And
And a first support member mounted on the probe unit in front of the rotary shaft and supporting the probe unit to prevent the probe unit from being sagged downward. The probe module according to claim 1, further comprising a second support member mounted on the probe unit at a rear side of the rotary shaft and supporting the probe unit to prevent the probe unit from being lifted upward. The probe module according to claim 2, wherein a ball plunger is used as each of the first and second support members. 4. The probe module of claim 3, wherein grooves are formed on the upper surface of the base member, the balls of which are partially inserted into the first and second support members. The probe unit according to claim 1, wherein a proximal end of the probe unit is provided with a slotted cam slot,
The rotation drive unit includes:
A cam follower inserted into the cam slot; And
And a drive unit for rotating the probe unit by linearly reciprocating the cam follower. 6. The probe module of claim 5, wherein the drive unit comprises a pneumatic or hydraulic cylinder and a drive arm connecting the pneumatic or hydraulic cylinder to the cam follower. The probe module according to claim 5, wherein first and second stoppers are disposed on the base member for limiting the rotation angle of the probe unit. A stage for supporting a substrate;
An inspection module disposed on the stage and for inspecting the substrate; And
And a probe module disposed on the stage and for providing an inspection signal to electrodes formed on the substrate,
The probe module includes:
A probe unit having a bar shape and having probes for providing the inspection signal;
A base member having an upper surface on which the probe unit is rotatably mounted via a rotary shaft;
A rotation driving unit for rotating the probe unit; And
And a first support member mounted on the probe unit in front of the rotary shaft and supporting the probe unit to prevent the probe unit from being sagged downward. The apparatus of claim 8, further comprising: a first gantry unit for supporting the inspection module and moving the inspection module in horizontal and vertical directions; And
Further comprising a second gantry unit for supporting the probe module and moving the probe module in a horizontal and vertical direction. 9. The apparatus of claim 8,
A modulator that generates an electric field between the electrodes of the substrate and changes the light transmittance according to the magnitude of the electric field; And
And an inspection camera disposed on the modulator for imaging the modulator. The probe module of claim 8,
Further comprising a second support member mounted on the probe unit at a rear side of the rotation shaft and supporting the probe unit to prevent the probe unit from being lifted upward. 12. The array test apparatus according to claim 11, wherein a ball plunger is used as each of the first and second support members. 13. The apparatus of claim 12, wherein grooves are formed in the upper surface of the base member to partially insert balls of the first and second support members. The probe unit according to claim 8, wherein a proximal end portion of the probe unit is provided with a slotted cam slot,
The rotation drive unit includes:
A cam follower inserted into the cam slot; And
And a drive unit for rotating the probe unit by linearly reciprocating the cam follower. 15. The array test apparatus according to claim 14, wherein first and second stoppers are disposed on the base member for limiting the rotation angle of the probe unit.

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