KR102612275B1 - Array tester - Google Patents

Abstract

An array test device is disclosed. The device includes a stage for supporting a substrate on which display driving circuits including a plurality of pixel electrodes are formed, a plurality of inspection modules disposed on the upper part of the stage for inspecting the substrate, and supporting the inspection modules. It includes a plurality of gantry units for moving the inspection modules in the horizontal direction. The device includes a plurality of probe units including a plurality of probes for applying electrical inspection signals to the substrate, and a plurality of second gantry units for moving the probe units in horizontal and vertical directions.

Description

Array tester {Array tester}

Embodiments of the present invention relate to an array test device for inspecting a substrate on which display driving circuits are formed. More specifically, it relates to an array test device for testing the electrical performance of a TFT (Thin Film Transistor) substrate on which display driving circuits including a plurality of pixel electrodes are formed.

Flat panel display devices such as Liquid Crystal Display (LCD), Plasma Display Panel (PDP), and Organic Light Emitting Diodes (OLED) include a TFT substrate on which driving circuits are formed. As an example, an LCD substrate may include a TFT substrate, a color filter substrate on which a color filter and common electrodes are formed, liquid crystal injected between the TFT substrate and the color filter substrate, and a backlight unit.

In general, an array test device can be used to detect defects in pixel electrodes of the TFT substrate, and includes a stage for supporting the TFT substrate, a light source for illuminating the TFT substrate, and disposed on top of the TFT substrate. It may include a modulator that forms an electric field between the pixel electrodes and transmits light irradiated from the light source, and an inspection camera for imaging the modulator to determine whether the pixel electrodes of the TFT substrate are defective. You can. As an example, Republic of Korea Patent Publication No. 10-1470591 discloses an array test device that improves inspection reliability by uniformly irradiating light from a light source to a modulator.

Embodiments of the present invention are aimed at providing an improved array test device capable of responding to various substrate sizes.

An array test device according to an aspect of the present invention for achieving the above object includes a stage for supporting a substrate on which display driving circuits including a plurality of pixel electrodes are formed, and disposed on the upper part of the stage for inspection of the substrate. It may include a plurality of inspection modules and a plurality of gantry units for supporting the inspection modules and moving the inspection modules in the horizontal direction.

According to embodiments of the present invention, the array test device may include two gantry units, and two inspection modules may be mounted on the gantry units, respectively.

According to embodiments of the present invention, each inspection module includes a modulator that generates an electric field between pixel electrodes of the substrate and whose light transmission amount changes depending on the size of the electric field, and is disposed on top of the modulator, It may include an inspection camera for capturing images of the modulator, and a vertical driving unit for moving the modulator and the inspection camera in a vertical direction.

According to embodiments of the present invention, the vertical driving unit includes a base plate disposed in a vertical direction, a movable plate mounted on the base plate to support the modulator and the inspection camera and move in the vertical direction, and the base plate. It is mounted on and may include a pneumatic cylinder for moving the movable plate in the vertical direction.

According to embodiments of the present invention, the vertical driving unit may further include an emergency stop unit to prevent the movable plate from falling when the internal pressure of the pneumatic cylinder decreases below a preset pressure.

According to embodiments of the present invention, the emergency stop unit may include a second pneumatic cylinder for stopping the vertical movement of the movable plate.

According to embodiments of the present invention, the array test device includes a plurality of probe units including a plurality of probes for applying electrical inspection signals to the substrate, and moving the probe units in horizontal and vertical directions. It may further include a plurality of second gantry units.

According to embodiments of the present invention, the array test device may include four second gantry units, and four probe units may be mounted on each of the second gantry units.

According to the embodiments of the present invention as described above, an array test device includes a stage for supporting a substrate on which display driving circuits including a plurality of pixel electrodes are formed, and a stage disposed on the upper part of the stage for inspection of the substrate. It may include a plurality of inspection modules and a plurality of gantry units for supporting the inspection modules and moving the inspection modules in the horizontal direction. In addition, the array test device includes a plurality of probe units including a plurality of probes for applying electrical inspection signals to the substrate, and a plurality of second gantry units for moving the probe units in horizontal and vertical directions. It can be included.

In particular, a plurality of substrates may be loaded on the stage at the same time, and an inspection process for the substrates may be simultaneously performed by the plurality of inspection modules and the plurality of probe units. Accordingly, the time required for the inspection process for the substrates can be greatly reduced, and since the inspection process for substrates of various sizes is possible, the cost for the inspection process can be greatly reduced.

Additionally, the array test device may include an emergency stop unit to prevent an abnormal fall of the inspection module, thereby preventing loss due to an abnormal fall of the inspection module.

1 is a schematic plan view illustrating an array test device according to an embodiment of the present invention.
FIG. 2 is a schematic front view illustrating the array test device shown in FIG. 1.
FIG. 3 is a schematic perspective view for explaining the inspection module shown in FIG. 1.
4 to 6 are schematic plan views for explaining substrates loaded on the stage shown in FIG. 1.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention does not have to be configured as limited to the embodiments described below and may be embodied in various other forms. The following examples are not provided to fully complete the present invention, but rather are provided to fully convey the scope of the present invention to those skilled in the art.

In embodiments of the present invention, when one element is described as being disposed or connected to another element, the element may be directly disposed or connected to the other element, and other elements may be interposed between them. It could be. Alternatively, if one element is described as being placed directly on or connected to another element, there cannot be another element between them. The terms first, second, third, etc. may be used to describe various items such as various elements, compositions, regions, layers and/or parts, but the items are not limited by these terms. won't

Technical terms used in the embodiments of the present invention are merely used for the purpose of describing specific embodiments and are not intended to limit the present invention. Additionally, unless otherwise limited, all terms, including technical and scientific terms, have the same meaning that can be understood by a person skilled in the art. The above terms, as defined in common dictionaries, will be construed to have meanings consistent with their meanings in the context of the relevant art and description of the invention, and unless explicitly defined, ideally or excessively by superficial intuition. It will not be interpreted.

Embodiments of the invention are described with reference to schematic illustrations of ideal embodiments of the invention. Accordingly, changes from the shapes of the illustrations, for example changes in manufacturing methods and/or tolerances, are fully to be expected. Accordingly, the embodiments of the present invention are not intended to be described as limited to the specific shapes of the regions illustrated but are intended to include deviations in the shapes, and the elements depicted in the drawings are entirely schematic and represent their shapes. is not intended to describe the exact shape of the elements nor is it intended to limit the scope of the present invention.

FIG. 1 is a schematic plan view illustrating an array test device according to an embodiment of the present invention, and FIG. 2 is a schematic front view illustrating the array test device shown in FIG. 1 .

Referring to FIGS. 1 and 2, the array test device 100 according to an embodiment of the present invention performs electrical inspection of the substrate 10 on which display driving circuits including a plurality of pixel electrodes (not shown) are formed. Can be used for. For example, it can be used to test the performance of the TFT substrate of a display panel.

According to one embodiment of the present invention, the array test device 100 includes a stage 110 for supporting the substrate 10, and is disposed on the stage 110 to inspect the substrate 10. It will include a plurality of inspection modules 120 for performing inspection, and a plurality of first gantry units 140 for supporting the inspection modules 120 and moving the inspection modules 120 in the horizontal direction. You can.

In particular, the array test device 100 may include two first gantry units 140, and two inspection modules 120 may be mounted on the first gantry units 140, respectively. .

FIG. 3 is a schematic perspective view for explaining the inspection module shown in FIG. 1.

Referring to FIG. 3, each of the inspection modules 120 includes a modulator 122 that generates an electric field between the pixel electrodes of the substrate 10 and changes the amount of light transmission depending on the size of the electric field. , an inspection camera 124 disposed on the upper part of the modulator 122 and for capturing an image of the modulator 122, and a vertical driver 130 for moving the modulator 122 and the inspection camera 124 in the vertical direction. ) may include.

Although not shown in detail, specific physical properties of the modulator 122 may change depending on whether the substrate 10 is defective. In particular, when the pixel electrodes of the substrate 10 are normal, an electric field is formed inside the modulator 122, and the molecular arrangement is arranged in a certain direction due to the electric field so that light can pass through. In contrast, the substrate 10 ) If the pixel electrodes are defective, the electric field is not formed or the intensity of the electric field is lowered, so the molecular arrangement is not changed, and thus light cannot pass through.

For example, the modulator 122 may include an electrode layer (not shown) on which common electrodes are formed and an electroluminescent material layer (not shown) whose physical properties are changed by the electric field. The electrode layer may form an electric field together with the pixel electrodes of the substrate 10, and the electroluminescent material layer may be a PDLC (Polymer Dispersed Liquid Crystal) layer whose molecular arrangement is changed by the electric field. However, the electroluminescent material layer is not limited to the PDLC layer, and various material layers such as inorganic EL (Electro Luminance) and liquid crystal layers may be used.

Specifically, when the pixel electrodes are normal, the molecular arrangement of the electroluminescent material layer is changed in the direction of the electric field by an electric field formed between the common electrodes and the pixel electrodes, so that light can be transmitted, and when the pixel electrodes are defective, the molecular arrangement of the electroluminescent material layer is changed in the direction of the electric field. The amount of light transmission may be reduced or no light may be transmitted. That is, the light transmission amount of the modulator 122 may change depending on the electrical performance of the pixel electrodes, and the inspection camera 124 can determine whether the substrate is defective by imaging the modulator 122. .

The inspection camera 124 may include a telecentric lens 126 and coaxial lighting 128. Although not shown, the light emitted from the coaxial illumination 128 may be reflected toward the modulator 124 through a half lens (not shown), and may be reflected from the modulator 124 and/or the substrate 10. The light can be detected by the inspection camera 124.

However, unlike the above, the array test device 100 may include a backlight illumination unit disposed below the stage 110, in which case the stage 110 transmits the light emitted from the backlight illumination unit. It may be made of a light-transmitting material.

According to one embodiment of the present invention, the vertical driving unit 130 supports the base plate 132 arranged in the vertical direction, the modulator 122, and the inspection camera 124 and is movable in the vertical direction. It may include a movable plate 134 mounted on the base plate 132, and a first pneumatic cylinder 136 mounted on the base plate 132 for moving the movable plate 134 in the vertical direction. .

The modulator 122 and the inspection camera 124 may be mounted on the movable plate 134 by brackets. The first pneumatic cylinder 136 can move the movable plate 134 in the vertical direction so that the modulator 122 is adjacent to the substrate 10, and the vertical movement of the movable plate 134 is linear. It may be guided by a guiding mechanism such as a motion guide.

Meanwhile, the base plates 132 of the inspection modules 120 may be mounted on the first gantry units 140, and although not shown in detail, the first gantry units 140 may be mounted on the base. Horizontal driving units may be provided to move the plates 132 in a first horizontal direction, for example, in the direction in which the first gantry units 140 extend. As an example, the horizontal driving units may be configured using linear motors and may move the inspection modules 120 to inspection positions, respectively. Additionally, the first gantry units 140 may be configured to be movable in a second horizontal direction orthogonal to the first horizontal direction to adjust the positions of the inspection modules 120. The second horizontal movement of the first gantry units 140 may be achieved by a servo motor, a linear motion guide, etc. However, since the horizontal movement method of the first gantry units 140 can be changed in various ways, the scope of the present invention will not be limited thereby.

According to one embodiment of the present invention, the vertical driving unit 130 may include an emergency stop unit 138 to prevent the inspection module 120 from falling. Specifically, the emergency stop unit 138 is a second device to prevent the movable plate 134 from falling due to the pressure drop when the internal pressure of the first pneumatic cylinder 136 falls below a preset pressure. It may include a pneumatic cylinder. The second pneumatic cylinder may be mounted on the base plate 132 and may stop the vertical movement of the movable plate 134 when the internal pressure is abnormally low. For example, a brake pad may be mounted on one end of the cylinder rod of the second pneumatic cylinder, and the second pneumatic cylinder may have the brake pad installed on the movable plate 134 to prevent the inspection module 120 from falling. ) can be operated to adhere closely to the

For the emergency stop as described above, the base plate 132 may be provided with an opening through which the cylinder rod of the second pneumatic cylinder passes. However, since the detailed configuration of the emergency stop as described above can be changed in various ways, the scope of the present invention will not be limited thereby.

Referring again to FIGS. 1 and 2 , the array test device 100 includes a plurality of probe units 150 including a plurality of probes for applying an electrical signal to the substrate, and the probe units 150 ) may include a plurality of second gantry units 160 for moving the device in horizontal and vertical directions. In particular, the array test device 100 may include four second gantry units 160, and four probe units 150 may be mounted on each of the second gantry units 160. .

For example, the probe units 150 may have a long bar shape, and the probes may be arranged along the direction in which the probe units 150 extend. Additionally, although not shown in detail, the probe units 150 may be configured to rotate according to the electrode arrangement of the substrate 10.

The second gantry units 160 may move the probe units 150 in the first horizontal direction and may also be configured to be movable in the second extension direction. As an example, the probe units 150 may be moved in the first horizontal direction by linear motors, and the second gantry units 160 may be moved in the second horizontal direction by a step motor and a linear motion guide. can be moved in any direction. However, since the horizontal movement method of the second gantry units 160 can be changed in various ways, the scope of the present invention will not be limited thereby.

Vertical movement of the probe units 150 may be performed by a pneumatic cylinder. However, since the vertical movement method of the probe units 150 can also be changed in various ways, the scope of the present invention will not be limited thereby.

4 to 6 are schematic plan views for explaining substrates loaded on the stage shown in FIG. 1.

According to one embodiment of the present invention, a plurality of substrates 10 may be loaded on the stage 10. For example, in the case of 46-inch or 48-inch substrates 10A, eight substrates 10A may be loaded on the stage 110 as shown in FIG. 4, and for 55-inch substrates 10B, 8 boards 10A may be loaded on the stage 110. In the case of , as shown in FIG. 5 , six substrates 10B may be loaded on the stage 110 .

Different from the above, substrates 10C and 10D having different sizes may be loaded on the stage 110. For example, as shown in FIG. 6, three substrates 10C with a size of 65 inches and six substrates 10D with a size of 32 inches can be loaded simultaneously on the stage 110.

According to the embodiments of the present invention as described above, the array test device 100 includes a stage 110 for supporting a substrate 10 on which display driving circuits including a plurality of pixel electrodes are formed, and the stage (110) disposed on the upper part, a plurality of inspection modules 120 for inspecting the substrate 10, and a device for supporting the inspection modules 120 and moving the inspection modules 120 in the horizontal direction. It may include a plurality of first gantry units 140. In addition, the array test device 100 includes a plurality of probe units 150 including a plurality of probes for applying electrical inspection signals to the substrate 10, and the probe units 150 are horizontally and It may include a plurality of second gantry units 160 for moving in the vertical direction.

In particular, a plurality of substrates 10 may be loaded on the stage 110 at the same time, and the plurality of inspection modules 120 and the plurality of probe units 150 may be applied to the substrates 10. Inspection processes can be performed simultaneously. Accordingly, the time required for the inspection process for the substrates 10 can be greatly reduced, and since the inspection process for substrates 10 of various sizes is possible, the cost required for the inspection process can be greatly reduced. You can.

In addition, the array test device 100 may include an emergency stop unit 138 to prevent an abnormal fall of the inspection module 120, thereby preventing loss due to an abnormal fall of the inspection module 120. It can be prevented.

Although the present invention has been described above with reference to preferred embodiments, those skilled in the art may make various modifications and changes to the present invention without departing from the spirit and scope of the present invention as set forth in the claims below. You will be able to understand that it exists.

10: substrate 100: array test device
110: Stage 120: Inspection module
122: modulator 124: inspection camera
126: Telecentric lens 128: Coaxial lighting
130: vertical driving unit 132: base plate
134: Movable plate 136: First pneumatic cylinder
138: emergency stop unit 140: first gantry unit
150: probe unit 160: second gantry unit

Claims (9)

a stage for supporting a substrate on which display driving circuits including a plurality of pixel electrodes are formed;
a plurality of inspection modules disposed on the stage and used to inspect the substrate; and
Includes a plurality of gantry units to support the inspection modules and move the inspection modules in a horizontal direction,
Each of the inspection modules includes a modulator that generates an electric field between the pixel electrodes of the substrate and whose light transmission amount changes depending on the size of the electric field, and an inspection camera disposed on top of the modulator for imaging the modulator. and a vertical driving unit for moving the modulator and inspection camera in the vertical direction,
The vertical driving unit includes a base plate arranged in a vertical direction, a movable plate mounted on the base plate to support the modulator and the inspection camera and move in the vertical direction, and a movable plate mounted on the base plate and moving the movable plate in a vertical direction. An array test device comprising a pneumatic cylinder for moving the array and an emergency stop unit for preventing the movable plate from falling when the internal pressure of the pneumatic cylinder decreases below a preset pressure. delete delete delete delete The array test device according to claim 1, wherein the emergency stop unit includes a second pneumatic cylinder for stopping the vertical movement of the movable plate. The array test device according to claim 6, wherein a brake pad is mounted on the cylinder rod of the second pneumatic cylinder, and the brake pad is in close contact with the movable plate to prevent the movable plate from falling. The method of claim 1, further comprising: a plurality of probe units including a plurality of probes for applying electrical inspection signals to the substrate; and
An array test device further comprising a plurality of second gantry units for moving the probe units in horizontal and vertical directions. delete

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