KR20170140686A - Array tester - Google Patents

Abstract

An array test device is disclosed. The device comprises a stage for supporting a substrate where display driving circuits including a plurality of pixel electrodes are formed, a plurality of inspection modules disposed on the stage to inspect the substrate, and a plurality of gantry units for supporting the inspection modules and moving the inspection modules in a horizontal direction. The device includes a plurality of probe units including a plurality of probes for applying electrical inspection signals to the substrate, and a plurality of second gantry units for moving the probe units in the horizontal and vertical directions. It is possible to cope with various substrate sizes.

Description

Array tester {Array tester}

Embodiments of the present invention relate to an array test apparatus for testing a substrate on which display drive circuits are formed. And more particularly, to an array test apparatus for testing electrical performance of a TFT (Thin Film Transistor) substrate having display driving circuits including a plurality of pixel electrodes formed therein.

Flat panel display devices such as a liquid crystal display (LCD), a plasma display panel (PDP), and an organic light emitting diode (OLED) include a TFT substrate on which driving circuits are formed. As an example, in the case of an LCD substrate, a TFT substrate, a color filter substrate on which color filters and common electrodes are formed, and a liquid crystal and a backlight unit injected between the TFT substrate and the color filter substrate.

In general, an array testing apparatus can be used for detecting whether or not the pixel electrodes of the TFT substrate are defective and includes a stage for supporting the TFT substrate, a light source for illuminating the TFT substrate, A modulator for forming an electric field with the pixel electrodes and transmitting the light emitted from the light source, and an inspection camera for imaging the modulator to determine whether the pixel electrodes of the TFT substrate are defective . As an example, Korean Patent Registration No. 10-1470591 discloses an array test apparatus which improves the inspection reliability by uniformizing light irradiated from a light source to a modulator.

Embodiments of the present invention are directed to providing an improved array test apparatus that can accommodate a variety of substrate sizes.

According to an aspect of the present invention, there is provided an array testing apparatus including: a stage for supporting a substrate on which display driving circuits including a plurality of pixel electrodes are formed; A plurality of inspection modules, and a plurality of gantry units for supporting the inspection modules and moving the inspection modules in a horizontal direction.

According to embodiments of the present invention, the array test apparatus may include two gantry units, and each of the gantry units may be equipped with two test modules.

According to embodiments of the present invention, each of the inspection modules includes a modulator that generates an electric field with the pixel electrodes of the substrate and changes the light transmission amount according to the magnitude of the electric field, An inspection camera for imaging the modulator, and a vertical driver for moving the modulator and the inspection camera in a vertical direction.

According to embodiments of the present invention, the vertical driver includes a base plate disposed in a vertical direction, a movable plate mounted on the base plate to support the modulator and the inspection camera and movable in a vertical direction, And a pneumatic cylinder for moving the movable plate in the vertical direction.

According to embodiments of the present invention, the vertical driving unit may further include an emergency stop unit for preventing the movable plate from falling when the internal pressure of the pneumatic cylinder drops below a predetermined pressure.

According to embodiments of the present invention, the emergency stop unit may include a second pneumatic cylinder for stopping the vertical movement of the movable plate.

According to embodiments of the present invention, the array testing apparatus may include a plurality of probe units including a plurality of probes for applying electrical inspection signals to the substrate, and a plurality of probes for moving the probe units in the horizontal and vertical directions The second gantry units may further include a plurality of second gantry units.

According to embodiments of the present invention, the array testing apparatus may include four second gantry units, and four probe units may be mounted to the second gantry units, respectively.

According to the embodiments of the present invention as described above, the array testing apparatus includes a stage for supporting a substrate on which display driving circuits including a plurality of pixel electrodes are formed, and a stage arranged on the stage for inspection of the substrate A plurality of inspection modules, and a plurality of gantry units for supporting the inspection modules and moving the inspection modules in a horizontal direction. The array testing apparatus may further include a plurality of probe units including a plurality of probes for applying electrical inspection signals to the substrate and a plurality of second gantry units for moving the probe units in the horizontal and vertical directions .

In particular, a plurality of substrates may be simultaneously loaded on the stage, and an inspection process for the substrates may be simultaneously performed by the plurality of inspection modules and the plurality of probe units. Therefore, the time required for the inspection process for the substrates can be greatly shortened and the inspection process for the substrates having various sizes can be performed, so that the cost required for the inspection process can be greatly reduced.

In addition, the array testing apparatus may include an emergency stop unit for preventing an abnormal drop of the inspection module, thereby preventing a loss due to an abnormal drop of the inspection module.

1 is a schematic plan view for explaining an array testing apparatus according to an embodiment of the present invention.
2 is a schematic front view for explaining the array testing apparatus shown in Fig.
3 is a schematic perspective view for explaining the inspection module shown in FIG.
Figs. 4 to 6 are schematic plan views for explaining substrates loaded on the stage shown in Fig.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention should not be construed as limited to the embodiments described below, but may be embodied in various other forms. The following examples are provided so that those skilled in the art can fully understand the scope of the present invention, rather than being provided so as to enable the present invention to be fully completed.

In the embodiments of the present invention, when one element is described as being placed on or connected to another element, the element may be disposed or connected directly to the other element, . Alternatively, if one element is described as being placed directly on another element or connected, there can be no other element between them. The terms first, second, third, etc. may be used to describe various items such as various elements, compositions, regions, layers and / or portions, but the items are not limited by these terms .

The terminology used in the embodiments of the present invention is used for the purpose of describing specific embodiments only, and is not intended to be limiting of the present invention. Furthermore, all terms including technical and scientific terms have the same meaning as will be understood by those skilled in the art having ordinary skill in the art, unless otherwise specified. These terms, such as those defined in conventional dictionaries, shall be construed to have meanings consistent with their meanings in the context of the related art and the description of the present invention, and are to be interpreted as being ideally or externally grossly intuitive It will not be interpreted.

Embodiments of the present invention are described with reference to schematic illustrations of ideal embodiments of the present invention. Thus, changes from the shapes of the illustrations, e.g., changes in manufacturing methods and / or tolerances, are those that can be reasonably expected. Accordingly, the embodiments of the present invention should not be construed as being limited to the specific shapes of the regions described in the drawings, but include deviations in the shapes, and the elements described in the drawings are entirely schematic and their shapes Is not intended to describe the exact shape of the elements and is not intended to limit the scope of the invention.

FIG. 1 is a schematic plan view for explaining an array testing apparatus according to an embodiment of the present invention, and FIG. 2 is a schematic front view for explaining the array testing apparatus shown in FIG.

Referring to FIGS. 1 and 2, an array testing apparatus 100 according to an embodiment of the present invention includes an electric test (not shown) for a substrate 10 on which display driving circuits including a plurality of pixel electrodes . ≪ / RTI > For example, it can be used for performance testing of a TFT substrate of a display panel.

According to an embodiment of the present invention, the array testing apparatus 100 includes a stage 110 for supporting the substrate 10, a stage 110 disposed above the stage 110, And a plurality of first gantry units 140 for supporting the inspection modules 120 and for moving the inspection modules 120 in a horizontal direction, .

Particularly, the array testing apparatus 100 may include two first gantry units 140, and two inspection modules 120 may be mounted on the first gantry units 140, respectively .

3 is a schematic perspective view for explaining the inspection module shown in FIG.

3, each of the inspection modules 120 includes a modulator 122 generating an electric field with the pixel electrodes of the substrate 10 and varying a light transmission amount according to the magnitude of the electric field, A test camera 124 disposed above the modulator 122 for imaging the modulator 122 and a vertical driver 130 for moving the modulator 122 and the test camera 124 in the vertical direction, ).

Although not shown in detail, the modulator 122 may change certain physical properties depending on whether the substrate 10 is defective or not. Particularly, when the pixel electrodes of the substrate 10 are normal, an electric field is formed in the modulator 122, and molecules can be arranged in a predetermined direction by the electric field to allow light to pass therethrough. Alternatively, ) Are defective, the electric field is not formed or the intensity of the electric field is lowered, so that the molecular arrangement is not changed and the light can not pass therethrough.

For example, the modulator 122 may include an electrode layer (not shown) in which common electrodes are formed and a light source material layer (not shown) in which physical properties are changed by the electric field. The electrode layer may form an electric field therebetween together with the pixel electrodes of the substrate 10, and the electrooptic material layer may be a PDLC (Polymer Dispersed Liquid Crystal) layer whose molecular arrangement is changed by the electric field. However, the front light material layer is not limited to the PDLC layer but may be formed of various materials such as an inorganic EL (Electro Luminance) layer and a liquid crystal layer.

Specifically, when the pixel electrodes are normal, the molecular arrangement of the electrophoretic material layer is changed in an electric field direction by an electric field formed between the common electrodes and the pixel electrodes, so that light can be transmitted. When the pixel electrodes are defective The light transmittance may be reduced or the light may not be transmitted. That is, the light transmittance of the modulator 122 can be changed according to the electrical performance of the pixel electrodes, and the inspection camera 124 can determine whether the substrate is defective by imaging the modulator 122 .

The inspection camera 124 may include a telecentric lens 126 and a coaxial illumination 128. Although not shown, the light emitted from the coaxial illumination 128 may be reflected toward the modulator 124 via a half lens (not shown) and reflected from the modulator 124 and / or the substrate 10 The detected light can be detected by the inspection camera 124.

Alternatively, the array test apparatus 100 may include a backlight illumination unit disposed under the stage 110, in which case the stage 110 may transmit the light irradiated from the backlight illumination unit The light emitting material may be made of a light emitting material.

According to an embodiment of the present invention, the vertical driving unit 130 may include a base plate 132 disposed in a vertical direction, a vertical plate 130 supporting the modulator 122 and the inspection camera 124, A movable plate 134 mounted on the base plate 132 and a first pneumatic cylinder 136 mounted on the base plate 132 for moving the movable plate 134 in the vertical direction .

The modulator 122 and the inspection camera 124 may be mounted to the movable plate 134 by brackets. The first pneumatic cylinder 136 may move the movable plate 134 in a vertical direction such that the modulator 122 is adjacent to the substrate 10 and the vertical movement of the movable plate 134 may be linear, It can be guided by a guide mechanism such as a motion guide.

The base plates 132 of the inspection modules 120 may be mounted on the first gantry units 140 and the first gantry units 140 may be mounted on the base And horizontal drivers for moving the plates 132 in a first horizontal direction, for example, in an extending direction of the first gantry units 140. As an example, the horizontal drivers may be configured using a linear motor and may move the inspection modules 120 to inspection locations, respectively. The first gantry units 140 may be configured to be movable in a second horizontal direction orthogonal to the first horizontal direction to adjust the position of the inspection modules 120. The second movement of the first gantry units 140 in the horizontal direction may be performed by a servo motor, a linear motion guide, or the like. However, since the method of moving the first gantry units 140 horizontally may be variously modified, the scope of the present invention is not limited thereto.

According to an embodiment of the present invention, the vertical driving unit 130 may include an emergency stop unit 138 for preventing the inspection module 120 from dropping. Specifically, when the internal pressure of the first pneumatic cylinder 136 drops below a predetermined pressure, the emergency stop unit 138 stops the operation of the second pneumatic cylinder 136 to prevent the movable plate 134 from falling due to the pressure drop. And may include a pneumatic cylinder. The second pneumatic cylinder may be mounted on the base plate 132 and may stop the vertical movement of the movable plate 134 when the internal pressure is abnormally low. For example, a brake pad may be mounted at one end of the cylinder rod of the second pneumatic cylinder, and the second pneumatic cylinder may be configured such that the brake pad is moved to the movable plate 134 As shown in Fig.

The base plate 132 may be provided with an opening through which the cylinder rod of the second pneumatic cylinder is passed for the emergency stop. However, the detailed configuration of the emergency stop described above may be variously changed, so that the scope of the present invention is not limited thereto.

Referring again to FIGS. 1 and 2, the array testing apparatus 100 includes a plurality of probe units 150 including a plurality of probes for applying an electrical signal to the substrate, And a plurality of second gantry units 160 for moving the first gantry units 160 in the horizontal and vertical directions. In particular, the array testing apparatus 100 may include four second gantry units 160, and four probe units 150 may be mounted on the second gantry units 160, respectively .

For example, the probe units 150 may have a long bar shape, and the probes may be arranged along the extending direction of the probe unit 150. Further, although not shown in detail, the probe units 150 may be configured to be rotatable according to the electrode arrangement of the substrate 10. [

The second gantry units 160 may move the probe units 150 in the first horizontal direction and may be configured to be movable in the second extending direction. In one example, the probe units 150 may be moved in the first horizontal direction by linear motors, and the second gantry units 160 may be moved by the step motor and the linear motion guide to the second horizontal Direction. However, the method of horizontally moving the second gantry units 160 may be variously modified, so that the scope of the present invention is not limited thereto.

The vertical movement of the probe units 150 may be performed by a pneumatic cylinder. However, the method of vertically moving the probe units 150 may be variously changed, so that the scope of the present invention is not limited thereto.

Figs. 4 to 6 are schematic plan views for explaining substrates loaded on the stage shown in Fig.

According to an embodiment of the present invention, a plurality of substrates 10 may be loaded on the stage 10. For example, in the case of 46-inch or 48-inch substrates 10A, eight substrates 10A may be loaded on the stage 110 as shown in FIG. 4, and 55-inch substrates 10B may be loaded, The six substrates 10B can be loaded on the stage 110 as shown in Fig.

Alternatively, on the stage 110, substrates 10C and 10D having different sizes may be loaded. For example, three substrates 10C having a size of 65 inches and six substrates 10D having a size of 32 inches can be simultaneously loaded on the stage 110, as shown in Fig.

According to embodiments of the present invention as described above, the array testing apparatus 100 includes a stage 110 for supporting a substrate 10 on which display driving circuits including a plurality of pixel electrodes are formed, A plurality of inspection modules 120 disposed on the substrate 110 for inspection of the substrate 10 and a plurality of inspection modules 120 for supporting the inspection modules 120 and moving the inspection modules 120 in a horizontal direction And may include a plurality of first gantry units 140. The array testing apparatus 100 may further include a plurality of probe units 150 including a plurality of probes for applying electrical inspection signals to the substrate 10 and a plurality of probe units 150, And a plurality of second gantry units 160 for moving in the vertical direction.

Particularly, a plurality of substrates 10 can be simultaneously loaded on the stage 110, and the plurality of probe modules 120 and the plurality of probe units 150 can be loaded on the substrates 10 The inspection process can be performed simultaneously. Therefore, the time required for the inspection process for the substrates 10 can be greatly shortened, and the inspection process for the substrates 10 having various sizes can be performed, .

The array testing apparatus 100 may include an emergency stop unit 138 for preventing an abnormal drop of the inspection module 120 so that a loss due to an abnormal drop of the inspection module 120 Can be prevented.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention as defined in the following claims. It will be understood.

10: substrate 100: array test apparatus
110: Stage 120: Inspection module
122: Modulator 124: Inspection camera
126: telecentric lens 128: coaxial illumination
130: vertical driving part 132: base plate
134: movable plate 136: first pneumatic cylinder
138: Emergency stop unit 140: First gantry unit
150: probe unit 160: second gantry unit

Claims (8)

A stage for supporting a substrate on which display driving circuits including a plurality of pixel electrodes are formed;
A plurality of inspection modules disposed on the stage and for inspecting the substrate; And
And a plurality of gantry units for supporting the inspection modules and moving the inspection modules in a horizontal direction. 2. The array test apparatus according to claim 1, comprising two gantry units, wherein the gantry units are each equipped with two inspection modules. 2. The apparatus of claim 1,
A modulator for generating an electric field with the pixel electrodes of the substrate and changing the light transmission amount according to the magnitude of the electric field;
An inspection camera disposed on the modulator for imaging the modulator; And
And a vertical driver for moving the modulator and the inspection camera in a vertical direction. The apparatus of claim 3, wherein the vertical driver comprises:
A base plate disposed in a vertical direction;
A movable plate that supports the modulator and the inspection camera and is mounted on the base plate so as to be movable in a vertical direction; And
And a pneumatic cylinder mounted on the base plate for moving the movable plate in a vertical direction. [5] The apparatus of claim 4,
Further comprising an emergency stop unit for preventing the movable plate from falling when the internal pressure of the pneumatic cylinder drops below a preset pressure. 6. The array test apparatus according to claim 5, wherein the emergency stop unit includes a second pneumatic cylinder for stopping vertical movement of the movable plate. The apparatus of claim 1, further comprising: a plurality of probe units including a plurality of probes for applying electrical inspection signals to the substrate; And
Further comprising a plurality of second gantry units for moving the probe units in horizontal and vertical directions. 8. The array test apparatus according to claim 7, comprising four second gantry units, and four probe units are respectively mounted on the second gantry units.

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