KR20180032694A - 유리 시트의 반송용 액체-토출 베어링 - Google Patents

유리 시트의 반송용 액체-토출 베어링 Download PDF

Info

Publication number
KR20180032694A
KR20180032694A KR1020187008313A KR20187008313A KR20180032694A KR 20180032694 A KR20180032694 A KR 20180032694A KR 1020187008313 A KR1020187008313 A KR 1020187008313A KR 20187008313 A KR20187008313 A KR 20187008313A KR 20180032694 A KR20180032694 A KR 20180032694A
Authority
KR
South Korea
Prior art keywords
bearing
orifice
sheet
average
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020187008313A
Other languages
English (en)
Korean (ko)
Inventor
가우탐 엔 커드바
웨이웨이 루오
요시히로 나카무라
테츠조우 야마다
Original Assignee
코닝 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 코닝 인코포레이티드 filed Critical 코닝 인코포레이티드
Publication of KR20180032694A publication Critical patent/KR20180032694A/ko
Ceased legal-status Critical Current

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • B65G49/065Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • H01L21/67784
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0214Articles of special size, shape or weigh
    • B65G2201/022Flat
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02Controlled or contamination-free environments or clean space conditions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04Arrangements of vacuum systems or suction cups
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04Arrangements of vacuum systems or suction cups
    • B65G2249/045Details of suction cups suction cups

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Surface Treatment Of Glass (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Coating Apparatus (AREA)
KR1020187008313A 2008-09-26 2009-09-28 유리 시트의 반송용 액체-토출 베어링 Ceased KR20180032694A (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US10048608P 2008-09-26 2008-09-26
US61/100,486 2008-09-26
US12/428,672 US8047354B2 (en) 2008-09-26 2009-04-23 Liquid-ejecting bearings for transport of glass sheets
US12/428,672 2009-04-23
PCT/US2009/058537 WO2010036993A1 (en) 2008-09-26 2009-09-28 Liquid-ejecting bearings for transport of glass sheets

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020167016097A Division KR102045610B1 (ko) 2008-09-26 2009-09-28 유리 시트의 반송용 액체-토출 베어링

Publications (1)

Publication Number Publication Date
KR20180032694A true KR20180032694A (ko) 2018-03-30

Family

ID=42056217

Family Applications (5)

Application Number Title Priority Date Filing Date
KR1020187008313A Ceased KR20180032694A (ko) 2008-09-26 2009-09-28 유리 시트의 반송용 액체-토출 베어링
KR1020117009036A Expired - Fee Related KR101581985B1 (ko) 2008-09-26 2009-09-28 유리 시트의 반송용 액체-토출 베어링
KR1020167016097A Expired - Fee Related KR102045610B1 (ko) 2008-09-26 2009-09-28 유리 시트의 반송용 액체-토출 베어링
KR1020147033177A Expired - Fee Related KR101642631B1 (ko) 2008-09-26 2009-09-28 유리 시트의 반송용 액체-토출 베어링
KR1020157033103A Ceased KR20150138403A (ko) 2008-09-26 2009-09-28 유리 시트의 반송용 액체-토출 베어링

Family Applications After (4)

Application Number Title Priority Date Filing Date
KR1020117009036A Expired - Fee Related KR101581985B1 (ko) 2008-09-26 2009-09-28 유리 시트의 반송용 액체-토출 베어링
KR1020167016097A Expired - Fee Related KR102045610B1 (ko) 2008-09-26 2009-09-28 유리 시트의 반송용 액체-토출 베어링
KR1020147033177A Expired - Fee Related KR101642631B1 (ko) 2008-09-26 2009-09-28 유리 시트의 반송용 액체-토출 베어링
KR1020157033103A Ceased KR20150138403A (ko) 2008-09-26 2009-09-28 유리 시트의 반송용 액체-토출 베어링

Country Status (5)

Country Link
US (2) US8047354B2 (enExample)
JP (3) JP5539995B2 (enExample)
KR (5) KR20180032694A (enExample)
CN (1) CN102224089B (enExample)
WO (1) WO2010036993A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1917983B (zh) * 2004-02-18 2010-04-28 川崎成套设备股份有限公司 板材的立式加工生产线
US8047354B2 (en) * 2008-09-26 2011-11-01 Corning Incorporated Liquid-ejecting bearings for transport of glass sheets
CN102699788A (zh) * 2012-05-11 2012-10-03 李富业 一种平板玻璃磨边的夹紧传送机构
CN106654030A (zh) * 2016-12-14 2017-05-10 上海天马有机发光显示技术有限公司 一种有机发光显示面板及装置
WO2019105604A1 (de) * 2017-11-30 2019-06-06 Lisec Austria Gmbh Vorrichtung zum teilen von werkstoffplatten
CN114433588B (zh) * 2022-01-13 2023-01-31 深圳市汉东玻璃设备制造有限公司 一种超薄玻璃清洗机水刀过片支撑装置

Family Cites Families (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL302621A (enExample) * 1962-12-28
US3346360A (en) * 1964-05-06 1967-10-10 Libbey Owens Ford Glass Co Apparatus for heat treating and conveying glass sheets vertically oriented
US3485616A (en) * 1966-08-12 1969-12-23 Permaglas Inc Glass sheet conveying and treating apparatus
US3734567A (en) * 1971-01-25 1973-05-22 Bangor Punta Operations Inc Air conveyor for flat thin articles
US4010981A (en) * 1973-09-20 1977-03-08 Hodge Trevor A Air conveyor with tunnel guide
DE3536846A1 (de) * 1985-10-16 1987-04-16 Karl Lenhardt Vorrichtung zum foerdern von hochkant stehenden glasscheiben
US4828434A (en) * 1987-08-31 1989-05-09 Goldco Industries, Inc. Device, apparatus and method for distribution of fluid and selective movement of articles thereby
DE4029669C1 (enExample) * 1990-09-19 1991-07-18 Lenhardt Maschinenbau Gmbh, 7531 Neuhausen, De
JPH0536658A (ja) 1991-07-30 1993-02-12 Tokyo Electron Ltd 基板洗浄・乾燥装置
JPH05235507A (ja) * 1992-02-25 1993-09-10 Hitachi Chem Co Ltd プリント配線板の製造方法および製造装置
US5483984A (en) * 1992-07-10 1996-01-16 Donlan, Jr.; Fraser P. Fluid treatment apparatus and method
JP2850118B2 (ja) 1996-12-03 1999-01-27 東京化工機株式会社 搬送処理装置
JP2001213517A (ja) 1999-11-24 2001-08-07 Daiichi Shisetsu Kogyo Kk 板状部材の搬送装置
JP3914717B2 (ja) * 2001-04-13 2007-05-16 武秀 林 フラットパネル搬送システム
JP2002308423A (ja) * 2001-04-18 2002-10-23 Corning Japan Kk 板材搬送方法および板材搬送装置
JP2003063643A (ja) * 2001-08-30 2003-03-05 Nippon Sekkei Kogyo:Kk 薄板の搬送方法及び装置
TWI222423B (en) * 2001-12-27 2004-10-21 Orbotech Ltd System and methods for conveying and transporting levitated articles
RU2266263C2 (ru) 2002-10-04 2005-12-20 Текнопат Аг Способ перемещения и позиционирования листов стекла и устройство для его осуществления
JP3611122B2 (ja) 2002-11-20 2005-01-19 川重プラント株式会社 板材のスクライブユニットおよび分断設備
ATE368629T1 (de) * 2002-12-05 2007-08-15 Peter Lisec Vorrichtung zum festhalten von werkstoffplatten, wie glasscheiben während ihrer bearbeitung
JP4171293B2 (ja) * 2002-12-16 2008-10-22 株式会社日本設計工業 薄板状材の搬送方法及び装置
JP2004273574A (ja) * 2003-03-05 2004-09-30 Wakomu Denso:Kk 基板浮上装置および同方法
WO2004090634A2 (en) * 2003-04-10 2004-10-21 Nikon Corporation Environmental system including vaccum scavange for an immersion lithography apparatus
DE10319379A1 (de) * 2003-04-30 2004-11-25 Applied Films Gmbh & Co. Kg Vorrichtung zum Transportieren eines flachen Substrats in einer Vakuumkammer
US7077019B2 (en) * 2003-08-08 2006-07-18 Photon Dynamics, Inc. High precision gas bearing split-axis stage for transport and constraint of large flat flexible media during processing
US20050126605A1 (en) * 2003-12-15 2005-06-16 Coreflow Scientific Solutions Ltd. Apparatus and method for cleaning surfaces
CN1917983B (zh) * 2004-02-18 2010-04-28 川崎成套设备股份有限公司 板材的立式加工生产线
DE102004014779A1 (de) * 2004-03-26 2005-10-13 Grenzebach Maschinenbau Gmbh Berührungsfreier Plattenförderer, insbesondere für Glasplatten
JP2008507702A (ja) * 2004-07-23 2008-03-13 ネクステック ソリューションズ, インコーポレイテッド 大型基板フラットパネル検査システム
US7908885B2 (en) 2004-11-08 2011-03-22 New Way Machine Components, Inc. Non-contact porous air bearing and glass flattening device
JP2006312511A (ja) * 2005-05-06 2006-11-16 Kyokuhei Glass Kako Kk ガラス支持枠体
KR101234442B1 (ko) * 2005-06-20 2013-02-18 엘지디스플레이 주식회사 비접촉 반송 장치에서의 지지플랫폼
KR101234475B1 (ko) * 2005-06-20 2013-02-18 엘지디스플레이 주식회사 비접촉 반송 장치에서의 지지플랫폼
US7513716B2 (en) * 2006-03-09 2009-04-07 Seiko Epson Corporation Workpiece conveyor and method of conveying workpiece
JP4629007B2 (ja) 2006-08-08 2011-02-09 株式会社日本設計工業 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置
US7722256B2 (en) * 2006-11-17 2010-05-25 Corning Incorporated Flat surface air bearing assembly
JP4753313B2 (ja) 2006-12-27 2011-08-24 東京エレクトロン株式会社 基板処理装置
US20080268753A1 (en) * 2007-04-24 2008-10-30 Tetsuya Ishikawa Non-contact wet wafer holder
JP4590570B2 (ja) 2007-05-28 2010-12-01 カワサキプラントシステムズ株式会社 板材の縦型搬送装置
JP2008202146A (ja) * 2008-04-21 2008-09-04 Ulvac Japan Ltd 縦型化学気相成長装置及び該装置を用いた成膜方法
US8047354B2 (en) * 2008-09-26 2011-11-01 Corning Incorporated Liquid-ejecting bearings for transport of glass sheets

Also Published As

Publication number Publication date
US20100078295A1 (en) 2010-04-01
JP2016167617A (ja) 2016-09-15
JP5539995B2 (ja) 2014-07-02
JP2014193773A (ja) 2014-10-09
WO2010036993A1 (en) 2010-04-01
KR20150138403A (ko) 2015-12-09
JP6031063B2 (ja) 2016-11-24
KR20160075841A (ko) 2016-06-29
KR101581985B1 (ko) 2015-12-31
US9708136B2 (en) 2017-07-18
KR102045610B1 (ko) 2019-11-15
JP6353483B2 (ja) 2018-07-04
US8047354B2 (en) 2011-11-01
CN102224089B (zh) 2014-07-02
KR101642631B1 (ko) 2016-07-25
US20120000749A1 (en) 2012-01-05
KR20150003884A (ko) 2015-01-09
JP2012504084A (ja) 2012-02-16
CN102224089A (zh) 2011-10-19
KR20110058894A (ko) 2011-06-01

Similar Documents

Publication Publication Date Title
KR101581985B1 (ko) 유리 시트의 반송용 액체-토출 베어링
KR101493532B1 (ko) 유리 시트의 이송을 위한 가스-배출 베어링
US8535548B2 (en) Non-contact etching of moving glass sheets
KR101248534B1 (ko) 기판용 반송 제진 장치의 사용 방법 및 기판용 반송 제진장치
TWI385114B (zh) 實質上以垂直的方向運送玻璃片的方法

Legal Events

Date Code Title Description
A107 Divisional application of patent
PA0104 Divisional application for international application

St.27 status event code: A-0-1-A10-A18-div-PA0104

St.27 status event code: A-0-1-A10-A16-div-PA0104

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T13-X000 Administrative time limit extension granted

St.27 status event code: U-3-3-T10-T13-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T13-X000 Administrative time limit extension granted

St.27 status event code: U-3-3-T10-T13-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T13-X000 Administrative time limit extension granted

St.27 status event code: U-3-3-T10-T13-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T13-X000 Administrative time limit extension granted

St.27 status event code: U-3-3-T10-T13-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T13-X000 Administrative time limit extension granted

St.27 status event code: U-3-3-T10-T13-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T13-X000 Administrative time limit extension granted

St.27 status event code: U-3-3-T10-T13-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T13-X000 Administrative time limit extension granted

St.27 status event code: U-3-3-T10-T13-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T13-X000 Administrative time limit extension granted

St.27 status event code: U-3-3-T10-T13-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T13-X000 Administrative time limit extension granted

St.27 status event code: U-3-3-T10-T13-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T13-X000 Administrative time limit extension granted

St.27 status event code: U-3-3-T10-T13-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T13-X000 Administrative time limit extension granted

St.27 status event code: U-3-3-T10-T13-oth-X000

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000