KR20170129059A - Expand sheet - Google Patents

Abstract

Provided is an expand sheet, restraining the sheet to have low costs. The present invention relates to the expand sheet (1) expanded while a planar workpiece (11) is bonded to the expand sheet, comprising: a base material (3); a first adhesive layer (5a) formed at a position where the workpiece is bonded on the base material; and a second adhesive layer (5b) formed at the position where a circular frame (21) is bonded on the base material. The base material is exposed to an area except the first adhesive layer and the second adhesive layer.

Description

Expand Sheet {EXPAND SHEET}

BACKGROUND OF THE INVENTION Field of the Invention [0001] The present invention relates to an expandable sheet which is extended in a state of being attached to a plate-shaped workpiece.

In order to divide a plate-shaped workpiece represented by a semiconductor wafer into a plurality of chips, a laser beam is condensed inside the workpiece to form a modified layer (modified region) which becomes a starting point of the division, (For example, refer to Patent Document 1). In this processing method, for example, by expanding an expand sheet attached to a workpiece, a force is applied to the workpiece to divide the workpiece into a plurality of chips.

There is also known a processing method for dividing a workpiece on which a modified layer is formed into a plurality of chips by using a force applied when grinding or polishing the workpiece (see, for example, Patent Document 2). After the workpiece is divided into a plurality of chips by this machining method, the expand sheet attached to the workpiece is expanded to widen the interval between adjacent chips. This makes it possible to prevent breakage caused by contact between the chips when the chips are handled thereafter.

When expanding the expanded sheet, an expansion device having two kinds of tables may be used (for example, refer to Patent Document 3). This expansion device expands the expanding sheet by pushing up the central table for supporting the workpiece relative to the annular table for fixing the outer peripheral portion of the expand sheet. Therefore, when this expansion device is used, the expanded sheet is radially expanded.

Recently, an expansion device capable of expanding an expand sheet in a predetermined direction has also been proposed (for example, refer to Patent Document 4). The expansion device includes a first holding unit and a second holding unit arranged to interpose a workpiece in a first direction substantially parallel to the expand sheet and a second holding unit that holds the workpiece in a second direction perpendicular to the first direction And a third holding unit and a fourth holding unit arranged so as to be spaced apart from each other.

The first holding unit and the second holding unit are configured to move in directions away from each other and the third holding unit and the fourth holding unit can move in directions away from each other. If the first holding unit and the second holding unit are moved away from each other and the third holding unit and the fourth holding unit are moved in directions away from each other after holding the four regions of the holding units and the expand tape, The expand sheet can be expanded in the first direction and the second direction.

Japanese Patent Application Laid-Open No. 2002-192370 International Publication No. 2003/77295 Japanese Laid-Open Patent Publication No. 2011-77482 Japanese Laid-Open Patent Publication No. 2014-22382

However, since the above-described expanded sheet is usually disposable, there is a desire to reduce the expense of the expanded sheet as much as possible.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and an object of the present invention is to provide an expanded sheet in which the cost is reduced.

According to one aspect of the present invention, there is provided an expand sheet which is extended in a state in which a plate-like workpiece is adhered (adhered), comprising: a substrate; a first full layer formed at a position where the workpiece is adhered on the substrate; And a second paste layer formed at a position to which an annular frame is adhered, wherein the substrate is exposed in a region excluding the first paste layer and the second paste layer.

In one aspect of the present invention, an adhesive film adhered to the workpiece may be disposed on the first full layer.

In the expanded sheet according to an embodiment of the present invention, since the full layer is not formed in the region outside the second full layer (the region excluding the first full layer and the second full layer) to which the annular frame 21 is adhered, It is possible to reduce the cost resulting from the full layer compared with the case where the full layer is formed in the area outside the two full layers. That is, according to one aspect of the present invention, an expanse sheet in which the cost is reduced can be provided.

1 is a perspective view schematically showing an example of the structure of an expanded sheet.
2 is a cross-sectional view schematically showing an example of the structure of an expanded sheet.
3 is a perspective view schematically showing a state in which an expand sheet is held by an expansion device.
Fig. 4 is a perspective view schematically showing a state in which an expand sheet is expanded by an expansion device. Fig.
5 is a perspective view schematically showing a state in which an annular frame is attached to an expand sheet.
6 is a perspective view schematically showing a state in which an expand sheet is cut along an annular frame.
7 (A) and 7 (B) of FIG. 7 are cross-sectional views schematically showing a state in which an expand sheet is expanded by an extension device.
8 is a cross-sectional view schematically showing an example of the structure of an expanded sheet according to a modification.
9 is a cross-sectional view schematically showing a state after an expand sheet related to a modified example is expanded.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. Fig. 1 is a perspective view schematically showing an example of the structure of an expand sheet according to the present embodiment, and Fig. 2 is a sectional view schematically showing an example of the structure of an expanded sheet. In Fig. 1, a work piece to be attached to an expand sheet and an annular frame are shown together. Fig. 2 shows a planar positional relationship with the cross section of the expand sheet and the work piece and the annular frame .

As shown in Figs. 1 and 2, the expand sheet 1 according to the present embodiment has a sheet-like base material 3 and an adhesive force (adhesion force) formed on the first surface (upper surface) 3a side of the base material 3 (Adhesive layer, adhesive layer) 5 having an adhesive layer (adhesive layer). The base material 3 is formed in a strip shape using, for example, a resin such as polyolefin or vinyl chloride. However, the shape and material of the base material 3 are not limited as long as they can be appropriately expanded by using an expansion device to be described later.

On the other hand, the full layer 5 is formed of, for example, an acrylic or rubber adhesive. The full layer 5 includes a first full layer 5a formed at a position where the plate-shaped work piece 11 is pasted and an annular second full layer 5b surrounding the first full layer 5a . That is, the first surface 3a of the base material 3 is exposed in an area outside the annular second full layer 5b (a region excluding the first full layer 5a and the second full layer 5b). In the second full layer 5b, for example, a material having a stronger adhesive force than the first full layer 5a is used. However, the first full layer 5a and the second full layer 5b may be formed from the same material.

The first full layer 5a forms a first circular adhered area A1 to which the plate-like work 11 is applied and the annular frame 21 is attached to the first full layer 5a by the second full layer 5b. The annular second adhesion region A2 is formed. The adhesive force of the second full layer 5b is stronger than the adhesive force of the first full layer 5a because the adhesive strength of the second full layer 5b is stronger than that of the first full layer 5a, ) Of the first adhesion region (A1).

The diameter (for example, diameter) of the first adhesion area A1 is larger than the size (for example, diameter) of the work 11 and the size of the opening formed in the center of the frame 21 , Diameter). Therefore, when the work 11 and the frame 21 are attached to the expand sheet 1, the inner edge of the second pull layer 5b is located outside the edge of the work 11, And is located on the inner side of the inner edge.

For example, it is preferable that the diameter of the first welding area A1 is larger than the diameter of the work 11 by 20 mm or more. In this case, it is possible to appropriately prevent the occurrence of bad patches due to positional deviation when the work 11 is attached.

On the other hand, the outer edge of the second attachment region A2 may be located outside the inner edge of the frame 21. [ The outer edge of the second adhesive region A2 is located slightly inside of the outer edge of the frame 21 but the outer edge of the second adhesive region A2 is located on the outer edge of the frame 21, Or may be located outside the outer edge.

For example, by making the inner diameter (inner diameter) of the second grass layer 5b larger than the diameter of the work 11 and smaller than the inner diameter of the frame 21, the first adhesion area A1 ) And the second adhesion area A2 can be realized. The expanded sheet 1 is cylindrically wound in a state in which the separator film 7 is stuck to the full layer 5 side, for example, as shown in Fig.

Next, an example of a processing method (use method of the expand sheet 1) using the expanded sheet 1 will be described. In the processing method according to the present embodiment, first, the plate-shaped work 11 is attached to the expand sheet 1, and then the expand sheet 1 is held by the expander. 3 is a perspective view schematically showing a state in which the expand sheet 1 is held by the expansion device.

The work 11 is a circular wafer made of, for example, a semiconductor such as silicon, and the first surface (surface) 11a side is divided into a central device region and an outer peripheral region surrounding the device region have. The device region is further divided into a plurality of regions by lines to be divided (streets) arranged in a lattice pattern, and devices 13 such as ICs and LSIs are formed in each region.

In the inside of the work 11, for example, a modified layer (not shown in Fig. 3 or the like) serving as a starting point of the division is formed along the line to be divided. This modified layer can be formed by a method of condensing a laser beam having a wavelength that is not well absorbed by the work 11 along a line to be divided. Instead of the modified layer, a groove or the like formed by a method such as cutting or laser ablation may be used as a dividing point.

When the plate 11 is to be affixed to the expanded sheet 1, for example, the side of the second surface (back side) 11b of the work 11 is bonded to the first side of the expand sheet 1 And adhered to the adhesion region A1 (first full layer 5a). In the present embodiment, a circular wafer made of a semiconductor such as silicon is used as the work 11, but the material, shape, and structure of the work 11 are not limited.

For example, a substrate made of a material such as ceramic, resin, or metal may be used as the work 11. A wafer or a substrate after being divided into a plurality of chips may be used as the work 11. In this case, by expanding the expand sheet 1, processing for widening the interval between adjacent chips in the work 11 is performed.

3, the expansion device 2 includes a first holding unit (first holding unit) 11 disposed so as to sandwich the work 11 in a first direction D1 substantially parallel to the expand sheet 1, Means 4) and a second holding unit (second holding means) The expanding device 2 is provided with a third holding unit 3 arranged so as to interpose the work 11 in a second direction D2 substantially parallel to the expand sheet 1 and perpendicular to the first direction D1, (Third holding means) 8 and a fourth holding unit (fourth holding means) 10 as shown in Fig.

The first holding unit 4 and the second holding unit 6 are supported by a horizontal moving mechanism (not shown), respectively, and can move in directions away from each other. Similarly, the third holding unit 8 and the fourth holding unit 10 are supported by a horizontal moving mechanism (not shown), respectively, and can move in directions away from each other.

The first holding unit 4, the second holding unit 6, the third holding unit 8 and the fourth holding unit 10 are disposed above the expand sheet 1 (full layer 5 side And a lower support member 14 disposed on the underside of the expand sheet 1 (the second surface (lower surface) 3b side of the substrate 3). The upper support member 12 and the lower support member 14 are all formed into a bar shape extending in a predetermined direction. The lengths of the upper support member 12 and the lower support member 14 in the extension direction are all longer than the diameter of the work 11.

The upper support member 12 and the lower support member 14 of the first retaining unit 4 and the second retaining unit 6 are elongated in the second direction D2. On the other hand, the upper support member 12 and the lower support member 14 of the third retaining unit 8 and the fourth retaining unit 10 are elongated in the first direction D1.

A plurality of contact members 16 are attached to the lower side of each upper support member 12 and the upper side of each lower side support member 14. The plurality of contact members 16 are all circumferentially formed and can rotate in a state of being in contact with the expand sheet 1. The rotational shafts of the plurality of contact members 16 provided in the first holding unit 4 and the second holding unit 6 are all parallel to the first direction D1 and the rotational shafts of the third holding unit 8 and the fourth holding All the rotation axes of the plurality of contact members 16 provided in the unit 10 are parallel to the second direction D2.

3, the upper supporting member 12 and the lower supporting member 14 of each retaining unit are arranged in such a manner as to extend from the second attaching region A2 of the expand sheet 1 The outer area is sandwiched up and down. That is, the four holding areas around the second adhesion area A2 are held by the first holding unit 4, the second holding unit 6, the third holding unit 8, and the fourth holding unit 10 , And a plurality of contact members 16 are brought into contact with the respective regions.

After the expand sheet 1 is held by the expanding device 2, the expand sheet 1 is expanded. 4 is a perspective view schematically showing a state in which the expand sheet 1 is extended by the expansion device 2. As shown in Fig. When expanding the expand sheet 1, the horizontal movement mechanism for supporting the first holding unit 4 and the second holding unit 6 is operated to move the first holding unit 4 and the second holding unit 6 ) In the direction away from each other.

The horizontal moving mechanism for supporting the third holding unit 8 and the fourth holding unit 10 is operated to move the third holding unit 8 and the fourth holding unit 10 in directions away from each other. 4, the expand sheet 1 is extended in the first direction D1 and the second direction D2, and the expanding direction of the expand sheet 1 in the direction along the first direction D1 and the second direction D2 A force can be applied to the work 11.

As described above, the first holding unit 4 and the second holding unit 6, which move in the direction away from each other in the first direction D1, are rotated about the rotational axis parallel to the first direction D1 A plurality of contact members 16 are formed. The third holding unit 8 and the fourth holding unit 10 which move in the direction away from each other in the second direction D2 are provided with a plurality of contact members (Not shown).

The expand sheet 1 is held so as to be movable along the second direction D2 by the first holding unit 4 and the second holding unit 6 and the third holding unit 8, And is held by the fourth holding unit 10 so as to be movable along the first direction D1. That is, the region held by the first holding unit 4 and the second holding unit 6 can be appropriately expanded in the second direction D2, and the third holding unit 8 and the fourth holding unit 10 can be appropriately expanded in the first direction D1.

When the force in the direction along the first direction D1 and the second direction D2 is given to the work 11 by the extension of the expand sheet 1, It is possible to divide the chip into a plurality of chips along the line to be divided and also to widen the interval between adjacent chips. In order to appropriately divide the work 11 and widen the intervals between the chips sufficiently, the arrangement direction of the lines to be divided (direction perpendicular to each line to be divided) is referred to as a first direction D1 or a second direction D2), it is desirable to efficiently utilize the force generated by the expansion.

After expanding the expand sheet 1, the annular frame 21 is affixed to the expand sheet 1 and fixed. 5 is a perspective view schematically showing a state in which an annular frame 21 is attached to an expand sheet 1. In Fig. When the annular frame 21 is to be attached to the expand sheet 1, the annular frame 21 may be attached to the second attachment region A2 of the expand sheet 1, for example, (Second full layer 5b).

Thereby, the annular frame 21 can be affixed to the expand sheet 1 and fixed. In this embodiment, since the annular frame 21 is fixed to surround the work 11 in a state in which the expand sheet 1 is extended, even after the expansion of the expand sheet 1 is released, The gap between the first and second electrodes is kept widened.

In the present embodiment, since the adhesive force of the second adhesive area A2 is stronger than the adhesive strength of the first adhesive area A1, even when the expanded sheet 1 is extended, Sufficient adhesion can be obtained. Therefore, even if the adhesive force of the second welding area A2 is slightly lowered by the extension of the expand sheet 1, the annular frame 21 can be properly attached to the second welding area A2.

In the case of attaching the annular frame 21 after expanding the expand sheet 1 as in the present embodiment, the shape, size, etc. of the second attachment region A2 may be determined in consideration of deformation due to expansion or the like Is preferably adjusted. Thereby, the annular frame 21 can be appropriately attached to the second attached region A2 after the extension.

After the annular frame 21 is attached and fixed to the expand sheet 1, the expand sheet 1 is cut along the annular frame 21. [ 6 is a perspective view schematically showing a state in which the expand sheet 1 is cut along the annular frame 21. As shown in Fig. The expanded sheet 1 is cut along the frame 21 from the second surface 3b side of the base material 3, for example. Thus, the frame unit comprising the work 11, the frame 21, and the cut expanded sheet 1 is completed.

Further, after the frame unit is formed, the expand sheet 1 is separated from the expansion device 2. [ In the present embodiment, since the area outside the second full layer 5b in which the full layer 5 is not formed is held by each holding unit, the expand sheet 1 can be easily separated from the expanding device 2 .

As described above, in the expanded sheet 1 according to the present embodiment, the adhesive force of the first attachment region A1 to which the work 11 is applied is smaller than that of the second attachment region A2 The expandable sheet 1 can be bonded to the annular frame 21 with a strong force.

In the expand sheet 1 according to the present embodiment, since the full layer 5 is not formed in the area outside the second full layer 5b to which the annular frame 21 is applied, The cost resulting from the full layer can be reduced compared with the case where the full layer 5 is formed in the area outside the areas 5a and 5b. In addition, the advantage of being able to easily separate the expand sheet 1 from the expansion device 2 is also obtained.

The present invention is not limited to the description of the above embodiment, but may be modified in various ways. For example, the above embodiment describes an example of a processing method (using method) using the expansion device 2 that expands the expand sheet 1 in the first direction D1 and the second direction D2 However, it is also possible to expand the expand sheet 1 by using another expansion device. Figs. 7 (A) and 7 (B) are cross-sectional views schematically showing a state in which the expand sheet 1 is expanded by another expansion device. In the meantime, the same components as those in the above-described embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

7A and 7B, the expanding device 22 includes a support structure 24 for supporting the work 11, an expanding sheet 24 attached to the work 11, 1 extending in the circumferential direction. For example, the inner diameter of the expansion drum 26 is larger than the diameter of the work 11, and the outer diameter of the expansion drum 26 is smaller than the inner diameter of the annular frame 21 to be affixed to the expand sheet 1.

The support structure 24 includes a frame support table 28 that supports the annular frame 21. The upper surface of the frame support table 28 is a support surface for supporting the annular frame 21 fixed to the expand sheet 1. [ A plurality of clamps 30 for fixing the annular frame 21 are formed on the outer periphery of the frame support table 28.

A lifting mechanism (32) is formed below the support structure (24). The lifting mechanism 32 includes a cylinder case 34 fixed to a base (not shown) at the bottom and a piston rod 36 inserted into the cylinder case 34. A frame support table 28 is fixed to the upper end of the piston rod 36. The lifting mechanism 32 is configured such that the upper surface (supporting surface) of the frame supporting table 28 is supported between the reference position at a height equivalent to the upper end of the expansion drum 26 and the extended position below the upper end of the expansion drum 26 The supporting structure 24 is moved up and down.

When expanding the expand sheet 1 with the expansion device 22, the work 11 and the annular frame 21 are first attached to the expand sheet 1 to form a frame unit. That is, the second surface (back surface) 11b side of the work 11 is brought into close contact with the first adhesion area A1 (the first full layer 5a) of the expand sheet 1 and the annular frame 21 ) Is brought into close contact with the second attachment region A2 (second full layer 5b) of the expand sheet 1. [ Further, the expand sheet 1 is cut along the annular frame 21.

After the work 11 and the annular frame 21 are fixed to the expand sheet 1 to form the frame unit, the frame unit including the expand sheet 1 is held do. More specifically, as shown in Fig. 7 (A), an annular frame 21 constituting a frame unit is mounted on the upper surface of the frame support table 28 moved to the reference position, Is fixed to the clamp (30). The upper end of the expansion drum 26 is brought into contact with the expanded sheet 1 between the work 11 and the annular frame 21. [

After the frame unit including the expand sheet 1 is held by the expansion device 22, the expand sheet 1 is extended. More specifically, the support structure 24 is lowered by the lifting mechanism 32 so that the upper surface of the frame support table 28 is extended from the upper end of the extension drum 26 to the extended position . As a result, the expansion drum 26 is raised with respect to the frame support table 28, and the expand sheet 1 is pushed up by the expansion drum 26 to expand radially.

When the expand sheet 1 is expanded, a force (radial force) in the direction of expanding the expand sheet 1 is imparted to the work 11. As a result, the work 11 is divided into a plurality of chips starting from the modified layer 15 (Fig. 7 (A)), and the interval between adjacent chips is widened.

An adhesive sheet such as DAF (Die Attach Film) may be formed on the expanded sheet of the present invention. 8 is a cross-sectional view schematically showing an example of the structure of an expanded sheet according to a modification. In the meantime, the same components as those in the above-described embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

As shown in Fig. 8, the basic structure of the expanded sheet 31 related to the modified example is the same as that of the expanded sheet related to the above-described embodiment. However, in the first full layer 5a of the expand sheet 31, an adhesive film 9 represented by DAF is laid over. The method of using the expand sheet 31 may be the same as that of the embodiment described above or the like. When the plate 11 is to be affixed to the expanded sheet 31, And the second surface 11b side is brought into close contact with the adhesive film 9.

9 is a cross-sectional view schematically showing a state after the expand sheet 31 according to the modification is expanded. When the expand sheet 31 is expanded, the work 11 is divided into a plurality of chips 17 as shown in Fig. At this time, the adhesive film 9 is also divided into small pieces having the same size as the chip 17. The chip 17 integrated with the piece of the adhesive film 9 is picked up from the expand sheet 1 and mounted on a circuit board or the like.

In the above embodiment, the expandable sheet 1 wound in a roll shape is described. However, the expanded sheet of the present invention is not limited to the strip-shaped expandable sheet 1 according to the size of the work 11 or the annular frame 21 It may be cut short.

In addition, the structures, methods, and the like related to the above-described embodiments can be appropriately changed without departing from the scope of the present invention.

1: Expanded sheet
3: substrate
3a: First surface (upper surface)
3b: second side (bottom surface)
5: Full layer (adhesive layer, adhesive layer)
5a: first full layer
5b: second full layer
7: Separator film
9: Adhesive film
11: Workpiece
11a: first surface (surface)
11b: second side (back side)
13: Device
15: modified layer
17: Chip
21: Frame
31: Expanded Sheet
2: Expansion unit
4: First holding unit (first holding unit)
6: second holding unit (second holding means)
8: Third holding unit (third holding means)
10: fourth holding unit (fourth holding means)
12: upper support member
14: Lower side support member
16: contact member
22: Expansion unit
24: Support structure
26: Expansion drum
28: frame support table
30: Clamp
32: lifting mechanism
34: Cylinder case
36: Piston rod
A1: first adhesion region
A2: second attachment region
D1: the first direction
D2: the second direction

Claims (2)

1. An expand sheet which expands in a state in which a plate-like workpiece is adhered,
A substrate,
A first full layer formed at a position where the workpiece is adhered on the substrate,
And a second full layer formed at a position where the annular frame is adhered on the substrate,
And the substrate is exposed in a region excluding the first full layer and the second full layer. The method according to claim 1,
And an adhesive film adhered to the workpiece is disposed on the first full layer.

Images