KR20170095594A - 레이저 디플래쉬 방법과, 이를 이용한 레이저 가공 방법 및 장치 - Google Patents

레이저 디플래쉬 방법과, 이를 이용한 레이저 가공 방법 및 장치 Download PDF

Info

Publication number
KR20170095594A
KR20170095594A KR1020160017193A KR20160017193A KR20170095594A KR 20170095594 A KR20170095594 A KR 20170095594A KR 1020160017193 A KR1020160017193 A KR 1020160017193A KR 20160017193 A KR20160017193 A KR 20160017193A KR 20170095594 A KR20170095594 A KR 20170095594A
Authority
KR
South Korea
Prior art keywords
laser beam
metal material
laser
cutting
oil
Prior art date
Application number
KR1020160017193A
Other languages
English (en)
Korean (ko)
Inventor
정대호
신준엽
Original Assignee
주식회사 이오테크닉스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 이오테크닉스 filed Critical 주식회사 이오테크닉스
Priority to KR1020160017193A priority Critical patent/KR20170095594A/ko
Priority to PCT/KR2016/009770 priority patent/WO2017142149A1/ko
Priority to TW105130092A priority patent/TWI598173B/zh
Publication of KR20170095594A publication Critical patent/KR20170095594A/ko

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0066
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/16Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
KR1020160017193A 2016-02-15 2016-02-15 레이저 디플래쉬 방법과, 이를 이용한 레이저 가공 방법 및 장치 KR20170095594A (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020160017193A KR20170095594A (ko) 2016-02-15 2016-02-15 레이저 디플래쉬 방법과, 이를 이용한 레이저 가공 방법 및 장치
PCT/KR2016/009770 WO2017142149A1 (ko) 2016-02-15 2016-09-01 레이저 디플래쉬 방법과, 이를 이용한 레이저 가공 방법 및 장치
TW105130092A TWI598173B (zh) 2016-02-15 2016-09-19 雷射去毛刺方法、雷射加工方法及雷射加工裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020160017193A KR20170095594A (ko) 2016-02-15 2016-02-15 레이저 디플래쉬 방법과, 이를 이용한 레이저 가공 방법 및 장치

Publications (1)

Publication Number Publication Date
KR20170095594A true KR20170095594A (ko) 2017-08-23

Family

ID=59625281

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160017193A KR20170095594A (ko) 2016-02-15 2016-02-15 레이저 디플래쉬 방법과, 이를 이용한 레이저 가공 방법 및 장치

Country Status (3)

Country Link
KR (1) KR20170095594A (zh)
TW (1) TWI598173B (zh)
WO (1) WO2017142149A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112404745A (zh) * 2020-11-02 2021-02-26 中国航空工业集团公司北京长城航空测控技术研究所 一种薄片晶体器件切割面的超快激光平整方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11151590A (ja) * 1997-11-17 1999-06-08 Tanaka Seisakusho Kk レーザ切断装置
JP4162772B2 (ja) * 1998-09-09 2008-10-08 日酸Tanaka株式会社 レーザピアシング方法およびレーザ切断装置
US6806441B2 (en) * 2001-09-24 2004-10-19 Polyneer, Inc. Process for laser-cutting parts and removing flashing
JP4562995B2 (ja) * 2003-04-22 2010-10-13 三菱電機株式会社 レーザピアシング加工方法、レーザ切断加工物の生産方法及びレーザ加工機
US7977602B2 (en) * 2007-03-21 2011-07-12 Photon Dynamics, Inc. Laser ablation using multiple wavelengths

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112404745A (zh) * 2020-11-02 2021-02-26 中国航空工业集团公司北京长城航空测控技术研究所 一种薄片晶体器件切割面的超快激光平整方法

Also Published As

Publication number Publication date
TW201729934A (zh) 2017-09-01
TWI598173B (zh) 2017-09-11
WO2017142149A1 (ko) 2017-08-24

Similar Documents

Publication Publication Date Title
US9346130B2 (en) Method for laser processing glass with a chamfered edge
TWI532559B (zh) 用於易碎材料的雷射單一化的改善的方法及裝置
TW201343296A (zh) 使一工件中具有延伸深度虛飾之雷射切割系統及方法
KR20020072186A (ko) 고체 상태 자외선 가우시안 빔으로 공간부를 형성하는 빔성형 및 프로젝션 이미지 생성
KR102542407B1 (ko) 레이저 컷 될 코팅된 기판의 레이저 처리 방법
WO2011071886A1 (en) Laser machining and scribing systems and methods
WO2013106164A1 (en) Methods and systems for laser processing of coated substrates
JP2018523291A (ja) 半導体加工対象物のスクライブ方法
JP2022523275A (ja) 板状または管状のワークピースをビーム加工するための方法
KR20170096415A (ko) 레이저 클리닝 방법과, 이를 이용한 레이저 가공방법 및 장치
JP2012521890A (ja) レーザ加工のための改善された方法および装置
TW201838752A (zh) 雷射加工方法及雷射加工裝置
WO2012063348A1 (ja) レーザ加工方法及び装置
JP2007029952A (ja) レーザ加工装置及びレーザ加工方法
KR20170096812A (ko) 다기능 레이저 가공장치 및 이를 이용한 레이저 가공방법
US20170096361A1 (en) Method of forming hole in glass substrate by using pulsed laser, and method of producing glass substrate provided with hole
KR20170095594A (ko) 레이저 디플래쉬 방법과, 이를 이용한 레이저 가공 방법 및 장치
WO2015136948A1 (ja) レーザ加工方法
JP6849382B2 (ja) レーザ加工方法及びレーザ加工装置
KR20160107603A (ko) 레이저 디플래쉬 방법과, 이를 이용한 레이저 가공 방법 및 장치
JP7452092B2 (ja) レーザ加工装置、レーザ加工方法、およびレーザ加工装置の制御方法
KR20180000306A (ko) 웨이퍼의 가공 방법
JP2005028369A (ja) レーザ加工方法
JP6952092B2 (ja) 半導体加工対象物のスクライブ方法
KR100766300B1 (ko) 레이저 가공슬릿 및 가공장치

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
AMND Amendment
E601 Decision to refuse application
AMND Amendment