JP2012521890A - レーザ加工のための改善された方法および装置 - Google Patents
レーザ加工のための改善された方法および装置 Download PDFInfo
- Publication number
- JP2012521890A JP2012521890A JP2012502298A JP2012502298A JP2012521890A JP 2012521890 A JP2012521890 A JP 2012521890A JP 2012502298 A JP2012502298 A JP 2012502298A JP 2012502298 A JP2012502298 A JP 2012502298A JP 2012521890 A JP2012521890 A JP 2012521890A
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- JP
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- Prior art keywords
- laser
- shape
- pulse
- focus
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
【選択図】図5
Description
Claims (6)
- レーザ加工システムで被加工物内に形状を加工する改善された方法であって、
前記レーザ加工システムは、レーザパルスを出射するように動作可能なレーザを備え、前記レーザパルスは、レーザパルスパラメータおよびレーザ焦点を有し、前記焦点は焦点形状を有し、前記形状は経路を有し、前記経路は所定の経路パラメータを有し、
前記方法は、
前記所定の経路パラメータを検査するステップ、
前記検査した所定の経路パラメータと合致するように前記レーザ焦点形状を選択するステップ、
前記検査した所定の経路パラメータと合致するように前記レーザパルスパラメータをセットするステップ、
前記経路の近傍で前記被加工物に衝突するように、前記選択したレーザ焦点形状および前記セットしたレーザパルスパラメータを用いて前記レーザパルスを方向付け、前記被加工物内に前記形状を加工するステップ、
を有することを特徴とする方法。 - 前記レーザ焦点形状は、変形ミラーによって生成される
ことを特徴とする請求項1記載の方法。 - 前記所定の経路パラメータは、線形状、プロファイル形状、幅、深さを含む
ことを特徴とする請求項1記載の方法。 - 前記レーザパルスパラメータは、波長、パルス期間、パルス形状、パルスエネルギー、パルス繰り返し速度を含む
ことを特徴とする請求項1記載の方法。 - 被加工物内に形状を加工する改善されたレーザ加工システムであって、
前記レーザ加工システムは、コントローラ、レーザビーム軸上でレーザパルスを出射するように動作可能なレーザを備え、さらに、
前記レーザビーム軸上に配置され、前記コントローラに接続され、前記コントローラの指示にしたがって前記レーザ焦点を整形する、ビーム整形デバイスを備える
ことを特徴とするシステム。 - 前記ビーム整形デバイスは、変形ミラーである
ことを特徴とする請求項5記載のシステム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/413,531 | 2009-03-28 | ||
US12/413,531 US8350187B2 (en) | 2009-03-28 | 2009-03-28 | Method and apparatus for laser machining |
PCT/US2010/028884 WO2010117683A2 (en) | 2009-03-28 | 2010-03-26 | Improved method and apparatus for laser machining |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2012521890A true JP2012521890A (ja) | 2012-09-20 |
Family
ID=42782835
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012502298A Ceased JP2012521890A (ja) | 2009-03-28 | 2010-03-26 | レーザ加工のための改善された方法および装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8350187B2 (ja) |
JP (1) | JP2012521890A (ja) |
KR (1) | KR20120004426A (ja) |
CN (1) | CN102405122A (ja) |
TW (1) | TW201043373A (ja) |
WO (1) | WO2010117683A2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190002448A (ko) | 2016-04-28 | 2019-01-08 | 니폰 제온 가부시키가이샤 | 광학 필름의 제조 방법 |
US10478918B2 (en) | 2014-11-20 | 2019-11-19 | Zeon Corporation | Method for manufacturing optical film |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9346130B2 (en) | 2008-12-17 | 2016-05-24 | Electro Scientific Industries, Inc. | Method for laser processing glass with a chamfered edge |
US9828277B2 (en) * | 2012-02-28 | 2017-11-28 | Electro Scientific Industries, Inc. | Methods for separation of strengthened glass |
US10357850B2 (en) | 2012-09-24 | 2019-07-23 | Electro Scientific Industries, Inc. | Method and apparatus for machining a workpiece |
US9828278B2 (en) | 2012-02-28 | 2017-11-28 | Electro Scientific Industries, Inc. | Method and apparatus for separation of strengthened glass and articles produced thereby |
US9227868B2 (en) | 2012-02-29 | 2016-01-05 | Electro Scientific Industries, Inc. | Method and apparatus for machining strengthened glass and articles produced thereby |
CN104602859B (zh) * | 2012-09-05 | 2016-05-18 | 三菱电机株式会社 | 激光加工装置 |
CN110139727B (zh) * | 2016-12-30 | 2022-04-05 | 伊雷克托科学工业股份有限公司 | 用于延长镭射处理设备中的光学器件生命期的方法和系统 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6384788A (ja) * | 1986-09-29 | 1988-04-15 | Nippon Steel Corp | レ−ザビ−ムの照射制御方法および装置 |
JPS63502811A (ja) * | 1986-03-26 | 1988-10-20 | ナウチノ−イスレドワ−チェルスキ−、ツェントル、ポ、チェフノロギチェスキム、ラゼラム、アカデミ−、ナウク、エスエスエスエル | レ−ザ処理装置 |
JPH10263872A (ja) * | 1997-03-24 | 1998-10-06 | Komatsu Ltd | レーザ加工機 |
JP2006007257A (ja) * | 2004-06-24 | 2006-01-12 | Matsushita Electric Ind Co Ltd | レーザ加工装置 |
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US4417393A (en) * | 1981-04-01 | 1983-11-29 | General Electric Company | Method of fabricating high density electronic circuits having very narrow conductors |
GB8414178D0 (en) * | 1984-06-04 | 1984-07-11 | Soszek P | Circuitry |
DE4200632C2 (de) | 1992-01-13 | 1995-09-21 | Maho Ag | Verfahren und Vorrichtung zum Bearbeiten von Werkstücken mittels der von einem Laser emittierten Laserstrahlung |
DE4404141A1 (de) * | 1994-02-09 | 1995-08-10 | Fraunhofer Ges Forschung | Vorrichtung und Verfahren zur Laserstrahlformung, insbesondere bei der Laserstrahl-Oberflächenbearbeitung |
DE4417245A1 (de) * | 1994-04-23 | 1995-10-26 | Lpkf Cad Cam Systeme Gmbh | Verfahren zur strukturierten Metallisierung der Oberfläche von Substraten |
US5751585A (en) * | 1995-03-20 | 1998-05-12 | Electro Scientific Industries, Inc. | High speed, high accuracy multi-stage tool positioning system |
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US6163957A (en) * | 1998-11-13 | 2000-12-26 | Fujitsu Limited | Multilayer laminated substrates with high density interconnects and methods of making the same |
TW482705B (en) * | 1999-05-28 | 2002-04-11 | Electro Scient Ind Inc | Beam shaping and projection imaging with solid state UV Gaussian beam to form blind vias |
US6143356A (en) * | 1999-08-06 | 2000-11-07 | Parelec, Inc. | Diffusion barrier and adhesive for PARMOD™ application to rigid printed wiring boards |
DE19959921C1 (de) * | 1999-12-11 | 2001-10-18 | Schott Spezialglas Gmbh | Verfahren und Vorrichtung zum Durchtrennen von flachen Werkstücken aus sprödbrüchigem Material |
DE19963939B4 (de) * | 1999-12-31 | 2004-11-04 | Schott Spezialglas Gmbh | Verfahren und Vorrichtung zum Durchtrennen von flachen Werkstücken aus sprödbrüchigem Material |
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JP4014498B2 (ja) * | 2002-12-17 | 2007-11-28 | 日立ビアメカニクス株式会社 | 多軸のレーザ加工機 |
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DE112006002720B4 (de) | 2005-10-11 | 2014-11-20 | Gsi Group Corp. | Optische Messskala und laserbasierte Erstellungsmethode dafür |
-
2009
- 2009-03-28 US US12/413,531 patent/US8350187B2/en active Active
-
2010
- 2010-03-26 WO PCT/US2010/028884 patent/WO2010117683A2/en active Application Filing
- 2010-03-26 CN CN2010800174075A patent/CN102405122A/zh active Pending
- 2010-03-26 KR KR1020117022685A patent/KR20120004426A/ko unknown
- 2010-03-26 JP JP2012502298A patent/JP2012521890A/ja not_active Ceased
- 2010-03-26 TW TW099109058A patent/TW201043373A/zh unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63502811A (ja) * | 1986-03-26 | 1988-10-20 | ナウチノ−イスレドワ−チェルスキ−、ツェントル、ポ、チェフノロギチェスキム、ラゼラム、アカデミ−、ナウク、エスエスエスエル | レ−ザ処理装置 |
JPS6384788A (ja) * | 1986-09-29 | 1988-04-15 | Nippon Steel Corp | レ−ザビ−ムの照射制御方法および装置 |
JPH10263872A (ja) * | 1997-03-24 | 1998-10-06 | Komatsu Ltd | レーザ加工機 |
JP2006007257A (ja) * | 2004-06-24 | 2006-01-12 | Matsushita Electric Ind Co Ltd | レーザ加工装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10478918B2 (en) | 2014-11-20 | 2019-11-19 | Zeon Corporation | Method for manufacturing optical film |
KR20190002448A (ko) | 2016-04-28 | 2019-01-08 | 니폰 제온 가부시키가이샤 | 광학 필름의 제조 방법 |
Also Published As
Publication number | Publication date |
---|---|
CN102405122A (zh) | 2012-04-04 |
KR20120004426A (ko) | 2012-01-12 |
US8350187B2 (en) | 2013-01-08 |
US20100243626A1 (en) | 2010-09-30 |
WO2010117683A2 (en) | 2010-10-14 |
TW201043373A (en) | 2010-12-16 |
WO2010117683A3 (en) | 2011-01-13 |
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