WO2017142149A1 - 레이저 디플래쉬 방법과, 이를 이용한 레이저 가공 방법 및 장치 - Google Patents

레이저 디플래쉬 방법과, 이를 이용한 레이저 가공 방법 및 장치 Download PDF

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Publication number
WO2017142149A1
WO2017142149A1 PCT/KR2016/009770 KR2016009770W WO2017142149A1 WO 2017142149 A1 WO2017142149 A1 WO 2017142149A1 KR 2016009770 W KR2016009770 W KR 2016009770W WO 2017142149 A1 WO2017142149 A1 WO 2017142149A1
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WIPO (PCT)
Prior art keywords
laser beam
laser
metal material
cutting
oil
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Application number
PCT/KR2016/009770
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English (en)
French (fr)
Korean (ko)
Inventor
정대호
신준엽
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(주)이오테크닉스
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Publication of WO2017142149A1 publication Critical patent/WO2017142149A1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/16—Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment

Definitions

  • the present invention relates to a laser deflashing technique, and more particularly, to heat a heat affected zone (HAZ) and metal particles generated around a cutting line when cutting a metal material using a laser. It relates to a laser deflashing method to be removed by using, and a laser processing method and apparatus using the same.
  • HAZ heat affected zone
  • laser de-flash technology has been spotlighted to remove impurities remaining on the surface of materials by using a laser.
  • This laser deflash technology removes impurities using a laser, which is advantageous in that it is naturally friendly and the processing speed is low and the maintenance cost is low.
  • a heat affected zone (HAZ) is generated around the cutting line due to the optical characteristics of the laser, and the metal particles are deposited around the cutting line by the laser plasma effect.
  • HAZ heat-affected portion
  • the heat affected zone and the metal particles generated by the cutting of the metal material using the laser can be removed using the laser deflash technology.
  • the metal material may be damaged, and there is a concern that secondary deposition may occur due to the plasma effect.
  • One embodiment of the present invention provides a laser de-flash method for more effectively removing heat affected zones (HAZ) and metal particles generated around a cutting line using an oil pattern when cutting a metal material using a laser, It provides a laser processing method and apparatus using the same.
  • HZ heat affected zones
  • a laser de-flash method for removing at least one of heat affected zones and metal particles generated around a cutting line of a metal material comprising:
  • At least one of the heat affected zone and the metal particles may be formed by cutting the metal material by irradiating a first laser beam to the cut area where the oil pattern is formed, and then irradiating a second laser beam around a cutting line of the metal material.
  • a laser deflash method comprising; removing the.
  • the oil pattern may include, for example, silicone oil.
  • the first laser beam may be focused on a cutting region of the metal material, and the second laser beam may be defocused to have a size that is uniformly incident to the heat affected zone.
  • the first and second laser beams may have the same wavelength.
  • the first and second laser beams may have a wavelength in the visible light region.
  • the first and second laser beams may include a pulsed laser beam having a wavelength of 532 nm.
  • the first laser beam may have greater energy than the second laser beam.
  • the first and second laser beams may have energy of 20W and 10W, respectively. .
  • the second laser beam may have a lower frequency than the first laser beam.
  • the frequencies of the first and second laser beams may be 60 kHz and 20 kHz, respectively.
  • the oil pattern may be formed by applying a predetermined oil to cover the cut region.
  • the oil pattern may include silicone oil.
  • the first laser beam may be focused on a cutting region of the metal material, and the second laser beam may be defocused to have a size that is uniformly incident to the heat affected zone.
  • the first and second laser beams are emitted from the same laser light source and may have the same wavelength.
  • the first and second laser beams may include a pulsed laser beam having a wavelength of a visible light region.
  • the first laser beam may have a higher frequency and greater energy than the second laser beam.
  • An oil application unit for applying a predetermined oil to the cut region of the metal material to form an oil pattern
  • a laser light source emitting a first laser beam for cutting and a second laser beam for deflashing
  • a focusing lens for focusing the first and second laser beams
  • a laser processing apparatus comprising; a control unit for controlling the first and second laser beams.
  • the first laser beam cuts the metal material by irradiating the cutting region in which the oil pattern is formed, and the second laser beam is irradiated around the cutting line of the metal material to generate heat generated by cutting the metal material. At least one of the affected portion and the metal particles may be removed.
  • the first laser beam may be focused on the cutting region of the metal material, and the second laser beam may be defocused to have a size that is uniformly incident on the heat affected zone.
  • heat affected parts and metal particles may be generated around the cutting line.
  • an oil pattern is formed in the area to be cut in advance, and the metal material is cut.
  • the heat affected part and the metal particles generated by the cutting of the metal material can be effectively removed without damaging the metal material.
  • a deflash process using a laser a natural-friendly cutting process is possible, the speed of the cutting process can be faster, and the cost can be reduced.
  • Figure 1 schematically shows a laser processing apparatus according to an embodiment of the present invention.
  • FIG. 2A to 2E illustrate a laser processing method of cutting a metal material using the laser processing apparatus shown in FIG. 1 and removing heat affected parts and metal particles generated around the cutting line of the metal material.
  • FIG. 3 is a photograph of heat affected parts and metal particles generated around a cutting line due to cutting of a metal material.
  • 4A is a photograph of a state in which a metal material is cut without forming an oil pattern on the metal material.
  • FIG. 4B is a photograph taken around the cutting line shown in FIG. 4A.
  • 5A is a photograph of a state in which an oil pattern is formed in a cutting area of a metal material in advance, and then the metal material is cut.
  • FIG. 5B is a photograph taken around the cutting line shown in FIG. 5A.
  • FIG. 1 schematically shows a laser processing apparatus according to an exemplary embodiment of the present invention.
  • the laser processing apparatus shown in FIG. 1 includes a process of forming an oil pattern (300 in FIG. 2A) in a cutting region of the metal material W, a process of cutting the metal material W, and a cutting of the metal material W.
  • a process of removing the heat affected zone (HAZ) and the metal particles generated around the line may be performed.
  • the heat-affected portion (HAZ) refers to a portion that is not melted by the heat generated during laser cutting, but the property is changed.
  • the metal material W may include, for example, copper, etc., but this is merely illustrative, and may include various other metal materials. Such a metal material W may be mounted on the stage S which is provided to be movable.
  • the laser processing apparatus includes an oil coating unit 150, a laser light source 110, a mirror 120, and a focusing lens 140. And a controller unit 150.
  • the oil application unit 150 serves to form an oil pattern (300 of FIG. 2A) in the cutting region of the metal material W before cutting the metal material W.
  • the oil application unit 150 may form the oil pattern 300 by applying a predetermined oil to the cut region of the metal material W loaded on the stage S.
  • the oil pattern 300 may serve to prevent the metal material W from being damaged by the laser beam in the laser deflash process.
  • the oil may include, for example, silicone oil having a viscosity of approximately 100 cs.
  • the laser light source 110 emits a cutting laser beam or a deflashing laser beam. Specifically, the laser light source 110 emits the first laser beam L1, that is, the laser beam for cutting in the process of cutting the metal material W. In addition, the laser light source 110 removes the heat-affected portion and / or metal particles generated around the cutting line of the metal material W, that is, in the laser deflashing process, the second laser beam L2, that is, deflashing. Can emit a laser beam.
  • the first and second laser beams L1 and L2 a pulsed laser beam having a relatively short pulse width of the same wavelength may be used.
  • the present invention is not necessarily limited thereto, and a continuous wave laser beam may also be used.
  • the first and second laser beams L1 and L2 emitted from the laser light source 110 may be pulsed laser beams having wavelengths in the visible light region.
  • the first and second laser beams L1 and L2 may be pulsed laser beams having a wavelength of approximately 532 nm.
  • the laser beam having a wavelength of 532 nm may be generated by converting, for example, a laser beam having a wavelength of 808 nm generated from a power station into a wavelength of 532 nm using a laser optical system.
  • the wavelengths of the first and second laser beams L1 and L2 described above are merely exemplary, and the wavelengths of the first and second laser beams L1 and L2 may be variously modified.
  • the first laser beam L1 which is a laser beam for cutting, may have greater energy than the second laser beam L2, which is a laser beam for deflashing.
  • the first and second laser beams L1 and L2 may have energy of 20W and 10W, respectively.
  • the deflashing second laser beam L2 may have a lower frequency than the first laser beam L1, which is a cutting laser beam.
  • the frequency control of the first and second laser beams L1 and L2 may be performed by the controller 115.
  • the first laser beam L1, which is a cutting laser beam may have a frequency of approximately 60 kHz
  • the deflash laser beam may have a frequency of approximately 20 kHz, for example.
  • the paths of the laser beams L1 and L2 emitted from the laser light source 110 may be changed to a desired position by the mirror 120. Then, the laser beam reflected from the mirror 120 is irradiated to the position to be processed of the metal material W loaded on the stage S via the focusing lens 140.
  • a beam expanding telescope (BET) 130 for expanding the size of the laser beam may be further provided on the optical path between the mirror 120 and the focusing lens 140.
  • the focusing lens 140 focuses and irradiates the first laser beam L1 emitted from the laser light source 110 on the cutting region of the metal material W.
  • the first laser beam L1 is focused by the focusing lens 140, irradiated onto the metal material W, and then moved along the cutting area to cut the metal material W.
  • the focusing lens 140 may emit the second laser light emitted from the laser light source 110.
  • the beam L2 serves to defocus and irradiate around the cutting line of the metal material W.
  • Defocusing of the second laser beam L2 may be performed by moving the focusing lens 140. That is, defocusing of the second laser beam L2 may be performed by moving the focusing lens 140 by a predetermined distance in a direction opposite to the metal material W.
  • the second laser beam L2 is defocused by the focusing lens 140 and irradiated around the cutting line of the metal material W, and then line-scanned along the cutting line to cut the cutting line of the metal material W.
  • the process of removing the heat-affected zone and / or metal particles generated in the surroundings is performed.
  • the laser processing apparatus may further include a controller 115 for controlling the laser beams L1 and L2.
  • the controller 115 may control the wavelength, frequency, and the like of the laser beams L1 and L2 to a desired value.
  • the oil pattern (300 of FIG. 2A) is formed in the cutting area of the metal material W using the oil coating unit 150, and then the cutting area in which the oil pattern 300 is formed.
  • the laser cutting process is performed on the metal material W by irradiating the first laser beam L1, that is, the laser beam for cutting.
  • the second laser beam L2, that is, the deflash laser beam is defocused and irradiated around the cutting line of the metal material W to generate the metal material W by the first laser beam L1.
  • Heat affected zones and / or metal particles can be removed. Accordingly, the heat affected zone and the metal particles generated by the cutting of the metal material W can be effectively removed without damaging the metal material W.
  • FIG. by performing a deflashing process using a laser, a natural cutting process is possible, the cutting process can be faster, and the cost can be reduced.
  • 2A to 2E are laser processing methods for cutting the metal material W using the laser processing apparatus shown in FIG. 1 and removing the heat affected part and the metal particles generated around the cutting line of the metal material W. It is shown.
  • the oil pattern 300 is formed in the cut region of the metal material W.
  • the oil pattern 300 may be formed by applying a predetermined oil to the cutting region of the metal material W loaded on the stage S by the oil coating unit 150 of the laser processing apparatus illustrated in FIG. 1.
  • the oil used herein may include, for example, silicone oil.
  • the silicone oil may have a viscosity of about 100 cs, but is not limited thereto.
  • various materials other than silicone oil may be used as the oil used for forming the oil pattern 300.
  • the stage S moves, so that the metal material W may be positioned under the focusing lens 140.
  • the metal material W may be prevented from being damaged by the laser beam for deflashing in the laser deflash process described later.
  • a cutting process is performed on the metal material W by irradiating a first laser beam L1, which is a laser beam for cutting, to a cutting area where the oil pattern 300 is formed.
  • the first laser beam L1 which is a laser beam for cutting, is emitted from the laser light source 110 shown in FIG.
  • the first laser beam L1 may be a pulsed laser beam having a wavelength in the visible light region.
  • the first laser beam L1 may be a pulsed laser beam having a wavelength of approximately 532 nm.
  • the energy and frequency of the first laser beam L1 may be 20 W and 60 kHz, respectively.
  • the wavelength, energy and frequency of the above-mentioned first laser beam L1 are merely exemplary, and may be variously modified.
  • the first laser beam L1 which is a cutting laser beam emitted from the laser light source 110, is a metal material W having an oil pattern 300 formed through a mirror 120, a beam expander 130, and a focusing lens 140. It can be irradiated to the cutting area of.
  • the first laser beam L1 is focused through the focusing lens 140 and irradiated to the cutting region, and the metal material W is cut by moving the focused first laser beam L1 along the cutting region. Can be.
  • FIG. 2C is a cross-sectional view showing a state in which the metal material W is cut using the first laser beam L1 that is a cutting laser beam.
  • the influence unit HAZ 210 may be generated.
  • metal particles 220 may be deposited around the cutting line 250 due to the laser plasma phenomenon. The heat affected part 210 and the metal particles 220 need to be removed because they may degrade the quality of the product.
  • both the heat affected part 210 and the metal particles 220 are generated by laser cutting of the metal material W has been described, but the heat affected part 210 and the metal particles according to the laser cutting process have been described. It is also possible that only one of the field 220 is generated.
  • the second laser beam L2 which is a deflash laser beam, is emitted from the laser light source 110 shown in FIG. 1.
  • the second laser beam L2 may have the same wavelength as the first laser beam L1.
  • the second laser beam L2 may be a pulsed laser beam having a wavelength in the visible light region.
  • the second laser beam L2 may be a pulsed laser beam having a wavelength of approximately 532 nm.
  • the second laser beam L2 which is a laser beam for deflashing, may have a smaller energy than the first laser beam L1, which is a laser beam for cutting.
  • the first laser beam L1 has an energy of 20W
  • the second laser beam L2 may have an energy of 10W.
  • this is merely exemplary, and the energy of the first and second laser beams L1 and L2 may be variously modified.
  • the second laser beam L2 that is a deflashing laser beam may have a lower frequency than the first laser beam L1 that is a cutting laser beam.
  • the first laser beam L1 has a frequency of 60 kHz
  • the second laser beam L2 may have a frequency of 20 kHz.
  • the second laser beam L2 which is a deflashing laser beam emitted from the laser light source 110, is cut line 250 of the metal material W through the mirror 120, the beam expander 130, and the focusing lens 140. Can be investigated around.
  • the second laser beam L2 is defocused through the focusing lens 140 and irradiated around the cutting line 250 (for example, the heat affected part 210).
  • the defocusing distance d of the second laser beam L2 may be about 7 mm, but this is merely illustrative and the defocusing distance d described above may be variously modified.
  • the heat affected part 210 and the metal particles 220 are removed by irradiating the defocused second laser beam L2 around the cutting line 250 on the left side. Meanwhile, the process of removing the heat affected part 210 and the metal particles 220 generated around the cut line 250 on the right side is also the same as the case on the left side.
  • the heat affected part 210 on the left side and the heat affected part 210 on the right side may be sequentially removed or simultaneously removed. In the case of simultaneous removal, a beam splitter (not shown) for dividing the second laser beam L2 into two may be used.
  • the heat affected part 210 and the metal particles 220 are removed around the cutting line 250 by the laser deflashing process described above. Meanwhile, after the laser deflash process is completed, the oil pattern 300 remaining on the surface of the metal material W may be removed.
  • the second laser beam L2 is formed in the laser deflashing process by forming the oil pattern 300 in the cutting area of the metal material W in advance. It is possible to prevent the damage of the metal material (W) that may be generated by the irradiation of.
  • FIG. 3 is a photograph of heat affected parts and metal particles generated around a cutting line due to cutting of a metal material.
  • a cutting process is performed by irradiating a cutting area of a metal material with a first laser beam, which is a cutting laser beam, a heat affected part is formed around a cutting line, and metal particles are deposited.
  • 4A is a photograph of a state in which a metal material is cut without forming an oil pattern on the metal material.
  • 4B is a photograph taken around the cutting line shown in FIG. 4A.
  • a metal material is cut using a first laser beam, which is a laser beam for cutting, without forming an oil pattern in a cutting region of the metal material, and a second laser beam, which is a deflash laser beam, is made of metal. Irradiation around the cutting line of the material shows that most of the heat affected zone and metal particles were removed but some remained. On the other hand, when the oil pattern is not formed in the cut region of the metal material, the metal material may be damaged by the laser deflashing process.
  • 5A is a photograph of a state in which an oil pattern is formed in advance in a cutting region of a metal material according to an embodiment of the present invention, and then the metal material is cut.
  • 5B is a photograph taken around the cutting line shown in FIG. 5A.
  • an oil pattern is formed in the cutting area of the metal material in advance, and then the metal material is cut using the first laser beam, the laser beam for cutting, and the laser for deflashing.
  • the second laser beam, the beam is irradiated around the cutting line of the metal material, it can be seen that almost all of the heat affected zone and the metal particles generated around the cutting line are removed.
  • an oil pattern in the cutting region of the metal material before cutting the metal material, it is possible to prevent the metal material from being damaged by the laser deflashing process.
  • heat affected parts and metal particles may be generated around the cutting line.
  • an oil pattern is formed in the area to be cut in advance, and the metal material is cut.
  • the heat affected part and the metal particles generated by the cutting of the metal material can be effectively removed without damaging the metal material.
  • a deflash process using a laser a natural-friendly cutting process is possible, the speed of the cutting process can be faster, and the cost can be reduced.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
PCT/KR2016/009770 2016-02-15 2016-09-01 레이저 디플래쉬 방법과, 이를 이용한 레이저 가공 방법 및 장치 WO2017142149A1 (ko)

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KR10-2016-0017193 2016-02-15
KR1020160017193A KR20170095594A (ko) 2016-02-15 2016-02-15 레이저 디플래쉬 방법과, 이를 이용한 레이저 가공 방법 및 장치

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Publication number Priority date Publication date Assignee Title
CN112404745A (zh) * 2020-11-02 2021-02-26 中国航空工业集团公司北京长城航空测控技术研究所 一种薄片晶体器件切割面的超快激光平整方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11151590A (ja) * 1997-11-17 1999-06-08 Tanaka Seisakusho Kk レーザ切断装置
KR100321962B1 (ko) * 1998-09-09 2002-02-01 카메이 미치오 레이저 천공법, 레이저 가공용 노즐 및 레이저 절단 장치
US20030057194A1 (en) * 2001-09-24 2003-03-27 Fidalgo Diamantino Manuel Process for laser-cutting parts and removing flashing
JP2004322116A (ja) * 2003-04-22 2004-11-18 Mitsubishi Electric Corp レーザピアシング加工方法、レーザ切断加工物の生産方法及びレーザ加工機
KR101500021B1 (ko) * 2007-03-21 2015-03-06 포톤 다이나믹스, 인코포레이티드 다수의 파장을 사용하는 레이저 절제

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11151590A (ja) * 1997-11-17 1999-06-08 Tanaka Seisakusho Kk レーザ切断装置
KR100321962B1 (ko) * 1998-09-09 2002-02-01 카메이 미치오 레이저 천공법, 레이저 가공용 노즐 및 레이저 절단 장치
US20030057194A1 (en) * 2001-09-24 2003-03-27 Fidalgo Diamantino Manuel Process for laser-cutting parts and removing flashing
JP2004322116A (ja) * 2003-04-22 2004-11-18 Mitsubishi Electric Corp レーザピアシング加工方法、レーザ切断加工物の生産方法及びレーザ加工機
KR101500021B1 (ko) * 2007-03-21 2015-03-06 포톤 다이나믹스, 인코포레이티드 다수의 파장을 사용하는 레이저 절제

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