KR20170011961A - 현상액의 성분 농도 측정 장치, 성분 농도 측정 방법, 현상액 관리 장치, 및 현상액 관리 방법 - Google Patents

현상액의 성분 농도 측정 장치, 성분 농도 측정 방법, 현상액 관리 장치, 및 현상액 관리 방법 Download PDF

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Publication number
KR20170011961A
KR20170011961A KR1020150181198A KR20150181198A KR20170011961A KR 20170011961 A KR20170011961 A KR 20170011961A KR 1020150181198 A KR1020150181198 A KR 1020150181198A KR 20150181198 A KR20150181198 A KR 20150181198A KR 20170011961 A KR20170011961 A KR 20170011961A
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KR
South Korea
Prior art keywords
developer
carbon dioxide
concentration
density
value
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Ceased
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KR1020150181198A
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English (en)
Korean (ko)
Inventor
토시모토 나카가와
Original Assignee
가부시키가이샤 히라마리카겐큐죠
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Publication of KR20170011961A publication Critical patent/KR20170011961A/ko
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers
    • G03F7/322—Aqueous alkaline compositions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N9/00—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
    • G01N9/36—Analysing materials by measuring the density or specific gravity, e.g. determining quantity of moisture
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers
    • H01L21/027—

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020150181198A 2015-07-22 2015-12-17 현상액의 성분 농도 측정 장치, 성분 농도 측정 방법, 현상액 관리 장치, 및 현상액 관리 방법 Ceased KR20170011961A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015144970A JP6713658B2 (ja) 2015-07-22 2015-07-22 現像液の成分濃度測定装置、成分濃度測定方法、現像液管理装置、及び現像液管理方法
JPJP-P-2015-144970 2015-07-22

Publications (1)

Publication Number Publication Date
KR20170011961A true KR20170011961A (ko) 2017-02-02

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Family Applications (1)

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KR1020150181198A Ceased KR20170011961A (ko) 2015-07-22 2015-12-17 현상액의 성분 농도 측정 장치, 성분 농도 측정 방법, 현상액 관리 장치, 및 현상액 관리 방법

Country Status (4)

Country Link
JP (1) JP6713658B2 (https=)
KR (1) KR20170011961A (https=)
CN (1) CN106371297A (https=)
TW (1) TWI688836B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6505534B2 (ja) * 2015-07-22 2019-04-24 株式会社平間理化研究所 現像液の管理方法及び装置
JP6763608B2 (ja) * 2017-01-23 2020-09-30 株式会社平間理化研究所 現像液の二酸化炭素濃度表示装置、及び現像液管理装置
JP2018120897A (ja) * 2017-01-23 2018-08-02 株式会社平間理化研究所 現像液の濃度監視装置、及び現像液管理装置
JP2018200943A (ja) * 2017-05-26 2018-12-20 株式会社平間理化研究所 現像液の濃度管理装置、及び、基板の現像処理システム
JP6582037B2 (ja) * 2017-12-06 2019-09-25 ジャパンクリエイト株式会社 レジスト現像液の管理装置及び管理方法
WO2022074820A1 (ja) * 2020-10-09 2022-04-14 三菱重工業株式会社 分析システム及び管理システム、並びに分析方法、並びに分析プログラム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2561578B2 (ja) 1991-08-07 1996-12-11 株式会社平間理化研究所 現像液管理装置
JP2008283162A (ja) 2006-11-30 2008-11-20 Mitsubishi Chemical Engineering Corp 現像液の濃度調節方法および調製装置ならびに現像液
JP2011128455A (ja) 2009-12-18 2011-06-30 Nagase & Co Ltd 炭酸系塩類濃度測定装置、アルカリ現像液管理システム、及び、炭酸系塩類濃度測定方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1327888A (zh) * 2000-06-09 2001-12-26 株式会社平间理化研究所 基板表面处理装置
TWI298423B (en) * 2001-02-06 2008-07-01 Nagase & Co Ltd Developer producing equipment and method
TWI298826B (en) * 2001-02-06 2008-07-11 Hirama Lab Co Ltd Purified developer producing equipment and method
JP3610045B2 (ja) * 2001-02-06 2005-01-12 株式会社平間理化研究所 精製現像液製造装置及び精製現像液製造方法
US6541188B2 (en) * 2001-05-11 2003-04-01 Kodak Polychrome Graphics Llc Developer for alkaline-developable lithographic printing plates
JP4366490B2 (ja) * 2003-08-22 2009-11-18 長瀬産業株式会社 現像液供給方法及び装置
JP2012225709A (ja) * 2011-04-18 2012-11-15 Toshiba Corp 二酸化炭素濃度測定装置、二酸化炭素濃度測定方法、及び二酸化炭素回収システム
EP2869122A4 (en) * 2012-06-29 2016-03-02 Fujifilm Corp METHOD FOR CONCENTRATING PROCESS WASTEWATER AND RECYCLING PROCESS FOR WASTE WATER

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2561578B2 (ja) 1991-08-07 1996-12-11 株式会社平間理化研究所 現像液管理装置
JP2008283162A (ja) 2006-11-30 2008-11-20 Mitsubishi Chemical Engineering Corp 現像液の濃度調節方法および調製装置ならびに現像液
JP2011128455A (ja) 2009-12-18 2011-06-30 Nagase & Co Ltd 炭酸系塩類濃度測定装置、アルカリ現像液管理システム、及び、炭酸系塩類濃度測定方法

Also Published As

Publication number Publication date
JP6713658B2 (ja) 2020-06-24
JP2017028090A (ja) 2017-02-02
TWI688836B (zh) 2020-03-21
CN106371297A (zh) 2017-02-01
TW201704900A (zh) 2017-02-01

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