KR20170006104A - Detecting Apparatus Capable of Detecting Foreign Materials on the Surface of Glass, Detect Method thereof, and Slit Coater Comprising the Detecting Apparatus - Google Patents

Detecting Apparatus Capable of Detecting Foreign Materials on the Surface of Glass, Detect Method thereof, and Slit Coater Comprising the Detecting Apparatus Download PDF

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Publication number
KR20170006104A
KR20170006104A KR1020150096543A KR20150096543A KR20170006104A KR 20170006104 A KR20170006104 A KR 20170006104A KR 1020150096543 A KR1020150096543 A KR 1020150096543A KR 20150096543 A KR20150096543 A KR 20150096543A KR 20170006104 A KR20170006104 A KR 20170006104A
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South Korea
Prior art keywords
substrate
sensor board
slit nozzle
sensor
coating
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KR1020150096543A
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Korean (ko)
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조강일
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주식회사 케이씨텍
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Priority to KR1020150096543A priority Critical patent/KR20170006104A/en
Priority to CN201620712900.3U priority patent/CN205833395U/en
Publication of KR20170006104A publication Critical patent/KR20170006104A/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements

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  • Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Manufacturing & Machinery (AREA)

Abstract

Disclosed is a foreign matter sensing apparatus capable of sensing foreign matter on a substrate for a slit coating apparatus, a foreign matter sensing method thereof, and a slit coating apparatus therefor. The foreign substance sensing device of the present invention is mounted on a slit coating device to effectively detect foreign matter adhered to the upper or lower surface of the substrate, thereby preventing the slit nozzle ribs from being damaged or damaged by collision have. A sensor board disposed on the sensor board in parallel with the slit nozzle and spaced apart from the slit nozzle so as to be in parallel with the slit nozzle; And a sensor for sensing the temperature. As the sensor, for example, a strain gauge that detects the stress generated in the sensor board is preferably used.

Description

TECHNICAL FIELD [0001] The present invention relates to a foreign matter detecting apparatus capable of detecting foreign matter on a substrate for a slit coating apparatus, a foreign matter detecting method thereof, and a slit coating apparatus therefor. }

The present invention relates to a foreign matter sensing apparatus for a slit coating apparatus, and more particularly, to a foreign matter sensing apparatus for sensing a foreign matter adhered to an upper portion or a lower portion of a substrate in a slit coater to prevent breakage of a slit nozzle rib, And a slit coating apparatus therefor.

A coating apparatus for uniformly coating a chemical liquid on a flat substrate with a uniform thickness can be used in various fields, and a coating apparatus for coating a photosensitive resin on the surface of a glass substrate for manufacturing a flat panel display panel such as an LCD .

Conventionally, a spin coating method using rotation is used, but a slit coating method using a slit nozzle is used as the size of a display substrate is increased. In the slit coating method, a slit nozzle having a length corresponding to the width of a substrate is transferred along a substrate while spraying a chemical solution through a nozzle.

1 and 2, a slit coating apparatus 100 includes a substrate chuck 102 having a substrate G fixed thereon, a slit nozzle 110 having a width of the substrate G, ) Along the substrate (G). The chemical liquid is supplied to the slit nozzle 110 through the slit nozzle 110 by the chemical liquid supply unit 112 approximately once for the amount to be used for the coating process, When the coater apparatus 100 applies a chemical solution onto the substrate G, the substrate G is transferred to a drying process and dried.

A gap between the substrate G on the substrate chuck 102 and the rib 114 of the slit nozzle 110 is spaced at a constant coating gap for coating and is maintained during the coating process. If the foreign matter a exists on the conveyance path of the slit nozzle 110, coating failure of the substrate G may occur, and if the foreign matter G having a size larger than the coating interval is significantly fixed, the nozzle ribs 114 ) May be damaged or damaged.

The foreign matter may be adhered to the substrate G at any time, so that the foreign matter must be removed in advance before the nozzle rib 114 touches the substrate G, although the substrate G is put in the coating process after the cleaning process in advance. Since the thin substrate G is attracted to the substrate chuck 102 in vacuum, the corresponding portion of the substrate G is protruded by the foreign substance, 0.0 > 114 < / RTI >

As a conventional method for removing foreign substances on a substrate, Patent Publication No. 10-2007-0113381. In the present invention, the coating apparatus is provided with laser sensors 132 and 134 having a sensing line parallel to the slit nozzle 110 at the front end of the slit nozzle 110 to detect foreign matter in advance. That is, the light emitting portion and the light receiving portion of the photosensor are arranged so as to be opposed to the both opposite sides of the substrate G, and a sensing line parallel to the slit nozzle 110 is constructed.

However, since the size of foreign matter is usually about 150 to 200 mm, and the distance between the light emitting portion of the laser sensor and the light receiving portion of the large-sized substrate such as the eighth generation is about 2500 mm or more, Failure to detect the foreign object may occur. Since the horizontal defects of the laser sensor are considerations that may occur at any time due to vibration of the coating apparatus itself, consequently, in the conventional coating apparatus, coating defects due to foreign substances or breakage of slit nozzles have occurred.

In addition, a method has been proposed in which a wire having elasticity is provided across a substrate, and a strain is detected as the wire contacts the foreign matter (Patent Publication No. 10-2011-0071827).

[Related Technical Literature]

1. Apparatus and method for detecting foreign matter (Japanese Patent Laid-Open No. 10-2007-0113381)

2. Foreign body detection mechanism of substrate coater apparatus (Japanese Patent Application Laid-Open No. 10-2011-0071827)

An object of the present invention is to provide a foreign matter sensing device mounted on a slit coating apparatus provided with a slit nozzle for sensing a foreign matter adhered to an upper portion or a lower portion of a substrate to be coated to prevent breakage of a slit nozzle rib, And a slit coating apparatus therefor.

According to an aspect of the present invention, there is provided a slit coating apparatus including a substrate stage for holding a substrate, a slit nozzle for applying a chemical solution to a surface of the substrate placed on the substrate stage, A sensor board disposed in parallel with the slit nozzle; and a sensor provided on the sensor board and detecting a collision between the sensor board and a foreign object located on the upper or lower part of the substrate in accordance with the coating progress. In addition, the slit coating apparatus is provided with a control module for stopping the progress of the coating when the sensor senses the foreign matter.

The sensor may be a strain gauge that detects a collision by sensing a stress generated in the sensor board.

The sensor board may have a panel shape vertically arranged with respect to the substrate, and an upper end thereof may be fixed to a side surface of the slit nozzle. Wherein the sensor board is provided to a thickness of 5 mm or less so as to easily generate stress due to collision with the foreign object, and a gap between the lower end of the sensor board and the substrate is a coating gap between the slit nozzle and the substrate, It is preferable to keep it equal to or less than.

The apparatus may further include a lip guard disposed between the slit nozzle and the sensor board so as to cross the substrate and parallel to the slit nozzle to remove foreign substances on the substrate.

The right of the present invention also extends to the foreign substance detecting apparatus equipped with the sensor board and the sensor and mounted on the slit coating apparatus.

The present invention is also applicable to a foreign matter detection method of a foreign matter detection apparatus. A method of detecting a foreign object includes a step in which a sensor board spaced apart from the slit nozzle and arranged parallel to the slit nozzle collides with a foreign object in advance of the slit nozzle according to coating progression, Detecting a collision between foreign matter, and stopping the progress of the coating in accordance with the sensor detection by the control module.

A foreign matter detecting apparatus for a slit coater apparatus according to the present invention includes a sensor board having a size corresponding to a width of a substrate and detects the presence of foreign matter by a method in which a sensor detects a stress generated as a result of direct contact with a foreign matter . Therefore, since the sensor board directly hits the foreign object, it is possible to control the size of the foreign object to be sensed according to the height adjustment of the sensor board without generating an error that can not detect the foreign object.

Furthermore, in the slit coating apparatus of the present invention, a rigid lip guard such as a stainless steel alloy is disposed between the sensor board and the slit coater, thereby directly removing foreign matter that may directly hit the rib of the slit coater.

1 is a perspective view showing a conventional slit coating apparatus having a foreign matter sensing device,
FIG. 2 is a side sectional view showing a chemical solution application process of the slit coating apparatus of FIG. 1,
3 is a perspective view of a slit coating apparatus having a foreign matter sensing apparatus according to an embodiment of the present invention,
FIG. 4 is a cross-sectional view illustrating the operation of the foreign matter sensing apparatus of FIG. 3;
5 is a flowchart provided in the description of the foreign matter detection method of the present invention, and
FIG. 6 is a cross-sectional view illustrating an operation of a foreign substance sensing apparatus according to another embodiment of the present invention.
BRIEF DESCRIPTION OF THE DRAWINGS Fig.
102: substrate stage 110: slit nozzle
112: chemical liquid supply unit 120: transfer module
121: Gantry 123: Bridged bar
125: Guide rail 301: Sensor board
303: sensor 601: lip guard

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described in more detail with reference to the drawings.

3 and 4, a slit coating apparatus 300 according to the present invention includes a substrate stage 102 on which a substrate G is fixed, a slit nozzle (not shown) for applying a chemical solution on the substrate G A chemical liquid supply unit 112 for supplying chemical liquid to the slit nozzle 110 and a transfer module 112 for transferring the slit nozzle 110 along the coating advancing direction X while supporting the slit nozzle 110 120).

The transfer module 120 includes a pair of gantries 121 provided on both sides of the substrate stage 102 and a pair of gantries 121 interconnecting the upper portions of the pair of gantries 121 to support the slit nozzle 110 A pair of guide rails 125 arranged on both sides of the substrate stage 102 in parallel in the coating advancing direction X to guide the movement of the gantry 121, (Not shown). The gantry drive unit can reciprocate the gantry 121 along the guide rail 125 in a magnetic levitation manner, for example.

The present invention is not limited to the case where the slit nozzle 110 is horizontally transported on the fixed substrate G, The same applies to the case where the substrate G is transported below the fixed slit nozzle 110. [ For example, according to the coating apparatus, a separate substrate holding means can grip the substrate G and transport it under the slit nozzle 110. [ In this case, the transfer module 120 serves to transfer the slit nozzle 110 for cleaning or the like, and the slit nozzle 110 during coating is fixedly supported without being transferred.

The basic operation is the same as that of the prior art. In other words, while the substrate G is fixed to the substrate stage 102, the slit nozzle 110 having the width of the substrate G is transported along the substrate G by the transport module 120, 110b on the substrate (G). The chemical liquid is supplied to the slit nozzle 110 through the slit nozzle 110 by the chemical liquid supply unit 112 approximately once for the amount to be used for the coating process, When the slit coating apparatus 300 applies a chemical solution onto the substrate G, the substrate G is transferred to the next process. As described above, the coating can be performed while the substrate G is transported horizontally under the slit nozzle 110 by a separate holding means.

In addition, the slit coating apparatus 300 of the present invention includes a foreign matter sensing device (not shown) for sensing foreign matter (a) adhered to the upper portion or the lower portion of the substrate G and preventing the lip 110a of the slit nozzle 110 from being damaged, .

The foreign matter sensing device includes a sensor board 301 spaced apart from the slit nozzle 110 and arranged in parallel with the slit nozzle in front of the coating advancing direction X and a sensor board 301 provided on the sensor board 301, And a control module 310 for performing control such as stopping the operation of the gantry 121 in accordance with the detection information of the sensor 303 .

(1) The sensor board 301 arranged at a height corresponding to the size of the foreign object a to be detected is moved forward by scanning the entire substrate G in advance of the slit nozzle 110 according to the progress of the coating. 2) By detecting the deformation of the sensor board 301 due to the collision with the foreign matter a, the foreign matter a having the size defined by the installation height of the sensor board 301 is detected without exception It is possible.

Therefore, the sensor board 301 should be designed to have a large deformation when it strikes the foreign matter a. The sensor board 301 exemplarily shown in FIGS. 3 and 4 has a panel shape vertically arranged in parallel with the slit nozzle 110, and has a shape in which the entire top or a part thereof is fixed to the side surface of the slit nozzle 10 Respectively. According to another embodiment, the sensor board 301 has a vertically arranged panel shape, but may be fixed in such a manner that all or part of its upper end is directly supported by the bridge deck 123.

The thickness d of the sensor board 301 is preferably as narrow as possible in order to enlarge the deformation due to the impact of the sensor board 301 but it is too narrow to have such a thickness that the sensor board 301 is not deformed due to the impact There is a need. On the other hand, if the thickness d of the sensor board 301 is too wide, the stress due to the collision with the foreign matter a may not be generated properly or may be delayed.

The height of the lower end of the sensor board 301 can be determined according to the size of the foreign object to be sensed and the height of the substrate G and the slit nozzle 110 in the side of protecting the lip 110a of the slit nozzle 110 110b may be considered as a coating gap. The height of the lower end of the sensor board 301 is preferably about the coating gap, because foreign matter having a size larger than the coating gap usually becomes a problem.

The distance between the sensor board 301 and the slit nozzle 110 may vary depending on the feed speed of the slit nozzle 110. If the sensor board 301 and the slit nozzle 110 are disposed too close to each other, the control module 310 may not be able to stop the gantry 121 being operated by the sensor 303 at a proper time even if the sensor 303 senses foreign matter. Therefore, it is preferable that the distance between the sensor board 301 and the slit nozzle 110 is designed to be about 500 mm or more. Naturally, the distance between the sensor board 301 and the slit nozzle 110 can be adjusted according to the feeding speed of the slit nozzle 110.

The sensor 303 detects the collision between the foreign matter a and the sensor board 301 positioned on the upper or lower portion of the substrate G according to the progress of the coating, thereby recognizing the presence of the foreign matter a.

The sensor 303 may be any one capable of recognizing one of various changes (stress variation, vibration, pressure change, etc.) occurring on the sensor board 301 as the sensor board 301 collides with the foreign matter a A strain gauge capable of detecting a stress generated in the sensor board 301 due to a collision is preferable. For example, vibrations may also occur in the gantry 121 that transports the slit nozzle 110 for coating. Therefore, if a vibration sensor that senses the vibration of the sensor board 301 is used, there is a possibility that a detection error may occur.

When the strain gage is used as the sensor 303, the thickness d of the sensor board 301 is preferably designed to be 5 mm or less. If the thickness d of the sensor board 301 is too wide, the stress due to the collision with the foreign matter a may not be generated properly or may be delayed.

The control module 310 generally controls the overall operation of the slit coating apparatus 300 and generally controls the operation control of the transfer module 120 and the transfer of the substrate G and the like. However, since such matters are not characteristic elements of the present invention, the description of them will be omitted and the operation of the control module 310 will be described focusing on the control through the foreign matter sensing device.

The control module 310 reads the sensor signal periodically from the sensor 303 and judges that foreign substances are present on the upper or lower portion of the substrate G when the sensor 303 senses the stress on the sensor board 301 Generates an alarm, and controls the gantry drive unit (not shown) to stop the operation of the gantry 121.

Hereinafter, the operation of the foreign matter sensing device including the operation of the control module 310 will be described with reference to FIG.

As the coating progresses (S501), the sensor board 301 scans the substrate G at the same speed as that of the slit nozzle 110 in front of the slit nozzle 110, and the sensor 303 is moved to the sensor board 301 Monitor whether stress occurs. If the foreign matter a is present on the upper or lower surface of the substrate G, the sensor board 301 hits the foreign matter a before the slit nozzle 110, That is, stress is generated (S503).

When the sensor 303 senses the stress generated in the sensor board 301, the sensing information (i.e., sensor signal) of the sensor 303 is provided to the control module 310 (S505). The control module 310 stops the progress of the coating by stopping the operation of the gantry 121 if the sensor 303 senses it (S507).

In this way, the foreign matter sensing device of the slit coating apparatus 300 of the present invention operates.

<Examples>

6, if the slit coating apparatus 300 has a lip guide 601 disposed in parallel with the slit nozzle 110, the sensor board 301 may be provided with And can be disposed in front of the lip guard 601. The lip guard 601 is generally made of a stainless steel alloy and collides with the foreign matter a before the slit nozzle 110 according to the progress of the coating to remove or collapse the foreign matter a. Therefore, the lip guard 601 can directly remove foreign matter while the sensor board 301 first detects the foreign substance and the control module 310 stops the operation of the gantry 121.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be construed as limiting the scope of the invention as defined by the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention.

Claims (14)

A substrate stage for mounting the substrate;
A slit nozzle for applying a chemical solution to a surface of a substrate placed on the substrate stage;
A sensor board disposed on a front side of the slit nozzle in a coating direction; And
And a sensor provided on the sensor board and sensing a collision between the sensor board and a foreign object located on the upper or lower surface of the substrate in accordance with progress of the coating.
The method according to claim 1,
Wherein the sensor board is in the form of a panel vertically arranged with respect to the substrate, and an upper end thereof is fixed to a side surface of the slit nozzle.
The method according to claim 1,
Wherein the sensor is a strain gauge for detecting a collision by sensing a stress generated on the sensor board.
The method of claim 3,
Wherein the sensor board is formed to have a thickness of 5 mm or less so as to easily generate stress due to a collision with the foreign matter.
The method according to claim 1,
Wherein a gap between the lower end of the sensor board and the substrate is kept smaller than or equal to a coating gap between the slit nozzle and the substrate.
The method according to claim 1,
Further comprising a lip guard disposed between the slit nozzle and the sensor board in parallel with the slit nozzle so as to cross the substrate and to remove foreign substances on the substrate.
The method according to claim 1,
Further comprising a control module for stopping the progress of the coating when the sensor senses the foreign matter.
A foreign substance sensing apparatus mounted on a slit coating apparatus having a slit nozzle and capable of detecting foreign matter existing in an upper portion or a lower portion of a substrate coated by the slit coater,
A sensor board disposed in parallel with the slit nozzle at a front end of the slit nozzle in a coating direction; And
And a sensor provided on the sensor board and sensing a collision between the sensor board and a foreign object located on the upper or lower surface of the substrate in accordance with progress of the coating.
9. The method of claim 8,
Wherein the sensor board has a panel shape and an upper end thereof is fixed to a side surface of the slit nozzle and is disposed perpendicularly to the substrate.
9. The method of claim 8,
Wherein the sensor is a strain gauge that detects a collision by sensing a stress generated on the sensor board.
11. The method of claim 10,
Wherein the sensor board is formed to a thickness of 5 mm or less so as to easily generate stress due to a collision with the foreign matter.
9. The method of claim 8,
Wherein the gap between the lower end of the sensor board and the substrate is kept smaller than or equal to a coating gap between the slit nozzle and the substrate.
A foreign substance sensing method for detecting a foreign substance existing on an upper portion or a lower portion of a substrate of a slit coater,
A sensor board spaced apart from the slit nozzle and disposed in parallel with the slit nozzle, the foreign matter striking the slit nozzle ahead of the slit nozzle as the coating progresses;
Sensing a collision between the sensor board and a foreign object disposed on the sensor board; And
And the control module stops the progress of the coating in accordance with the sensing of the sensor.
14. The method of claim 13,
Wherein the sensing of the collision includes detecting a collision by sensing stress generated on the sensor board by the sensor.
KR1020150096543A 2015-07-07 2015-07-07 Detecting Apparatus Capable of Detecting Foreign Materials on the Surface of Glass, Detect Method thereof, and Slit Coater Comprising the Detecting Apparatus KR20170006104A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020150096543A KR20170006104A (en) 2015-07-07 2015-07-07 Detecting Apparatus Capable of Detecting Foreign Materials on the Surface of Glass, Detect Method thereof, and Slit Coater Comprising the Detecting Apparatus
CN201620712900.3U CN205833395U (en) 2015-07-07 2016-07-07 Narrow slit type coating apparatus and this device substrate foreign bodies detection foreign body sense device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150096543A KR20170006104A (en) 2015-07-07 2015-07-07 Detecting Apparatus Capable of Detecting Foreign Materials on the Surface of Glass, Detect Method thereof, and Slit Coater Comprising the Detecting Apparatus

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KR20220072205A (en) * 2020-11-25 2022-06-02 세메스 주식회사 Apparatus and method for treating substrate
CN115739522A (en) * 2021-09-02 2023-03-07 株式会社斯库林集团 Substrate processing apparatus and substrate processing method

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CN108789791A (en) * 2018-08-06 2018-11-13 江西佳宇陶瓷有限公司 A kind of right angle watt production dyeing apparatus with drying function
JP7470742B2 (en) * 2022-07-11 2024-04-18 株式会社Ｓｃｒｅｅｎホールディングス SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

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Publication number Priority date Publication date Assignee Title
KR20220072205A (en) * 2020-11-25 2022-06-02 세메스 주식회사 Apparatus and method for treating substrate
CN115739522A (en) * 2021-09-02 2023-03-07 株式会社斯库林集团 Substrate processing apparatus and substrate processing method
CN115739522B (en) * 2021-09-02 2024-09-27 株式会社斯库林集团 Substrate processing apparatus and substrate processing method

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