KR101694468B1 - A Board Loading and Transport Device and Transfer System including thereof - Google Patents

A Board Loading and Transport Device and Transfer System including thereof Download PDF

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Publication number
KR101694468B1
KR101694468B1 KR1020150012228A KR20150012228A KR101694468B1 KR 101694468 B1 KR101694468 B1 KR 101694468B1 KR 1020150012228 A KR1020150012228 A KR 1020150012228A KR 20150012228 A KR20150012228 A KR 20150012228A KR 101694468 B1 KR101694468 B1 KR 101694468B1
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South Korea
Prior art keywords
substrate
loading
unit
unloading
roller
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KR1020150012228A
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Korean (ko)
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KR20160091737A (en
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박계정
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박계정
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Priority to KR1020150012228A priority Critical patent/KR101694468B1/en
Priority to PCT/KR2016/000639 priority patent/WO2016122161A1/en
Publication of KR20160091737A publication Critical patent/KR20160091737A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D19/00—Pallets or like platforms, with or without side walls, for supporting loads to be lifted or lowered
    • B65D19/38—Details or accessories
    • B65D19/40—Elements for spacing platforms from supporting surface
    • B65D19/42—Arrangements or applications of rollers or wheels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Mechanical Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate loading carrier used for transporting a substrate (circuit) and transporting the substrate one by one, and a substrate transfer system including the same. More particularly, It is possible to prevent defects such as scratches and shots in the transferring process by making it possible to carry out through a single substrate loading conveyor and also to minimize the damage such as scratching and shaking of the substrate even in the process of loading or unloading the substrate, The position of the loading / unloading portion can be adjusted according to the number of substrates changing during the loading / unloading process, or the loading / unloading can be performed according to the height of the various substrate processing automated lines, The position of the unloading portion can be adjusted and applied. In particular, Relates to a substrate transfer system for the East applies to shorten the loading or unloading work with a structure that can move to the right after the next process in which loading a substrate.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a substrate loading carrier and a transfer system including the same,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate loading carrier used for transporting a substrate (circuit) and transporting the substrate one by one, and a substrate transfer system including the same. More particularly, It is possible to prevent defects such as scratches and shots in the transferring process by making it possible to carry out through a single substrate loading conveyor and also to minimize the damage such as scratching and shaking of the substrate even in the process of loading or unloading the substrate, The position of the loading / unloading portion can be adjusted according to the number of substrates changing during the loading / unloading process, or the loading / unloading can be performed according to the height of the various substrate processing automated lines, The position of the unloading portion can be adjusted and applied. In particular, Relates to a substrate transfer system for the East applies to shorten the loading or unloading work with a structure that can move to the right after the next process in which loading a substrate.

In general, PCBs (Printed Circuit Boards) are processed in the factory after they are manufactured in the factory. Then, the processed substrates are supplied to the respective process steps In this case, several hundreds or hundreds of substrates are stacked on a truck made for transportation and then transported to an L-shaped loading section called "L rack". The truck is loaded on a wheeled vehicle and transported to a transfer system on the line where the process is carried out.

However, such a conventional method involves a process in which a substrate is loaded on a truck for transporting a vehicle at a factory, a substrate is moved to an L rack or a bogie for storage, a process in which the substrate is transferred from the rack to a transfer system, It is necessary to carry out a complicated loading / transporting process such as a loading process and a loading process on the substrate. Therefore, it takes a lot of work time and expense only in the loading and transportation process, and there is a problem that a large number of substrate defects are caused due to scratches, scratches,

(Patent Literature)

Registered utility model publication No. 20-0200838 (October 20, 2000) "Automatic loading device for substrate"

In the case of the conventional technique disclosed in the above patent document, as shown in Fig. 1, the substrate 2 is separately loaded in a separate L-shaped rack 3 and is transported through the bogie 6, The process of loading and transporting the rack 3 into the rack 3 is complicated and the troubles of transferring the L-shaped rack 3 from the rack 6 to the rack transfer rollers 4 of the transfer system are intact. A large amount of substrate defects due to scratches or scratches are generated. 2, the process of transferring the substrates 2 stacked in the L-shaped rack 3 one by one to the substrate transferring rollers 5 is performed by the dog 10 (see FIG. 2) ). In this conventional method, the substrate 2 is completely removed from the dog 10 through the substrate transferring rollers 5, Since the dog 10 is able to rotate toward the rack 3, the interval of the reciprocating rotational motion of the dog 10 must be increased correspondingly, and the time for loading (or unloading) the substrate is delayed. I have a problem.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems,

SUMMARY OF THE INVENTION It is an object of the present invention to solve the problem that the L rack for loading a substrate and the L rack for loading and transporting a loaded L rack are separately operated for transportation of the substrate, It is possible to solve the problem of the substrate failure caused by the transfer of the substrate from the bogie to the L rack by the manual operation, And to provide a substrate loading carrier capable of shortening the process and a transfer system including the same.

It is another object of the present invention to provide a substrate loading carrier having a structure capable of firmly fixing a substrate during transportation of the substrate.

It is still another object of the present invention to provide a substrate transfer system capable of preventing substrate or system damage by including a loading carrier guide portion for guiding the entry and fixing of the substrate loading carrier in the substrate transfer system, .

It is another object of the present invention to accurately detect whether a substrate is loaded or unloaded two times in a process of loading or unloading a substrate, thereby allowing only one sheet to be loaded or unloaded, thereby minimizing the process efficiency and the occurrence of substrate defects To provide a substrate transfer system.

It is still another object of the present invention to provide an apparatus and a method for accurately detecting two or more substrates on a loading / unloading unit and / or a transferring roller for detection of two or more substrates by amplification detection or the like, The present invention provides a substrate transfer system capable of solving the problem caused by loading or unloading two or more substrates by applying a configuration in which the substrates are returned to their original positions.

It is a further object of the present invention to provide a substrate loading and unloading apparatus which can measure a distance that varies depending on the number of substrates changing during a loading / unloading process while fixing a substrate loading carrier in an accurate position in a transfer system, And to provide a substrate transfer system that quickly and accurately judges and performs substrate loading / unloading between a load conveyer and a transfer roller.

It is another object of the present invention to provide a substrate transfer system that minimizes damage to a substrate during transferring by controlling the speed or smooth rotation of the loading / unloading unit during loading or unloading.

It is a further object of the present invention to provide a method and system for accurately detecting whether the entirety of a substrate has been transferred to a rotary moving part for moving the substrate for loading or unloading, And to provide a substrate transfer system that minimizes damage.

It is a further object of the present invention to avoid the interference between the unstucked substrate and the rotating part of the rotating part during the loading or unloading process of the loading part of the substrate loading carrier and to align the unstucked substrate, And to provide a substrate transfer system that minimizes substrate damage.

It is a further object of the present invention to provide a method and apparatus for automated substrate process automation with various loading and unloading sections, The present invention provides a substrate transfer system that can be applied to a substrate transfer system.

It is still another object of the present invention to provide a method and apparatus for rotating a substrate between loading rollers and loading rollers for loading / unloading by rotating the substrate one by one until the substrate completely moves through the loading rollers, The present invention is to provide a substrate transfer system that can shorten loading or unloading operation time by applying a structure capable of moving to the next process immediately after loading a substrate.

Another object of the present invention is to provide a substrate transfer system for smoothly performing a substrate transfer process or a 360-degree rotation process by forming an interference prevention slit and a slit portion in a transfer roller and a substrate loading carrier, respectively .

It is still another object of the present invention to provide a system and method for loading and unloading a substrate, including a buffer that allows the substrate to be temporarily loaded during the loading or unloading process, And to provide a substrate transfer system capable of being carried out.

The above and other objects, features and advantages of the present invention will become more apparent from the following detailed description when read in conjunction with the accompanying drawings, in which: FIG.

According to an aspect of the present invention, there is provided a substrate loading carrier including: a loading unit on which a substrate is loaded; And a moving part for moving the loading part on which the substrate is loaded. Since movement from the loading part to the transportation and transportation system can be performed through the single substrate loading carrier in a state that the substrate is loaded on the loading part, To minimize the damage caused by substrate gushing or dropping occurring in the repetitive process of transferring from the L-rack to the L-rack, and shortening the logistics process.

According to another embodiment of the present invention, in the substrate loading carrier according to the present invention, the loading section includes a bottom contact portion contacting the back surface of the substrate to be loaded and a bottom surface contacting portion contacting the bottom surface of the substrate to be loaded, Is formed such that the substrate is tilted toward the back contact portion and the bottom contact portion is inclined from the front to the back.

According to another embodiment of the present invention, in the substrate loading conveyor according to the present invention, the stacking portion includes a slit portion extending from a front surface to a rear surface of the bottom surface contacting portion at predetermined intervals and formed to pass through the slit portion, And a contact portion.

According to another embodiment of the present invention, in the substrate loading carrier according to the present invention, the moving unit includes a protrusion formed on the front surface of the substrate loading carrier for fixing the substrate loading carriers arranged back and forth in the transportation process of the substrate loading carrier, And the protruding portion of the substrate loading conveyor located at the rear side of the substrate loading conveyor is positioned and coupled to the groove portion of the substrate loading conveyor located at the front side.

According to another embodiment of the present invention, in the substrate loading conveyor according to the present invention, the moving unit further includes a bending portion to which a rope for binding the substrate loaded in the transportation process of the substrate loading carrier is fixed by hanging.

According to another embodiment of the present invention, in the substrate loading conveyor according to the present invention, the moving unit is provided with fixing means for fixing the conveying system so as to prevent movement of the moving unit and firmly fix the moving unit, And a fixing portion that is fastened and coupled.

The substrate transport system according to an embodiment of the present invention includes a substrate loading carrier including a loading section on which a substrate is loaded and a moving section for moving the loading section on which the substrate is loaded; A loading / unloading unit for loading the substrates loaded on the loading unit of the substrate loading carrier one by one to the transfer rollers or unloading the substrates transferred from the transfer rollers one by one to the loading unit; And a transfer roller for transferring the substrate loaded through the loading / unloading unit to the substrate process automation line or transferring the substrate to the loading / unloading unit for unloading the substrate from the substrate process automation line.

According to another embodiment of the present invention, the substrate transfer system according to the present invention further comprises a loading carrier guiding part for guiding the substrate loading carrier to be positioned in front of the loading / unloading part, The guide unit is characterized in that the loading / unloading unit is not in a normal operation state or includes an entry-side breaker that blocks entrance of the substrate loading carrier when there is a risk of collision between the board loading carrier and the loading / unloading unit .

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the load carrier guiding portion includes a friction reducing portion that minimizes friction with the side surface of the incoming substrate loading carrier, And a fixing means which is fastened to the fixing portion of the substrate loading carrier for fixation.

According to another embodiment of the present invention, a substrate transport system according to the present invention further comprises a control unit for controlling operations of the loading / unloading unit and the transporting roller, wherein the loading / A rotary movement unit for rotating the substrate one by one between the loading unit and the transporting roller for loading, and a length (distance) change caused by a change in the loading amount of the substrate loaded on the loading unit during the loading or unloading process, And an interval adjusting unit that accurately adjusts the position of the rotary moving part by utilizing the angle.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the gap adjusting unit may include a front and rear guide unit for guiding the forward and backward movement of the rotary movement unit, Up and down guide part for driving the rotary part in the front-rear direction, and a vertical drive part for driving the rotary part in the vertical direction.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the rotational moving part includes: a bottom surface supporting part for supporting a bottom surface of a substrate to be loaded or unloaded; And a rotary motor for rotating the rotary part including the lower surface support part and the front support part about the rotation axis.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the bottom surface supporting portion and the front surface supporting portion are formed at a plurality of spaced apart intervals, And a slit portion extending from the front surface to the back surface of the bottom contact portion at predetermined intervals so as to pass through the stacking portion, wherein the transporting rollers form a certain space through which the front support portions pass so that the plurality of front supports do not interfere with the transport rollers And an interference preventing slit.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the control unit controls the transfer unit such that, even when the substrate is not yet transferred to the transfer roller immediately after the rotational transfer unit has loaded the substrate with the transfer roller, And the supporting portion is moved downward through the interference preventing slit and is rotationally moved toward the substrate loading carrier, thereby shortening the loading or unloading process cycle.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the rotating moving part first pushes and aligns the substrate loaded on the loading part at the time of loading or unloading, And a contact part for pushing the substrate supported on the bottom surface supporting part to the loading part for unloading or a suction part for pulling the loaded substrate toward the bottom surface supporting part.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the rotary moving part includes a push part for pressing the entire surface of the substrate moved toward the bottom supporting part through the suction part so as not to move, And a distance measuring unit for measuring a distance between the rotating portion and the substrate while pressing the front surface of the additional substrate, wherein the control unit controls the distance measuring unit to measure the distance between the rotating unit and the substrate, Wherein the controller determines whether the substrate is moved to the bottom surface supporting portion.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the rotational movement part may be configured such that, on the basis of the distance between the rotational movement part and the substrate measured through the distance measurement part, Further comprising a collision preventing portion protruding to protect the substrate when it is expected.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the loading section includes a bottom contact portion contacting the back surface of the substrate to be loaded and a bottom surface contacting portion contacting the bottom surface of the substrate to be loaded, The front and rear guide portions for guiding the forward and backward movement of the rotary movement portion are also inclined at the same inclination as the inclination of the bottom contact portion, As shown in Fig.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the conveying roller includes: a main conveying roller positioned on both sides of the interference preventing slit and on the front side of the interference preventing slit, And a rotating motor for rotating the roller.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the interference preventing slits are spaced apart from each other by a predetermined distance corresponding to the front supporting portions spaced apart from each other by a predetermined distance, And an auxiliary roller is positioned for transferring.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the transfer roller further includes a rotation connecting member for rotating the auxiliary roller in conjunction with rotation of the main transfer roller, do.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the transfer roller may be arranged such that the alignment of the substrate moving on the transfer roller is aligned to the center, And the substrate array parts aligned in one direction are provided on the left and right sides of the conveying roller, respectively.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the rotating portion detects whether the substrate is transferred from the bottom surface supporting portion onto the transfer roller during the loading process, And a first detection unit that detects whether the substrate has been transferred from the transfer roller to the bottom surface support portion. The control unit moves the front support unit downward through the interference prevention slit immediately after loading the substrate based on the information of the first detection unit And then rotationally moved toward the substrate loading carrier.

According to another embodiment of the present invention, in the substrate transport system according to the present invention, the transport roller includes a second detection unit for detecting whether the substrate transports a distance equal to or larger than the size of the substrate on the transport roller in a loading process, The control unit prevents another substrate from being loaded onto the transport roller in a state where the substrate does not transport a distance equal to or larger than the size of the substrate on the transport roller based on the information of the second detection unit.

According to another embodiment of the present invention, the substrate transfer system according to the present invention further comprises a buffer for temporarily holding the substrate during the process of replacing the substrate loading carrier in the unloading process do.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the buffer moves only when the substrate loading carrier is exchanged between the substrate loading carrier and the loading / unloading portion, And the substrate to be loaded in the loading section is temporarily loaded on the buffer plate in the process of replacing.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the buffer includes a rotating roller on the buffer plate, and moves to a substrate loading carrier in which the substrate loaded on the buffer plate is replaced Thereby minimizing the friction with the substrate.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the conveying roller may include two sheets (two sheets) for detecting whether there are two or more boards to be moved on the conveying roller for loading or unloading, And a detection unit.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the double-sheet detection unit includes a detection roller that touches an upper surface of a substrate passing through the transfer roller, An eccentric rotation part connected to the roller frame and having one end connected to the roller frame and having the other end pivotally rotated about the rotation axis by a principle of a lever larger than the one end; , And a limit sensor for detecting the limit.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, in the process of pulling the substrate loaded on the loading section through the adsorption section for loading, toward the bottom surface supporting section, The substrate pulled through the suction unit is placed on the bottom surface supporting member or the back surface supporting member so as to prevent the bottom supporting member or the back surface supporting member from interfering with the rotation of the rotating member during loading And a rotary movement position control module for rotating the rotary movement part backward at predetermined intervals and then rotating the rotary movement part for loading.

According to another embodiment of the present invention, in the substrate transferring system according to the present invention, the rotational moving part may include a predetermined portion in a process of pulling the substrate, which is loaded on the loading part through the adsorption part for loading, toward the bottom side supporting part, And a substrate aligning portion for pushing and restoring the substrate which is disturbed in the stacking portion.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the rotational movement part further comprises a separating roller which is in contact with the bottom surface of the substrate (80) pulled or pushed by the suction part And the separation roller includes a one-way bearing for rotating the separating roller in the process of pushing the substrate toward the loading part while the separating roller does not rotate in the process of pulling the substrate from the loading part by the suction part .

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the distance measuring unit may measure distances at two sides corresponding to the left and right sides of the substrate using a laser sensor, And it is accurately judged whether or not it has been moved toward the bottom surface supporting portion.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, when the substrate is transferred to the bottom surface support portion via the adsorption portion for loading, the control portion rotates the rotation transfer portion upward by a certain degree, And the distance measuring unit measures a distance from the substrate at a position adjacent to each of the plurality of the bottom surface supporting units to determine whether the at least two substrates are moved toward the bottom surface supporting unit Is accurately determined.

According to another embodiment of the present invention, in the substrate transfer system according to the present invention, the rotational moving part further includes a back surface supporting part for supporting the back surface of the substrate at the other end of the bottom surface supporting part, And a separate groove portion into which the bottom surface is inserted is additionally formed.

The present invention can obtain the following effects by the above-described embodiment, the constitution described below, the combination, and the use relationship.

The present invention improves the problem that the L rack for loading the substrate and the L rack for loading and moving the loaded L rack are separately operated for the transportation of the substrate and the troublesome loading and transportation are carried out. Since the transportation to the transportation and transportation system can be performed through a single board carrying truck, it is possible to solve the problem of the substrate failure caused by the gas or the shooting in the process of moving from the truck to the L rack by the conventional manual operation, It is possible to shorten the length of time.

The present invention has the effect of firmly fixing the substrate in the transportation of the substrate.

The present invention has the effect of preventing substrate or system damage by guiding the entry and fixing of the substrate loading carrier in the substrate transfer system, or by including a loading carrier guiding part for blocking entry in abnormal situations.

The present invention accurately detects the loading of two substrates in a process of loading a substrate, and allows only one substrate to be loaded, thereby achieving efficiency of the process and preventing occurrence of breakage or failure in the next process.

The present invention can be applied to a system for accurately detecting two or more substrates on a loading / unloading unit and / or a transport roller for detecting two or more substrates by amplification detection or the like, The present invention has the effect of solving the problem of loading two or more substrates by preventing two or more substrates from being loaded in any case.

The present invention measures the exact distance that changes in real time according to the number of substrates changing in the loading / unloading process while the substrate loading carrier is fixed at the correct position in the transfer system and adjusts the position of the loading / unloading unit accordingly , It is possible to quickly and accurately determine and perform the loading / unloading of the substrate between the substrate loading conveyor and the conveying roller.

The present invention controls the speed or smooth rotation of the loading / unloading unit during the loading or unloading process, thereby preventing the substrate from being damaged during the transferring process.

The present invention applies a configuration that precisely senses whether the entirety of both sides of the substrate has been accurately transferred to a rotary transfer part for transferring and moving the substrate for loading or unloading, Effect.

The present invention can avoid the interference between the unstucked substrate and the rotating part in the loading part of the substrate loading carrier during the loading or unloading process while aligning the unstucked substrate, .

The present invention can be applied to a substrate processing automation line of various heights together with a loading / unloading unit by using only one type of substrate loading carrier, even if the height of the various substrate process automation lines is different, .

The present invention is not limited to the conventional process of waiting until the substrate is completely moved on the transporting roller during the loading process as in the conventional case, in order to rotate the substrate one by one between the substrate loading carrier and the transporting roller for loading / unloading It is possible to reduce the time required for loading or unloading by applying a structure capable of moving to the next step immediately after loading the substrate.

The present invention has the effect of smoothly performing the process of transferring the substrate from the rotating portion to the rotation of 360 degrees by forming the interference preventing slit and the slit portion in the conveying roller and the substrate loading conveyor, respectively.

The present invention further includes a buffer that allows the substrate to be temporarily loaded during the process of replacing the substrate loading carrier during the loading or unloading process so that the substrate transferring operation can be continuously performed even during the replacement of the substrate loading carrier .

1 is a view showing a conventional truck and an L rack,
2 is a structural diagram of a conveying system using a conventional L rack
3 is a side view of a substrate loading carrier according to an embodiment of the present invention;
4 is a plan view of a substrate loading and conveying apparatus according to an embodiment of the present invention.
5 is a view showing a state in which a substrate loading carrier is connected in a transportation process;
Figure 6 is a side view of a substrate transfer system according to an embodiment of the present invention.
Fig. 7 is a side view of the loading / unloading portion used in Fig.
8 is a plan view of the loading /
Fig. 9 is a detailed view of the rotating part of Fig. 7
Fig. 10 is a detailed view showing another example of the rotating portion of Fig. 7
Fig. 11 is a plan view of the conveying roller used in Fig. 6
12 is a view showing a state in which the substrate is moved to the rotating portion during the loading process;
13 is a reference view showing a state in which the substrate is loaded onto the transport roller in the loading process
Fig. 14 is a reference view showing a state in which the rotating portion moves after the substrate is loaded on the transporting roller in the loading process
15 is a view showing a state in which the rotary moving part is moved to unload the substrate conveyed to the conveying roller in the unloading process
16 is a view showing a state in which the substrate is moved from the rotating portion to the loading portion in the unloading process;
Fig. 17 is a view showing a loading carrier guide portion
18 is a reference diagram showing a state in which a buffer is moved and a substrate is loaded on a buffer
19 is a view showing a state in which the substrate loaded in the buffer moves to the loading section;
FIG. 20 is a detailed view showing the double sheet detecting unit
21 is a detailed view showing a detailed configuration on the side of the rotating portion
22 is a detailed view showing a detailed configuration on the front face of the rotating portion
23 is a reference view showing a state in which the substrate is disturbed in the loading section according to the repetition of the loading or unloading operation
24 is a reference view showing a state in which the rotating portion moves backward under the control of the rotational movement position control module
25 is a view showing a process of ascertaining whether two or more substrates are coming down after the rotating portion is lifted.
26 is a reference view showing a state in which the substrate aligning section aligns the stacking section substrate

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT Hereinafter, preferred embodiments of a substrate loading carrier and a transfer system including the substrate loading carrier according to the present invention will be described in detail with reference to the accompanying drawings. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear. Throughout the specification, when an element is referred to as "including " an element, it is understood that the element may include other elements as well, without departing from the other elements unless specifically stated otherwise.

A printed circuit board (PCB) is produced in a factory, and then processed in accordance with the intended use. At this time, a substrate is loaded to supply the manufactured substrate to each process step. The present invention relates to a substrate loading carrier used therefor and a transfer system including the same.

3 to 5, a substrate loading carrier 30 according to an embodiment of the present invention includes a loading unit 310 on which a substrate 80 is loaded; And a moving part 320 for moving the loading part 310 on which the substrate 80 is loaded so that the moving part 320 moves to the transportation and transfer system in a state that the substrate 80 is loaded on the loading part 310. [ Can be performed through the single substrate loading carrier (30), thereby shortening the logistics process.

As mentioned above, referring to FIG. 1, several tens of substrates are separately loaded on a separate transportation bogie, and then the L-shaped stacking unit, which is referred to as an 'L rack (3) The conventional method of repeating the process of loading the L rack 3 into the transport system and repeating the use of the L rack 3 is carried out at the factory and then transferred to the L rack 3 again The process of transferring the L rack 3 to the transfer system in which the processing is performed and placing the L rack 3 in the system (for example, the process of coupling or transferring the L rack 3 to the bogie 6 (see FIG. 2) And so on. Therefore, it takes a lot of work time and money only in the loading and transportation process.

3, the substrate loading conveyer 30 according to the present invention includes a loading portion 310 on which the substrate 80 is aligned and loaded, and a loading portion 310 on which the substrate 80 is loaded Through the substrate loading conveyor 30 integrally formed with the moving unit 320 for moving the loading unit 310 to a desired place, the loading and unloading operations can be carried out through the single substrate loading carrier 30 The substrate can be moved by using one substrate loading carrier 30 including the moving unit 320 up to the transfer system where the substrate processing process is performed from the transferring process to the transferring process. In other words, a complicated process of transferring the L rack from the transport truck to the L rack, combining it with the truck again, and finally transferring the L rack again and again to the transport system is omitted, and one substrate loading carrier 30 A series of loading and shipping processes are carried out, which dramatically reduces the time and cost (labor) required for loading and transportation.

The loading unit 310 includes a bottom contact portion 311 contacting the backside of the substrate 80 to be loaded, a bottom contact portion 312 contacting the bottom side of the loaded substrate 80, A slit portion 313 extending from the front surface to the rear surface of the contact portion 312 so as to pass therethrough and an intermediate contact portion 314 positioned between the slit portion 313.

3, the bottom surface contact portion 311 is inclined so that the mounted substrate 80 is tilted toward the back surface contact portion 311, and the bottom surface contact portion 312 is also formed on the front surface (outside surface) The substrate 80 can be stably stacked in the course of transportation (or, as shown in FIG. 5, the loaded substrate 80 can be inclined as shown in FIG. 5) It is also possible to arrange a separate protective member 326 in a space formed between the front and rear arranged substrate loading carriers 30. In order to arrange the protective member 326, It is also advantageous to adsorb and transfer the substrate 80 one by one using the adsorption unit 415 even in a process of loading or unloading using the rotation unit 410 to be described later. In addition, although the loaded substrate 80 can be stably loaded due to inclination, it is possible to prevent the substrate loading carrier 30 from being tilted backward when the inclined portion is moved, As shown, it may further include a rollover protection wheel 327, which is positioned to float on a slightly smaller surface than the existing wheel for movement on the back side of the substrate loading carrier 30, Or when the substrate loading carrier 30 tries to move backward, the substrate loading carrier 30 prevents the substrate loading carrier 30 from climbing steeply or overturning.

As described later, the bottom support portion 411 or the front support portion 412 of the rotary movement portion 410, which operates in the loading or unloading process, does not interfere with the loading portion 310 during the rotation movement And a slit portion 313 extending from the front surface to the rear surface of the bottom surface contact portion 312 at regular intervals to allow smooth movement of the slit portion 313. The operation of the slit portion 313 will be described later. A separate intermediate contact portion 314 may be disposed between the slit portions 313. This is because when the substrate 80 is relatively small in size, when the slit portion 313 becomes smaller than the slit portion 313, It is possible to load a substrate 80 having a small size in order to prevent such a problem.

5, during the transportation of the substrate loading conveyor 30, the moving unit 320 may be configured to move the substrate loading conveyors 30 in the forward and backward directions, The substrate loading conveyor 30 includes a protruding portion 321 formed on a front side (front side) and a groove portion 322 formed on a rear side (rear side) The protrusions 321 of the substrate loading conveyor 30 positioned at the rear side of the groove portions 322 of the substrate loading conveyors 30 are inserted and fixed between the substrate loading conveyors 30.

The moving part 320 may further include a bending part 323 to which the rope 324 that binds the loaded substrate 80 is hooked and fixed during the transportation of the substrate loading carrier 30, It is possible to prevent the moving of the moving part 320 in the state where the substrate loading carrier 30 is placed in the transfer system and to securely move the moving part 320 in a stable state The substrate loading conveyor 30 is fixed in the conveying system so that the loading of the substrate 80 can be performed in a state in which the substrate loading conveyor 30 is firmly fixed in the conveying system by including the fixing portion 325 which is a portion where the fixing means 730 of the conveying system, Or the unloading process can be performed. 6 and 17, the moving part 320 is provided with the right positioning part 328 and the loading carrier guide part 70 to be described later is formed with the right positioning groove part 740, The principle that the correct positioning portion 328 is accurately fitted into the right groove portion 740 in the process of positioning the transporting device 30 in the transporting system allows the substrate loading carrier 30 to be positioned at an accurate position , It is possible to buffer the impact of the impact to the transfer system during the correct positioning of the substrate loading conveyor 30 through the predetermined position groove 740.

6 to 26, a substrate transfer system (to which the substrate transfer carrier 30 according to the embodiment of the present invention is applied) includes a loading unit 310) and a moving part (320) for moving the loading part (310) on which the substrate (80) is loaded. The substrate 80 loaded on the stacking unit 310 of the substrate stacking carrier 30 is loaded one by one on the transporting rollers 50 or the substrate 80 transported from the transporting rollers 50 is transported one by one A loading / unloading unit 40 for unloading the loading unit 310; Unloading unit 40 to transfer the loaded substrate 80 through the loading / unloading unit 40 to the substrate process automation line or to unload the substrate 80 from the substrate process automation line. A conveying roller (50) A control unit 60 for controlling the operation of the loading / unloading unit 40 and the conveying roller 50; And a loading carrier guiding part 70 for guiding the substrate loading carrier 30 to be accurately positioned before the loading / unloading part 40. [ The substrate loading / unloading carrier 30 has the same configuration as that described above, so that a detailed description thereof will be omitted.

Referring to FIG. 17, the loading / unloading unit 40, which guides and fixes the substrate loading / unloading carrier 30 to be positioned in the transfer system, An entry breaker 710 that blocks entry of the substrate loading carrier 30 when there is a risk of collision between the substrate loading carrier 30 and the loading / unloading unit 40, A friction reducing portion 720 for minimizing the friction with the side surface of the conveyor 30 and a fastening portion 325 fastened to the fixing portion 325 of the substrate loading conveyor 30 for fastening the positioned substrate loading conveyor 30 And may include fastening means 730.

The entry breaker 710 is connected to the substrate loading carrier 30 where the loading / unloading unit 40 is not in the normal operation state or enters the substrate loading carrier 30 in the process of entering the substrate loading carrier 30 in the transfer system The loading and unloading unit 40 is formed on the loading carrier guide unit 70 so as to block entry of the substrate loading carrier 30 when there is a risk of collision between the loading / The moving part 320 of the board loading and unloading carrier 30 is no longer projected into the space of the loading carrier guiding part 70 .

The friction reducing portion 720 is configured to minimize friction with the side surface of the board loading conveyor 30 that is approaching. For example, a ball bearing or the like as shown in FIG. 17 may be applied. .

The fixing means 730 is fastened to the fixing portion 325 of the substrate loading carrier 30 for fixing the substrate loading carrier 30 positioned in the transfer system, The fixing means 730 may be a clamp or the like fastened to the round bar. In addition, as the sensor means for sensing that the board loading carrier 30 is positioned in the correct position, the controller 60 operates the fixing means 730 in accordance with the signal. .

In the meantime, in the present invention, when the impact between the board loading conveyor 30 and the load conveyor guide unit 70 occurs during the loading / unloading unit 40 to the conveying roller 50, Unloading portion 40 and the conveying roller 50 are separated from the main body frame so as to be completely separated from the main body frame on which the loading / unloading portion 40 and the conveying roller 50 are mounted (for example, Anchor or the like). In addition, as described above, it is also possible to make the shock absorbing function possible through the constitution of the separate stationary groove 740.

The loading / unloading unit 40 loads the substrate 80 loaded on the loading unit 310 of the substrate loading / unloading carrier 30 one by one to the transferring roller 50, 6, the substrate transfer unit 30 is positioned between the transfer roller 50 and the substrate loading carrier 30 in order to unload the transferred substrate 80 one by one to the loading unit 310 .

7 to 10, the loading / unloading unit 40 rotates the substrate 80 one by one between the loading unit 310 and the transporting roller 50 for loading or unloading, Unloading unit 40 as the loading amount of the substrate 80 loaded on the loading unit 310 changes during the loading / unloading process of the loading / unloading unit 40, (420).

The gap adjusting part 420 includes a front and rear guide part 421 for guiding the forward and backward movement of the rotary part 410 and a vertical guide part 422 for guiding the upward and downward movement of the rotary part 410 A forward and backward driving unit 423 for driving the rotary movement unit 410 in the forward and backward directions and a vertical movement unit 424 for driving the rotary movement unit 410 in the vertical direction.

That is, the front-rear drive unit 423 moves the entire rotational movement unit 410 in the front-rear direction along the front-rear guide unit 421, and the up-and-down driving unit 424 moves along the vertical guide unit 422 So that the rotational movement unit 410 is moved up and down. When the rotational movement of the rotational movement unit 410 along with the rotational movement of the bottom support unit 411 and the front support unit 412 is performed concurrently with the forward and rearward movement and the vertical movement of the rotary movement unit 410 , The loading / unloading portion 40 is configured to move the substrate (80) corresponding to the change of the stacking amount of the substrate (80) stacked between the stacking portion (310) 80) can be loaded or unloaded one by one.

The rotary movement unit 410 rotates the substrate 80 one by one between the stacking unit 310 and the transporting roller 50 for loading or unloading and moves the stacking unit 310 from the stacking unit 310 to the transporting roller 50 7 and 9, the rotary movement unit 410 is configured to move the substrate 80, which is to be loaded or unloaded, from the transfer roller 50 to the loading unit 310, A front supporting part 412 for supporting a front surface of the substrate 80 on which a bottom surface is supported by the bottom supporting part 411 and a front supporting part 412 for supporting the bottom supporting part 411 and the front supporting part 412, And a rotary motor 414 for rotating the rotary part 410 including the rotary part 410 about the rotary shaft.

That is, the bottom surface supporting portion 411 and the front surface supporting portion 412 are formed in the shape of '' 'to support the bottom surface and the front surface of the substrate 80 to be loaded or unloaded, respectively. At this time, Includes a suction part 415 for pulling the substrate 80 mounted on the loading part 310 for loading to the bottom surface supporting part 411 so that the slit part 313 of the loading part 310 The adsorption unit 415 is attached to the front surface of the substrate 80 mounted on the loading unit 310 with the bottom surface supporting unit 411 and the front surface supporting unit 412 positioned, And then the substrate is pulled toward the bottom surface supporting portion 411 and then the rotating portion 410 is rotated to load the substrate 80 on the transporting roller 50. The suction unit 415 may be formed in such a manner that a plurality of suction units 415 are arranged in parallel. In this case, the suction amount (suction force) for pulling the substrate for each of the plurality of suction units 415 can be adjusted A hole for forming a circuit is formed in the substrate, and the adsorbing portion which abuts on the portion where the hole is formed is weakened in the adsorbing portion relatively to the adsorbing portion, do. As shown in FIG. 10, in order to prevent the substrate 80 located on the bottom surface supporting portion 411 and the front surface supporting portion 412 from falling off during the rotation of the rotary portion 410 for loading, The bottom surface supporting portion 411 may further include a back surface supporting portion 413 for supporting the back surface of the substrate 80 at the other end of the bottom surface supporting portion 411 (the end opposite to the end where the front surface supporting portion 412 is formed) A separate groove (not shown) may be formed so as to be inserted into the bottom surface of the base 80 to be inserted.

The rotation unit 410 may include additional components for precisely determining whether the substrate 80 mounted on the loading unit 310 has been moved by exactly one sheet through the suction unit 415. For this purpose, A push portion 416 for pressing the entire surface of the substrate 80 moved toward the bottom surface supporting portion 411 through the suction portion 415 to prevent the pushing portion 416 from moving, And a distance measuring unit 417 for measuring the distance between the rotary movement unit 410 and the substrate 80 in a state in which the upper surface of the substrate 80 presses the entire surface of the substrate 80, It is determined whether or not two or more substrates 80 have been moved toward the bottom surface supporting portion 411 based on the distance between the rotation unit 410 and the substrate 80 measured through the rotation unit 417. 21 and 22, the push portion 416 is disposed on the substrate 80 (see FIG. 21) that has moved toward the bottom surface supporting portion 411 through the suction portion 415, as shown in FIG. 21, So that the front surface of the substrate 80 is pressed. The distance measurement laser sensor may be disposed on the front surface of the substrate 80 in a state where the front surface of the substrate 80 is pressed by the push portion 416, And it is determined whether two or more substrates 80 are moved to the bottom surface supporting portion 411 through the adsorption portion 415. [ At this time, as shown in FIG. 22, the distance measuring unit 417 may be provided with two laser sensors on both sides nearest to the front supporting unit 412 (or the bottom supporting unit 411) (Accuracy of measurement can be increased even in the same situation when only one side of the substrate 80 is pulled toward the bottom surface supporting portion 411), as well as the measurement accuracy The accuracy of the measurement is increased by measuring the distance to the portion closest to the portion of the substrate 80 that is caught by the back surface supporting portion 413 (or the groove portion formed in the bottom surface supporting portion 411) Even if the substrate 80 is a very thin substrate, it is possible to accurately discriminate whether or not two substrates are present. That is, the distance between the rotational movement unit 410 and the substrate 80 is measured by using the laser sensor of the distance measuring unit 417 while pressing the front surface of the substrate 80 through the push portion 416, The laser sensor is preferably measured at a height of 20 mm or less from the bottom of the substrate 80 because the perforation due to circuit formation on the substrate 80 is not usually within 20 mm from the bottom surface, (Through the control unit 60) whether the number of the substrates 80 moved to the bottom surface supporting portion 411 through the adsorption unit 415 is one or two or more, The substrate 80 is moved back to the loading part 310 via the suction part 415 and then the suction part 415 To one side of the base support portion 411 And performs a moving operation. In order to improve accuracy in the case where the thickness of the substrate 80 is very thin, the substrate 80 is moved toward the bottom surface support portion 411 through the suction portion 415 for loading under the control of the controller 60 The distance measuring unit 417 and the substrate 80 are rotated so that the angle between the laser sensor of the distance measuring unit 417 and the substrate 80 is optimized, So that the distance between the base 80 and the base 80 can be accurately determined by measuring the distance between the base 80 and the bottom 801 at a position close to each of the base supports 411. [ do. That is, in the case where the thickness of the substrate 80 is very thin, the accuracy of measurement is further required. In order to make the measurement itself possible after the angle between the laser sensor and the substrate itself is also optimized, And moves the measurement target substrate 80 to the optimization position. 21 and 22, a separating roller 415-1 which contacts the bottom surface of the substrate 80 pulled or pushed by the suction unit 415 is provided below the suction unit 415, Way bearing may be installed in the separating roller 415-1 so that the bottom surface of the substrate 80 and the bottom surface of the separating roller 415-1 are separated from each other during the process of pulling the substrate 80 by the suction unit 415. [ When the two or more substrates 80 are brought in by the suction unit 415 without rotating the separation roller 415-1 to be brought into contact with the separation roller 415-1, The separating roller 415-1 which is in contact with the bottom surface of the substrate 80 rotates while the suction unit 415 pushes the substrate 80, (80) can be smoothly moved toward the substrate loading carrier (30). The separating roller 415-1 is provided under the separating roller 415-1 with elastic means for allowing the separating roller 415-1 to vertically move according to the weight of the substrate 80 passing over the separating roller 415-1 The separation roller 415-1 adjusts the position according to various weights of the substrates 80 so as to increase the efficiency of the separation operation of two or more substrates 80. [

The adsorption unit 415 may function to determine whether the loading of the substrate 80 loaded on the loading unit 310 is completed and replacement with another loading carrier 30 is necessary in the loading process . That is, when loading of all the substrates 80 of the loading unit 310 is completed, the suction unit 415 touches the back contact unit 311 of the loading unit 310 and pulls it. When the substrate 80 is not pulled through the suction unit 415 through the pulling process a plurality of times because it is firmly fixed, the control unit 60 receiving the signal completes the loading of the loaded substrate 80 It is judged that it is time to change to another substrate loading and unloading carrier 30. Accordingly, it is possible to automatically determine the replacement time of the substrate loading carrier 30 during the loading process and notify the replacement time.

In order to perform unloading instead of loading, the rotary moving part 410 is pressed against the loading part 310 by pushing the substrate 80 supported by the bottom supporting part 411 toward the loading part 310 after unloading from the conveying roller 50 (Not shown). At this time, the adsorption unit 415 may perform the function of the adhered portion (not shown) at the same time.

When the substrate 80 is expected to be collided with the rotary movement part 410 during the course of the work process using the distance measurement part 417, the substrate 80, which is projected from the front surface of the rotary movement part 410, 80) to protect the substrate (80). The anti-collision portion 418 may be formed of a soft material that protects the substrate 80. If necessary, the anti-collision portion 418 may protrude from the front surface of the rotary portion 410, ) It is possible to take a structure protruding from the front.

The front and rear guide portions 421 for guiding the forward and backward movement of the rotational movement portion 410 are also formed to be inclined at the same slope as the inclined inclination of the bottom face contact portion 312 of the loading portion 310 This is because, as described above, the efficiency of the process of separating the substrate 80 one by one at the time of loading and that the substrate 80 moved toward the loading unit 310 at the time of unloading naturally face the loading unit 310 The convenience of the operation in the other loading or unloading process is increased.

23, when the substrate 80 loaded on the suction unit 415 is pulled and loaded one by one through the action of the rotation unit 410 and the gap controller 420, , The substrates 80 which are located on the outer side among the substrates 80 that are equally stacked on the loading unit 310 of the substrate loading carrier 30 are disturbed as shown in FIG. 23 (the loading / If the rotation movement unit 410 and the gap adjustment unit 420 are repeatedly operated in the same manner as described above, There may arise a problem that the substrate 80 (the substrate in the immediately following order of the substrate 80 to be loaded or unloaded) that is disturbed by the bottom supporting portion 411 to the back supporting portion 413 of the substrate supporting member 411 is damaged by being scratched or struck. In order to prevent this, the control unit 60 is connected to the substrate 80 pulled up through the suction unit 415 by a separate rotary motion position control module (not shown) The rotary moving part 410 which is seated on the bottom supporting part 411 and / or the back supporting part 413 is first moved backward by a predetermined distance (① direction) and then rotated (② direction) The substrate 80 (the substrate in the immediately following order of the substrate 80 to be loaded or unloaded) is prevented from being scratched or struck by the bottom supporting portion 411 to the rear supporting portion 413. On the other hand, when the substrate 80 to be loaded is lifted through the rotary movement part 410, the number of the substrates 80 mounted on the bottom supporting part 411 and / or the back supporting part 413 is one, The substrate 80 is pressed through the push portion 416 in a state where the substrate 80 is slightly lifted by the rotational movement portion 410 as shown in FIG. The rotation unit 410 may be moved backward by a predetermined distance, and then the rotation unit 410 may be lifted up a little Or the rotational movement unit 410 is first moved backward by a predetermined distance and then the rotational movement unit 410 is lifted up and then slightly lowered again so that the bottom support unit 411 of the rotational movement unit 410 is rotated, Or the substrate 80 (which is loaded or unloaded) on the rear surface supporting portion 413 Immediately substrate in the following order of the plate 80) can be prevented from being scratched and damaged hit. As a result of the measurement, when two or more substrates 80 are mounted on the bottom surface supporting portion 411 and / or the rear surface supporting portion 413, the controller 60 (if necessary, The bottom surface of the substrate 80 is slightly more strongly pressed against the loading part 310 by using the weight of the substrate 80 after the rotary moving part 410 is lowered somewhat faster The substrate 80 can be pushed through the substrate aligning portion 416-1 to be described later, or the substrate 80 can be pushed to the lower side of the separating roller 415-1 Pressure air is injected through the blower 417-1 positioned so that two or more bonded substrates 80 can be separated.

As described above, when the substrate 80 loaded on the suction unit 415 is pulled and loaded one by one through the action of the rotary part 410 and the gap adjusting part 420, The substrates 80 which are located on the outer side of the substrates 80 that are equally stacked on the loading part 310 of the substrate loading carrier 30 are disturbed as shown in FIG. 23 (the loading / unloading If the substrate 80 is pulled through the suction unit 415 in this state, there is a high possibility that two or more substrates 80 come along along the left and right sides of the substrate 80, There is a possibility that the left or right side of the substrate 80 is not caught by the bottom surface supporting portion 411. In order to prevent this, the rotational movement unit 410 further includes a substrate aligning unit 416 for pushing the left and right sides of the substrate 80 disturbed by the stacking unit 310 from both the left and right sides to position the substrates 80 -1). ≪ / RTI > As shown in FIG. 22, the substrate alignment unit 416-1 is spaced apart from the left and right sides by a predetermined distance so as to press near the left and right edges of the substrate 80. As shown in FIG. 21, 310 so that the lower portion of the substrate 80 can be pressed. 26, before the substrate 80 is sucked and attracted through the adsorption unit 415, the substrate 80 (FIG. 26) of the stacking unit 310 is aligned with the substrate alignment unit 416-1 A state in which two or more substrates 80 are loaded or one of the left and right sides of the substrate 80 is not caught by the bottom surface supporting portion 411 can be obtained by aligning the substrate 80 by pressing the lower portion of the substrate 80 . ≪ / RTI > In the unloading process, the substrate aligning unit 416-1 may be mounted on the stacking unit 310 of the substrate stacking carrier 30 such that the left and right sides of the substrates 80 are unloaded, .

The transfer roller 50 transfers the loaded substrate 80 to the substrate process automation line through the loading / unloading unit 40 or the loading / unloading unit 40 to unload the substrate 80 from the substrate process automation line. 11, a plurality of the front supporting portions 412 of the rotary movement portion 410 are connected to the conveying roller 50, as shown in FIG. 11, The interference prevention slit 520 forms a predetermined space through which the front support part 412 is passed so as not to interfere with the interference prevention slit 520. The interference prevention slit 520 is formed on the left and right sides of the interference prevention slit 520, A rotation motor 540 for rotating the main transfer roller 510 and an auxiliary roller 530 for smooth transfer of the substrate 80 between the interference prevention slits 520, A substrate table (not shown) for aligning the array of the substrates moving on the conveying roller 50 The chin 550 may include each of the right and left sides of the transport roller.

The interference prevention slit 520 is provided between a plurality of the front supporting portions 412 of the rotary portion 410 for moving the substrate 80 while rotating between the stacking portion 310 and the conveying roller 50, The front supporting portion 412 is formed to have a predetermined space through which the front supporting portion 412 passes on the conveying roller 50 so as not to interfere with the conveying roller 50. The length and width of the portion where the front supporting portion 412 passes through the conveying roller 50 . ≪ / RTI >

The substrate transfer system of the present invention may be configured such that a plurality of front support portions 412 of the rotary transfer portion 410 can pass on the transfer roller 50 together with the vertically / horizontally movable structure of the rotary transfer portion 410 The front support portion 412 of the rotary movement portion 410 is moved downward immediately after the substrate 80 is loaded on the conveying roller 50 as described above through the structure of the interference preventing slit 520, So that the substrate 80 can be rotated 360 degrees in the downward direction immediately after being returned or loaded toward the loading unit 310 and can be returned toward the loading unit 310. Thus, Compared to the process of waiting for the substrate 80 to move in the roller and then loading the substrate 80 in accordance with the cycle of returning in the opposite direction only to the same locus as the original trajectory, At a greatly reduced speed It can be so.

The rotary movement unit 410 includes a first detection unit 419 for detecting whether the substrate 80 starts to be transported on the transport roller 50 after the substrate 80 is removed from the bottom surface support unit 411, The control unit 60 controls the conveyance of the substrate 80 immediately after the substrate 80 is loaded on the basis of the information of the first detection unit 419 By moving the front support part 412 downward through the interference prevention slit 520 and rotating the front support part 412 toward the loading part 310 of the substrate loading carrier 30, the operation is performed more accurately, So that it can be shortened as much as possible. The first detection unit 419 may operate to detect whether the substrate 80 has been completely transferred from the transport roller 50 to the bottom surface support unit 411 during the unloading process.

The main transfer roller 510 is positioned on the left and right sides of the interference preventing slit 520 and on the front side thereof as necessary with respect to the interference preventing slit 520, The driving force for rotating the main feed roller 510 is transmitted from the rotating motor 540 connected to the main feed roller 510. [

The auxiliary roller 530 is configured to smoothly transfer the substrate 80 between the interference preventing slits 520 and may be rotated to receive the driving force by the roller of the auxiliary roller 530 For example, the auxiliary connecting roller 560 may include a pivotal connection member 560 that rotates the auxiliary roller 530 in conjunction with the rotation of the main transfer roller 510. 11, the rotation linking member 560 connects the main transfer roller 510 and the auxiliary roller 530 to transfer the rotational force of the main transfer roller 510 to the auxiliary roller 530 as it is, The roller 530 can also be rotated between the main conveyance roller 510 and the auxiliary roller 530 and between the auxiliary roller 5 and the auxiliary roller 530, respectively.

The substrate array unit 550 has a configuration in which the substrate 80 protrudes from the left and right sides of the conveying rollers in order to align the arrangement of the substrates 80 moving on the conveying rollers 50 to align the substrates 80, (50) are arranged at the left and right sides of the conveying roller (50) so as to be aligned and moved, and are projected in the form of a push toward the center of the conveying roller (50) Both sides of the substrate are simultaneously pushed to align the substrate 80 so as to be positioned at the center of the conveying roller 50. At this time, about two (4) sensors (not shown) are arranged at a predetermined interval on the left and right sides of the conveying roller 50, and as the substrate 80 is tilted toward one side of the substrate 80, It is also possible to adjust the left and right push speeds differently. Meanwhile, the substrate array unit 550 can perform the operation of dividing the defective substrate 80. For example, when the defective substrate 80, which is determined as the defective substrate 80 in the substrate process automation line, The controller 60 receives information on the order in which the defective substrate 80 is positioned and then moves the defective substrate 80 on the conveying roller 50 when the defective substrate 80 passes over the conveying roller 50. [ Or only one of the left and right sides of the substrate array part 550 located at the right and left sides of the conveying roller 50 is operated, It is possible to easily distinguish only the unloaded substrates from the substrates 80 loaded on the substrate loading conveyor 30 by the defective substrate 80 in the future. At this time, the conveying roller 50 is normally positioned at the lower side and protrudes only when the substrate 80 is aligned with the centering or transferred to the left or right side with respect to the defective substrate 80, The substrate 80 can be easily moved leftward or rightward during centering alignment of the substrate 80 or transfer to the left or right of the defective substrate 80 You can help.

In the process of loading the substrate 80, another substrate 80 is loaded on the conveying roller 50 in a state in which the substrate 80 loaded on the conveying roller 50 has not yet passed through the conveying roller 50 For this purpose, the transporting roller 50 transports the substrate 80 on the transporting roller 50 by a distance equal to or greater than the size of the substrate 80 during the loading process, The controller 60 includes a second detecting unit 570 for detecting whether the substrate 80 is conveyed by the conveying roller 50 (for example, a laser sensor or the like) based on the information of the second detecting unit 570, The other substrate 80 is prevented from being loaded on the conveying roller 50 without conveying a distance equal to or greater than the size of the substrate 80 on the conveying roller 50. [ That is, when the second detection unit 570 is located at a distance of about the size of the substrate 80 from the first detection unit 419, the substrate 80 detected from the first detection unit 419 The control unit 60 determines that the substrate 80 does not yet pass the second detection unit 570 so that the substrate 80 does not transfer a distance equal to or larger than the size of the substrate 80 on the conveying roller 50 At this time, if another substrate 80 is loaded on the conveying roller 50, this is prevented and the substrate 80 is completely passed through the second detecting unit 570, so that the loading process is resumed.

Further, it may further include a double-sheet detecting unit 580 that finally detects whether two or more substrates 80 are being loaded or unloaded on the conveying roller 50. The two-piece detection unit 580 detects the thickness of the moving substrate 80 for loading or unloading along the conveying roller 50 on the conveying roller 50 as shown in FIG. 20 and the like It is detected whether the number of the substrates 80 is two or more. 20, the double-sheet detection unit 580 includes a detection roller 581 for touching the upper surface of the substrate 80 passing through the conveyance roller 50, A roller frame 582 having one end connected to the roller frame 582 and connected to the eccentric shaft 581 in such a manner that the other end of the roller frame 582 is rotated about the rotary shaft 584 with respect to the rotary shaft 584, And a limit sensor 585 for measuring and sensing the moving distance of the other end of the eccentric rotation portion 583. 20, when two or more substrates 80 pass through the sensing roller 581, the sensing roller 581 and the roller frame 582 interlocking with the sensing roller 581 are separated from the substrate (not shown) The eccentric rotation part 583 is amplified at the other end than the one end connected to the roller frame 582 through the leverage principle, and the rotation of the eccentric rotation part 583 is detected by the limit sensor 585 Even when the substrate 80 is thin, it is possible to accurately determine whether two or more substrates 80 are correctly loaded or unloaded through the amplification detection as described above Therefore, it is possible to prevent a problem caused by simultaneous loading or unloading of two or more substrates 80 at the same time. The second sensing unit 580 includes a second knob 587 for adjusting the position of the sensing roller 581 to match the thickness of the substrate 80 and a second knob 587 for adjusting the position of the limit sensor 585 to the substrate 80 so as to correspond to the thickness of the various substrates 80. In addition, That is, the sensing roller 581 is moved to the thickness of the substrate 80 through the second handle 587 to prevent the substrate 80 from moving when the substrate 80 passes therethrough The sensing roller 581 is not contacted with the substrate 80 only when two or more substrates 80 pass through the substrate 80 so that no gas or the like is generated on the upper surface of the substrate when the normal substrate 80 passes through the substrate 80. [ The sensing roller 581 moves upwards when the substrate 80 passes through two or more sheets of the substrate 80 in accordance with the thickness of the substrate 80 through the handle 586, If the position of the limit sensor 585 is set so that the limit sensor 585 can sense the distance that the rotation of the other end of the swing unit 583 is amplified and moved, It is possible to accurately detect whether or not two or more substrates 80 are present It is.

Hereinafter, the loading and unloading process of the substrate 80 using the substrate transfer system of the present invention will be described with reference to FIGS. 12 to 16. FIG.

12 to 14, in a state in which the substrate loading carrier 30 on which the substrate 80 is mounted is fixed in position in the transfer system through the loading carrier guide portion 70, 12, the rotating part 410 of the loading / unloading part 40 first rotates toward the loading part 310 and moves one of the frontmost substrates 80 among the stacked substrates 80 And is pulled toward the bottom surface supporting portion 411 using the suction portion 415. At this time, the bottom surface supporting portion 411 is positioned below the bottom surface contacting portion 312 by utilizing the slit portion 313 of the loading portion 310. After confirming that the substrate 80 is pulled toward the bottom surface supporting portion 411 through the push portion 416 and the distance measuring portion 417 as described above, The rotary movement unit 410 rotates and moves the substrate 80 to the conveying roller 50 as shown in FIG. 13 through the simultaneous action of the rotary motor 420 and the rotary motor 414. If it is confirmed that the substrate loaded through the first detection unit 419 is transferred on the transfer roller 50 and separated from the bottom surface support unit 411 immediately after the substrate 80 is loaded on the transfer roller 50, 14, the gap adjusting part 420 moves the bottom supporting part 411 and the front supporting part 412 in the downward direction, and then rotates the moving part 410 in a trajectory opposite to the loading direction The rotary unit 410 may be rotated 360 degrees so as to be directed to the loading unit 310. In other words,

The unloading process will be described with reference to FIGS. 15 and 16. Even in a state where the transfer of the substrate 80 from the substrate process automation line to the transfer roller 50 is performed (that is, The transfer of the substrate 80 to the transfer roller 50 is performed only when the same configuration as that of the front support portion 412 of the rotary transfer portion 410 of the present invention is first placed on the transfer roller 50 15, the gap adjusting unit 420 and the rotation motor 414 move the rotary movement unit 410 from the lower side of the conveyance roller 50 with the rotation movement, as shown in FIG. 15, It is possible to move onto the conveying roller 50 through the interference preventing slit 520 of the conveying roller 50, thereby shortening the unloading process time. Thereafter, the substrate 80 on which the transfer to the transfer roller 50 has been completed is transferred by the rotary transfer part 410 to the front supporting part 412 and the bottom supporting part 411 (with the back supporting part 413 being added as needed) And is unloaded to the loading unit 310. [0050] Thereafter, as shown in FIG. 16, the unloaded substrate 80 is pushed toward the stacking unit 310 by using the tight contact unit (not shown), and the stacked substrates are stacked on the other substrates 80 mounted on the stacking unit 310 And then the rotary part 410 is rotated in a direction opposite to the unloading direction to the conveying roller 50, or in other instance, it is rotated 360 degrees in the direction of unloading, 50). On the other hand, when unloading, the substrate 80 mounted on the loading unit 310 of the substrate is not brought into close contact with the substrate loading conveyor 30, The substrate aligning unit 416-1 is used to prevent the substrate aligning unit 416-1 from rotating the substrate aligning unit 416-1. The substrates 80 mounted on the loading unit 310 are pressed and adhered to each other by the moving unit 416-1 and then one substrate 80 is unloaded through the rotating unit 410, The process of pressing and adhering the substrates 80 mounted on the stacking unit 310 to the substrate stacking unit 416-1 by using the substrate aligning unit 416-1 is repeated, Allows you to fill the load accurately.

18 and 19, the substrate transfer system 30 according to the present invention is configured such that the substrate loading carrier 30, on which the substrate 80 is loaded in the unloading process, is transferred to the empty substrate loading carrier 30, And a buffer 90 that allows the substrate 80 to be temporarily loaded during the process of replacing the substrate loading carrier 30 so that the unloading process can be performed continuously during the process of replacing the substrate loading carrier 30. [ .

In the unloading process, the buffer 90 moves the buffer plate 910 only when the substrate loading carrier 30 is exchanged between the substrate loading carrier 30 and the loading / unloading portion 40, The board 80 to be loaded on the loading unit 310 may be temporarily loaded on the buffer board 910 in the process of replacing the carrier 30. For this purpose, The buffer plate 910 located on the side of the buffer plate 910 moves inward or outward to move the buffer plate 910 inward when the loading operation of the substrate loading carrier 30 is completed 18, the substrate 80 to be unloaded thereafter is loaded on the buffer plate 910, and when the loading unit 310 is completely replaced with the empty substrate loading carrier 30 Thereafter, the buffer plate 910 moves to the outside again, The substrates 80 loaded on the buffer plate 910 are loaded on the loading unit 310 and then the unloaded substrate 80 is loaded on the loading unit 310 . As described above, since the loading unit 310 of the substrate loading carrier 30 is inclined and disposed, the buffer plate 910 is interfered with the relatively high end portion of the loading unit 310 (Not shown) for vertically moving the buffer plate 910 in order to prevent the occurrence of such a case. When the substrate loading conveyor 30 enters or advances, the buffer plate 910 The buffer plate 910 is moved downward to completely interfere with the end of the loading unit 310 and the buffer plate 910 is moved downwardly after the substrate loading conveyor 30 is completely completely removed, So that the unloading operation is performed.

At this time, the buffer plate 910 includes a rotating roller 920 and moves to the loading unit 310 of the substrate loading carrier 30 in which the substrate 80 loaded on the buffer plate 910 is replaced The friction between the buffer plate 910 and the substrate 80 can be minimized and the substrate 80 can be protected.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, Should be interpreted as belonging to the scope.

30: Substrate loader 310: Loader
311: back contact portion 312: bottom contact portion
313: slit part 314: intermediate contact part
320: moving part 321:
322: groove portion 323:
324: rope 325:
326: protective member 327: anti-rollover assistant wheel
328:
40: loading / unloading unit 410:
411: bottom support portion 412: front support portion
413: rear surface supporting portion 414: rotation motor
415: suction part 415-1: separation roller
416: push portion 416-1: substrate alignment portion
417: distance measuring unit 418:
419: first detection unit 420:
421: front and rear guide portion 422: upper and lower guide portion
423: front and rear driving unit 424:
50: Feed roller 510: Main feed roller
520: interference prevention slit 530: auxiliary roller
540: rotation motor 550: substrate array part
560: rotation connecting member 570: second detecting unit
580: double sheet detection unit 581: detection roller
582: roller frame 583: eccentric rotation part
584: rotation shaft 585: limit sensor
586: handle 587: second handle
60:
70: Loading conveyor guide portion 710: Inlet breaker
720: friction reducing portion 730: fixing means
740: Positional groove portion 80:
90: buffer 910: buffer plate
920: rotating roller 930: inner / outer driving part
* Prior art related codes
2: substrate 3: L-shaped rack
4: Rack transferring roller 5: Substrate transferring roller
6: Truck 10: Dog

Claims (35)

delete delete delete delete delete delete A substrate loading carrier including a loading section for loading the substrate and a moving section for moving the loading section on which the substrate is loaded;
A loading / unloading unit for loading the substrates loaded on the loading unit of the substrate loading carrier one by one to the transfer rollers or unloading the substrates transferred from the transfer rollers one by one to the loading unit;
A transferring roller for transferring the substrate loaded through the loading / unloading unit to the substrate process automation line or transferring the substrate to the loading / unloading unit for unloading the substrate from the substrate process automation line;
And a control unit for controlling operations of the loading / unloading unit and the conveying roller,
The loading / unloading unit may include a rotary movement unit for rotating the substrate one by one between the loading unit and the transferring roller for loading or unloading, and a loading / unloading unit for loading / unloading the substrate, And an interval adjusting unit for accurately adjusting the position of the rotary moving unit in accordance with a distance change caused by the distance. 8. The system of claim 7,
Further comprising a loading carrier guiding part for guiding the substrate loading carrier to be positioned in front of the loading / unloading part,
The loading / unloading unit guide unit may include an entry / exit circuit breaker for blocking entry of the substrate loading carrier if the loading / unloading unit is not in a normal operation state or there is a risk of collision between the board loading carrier and the loading / unloading unit Features a transport system. 9. The method of claim 8,
The loading carrier guide portion may further include a friction reducing portion that minimizes friction with the side surface of the incoming board loading carrier and a fixing means that is fastened to the fixing portion of the board loading carrier for fixing the positioned board loading carrier And the transfer system. delete 8. The method of claim 7,
The distance adjusting unit includes a front and rear guide unit for guiding the forward and backward movement of the rotary movement unit, a vertical guide unit for guiding the vertical movement of the rotary movement unit, a front and rear drive unit for driving the rotary movement unit in the front- And an up-and-down driving unit for vertically driving the rotary moving unit. 8. The method of claim 7,
Wherein the rotary moving part includes a bottom supporting part for supporting a bottom surface of a substrate to be loaded or unloaded, a front supporting part for supporting a front surface of the substrate on which the bottom supporting part is supported, and a bottom supporting part and a front supporting part And a rotary motor that rotates the rotary transfer portion about the rotary shaft. 13. The method of claim 12,
Wherein the bottom surface supporting portion and the front surface supporting portion are formed in a plurality of spaced-
Wherein the stacking portion includes a slit portion extending from a front surface to a rear surface of the bottom contact portion at a predetermined interval so as to pass through the stacking portion without interfering with the plurality of bottom surface supporting portions and the front supporting portion,
Wherein the conveying roller includes an interference preventing slit that forms a predetermined space through which the front supporting part passes so that the plurality of front supporting parts do not interfere with the conveying roller. 14. The method of claim 13,
The control unit moves the front supporting unit downward through the interference preventing slit even after the substrate is not yet conveyed by the conveying roller immediately after the rotating unit has loaded the substrate with the conveying roller, Thereby shortening the loading or unloading process cycle. 13. The method of claim 12,
Wherein the rotary moving part includes a suction part for pulling the substrate loaded on the loading part for loading toward the bottom surface supporting part or a contact part for pushing the substrate supported on the bottom surface supporting part to the loading part for unloading,
Wherein the adsorption unit is capable of adjusting an adsorption amount of pulling the substrate. 16. The method of claim 15,
The pushing portion pushes the front surface of the substrate moved toward the bottom supporting portion through the suction portion and pushes the front side of the substrate. The pushing portion pushes the front surface of the substrate and measures the distance between the rotating portion and the substrate And a distance measuring unit
Wherein the controller determines whether two or more substrates have been moved toward the bottom supporting portion based on the distance between the rotating portion and the substrate measured through the distance measuring portion. 17. The method of claim 16,
The rotation transmitting portion further includes a collision preventing portion that protrudes to protect the substrate when the substrate is expected to collide with the rotating portion based on the distance between the rotating portion and the substrate measured through the distance measuring portion . 12. The method of claim 11,
Wherein the mounting portion includes a bottom contact portion that is in contact with a back surface of a substrate to be loaded and a bottom surface contact portion that is in contact with a bottom surface of the substrate to be loaded, the bottom contact portion is formed by tilting the substrate toward the back contact portion, And is inclined toward the rear side,
Wherein the front and rear guide portions for guiding the forward and backward movement of the rotary movement portion are inclined at the same slope as the inclination of the bottom face contact portion. 14. The method of claim 13,
The conveying roller includes a main conveying roller located on the left and right sides of the interference preventing slit and the front side of the interference preventing slit, a turning motor for rotating the main conveying roller, and a conveying roller for conveying the substrate smoothly between the interference preventing slits And an auxiliary roller located in the forward direction. 20. The method of claim 19,
Wherein the conveying roller comprises a substrate array part for aligning the arrangement of the substrates moving on the conveying rollers, respectively, on the right and left sides of the conveying roller. 20. The method of claim 19,
Wherein the conveying roller further comprises a double sheet detecting unit for detecting whether there are two or more sheets to be moved on the conveying roller for loading or unloading. 22. The method of claim 21,
Wherein the sensing unit includes a sensing roller for touching an upper surface of the substrate when the number of the substrates passing through the conveying roller is more than two, a roller frame for moving up and down in conjunction with the upward and downward movement of the sensing roller, And a limit sensor for measuring and sensing a moving distance of the other end of the eccentric rotation part, wherein the eccentric rotation part includes a first end connected to the first end of the eccentric rotation part, Transport system. 15. The method of claim 14,
And a first detection unit for detecting whether the substrate is transferred from the bottom support to the bottom support in the process of detecting whether the substrate is transferred on the transfer roller in the loading process or unloading the rotating unit,
Wherein the control unit moves the front support unit downward through the interference prevention slit and rotates the substrate support carrier immediately after loading the substrate based on the information of the first detection unit. 24. The method of claim 23,
Wherein the conveying roller includes a second detecting unit for detecting whether the substrate has transferred a distance on the conveying roller equal to or larger than the size of the substrate during the loading process,
Wherein the control unit prevents the other substrate from being loaded onto the conveying roller in a state in which the substrate does not convey a distance equal to or larger than the size of the substrate on the conveying roller based on the information of the second detecting unit. 8. The system of claim 7,
Further comprising a buffer to allow the substrate to be temporarily loaded during the process of replacing the substrate loading carrier in the unloading process. 26. The method of claim 25,
The buffer temporarily moves the substrate to be loaded in the loading part to the buffer board in the process of replacing the substrate loading carrier by moving the buffer board only when the substrate loading carrier is exchanged between the board loading carrier and the loading / unloading part Features a transport system. 27. The method of claim 26,
Wherein the buffer includes a rotating roller on the buffer plate to minimize friction with the substrate during movement of the substrate loaded on the buffer plate to the replaced substrate loading carrier. 23. The method of claim 22,
The double-sheet detection unit may further include a second knob for adjusting the position of the detection roller to a thickness of the substrate, so that when one substrate passes through the substrate, Wherein the sensing roller is in contact with the upper surface of the substrate only when at least two substrates pass through, without contacting the upper surface, thereby minimizing substrate damage with at least two substrate detections. 16. The method of claim 15,
The control unit may include a substrate on which a part of the substrate stacked in the loading unit is pulled toward the bottom supporting unit through the suction unit for loading and a substrate which is disturbed in the loading unit, The rotation moving part in which the substrate pulled up through the suction part is seated on the bottom support part or the backside support part is moved backward by a predetermined distance so as to prevent interference with the substrate of the loading part Further comprising a rotary motion position control module for pivoting for subsequent loading. 16. The method of claim 15,
The rotary moving part further includes a substrate aligning part for picking up a substrate, which is loaded on the stacking part through the suction part for loading, and a substrate which is disturbed in the stacking part, Wherein the transfer system comprises: 31. The method of claim 30,
When the substrate is pulled toward the lower surface supporting portion, the rotary moving portion once moves the rotary moving portion upward, and then determines whether two or more substrates have been moved to the bottom surface supporting portion by using the distance measuring portion. If two or more substrates are moved And the substrate on which the bottom surface of the substrate collides with the stacking portion is separated. Then, the substrate is struck again by using the substrate aligning portion while pressing the substrate or spraying high pressure air through the blower Wherein the substrate is completely separated from the substrate. 16. The method of claim 15,
The rotating portion further includes a separating roller which is in contact with a bottom surface of the substrate pulled or pushed by the adsorption portion,
The separating roller may include a one-way bearing for rotating the separating roller in the process of pushing the substrate toward the loading part while the separating roller does not rotate in the process of pulling the substrate from the loading part by the suction unit, Wherein the roller comprises elastic means for allowing the roller to move up and down according to the weight of the substrate. 17. The method of claim 16,
The distance measuring unit measures the distance from two sides on both sides corresponding to the left and right sides of the substrate using a laser sensor to accurately determine whether two or more substrates have been moved toward the bottom surface supporting portion, Wherein said transferring system comprises: 34. The method of claim 33,
When the substrate is moved to the bottom surface supporting portion through the adsorption portion for loading, the control portion rotates the rotating portion upward by a certain degree and then rotates downward again,
The distance measuring unit measures and provides a distance to the substrate at a position closest to each of the plurality of bottom surface supporting units and accurately determines whether or not two or more substrates are moved toward the bottom surface supporting unit through the provided data comparison. Transport system. 13. The method of claim 12,
Wherein the rotary moving part further comprises a back supporting part for supporting a back surface of the substrate at the other end of the bottom supporting part or a separate groove part for inserting the bottom surface of the substrate is further formed in the bottom supporting part. .
KR1020150012228A 2015-01-26 2015-01-26 A Board Loading and Transport Device and Transfer System including thereof KR101694468B1 (en)

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JP2005320050A (en) * 2004-05-11 2005-11-17 Kyokuhei Glass Kako Kk Cassette-housing type glass board transfer box
KR100555620B1 (en) * 2003-10-28 2006-03-03 주식회사 디엠에스 System for carrying flat panel display and the carrying method using the same

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KR200445622Y1 (en) * 2007-01-19 2009-08-19 주식회사 유니빅 Standing Erect Transfer Apparatus for Plate Glass Type
KR101427594B1 (en) * 2007-06-26 2014-08-08 삼성디스플레이 주식회사 Apparatus for storing substrate

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KR100555620B1 (en) * 2003-10-28 2006-03-03 주식회사 디엠에스 System for carrying flat panel display and the carrying method using the same
JP2005320050A (en) * 2004-05-11 2005-11-17 Kyokuhei Glass Kako Kk Cassette-housing type glass board transfer box

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