KR20160091721A - 신규한 디옥심에스테르 화합물 및 이를 포함하는 광중합 개시제 및 포토레지스트 조성물 - Google Patents
신규한 디옥심에스테르 화합물 및 이를 포함하는 광중합 개시제 및 포토레지스트 조성물 Download PDFInfo
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- KR20160091721A KR20160091721A KR1020150012196A KR20150012196A KR20160091721A KR 20160091721 A KR20160091721 A KR 20160091721A KR 1020150012196 A KR1020150012196 A KR 1020150012196A KR 20150012196 A KR20150012196 A KR 20150012196A KR 20160091721 A KR20160091721 A KR 20160091721A
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Classifications
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C251/00—Compounds containing nitrogen atoms doubly-bound to a carbon skeleton
- C07C251/32—Oximes
- C07C251/62—Oximes having oxygen atoms of oxyimino groups esterified
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C251/00—Compounds containing nitrogen atoms doubly-bound to a carbon skeleton
- C07C251/32—Oximes
- C07C251/62—Oximes having oxygen atoms of oxyimino groups esterified
- C07C251/64—Oximes having oxygen atoms of oxyimino groups esterified by carboxylic acids
- C07C251/66—Oximes having oxygen atoms of oxyimino groups esterified by carboxylic acids with the esterifying carboxyl groups bound to hydrogen atoms, to acyclic carbon atoms or to carbon atoms of rings other than six-membered aromatic rings
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C251/00—Compounds containing nitrogen atoms doubly-bound to a carbon skeleton
- C07C251/32—Oximes
- C07C251/62—Oximes having oxygen atoms of oxyimino groups esterified
- C07C251/64—Oximes having oxygen atoms of oxyimino groups esterified by carboxylic acids
- C07C251/68—Oximes having oxygen atoms of oxyimino groups esterified by carboxylic acids with at least one of the esterifying carboxyl groups bound to a carbon atom of a six-membered aromatic ring
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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- G02B5/20—Filters
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
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Abstract
Description
실시예 | 바인더 수지 (중량%) |
광반응성 화합물 (중량%) |
광중합 개시제 (중량%) |
첨가제 (중량%) |
27 | 1 (40) | 디펜타에리스리톨헥사아크릴산 (20) | 화합물 4 (0.5) |
FC-430 (0.1) |
28 | 1 (40) | 펜타에리스리톨트리아크릴산 (20) | 화합물 34 (0.5) |
FC-430 (0.1) |
29 | 1 (40) | 트리메틸올프로판트리아크릴산 (10) 에틸렌글리콜디아크릴산 (10) |
화합물 35 (0.5) |
FC-430 (0.1) |
30 | 1 (40) | 디펜타에리스리톨펜타아크릴산 (20) | 화합물 36 (0.5) |
FC-430 (0.1) |
31 | 1 (40) | 디펜타에리스리톨헥사아크릴산 (20) | 화합물 44 (0.5) |
FC-430 (0.1) |
32 | 1 (40) | 펜타에리스리톨트리아크릴산 (20) | 화합물 48 (0.5) |
FC-430 (0.1) |
33 | 1 (40) | 트리메틸올프로판트리아크릴산 (10) 에틸렌글리콜디아크릴산 (10) |
화합물 52 (0.5) |
FC-430 (0.1) |
34 | 1 (40) | 디펜타에리스리톨헥사아크릴산 (20) | 화합물 56 (0.5) |
FC-430 (0.1) |
35 | 1 (40) | 펜타에리스리톨트리아크릴산 (20) | 화합물 60 (0.5) |
FC-430 (0.1) |
36 | 1 (40) | 트리메틸올프로판트리아크릴산 (10) 에틸렌글리콜디아크릴산 (10) |
화합물 61 (0.5) |
FC-430 (0.1) |
37 | 1 (40) | 트리메틸올프로판트리아크릴산 (10) 에틸렌글리콜디아크릴산 (10) |
화합물 67 (0.5) |
FC-430 (0.1) |
38 | 2 (40) | 비스페놀-A 디글리시딜에테르아크릴산 부가물 (20) | 화합물 36 (0.5) |
FC-430 (0.1) |
39 | 2 (40) | 트리메틸올프로판트리글리시딜에테르아크릴산 부가물 (20) | 화합물 44 (0.5) |
FC-430 (0.1) |
40 | 3 (40) | 펜타에리스리톨트리아크릴산 (20) | 화합물 36 (0.5) |
FC-430 (0.1) |
41 | 3 (40) | 펜타에리스리톨트리메타아크릴산(20) | 화합물 44 (0.5) |
FC-430 (0.1) |
42 | 1 (20) 2 (20) |
디펜타에리스리톨헥사아크릴산 (20) | 화합물 44 (0.5) |
FC-430 (0.1) |
43 | 1 (20) 3 (20) |
디펜타에리스리톨헥사아크릴산 (20) | 화합물 44 (0.5) |
FC-430 (0.1) |
44 | 1 (20) | 디펜타에리스리톨헥사아크릴산 (10) | 화합물 44 (0.5) |
FC-430 (0.1) 카본블랙 (50) |
45 | 1 (20) | 디펜타에리스리톨헥사아크릴산 (10) | 화합물 44 (0.5) |
FC-430 (0.1) P.R.177 (50) |
실시예 | 감도 (mJ/cm2) |
잔막율 (%) |
패턴안정성 | 내화학성 | 연성 |
27 | 45 | 91 | 양호 | 양호 | 양호 |
28 | 50 | 92 | 양호 | 양호 | 양호 |
29 | 45 | 91 | 양호 | 양호 | 양호 |
30 | 35 | 93 | 양호 | 양호 | 양호 |
31 | 45 | 93 | 양호 | 양호 | 양호 |
32 | 40 | 91 | 양호 | 양호 | 양호 |
33 | 40 | 91 | 양호 | 양호 | 양호 |
34 | 45 | 90 | 양호 | 양호 | 양호 |
35 | 50 | 92 | 양호 | 양호 | 양호 |
36 | 50 | 90 | 양호 | 양호 | 양호 |
37 | 50 | 89 | 양호 | 양호 | 양호 |
38 | 30 | 93 | 양호 | 양호 | 양호 |
39 | 45 | 91 | 양호 | 양호 | 양호 |
40 | 45 | 90 | 양호 | 양호 | 양호 |
41 | 40 | 93 | 양호 | 양호 | 양호 |
42 | 35 | 90 | 양호 | 양호 | 양호 |
43 | 40 | 90 | 양호 | 양호 | 양호 |
44 | 35 | 92 | 양호 | 양호 | 양호 |
45 | 40 | 91 | 양호 | 양호 | 양호 |
비교예 1 | 200 | 87 | 막감 | 불량 | 양호 |
비교예 2 | 250 | 80 | 막감 | 불량 | 불량 |
Claims (8)
- 하기 화학식 1로 표시되는 디옥심에스테르 화합물:
[화학식 1]
상기 화학식 1에서,
R1 내지 R3은 각각 독립적으로 수소, 할로겐, (C1-C20)알킬, (C6-C20)아릴, (C1-C20)알콕시, (C6-C20)아릴(C1-C20)알킬, 히드록시(C1-C20)알킬, 히드록시(C1-C20)알콕시(C1-C20)알킬, (C3-C20)사이클로알킬 또는 (C3-C20)사이클로알킬(C1-C20)알킬이고;
A는 수소, 할로겐, (C1-C20)알킬, (C6-C20)아릴, (C6-C20)아릴(C1-C20)알킬, 아미노, 니트로, 시아노 또는 히드록시이고;
n은 0 내지 2의 정수이다. - 제 1항의 디옥심에스테르 화합물을 포함하는 광중합 개시제.
- 제 1항의 디옥심에스테르 화합물, 바인더 및 에틸렌계 불포화 결합을 가지는 화합물을 포함하는 포토레지스트 조성물.
- 제 3항에 있어서,
상기 디옥심에스테르 화합물은 포토레지스트 조성물 100 중량%에 대하여 0.01 내지 10 중량%로 포함되는 것을 특징으로 하는 포토레지스트 조성물. - 제 3항의 포토레지스트 조성물에 블랙 착색재를 더 포함하는 블랙 매트릭스용 포토레지스트 조성물.
- 제3항의 포토레지스트 조성물에 색재를 더 포함하는 컬러 매트릭스용 포토레지스트 조성물.
- 제5항에 따른 블랙 매트릭스용 포토레지스트 조성물을 포함하는 것을 특징으로 하는 블랙 매트릭스.
- 제6항에 따른 컬러 매트릭스용 포토레지스트 조성물을 포함하는 것을 특징으로 하는 컬러 필터.
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