KR20150079466A - 포지셔닝 프레임 구조체 - Google Patents

포지셔닝 프레임 구조체 Download PDF

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Publication number
KR20150079466A
KR20150079466A KR1020140193614A KR20140193614A KR20150079466A KR 20150079466 A KR20150079466 A KR 20150079466A KR 1020140193614 A KR1020140193614 A KR 1020140193614A KR 20140193614 A KR20140193614 A KR 20140193614A KR 20150079466 A KR20150079466 A KR 20150079466A
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KR
South Korea
Prior art keywords
positioning
chamber
size
carrier
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020140193614A
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English (en)
Korean (ko)
Inventor
티안슌 우
티안? 우
쳉웨이 후앙
샤오치 수
Original Assignee
센사타 테크놀로지스 (창저우) 씨오., 엘티디
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 센사타 테크놀로지스 (창저우) 씨오., 엘티디 filed Critical 센사타 테크놀로지스 (창저우) 씨오., 엘티디
Publication of KR20150079466A publication Critical patent/KR20150079466A/ko
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24—Housings ; Casings for instruments
    • G01D11/245—Housings for sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/30—Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/026—Housings for speed measuring devices, e.g. pulse generator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
    • G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
    • G01P3/488—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by variable reluctance detectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1902—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers specially adapted for a single substrate

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
KR1020140193614A 2013-12-31 2014-12-30 포지셔닝 프레임 구조체 Withdrawn KR20150079466A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201310752418.3A CN104749390B (zh) 2013-12-31 2013-12-31 定位框架结构
CN201310752418.3 2013-12-31

Publications (1)

Publication Number Publication Date
KR20150079466A true KR20150079466A (ko) 2015-07-08

Family

ID=52423542

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140193614A Withdrawn KR20150079466A (ko) 2013-12-31 2014-12-30 포지셔닝 프레임 구조체

Country Status (5)

Country Link
US (1) US9564351B2 (https=)
EP (1) EP2896966B1 (https=)
JP (1) JP6291412B2 (https=)
KR (1) KR20150079466A (https=)
CN (1) CN104749390B (https=)

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DE8711744U1 (de) * 1987-08-29 1988-12-29 Heidelberger Druckmaschinen Ag, 6900 Heidelberg Haltevorrichtung für einen Hohlwellen-Inkrementalgeber
KR960000342B1 (ko) * 1989-03-14 1996-01-05 미쯔비시 덴끼 가부시끼가이샤 홀 효과형 센서 장치
JPH0344588A (ja) * 1989-07-12 1991-02-26 Tdk Corp 移動物体検出センサ
US5007290A (en) * 1989-10-31 1991-04-16 New Sd, Inc Method and apparatus for producing preload of an accelerometer assembly
US5115194A (en) * 1990-09-27 1992-05-19 Kearney-National Inc. Hall effect position sensor with flux limiter and magnetic dispersion means
US5255795A (en) * 1991-12-05 1993-10-26 Vlsi Technology, Inc. Test fixture
JPH07101163B2 (ja) * 1992-10-14 1995-11-01 カーニー−ナショナル・インコーポレーテッド 磁束制限器及び磁気分散手段を備えるホール効果位置センサ
US7876188B2 (en) * 2006-11-06 2011-01-25 Tang System Green technologies: the killer application of EMI-free on-chip inductor
US5414355A (en) * 1994-03-03 1995-05-09 Honeywell Inc. Magnet carrier disposed within an outer housing
JPH08139429A (ja) * 1994-11-07 1996-05-31 Sumitomo Electric Ind Ltd 電子回路装置
US5500589A (en) * 1995-01-18 1996-03-19 Honeywell Inc. Method for calibrating a sensor by moving a magnet while monitoring an output signal from a magnetically sensitive component
US5581179A (en) * 1995-05-31 1996-12-03 Allegro Microsystems, Inc. Hall-effect ferrous-article-proximity sensor assembly
JPH09133743A (ja) * 1995-11-08 1997-05-20 Murata Mfg Co Ltd 磁気センサ
US6355885B1 (en) * 1996-05-02 2002-03-12 William J. Rintz Sub frame assembly for light switch assembly
EP0916074B1 (en) * 1997-05-29 2003-07-30 AMS International AG Magnetic rotation sensor
US6291990B1 (en) * 1997-09-29 2001-09-18 Hitachi, Ltd. Revolution sensor
JPH11153452A (ja) * 1997-11-20 1999-06-08 Hitachi Ltd 回転検出装置
US6346811B1 (en) * 1997-10-20 2002-02-12 Wolff Controls Corp. Methods for mounting a sensor and signal conditioner to form sensing apparatus having enhanced sensing capabilities and reduced size
US5868251A (en) * 1997-11-06 1999-02-09 Lin; Wan-Chang Disk-shaped storage case for screwdriver tips
US6018130A (en) * 1998-05-20 2000-01-25 Breed Automotive Technology, Inc. Roll-over sensor with pendulum mounted magnet
JP4041797B2 (ja) * 2001-06-28 2008-01-30 ポラック ラボラトリーズ インコーポレイテッド 内蔵型センサ装置
US6707293B2 (en) * 2001-11-15 2004-03-16 Honeywell International Inc. 360-degree rotary position sensor having a magnetoresistive sensor and a hall sensor
JP4179083B2 (ja) * 2003-07-08 2008-11-12 株式会社デンソー 回転検出装置
US7462317B2 (en) * 2004-11-10 2008-12-09 Enpirion, Inc. Method of manufacturing an encapsulated package for a magnetic device
DE102005047414B4 (de) * 2005-02-21 2012-01-05 Infineon Technologies Ag Magnetoresistives Sensormodul und Verfahren zum Herstellen desselben
US7425824B2 (en) * 2005-05-20 2008-09-16 Honeywell International Inc. Magnetoresistive sensor
JP4232771B2 (ja) * 2005-09-30 2009-03-04 株式会社デンソー 回転検出装置
US8701272B2 (en) * 2005-10-05 2014-04-22 Enpirion, Inc. Method of forming a power module with a magnetic device having a conductive clip
FR2902872B1 (fr) * 2006-06-27 2008-11-14 Arvinmeritor Light Vehicle Sys Dispositif de mesure de champ magnetique.
US20080013298A1 (en) * 2006-07-14 2008-01-17 Nirmal Sharma Methods and apparatus for passive attachment of components for integrated circuits
JP2008216043A (ja) * 2007-03-05 2008-09-18 Honda Lock Mfg Co Ltd 回転センサ
US7570047B2 (en) * 2007-06-18 2009-08-04 Key Safety Systems, Inc. Hall effect based angular position sensor
US7710110B2 (en) * 2007-07-07 2010-05-04 Honeywell International Inc. Rotary sensor with rotary sensing element and rotatable hollow magnet
US7920042B2 (en) * 2007-09-10 2011-04-05 Enpirion, Inc. Micromagnetic device and method of forming the same
US9518815B2 (en) * 2008-08-06 2016-12-13 Haas Automation, Inc. Rotary position encoder for rotatable shafts
DE102009006529A1 (de) * 2009-01-28 2010-08-26 Continental Automotive Gmbh Positionssensor
CN201681086U (zh) * 2010-05-11 2010-12-22 杭州南科汽车传感器有限公司 主动式轮速传感器
US9201123B2 (en) * 2011-11-04 2015-12-01 Infineon Technologies Ag Magnetic sensor device and a method for fabricating the same
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US8727326B2 (en) * 2012-03-21 2014-05-20 Cheng Uei Precision Industry Co., Ltd. Assembly jig
US8779635B2 (en) * 2012-04-10 2014-07-15 Kla-Tencor Corporation Arrangement of reticle positioning device for actinic inspection of EUV reticles
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DE102012224424A1 (de) * 2012-12-27 2014-07-17 Robert Bosch Gmbh Sensorsystem und Abdeckvorrichtung für ein Sensorsystem
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US9446745B2 (en) * 2013-09-10 2016-09-20 KSR IP Holdings, LLC Integrated rotary and linear sensor
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Also Published As

Publication number Publication date
US20150187623A1 (en) 2015-07-02
EP2896966B1 (en) 2021-06-23
US9564351B2 (en) 2017-02-07
CN104749390B (zh) 2020-07-03
JP2015132601A (ja) 2015-07-23
CN104749390A (zh) 2015-07-01
EP2896966A1 (en) 2015-07-22
JP6291412B2 (ja) 2018-03-14

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St.27 status event code: U-3-3-T10-T11-oth-X000

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St.27 status event code: N-1-6-B10-B12-nap-PC1203

WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid
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St.27 status event code: A-2-2-P10-P22-nap-X000