KR20150079466A - 포지셔닝 프레임 구조체 - Google Patents

포지셔닝 프레임 구조체 Download PDF

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Publication number
KR20150079466A
KR20150079466A KR1020140193614A KR20140193614A KR20150079466A KR 20150079466 A KR20150079466 A KR 20150079466A KR 1020140193614 A KR1020140193614 A KR 1020140193614A KR 20140193614 A KR20140193614 A KR 20140193614A KR 20150079466 A KR20150079466 A KR 20150079466A
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KR
South Korea
Prior art keywords
positioning
chamber
size
carrier
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020140193614A
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English (en)
Korean (ko)
Inventor
티안슌 우
티안? 우
쳉웨이 후앙
샤오치 수
Original Assignee
센사타 테크놀로지스 (창저우) 씨오., 엘티디
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 센사타 테크놀로지스 (창저우) 씨오., 엘티디 filed Critical 센사타 테크놀로지스 (창저우) 씨오., 엘티디
Publication of KR20150079466A publication Critical patent/KR20150079466A/ko
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24—Housings ; Casings for instruments
    • G01D11/245—Housings for sensors
    • H10P95/00—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/30—Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/026—Housings for speed measuring devices, e.g. pulse generator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
    • G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
    • G01P3/488—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by variable reluctance detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67353—Closed carriers specially adapted for a single substrate
    • H10P72/50—

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
KR1020140193614A 2013-12-31 2014-12-30 포지셔닝 프레임 구조체 Withdrawn KR20150079466A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201310752418.3 2013-12-31
CN201310752418.3A CN104749390B (zh) 2013-12-31 2013-12-31 定位框架结构

Publications (1)

Publication Number Publication Date
KR20150079466A true KR20150079466A (ko) 2015-07-08

Family

ID=52423542

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140193614A Withdrawn KR20150079466A (ko) 2013-12-31 2014-12-30 포지셔닝 프레임 구조체

Country Status (5)

Country Link
US (1) US9564351B2 (enExample)
EP (1) EP2896966B1 (enExample)
JP (1) JP6291412B2 (enExample)
KR (1) KR20150079466A (enExample)
CN (1) CN104749390B (enExample)

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US5007290A (en) * 1989-10-31 1991-04-16 New Sd, Inc Method and apparatus for producing preload of an accelerometer assembly
US5115194A (en) * 1990-09-27 1992-05-19 Kearney-National Inc. Hall effect position sensor with flux limiter and magnetic dispersion means
US5255795A (en) * 1991-12-05 1993-10-26 Vlsi Technology, Inc. Test fixture
JPH07101163B2 (ja) * 1992-10-14 1995-11-01 カーニー−ナショナル・インコーポレーテッド 磁束制限器及び磁気分散手段を備えるホール効果位置センサ
US7876188B2 (en) * 2006-11-06 2011-01-25 Tang System Green technologies: the killer application of EMI-free on-chip inductor
US5414355A (en) * 1994-03-03 1995-05-09 Honeywell Inc. Magnet carrier disposed within an outer housing
JPH08139429A (ja) * 1994-11-07 1996-05-31 Sumitomo Electric Ind Ltd 電子回路装置
US5500589A (en) * 1995-01-18 1996-03-19 Honeywell Inc. Method for calibrating a sensor by moving a magnet while monitoring an output signal from a magnetically sensitive component
US5581179A (en) * 1995-05-31 1996-12-03 Allegro Microsystems, Inc. Hall-effect ferrous-article-proximity sensor assembly
JPH09133743A (ja) * 1995-11-08 1997-05-20 Murata Mfg Co Ltd 磁気センサ
US6355885B1 (en) * 1996-05-02 2002-03-12 William J. Rintz Sub frame assembly for light switch assembly
DE69816755T2 (de) * 1997-05-29 2004-06-03 Ams International Ag Magnetischer drehgeber
US6291990B1 (en) * 1997-09-29 2001-09-18 Hitachi, Ltd. Revolution sensor
JPH11153452A (ja) * 1997-11-20 1999-06-08 Hitachi Ltd 回転検出装置
US6346811B1 (en) * 1997-10-20 2002-02-12 Wolff Controls Corp. Methods for mounting a sensor and signal conditioner to form sensing apparatus having enhanced sensing capabilities and reduced size
US5868251A (en) * 1997-11-06 1999-02-09 Lin; Wan-Chang Disk-shaped storage case for screwdriver tips
US6018130A (en) * 1998-05-20 2000-01-25 Breed Automotive Technology, Inc. Roll-over sensor with pendulum mounted magnet
WO2003003407A1 (en) * 2001-06-28 2003-01-09 Greene, Tweed Of Delaware, Inc. Self contained sensing apparatus and system
US6707293B2 (en) * 2001-11-15 2004-03-16 Honeywell International Inc. 360-degree rotary position sensor having a magnetoresistive sensor and a hall sensor
JP4179083B2 (ja) * 2003-07-08 2008-11-12 株式会社デンソー 回転検出装置
US7462317B2 (en) * 2004-11-10 2008-12-09 Enpirion, Inc. Method of manufacturing an encapsulated package for a magnetic device
DE102005047414B4 (de) * 2005-02-21 2012-01-05 Infineon Technologies Ag Magnetoresistives Sensormodul und Verfahren zum Herstellen desselben
US7425824B2 (en) * 2005-05-20 2008-09-16 Honeywell International Inc. Magnetoresistive sensor
JP4232771B2 (ja) * 2005-09-30 2009-03-04 株式会社デンソー 回転検出装置
US8701272B2 (en) * 2005-10-05 2014-04-22 Enpirion, Inc. Method of forming a power module with a magnetic device having a conductive clip
FR2902872B1 (fr) * 2006-06-27 2008-11-14 Arvinmeritor Light Vehicle Sys Dispositif de mesure de champ magnetique.
US20080013298A1 (en) * 2006-07-14 2008-01-17 Nirmal Sharma Methods and apparatus for passive attachment of components for integrated circuits
JP2008216043A (ja) * 2007-03-05 2008-09-18 Honda Lock Mfg Co Ltd 回転センサ
US7570047B2 (en) * 2007-06-18 2009-08-04 Key Safety Systems, Inc. Hall effect based angular position sensor
US7710110B2 (en) * 2007-07-07 2010-05-04 Honeywell International Inc. Rotary sensor with rotary sensing element and rotatable hollow magnet
US7920042B2 (en) * 2007-09-10 2011-04-05 Enpirion, Inc. Micromagnetic device and method of forming the same
US9518815B2 (en) * 2008-08-06 2016-12-13 Haas Automation, Inc. Rotary position encoder for rotatable shafts
DE102009006529A1 (de) * 2009-01-28 2010-08-26 Continental Automotive Gmbh Positionssensor
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CN203772882U (zh) * 2013-12-31 2014-08-13 森萨塔科技（常州）有限公司 定位框架结构

Also Published As

Publication number Publication date
JP2015132601A (ja) 2015-07-23
EP2896966B1 (en) 2021-06-23
CN104749390A (zh) 2015-07-01
EP2896966A1 (en) 2015-07-22
JP6291412B2 (ja) 2018-03-14
US20150187623A1 (en) 2015-07-02
CN104749390B (zh) 2020-07-03
US9564351B2 (en) 2017-02-07

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St.27 status event code: A-0-1-A10-A12-nap-PA0109

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

PC1203 Withdrawal of no request for examination

St.27 status event code: N-1-6-B10-B12-nap-PC1203

WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid
P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000