KR20150055566A - 기판 보유 지지 장치, 연마 장치, 연마 방법 및 리테이너 링 - Google Patents

기판 보유 지지 장치, 연마 장치, 연마 방법 및 리테이너 링 Download PDF

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Publication number
KR20150055566A
KR20150055566A KR1020140155293A KR20140155293A KR20150055566A KR 20150055566 A KR20150055566 A KR 20150055566A KR 1020140155293 A KR1020140155293 A KR 1020140155293A KR 20140155293 A KR20140155293 A KR 20140155293A KR 20150055566 A KR20150055566 A KR 20150055566A
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KR
South Korea
Prior art keywords
pad
polishing
pressing portion
retainer ring
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020140155293A
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English (en)
Korean (ko)
Inventor
사토루 야마키
호즈미 야스다
게이스케 나미키
오사무 나베야
마코토 후쿠시마
신고 도가시
Original Assignee
가부시키가이샤 에바라 세이사꾸쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 가부시키가이샤 에바라 세이사꾸쇼 filed Critical 가부시키가이샤 에바라 세이사꾸쇼
Publication of KR20150055566A publication Critical patent/KR20150055566A/ko
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • B24B37/107—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B24B37/32—Retaining rings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0428—Apparatus for mechanical treatment or grinding or cutting
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
KR1020140155293A 2013-11-13 2014-11-10 기판 보유 지지 장치, 연마 장치, 연마 방법 및 리테이너 링 Ceased KR20150055566A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2013235210 2013-11-13
JPJP-P-2013-235210 2013-11-13
JPJP-P-2014-093840 2014-04-30
JP2014093840A JP6403981B2 (ja) 2013-11-13 2014-04-30 基板保持装置、研磨装置、研磨方法、およびリテーナリング

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020180104398A Division KR102208160B1 (ko) 2013-11-13 2018-09-03 기판 보유 지지 장치, 연마 장치, 연마 방법 및 리테이너 링

Publications (1)

Publication Number Publication Date
KR20150055566A true KR20150055566A (ko) 2015-05-21

Family

ID=53044185

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020140155293A Ceased KR20150055566A (ko) 2013-11-13 2014-11-10 기판 보유 지지 장치, 연마 장치, 연마 방법 및 리테이너 링
KR1020180104398A Active KR102208160B1 (ko) 2013-11-13 2018-09-03 기판 보유 지지 장치, 연마 장치, 연마 방법 및 리테이너 링

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020180104398A Active KR102208160B1 (ko) 2013-11-13 2018-09-03 기판 보유 지지 장치, 연마 장치, 연마 방법 및 리테이너 링

Country Status (6)

Country Link
US (1) US9815171B2 (https=)
JP (1) JP6403981B2 (https=)
KR (2) KR20150055566A (https=)
CN (1) CN104625948B (https=)
SG (1) SG10201407353UA (https=)
TW (1) TWI614091B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220052044A (ko) * 2020-10-20 2022-04-27 주식회사 케이씨텍 리테이너링 및 이를 포함하는 기판 연마 장치

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JP2016155188A (ja) * 2015-02-24 2016-09-01 株式会社荏原製作所 リテーナリング、基板保持装置、研磨装置およびリテーナリングのメンテナンス方法
US10293454B2 (en) * 2015-06-11 2019-05-21 Toshiba Memory Corporation Polishing head, polishing apparatus and polishing method
TWD179095S (zh) 2015-08-25 2016-10-21 荏原製作所股份有限公司 基板保持環
JP6392193B2 (ja) * 2015-10-14 2018-09-19 株式会社荏原製作所 基板保持装置および基板研磨装置ならびに基板保持装置の製造方法
US10510563B2 (en) * 2016-04-15 2019-12-17 Taiwan Semiconductor Manufacturing Company Ltd. Wafer carrier assembly
KR102420066B1 (ko) * 2016-07-25 2022-07-11 어플라이드 머티어리얼스, 인코포레이티드 Cmp를 위한 리테이닝 링
EP3765238B1 (en) * 2018-03-13 2025-08-13 Applied Materials, Inc. Consumable part monitoring in chemical mechanical polisher
TWI639486B (zh) * 2018-05-31 2018-11-01 國立清華大學 全向整合式調節裝置
JP7287761B2 (ja) 2018-07-31 2023-06-06 株式会社荏原製作所 球面軸受の軸受半径決定方法
JP6446590B1 (ja) * 2018-08-09 2018-12-26 国立大学法人 東京大学 局所研磨加工方法、および局所研磨加工装置、並びに該局所研磨加工装置を用いた修正研磨加工装置
JP6927617B1 (ja) * 2020-11-19 2021-09-01 不二越機械工業株式会社 ワーク研磨装置およびトップリング用樹脂マット体
TWI826051B (zh) * 2022-10-19 2023-12-11 力晶積成電子製造股份有限公司 化學機械研磨裝置及研磨方法

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US5795215A (en) 1995-06-09 1998-08-18 Applied Materials, Inc. Method and apparatus for using a retaining ring to control the edge effect
US5762544A (en) * 1995-10-27 1998-06-09 Applied Materials, Inc. Carrier head design for a chemical mechanical polishing apparatus
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220052044A (ko) * 2020-10-20 2022-04-27 주식회사 케이씨텍 리테이너링 및 이를 포함하는 기판 연마 장치

Also Published As

Publication number Publication date
CN104625948A (zh) 2015-05-20
JP6403981B2 (ja) 2018-10-10
TWI614091B (zh) 2018-02-11
JP2015116656A (ja) 2015-06-25
KR102208160B1 (ko) 2021-01-27
TW201524679A (zh) 2015-07-01
US20150133038A1 (en) 2015-05-14
SG10201407353UA (en) 2015-06-29
KR20180101303A (ko) 2018-09-12
CN104625948B (zh) 2019-04-09
US9815171B2 (en) 2017-11-14

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