KR20140066777A - 에어 베어링 유닛 - Google Patents

에어 베어링 유닛 Download PDF

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Publication number
KR20140066777A
KR20140066777A KR1020147010958A KR20147010958A KR20140066777A KR 20140066777 A KR20140066777 A KR 20140066777A KR 1020147010958 A KR1020147010958 A KR 1020147010958A KR 20147010958 A KR20147010958 A KR 20147010958A KR 20140066777 A KR20140066777 A KR 20140066777A
Authority
KR
South Korea
Prior art keywords
gap
air
bearing
thrust bearing
radial bearing
Prior art date
Application number
KR1020147010958A
Other languages
English (en)
Korean (ko)
Inventor
사토시 우에다
데쯔오 부토우
히로쯔구 도미타
Original Assignee
오일레스고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 오일레스고교 가부시키가이샤 filed Critical 오일레스고교 가부시키가이샤
Publication of KR20140066777A publication Critical patent/KR20140066777A/ko

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
KR1020147010958A 2011-09-26 2012-05-16 에어 베어링 유닛 KR20140066777A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011208855A JP5851780B2 (ja) 2011-09-26 2011-09-26 エアベアリングユニット
JPJP-P-2011-208855 2011-09-26
PCT/JP2012/062517 WO2013046793A1 (ja) 2011-09-26 2012-05-16 エアベアリングユニット

Publications (1)

Publication Number Publication Date
KR20140066777A true KR20140066777A (ko) 2014-06-02

Family

ID=47994860

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147010958A KR20140066777A (ko) 2011-09-26 2012-05-16 에어 베어링 유닛

Country Status (4)

Country Link
JP (1) JP5851780B2 (ja)
KR (1) KR20140066777A (ja)
CN (1) CN103827527B (ja)
WO (1) WO2013046793A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014035054A (ja) * 2012-08-10 2014-02-24 Oiles Ind Co Ltd 静圧気体軸受ユニット
JP6288999B2 (ja) * 2013-09-17 2018-03-07 オイレス工業株式会社 静圧気体軸受装置
EP3096049A4 (en) * 2014-01-14 2017-07-05 NSK Ltd. Rotating mechanism, machine tool, and semiconductor production device
DE102015010875B9 (de) * 2015-08-25 2016-12-29 Thermo Electron (Karlsruhe) Gmbh Rheometer mit Gaslager
JP6830263B2 (ja) * 2016-08-10 2021-02-17 国際計測器株式会社 動釣合い試験機
US11067124B2 (en) * 2018-07-23 2021-07-20 Alio Industries, Inc. Planar rotary air bearing stage
CN110686008B (zh) * 2019-09-16 2021-01-05 武汉科技大学 一种可视的高压石英玻璃圆盘气体轴承及其使用方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03292413A (ja) * 1990-04-06 1991-12-24 Nippon Seiko Kk 多孔質体軸受ユニット
DE4241507A1 (de) * 1992-12-10 1994-06-16 Schurr Stahlecker & Grill Lagerung für einen OE-Spinnrotor
JPH11159532A (ja) * 1997-12-01 1999-06-15 Ntn Corp 静圧軸受支持のガイドローラ
JP3667108B2 (ja) * 1998-08-31 2005-07-06 京セラ株式会社 糸状体のガイドローラ
DE102005007297B4 (de) * 2005-02-17 2007-05-31 Minebea Co., Ltd. Fluiddynamisches Luftlagersystem zur Drehlagerung eines Motors
CN200991756Y (zh) * 2006-12-18 2007-12-19 广州市大族高精电机有限公司 主轴装置

Also Published As

Publication number Publication date
CN103827527A (zh) 2014-05-28
JP2013068307A (ja) 2013-04-18
CN103827527B (zh) 2016-11-16
JP5851780B2 (ja) 2016-02-03
WO2013046793A1 (ja) 2013-04-04

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A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application