KR20120139544A - 리페어 장치 및 리페어 방법, 디바이스의 제조 방법 - Google Patents

리페어 장치 및 리페어 방법, 디바이스의 제조 방법 Download PDF

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Publication number
KR20120139544A
KR20120139544A KR1020120057434A KR20120057434A KR20120139544A KR 20120139544 A KR20120139544 A KR 20120139544A KR 1020120057434 A KR1020120057434 A KR 1020120057434A KR 20120057434 A KR20120057434 A KR 20120057434A KR 20120139544 A KR20120139544 A KR 20120139544A
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KR
South Korea
Prior art keywords
voltage
repair
determination
current
devices
Prior art date
Application number
KR1020120057434A
Other languages
English (en)
Korean (ko)
Inventor
렌 우치다
신지 이시카와
Original Assignee
샤프 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2011135794A external-priority patent/JP5351214B2/ja
Priority claimed from JP2011135796A external-priority patent/JP5496952B2/ja
Application filed by 샤프 가부시키가이샤 filed Critical 샤프 가부시키가이샤
Publication of KR20120139544A publication Critical patent/KR20120139544A/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76868—Forming or treating discontinuous thin films, e.g. repair, enhancement or reinforcement of discontinuous thin films
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
    • G01R31/1227—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials
    • G01R31/1263—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials of solid or fluid materials, e.g. insulation films, bulk material; of semiconductors or LV electronic components or parts; of cable, line or wire insulation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1020120057434A 2011-06-17 2012-05-30 리페어 장치 및 리페어 방법, 디바이스의 제조 방법 KR20120139544A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2011-135794 2011-06-17
JPJP-P-2011-135796 2011-06-17
JP2011135794A JP5351214B2 (ja) 2011-06-17 2011-06-17 リペア装置およびリペア方法、デバイスの製造方法
JP2011135796A JP5496952B2 (ja) 2011-06-17 2011-06-17 リペア装置およびリペア方法、デバイスの製造方法

Publications (1)

Publication Number Publication Date
KR20120139544A true KR20120139544A (ko) 2012-12-27

Family

ID=47335226

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120057434A KR20120139544A (ko) 2011-06-17 2012-05-30 리페어 장치 및 리페어 방법, 디바이스의 제조 방법

Country Status (3)

Country Link
KR (1) KR20120139544A (zh)
CN (1) CN102832155A (zh)
TW (1) TW201304035A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160089993A (ko) * 2015-01-21 2016-07-29 엘지디스플레이 주식회사 유기전계 발광표시장치 및 이의 구동 방법

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103646878B (zh) * 2013-12-25 2017-01-25 鲁东大学 一种利用电场清除薄膜电致发光器件发光层中缺陷的方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62145170U (zh) * 1986-03-07 1987-09-12
JPS6341081A (ja) * 1986-08-07 1988-02-22 Fuji Electric Co Ltd 薄膜半導体装置の製造方法
JPH05249180A (ja) * 1992-03-06 1993-09-28 Nec Corp 静電破壊試験装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160089993A (ko) * 2015-01-21 2016-07-29 엘지디스플레이 주식회사 유기전계 발광표시장치 및 이의 구동 방법

Also Published As

Publication number Publication date
CN102832155A (zh) 2012-12-19
TW201304035A (zh) 2013-01-16

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A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application