KR20120114205A - Coating apparatus having device for feeding transferring carrier used in substrate transferring unit of coating region - Google Patents

Abstract

PURPOSE: A coating apparatus equipped with a feeding unit of a transfer carrier is provided to reduce an entire tack time by consecutively performing a spreading motion of a coating solution. CONSTITUTION: A first floating unit provides a loading area. A second floating unit provides a coating region. A third floating unit provides an unloading region. A substrate transfer apparatus(201) transfers a substrate from the coating region to the unloading region. A nozzle apparatus(278) spreads a coating solution on the substrate. The nozzle apparatus is mounted on a gantry. A transfer carrier transfers the substrate on the second floating unit. A substrate transfer unit comprises a feeding unit of the transfer carrier.

Description

Coating Apparatus Having Device for Feeding Transferring Carrier Used in Substrate Transferring Unit of Coating Region}

The present invention relates to a coating apparatus having a feeding device of a transfer carrier for use in a substrate transfer unit in a coating area.

More specifically, the present invention is a soft in the coating area when the coating liquid is applied on top of the substrate for manufacturing a flat panel display (hereinafter referred to as "FPD"), such as a PDP panel or LCD panel, in a floating manner. By transporting the substrate by reciprocating the transfer carrier of the material, there is provided a feeding device of the transfer carrier used in the substrate transfer unit of the coating area that can solve a number of problems, including prevention of coating liquid staining according to the use of the conventional substrate floating unit It relates to a coating device.

In general, in order to manufacture an electronic device such as an FPD, application of a coating liquid onto a work piece such as a glass substrate (hereinafter referred to as a “substrate”) is required, and for this purpose, a nozzle dispenser or a slit die ( Hereinafter, a coating apparatus having a nozzle dispenser and a slit die collectively referred to as a "nozzle apparatus" is used. Such a coating apparatus performs a coating operation of various coating liquids while positioning a substrate on a stage and moving a nozzle apparatus attached to a gantry in a horizontal direction. Examples of the coating operation of the coating liquid include forming photoresist (PR), black matrix (BM), column space (CS), and the like on the LCD panel substrate when manufacturing the LCD panel. The photosensitive coating liquid can be applied. In the case of manufacturing a PDP panel, a coating liquid or a photosensitive coating liquid may be applied to form a dielectric, a lower dielectric, and a partition on a PDP panel substrate.

However, in the above-described conventional technology, since the nozzle device installed on the substrate and the gantry to which the nozzle device is attached are moved on the substrate after the substrate is placed on the stage and the stage is moved to the coating position. Precise drive of the coating device becomes difficult and complex. More specifically, enormous energy is required for the movement of large, large nozzle devices, gantry and stages. In addition, after the coating liquid is applied, it is necessary to return to the original position and repeat the above-described operation, thereby causing a problem that the efficiency of the coating liquid coating operation is lowered. In addition, the nozzle device and the gantry must be enlarged according to the requirements of the large area FPD. The weight of the enlarged gantry amounts to about 1 to 2 tons, making it difficult to implement a feeding device for precisely accelerating or decelerating while moving such a large weight gantry.

As a way to solve the problems of the above-described conventional nozzle movement type coating apparatus, the floating substrate transfer apparatus for applying the coating liquid to the surface of the substrate while floating and transporting the substrate through the injection or spraying and suction of air is Proposed.

Figure 1a is a schematic view showing a perspective view of a substrate transfer apparatus and a coating apparatus of the prior art floating method according to the prior art, Figure 1b is a substrate transfer apparatus and the same of the conventional method shown in Figure 1a It is a figure which shows the front view of one application | coating device schematically. 1A and 1B, the substrate transfer apparatus of the floating method according to the related art and the coating apparatus having the same are, for example, a "coating method and coating apparatus" by Tokyo Electron Co., Ltd. on March 20, 2006. It is disclosed in detail in Japanese Patent Application Laid-Open No. 2007-252971, filed under Japanese Patent Application No. 2006-76815 under the name of the invention, and published on October 4, 2007.

Referring again to FIGS. 1A and 1B, the coating apparatus 40 according to the prior art includes a substrate transfer apparatus 84 in a floating manner. The substrate G is transferred onto the loading region of the stage 76 (M1 region in FIG. 1B) by, for example, a transfer arm (not shown). Thereafter, a plurality of lift pins 86 are lifted by the lift device (not shown) provided under the loading area M1 area of the stage 76 to support the substrate G. Thereafter, when the plurality of lift pins 86 are lowered, the substrate G is provided on the suction pad 104 on the support 102 provided on the pair of sliders 98 that are movable on the pair of linear motion guides 96. Is mounted in a vacuum adsorption manner. Only a plurality of air jets 88 are provided on the loading region M1 region. The substrate G, which is bent down by self-weight on the loading region M1 region, floats to a floating height Ha in the range of approximately 250 to 350 μm by air ejected through the air ejection opening 88. In the state, it is conveyed by the floating substrate transfer apparatus 84 onto the coating region (M3 region shown in Fig. 1B) (i.e., in the X direction) via the first interface region (M2 region). An air inlet 90 connected to a vacuum pumping device (not shown) is partially provided in the first interface region M2. When the substrate G enters the first interface region M2 region, the ejection output of the air ejection opening 88 is partially offset by the suction force of the air intake opening 90, so that the floating height of the substrate G gradually decreases. Enter the coating area (M3 area). In the coating area (M3 area), the number of air inlets 90 is provided more than the first interface area (M2 area), so that the substrate G is floated at a coating height Hb of approximately 50 mu m. Feed in the axial direction. In this coating area (M3 area), the nozzle device 78 receives a coating liquid (for example, a resist liquid) through the supply pipe 94 and applies the coating liquid onto the substrate G.

Thereafter, the substrate G coated with the coating liquid is transferred to the second interface region M4 region. Similar to the first interface region M2 region, the second interface region M4 region is partially provided with an air intake port 90 connected to a vacuum pumping device (not shown) (see FIG. 1A). When the substrate G enters the second interface region M4 region, only part of the ejection output of the air ejection opening 88 is canceled by the suction force of the air intake opening 90, so that the floating height of the substrate G gradually increases. Thereafter, the substrate G enters the unloading region M5 region, and the unloading region M5 region is provided with only a plurality of air jets 88 as with the loading region M1 region. Therefore, the board | substrate G is floated by the air which blows out through the some air ejection opening 88 provided in the unloading area | region M5 area | region, and the board | substrate G in the state which floated at the floating height Hc of the range of about 250-350 micrometers. ) Is released from the vacuum adsorption provided from the adsorption pad 104. Thereafter, a plurality of lift pins 86 are raised by a lifting device (not shown) provided below the stage 76 of the unloading area M5 area to raise the substrate G, and then the robot arm (not shown). Is transferred to the next process position.

The above-mentioned floating substrate transfer device 84 and the coating device 40 having the same can solve most of the disadvantages of the coating apparatus of the nozzle movement method in that the substrate G is moved in the floating manner. Although the advantage is achieved, it still has the following problem.

1. Damping may occur during the transfer operation, for example, in a conventional mechanical transfer device using a linear motion guide and a linear motor, or a linear motion guide and a ball screw. Due to this damping effect, vibration and shock are transmitted to the substrate, and an undulation may also occur in the floating unit that floats the substrate. As a result, the thickness of the coating liquid applied on the substrate cannot be uniformly applied.

2. In particular, flow may occur in the advancing direction of the substrate and the substrate transfer speed may become unstable.

3. Temperature variations may occur on the substrate depending on the use of the plurality of air blowing holes and the plurality of air intake ports throughout the coating area, and thus, the drying conditions of the coating liquid applied on the substrate may be changed to cause staining. In addition, the substrate may be locally deformed due to the floating force of the plurality of air blowing holes and the suction force of the plurality of air intake ports, and thus the thickness of the coating liquid may not be uniformly applied.

4. Foreign materials may flow between the substrate and the floating unit according to the use of the plurality of air ejection ports and the plurality of air intake ports. In addition, if an unexpected malfunction of the coating apparatus occurs, contact or collision between the substrate and the floating unit may occur. When such foreign matter inflow or contact or collision between the substrate and the floating unit occurs, secondary contamination of the substrate may occur due to the occurrence of scratches and consequent generation of fine particles.

5. In the case where the floating unit of the coating area is composed of a plurality of plates, there is a poor correspondence or responsiveness when a minute step occurs between the plurality of plates.

6. If the coating liquid falls on the substrate floating unit in the coating area due to malfunction of the coating device, the plurality of fine air jets and the plurality of air inlets are blocked, so that the floating force or suction force becomes unstable, and the cleaning is difficult, and the fine particles If the whole coating apparatus is contaminated due to occurrence, and the blockage of the air jet or the air intake is severe, a failure occurs in the substrate floating unit in the coating area.

7. Since the use of a separate priming roll is required for the preliminary discharging operation of the coating liquid before the coating liquid is applied onto the substrate, the construction of the entire coating apparatus is complicated. In addition, during the cleaning of the priming roll after the preliminary ejection operation, the transfer of the substrate onto the coating area and the application of the coating liquid are impossible, thereby increasing the overall tact time.

Therefore, a new method for solving the above-mentioned problems is required.

Japanese Patent Application Laid-Open No. 2007-252971.

The present invention is to solve the above-mentioned problems of the prior art, when the substrate for flat panel display (FPD) manufacturing substrates are transported in a floating manner, when the coating liquid is applied to the upper surface of the substrate by transferring the transfer carrier of the soft material in the coating area It is to provide a coating apparatus having a feeding device for feeding carriers used in the substrate transfer unit of the coating area that can solve a number of problems, including the prevention of coating liquid staining with the use of the conventional substrate floating unit.

According to an aspect of the present invention, a coating apparatus includes: a substrate floating unit including a first floating unit providing a loading area, a second floating unit providing a coating area, and a third floating unit providing an unloading area; A substrate transfer device for transferring a substrate from the loading region to the coating region and from the coating region to the unloading region; A substrate transfer unit having a transfer carrier for transferring the substrate on the second floating unit, and a feeding device of the transfer carrier; A nozzle device provided on the coating area and applying a coating liquid on the substrate; And a gantry on which the nozzle device is mounted.

The following advantages are achieved in the substrate transfer unit of the coating area with the feeding device of the transfer carrier of the present invention.

1. Since the substrate is transferred by the substrate transfer unit with the transfer carrier in the coating area, damping is prevented during the transfer operation. Thus, unlike the prior art, the generation of vibration and shock transfer to the substrate and the unduration of the substrate floating unit are prevented, so that the thickness of the coating liquid applied on the substrate is uniformly applied.

2. Since the occurrence of flow in the longitudinal direction of the substrate is prevented, the conveying speed of the substrate can be kept constant.

3. The occurrence of temperature deviation on the substrate is minimized or prevented by the transfer carrier even when using a plurality of air blowers and a plurality of air inlets. In addition, the influence of the floating force of the plurality of air jets and the suction force of the plurality of air inlets is minimized or prevented by the transfer carrier, so that the occurrence of local warpage deformation of the substrate is also minimized or prevented. As a result, the thickness of the coating liquid applied on the substrate is uniformly applied.

4. To reduce the effects of flotation and suction forces, the requirement for a particular configuration (fine size and specific arrangement of the blowout and inlet) of the conventional air blower and air inlet is relatively easy or unnecessary, and accordingly The manufacturing cost is reduced.

5. The possibility of foreign material entry between the substrate and the floating unit is substantially eliminated by the transfer carrier. In addition, even in the event of contact or collision between the substrate and the floating unit due to unforeseen malfunction of the coating apparatus, the transfer carrier can buffer and resist. Thus, the possibility of scratching and hence secondary contamination occurring at the bottom of the substrate is minimized or eliminated completely.

6. The influence of the fine step occurring between the plurality of plates constituting the substrate floating unit on the substrate floating height is substantially blocked by the transfer carrier. Accordingly, the responsiveness or responsiveness of the substrate height due to the minute step occurring between the plurality of plates is good.

7. Problems caused when the coating liquid is applied onto the substrate floating unit in the coating area due to malfunction of the coating apparatus, etc. by the use of the transfer carrier Force or suction force becomes unstable, difficult to clean, the whole coating apparatus is contaminated due to the generation of fine particles, and the blockage of the substrate floating unit in the coating area is minimized or completely prevented when the air outlet or the air intake is severely blocked. .

8. Since the preliminary ejection of the coating liquid is performed on the conveying carrier, the use of a priming roll is unnecessary, simplifying the overall configuration of the coating apparatus, and the cleaning operation of the preliminarily ejected coating liquid on the conveying carrier and the conveyance of the substrate and the application of the coating liquid. Since it can be done continuously, the overall tact time is significantly reduced.

Further advantages of the present invention can be clearly understood from the following description with reference to the accompanying drawings, in which like or similar reference numerals denote like elements.

Figure 1a is a schematic view showing a perspective view of a substrate transfer apparatus of the floating method and a coating apparatus having the same according to the prior art.
FIG. 1B schematically illustrates a front view of a substrate transfer apparatus of a floating method according to the related art shown in FIG. 1A and a coating apparatus having the same.
2A is a front sectional view schematically showing a feeding device of a transfer carrier used in a substrate transfer unit of a coating area, a substrate transfer unit and a coating device having the same, according to an embodiment of the present invention.
FIG. 2B is a partial plan view of the feeding device of the conveying carrier used in the substrate conveying unit of the coating area shown in FIG. 2A and the feeding device of the conveying carrier being moved on the first and second base plates. FIG. The figure shows the operation together.
FIG. 2C is a detailed cross-sectional view of the feeding apparatus according to the embodiment of the present invention shown in FIG. 2B.
FIG. 2D is a side view illustrating an operation of moving the feeding device on the base plate shown in FIG. 2C.
FIG. 2E is a partial plan view of the feeding device according to another embodiment of the present invention used for the substrate transfer unit of the coating area shown in FIG. 2A and the operation of the feeding device of the transfer carrier to move on the first and second base plates. FIG. Figure is shown together.
FIG. 2F is a side view illustrating an operation of moving the feeding device on the base plate according to another embodiment of the present invention shown in FIG. 2E.

Hereinafter, the present invention will be described in detail with reference to embodiments and drawings.

The substrate transfer unit of the coating area according to the invention is basically characterized in that it comprises a transfer carrier of soft material.

More specifically, the transfer carrier of the present invention may be, for example, a flexible film made of polyethylene terephthalate (PET) or polyethylene naphthalate (PEN) made of abrasion resistance, dimensional stability, and flexibility. Or flexible thin film glass. Such a transfer carrier may be embodied in an impermeable material which is not permeable to air supplied from the floating unit of the coating area or in a breathable material which is permeable to air.

In all embodiments of the present invention described below, the floating unit 276a of the loading area, the floating unit 276b of the coating area, and the floating unit 276b of the unloading area are all of a plurality of air jets (not shown). Or a plurality of air outlets (not shown) and a plurality of air intakes (not shown), the operation of which is the same or similar to that of the prior art described in detail with reference to FIGS. 1A and 1B. Therefore, detailed description thereof will be omitted.

2A and 2B of the present invention, the substrate transfer unit 201 of the coating area according to an embodiment of the present invention is for transferring the substrate G on the floating unit 276b of the coating area. Transfer carrier 220; A supply / recovery roll (222a) for supplying and withdrawing the transfer carrier 220; A recovery / supply roll 222b for recovering and supplying the transfer carrier 220; First and second transfer rolls 224a and 224b provided on both sides of the floating unit 276b and transferring the transfer carrier 220 to move the substrate G on the coating area; A cleaning device (228) for cleaning the coating liquid preliminarily discharged onto the transfer carrier (220); And a feeding apparatus 230 for reciprocating the transfer carrier 220 between the supply / recovery roll 222a and the recovery / feed roll 222b. The feeding device 230 is provided side by side spaced apart from each other, and includes a first and second drive rolls (232a, 232b) to rotate in the opposite direction to reciprocate the transfer carrier 220.

The substrate transfer unit 201 of the coating area according to the embodiment of the present invention described above is provided between the feed / recovery roll 222a and the feeding device 230 and the feeding device 230 and the first transfer roll ( 224a, a plurality of first auxiliary rolls 225a for maintaining the tension of the transfer carrier 220; A plurality of feed / feed rolls 222b and between the feeding device 230 and between the feeding device 230 and the second transfer roll 224b to maintain the tension of the transfer carrier 220. Second auxiliary roll 225b; A first tension control device (227a) connected to any one of the plurality of first auxiliary rolls (225a) and controlling the tension of the transfer carrier (220); And a second tension control device 227b connected to any one of the second auxiliary rolls 225b1 of the plurality of second auxiliary rolls 225b and configured to control the tension of the transfer carrier 220. can do.

In addition, the substrate transfer unit 201 of the coating area according to the embodiment of the present invention described above includes at least one antistatic device (226a, 226b) for removing the static electricity generated in the transfer carrier 220; And a plurality of foreign material removal devices 228a for removing foreign matter or contaminants (hereinafter, referred to as "foreign materials") on the transfer carrier 220.

Hereinafter, the specific configuration and operation of the substrate transfer unit of the coating area according to an embodiment of the present invention will be described in detail.

Referring again to FIGS. 2A and 2B, the substrate transfer unit 201 of the coated area according to one embodiment of the present invention is a transfer carrier 220 for transferring the substrate G on the floating unit 276b of the coated area. It includes. The feed carrier 220 includes a plurality of first auxiliary rolls 225a from the supply / recovery rolls 222a, first drive rolls 232a of the feeding device 230, and first and second transfer rolls 224a and 224b. The second drive roll 232b of the feeding device 230 and the plurality of second auxiliary rolls 225b extend to the recovery / supply roll 222b. The feeding device 230 is positioned at the right position R before the coating operation starts. In this state, the nozzle apparatus 278 applies a coating liquid (for example, a resist liquid) onto the transfer carrier 220 to perform a preliminary ejection operation of the coating liquid. After the preliminary discharging operation of the coating liquid is performed, the first and second driving devices 250a and 250b of the feeding device 230 move the first and second supporting members 236a and 236b by a controller (not shown). When driven to move from the position to the L position, the first drive roll 232a and the second drive roll 232b of the feeding device 230 rotate counterclockwise so that the feeding device 230 is in the right position R. It moves to the left position L via the center position C. Accordingly, the coating liquid preliminarily discharged on the transfer carrier 220 is transferred to the cleaning device 228 to perform cleaning. At the same time, the substrate G is conveyed on the floating carrier 220 provided on the floating unit 276b of the coating area by a separate substrate transfer device (not shown) on the floating unit 276a of the loading area. Subsequently, the substrate G is seated on the transfer carrier 220 by the rotational operation of the first and second drive rolls 232a and 232b of the feeding device 230 to maintain a constant floating height. The coating liquid is applied by the nozzle device 278 while passing through it. Subsequently, the substrate G is transferred from the coating area onto the unloading area by a substrate transfer device (not shown). Here, the substrate transfer apparatus may be implemented as a conventional substrate transfer apparatus 84 (see FIG. 1A) for mounting and transferring the substrate G by vacuum adsorption, respectively, as shown in FIG. 1A.

After the coating liquid application operation is completed at the beginning of the preliminary discharging operation of the coating liquid and the transfer of the substrate G to the unloading area is completed, the first and second driving devices 250a and 250b of the feeding device 230 are controlled. When the first and second support members 236a and 236b are driven to move from the L position to the R position by an apparatus (not shown), the first drive roll 232a and the second drive roll (of the feeding device 230) 232b rotates in a clockwise direction so that the feeding device 230 moves from the left position L to the right position R, which is the original position, through the center position C. FIG. As a result, the transfer carrier 220 is transferred from the recovery / feed roll 222b to the supply / recovery roll 222a. The application operation of the coating liquid to one substrate G is completed by one reciprocating motion of the feeding device 230 (R position-> C position-> L position-> C position-> R position). Thereafter, a subsequent preliminary ejection operation of the coating liquid is performed on the transfer carrier 220 by the nozzle device 278, and the application operation of the coating liquid as described above is repeated for the substrate G that is subsequently supplied.

In the substrate transfer unit 201 of the coating area according to the embodiment of the present invention as described above, between the feed / recovery roll 222a and the feeding device 230 and the feeding device 230 and the first transfer roll 224a A plurality of first auxiliary rolls 225a and a plurality of recovery / supply rolls 222b and a feeding device 230 provided between the plurality of first auxiliary rolls 225a and the feeding device 230 and the second transfer roll 224b. The tension of the transfer carrier 220 is maintained by the two auxiliary rolls 225b. In addition, a second auxiliary of any one of the first auxiliary roll 225a1 of the plurality of first auxiliary rolls 225a and the plurality of second auxiliary rolls 225b to control the tension of the transfer carrier 220. First and second tension control devices 227a and 227b connected to roll 225b1 may be used, respectively. The first and second tension control devices 227a and 227b are rotational movements of the first and second rods 229a and 229b connected to the axes of the first and second auxiliary rolls 225a1 and 225b1, respectively. The tension of the transport carrier 220 can be controlled by the.

In addition, the substrate transfer unit 201 of the coating area according to the embodiment of the present invention described above includes one or more antistatic devices 226a and 226b for removing static electricity generated from the transfer carrier 220. can do. In the embodiment shown in FIG. 2A, two antistatic devices 226a and 226b are exemplarily shown to be provided at the front end of the first transfer roll 224a and at the rear end of the second transfer roll 224b. It will be appreciated that the number of such antistatic devices 226a, 226b can be increased or decreased as needed.

In addition, the substrate transfer unit 201 of the coating area according to the embodiment of the present invention described above may include a plurality of foreign matter removal apparatus 228a for removing foreign matter on the transfer carrier 220. The plurality of foreign material removing apparatus 228a removes foreign materials on the transport carrier 220 by a vacuum suction method using a vacuum pumping device (not shown) or an air blow method using an air supply device (not shown). can do.

As described above, in the present invention, the preliminary ejection of the coating liquid is performed on the transport carrier 220 on the coating area, and then the preliminarily ejected coating liquid applied on the transport carrier 220 by the feeding device 230 is cleaned. It is cleaned by the device 228. Thus, unlike the prior art, the use of a priming roll is unnecessary, thereby simplifying the overall configuration of the coating apparatus. In addition, in the present invention, since the cleaning operation of the coating liquid preliminarily discharged on the transfer carrier 220 and the operation of transferring the substrate and applying the coating liquid may be continuously performed, the total tact time is significantly reduced.

FIG. 2C is a detailed cross-sectional view of the feeding apparatus according to the embodiment of the present invention shown in FIG. 2B, and FIG. 2D illustrates an operation of moving the feeding apparatus on the base plate shown in FIG. 2C. One side view.

2C and 2D in conjunction with FIGS. 2A and 2B, the feeding device 230 of the transfer carrier 220 used in the substrate transfer unit 201 of the coating area according to an embodiment of the present invention is spaced apart from each other. First and second drive rolls 232a and 232b rotated or reversely rotated in the same direction to reciprocate the transfer carrier 220; First and second support members 236a on which the pair of first and second rotational shafts 232a1, 232a2; 232b1, 232b2, respectively, of the first and second drive rolls 232a, 232b are rotatably mounted; 236b); First and second linear motion guides 240a provided below the first and second support members 236a and 236b to move the first and second support members 236a and 236b, respectively. , 240b); First and second driving members connected to the lower one side of each of the first and second support members 236a and 236b (inner side in the embodiment of FIG. 2C) and driving the first and second support members 236a and 236b; Second drive units 250a and 250b; Mounted on the other lower side of each of the first and second support members 236a and 236b (outside in the embodiment of FIG. 2C), for identifying a predetermined reference point of the feeding device 230. First and second scale sensors 260a and 260b; And first and second linear scales 262a provided below the first and second scale sensors 260a and 260b along the directions of the first and second linear motion guides 240a and 240b. 262b).

In addition, the feeding device 230 used in the substrate transfer unit 201 of the coating area according to an embodiment of the present invention is the first linear motion guide 240a, the first driving device 250a, the first A first base plate 270a on which the linear scale 262a and a pair of first limit sensors 264a1 and 264a2 (see FIG. 2C) are mounted, and the second linear motion guide 240b, Further, a second base plate 270b to which the second driving device 250b, the second linear scale 262b, and the pair of second limit sensors 264b1 and 264b2 (see FIG. 2C) are mounted are respectively mounted. It may include.

Hereinafter, the specific configuration and operation of the feeding device 230 used in the substrate transfer unit of the coating area according to an embodiment of the present invention will be described in detail.

Referring again to FIGS. 2C and 2D in conjunction with FIGS. 2A and 2B, the feeding device 230 used in the substrate transfer unit 201 of the coating area according to an embodiment of the present invention may be spaced apart from each other. First and second drive rolls 232a and 232b. The first and second drive rolls 232a and 232b rotate or reverse in the same direction to reciprocate the transfer carrier 220. Further, the first and second drive rolls 232a and 232b have a pair of first and second rotational shafts 232a1 and 232a2 and 232b1 and 232b2 at both ends thereof, respectively. The pair of first and second rotational shafts 232a1, 232a2; 232b1, 232b2 includes a plurality of first and second bearings 235a1, 235a2 formed in pairs on top of the first and second support members 236a, 236b; 235b1 and 235b2 are rotatably mounted. The pair of first and second rotational shafts 232a1, 232a2; 232b1, 232b2 are respectively coupled to the first and second by a pair of first and second fixing jig 234a1, 234a2; 234b1, 234b2. It is fixed on the outer surface of the support members 236a and 236b.

Meanwhile, first and second linear motion guides 240a and 240b are provided below the first and second support members 236a and 236b. The first linear motion guide 240a may include a first fixed guide 242a (eg, a rail); And a first moving guide 244a moving on the first fixed guide 242a, wherein the second linear motion guide 240b includes a second fixed guide 242b (eg, a rail); And a second moving guide 244b moving on the second fixed guide 242b.

In addition, the first and second driving devices 250a and 250b are connected to one lower side of each of the first and second supporting members 236a and 236b (inner side in the embodiment of FIG. 2C). The first and second driving devices 250a and 250b may be implemented as linear motors or servo motors, respectively. More specifically, the first driving device 250a may include a first stator 252a; And a first mover 254a connected to a lower portion of the first support member 236a and moving in the first stator 252a, and the second driving device 250b includes a second stator 252b. ; And a second mover 254b connected to a lower portion of the second support member 236b and moving in the second stator 252b.

When the first and second drive devices 250a and 250b described above are driven to move the first and second support members 236a and 236b from the R position to the L position by a controller (not shown), The first and second moving guides 244a and 244b mounted to the second supporting members 236a and 236b move the feeding device 230 from the R position to the C position on the first and second fixing guides 242a and 242b. To the L position (see FIGS. 2A and 2B). As a result, the transfer carrier 220 moves in the direction of the recovery / feed roll 222b from the supply / recovery roll 222a. Thereafter, when the first and second scale sensors 260a and 260b sense respective predetermined first reference points displayed on the first and second linear scales 262a and 262b, respectively, each first sensing signal is detected. Send to the control unit. The control device stops the operation of the feeding device 230 by cutting off the power applied to the first and second driving devices 250a and 250b according to the first sensing signals of the first and second linear scales 262a and 262b. Let's do it. Then, when the controller drives the first and second drive devices 250a and 250b to move from the L position to the R position, the first and second mounted on the first and second support members 236a and 236b. The movement guides 244a and 244b move the feeding device 230 from the L position through the C position to the R position on the first and second fixing guides 242a and 242b (see FIGS. 2A and 2B). As a result, the transfer carrier 220 moves in the recovery / feed roll 222b in the direction of the supply / recovery roll 222a. Thereafter, when the first and second scale sensors 260a and 260b detect respective predetermined second reference points displayed on the first and second linear scales 262a and 262b, respectively, each second detection signal is detected. Send to the control unit. The control device stops the operation of the feeding device 230 by cutting off the power applied to the first and second driving devices 250a and 250b according to the second sensing signals of the first and second linear scales 262a and 262b. Let's do it. In this manner, the feeding apparatus 230 reciprocates between the R position and the L position repeatedly to reciprocate the transfer carrier 220 also between the supply / recovery roll 222a and the recovery / feed roll 222b, thereby providing a substrate ( G) can be transferred sequentially on the coating area.

In addition, the feeding device 230 according to an embodiment of the present invention is the first and second limit members (limit member: 266a, 266b) mounted on the outer surface of the first and second support members (236a, 236b), respectively. ); And provided at a lower portion of each of the first and second limit members 266a and 266b and spaced apart from each other, depending on whether the first and second limit members 266a and 266b pass. The apparatus may further include a pair of first limit sensors 264a1 and 264a2 and a pair of second limit sensors 264b1 and 264b2 for checking a normal operating position range. Here, the first and second limit members 266a and 266b may be embodied in a plate, bar, or probe shape, respectively.

The first limit member 266a described above passes through the pair of first limit sensors 264a1 or 264a2, or the second limit member 266b passes through the pair of second limit sensors 264b1 or 264b2. In this case, the first limit sensor 264a1 or 264a2 or the second limit sensor 264b1 or 264b2 transmits each detected limit signal to the control device. ) Is determined to be out of the normal operation position, and the power applied to the first and second driving devices 250a and 250b is automatically cut off to stop the operation of the feeding device 230. The pair of first and first The two limit sensors 264a1, 264a2; 264b1, 264b2 may be used to prevent an abnormal operation of the feeding device 230 due to a malfunction or failure of the first and second scale sensors 260a and 260b, and a failure thereof. will be.

FIG. 2E is a partial plan view of the feeding device according to another embodiment of the present invention used for the substrate transfer unit of the coating area shown in FIG. 2A and the operation of the feeding device of the transfer carrier to move on the first and second base plates. FIG. FIG. 2F is a side view illustrating an operation of the feeding device moving on the base plate according to another embodiment of the present invention shown in FIG. 2E.

2E and 2F, in the feeding apparatus 230 according to another embodiment of the present invention, unlike the embodiment of FIGS. 2B and 2D, the first and second scale sensors 260a and 260b are respectively A pair of first scale sensors 260a1 and 260a2 and a pair of second scale sensors mounted spaced apart from each other outside each lower side of the first and second support members 236a and 236b (see FIG. 2C). 260b1, 260b2, and a pair of first limit members 266a1, 266a2 and a pair of second limit members mounted on each outer surface of the first and second support members 236a, 236b apart from each other. Either or both of 260b1 and 260b2 may be used together. When a pair of first scale sensors 260a1 and 260a2 and a pair of second scale sensors 260b1 and 260b2 are used, the pair of first scale sensors 260a1 and 260a2 are respectively the first linear scale 270a. ) Detects a predetermined first and second reference point indicated on) or a pair of second scale sensors 26ba1, 260b2 respectively detect a predetermined first and second reference point indicated on second linear scale 270b The first and second sensing signals are then transmitted to the control device. The control device stops the operation of the feeding device 230 by cutting off the power applied to the first and second driving devices 250a and 250b according to the first and second sensing signals.

In addition, when a pair of first limit members 266a1 and 266a2 and a pair of second limit members 266b1 and 266b2 are used, a pair of first limit members 266a1 and 266a2 are used as a pair of first pairs. When passing through the limit sensors 264a1 and 264a2 or when the pair of second limit members 266b1 and 266b2 pass through the pair of second limit sensors 264b1 and 264b2, the pair of first limit sensors 264a1 264a2 or a pair of second limit sensors 264b1 and 264b2 transmit the sensed respective limit signals to the control device. The control device receives the respective limit signals and the feeding device 230 is in the normal operating position. Determining out of the state, the power applied to the first and second driving devices 250a and 250b is automatically cut off to stop the operation of the feeding device 230.

Hereinafter will be described the configuration and operation of the coating apparatus according to an embodiment of the present invention.

Referring again to FIGS. 2A-2F, the coating apparatus 200 according to an embodiment of the present invention includes a first floating unit 276a for providing a loading area, a second floating unit 276b for providing a coating area, And a third floating unit 276c providing an unloading area; A substrate transfer device (not shown) for transferring the substrate (G) from the loading region to the coating region and from the coating region to the unloading region; A substrate transfer unit (201) having a transfer carrier (220) for transferring the substrate (G) on the second floating unit (276b), and a feeding device (230) of the transfer carrier (220); A nozzle device 278 provided on the coating area and applying a coating liquid on the substrate G; And a gantry (not shown) on which the nozzle device 278 is mounted. Here, the substrate transfer apparatus (not shown) may be implemented as a conventional substrate transfer apparatus 84 (see FIG. 1A) for mounting and transferring the substrate G in a vacuum suction method, and the second floating unit 276b is illustrated in FIG. Same as floating unit 276b of the coating area shown in 2a.

The substrate transfer unit 201 having the transfer carrier 220 used in the coating apparatus 200 according to the embodiment of the present invention described above is provided with a coating area according to the embodiment of the present invention shown in FIGS. 2A to 2F. It may be implemented as a substrate transfer unit 201. Specific configurations and operations of the substrate transfer unit 201 and the feeding device 230 of the transfer carrier 220 in the coating area according to the embodiment of the present invention have been described in detail with reference to FIGS. It will be omitted.

As described above, by using the feeding device of the transfer carrier of the present invention, and the substrate transfer unit and coating device having the same, it is possible to minimize or prevent the occurrence of temperature deviation on the substrate, and to apply a coating liquid having a predetermined thickness on the substrate to prevent staining. Prevention of occurrence, reducing the manufacturing cost of the coating apparatus, eliminating the possibility of foreign material inflow and thus minimizing or eliminating the occurrence of scratches and secondary contamination of the lower part of the substrate, simplification of the overall composition of the coating apparatus without the use of a priming roll, and The effect of reducing the overall process time due to the continuous operation of the cleaning operation of the preliminarily discharged coating liquid, the transfer of the substrate and the application of the coating liquid can be achieved.

Various modifications may be made by those skilled in the art without departing from the spirit and scope of the invention as defined by the following claims. It is not. Accordingly, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be determined only in accordance with the following claims and their equivalents.

200: coating apparatus 201: substrate transfer apparatus 220: transfer carrier
222a, 222b: feed / recovery roll and recovery / feed roll 224a, 224b: feed roll
228: cleaning device 230: feeding device 232a, 232b: drive roll
232a1,232a2; 232b1,232b2: rotating shaft 235a1,235a2; 235b1,235b2: bearing
234a1,234a2; 234b1,234b2: Fixing jig 236a, 236b: Support member
240a, 240b: Linear Motion Guide 250a, 250b: Drive
260a, 260b; 260a1,260a2; 260b1,260b2: scale sensor
262a, 262b: linear scale 270a, 270b: base plate
264a1,264a2; 264b1,264b2: limit sensor
266a, 266b; 266a1, 266a2; 266b1, 266b2: Limit member
276a, 276b, 276c: floating unit 278: nozzle unit

Claims (9)

In the coating apparatus,
A substrate floating unit comprising a first floating unit providing a loading area, a second floating unit providing a coating area, and a third floating unit providing an unloading area;
A substrate transfer device for transferring a substrate from the loading region to the coating region and from the coating region to the unloading region;
A substrate transfer unit having a transfer carrier for transferring the substrate on the second floating unit, and a feeding device of the transfer carrier;
A nozzle device provided on the coating area and applying a coating liquid on the substrate; And
Gantry to which the nozzle device is mounted
Coating device comprising a. The method of claim 1,
The substrate transfer unit
A feed / recovery roll for supplying and withdrawing the transfer carrier;
A recovery / feed roll for recovering and supplying the transfer carrier;
First and second transfer rolls provided on both sides of the floating unit along a transfer direction of the substrate and transferring the transfer carrier to move the substrate on the coating area; And
Cleaning device for cleaning the coating liquid pre-discharged on the transfer carrier
Including,
The feeding device is provided side by side spaced apart from each other, and has a first and second drive roll to rotate or reverse rotation in the same direction to reciprocate the transfer carrier,
The first and second drive rolls are respectively provided between the supply / recovery roll and the first transfer roll and between the recovery / feed roll and the second transfer roll,
The feeding device reciprocates the transfer carrier through the first and second transfer rolls between the supply / recovery roll and the recovery / feed roll.
Coating device. The method of claim 2,
The substrate transfer unit
A plurality of first auxiliary rolls provided between said feed / recovery roll and said feeding device and between said feeding device and said first transfer roll, for maintaining tension of said transfer carrier;
A plurality of second auxiliary rolls provided between the recovery / supply roll and the feeding device and between the feeding device and the second transfer roll to maintain tension of the transfer carrier;
A first tension control device connected to any one of the plurality of first auxiliary rolls to control the tension of the transfer carrier; And
A second tension control device connected to one of the second auxiliary rolls of the plurality of second auxiliary rolls to control the tension of the transfer carrier;
Coating device further comprising a. The method of claim 3, wherein
The substrate transfer unit
At least one antistatic device for removing static electricity from the transfer carrier; And
A plurality of foreign matter removing apparatus for removing foreign matter on the transfer carrier
Coating device further comprising a. The method of claim 4, wherein
The plurality of foreign matter removing apparatus is a coating apparatus for removing the foreign matter by a vacuum suction method using a vacuum pumping device or an air blow method using an air supply device. The method according to any one of claims 1 to 5,
The feeding device
First and second support members rotatably mounted with a pair of first and second rotational shafts of each of the first and second drive rolls;
First and second linear motion guides provided below the first and second support members to move the first and second support members, respectively;
First and second driving devices connected to one lower side of each of the first and second support members and driving the first and second support members;
First and second scale sensors mounted on the other lower side of each of the first and second support members and configured to identify a predetermined reference point of the feeding device; And
First and second linear scales provided below the first and second scale sensors in a direction of the first and second linear motion guides;
Coating device comprising a. The method according to claim 6,
The first and second scale sensors are mounted on the other lower side of each of the first and second support members, respectively, and a pair of first scale sensors and a pair of pairs for checking a predetermined reference point of the feeding device. Coating device implemented with a second scale sensor. The method according to claim 6,
The feeding device
A pair of first limit members and a pair of second limit members mounted on each outer surface of said first and second support members spaced apart from each other; And
Provided at a lower portion of each of the pair of first limit members and the pair of second limit members, the normal operation of the feeding device according to whether the pair of first and second limit members have passed; A pair of first limit sensors and a pair of second limit sensors to confirm the position range
Coating device further comprising a. The method according to claim 6,
The feeding device
A pair of first limit members and a pair of second limit members mounted on each outer surface of said first and second support members spaced apart from each other; And
Provided at a lower portion of each of the pair of first limit members and the pair of second limit members, the normal operation of the feeding device according to whether the pair of first and second limit members have passed; A pair of first limit sensors and a pair of second limit sensors to confirm the position range
Coating device further comprising a.

Images