KR20120054061A - 진공 펌프 시스템 - Google Patents

진공 펌프 시스템 Download PDF

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Publication number
KR20120054061A
KR20120054061A KR1020127006322A KR20127006322A KR20120054061A KR 20120054061 A KR20120054061 A KR 20120054061A KR 1020127006322 A KR1020127006322 A KR 1020127006322A KR 20127006322 A KR20127006322 A KR 20127006322A KR 20120054061 A KR20120054061 A KR 20120054061A
Authority
KR
South Korea
Prior art keywords
vacuum pump
connection
pump system
pump
flange
Prior art date
Application number
KR1020127006322A
Other languages
English (en)
Korean (ko)
Inventor
토마스 드라이페르트
볼프강 기에브만스
Original Assignee
욀리콘 라이볼트 바쿰 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 욀리콘 라이볼트 바쿰 게엠베하 filed Critical 욀리콘 라이볼트 바쿰 게엠베하
Publication of KR20120054061A publication Critical patent/KR20120054061A/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/007—General arrangements of parts; Frames and supporting elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/60—Assembly methods
    • F04C2230/604—Mounting devices for pumps or compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/70—Use of multiplicity of similar components; Modular construction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/805—Fastening means, e.g. bolts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressor (AREA)
KR1020127006322A 2009-08-11 2010-07-30 진공 펌프 시스템 KR20120054061A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009037010A DE102009037010A1 (de) 2009-08-11 2009-08-11 Vakuumpumpensystem
DE102009037010.2 2009-08-11

Publications (1)

Publication Number Publication Date
KR20120054061A true KR20120054061A (ko) 2012-05-29

Family

ID=43448219

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127006322A KR20120054061A (ko) 2009-08-11 2010-07-30 진공 펌프 시스템

Country Status (8)

Country Link
US (1) US20120189478A1 (de)
EP (1) EP2464827A2 (de)
JP (1) JP2013501880A (de)
KR (1) KR20120054061A (de)
CN (1) CN102472107A (de)
DE (1) DE102009037010A1 (de)
TW (1) TW201109529A (de)
WO (1) WO2011018370A2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180015623A (ko) * 2015-04-17 2018-02-13 아틀라스 캅코 에어파워, 남로체 벤누트삽 스크루 압축기, 이에 적용되는 압축기 요소 및 기어 박스
KR20210004391A (ko) 2019-07-04 2021-01-13 이성현 원밸브 펌프

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6009193B2 (ja) * 2012-03-30 2016-10-19 株式会社荏原製作所 真空排気装置
DE202013003819U1 (de) * 2013-04-24 2014-07-25 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System
GB201718752D0 (en) * 2017-11-13 2017-12-27 Edwards Ltd Vacuum and abatement systems

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4588358A (en) * 1984-07-02 1986-05-13 Werner Rietschle Maschinen-Und Apparatebau Gmbh Rotary vane evacuating pump
JPH05231366A (ja) * 1991-07-09 1993-09-07 Ebara Corp 多段式真空ポンプ装置
JP2000283024A (ja) * 1999-03-30 2000-10-10 Aisin Seiki Co Ltd ポンプ装置
JP3472570B2 (ja) * 2001-08-31 2003-12-02 本田技研工業株式会社 エンジンの補機取付構造
US6986654B2 (en) * 2002-07-03 2006-01-17 Therics, Inc. Apparatus, systems and methods for use in three-dimensional printing
JP2004100594A (ja) * 2002-09-10 2004-04-02 Toyota Industries Corp 真空ポンプ装置
JP2006002762A (ja) * 2004-05-18 2006-01-05 Nippon Densan Corp 送風機
US7722312B2 (en) * 2005-12-14 2010-05-25 Eaton Corporation Fuel cell compressor system
US20070231164A1 (en) * 2005-12-14 2007-10-04 Eybergen William N Fuel cell compressor system
US8142175B2 (en) * 2008-01-17 2012-03-27 Bitzer Scroll Inc. Mounting base and scroll compressor incorporating same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180015623A (ko) * 2015-04-17 2018-02-13 아틀라스 캅코 에어파워, 남로체 벤누트삽 스크루 압축기, 이에 적용되는 압축기 요소 및 기어 박스
US10724522B2 (en) 2015-04-17 2020-07-28 Atlas Copco Airpower, Naamloze Vennootschap Screw compressor, compressor element and gearbox applied thereby
KR20210004391A (ko) 2019-07-04 2021-01-13 이성현 원밸브 펌프

Also Published As

Publication number Publication date
WO2011018370A2 (de) 2011-02-17
TW201109529A (en) 2011-03-16
EP2464827A2 (de) 2012-06-20
JP2013501880A (ja) 2013-01-17
WO2011018370A3 (de) 2011-12-08
CN102472107A (zh) 2012-05-23
US20120189478A1 (en) 2012-07-26
DE102009037010A1 (de) 2011-02-17

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