CN102472107A - 真空泵系统 - Google Patents

真空泵系统 Download PDF

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Publication number
CN102472107A
CN102472107A CN2010800356980A CN201080035698A CN102472107A CN 102472107 A CN102472107 A CN 102472107A CN 2010800356980 A CN2010800356980 A CN 2010800356980A CN 201080035698 A CN201080035698 A CN 201080035698A CN 102472107 A CN102472107 A CN 102472107A
Authority
CN
China
Prior art keywords
vacuum pump
pump system
pump
flange
connecting element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2010800356980A
Other languages
English (en)
Chinese (zh)
Inventor
托马斯·德赖费特
沃尔夫冈·吉贝曼斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of CN102472107A publication Critical patent/CN102472107A/zh
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/007—General arrangements of parts; Frames and supporting elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/60—Assembly methods
    • F04C2230/604—Mounting devices for pumps or compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/70—Use of multiplicity of similar components; Modular construction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/805—Fastening means, e.g. bolts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressor (AREA)
CN2010800356980A 2009-08-11 2010-07-30 真空泵系统 Pending CN102472107A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009037010A DE102009037010A1 (de) 2009-08-11 2009-08-11 Vakuumpumpensystem
DE102009037010.2 2009-08-11
PCT/EP2010/061140 WO2011018370A2 (de) 2009-08-11 2010-07-30 Vakuumpumpensystem

Publications (1)

Publication Number Publication Date
CN102472107A true CN102472107A (zh) 2012-05-23

Family

ID=43448219

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010800356980A Pending CN102472107A (zh) 2009-08-11 2010-07-30 真空泵系统

Country Status (8)

Country Link
US (1) US20120189478A1 (de)
EP (1) EP2464827A2 (de)
JP (1) JP2013501880A (de)
KR (1) KR20120054061A (de)
CN (1) CN102472107A (de)
DE (1) DE102009037010A1 (de)
TW (1) TW201109529A (de)
WO (1) WO2011018370A2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105164375A (zh) * 2013-04-24 2015-12-16 厄利孔莱博尔德真空技术有限责任公司 真空泵系统

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6009193B2 (ja) * 2012-03-30 2016-10-19 株式会社荏原製作所 真空排気装置
CN106715911B (zh) * 2015-04-17 2019-08-09 阿特拉斯·科普柯空气动力股份有限公司 螺杆压缩机及用于螺杆压缩机的压缩机元件和变速箱
GB201718752D0 (en) * 2017-11-13 2017-12-27 Edwards Ltd Vacuum and abatement systems
KR20210004391A (ko) 2019-07-04 2021-01-13 이성현 원밸브 펌프

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0166807A2 (de) * 1984-07-02 1986-01-08 Werner Rietschle Masch.-u. Apparatebau GmbH Drehschieber-Vakuumpumpe
JPH05231366A (ja) * 1991-07-09 1993-09-07 Ebara Corp 多段式真空ポンプ装置
US6305910B1 (en) * 1999-03-30 2001-10-23 Aisin Seiki Kabushiki Kaisha Multi-stage pump device
EP1398509A2 (de) * 2002-09-10 2004-03-17 Kabushiki Kaisha Toyota Jidoshokki Vakuumpumpe
US20070134111A1 (en) * 2005-12-14 2007-06-14 Eybergen William N Fuel cell compressor system
US20090185929A1 (en) * 2008-01-17 2009-07-23 Bitzer Scroll Inc. Mounting Base and Scroll Compressor Incorporating Same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3472570B2 (ja) * 2001-08-31 2003-12-02 本田技研工業株式会社 エンジンの補機取付構造
US6905645B2 (en) * 2002-07-03 2005-06-14 Therics, Inc. Apparatus, systems and methods for use in three-dimensional printing
JP2006002762A (ja) * 2004-05-18 2006-01-05 Nippon Densan Corp 送風機
US20070231164A1 (en) * 2005-12-14 2007-10-04 Eybergen William N Fuel cell compressor system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0166807A2 (de) * 1984-07-02 1986-01-08 Werner Rietschle Masch.-u. Apparatebau GmbH Drehschieber-Vakuumpumpe
JPH05231366A (ja) * 1991-07-09 1993-09-07 Ebara Corp 多段式真空ポンプ装置
US6305910B1 (en) * 1999-03-30 2001-10-23 Aisin Seiki Kabushiki Kaisha Multi-stage pump device
EP1398509A2 (de) * 2002-09-10 2004-03-17 Kabushiki Kaisha Toyota Jidoshokki Vakuumpumpe
US20070134111A1 (en) * 2005-12-14 2007-06-14 Eybergen William N Fuel cell compressor system
US20090185929A1 (en) * 2008-01-17 2009-07-23 Bitzer Scroll Inc. Mounting Base and Scroll Compressor Incorporating Same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105164375A (zh) * 2013-04-24 2015-12-16 厄利孔莱博尔德真空技术有限责任公司 真空泵系统
CN105164375B (zh) * 2013-04-24 2018-10-16 莱宝有限责任公司 真空泵系统

Also Published As

Publication number Publication date
WO2011018370A2 (de) 2011-02-17
KR20120054061A (ko) 2012-05-29
TW201109529A (en) 2011-03-16
US20120189478A1 (en) 2012-07-26
EP2464827A2 (de) 2012-06-20
JP2013501880A (ja) 2013-01-17
DE102009037010A1 (de) 2011-02-17
WO2011018370A3 (de) 2011-12-08

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PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20120523