KR20100095866A - Apparatus for probing flat panel display - Google Patents

Abstract

PURPOSE: A probe device for the inspection of a flat display is provided to accurately measure the correlation due to temperature and light. CONSTITUTION: A thermo stream injecting unit(6) is installed in a probe head. The unit heats and cools the contact unit of a probe pin and a circuit pattern. A plurality of backlight modules(7) irradiate light to the back side of a substrate and irradiate light to the circuit pattern. A controller(9) outputs the temperature measuring time point of a substrate by calculating the correlation of specific temperature by a thermostream spraying part and the reference temperature of a measurement point.

Description

Probe device for inspecting flat panel display {Apparatus for probing flat panel display}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to equipment for inspecting flat panel displays, and more particularly, to a flat panel display probe apparatus for measuring and inspecting a change in electrical characteristics according to the effects of temperature and light on a circuit pattern formed on a flat panel display substrate.

As a display device replacing a conventional cathode ray tube, a flat panel display is being actively developed, such as a liquid crystal display (LCD), a plasma display panel (PDP), Field emission display devices (FEDs), vacuum fluorescent devices (VFDs), and the like are typical.

Such flat panel displays are generally manufactured by the manufacturing process of the lower substrate, the manufacturing process of the upper substrate, and the bonding process of the lower substrate and the upper substrate. In detail, a plurality of cells are formed on a glass disc for manufacturing a lower substrate, and a plurality of horizontal lines and vertical lines are formed to cross each other in a matrix form in each cell, and at each intersection of the horizontal lines and the vertical lines. Pixel cells including transparent pixel electrodes are formed. In the pixel cells, thin film transistors connected to horizontal lines, vertical lines, and pixel electrodes are formed. The plurality of cells formed on the glass disc are cut by the scribing process after the inspection process, and each of the plurality of cells cut from the glass disc, that is, the lower substrate, is bonded to the upper substrate completed in the manufacturing process of the upper substrate. Then, a single flat panel display is completed by assembling a driving circuit and various elements for driving the pixel cells.

On the other hand, in the inspection process for a plurality of cells formed on the glass disc during the manufacturing process of the flat panel display, the state of the circuit is inspected by applying an electrical test signal to the circuit pattern using a probe device. Representative examples of such a probe device is a probe inspection device of Patent Publication No. 10-2007-0024938 developed by the applicant of the present invention and a probe inspection device of Patent No. 10-0768912.

In the former case, as illustrated in FIG. 1, the hot air blower 130 is installed at one side of the probe head 124 to inject hot or cold air into the contact point between the probe pin 122 and the glass 112. It is possible to examine the durability and electrical characteristics of the circuit according to the influence of the temperature on (112).

In the latter case, as illustrated in FIG. 2, a plurality of backlight modules 160 for irradiating light are provided on the rear surface of the substrate 300 to adjust the amount of light incident on the rear surface of the substrate 300. The durability and electrical characteristics of the circuit according to the amount of light can be examined.

However, these pre-applied probe inspection devices focus on measuring only the influence of temperature or only the influence of light quantity, respectively, in examining the durability and electrical characteristics of the circuit. There is a problem that it is almost impossible to inspect the durability and electrical characteristics of the circuit according to it.

However, in the case of the registered patent No. 10-0768912 in which the backlight module 160 is installed, a heating coil may be installed in the backlight module 160 to inspect the characteristics according to the influence of heat (ie, temperature). Since the backlight module 160 is intermittently installed on the rear surface of the substrate 300, only heat is applied to the circuit portion at a specific position, so that the characteristic inspection of all the portions of the substrate 300 is precisely performed. There is a problem that cannot be done.

The present invention is to improve the conventional problems as described above, the object of the organic change of light (light quantity) and heat (temperature) with respect to the entire circuit pattern formed on the substrate during the durability and electrical properties of the flat panel display The present invention provides a probe device for inspecting a flat panel display that can precisely inspect a change in characteristics.

The present invention for achieving the above object, a probe head having a stage on which a flat panel display substrate is placed, and a probe pin for electrically contacting a circuit pattern formed on the substrate to inspect the characteristics of the circuit pattern, and the probe head Linear driving means for moving the X-axis and Y-axis on the stage, the reference temperature measuring point provided in the stage and the reference temperature measuring unit for measuring the temperature of the reference temperature measuring point, and installed in the head Thermo stream injection means for imparting a specific temperature condition by heating or cooling the contact portion of the probe pin and the circuit pattern, and a plurality of imparting the amount of light to the circuit pattern by irradiating light on the back of the substrate in a state arranged on the stage Backlight modules, the thermo stream injection means and the backlight module A power supply unit for supplying power, the thermo stream spraying means and the backlight module are controlled so that a specific temperature and light amount act simultaneously on the circuit pattern, and the reference temperature and the thermo stream spraying means of the reference temperature measuring point. And a control unit for outputting a temperature measurement time point of the substrate by calculating a correlation between specific temperatures.

Here, the thermo stream injection means may be configured to include a heating element for generating heat to heat the contact portion of the probe pin and the circuit pattern, and an atmosphere temperature measuring unit for measuring the temperature of the atmosphere heated by the heating element. .

In addition, the thermo stream injection means comprises a heat absorbing body for absorbing heat to cool the contact portion between the probe pin and the circuit pattern, and an atmosphere temperature measuring unit for measuring the temperature of the atmosphere cooled by the heat absorbing body. It may be.

The thermo stream injection means includes a valve for introducing compressed air under the control of the controller, a flow rate sensor for measuring the flow rate of the compressed air, a flow regulator for adjusting the flow rate and the hydraulic pressure of the compressed air, and a hydraulic pressure. It may be made of a configuration having a regulator.

In addition, the backlight module includes a light emitting body that emits light, a light emitting tube forming a path through which light of the light emitting body passes, and a diffusion sheet for uniformly diffusing light from the light emitting tube to the back surface of the substrate. It may include a light emitting surface, and a support frame for supporting the light emitting surface on the light emitting tube.

In addition, a luminance meter for measuring the luminance of the light irradiated from the backlight module is further provided, the control unit may be configured to control the luminance of the backlight module to a predetermined level by comparing the luminance information of the luminance meter and the backlight module. have.

In particular, the control unit includes an interface for communicating with the luminance meter and the backlight module, a storage unit for storing driving information for the backlight module, and the luminance meter and the backlight through the interface. It may be configured to control the driving of the power supply to maintain a constant brightness of the backlight module by using the brightness information supplied from the module and the drive information supplied from the storage.

According to the present invention configured as described above, it is possible to measure the effects of temperature and light on the flat panel display substrate at the same time unlike the conventional measurement separately, the correlation by the influence on the temperature and light that was conventionally judged only by analogy The relationship can be measured accurately. In addition, a series of processes of collecting data by separately measuring the effects of temperature and light in the resistance test of the substrate, which takes a long time, is omitted, and the execution time of the inspection is reduced by half.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the following embodiments are provided to those skilled in the art to fully understand the present invention, and may be modified in various forms, and the scope of the present invention is limited to the embodiments described below. It doesn't happen.

3 and 4 are respectively a schematic plan view and a perspective view of a probe device according to an embodiment of the present invention, Figure 5 is a control block diagram of a probe device according to an embodiment of the present invention. 6 is a front view, a left side view, a top view and a bottom view which show an example of the backlight module applied to this invention.

As shown in the drawings, the probe apparatus of the present embodiment includes a stage 1 prepared for placing a flat panel display substrate S on which a circuit pattern is formed, and a probe pin for inspecting characteristics of the circuit pattern. A probe head 3 equipped with 2), a linear driving means 4 for moving the probe head 3 on the stage 1, a reference temperature measuring point P provided in the stage 1, and the temperature thereof A reference temperature measuring unit 5, a thermo stream injection means 6 for imparting a specific temperature condition to a contact between the probe pin 2 and the circuit pattern, a backlight module 7 for imparting a quantity of light to the circuit pattern, and the backlight It consists of a module 7, a power supply unit 8 for supplying power to the thermo stream injection means 6, and a control unit 9 for causing a specific temperature and light amount to act simultaneously on the circuit pattern.

Referring to the specific configuration of the present embodiment including the above components are as follows.

The stage 1 is installed on the base plate 10 as shown in FIG. 4, and the probe pin 2 of the probe head 3 is placed on the stage 1 in a horizontal state. ) Is directed to the circuit pattern of the substrate (S).

The linear driving means 4 is implemented on a plurality of linear motors installed on the base plate 10 to move the probe head 3 along the X and Y axes in the stage 1.

The probe head 3 may be provided with three, each of the probe head 3 is moved to a designated position by the linear drive means 4, the probe pin 2 provided on the probe head 3 is When an electrical test signal is applied to the horizontal / vertical line pad and the pixel electrode of the substrate S, and the electrical test signal is applied to the horizontal / vertical line pad and the pixel electrode, the probe pin 2 checks whether the circuit pattern is defective. In particular, in order to perform an accurate inspection, the ambient conditions such as temperature and light quantity (light) similar to the actual operating conditions of the thin film transistor circuit should be established. In the present invention, the thermo stream injection means 6 and the backlight module 7 The specific temperature and the amount of light can be simultaneously applied to the circuit pattern of the substrate (S).

As a configuration for imparting a specific temperature condition to the circuit pattern of the substrate S, a thermo stream spray means 6 for heating or cooling the probe pin 2 and the contact portion of the circuit pattern to a specific temperature, and the thermo stream spray means Power supply unit (8) for supplying power to the (6), the air conditioning unit 11 for controlling the amount of air flowing into the thermo stream injection means (6) through the air supply line, and the thermo stream injection means (6) The control unit 9 for controlling the supplied power and air, and the atmosphere temperature of the hot or cold air provided from the thermo stream injection means 6 to the control unit 9 and the thermo stream injection means under the control of the control unit 9 The thermostat section 12 adjusts the temperature by varying the amount of current supplied to (6), and the thermostat according to the control signal of the control section 9 and the signal of the air conditioning section 11 separately from the temperature control section 12 Power supply to the stream injection means (6). And the relay 13, which is able to choose to block, measuring the temperature at the reference temperature measuring point (P) as mentioned above and is provided with a reference temperature measuring unit (5) that connects it to the control unit (9).

The thermo stream injection means 6 measures the heat generation unit 6a that generates heat when power is applied, and the temperature (atmosphere temperature) of the air inside the thermo stream injection means 6 heated by the heat generation unit 6a. It may be composed of an atmosphere temperature measuring unit 6b. In addition, the thermo stream jetting means 6 may include a heat absorbing part 6c which is cooled when power is applied instead of the heat generating part 6a so as to inspect the electrical characteristics of the substrate P in the cooled state. In this case, since the configuration and control method of the heating unit 6a are the same, only the case in which the heating unit 6a is provided will be described as an example.

The heating unit 6a is connected to the power supply unit 8 with the relay 13 interposed therebetween. The heating unit 6a may be a vertical coil applied to suppress the generation of magnetic noise. In addition, the atmospheric temperature measuring unit 6b measures the atmospheric temperature of the thermo stream injection means 6 and provides it to the temperature adjusting unit 12.

The temperature control unit 12 controls the amount of current supplied from the power supply unit 8 to the heat generating unit 6a in accordance with the atmosphere temperature information of the thermo stream injection means 6 provided to the atmosphere of the thermo stream injection means 6 Adjust the temperature In addition, the temperature controller 12 links the supplied atmosphere temperature information to the controller 9.

The power supply unit 8 may use a linear DC power supply instead of an AC power source in consideration of 60Hz noise on the power source as the energy supply source of the heat generating unit 6a.

The control unit 9 receives the atmospheric temperature information of the thermo stream injection means 6 from the temperature control unit 12, and receives the reference temperature information of the reference temperature measuring point P from the reference temperature measuring unit 5, Based on this information, the control unit 9 calculates and stores a correlation between the reference temperature and the ambient temperature to inform the user of the time point at which the temperature of the substrate S can be measured.

The air regulator 11 is a valve 11a, such as a solenoid valve for introducing compressed air from an air supply source (not shown) under the control of the controller 9, and a flow rate sensor for measuring the flow rate of the compressed air. 11b, a flow regulator 11c for adjusting the flow rate and the hydraulic pressure of the compressed air, and a hydraulic regulator 11d. In order to keep the temperature of the hot air constant, the flow rate of the compressed air is very important. For this purpose, the flow rate measuring sensor 11b provides the relay 13 with information accurately measuring the flow rate of the compressed air, and the relay 13 When the pressure is lowered below the reference value based on the flow rate of the supplied compressed air, the power supply to the heat generating portion 6a is cut off.

The probe head 3 may be equipped with a microscope 14, which is a microscope of high magnification, when the pad for contacting the thin film transistors on the substrate S or when contacted with the probe pin 2 is used. It is also used to set the reference position of the reference temperature measuring point (P) during the operation of the thermo stream injection means (6).

On the other hand, as a configuration for imparting a specific light amount irradiation condition to the circuit pattern of the substrate (S), in the state disposed on the stage (1) is irradiated with the light on the back of the substrate (P) to impart a light amount to the circuit pattern The plurality of backlight modules 7 may be configured as follows. That is, as shown in Fig. 6, the backlight module 7 of the present embodiment includes a light emitting member 7a that emits light, a light emitting tube 7b forming a path through which light of the light emitting member 7a passes, and Light emitting surface 7d of a transparent material such as synthetic resin or glass having a diffusion sheet 7c for uniformly diffusing light from the light emitting tube 7b to the rear surface of the substrate P, and light emission on the light emitting tube 7b It consists of the support frame 7e which supports the surface 7d. One side of the light emitting tube 7b may further include an optical sensor 7f for detecting the amount or brightness of light reflected from the diffusion sheet 7c or the light emitting surface 7d.

The light emitter 7a should have high brightness, uniformity, color, temperature, and other optical characteristics similar to those of a backlight currently applied to a liquid crystal display (LCD), and should be free to adjust the amount of light. In addition, the light-emitting body 7a should be stabilized in a quick time, be able to maintain a specified brightness continuously, and there should be no change in brightness due to life. Therefore, the light emitting body 7a having such characteristics can be applied regardless of the kind, and an example thereof is a light emitting diode (LED). In particular, in the present invention, in order to be able to measure the electrical influence of the thin film transistor when the spectrum of light changes, the light emitter 7a may be configured of a red / green / blue light emitting diode used as a backlight of the light emitting diode. In addition, an ultraviolet light emitter or an infrared light emitter may be applied as the light emitter 7a, thereby generating not only a spectrum of visible light but a spectrum of ultraviolet or infrared light, thereby inspecting the electrical characteristics of the substrate S in a wider light area. You can do it.

In this embodiment, in order to uniformly control the luminance of the backlight module 7, a luminance meter 15 for measuring the luminance of the light emitted from the backlight module 7 is provided in the probe head 3. In addition, the controller 9 compares the luminance of the luminance meter 15 and the backlight module 7 to control the luminance of the backlight module 7 to a predetermined level, and the optical sensor 7f detects light. Information is transmitted to the controller 9, and the controller 9 controls the brightness of the backlight module 7 using the light sensing information.

The controller 9 may include an interface 18 for communicating with the luminance meter 15 and the backlight module 7, and a storage device 16 for storing luminance information of the plurality of backlight modules 7. And an input unit 17 for receiving various types of information from the user, and an output unit 19 for outputting information input from the input unit 17 and information from the control unit 9. In addition, the above-described power supply unit 8 is configured to supply power to each of the backlight modules 7 in order to adjust the brightness of each of the plurality of backlight modules 7, and the control unit 9 provides the brightness through the interface 18. The driving of the power supply unit 8 is controlled according to a comparison value of the luminance information of the backlight module 7 transmitted from the system 15 and the luminance information stored in the storage 16.

On the other hand, the control unit 9 of the present invention controls the thermo stream jetting means 6 and the backlight module 7 so that a specific temperature and the amount of light acts simultaneously on the circuit pattern of the substrate S, thereby controlling the temperature and the amount of light. It is possible to examine the durability and electrical properties of the circuit as the influence acts on the circuit pattern simultaneously. Looking at the control process of the thermo-stream injection means 6 and the backlight module 7 by the control unit 9 as follows.

First, in order to measure the reference temperature at the reference temperature measuring point P provided in the stage 1 on which the substrate S is not placed, the linear driving means 4 moves in the X-axis and the Y-axis so that the probe head 3 In the center of the reference temperature measuring point (P). At this time, the probe head 3 is easily positioned at the center point of the reference temperature measuring point P by using the microscope 14 installed in the probe head 3.

The thermo stream jetting means 6 installed on one side of the probe head 3 is heated by injecting hot air into the contact point between the reference temperature measuring point P and the probe pin 2, and at the reference temperature measuring point P during heating. The reference temperature is measured by the reference temperature measuring unit 5 and transmitted to the control unit 9, which controls the predetermined temperature by using the reference temperature measurement value and the ambient temperature measurement value of the thermo stream injection means 6. Execution of the measurement program calculates and stores the correlation between the reference temperature and the ambient temperature. The controller 9 then informs the user of a measurable time point using the calculated and stored correlation in the heating test of the substrate S. The reason why the surface temperature of the substrate S is relatively measured using the reference temperature measuring point P as described above is that when the substrate S is in direct contact with the substrate S by using a temperature measuring sensor during the heat inspection of the substrate S, the substrate S is measured. This is because the thin film transistor formed in (S) is damaged.

When the reference temperature measurement is completed, the actual substrate S is loaded on the stage 1. The linear driving means 4 moves on the X axis and the Y axis so that the probe head 3 is positioned at a predetermined portion of the circuit pattern to be inspected. When the probe pin 2 comes into contact with a predetermined portion (eg, a thin film transistor) of the circuit pattern to be inspected, the user sets the measurement temperature on the temperature measurement program and drives the program. Accordingly, the thermo stream jetting means 6 injects hot air to the contact point between the inspection target circuit pattern portion and the probe pin 2 so as to correspond to the calculated substrate surface temperature, thereby heating the contact point. The ambient temperature of the thermo stream jetting means 6 is continuously sensed in real time and transmitted to the temperature controller 12, and the controller 9 communicates the temperature of the substrate surface temperature by the communication with the temperature controller 12. When linked to a value, checkable display is performed. In addition, the control unit 9 controls the amount of current supplied to the thermo stream injection means 6 through the temperature control unit 12, and of the air supplied to the thermo stream injection means 6 through the air control unit 11 By controlling the flow rate and the hydraulic pressure, the temperature of the hot air is kept constant during probe inspection. In this manner, the user can perform the circuit pattern inspection at a specific temperature condition by heating the substrate S at any position on the substrate S. As shown in FIG.

On the other hand, the control unit 9 controls the above-described backlight module 7 in a state in which a specific temperature condition is applied to the inspection target circuit pattern of the substrate S by heating the thermo-stream injection means 6 as described above. Allow the amount of light to work at the same time.

First, the luminance of the backlight module 7 is corrected before the inspection is performed, and the probe head 3 in which the luminance meter 15 is installed is moved to the center position of the backlight module 7 to which the luminance inspection is to be performed. Driving of power to be supplied to the backlight module 7 based on the luminance information on the surface of the backlight module 7 transmitted from the luminance meter 15 and the luminance information transmitted from the optical sensor 7f in the backlight module 7 in FIG. Information and the like are stored in the storage unit 16 under the control of the control unit 9. In this case, when setting information of power to be supplied to each backlight module 7 is input by the user through the input unit 17 to adjust the brightness of the backlight module 7, the setting information may be converted into the brightness information and the driving information. It can also be stored in the form of an information table. The stored various information can be used not only to correct the brightness of the backlight module 7 during the subsequent electrical property inspection, but also to correct the brightness of each of the backlight modules 7 before the electrical property inspection on the substrate S. Can be used. At this time, since the backlight module 7 has its coordinates determined on the stage 1, the controller 9 uses the coordinate information of the probe head 3 in which the luminance meter 15 is installed. 7) You can create and save the information table as above.

When inspecting a change in electrical characteristics of the circuit pattern () of the substrate (S) loaded on the stage (1), the control unit (9) is a backlight module located on the back of the circuit pattern portion to be inspected of the substrate ( 7) extracts the information of the backlight module 7 and receives the internal brightness information of the backlight module 7 from the optical sensor 7f of the backlight module 7, while the brightness information of the backlight module 7 from the luminance meter 15 Receive and compare the internal or external brightness information with the information table to extract the voltage / current value necessary to maintain the brightness of the backlight module 7 uniformly, and then control the power supply unit 8 accordingly. do.

The power supply unit 8 supplies the power corresponding to the extracted value to the backlight module 7 under the control of the controller 9, and thus the backlight module 7 is uniform during the electrical characteristic measurement time. The ideal brightness is shown. That is, the controller 9 analyzes the luminance values measured inside and outside the light emitting tube 7b and immediately outputs a correction voltage / current value through the power supply unit 8 when the light amount is higher or lower than the reference set value. The light emitter 7a keeps the light amount within a certain deviation.

As such, the backlight module 7 may inspect the durability and electrical characteristics of the circuit pattern of the substrate S by irradiating the light pattern with uniform and ideal brightness to the portion of the circuit pattern to be inspected on the back portion of the substrate S.

As a result, as described above, the substrate S is heated by the thermo-stream jetting means 6 to impart specific temperature conditions to the circuit pattern portion to be inspected, and to provide a specific amount of light with uniform and ideal brightness from the backlight module 7. As conditions are imposed, it is possible to precisely examine the durability and electrical properties of the circuit as the effects of temperature and light quantity act simultaneously.

In the above described the present invention based on the preferred embodiment, the present invention is not limited to the above embodiment, various modifications by those skilled in the art within the scope of the technical idea of the present invention This is possible.

1 is an excerpt view of the probe inspection apparatus of the prior application No. 10-2007-0024938.

Figure 2 is an extract of the probe inspection apparatus of the prior application No. 10-0768912.

3 is a schematic plan view of a probe apparatus according to an embodiment of the present invention.

4 is a perspective view of a probe device according to an embodiment of the present invention.

5 is a control block diagram of a probe device according to an embodiment of the present invention.

6 is a front view, a left side view, a top view and a bottom view showing an example of a backlight module to which the present invention is applied.

<Explanation of symbols for the main parts of the drawings>

1: stage 2: probe pin

3: probe head 4: linear driving means

5: reference temperature measuring unit 6: thermo-stream injection means

6a: heat generating unit 6b: atmosphere temperature measuring unit

7: backlight module 7a: luminous body

7b: light emitting tube 7c: diffusion sheet

7d: emitting surface 7e: supporting frame

7f: optical sensor 8: power supply

9: control unit 10: base plate

11: air control unit 12: temperature control unit

13: relay 14: microscope

15: luminance meter 16: storage

17: input method 18: interface

19: writer

Claims (7)

A stage on which a flat panel display substrate is placed; A probe head having a probe pin electrically contacting a circuit pattern formed on the substrate to inspect a characteristic of the circuit pattern; Linear driving means for moving the probe head along the X-axis and Y-axis directions on the stage; A reference temperature measuring unit provided in the stage and a reference temperature measuring unit measuring a temperature of the reference temperature measuring point; A thermo stream injection means installed in the prod head to impart a specific temperature condition by heating or cooling the contact portion of the probe pin and the circuit pattern; A plurality of backlight modules configured to provide light to the circuit pattern by irradiating light on a rear surface of the substrate in a state arranged on the stage; A power supply unit supplying power to the thermo stream injection means and the backlight module; The thermo stream spraying means and the backlight module are controlled to allow a specific temperature and light quantity to act simultaneously on the circuit pattern, and to calculate a correlation between a reference temperature of the reference temperature measuring point and a specific temperature by the thermo stream spraying means. And a control unit for outputting a temperature measurement time point of the substrate. The method of claim 1, The thermo stream jetting means includes a heat generating portion for generating heat to heat the contact portion between the probe pin and the circuit pattern, and an atmospheric temperature measuring portion for measuring the temperature of the atmosphere heated by the heat generating portion. Probe device for display inspection. The method of claim 1, The thermo stream jetting means includes a heat absorbing portion for absorbing heat to cool the contact portion between the probe pin and the circuit pattern, and an atmospheric temperature measuring unit for measuring the temperature of the atmosphere cooled by the heat absorbing portion. Probe device for display inspection. The method according to any one of claims 1 to 3, The thermo stream injection means includes a valve for introducing compressed air under the control of the controller, a flow rate sensor for measuring the flow rate of the compressed air, a flow regulator for adjusting the flow rate and hydraulic pressure of the compressed air, and a hydraulic regulator. Probe apparatus for inspecting flat panel display, characterized in that provided. The method of claim 1, The backlight module includes a light emitting surface including a light emitting body emitting light, a light emitting tube forming a path through which light of the light emitting body passes, and a diffusion sheet for uniformly diffusing light from the light emitting tube to the rear surface of the substrate. And a support frame for supporting the light emitting surface on the light emitting tube. The method of claim 1, A flat panel display further includes a luminance meter for measuring the luminance of light emitted from the backlight module, and the controller controls the luminance of the backlight module to a predetermined level by comparing the luminance information of the luminance module and the backlight module. Probe device for inspection. The method of claim 6, The control unit includes an interface for communicating with the luminance meter and the backlight module, a storage unit for storing driving information for the backlight module, and the controller from the luminance meter and the backlight module through the interface. And controlling driving of the power supply to maintain a constant brightness of a backlight module by using supplied luminance information and driving information supplied from the storage device.

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