KR102608637B1 - Probe Test Apparatus - Google Patents

Abstract

The present invention relates to a probe inspection device, comprising: a base (2) forming a base to seat an inspection object (P) for inspection; A gantry (3) installed on the base (2) in the x-axis direction along one side of the inspection object (P); a plurality of alignment blocks (4) installed on the gantry (3) to enable reciprocal movement in the x-axis direction with respect to the inspection object (P); x-axis driving means (6) for reciprocating the alignment block (4) in the x-axis direction; Z-axis driving means (7) for lifting and lowering the probe block (5) in the z-axis direction; A control unit (8) that controls the reciprocating movement of the And a connecting means (9) for electrically connecting the x-axis driving means (6), the z-axis driving means (7), and the probe (51) to the control unit (8). . Therefore, the load caused by dozens of wires or cables connecting various parts and control units required for inspection can be greatly reduced by the FPCB that replaces them, thereby greatly improving the operational performance and structural efficiency of the inspection device.

Description

Probe Test Apparatus}

The present invention relates to a probe inspection device, and more specifically, to inspect an inspection object such as a display panel using a plurality of probes, which moves the probe up, down, left, and right as well as inspection signals exchanged between the probe and the control unit. This relates to a probe inspection device that can transmit the necessary power and driving signals in a simple and compact structure through FPCB and/or intermediate PCB.

Various panels used for displays necessarily go through an inspection stage to check for various errors that occur during the manufacturing process.

An example of inspection equipment that has been proposed for such inspection is the alignment device for a multi-probe inspection machine shown in FIG. 1 (Patent No. 10-1732629).

As shown in FIG. 1, this alignment device moves a plurality of alignment blocks 104 mounted on the gantry 103 to enable reciprocating movement in the lateral direction to the left and right by the lateral transfer means 106. In addition, the probe block 105 is lowered from the alignment block 104, which has been moved to the inspection standby position through Gatti lateral transfer, and the inspection object is inspected by the probe 151.

However, this conventional alignment device for a probe inspection machine is not shown in FIG. 1, but as shown in FIG. 2, it is used to exchange signals for inspection or inspection results between the probe 105 and the control unit or to use the alignment block 104. ), the probe 105, the alignment block 104, and the probe block 105 are connected to a plurality of cables 109 and 110, respectively, in order to exchange a power signal or control signal for laterally moving the probe block 105 or elevating the probe block 105. ) to connect to the control unit.

Accordingly, the conventional alignment device shown in FIG. 1 had a problem in that its appearance was greatly damaged due to the large number of cables 109 and 110 exposed to the outside.

In addition, in the conventional alignment device, when the number of alignment blocks 104 and probe blocks 105 increases significantly to about 40, dozens of bundles of cables 110 leading from the block to the control unit are fixed in overlapping layers on the gantry 103. , there was a problem in that the weight of the entire device or the gantry 103 was increased and the height of the gantry 103 was increased, greatly reducing the operating performance or structural efficiency of the device or the gantry 103.

In addition, due to frequent movement of the alignment block 4, dust is generated due to friction between the cables 110 moving along the alignment block 4 or with the device, resulting in contamination of the inspection object or contamination of the work environment. there was.

KR 10-1732629

The present invention was proposed to solve the problems of the conventional probe inspection device as described above. During inspection, a cable or wire transmits an inspection signal transmitted to and received from the control unit through a probe in contact with the inspection object, and a probe is used for inspection. By removing the cables that transmit control signals to control the moving The purpose is to prevent the performance of the inspection device from deteriorating or deteriorating the working environment due to wires or cables, and to improve the aesthetics of the device's exterior.

In order to achieve this purpose, the present invention includes a base forming a base to seat an inspection object for inspection; A gantry installed on the base in the x-axis direction along one side of the inspection object to enable reciprocating movement in the y-axis direction forming a right angle to one side of the inspection object; a plurality of alignment blocks installed on the gantry to enable reciprocal movement in the x-axis direction with respect to the inspection object; A probe block installed on the alignment block to enable elevation in the z-axis direction with respect to the inspection object, and inspecting the inspection object by a probe that is raised and lowered to contact the inspection object; x-axis driving means installed on the gantry in the x-axis direction to reciprocate and move the alignment block in the x-axis direction; Z-axis driving means installed on the alignment block in the z-axis direction to elevate and lower the probe block in the z-axis direction; a control unit that controls the reciprocating movement of the x-axis driving means and the lifting and lowering of the z-axis driving means, and performs inspection of the probe on the inspection object; and a connection means for electrically connecting the x-axis driving means, the z-axis driving means, and the probe to the control unit.

Additionally, it is preferable that the x-axis driving means is an LM actuator.

In addition, the turret includes an LM rail formed by arranging a plurality of electromagnets in a row along the x-axis direction on the gantry; an LM body mounted on the LM rail to reciprocate in the x-axis direction along the LM rail by interaction between an embedded magnetic material and the electromagnet; a lateral transfer plate mounted on one side of the LM main body in parallel with the LM rail, and configured to install the alignment block on the platform to be movable in the x-axis direction; and a reciprocating LM guide mounted in the x-axis direction to be interposed between the lateral transfer plate and the gantry, and guiding the reciprocating movement of the lateral transfer plate in the x-axis direction.

In addition, the connecting means preferably includes an intermediate part mounted on the gantry to intermediate the electrical connection between at least one of the x-axis driving means, the z-axis driving means, and the probe and the control unit.

In addition, the connecting means preferably includes a driving FPCB whose one end is connected to the z-axis driving means and the other end is connected to the intermediate part.

In addition, the connection means preferably includes a signal FPCB whose one end is connected to the probe and the other end is connected to the intermediate unit.

In addition, it is preferable that the mediation unit is a mediation PCB.

In addition, the connecting means preferably includes a driving cable with one end connected to the x-axis driving means and the other end connected to the control unit.

According to the probe inspection device of the present invention, the wires or cables connecting the probe or z-axis driving means, etc. to the control unit or intermediate unit are replaced with FPCB, so dozens of bundles of wires or cables can be omitted, and thus the appearance of the inspection device is reduced. It is possible to further improve the aesthetic sense that comes from .

In addition, the load caused by dozens of bundles of wires or cables can be greatly reduced by the FPCB that replaces them, thereby greatly improving the operational performance and structural efficiency of the inspection device.

In addition, by being connected to an operating element such as the Therefore, the working environment of the inspection device can be greatly improved.

Figure 1 is a partially cut away perspective view showing a conventional probe inspection device.
FIG. 2 is a diagram illustrating a cable in the probe inspection device of FIG. 1.
Figure 3 is a perspective view of a probe inspection device according to an embodiment of the present invention.
Figure 4 is an enlarged view of portion A of Figure 3.
Figure 5 is a diagram omitting a portion of Figure 4.
Figure 6 is a rear perspective view showing the alignment block and probe block of Figure 4 with the probe lowered.
Figure 7 is a side view of Figure 4.

Hereinafter, a probe inspection device according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

As shown by reference numeral 1 in FIG. 3, the probe inspection device of the present invention largely includes a base (2), a gantry (3), an alignment block (4), a probe block (5), an x-axis driving means (6), It includes a z-axis driving means (7), a control unit (8), and a connecting means (9).

Here, first, the base 2 is a part that forms the base of the probe inspection device 1, and as shown in FIG. 3, it is seated on the upper surface to inspect various inspection objects P such as a display panel. In addition, the gantry 3, which will be described later, is supported so as to be movable in a direction perpendicular to one side of the seated inspection object P, that is, the side of the inspection object P, that is, in the y-axis direction.

The gantry 3 is a transfer frame that supports a plurality of alignment blocks 4, which will be described later, to be movable in the x-axis direction. As shown in FIG. 3, the gantry 3 is located at a right angle to one side of the inspection object P as shown above. It is installed on the base 2 to be able to move back and forth in the y-axis direction, and is arranged on the base 2 in the x-axis direction parallel to one side of the inspection object P.

The alignment block 4 is a lateral transfer block that moves the probe 51 to the desired inspection position. As shown in FIGS. 3 and 4, there are several to dozens on one side of the gantry 3 in the x-axis direction. It is equipped so that it can be moved back and forth. For this purpose, as shown in FIGS. 3, 4, and 5, the alignment block 4 is equipped with an alignment plate 41 on the front of the x-axis driving means 6, which will be described later, that is, on the lateral transfer plate 63. and is fixed on the x-axis driving means (6). Meanwhile, the alignment block 4 supports the probe block 5, which will be described later, so that it can be lifted and lowered. For this purpose, as shown in FIG. 5, the lifting plate 71 and the alignment plate of the z-axis driving means 7, which will be described later, are used. (41) The elevating plate (71) and further supports the z-axis driving means (7) through the elevating LM guide (43) interposed between them. In addition, as shown in FIG. 6, the alignment block 4 is a scale arranged in parallel with the By reading (45), the control unit 8 can precisely control the moving distance in the x-axis direction.

The probe block 5 is a block that inspects the inspection object P through the probe 51. As shown in FIGS. 3 and 4, the probe 51 protrudes from the tip of the bottom, and is inspected as above. It is mounted on the movable end of the z-axis driving means (7) so that it can be raised and lowered in the z-axis direction perpendicular to the upper surface of the object (P). In this embodiment, the z-axis driving means (7) can be separated and loaded. In other cases, it may be integrally mounted on the bottom of the movable end of the z-axis driving means (7). Accordingly, when the probe block 5 is lowered as shown in FIG. 6, the probe 51 comes into contact with the inspection object P and inspects the inspection object P. On the contrary, when the probe block 5 reciprocates in the x-axis direction, it maintains the raised position by the z-axis driving means 7, as shown in FIG. 4.

The Therefore, the probe 51 is aligned to a desired position on the inspection object P by reciprocating the alignment block 4 in the x-axis direction, that is, in the lateral direction.

To this end, the By being mounted directly on the gantry (3), it does not take up much space inside the gantry (3). This allows the space inside the gantry (3) to be reduced, and as a result, the wall thickness of the gantry (3) is increased to the extent that the internal space is reduced, thereby increasing the overall durability.

For this purpose, the LM actuator consists of an LM rail (61), an LM body (62), a lateral transfer plate (63), and a reciprocating LM guide (64).

Here, the LM rail 61 is a stator of the LM actuator, and as shown in FIGS. 4, 5, and 7, a plurality of rails are erected in a straight line on the front of the gantry 3 and arranged in a row along the x-axis direction. It is formed in the shape of a rail by electromagnets. In addition, the LM body 62 is a mover of the LM actuator and is seated on the LM rail 61, as shown in FIGS. 3 to 7, and is arranged in one-to-one correspondence with each alignment block 4, It moves back and forth in the x-axis direction along the LM rail (61) due to the repulsive force and attractive force induced between the LM rail (61) and the LM rail (61). In addition, the lateral transfer plate 63 is a part that connects the probe block 5 to the LM actuator. As shown in Figures 4 to 7, the rear side is coupled to the front of the upper LM body 62, so that the LM rail It is arranged in parallel with (61), and the front is coupled to the rear of the alignment plate 41 so that the alignment block 4 is installed on the LM actuator so that it can move back and forth in the x-axis direction. Lastly, the reciprocating LM guide 64 is a means for stably guiding the lateral movement of the LM body 62 through the lateral transfer plate 63. As shown in FIGS. 4 to 7, the lateral transfer plate 63 ) and is mounted on the front of the gantry (3), extending long in the x-axis direction along the LM rail (61) so as to be interposed between the gantry (3) and the gantry (3). Accordingly, the reciprocating LM guide (64) consists of the lateral transfer plate (63), the alignment block (4) attached to the front of the lateral transfer plate (63), and the LM body (62) attached to the rear of the lateral transfer plate (63). It stably guides reciprocating movement in the x-axis direction.

The z-axis driving means 7 is a means for elevating the probe block 5 in the z-axis direction as above, and is installed on the alignment block 4 in the z-axis direction, as shown in FIGS. 3 to 7. . Therefore, as mentioned above, the z-axis driving means 7 has a fixed end fixed to the alignment block 4, that is, the alignment plate 41, and can be raised and lowered on the alignment plate 41 by this fixed end. It consists of a movable end that is mounted in a similar manner. As shown in FIG. 4, etc., the fixed end includes a lifting motor 72 mounted on the alignment plate 41, and the movable end is a transport that is raised and lowered by the rotation of the lifting motor 72. It includes a screw assembly (73) and a lifting plate (71) connected to the conveying screw assembly (73) through a conveying screw bracket (74).

In this way, the lifting plate 71 is mounted to be able to be lifted on the front of the alignment plate 41 through the LM guide 43 for lifting as mentioned above. However, as shown in FIG. 4, the z-axis driving means 7 is connected to the movable end, that is, the probe block, by the lower limit switch 76 mounted on the lower front of the manipulator 75 connected to the lower end of the lifting plate 71. It detects the bottom of (5), and as shown in FIG. 5, the upper limit switch (77) mounted on the front upper side of the alignment plate (41) detects the movable end, that is, the top of the probe block (5). .

The control unit 8 is a part that controls the operations of the various components described above and performs inspection on the inspection object P. As schematically shown in FIG. 3, various types of components are connected through the connecting means 9 to be described later. Connected to parts. Accordingly, the control unit 8 controls the reciprocating motion of the do.

The connecting means (9) is a means for electrically connecting various parts of the probe inspection device (1) such as the x-axis driving means (6), the z-axis driving means (7), and the probe 51 to the control unit (8). , As shown in FIGS. 3 and 4, the driving cable 91 connected to the x-axis driving means 6, the driving FPCB 92 connected to the z-axis driving means 7, and the probe 51 ) consists of a signal FPCB (93) connected to

At this time, as shown in Figures 3 to 6, the driving cable 91 has one end connected to the x-axis driving means 6, that is, to the LM rail 61 and the LM body 62, and the other end to the control unit Connected to 8). In addition, the connection means 9 may include an intermediary unit 94 as a kind of interface to electrically connect the driving FPCB 92 and the signal FPCB 93 to the control unit 8. Accordingly, as shown in FIG. 4, the mediation unit 94 is mounted on the upper surface of the gantry 3 by, for example, connecting the driving FPCB 92 to the connector 95 of the mediation unit, that is, the mediation PCB 94. It mediates the electrical connection between the z-axis driving means (7) and the probe (51) and the control unit (8). At this time, the mediation unit 94 is preferably an intermediate PCB as shown in FIG. 4 to easily connect the driving FPCB 92 and the signal FPCB 93.

Accordingly, one end of the driving FPCB 92 is connected to the z-axis driving means 7, that is, the lifting motor 72, etc., and the other end is connected to the mediation unit 94. Therefore, the driving FPCB (92) receives the lateral movement value signal of the alignment block (4) read by the scanner (44) or the z-axis driving means (7) by the upper limit switch (77) and lower limit switch (76). Various signals, such as a detection signal of the movable end or a control signal of the lifting motor 72 of the z-axis driving means 7, are transmitted and received with the control unit 8 through the mediation unit 94. Additionally, one end of the signal FPCB (93) is connected to the probe (51) and the other end is connected to the mediation unit (94). Accordingly, the signal FPCB 93 transmits and receives an inspection signal and a feedback signal between the control unit 8 and the probe 51 when the probe 51 is connected to the target point of the inspection object P.

Now, the operation of the probe inspection device 1 according to a preferred embodiment of the present invention will be described as follows.

As shown in FIG. 3, the probe inspection device 1 of the present invention moves forward when an inspection object P such as a display panel is placed on the base 2 for inspection. The probe block (5) is located above the contact point of the inspection object (P), that is, at the inspection standby position.

Subsequently, the x-axis driving means (6) operates at the position where the gantry (3) is lowered to the bottom dead center or in the same position, and moves each alignment block (4) independently to the inspection standby position to align it, if necessary. .

Next, when the z-axis driving means 7 operates to lower each probe block 5 to the inspection position, the probe 51 is lightly pressed while contacting the contact point of the inspection object P, followed by the control unit 8 ), for example, a control signal such as an RGB lighting signal is applied to the inspection object (P) through the probe 51, so that the inspection object (P) is finally inspected, and the inspection result is sent back to the control unit (8). Lose.

When the inspection is completed in this way, the entire equipment, including the probe 51, is returned to its original position in the reverse order as above, and thus the series of inspection processes for the inspection object (P) are completed. This inspection is performed using the x of the alignment block (4). Since the axial reciprocating movement is performed independently, inspection objects (P) of various design specifications can be inspected with one probe inspection device (1).

At this time, the x-axis driving means 6 exchanges operation signals with the control unit 8 through the driving cable 91 and receives power from the power supply unit. On the other hand, the alignment block 4 transmits the lateral movement value of the alignment block 4 to the control unit 8 by connecting the scanner 44 to the intermediate unit 94 through the driving FPCB 92. In addition, the z-axis driving means (7) has an upper limit switch (77) and a lower limit switch (76) connected to the mediation unit (94) and the control unit (8) through the driving FPCB (92), so that the z-axis driving means (7) ) The movable end, that is, the upper and lower dead center signal of the probe block (5), is transmitted to the control unit (8), and the lifting motor (72) is similarly connected to the mediation unit (94) through the driving FPCB (92) to the control unit (8) It controls the raising and lowering of the probe block (5).

Although the specific implementation of the present invention has been described above as an example, these are for illustrative purposes only and are not intended to limit the scope of protection of the present invention. It will be apparent to those skilled in the art that various substitutions, modifications, and changes can be made without departing from the technical spirit of the present invention.

1: Probe inspection device 2: Base
3: Gantry 4: Alignment block
5: Probe block 6: x-axis driving means
7: z-axis driving means 8: control unit
9: Connection means 41: Alignment plate
43: LM guide for lifting 44: scanner
45: scale 51: probe
61: LM rail 62: LM body
63: Lateral transfer plate 64: LM guide
71: Elevating plate 72: Elevating motor
73: Transfer screw assembly 76: Bottom limit switch
77: Top limit switch 91: Cable
92: FPCB for driving 93: FPCB for signals
94: Intermediary unit (intermediary PCB) P: Inspection object

Claims (8)

delete delete A base (2) forming a base to seat the inspection object (P) for inspection;
A gantry (3) installed on the base (2) in the x-axis direction along one side of the inspection object (P) to enable reciprocating movement in the y-axis direction forming a right angle to one side of the inspection object (P);
a plurality of alignment blocks (4) installed on the gantry (3) to enable reciprocal movement in the x-axis direction with respect to the inspection object (P);
The inspection object (P) is installed on the alignment block (4) so that it can be lifted and lowered in the z-axis direction with respect to the inspection object (P), and is lifted and lowered to contact the inspection object (P). Probe block for inspection (5);
x-axis driving means (6) installed on the gantry (3) in the x-axis direction to reciprocate the alignment block (4) in the x-axis direction;
Z-axis driving means (7) installed on the alignment block (4) in the z-axis direction to elevate and lower the probe block (5) in the z-axis direction;
A control unit (8) that controls the reciprocating movement of the and
It includes a connecting means (9) for electrically connecting the x-axis driving means (6), the z-axis driving means (7), and the probe (51) to the control unit (8),
The x-axis driving means (6) is an LM actuator,
The LM actuator,
an LM rail (61) formed by arranging a plurality of electromagnets in a row along the x-axis direction on the gantry (3);
an LM body (62) mounted on the LM rail (61) to reciprocate in the x-axis direction along the LM rail (61) by interaction between the built-in magnetic material and the electromagnet;
A lateral transfer plate 63 mounted on one side of the LM body 62 in parallel with the LM rail 61 to enable reciprocating movement of the alignment block 4 in the x-axis direction on the LM actuator; and
A reciprocating LM guide 64 that is mounted in the x-axis direction to be interposed between the lateral transfer plate 63 and the gantry 3 and guides the reciprocating movement of the lateral transfer plate 63 in the x-axis direction; A probe inspection device comprising: A base (2) forming a base to seat the inspection object (P) for inspection;
A gantry (3) installed on the base (2) in the x-axis direction along one side of the inspection object (P) to enable reciprocating movement in the y-axis direction forming a right angle to one side of the inspection object (P);
a plurality of alignment blocks (4) installed on the gantry (3) to enable reciprocal movement in the x-axis direction with respect to the inspection object (P);
The inspection object (P) is installed on the alignment block (4) so that it can be lifted and lowered in the z-axis direction with respect to the inspection object (P), and is lifted and lowered to contact the inspection object (P). Probe block for inspection (5);
x-axis driving means (6) installed on the gantry (3) in the x-axis direction to reciprocate the alignment block (4) in the x-axis direction;
Z-axis driving means (7) installed on the alignment block (4) in the z-axis direction to elevate and lower the probe block (5) in the z-axis direction;
a control unit (8) that controls the reciprocating movement of the and
It includes a connection means (9) for electrically connecting the x-axis driving means (6), the z-axis driving means (7), and the probe (51) to the control unit (8),
The connecting means (9) mediates the electrical connection between at least one of the x-axis driving means (6), the z-axis driving means (7), and the probe 51 and the control unit (8). A probe inspection device comprising an intermediate part (94) mounted on the gantry (3). In claim 4,
The connection means (9) is a probe inspection device characterized in that it includes a driving FPCB (92) whose one end is connected to the z-axis driving means (7) and the other end is connected to the intermediate part (94). In claim 4,
The connection means (9) is a probe inspection device characterized in that it includes a signal FPCB (93) whose one end is connected to the probe (51) and the other end is connected to the intermediate part (94). In claim 5 or claim 6,
A probe inspection device, characterized in that the intermediary unit 94 is an intermediary PCB. delete

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