KR20100097810A - Apparatus for operating of prob pin in probing apparatus - Google Patents

Abstract

PURPOSE: An apparatus for driving probe pins in a probing device is provided to increase the precision of a test process by accurately measuring the circuit pattern pitch of liquid crystal display glass. CONSTITUTION: A main base plate(10) includes a glass positioning unit to fix a glass fixing stage. A block minute-adjusting unit(20) includes a mobile probe fixing block and finely adjusts the movement of the probe fixing block. A camera transferring unit(40) transfers an alignment camera. A display unit(80) displays the operation of the block minute-adjusting unit and the camera transferring unit.

Description

Probe pin drive of the probe device {APPARATUS FOR OPERATING OF PROB PIN IN PROBING APPARATUS}

The present invention relates to a probing device, which is an LCD inspection device for measuring and inspecting a circuit pattern of an LCD, and automatically adjusts a probe pin of the probing device to adjust a circuit pattern pitch of the LCD glass. Probe pins of the probing device not only increase the accuracy of measurement and test accurately, but also shorten the replacement time due to the change of the model of the LCD to improve productivity, and facilitate the user's convenience by using the probing device. It relates to a drive device.

In general, the probing device physically contacts the probe pin of the probing device to the circuit pattern of the LCD glass in an inspection process which is a final process of manufacturing an LCD product, and then applies an electrical signal from the tester to the PCB. It is an inspection device that outputs measurement data by measuring and inspecting glass circuit patterns.

1A and 1B, the probing device is provided with a base plate 1 at a lower side of the probing device 10, and a probe block mounting plate on an upper surface of the base plate 1. (3) is installed.

In the base plate 1, a glass fixing stage 2 on which the LCD glass is placed and fixed is mounted and transported, and the glass fixing stage 2 is installed to reciprocate up and down.

A plurality of probes positioned on the upper surface of the probe block mounting plate 3 to be in contact with the upper surface of the LCD glass and to measure and inspect the circuit pattern of the LCD glass to output measurement data to output the measurement data. The adjusting block 4 is fixedly coupled, and a probe pin 5 is provided at the bottom of each probe adjusting block 4 to be in contact with each circuit pattern.

Each probe adjusting block 4 is provided on the upper side and the right side of the probe block mounting plate 3 in the drawing so as to be located on the upper side and the right side of the LCD glass.

On the outer side of the upper surface of the base plate 1 is located above each probe adjusting block 4 as well as whether the probe pin 5 of each probe adjusting block 4 is in contact with each circuit pattern of the LCD glass. A plurality of cameras 6 to be confirmed is fixedly coupled.

The conventional probing device having the above-described structure seats and secures an LCD (LCD) glass to be measured and inspected on the upper surface of the glass fixing stage 2 of the probing device 10, and then fixes the glass to which the LCD glass is seated and fixed. The stage 2 is positioned below the probing device 10.

Then, the glass fixing stage 2 is located inside the base plate 1 and the probe block mounting plate 3 as well as on the upper side and the right side of the LCD glass seated and fixed to the glass fixing stage 2. There are a plurality of probe adjustment blocks 4 which are coupled to the mounting plate 3.

Then, using the camera 6 coupled to the base plate 1, that is, the probe pin 5 and the LCD glass of each probe adjusting block 4 while watching the image captured by the camera 6 on a monitor Find the correct position with the circuit pattern.

That is, the glass fixing stage 2 or the probe block mounting plate 3 is moved up, down, left and right by hand to move the LCD glass or the probe fixing block 4 to move the circuit pattern and the probe of the LCD glass. Position it correctly with the pin (5).

The probe pins 5 of the probe adjustment blocks 4 are in contact with the circuit patterns of the LCD glass after aligning the probe adjustment blocks 4 above the circuit patterns of the LCD glass in the above manner. Check with the camera to see if

At this time, if the circuit pattern of the LCD glass and each probe pin 5 is not in contact, the circuit pattern of the LCD glass and each probe pin 5 are in contact with each other while the glass fixing stage 2 is reciprocated up and down. Be sure to

As described above, the LCD glass fixed to the probing apparatus 10 is tested. That is, the probe pins 5 installed on the bottom surface of each probe fixing block 4 of the probing apparatus 10 are connected to the LCD glass. After physically contacting each circuit pattern, an electrical signal is applied from a tester to measure and inspect the LCD glass circuit pattern, and output the measured data.

However, in the conventional probing apparatus, when the model of the LCD glass is changed and the size and width of each circuit pattern of the LCD glass are changed, the position of the probe fixing block to which the probe pin is in contact with the circuit pattern of the LCD is coupled. It must be different.

Therefore, whenever the model of the LCD glass is changed, the probe block mounting plate to which the probe fixing block is coupled is separated from the base plate, and then the probe block mounting plate is manufactured to fit the changed model of the LCD glass, and the fabricated probe After mounting the block mounting plate to the base plate, the circuit pattern of the LCD glass should be measured and inspected.

As described above, according to the change of the model of the LCD glass, each component of the probing device, that is, the probe block mounting plate has to be manufactured to match the changed model, and it takes a long time to replace the newly manufactured probe block mounting plate. As a result, the productivity is lowered, and there are problems in that the operation of the probing device is difficult.

Also, the glass fixing stage or the probe block mounting plate of the probing device when positioning and aligning the probe adjusting block with each circuit pattern of the LCD glass or contacting the probe pin of each probe adjusting block with each circuit pattern. It is to be manually adjusted by moving up, down, left, and right directions to align the position of the probe adjustment block on each circuit pattern of the LCD glass accurately.

As described above, by manually moving the glass fixing stage and the probe block mounting plate to align each probe adjusting block with each circuit pattern of the LCD, it is difficult for the probe adjusting block and the probe pin to be aligned at the correct position. In the case of not properly aligned, since the measurement and inspection of the circuit pattern of the LCD glass is not made accurately, the accuracy of the test according to the measurement of the LCD glass circuit pattern is reduced, and accordingly, there is a problem of not obtaining accurate and reliable data accordingly. there was.

The present invention has been proposed to solve the problems in the prior art as described above, the probe adjustment block and the probe of the probe device to match the circuit pattern size and width of the LCD glass depending on the model of the LCD (LCD) glass By automatically adjusting the position of the pin, the probe adjustment block is correctly positioned and aligned according to the circuit pattern of the LCD, and the circuit pattern and each probe pin contact each other at the correct position. The purpose is to increase the precision of the test to obtain reliable data.

In addition, the present invention is to check whether the contact between the circuit pattern of the LCD and the probe pin of each probe adjustment block and whether the probe pin is correctly positioned in each circuit pattern through the alignment camera of the camera transfer unit, the circuit pattern If the center points of the probe pins do not coincide with each other, the block fine adjustment unit adjusts each probe adjustment block to move finely, so that the circuit pattern of the LCD glass can be measured more accurately as the probe pins are accurately positioned and contacted with the respective circuit patterns. Has a purpose

In addition, the present invention is to automatically move the probe adjustment block and the probe pin in the left and right directions according to the circuit pattern pitch of the LCD glass so that the probe pin of each probe adjustment block in contact with each circuit pattern of the LCD glass at the correct position. By doing so, the purpose of the present invention is to shorten the replacement time and productivity according to the change of the model of the LCD glass, and to improve the performance of the probing device and the user's convenience according to the use of the probing device.

The present invention for achieving the object as described above, in the probing device having a plurality of probe fixing block coupled to the probe pin on the lower surface to measure and inspect the circuit pattern of the LCD (LCD) glass, A main base plate installed at a lower side of a roving device, the main base plate having a glass position portion so that a glass fixing stage on which the LCD glass is mounted and transported is located inside; Each of the probe fixing blocks is provided on the upper side and one side of the main base plate so that the probe pins of the probe fixing blocks are located at the circuit pattern measuring position of the LCD glass. Block fine adjustment unit for finely adjusting the movement of the probe fixing block; Located on the front of each block fine adjustment unit and positioned above each probe fixing block moving along the circuit pattern, whether the probe pin is in contact with the circuit pattern, and the center point of the probe pin coincides with the center point of the circuit pattern. Camera transfer unit for reciprocating the alignment camera to confirm that; The probe pin driving device of the probing device, which is installed outside the main base plate, is configured to control and confirm the operation of the block fine adjustment unit and the camera transfer unit.

In another aspect, the present invention, the block fine adjustment unit, a block fixing base which is fixedly coupled to the upper surface of the main base plate, and a plurality of block fixing mounts which are located in front of the block fixing base and are respectively coupled to the rear surface of each probe fixing block; And a guide fixing block, which is a magnetic body coupled to a rear surface of each block fixing mount, and a front surface of the block fixing base, which is a position corresponding to a rear surface of each guide fixing block, to finely move the probe fixing blocks. A linear motor for moving each of the guide fixing blocks of the magnetic body to an electromagnetic force so as to adjust each of them, and each guide fixing unit coupled to the front surface of the block fixing base, which is above and below the rear surface of each of the guide fixing blocks, and moved by the linear motor. A plurality of el guiding the moving direction of the block and the probe fixing block And a first controller configured to be connected to each of the linear motor and the display unit and control the operation of each linear motor according to a signal sent from the display unit. Is provided.

In addition, the present invention, each of the guide fixing block is a probe of the probing apparatus, characterized in that the coupling position of the respective guide fixing blocks are alternately coupled to each other so as to be positioned in two rows alternately on the rear, the bottom of each block fixing mount. A pin drive is provided.

In another aspect, the present invention is provided with a probe pin driving device of the probe device, characterized in that the linear motor is formed in a pair so as to correspond to each guide fixing block coupled in a two-row form on the rear of each block fixing mount.

In another aspect, the present invention, the upper and lower portions of each guide fixing block to be moved while receiving the guide of the LM guide while sliding in engagement with the respective LM guide to guide the movement of each guide fixing block and probe fixing block Probe pin driving device of the probing device is characterized in that the guide block is coupled to each other.

In another aspect, the present invention, the L guide is coupled to the bottom surface of the block fixing base in the longitudinal direction, the probe fixing block coupled to the block fixing mount and the block fixing mount while sliding in engagement with the L guide on the lower side of the block fixing mount. Provided is a probe pin driving device of a probing device, characterized in that the LM guide block is coupled to guide the movement of.

In addition, the present invention, a linear scale for finely adjusting each linear motor is coupled to the front surface of the block fixing base between each linear motor to precisely move the block fixing mount reciprocated by each linear motor in microns. Provided is a probe pin drive of a probing device.

In another aspect, the present invention, the camera transfer unit is installed on the front surface of each block fine adjustment unit and coupled to the camera transfer fixed base coupled to the upper surface of the main base plate, the camera transfer fixed base is coupled to the front side of the camera transfer fixed base to the power applied from the outside A rotation motor that generates rotational force by the rotational motor, and a rotational rotational shaft coupled to the rotational motor and rotatably installed on the front surface of the camera transport fixing base to rotate in the forward and reverse directions by the rotational force of the rotational motor, and the rotational motor. And a second controller connected to the display unit and controlling the operation of the rotary motor according to a signal sent from the display unit, and movably coupled to the feed rotation shaft to reciprocate in the rotation direction of the feed rotation shaft. A camera holder having a shaft hole into which a feed shaft is inserted, and A camera transfer guide part installed at an upper side of the mera transport fixing base and slidably inserted into a guide groove formed at a rear surface of the camera holder to guide the movement of the camera holder; and an LCD glass on the front of the camera holder. Probe of the probe is configured to check whether the contact between the circuit pattern and the probe pin of each probe fixing block, the center point of the probe pin and the center point of the circuit pattern coincide, and the alignment camera for measuring the pitch between the circuit patterns A pin drive is provided.

In another aspect, the present invention, the first support protrusion having an insertion hole through which one side of the feed rotation shaft is axially coupled so that one end of the feed rotation shaft is axially coupled to the rotation motor on the front side of the camera feed fixing base, the camera feed fixed base Probe pin driving device of the probing device is provided on the other side of the front of the protruding device, characterized in that the second support protrusion having an insertion groove which is rotatably inserted and coupled to the other end of the feed shaft.

In another aspect, the present invention provides a probe pin driving device of a probe device, characterized in that a male thread is formed on the outer circumferential surface of the feed rotation shaft, and a female thread is formed on the inner circumferential surface of the shaft of the camera fixture.

In another aspect, the present invention is provided with a probe pin driving device of the probe device, characterized in that the graduation portion engraved with the scale dimension is installed on the upper surface of the camera transfer fixing base to confirm the moving distance of the alignment camera from the outside.

According to the present invention made as described above, a linear motor and a linear scale for automatically fine-adjusting the position of the probe adjusting block and the probe pin of the probing device, and the alignment camera position of the probing device By configuring a camera transfer unit equipped with a rotation motor and a feed rotation shaft to move, if the model of the LCD glass is changed, that is, the circuit pattern size and width of the LCD glass are changed, each of the probe adjustment blocks is applied to the linear motor and the linear scale. As it moves by, it is automatically adjusted to be located above the circuit pattern of the LCD glass.

In addition, through the alignment camera moved by the camera transfer unit to check whether the contact between the probe pin of each probe adjusting block and the circuit pattern of the LCD and whether the center point of the probe pin and the center point of the circuit pattern coincide. .

At this time, if the center point of the probe pin and the center point of the circuit pattern does not match, check through the alignment camera to drive the linear motor and the linear scale by the value of the probe pin and the circuit pattern is misaligned to each of the probe adjustment block Since the probe pin is brought into contact with the circuit pattern at the correct position, there is an effect of accurately measuring the circuit pattern.

That is, even if the size and width of each circuit pattern of the LCD glass due to various models of the LCD glass are changed, the probing device may determine whether each circuit pattern of the LCD glass is in contact with the probe pin of the probe adjusting block and whether the probe adjusting block By checking the position through the alignment camera and finely automatically adjusting the movement of each probe adjusting block so that each probe pin is in contact with each circuit pattern at the correct position, even if the model of the LC D glass is changed, In addition to measuring and inspecting each circuit pattern more accurately, there is an effect of obtaining accurate and reliable data by increasing the accuracy of the test according to the measurement of each circuit pattern.

In addition, there is an effect of accurately measuring the circuit pattern of the LCD of the various models without replacing the main base plate and the glass fixing stage of the probing device or each probe adjustment block.

That is, even when the model of the LCD is changed and the circuit pattern size and width of the LCD is changed, the probe adjusting block and the probe pin of the probing device are moved left and right to match the circuit pattern of the LCD. By aligning and contacting the probe pins in the correct position with the pattern, the LCD glass not only shortens the replacement time of the LCD glass according to the model change of the LCD glass, but also measures and inspects the pattern of the LCD glass in a faster time. It also has the effect of improving productivity by reducing the time for production and processing.

On the other hand, in order to measure and inspect the circuit pattern of the LCD glass, the probe adjusting block and the alignment camera of the probing device are automatically adjusted by the linear motor and the rotating motor, and the moving distance is precisely adjusted so that the circuit pattern of the LCD glass is precisely adjusted. Measurement and inspection of is made easier and more smoothly, thereby improving the performance of the probe device.

Also, even when the model of the LCD glass is changed, the probe adjusting block of the probing device is automatically adjusted to be aligned at the correct position, and the probe pin of the probe adjusting block is in contact with the circuit pattern of the LCD glass at the correct position. Accordingly, there is an effect to facilitate the user according to the use of the probe device.

Hereinafter, the probe pin driving apparatus of the probing apparatus according to the present invention will be described in more detail with reference to FIGS. 2 to 8.

Figure 2 is a perspective view showing the structure of the present invention the probe device, Figure 3 is a plan view showing a state in which the LCD glass is conveyed to the present invention the probing device in a plan view, Figure 4 is the LCD device is transferred to the present probe device 5 is a perspective view showing the structure of the block fine adjustment unit of the present probe device, Figure 6 is a block fixing mounting in which the probe fixing block is coupled to the block fixing base in the block fine adjustment unit of the present invention 7 is a perspective view showing the coupled state of the camera conveying unit structure of the present invention, the present invention, Figure 8 is a perspective view showing the state that the probe pin is located on the circuit pattern of the LCD glass in the present invention. Drawing.

The present invention is provided with a probing apparatus 100 for measuring and inspecting a circuit pattern 71 of an LCD glass 70.

As shown in FIG. 2, the probing device 100 includes a main base plate 10, a block fine adjustment unit 20, a probe fixing block 30, a probe pin 31, and a camera transfer unit. 40, the alignment camera 50, the glass fixing stage 60 to which the LCD glass 70 is mounted, and the display part 80 etc. are comprised large.

That is, the probing device 100 is provided with a main base plate 10 on which the glass fixing stage 60 to which the LCD glass 70 is mounted and transported is installed, and the main base plate 10 has an LCD glass. A plurality of probe fixing blocks 30 coupled to the lower surface of the probe pin 31 for measuring the circuit pattern 71 of 70 may be installed to reciprocate, and the reciprocating movement of each probe fixing block 30 may be performed. Block fine adjustment unit 20 for fine adjustment is provided, and the main base plate 10 has contact between the probe pin 31 and the circuit pattern 71 and the center point and the circuit pattern of the probe pin 31. An alignment camera 50 for checking and measuring whether the center points of 71 coincide with each other is provided, and a camera transfer part 40 for reciprocating the alignment camera 50 is provided, and the main base plate 10 is provided. Outside of Wherein the block fine adjustment section 20 and the camera display unit 80 to so as to control and verify the operation of the transport unit 40 is fitted.

As shown in FIG. 2, the main base plate 10 is installed at the lower side of the probing device 100 such that various configurations of the block fine adjustment unit 20 and the camera transfer unit 40 are positioned and installed and fixed. have.

3 and 4, the glass fixing stage 60, that is, the LCD glass 70, which is transferred to the probing device 100, is placed on the upper surface of the main base plate 10. The glass position part 11 in which the glass fixing stage 60 to be mounted and transported is located is formed through.

The probe fixing block 30 is provided above the main base plate 10 as well as a plurality of probe fixing blocks to be positioned above the circuit pattern 71 side of the LCD glass 70. Probe pins 31 that are in contact with the circuit patterns 71 of the LCD glass 70 to measure and inspect the circuit patterns 71 are coupled to the lower surface of the 30.

About 700 probe pins 31 are attached to each probe fixing block 30, and the width a of the circuit pattern 71 of the LCD glass 70 is formed within 20 micrometers.

Therefore, as shown in FIG. 8, the width b of the probe fixing block 30, which is in contact with the circuit pattern 71, that is, the width of the probe pin 31 may also be manufactured within 20 microns so that the probe pin 31 and the circuit may be formed. The pattern 71 is in contact with at least 70% or more.

2 and 5, the block fine adjustment unit 20 is located on the upper side and one side of the upper surface of the main base plate 10, as well as coupled to the upper side and one side of the main base plate 10, respectively. It is fixed.

The block fine adjustment unit 20 reciprocates the probe fixing blocks 30 together with the probes of the probe fixing blocks 30 to measure and inspect the circuit patterns 71 of the LCD glass 70. To finely adjust the reciprocating movement of each probe fixing block 30 so that the pin 31 is positioned at the correct measurement position of the circuit pattern 71.

As shown in FIGS. 5 and 6, the block fine adjustment unit 20 has a block fixing base 21 for fixing and fixing various configurations of the block fine adjustment unit 20 to the upper surface of the main base plate 10. It is.

A plurality of block fixing mounts 32 are respectively coupled to the rear surface of each probe fixing block 30 so as to be located in front of the block fixing base 21 and reciprocate to the left and right surfaces of the block fixing base 21. On the rear surface of each of the block fixing mounts 32, magnetic guide fixing blocks 33 are coupled to each other.

The guide fixing blocks 33 are positioned and arranged in two rows alternately on the rear and bottom of each of the block fixing mounts 32 so as to prevent interference between the guide fixing blocks 33. Coupling positions of the guide fixing blocks 33 are alternately coupled to the rear of each block fixing mount 32.

A linear motor 22 is coupled to the front surface of the block fixing base 21 to move each of the guide fixing blocks 33, which are magnetic materials, with an electromagnetic force to finely adjust the movement of each probe fixing block 30. In addition, the linear motor 22 is formed in a pair so as to correspond to each guide fixing block 33 positioned and arranged in two rows on the rear surface of each block fixing mount 32.

That is, since the guide fixing block 33 is coupled in two rows on the rear surface of the block fixing mount 32 to which the probe fixing block 30 is coupled, each of the guide fixing block 33 and the block fixing mount 33 And the linear motor 22 for moving the probe fixing block 30 form a pair on the front and the bottom of the block fixing base 21 which are positions corresponding to the rear surfaces of the guide fixing blocks 33. Each combined.

Each of the linear motors 22 and the display unit 80 is connected to each of the linear motors 22 and the display unit 80 to each other in accordance with the signal sent from the display unit 80, each linear motor 22 The first controller 23 is installed to control the operation of.

On the front of the block fixing base 21, a plurality of LM guides 24 for guiding the moving direction of each of the guide fixing block 33 and the probe fixing block 30 reciprocating by the linear motor 22 is Are combined.

In addition, the upper and lower sides of the guide fixing blocks 33 respectively guide the movements of the guide fixing blocks 33 and the probe fixing blocks 30 to the positions corresponding to the respective LM guides 24. The LM guide blocks 34 sliding in engagement with the LM guide 24 are coupled to each other.

That is, the plurality of LM guides 24 are coupled to the block fixing base 21 on the rear and lower sides of the guide fixing blocks 33 and the positions corresponding to the LM guides 24. Since the LM guide block 34 is coupled to the upper and lower sides of the guide fixing block 33, the LM guide blocks 34 are engaged with the LM guides 24, respectively. As the guide guide block 34 is slid, the guide fixing block 33 and the probe fixing block 30 reciprocating in the left and right directions of the block fixing base 21 are guided.

The LM guide 24 is coupled to the front of the block fixing base 21 and the LM guide block 24 is coupled to the rear of each guide fixing block 33 as well as the The L guide 24 is also coupled to the bottom of the block fixing base 21 in the longitudinal direction, and the L guide 24 coupled to the bottom of the block fixing base 21 also at the lower side of the block fixing mount 32. LM at a position corresponding to the LM guide 24 to slide in the engaged state and guide the reciprocating direction of the block fixing mount 32 and the probe fixing block 30 coupled to the block fixing mount 32. Guide block 34 is coupled.

On the other hand, the front of the block fixing base 21 in order to more precisely move the block fixing mount 32 and the probe fixing block 30 reciprocating by the linear motor 22, the block fixing mount 32 And the linear motor (22) to precisely move the movement of the block fixing mount 32 and the probe fixing block 30 in micron units by receiving the insufficient value of the linear motor 22 for moving the probe fixing block 30. The linear scale 25 which adjusts the linear motor 22 is coupled so that 22 may be operated more to match the insufficient value, and the linear scale 25 has more adjustment of the linear motor 22. It is positioned and coupled between each of the linear motors 22 in order to be efficient.

As shown in FIG. 2, the camera transfer part 40 includes the circuit pattern 71 of the LCD glass 70 mounted on the glass fixing stage 60 and the probe pins 31 of the probe fixing blocks 30. Alignment camera 50 for checking whether the contact and the center point of the circuit pattern 71 of the LCD glass 70 and the center point of the probe pin 31 coincide with each other is installed Of course, the alignment camera 50 is coupled to the upper side and one side of the upper surface of the main base plate 10 so that the alignment camera 50 is located above the respective probe fixing blocks 30, as well as the front surface of the fine adjustment unit 20 of each block. Located in the location.

2 and 7, the camera transfer unit 40 is installed to be positioned in front of each of the block fine adjustment units 20, and the camera transfer fixed base is disposed on the upper and upper sides of the main base plate 10. (41) are respectively coupled.

On one side of the front surface of the camera transfer fixing base 41 is provided with a rotation motor 42 coupled to generate a rotational force by the power applied from the outside, the rotation between the rotation motor 42 and the display unit 80 A second controller 43 is installed in which the motor 42 and the display unit 80 are connected to each other so as to control the operation of the rotary motor 42 according to a signal sent from the display unit 80.

A pair of support protrusions 48 and 49 protrude from the front surface of the camera feed fixing base 41, that is, a first support having an insertion hole 48a at a front surface of the camera feed fixing base 41. A protrusion 48 is formed to protrude, and a second support protrusion 49 having an insertion groove 49a is formed to protrude from the front side of the camera feed fixing base 41.

Rotation is provided on the front of the camera transfer fixed base 41, the feed rotation shaft 44 for reciprocating the alignment camera 50 while rotating in the forward and reverse directions by the rotational force of the rotary motor 42 is the rotation It is axially coupled to the motor 42.

That is, one end of the feed rotation shaft 44 protrudes outward from the insertion and support protrusion 48 so as to pass through the insertion hole 48a of the first support protrusion 48 of the camera feed fixing base 41. 42 and the other end of the feed rotation shaft 44 is rotatably inserted into the insertion groove 49a of the second support protrusion 49 so that the feed rotates by the rotation motor 42. The rotating shaft 44 is coupled to the front surface of the camera feed fixing base 41.

The alignment camera 50 has an upper surface such that the alignment camera 50 reciprocates along the direction of rotation of the feeding rotation shaft 44 rotated by the rotational force of the rotation motor 42. Coupling fixed camera holder 45 is movably coupled.

The camera holder 45 is formed with a shaft hole (45a) is inserted into the feed shaft (44), the inner thread surface of the shaft hole (45a) is formed with a female thread, the outer peripheral surface of the feed shaft 44 to rotate the feed The male screw thread which engages with the female thread of the said shaft hole 45a is formed by the rotating shaft 44 so that the camera stand 45 may reciprocate.

A guide groove 45b is formed at a rear surface of the camera holder 45, and an upper side of the camera transport fixing base 41 is slidable to the guide groove 45b to guide the reciprocating movement of the camera holder 45. Camera transfer guide portion 46 is inserted is coupled.

On the upper surface of the camera feed fixing base 41, the movement distance of the alignment camera 50 coupled to the camera holder 45 reciprocating along the feed rotating shaft 44 rotated by the rotary motor 42 from the outside The scale portion 47 is provided with engraved scale dimensions so that the naked eye can check.

Outside of the main base plate 10 is connected to the first and second controllers 23 and 43 to block fine adjustment unit 20 of the probing device 100 such as the linear motor 22 and the rotating motor 42. And a display unit 80 for controlling the operation of various devices such as the camera transfer unit 40 and checking the operation state of the probing apparatus 100 from the outside, and the display unit 80 is a computer. I consist of system PC.

Referring to the operation of the present invention configured as described above are as follows.

First, the LCD glass 70 to be measured and inspected is mounted on the upper surface of the glass fixing stage 60, and then the glass fixing stage 60 on which the LCD glass 70 is mounted is transferred to a probing device. It is positioned in the glass position portion 11 of the main base plate 10 of (100).

In addition, the glass fixing stage 60 is moved upwardly of the probing device 100 so that the circuit pattern 71 of the LCD glass 70 and the lower surface of the probe fixing block 30 of the probing device 100 are moved. Contact with the probe pin 31 coupled to it.

The camera transfer part 40 checks whether the circuit pattern 71 of the LCD glass 70 is in contact with the probe pin 31 and whether the center point of the circuit pattern 71 coincides with the center point of the probe pin 31. Check using the aligned camera 50.

The image photographed by the alignment camera 50 is sent to the display unit 80 so that the probe pin 31 contacts the circuit pattern 71 at the correct position while viewing the image photographed through the display unit 80. If the probe pin 31 is in contact with the circuit pattern 71 at the correct position, the probing device 100 applies an electrical signal to the circuit pattern 71 of the LCD glass 70. Measure and check and output the measured data.

If the circuit pattern 71 and the probe pin 31 are not in contact with each other, or the center point of the circuit pattern 71 and the probe pin 31 do not coincide with each other, the alignment camera 50 is connected to the alignment camera 50. After confirming this, the linear pattern 22 of the block fine adjustment unit 20 of the probing apparatus 100 is driven to drive the linear motor 22 and the linear scale 25 to finely move the probe fixing block 30 to the circuit pattern. Correctly position and contact the probe pin 31 to 71 and confirm it again with the alignment camera 50.

Thus, the probe fixing block 30 is moved as well as continuously checked by the alignment camera 50 until the circuit pattern 71 and the probe pin 31 are contacted at the correct positions.

Here, when the model of the LCD glass 70 measured and inspected by the probing device 100 is changed and the size and width of the circuit pattern 71 of the LCD glass 70 are changed, the probing device 100 The center point of the probe pin 31 and the center point of the circuit pattern 71 as shown in FIG. 8 by using the vision program installed in the block fine adjustment unit 20, the camera transfer unit 40, and the display unit 80 of FIG. The probe fixing block 30 and the probe pin 31 are moved so that the probe pin 31 and the circuit pattern 71 contact each other at the correct position.

When the operation state of the probing device 100 is described according to the model of the LCD glass 70, power is applied to the probing device 100 so that the LCD glass 70 is positioned as the probing device 100. And the block fine adjustment unit 20 and the camera transfer unit 40 operate according to the vision program installed in the display unit 80.

That is, the linear motor 22 coupled to the front surface of the block fixing base 21 of the block fine adjustment unit 20 is operated according to the control signal of the first controller 23 receiving the signal set in the display unit 80. In addition, an electromagnetic force is generated between the actuated linear motor 22 and the guide fixing block 33 which is a magnetic body coupled to the rear surface of the block fixing mount 32 to which the probe fixing block 30 is coupled.

The LM guide block 34 coupled to the lower side and the rear side of the guide fixing block 33 by the generated electromagnetic force moves while sliding along the LM guide 24 installed on the front of the block fixing base 21. .

In addition, the guide fixing block 33, that is, each probe fixing block 30 is also reciprocated in the left and right directions of the block fixing base 21, and each of the probe pins 31 also each probe fixing block While reciprocating with 30, the circuit pattern 71 of the LCD glass 70 is placed in a position for measuring.

At this time, since the linear scale 25 is coupled to the block fixing base 21, the linear scale 25 receives a value insufficient for reciprocating movement of each probe fixing block 30 by the linear motor 22 alone. Adjust the linear motor 22 to operate more to meet the lacking values transmitted.

Then, the linear motor 22 moves each probe fixing block 30 precisely and finely in micron units according to the adjustment of the linear scale 25. Since the center point of 31 and the center point of the circuit pattern 71 coincide with each other, the probe pin 31 and the circuit pattern 71 contact each other at the correct position to be measured.

On the other hand, as described above, whether the contact between the circuit pattern 71 and each probe pin 31, the center point of the circuit pattern 71 and the center point of each probe pin 31 is not matched with the camera It can be confirmed through the image taken by the alignment camera 50 installed in the transfer unit 40.

Referring to the operation of the alignment camera 50, the front of the transfer fixing base 41 of the camera transfer unit 40 is operated in accordance with the second controller 43 received a signal set in the display unit 80 The rotary motor 42 and the feed rotation shaft 44 is formed with a male thread on the outer circumferential surface rotated by the rotational force of the rotary motor 42 is coupled.

In addition, the feed rotation shaft 44 is coupled to the feed rotation shaft 44 in a reciprocating manner as well as the camera holder 45 coupled to the alignment camera 50 is coupled to the signal of the second controller 43 Accordingly, the rotation motor 42 is driven and the feed rotation shaft 44 is rotated at the same time, so that the camera holder 45 is connected to the camera feed guide 46 and the guide groove 45b according to the rotation direction of the feed rotation shaft 44. It is guided by it and moves in the left and right directions.

When the camera holder 45 moving in the left and right direction is positioned above the probe fixing block 30, the alignment camera 50 of the camera holder 45 may have the probe pin 31 and the circuit pattern 71. ) And whether the center point of the probe pin 31 and the center point of the circuit pattern 71 coincide with each other and send the measured value to the display unit 80. While watching the video or signal sent out to check the contact and whether the center point coincides.

If the center point of the probe pin 31 and the center point of the circuit pattern 71 coincide with each other and the circuit pattern 71 is in contact with the probe pin 31 at the correct position, the probing device 100 may control the LCD. After measuring and inspecting the circuit pattern 71 of the glass 70, the measured data are output.

However, if the center point of the probe pin 31 and the center point of the circuit pattern 71 do not coincide or the probe pin 31 and the circuit pattern 71 are not in contact with each other, the display of the probing device 100 The unit 80 moves the probe fixing block 30 finely by operating the linear motor 22 and the linear scale 25 to move the probe fixing block 30 by the error value of the center point. The center of the probe pin 31 and the center point of the circuit pattern 71 are exactly matched by the probe fixing block 30 which is moved in a smooth manner, and the probe pin 31 contacts the circuit pattern 71 at the correct position. When the circuit pattern 71 of the LCD glass 70 is measured and inspected.

As described above, whether the center point of the probe pin 31 coincides with the center point of the circuit pattern 71, the probe fixing block is checked through the image confirmed by the alignment camera 50 and confirmed by the display unit 80. (30) is precisely and finely moved in units of microns to confirm with the alignment camera 50 and the respective probe fixing blocks until the center point of the probe pin 31 and the center point of the circuit pattern 71 are exactly the same. Automatically adjust 30 to move finely.

Here, the method for matching the center point of the circuit pattern 71 of the LCD glass 70 and the center point of the probe pin 31 of the probe fixing block 30 will be described. The image file in which the center point of the circuit pattern 71 of the LCD glass 70 and the center point of the probe pin 31 of the probe fixing block 30 coincide with the display unit 80 of the 100.

Then, when the linear motor 22 and the linear scale 25 of the block fine adjustment unit 20 are operated, the probe fixing block 30 is moved and positioned above the LCD glass 70, and the alignment is performed. The camera 50 moves to the measurement position, that is, the position input to the display unit 80, by the rotary motor 42.

The alignment camera 50 photographs an actual image file at which the circuit pattern 71 of the LCD glass 70 and the probe pin 31 of the probe fixing block 30 are located at the input position.

The image file photographed by the alignment camera 50 is sent to the display unit 80, and the display unit 80 compares the photographed image file with the registered image file to determine the center point of the circuit pattern 71 and the Check that the center point of the probe pin 31 coincides.

In this case, if the center point of the circuit pattern 71 and the center point of the probe pin 31 do not coincide with each other, the linear motor 22 is calculated by the calculated error value by calculating an error value between the input image file and the photographed image file. ) And the linear scale 25 are automatically adjusted to finely move the probe holding block 30 in microns.

Thus, the center point of the probe pin 31 of the probe fixing block 30 and the center point of the circuit pattern 71 coincide with each other, that is, whether the center point of the probe pin 31 coincides with the center point of the circuit pattern 71. This can be checked by checking whether the image file photographed by the alignment camera 50 matches the registered image file.

On the other hand, whether the probe pin 31 is positioned at the correct position on the circuit pattern 71, the fine movement of the probe fixing block 30, or the error value calculation and comparison between the registered image file and the photographed image file, etc. The alignment camera 50 and the display unit 80 is automatically implemented using the vision program.

As described above, the probe fixing block 30 is automatically adjusted to move finely by the linear motor 22 and the linear scale 25 of the block fine adjustment unit 20 and the camera transfer unit 40 The alignment camera 50 photographs the image file by photographing the center point of each circuit pattern 71 and the center point of each probe pin 31 and whether the probe pin 31 is in contact with the circuit pattern 71. And the registered image file on the display unit 80, as well as to calculate the error value to move the probe fixing block 30 by the error value of the center point of the probe pin 31 and the circuit pattern 71 Since the center point is in contact with each other at the correct and correct position, the probing device 100 more accurately measures and inspects the circuit pattern 71 of the LCD glass 70 and then outputs the measured data.

Therefore, even if the model of the LCD glass 70 is changed or the size and width of each circuit pattern 71 is changed in the LCD glass 70 of the changed model, the block fine adjustment unit 20 and the camera transfer unit 40 are not included. By checking whether each probe fixing block 30 is finely moved and placed at the correct position, the probing device 100 may obtain a more accurate measurement value.

The probe pin driving device of the probing device 100 can be applied to various fields, such as those that can be used if there is a similar product used for TFT pattern inspection.

As described above, the probe pin driving device of the above-described probing device according to the present invention has been described with reference to the illustrated drawings. Various modifications may be made by those skilled in the art and thus should not be individually understood from the technical spirit or the prospect of the present invention.

1A is a plan view schematically showing a general probing device in a plan view;

1B is a side view schematically showing the probing device from the side;

Figure 2 is a perspective view showing the structure of the present probe device.

Figure 3 is a plan view showing a state that the LCD glass is transferred to the present invention the probe device.

Figure 4 is a front view showing a state in which the LCD glass is transferred to the present invention the probe device.

Figure 5 is a perspective view showing the structure of the block fine adjustment unit of the present probe device.

Figure 6 is a perspective view from the bottom showing a state in which the block fixing mounting is coupled to the fixed block of the probe fixing block in the block fine adjustment unit of the present invention.

Figure 7 is a perspective view showing the structure of the camera transfer unit of the present probe device.

8 is a view showing a state in which the probe pin is located in the circuit pattern of the LCD in the present invention the probe device.

Explanation of symbols on the main parts of the drawings

10: main base plate 20: block fine adjustment

21: block fixing base 22: linear motor

23: 1st controller 24: LM guide

25: linear scale 30: probe holding block

31: probe pin 32: block retention mount

33: guide fixing block 34: LM guide block

40: camera transfer part 41: transfer fixed base

42: rotary motor 43: second controller

44: feed axis 45: camera holder

46: camera transfer guide portion 47: graduation portion

50: alignment camera 60: glass fixed stage

70: LCD glass 71: circuit pattern

80: display unit 100: probe device

Claims (11)

In the probing device having a plurality of probe fixing block coupled to the probe pin on the lower surface to measure and inspect the circuit pattern of the LCD (LCD) glass, A main base plate installed at a lower side of the probing apparatus, the main base plate having a glass position portion such that the glass fixing stage on which the LCD glass is mounted, mounted and transported is located inside; Each of the probe fixing blocks is provided on the upper side and one side of the main base plate so that the probe pins of the probe fixing blocks are located at the circuit pattern measuring position of the LCD glass. Block fine adjustment unit for finely adjusting the movement of the probe fixing block; Located on the front of each block fine adjustment unit, respectively located above the probe fixing block moving along the circuit pattern, whether the probe pin is in contact with the circuit pattern, and the center point of the probe pin and the center point of the circuit pattern Camera transfer unit for reciprocating the alignment camera to check whether the match; And a display unit installed outside the main base plate to control and confirm operations of the block fine adjustment unit and the camera transfer unit. The method of claim 1, Block fine adjustment unit, Block fixing base which is fixed to the upper surface of the main base plate, A plurality of block fixing mounts which are located in front of the block fixing base and are respectively coupled to a rear surface of each probe fixing block; A guide fixing block which is a magnetic body coupled to the rear of each block fixing mount, A linear motor coupled to a front surface of the block fixing base, which is a position corresponding to a rear surface of each guide fixing block, to move each guide fixing block of the magnetic body to an electromagnetic force to finely adjust the movement of each probe fixing block; A plurality of LM guides coupled to the front surface of the block fixing base on the rear and lower sides of the guide fixing blocks to guide the moving directions of the guide fixing blocks and the probe fixing blocks moved by the linear motor; And a first controller connected to each of the linear motors and the display unit and configured to control the operation of each of the linear motors according to a signal sent from the display unit. The method of claim 2, Each guide fixing block is a probe pin driving device of the probing device, characterized in that the coupling positions of the guide fixing blocks are alternately coupled to each other so as to be positioned in two rows alternately on the rear and bottom of each block fixing mount. The method according to claim 2 or 3, The linear motor is a pair of probe pin driving device of the probing device, characterized in that the pair is made to correspond to each guide fixing block coupled in a two-row form on the rear of each block fixing mount. The method of claim 2, On the lower and rear sides of each guide fixing block that moves while being guided by each of the LM guides, the LM guide blocks are slid in engagement with the LM guides to guide the movement of the guide fixing blocks and the probe fixing blocks. Probe pin drive of the probing device, characterized in that. The method of claim 2, The L guide is coupled to the bottom of the block fixing base in the longitudinal direction, and the lower side of the block fixing mount slides in engagement with the L guide to guide the movement of the probe fixing block coupled to the block fixing mount and the block fixing mount. Probe pin driving device of the probing device characterized in that the LM guide block is coupled. The method of claim 2, A linear scale for finely adjusting each linear motor is coupled to the front surface of the block fixing base between each linear motor to precisely move the block fixing mount reciprocated by each linear motor in microns. Probe pin drive of the roving device. The method of claim 1, Camera transfer unit, A camera feed fixing base installed at the front of each block fine adjusting unit and coupled to an upper surface of the main base plate; A rotating motor coupled to one side of the front surface of the camera transport fixing base and generating rotational force by a power applied from the outside; A feed rotation shaft which is axially coupled to the rotation motor and rotatably installed on the front surface of the camera transport fixing base to rotate in a forward and reverse direction by a rotation force of the rotation motor; A second controller connected to the rotary motor and the display unit and controlling the operation of the rotary motor according to a signal sent from the display unit; A camera holder having a shaft hole movably coupled to the feed rotation shaft to insert the feed rotation shaft to reciprocate according to the rotation direction of the feed rotation shaft; A camera transfer guide unit installed at an upper side of the camera transfer fixing base and slidably inserted into a guide groove formed at a rear surface of the camera holder to guide the movement of the camera holder; Probe of the probe is configured on the front of the camera fixture is configured to check whether the circuit pattern of the LCD glass and the probe pin of each probe fixing block, and whether the center point of the probe pin and the center point of the circuit pattern coincide Pin drive. The method of claim 8, A first support protrusion having an insertion hole through which one side of the feed rotation shaft penetrates is formed on one side of the front surface of the camera feed fixing base so as to be axially coupled to the rotating motor, and the feed surface is provided on the other side of the front surface of the camera feed fixing base. Probe pin driving device of the probing device, characterized in that the second supporting protrusion having an insertion groove is rotatably inserted into the other end of the rotating shaft. The method of claim 8, A male screw thread is formed on an outer circumferential surface of the feed shaft, and a female thread thread is formed on an inner circumferential surface of the shaft hole of the camera fixture to engage with the male thread. The method of claim 8, Probe pin driving device of the probing device, characterized in that the upper surface of the camera transfer fixing base is provided with a graduation portion engraved with a graduation dimension to check the moving distance of the alignment camera from the outside.

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