CN100357752C - Line defect detection maintenance equipment and method - Google Patents
Line defect detection maintenance equipment and method Download PDFInfo
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- CN100357752C CN100357752C CNB2004100313356A CN200410031335A CN100357752C CN 100357752 C CN100357752 C CN 100357752C CN B2004100313356 A CNB2004100313356 A CN B2004100313356A CN 200410031335 A CN200410031335 A CN 200410031335A CN 100357752 C CN100357752 C CN 100357752C
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Abstract
The present invention relates to making equipment for an LCD, particularly to equipment simultaneously having the functions of detecting line defects on a glass substrate and repairing line defects by laser. The making equipment comprises a bottom seat of a machine table, a substrate bearing table used for placing and bearing a glass substrate, a contact probe detecting module with a contact probe and a contact probe driving system, a non-contact type detecting module with a non-contact type sensor and a non-contact detection driving system, and a laser repairing module which has a laser repairing head and a laser repairing driving system and is capable of repairing the line defects of the glass substrate. The present invention also relates to a method for detecting and repairing the line defects of the glass substrate.
Description
[technical field]
The present invention relates to a kind of process apparatus of LCD, particularly this equipment possess simultaneously that the glass substrate line defct detects and with the function of this line defct of laser preparing to improve production capacity, reduce fraction defective and save the dust free room space.
[prior art]
Please refer to Fig. 1 and Fig. 2, display panels is behind matrix processing procedure (Array process), on glass substrate 10, can form as rectangular metallic circuit, comprise data line (being source electrode line) 11 and scanning linear 12 etc., the normal bad defective that is short-circuited (Shortdefect) 30 between line and the line because of processing procedure, or line defct such as open circuit defect (Open defect) 20, the processing procedure worker who detects the bad defective of this kind circuit stands generally to practise and claims open circuit/short-circuit detecting machine (Open/Short Inspectionmachine), its detection mode can be divided into non-contact detection and contact usually and detect, non-contact detection generally includes two contactless sensors 13,14, its form can be electrostatic capacitance manifold type (Electrostatic Capacitory Coupling style), wherein a sensor is a signal output end, another sensor is the signal receiving end, and sensor is pressed close to about 100 microns of glass substrate distance during running; Line defct inspection with glass substrate source electrode line (Source line) is an example, two sensors can be checked out earlier the line defct line position (line position) at circuit defect point place with moved further, it is motionless that the sensor of signal output end stays in the line defct line position afterwards, signal receiving end sensor moves toward the signal output end sensor along the circuit that this has line defct point, can detect the position (as shown in Figure 1) of circuit open circuit defect point 20; Or after detecting line defct line position (lineposition), use a pair of contact probe 50 to contact, cooperate contactless sensor 13 can detect the position of line short defect point 30 (as shown in Figure 2) in addition again with metallic circuit contact mat 40 on the glass substrate.
In existing process sequence, the measured defective products of open circuit/short-circuit detecting machine need be transferred to another laser repairing and repair poor short circuit between metal wire and the line, to improve the overall process yield; And the data that previous machine worker after testing stands and detects, location coordinate as line defct, the image of line defct etc. is a mnemon that is stored in machines earlier, subsequently this data is sent to laser repairing by networking or magnetic sheet, be placed to transport vehicle after then need utilizing mechanical arm that glass substrate is taken out in addition as for glass substrate defective products to be repaiied, transport vehicle is placed into laser repairing by another mechanical arm with the glass substrate taking-up after being transported to laser repairing again, and the data that glass substrate carries out the clamping contraposition again and cooperates machines to send in laser repairing is carried out line defct and repaired.
Under the existing processing procedure like this, line defct detects and two kinds of actions of laser preparing adhere to different boards separately, being written into of substrate to need by mechanical arm and carrier, so not only time-consuming, and product processing procedure moving-wire elongates, the risk of defective products is given birth in volume increase on foot, and take valuable dust free room space, glass substrate needs to reorientate clamping respectively in two boards in addition, not only cause the number of working processes to prolong, the coordinate system of twice location is also different, causes overall precision to descend, be unfavorable for the trend that live width is dwindled day by day, and line defct detects and the target of laser preparing whole-course automation.On the other hand, please refer to Fig. 3, US Pat.5164565 discloses a kind of laser preparing board, its function mode is that substrate 10 is placed and is held in X-Y transmission platform 60, X-Y motion platform 60 drive substrates 10 move during the repairing circuit defective, and laser preparing head 70 is motionless, the also common such design of defect inspection machine, yet along with substrate area increases, for these two kinds of equipment, such design will occupy too many space, cause the decline of the increase of equipment cost and board overall precision and gradually infeasible, more feasible mode is to take substrate motionless and laser preparing head 70 moves, and is same, for the transmission design of line defct machines, more feasible mode also is motionless and contact probe 50 and a contactless sensor 13 of glass substrate, 14 move.
Therefore under so identical designer trends, there are many identical location and transmission component between two kinds of boards, institute's difference, only be in addition configuration be the difference of line defct detection module or laser preparing module, therefore the board with two kinds of functions is designed to same board, is feasible, if be divided into two kinds of boards, waste the dust free room expensive real estate on the contrary, and the significantly increase of equipment purchasing cost.
Based on the shortcoming of above-mentioned prior art and for saving the processing procedure time, the inventor carries out broad research to process apparatus, thereby finishes the present invention.
[summary of the invention]
Fundamental purpose of the present invention provides and a kind ofly has that line defct detects concurrently and laser preparing function and the single equipment that takes up space and more simplify.
Another purpose of the present invention provides a kind of detection and method for repairing and mending of glass substrate line defct.
Reach other purposes in order to achieve the above object, the invention provides a kind of line defct and detect and laser preparing equipment, this equipment comprises a board base, in order to supporting member; One substrate placing stage is arranged on this board base, in order to place and the bearing glass substrate; One contact probe detection module has contact probe, and the contact probe kinematic train, and this contact probe kinematic train system is in order to drive this contact probe, makes this contact probe contact the circuit of this glass substrate, with the detection line defective; One non-contact detection module, has contactless sensor, and non-contact detecting kinematic train, this non-contact detecting kinematic train system is in order to drive this contactless sensor, detect this line defct of this glass substrate in the noncontact mode, and determine the line defct position jointly with this contact probe detection module; And a laser preparing module, having laser preparing head and laser preparing kinematic train, this laser preparing kinematic train system is in order to drive the laser preparing head, to this line defct position, and repairs this line defct of this glass substrate with laser mode.Wherein this non-contact detecting kinematic train comprises: the vertical kinematic train of non-contact detecting has actuated element, in order to drive this glass substrate vertical up-or-down movement relatively of this contactless sensor; The horizontal kinematic train of non-contact detecting has actuated element, in order to drive the horizontal side-to-side movement of this glass substrate relatively of this contactless sensor; And first linear motor location kinematic train, comprising a motor body, first mover and second mover, wherein the horizontal kinematic train of this first mover and this non-contact detecting links.
Preferably, the actuated element of the vertical kinematic train of this non-contact detecting comprises cylinder or linear actuators.
According to above-mentioned purpose, the present invention provides a kind of line defct detection of flat-panel screens glass substrate and the method for laser preparing again, comprises the following steps:
Place also clamping this glass substrate to be detected in substrate placing stage; Mobile contact probe and move contactless sensor detecting line defct, and decision line defct position; Mobile laser preparing head is to this line defct position, and repairs this line defct with laser mode; And will detect and repair this glass substrate that finishes and shift out this substrate placing stage.Wherein should move contactless sensor step is to utilize a non-contact detecting kinematic train to realize, wherein this non-contact detecting kinematic train comprises: the vertical kinematic train of non-contact detecting, has actuated element, in order to drive this glass substrate vertical up-or-down movement relatively of this contactless sensor; The horizontal kinematic train of non-contact detecting has actuated element, in order to drive the horizontal side-to-side movement of this glass substrate relatively of this contactless sensor; And first linear motor location kinematic train, comprising a motor body, first mover and second mover, the horizontal kinematic train of this first mover and this non-contact detecting links
[description of drawings]
Fig. 1 uses contactless sensor for prior art and detects the synoptic diagram of base plate line open circuit defect.
Fig. 2 uses the contact type probe contactless sensor of arranging in pairs or groups for prior art and detects the synoptic diagram of base plate line circuit defect.
Fig. 3 is the laser preparing system of prior art.
Fig. 4 is the three-dimensional view that line defct of the present invention detects repair apparatus.
Fig. 5 is the three-dimensional view of contact probe detection module of the present invention.
Fig. 6 is that the vertical movement transmission module of contact probe detection module of the present invention amplifies three-dimensional view.
Fig. 7 is the side view of the front and back transmission module of contact probe detection module of the present invention.
Fig. 8 is the three-dimensional view of non-contact detection module of the present invention.
Fig. 9 is that the vertical movement transmission module of the three-dimensional view of non-contact detection module of the present invention amplifies three-dimensional view.
Figure 10 is the three-dimensional view of laser preparing module of the present invention.
Figure 11 is that the present invention is according to the equipment action three-dimensional view of step 1 with detection and repairing circuit defective.
Figure 12 is that the present invention is according to the equipment action three-dimensional view of step 2 with detection and repairing circuit defective.
Figure 13 is that the present invention is according to the equipment action three-dimensional view of step 3 with detection and repairing circuit defective.
Figure 14 is that the present invention is according to the equipment action three-dimensional view of step 4 with detection and repairing circuit defective.
[embodiment]
Above-mentioned purpose of the present invention and other purposes will be described in detail by following preferred embodiment conjunction with figs. and become more apparent.
At first introduce the hardware member of present device, see also Fig. 4 now, detect the three-dimensional view of repair apparatus for line defct of the present invention, include board base 101, substrate placing stage 200, contact probe detection module 300, non-contact detection module 400 and laser preparing module 500;
Substrate placing stage 200, be roughly square type tabular, be used for placing and the clamping glass substrate, its material is generally transparent material such as glass or acryl and constitutes, and when transparent material can need be convenient to, light source module (not being plotted in diagram) can be set in addition in the below, can carry out photodetector for backside-illuminated to substrate and handle, to increase image contrast.
Please refer to Fig. 4, Fig. 5 and Fig. 6, contact probe detection module 300, usually have two groups, balanced configuration, contact probe 305, place in the sensing gauge head 305a, in order to contact glass substrate circuit, to confirm the bad fault location of substrate, this contact probe 305 and sensing gauge head 305a system are driven by vertical movement transmission module 301, and can be in direction motion vertically, and the main element of this vertical movement transmission module 301 comprises the first base plate 301a, linear slide rail group 301b, servo rotation motor 301c, ball lead screw 301d, the second base plate 301e, see through linear slide block (not being plotted in diagram) and be connected with linear slide rail group 301b, web 301f links the second base plate 301e and probe module sensor 304; Can make contact probe 305 do moving vertically so see through the drive of servo rotation motor 301c relative to glass substrate.
In sum, mover 3024b drives via drive circuit system and moves relative to motor body 3024a, mover 3024b again, be connected with the first base plate 301a of vertical movement transmission module 301, so whole vertical movement transmission module 301, can be driven by tangential movement transmission 302, and make contact probe 305, do moving about level relative to glass substrate.
Then, please refer to Fig. 7, contact probe 305 can by linear motor locate kinematic train 303 and relatively substrate seesaw, this linear motor location kinematic train 303 to the scale placement substrate plummer outside, is roughly the center line of substrate to the scale center, main member wherein, comprise motor body 3031 again, mover 3032 and corresponding drive circuit system thereof (not being plotted in diagram), mover 3033 and corresponding drive circuit system thereof (not being plotted in diagram); Locate the motor body 3024a of kinematic train 3024 as the linear motor of aforementioned levels motion transmission module 302, the composition of motor body 3031 also comprises sliding-rail sliding group (not being drawn on diagram), position sensor (not being drawn on diagram) and motor stator (not being drawn on diagram), and linear motor location kinematic train 303 and linear motor are located kinematic train 3024 different be in, linear motor location kinematic train 303 links two movers 3032 and 3033 and distinguish corresponding drive circuit system (not being plotted in diagram) in single motor body 3031, and mover 3032,3033 can independently be driven by it Circuits System respectively drives, also can distinguish independent 3031 motions of motor body relatively, the promptly general alleged single shaft two-carrier technology of industry; Compared to the linear transmission system of traditional ball lead screw cooperation rotation motor form, the single shaft two-carrier technology of utilization linear motor location kinematic train will significantly reduce the shared area of board.
Linear motor location kinematic train 303 and tangential movement transmission module 302, can see through link supporting seat 304 and be linked, link supporting traverse 3021 that supporting seat 304 connects the mover 3032,3033 of linear motor location kinematic train 303 and tangential movement transmission module 302 respectively and make linear motor location kinematic train 303 can drive whole tangential movement transmission module 302 to seesaw; In sum, contact probe 305 can pass through probe vertical movement transmission module 301, tangential movement transmission module 302 and linear motor are located kinematic train 303 and are all around moved up and down relative to glass substrate, make contact probe 305 can keep with the circuit on the substrate well contacting, provide to measure quality accurately with different line design situations.
Now please refer to Fig. 8, Fig. 9 and Figure 10, electrostatic capacitance manifold type sensor 401, system is driven by the expansion link 4021 of actuator 402 and can be pressed close to substrate or away from substrate, actuator 402 links with the mover 4031 of linear motor location kinematic train 403, this linear motor location kinematic train 403, use single shaft two-carrier technology to make it to have respectively two movers and actuator binding, it is mainly formed and comprises stator 4033, linear slide rail 4032, and linear slide block (not being plotted in diagram), base 4034, linear motor location kinematic train 403 can drive sensor 401 horizontal move left and right.
Linear motor location kinematic train 403, link with another linear motor location kinematic train 404, linear motor location kinematic train 404, it is mainly formed and comprises motor body 4041 also to adopt the two mover technology of aforesaid single shaft, and two pairs of movers 4042 (as shown in Figure 8) and 4043 (as shown in figure 10) and corresponding drive circuit system (not being drawn on diagram) thereof, the composition of motor body 4041 also comprises sliding-rail sliding group (not being drawn on diagram), position sensor (not being drawn on diagram) and motor stator (not being drawn on diagram), and the base 4034 of linear motor location kinematic train 403 promptly is connected with the wherein a pair of mover 4042 of linear motor location kinematic train 404, make linear motor location kinematic train 404, driven linear motor location kinematic train 403 and then can drive sensor and move forward and backward.
After contact probe detects the line defct point coordinates via above-mentioned contactless sensor or collocation, can use laser mode to cut off the foreign matter that causes short circuit, and then repair substrate for the circuit defect (Short defect) of this line defct point coordinates.
Please refer to Figure 10, laser preparing head 501, it includes laser generation system, in order to the laser that produces tool power with cutting-off of short-circuit metallic foreign body, wherein also can comprise optical microphotograph amplifier module (not being plotted in diagram) again, so that the image when cutting off to be provided, laser preparing head 501 needs a kinematic train to link and drives to line defct point position to bring into play its function, the mover 5021 of laser preparing head 501 and linear motor location kinematic train 502 links, this linear motor location kinematic train 502, it is mainly formed and comprises stator 5022, slide rail 5023, and slide block, base 5024, linear motor location kinematic train 502 can drive laser preparing head 501 horizontal move left and right.
Linear motor location kinematic train 502 links with another linear motor location kinematic train 404, and then can drive laser preparing head 501 and move forward and backward.
Linear motor is located kinematic train 404 in addition, see through mover 4042,4043 and link linear motor location kinematic train 502 and linear motor location kinematic train 403 respectively, so can distinguish drive control electrostatic capacitance manifold type sensor 401 and laser preparing head 501 in single motor body 4041, move relative to glass substrate, add the combination of ball lead screw compared to general habitual rotation motor, can significantly save the required member of transmission, and then reduce the board size, save the dust free room space.
Next method that introduce to use the said equipment to detect and repair in the LCD glass substrate line defct is an example with the circuit defect (short defect) of circuit, please refer to Figure 11 to Figure 14.
(1) at first, as shown in figure 11, will finish metallic circuit by transmission system such as mechanical arm etc. earlier, glass substrate 10 to be detected is written into board, places and be held on substrate placing stage 200.
(2) with reference to Figure 12, utilize kinematic train 301, kinematic train 302 and kinematic train 303 to drive contact probe 305, with the metallic circuit on the correct contact glass substrate 10 and use kinematic train 402, kinematic train 403 and kinematic train 404 drives contactless sensor 401 and can press close to glass substrate 10 to suitable distance, detecting the line short defective, and decision line defct position.
(3) with reference to Figure 13, contactless sensor 401 and contact probe 305 are return after the origin-location, laser preparing die head 501 drives to the line short defective locations via kinematic train 502 and kinematic train 404, cut off the foreign matter that causes short circuit with laser mode, make this zone become normal zone.
(4) with reference to Figure 14, repaired line defct after, laser preparing die head 501 is retracted into the origin-location, utilizes transmission system such as mechanical arm etc. that glass substrate 10 is shifted out, board is back to original state, waits for a slice substrate to be measured down.
Therefore by above-mentioned Apparatus and method for, compared with prior art, the present invention possesses following advantage:
1. the two functions of planting of single board are saved fabrication steps and man-hour.
2. glass substrate detects and finishes between laser preparing processing procedure operation, need not carry and carry and unload process, can reduce engineering accident and fraction defective.
3. board making member is saved in a large number, can significantly reduce the cost of founding the factory, and is fit to the configuration of standard volume production line.
The present invention is described in detail by above-mentioned preferred embodiment and accompanying drawing, but the concrete example that is disclosed does not exceed with the foregoing description in order to limit the scope of the invention only in order to explanation the present invention.All various variations of being done in spirit of the present invention and application range, improvement all belong to scope of the present invention.
[figure number simple declaration]
10 glass substrates, 11 data lines
12 scanning linears, 20 circuit open circuit defect points
30 line short defect points, 13 sensors
14 sensors, 40 contact pads
50 contact probe 60X-Y transmission platforms
70 laser preparing heads, 101 board bases
102 board supporting seats, 103 motor support seats
200 substrate placing stages, 300 contact probe detection modules
301 transmission module 301a first base plates that move both vertically
The servo rotation motor of 301b linear slide rail group 301c
301d ball guide screw 301e second base plate
301b linear slide rail group 301f web
302 horizontal movement transmission modules, 3021 supporting traverses
3022 linear slide rail groups, 3023 linear slide block groups
3024 linear motors location kinematic train 3024a motor body
The 3024b mover
303 linear motors location kinematic train 3031 motor bodies
3032 movers, 3033 movers
304 link supporting seat
305 contact probe 305a sensing gauge heads
400 non-contact detection modules
401 electrostatic capacitance manifold type sensors, 402 actuators
4021 expansion links
403 linear motors location kinematic train
4031 movers, 4032 slide rails
4033 stators, 4034 bases
404 linear motors location kinematic train 4041 motor bodies
4042 movers, 4043 movers
500 laser preparing modules
501 laser preparing heads
502 linear motors location kinematic train
5021 movers, 5022 stators
5023 slide rails, 5024 bases
Claims (15)
1. a line defct that is used for flat-panel screens detects and laser preparing equipment, carries out laser preparing in order to the line defct of detection glass substrate and to this line defct, and this equipment comprises:
The board base is in order to supporting member;
Substrate placing stage is arranged on this board base, in order to place and the bearing glass substrate;
The contact probe detection module has contact probe, and the contact probe kinematic train, and this contact probe kinematic train drives this contact probe, makes this contact probe contact the circuit of this glass substrate, with the detection line defective;
The non-contact detection module, has contactless sensor, and non-contact detecting kinematic train, this non-contact detecting kinematic train system is in order to drive this contactless sensor, detect this line defct of this glass substrate in the noncontact mode, and determine the line defct position jointly with this contact probe detection module; And
The laser preparing module has laser preparing head and laser preparing kinematic train, and this laser preparing kinematic train system is in order to drive the laser preparing head, to this line defct position, and repairs this line defct of this glass substrate with laser mode;
Wherein this non-contact detecting kinematic train comprises:
The vertical kinematic train of non-contact detecting has actuated element, in order to drive this glass substrate vertical up-or-down movement relatively of this contactless sensor;
The horizontal kinematic train of non-contact detecting has actuated element, in order to drive the horizontal side-to-side movement of this glass substrate relatively of this contactless sensor; And
First linear motor location kinematic train, comprising a motor body, first mover and second mover, wherein the horizontal kinematic train of this first mover and this non-contact detecting links.
2. line defct as claimed in claim 1 detects and laser preparing equipment, it is characterized in that this contact probe kinematic train comprises:
The vertical kinematic train of contact probe has actuated element, in order to drive this glass substrate vertical up-or-down movement relatively of this contact probe;
The horizontal kinematic train of contact probe has actuated element, in order to drive the horizontal side-to-side movement of this glass substrate relatively of this contact probe; And
Transmission module before and after the contact probe has actuated element, seesaws in order to drive relative this glass substrate of this contact probe.
3. line defct as claimed in claim 1 detects and laser preparing equipment, it is characterized in that this laser preparing kinematic train comprises:
The horizontal transmission module of laser preparing has actuated element, in order to drive the horizontal side-to-side movement of this glass substrate relatively of this laser preparing head; And
Described first linear motor location kinematic train.
4. line defct as claimed in claim 1 detects and laser preparing equipment, it is characterized in that this contactless sensor is the electrostatic capacitance manifold type.
5. line defct as claimed in claim 2 detects and laser preparing equipment, it is characterized in that the actuated element of the vertical kinematic train of this contact probe comprises rotation motor, lead screw and sliding-rail sliding group.
6. line defct as claimed in claim 2 detects and laser preparing equipment, it is characterized in that the actuated element of the horizontal kinematic train of this contact probe comprises linear motor.
7. line defct as claimed in claim 2 detects and laser preparing equipment, it is characterized in that, the actuated element of transmission module comprises linear motor before and after this contact probe.
8. line defct as claimed in claim 2 detects and laser preparing equipment, it is characterized in that, the actuated element of transmission module comprises rotation motor, lead screw and slide block slide rail set before and after this contact probe.
9. line defct as claimed in claim 1 detects and laser preparing equipment, it is characterized in that the actuated element of the vertical kinematic train of this non-contact detecting comprises cylinder or linear actuators.
10. line defct as claimed in claim 1 detects and laser preparing equipment, it is characterized in that the actuated element of the horizontal kinematic train of this non-contact detecting comprises linear motor.
11. line defct as claimed in claim 3 detects and laser preparing equipment, it is characterized in that the actuated element of the horizontal transmission module of this laser preparing comprises linear motor.
12. line defct as claimed in claim 3 detects and laser preparing equipment, it is characterized in that the actuated element of the horizontal transmission module of this laser preparing comprises rotation motor, lead screw and slide block slide rail set.
13. one kind is used for the line defct detection of flat-panel screens glass substrate and the method for laser preparing, comprises the following steps:
Place also clamping this glass substrate to be detected in substrate placing stage;
Mobile contact probe and mobile contactless sensor are to detect line defct, and decision line defct position, wherein should move contactless sensor step is to utilize a non-contact detecting kinematic train to realize, wherein this non-contact detecting kinematic train comprises: the vertical kinematic train of non-contact detecting, has actuated element, in order to drive this glass substrate vertical up-or-down movement relatively of this contactless sensor; The horizontal kinematic train of non-contact detecting has actuated element, in order to drive the horizontal side-to-side movement of this glass substrate relatively of this contactless sensor; And first linear motor location kinematic train, comprising a motor body, first mover and second mover, the horizontal kinematic train of this first mover and this non-contact detecting links;
Mobile laser preparing head is to this line defct position, and repairs this line defct with laser mode; And
Shift out this substrate placing stage with detecting and repair this glass substrate that finishes.
14. line defct as claimed in claim 13 detects and the method for laser preparing, it is characterized in that, this moves the contact probe step and utilizes a contact probe kinematic train to realize that wherein this contact probe kinematic train comprises:
The vertical kinematic train of contact probe has actuated element, in order to drive this glass substrate vertical up-or-down movement relatively of this contact probe;
The horizontal kinematic train of contact probe has actuated element, in order to drive the horizontal side-to-side movement of this glass substrate relatively of this contact probe; And
Transmission module before and after the contact probe has actuated element, seesaws in order to drive relative this glass substrate of this contact probe.
15. method as claimed in claim 13 is characterized in that, this laser preparing head system drives by the laser preparing kinematic train, and this laser preparing kinematic train comprises:
The horizontal transmission module of laser preparing has actuated element, in order to drive this laser preparing head, the horizontal side-to-side movement of this glass substrate relatively; And
Described first linear motor location kinematic train.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100313356A CN100357752C (en) | 2004-03-26 | 2004-03-26 | Line defect detection maintenance equipment and method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100313356A CN100357752C (en) | 2004-03-26 | 2004-03-26 | Line defect detection maintenance equipment and method |
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| CN1673765A CN1673765A (en) | 2005-09-28 |
| CN100357752C true CN100357752C (en) | 2007-12-26 |
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| CNB2004100313356A Expired - Fee Related CN100357752C (en) | 2004-03-26 | 2004-03-26 | Line defect detection maintenance equipment and method |
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| CN101471272B (en) * | 2007-12-29 | 2010-08-11 | 财团法人工业技术研究院 | Automatic flaw detection device and method for substrate laser repairing device |
| KR101001670B1 (en) * | 2009-02-23 | 2010-12-15 | 양 전자시스템 주식회사 | Apparatus for probing flat panel display |
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5235272A (en) * | 1991-06-17 | 1993-08-10 | Photon Dynamics, Inc. | Method and apparatus for automatically inspecting and repairing an active matrix LCD panel |
| CN1167921A (en) * | 1996-04-23 | 1997-12-17 | 钟国桢 | Automatic multi-probe PWB test apparatus and method |
| CN1205774A (en) * | 1995-12-22 | 1999-01-20 | 新系统有限公司 | Machine for electric test of printed circuits with adjustable position of sound needles |
| CN1223455A (en) * | 1997-11-28 | 1999-07-21 | 联华电子股份有限公司 | Repairing test method for semiconductor device |
| CN2507609Y (en) * | 2001-08-17 | 2002-08-28 | 优升精机工业有限公司 | Stereometric device |
| CN1383489A (en) * | 2000-07-05 | 2002-12-04 | Oht株式会社 | Inspection appts. and inspection method |
| CN1427265A (en) * | 2001-12-21 | 2003-07-02 | 瀚宇彩晶股份有限公司 | Electron product circuit signal position detecting system and its method |
| CN1473354A (en) * | 2001-09-10 | 2004-02-04 | ������������ʽ���� | Apparatus for repairing defect of substrate |
| CN2727784Y (en) * | 2004-03-26 | 2005-09-21 | 广辉电子股份有限公司 | Circuit fault detecting and laser repairing device for two-dimensional display |
-
2004
- 2004-03-26 CN CNB2004100313356A patent/CN100357752C/en not_active Expired - Fee Related
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5235272A (en) * | 1991-06-17 | 1993-08-10 | Photon Dynamics, Inc. | Method and apparatus for automatically inspecting and repairing an active matrix LCD panel |
| CN1205774A (en) * | 1995-12-22 | 1999-01-20 | 新系统有限公司 | Machine for electric test of printed circuits with adjustable position of sound needles |
| CN1167921A (en) * | 1996-04-23 | 1997-12-17 | 钟国桢 | Automatic multi-probe PWB test apparatus and method |
| CN1223455A (en) * | 1997-11-28 | 1999-07-21 | 联华电子股份有限公司 | Repairing test method for semiconductor device |
| CN1383489A (en) * | 2000-07-05 | 2002-12-04 | Oht株式会社 | Inspection appts. and inspection method |
| CN2507609Y (en) * | 2001-08-17 | 2002-08-28 | 优升精机工业有限公司 | Stereometric device |
| CN1473354A (en) * | 2001-09-10 | 2004-02-04 | ������������ʽ���� | Apparatus for repairing defect of substrate |
| CN1427265A (en) * | 2001-12-21 | 2003-07-02 | 瀚宇彩晶股份有限公司 | Electron product circuit signal position detecting system and its method |
| CN2727784Y (en) * | 2004-03-26 | 2005-09-21 | 广辉电子股份有限公司 | Circuit fault detecting and laser repairing device for two-dimensional display |
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|---|---|
| CN1673765A (en) | 2005-09-28 |
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