KR100768915B1 - Probe test apparatus of flat pannel display - Google Patents

Abstract

The present invention relates to a probe inspection device for a flat panel display device, and more particularly, to a probe inspection device for a flat panel display device for measuring electrical characteristics of a circuit pattern on a glass by heating or cooling a glass surface.

Probe inspection device for a flat panel display device according to the present invention comprises a stage in which the glass is placed; A reference temperature measurement point formed in an area where the glass is not placed on the stage; A probe pin for electrically contacting pixel electrodes and pads formed in the glass to measure characteristics of the transistor; A probe head which mechanically supports the probe pin and is moved on an X axis or a Y axis to allow the probe pin to contact the pixel electrodes and pads; A plurality of linear motors for feeding the probe head to an X axis or a Y axis; A hot air fan attached to one side of the probe head and configured to spray hot or cold air to a contact point between the probe pin, the pixel electrodes and the pads; A power supply unit for supplying power to the hot air fan to drive the hot air fan; An air control unit for adjusting the compressed air introduced into the hot air fan; A control unit for controlling power supply and compressed air inflow into the hot air fan; A reference temperature measuring unit for measuring a temperature at the reference temperature measuring point is provided.

Description

PROBE TEST APPARATUS OF FLAT PANNEL DISPLAY}

1 is a plan view showing a ledger glass.

Figure 2 is a plan view showing a probe inspection device of a conventional flat panel display element.

3 illustrates first to third probes contacting pixel cells of a large glass;

4 is a plan view showing a probe inspection device of a flat panel display device according to an embodiment of the present invention.

5 is a control block diagram of a hot air fan according to an embodiment of the present invention.

6 is a plan view of a probe inspection device for measuring the reference temperature according to an embodiment of the present invention.

7 to 9 are views showing a control screen of the temperature measurement program according to an embodiment of the present invention.

<Description of Symbols for Main Parts of Drawings>

112: glass 116: stage

122: probe pin 124: probe head

130: hot air fan 132: linear motor

134: internal temperature sensor 136: heating element

140: reference temperature measuring unit 142: reference temperature measuring sensor

144: temperature measuring unit 150: power supply unit

160: temperature control unit 180: relay

200: control unit 300: air control unit

310: solenoid valve 320: flow measurement sensor

330: flow regulator 340: pressure regulator

The present invention relates to a probe inspection device for a flat panel display device, and more particularly, to a probe inspection device for a flat panel display device for measuring electrical characteristics of a circuit pattern on a glass by heating or cooling a glass surface.

Recently, various flat panel display devices that can reduce weight and volume, which are disadvantages of cathode ray tubes, have emerged. The flat panel display includes a liquid crystal display, a field emission display, a plasma display panel, and an electro-luminescence display.

The manufacturing process of the flat panel display device includes a manufacturing process of the lower substrate, a manufacturing process of the upper substrate, and a bonding process of the lower substrate and the upper substrate. Among them, a plurality of cells 14 are formed on the mother glass 12 as shown in FIG. 1 by the manufacturing process of the lower substrate. In this case, a plurality of horizontal lines and a plurality of vertical lines cross each other in a matrix form on the plurality of cells 14, and pixel cells including transparent pixel electrodes are formed at each intersection of the vertical lines and the horizontal line. . In the pixel cells, thin film transistors connected to the vertical line, the horizontal line, and the pixel electrode are formed.

Each of the plurality of cells 14 formed on the ledger glass 12 undergoes an inspection process and is then cut from the ledger glass by a scribing process. A plurality of cells 14, ie, lower substrates, cut from the mother glass 12 are bonded to the upper substrates completed by the manufacturing process of the upper substrates, and then a driving circuit and various mechanisms for driving the pixel cells are provided. By assembling on the flat panel display element, one flat panel display device is completed.

In particular, in the inspection process for the plurality of cells 14 formed on the mother glass 12 during the manufacturing process of the flat panel display device, an electrical test signal is applied to the circuit patterns formed in the plurality of cells 14 using the probe inspection device. By supplying, the state of the circuit is measured to examine the process state of the previous process.

To this end, as shown in FIG. 2, the probe inspection apparatus is electrically connected to the stage 16 on which the ledger glass 12, which is a test object, is placed, and the pads formed on the ledger glass 12 placed on the stage 16. Probe pins 22 for measuring the characteristics of the transistors and mechanically support the probe pins 22 and moved in the X-axis or Y-axis so that the probe pins 22 can contact each pad. A probe head 24 and a plurality of linear motors 32 for feeding the probe head 24 to the X axis or the Y axis.

Although not shown in the drawings, one probe inspection apparatus includes three probe heads, and a plurality of first to third probe pins 63, 73, and 83 supported by the first to third probe heads are provided. It is moved to a designated position while being supported by each probe head by the driving of the linear motor of and contacts with the horizontal line pad, the vertical line pad and the pixel electrode of the pixel cell as shown in FIG. When an electrical test signal is applied to the horizontal line pads, the vertical line pads, and the pixel electrodes of the pixel cells, the probe pins check whether the thin film transistor and the circuit pattern are defective.

The probe inspection apparatus requires a temperature and ambient conditions similar to the actual operating conditions of the thin film transistor in order to obtain a more accurate measurement value when measuring the electrical characteristics of the thin film transistor. In other words, the probe inspection apparatus needs a device that helps to measure while maintaining a condition similar to a temperature condition in operation such as light generated from a backlight and heat generated during operation. To this end, the conventional probe inspection apparatus has a hot plate 18 having a temperature control heating element therein between the stage 16 and the mother glass 12, as shown in FIG. 2, which contacts the large glass 12. To heat the transistor on the pixel cell with the conducted heat.

However, the conventional probe inspection apparatus employs a hot plate 18 produced only in small sizes such as 6 " and 12 " as shown in FIG. 2, thereby inspecting a large glass such as a 7th generation LCD (1800 * 2200 mm). The city reveals a problem that only some areas where the hot plate 18 is installed can be measured.

In addition, the conventional probe inspection device uses AC power to supply energy to the heating element embedded in the hot plate, which generates 60Hz noise on the AC power when heated, and also provides a series of temperature control such as PID (Proportional Integrate Derivative) control. Electric and magnetic noise are generated by changing the amount of current of the required heating element. This, in conjunction with the heat measurement characteristics of the thin film transistor, which is very sensitive to noise, leads to a problem that makes accurate measurements impossible.

Accordingly, an object of the present invention is to examine a glass including a plurality of cells formed at the intersections of horizontal lines and vertical lines, so that the user can measure the heating or cooling at any position on the glass. The present invention provides a probe inspection apparatus.

In addition, another object of the present invention to provide a probe inspection device that can accurately inspect the electrical characteristics of the thin film transistor without the influence of noise.

In order to achieve the above object, a probe inspection apparatus of a flat panel display device according to an embodiment of the present invention includes a stage having a region where the glass is placed, and a reference temperature measuring region in the region where the glass is not placed; A probe pin for electrically contacting pixel electrodes and pads formed in the glass to measure characteristics of the transistor; A probe head which mechanically supports the probe pin and is moved on an X axis or a Y axis to allow the probe pin to contact the pixel electrodes and pads; A plurality of linear motors for feeding the probe head to an X axis or a Y axis; A hot air fan attached to one side of the probe head and configured to spray hot or cold air to a contact point between the probe pin, the pixel electrodes and the pads; A power supply unit for supplying power to the hot air fan to drive the hot air fan; An air control unit for adjusting the compressed air introduced into the hot air fan; A control unit for controlling power supply and compressed air inflow into the hot air fan; And a reference temperature measuring unit for measuring a temperature at a reference temperature measuring point formed in the reference temperature measuring region.

The reference temperature measuring point is made of the same material as the glass; The hot air fan includes a heating element that generates heat by the power supplied from the power supply unit, and an internal temperature measuring sensor for measuring a room temperature of air heated by the heating element; The power supply unit is characterized by having a DC power source.

Receiving a sensing value of the internal temperature measuring sensor and cooperating with the control unit, and further comprising a temperature control unit cooperating a control command according to the sensing value of the control unit with the power supply unit; The temperature controller is characterized in that for controlling the amount of current of the DC power supplied to the heating element from the power supply.

The reference temperature measuring point is made of the same material as the glass; The hot air fan includes a cooling body cooled by power supplied from the power supply unit, and an internal temperature measuring sensor for measuring a room temperature of air cooled by the cooling body; The power supply unit is characterized by having a DC power source.

Receiving a sensing value of the internal temperature measuring sensor and cooperating with the control unit, and further comprising a temperature control unit cooperating a control command according to the sensing value of the control unit with the power supply unit; The temperature controller is characterized in that for controlling the amount of current of the DC power supplied to the cooling body from the power supply.

The reference temperature measuring unit includes a reference temperature measuring sensor for measuring a reference temperature, and a temperature measuring unit for linking a sensing value of the reference temperature measuring sensor to the controller; The air regulator is a solenoid valve for controlling the compressed air introduced into the hot air fan under the control of the controller, a flow rate measuring sensor for measuring the flow rate of the compressed air, and for adjusting the flow rate and hydraulic pressure of the compressed air Having a flow rate and hydraulic regulator; The control unit indirectly measures the surface temperature of the glass by using the sensing value of the internal temperature measuring sensor and the sensing value of the reference temperature measuring sensor.

In addition, the probe inspection apparatus according to an embodiment of the present invention further comprises a relay for cutting off the DC power supplied to the heating element or the cooling element from the power supply unit in accordance with the sensing value of the flow measurement sensor and the control command of the controller. It is characterized by.

Other objects and features of the present invention in addition to the above object will be apparent from the description of the embodiments with reference to the accompanying drawings.

Hereinafter, exemplary embodiments of the present invention will be described with reference to FIGS. 4 to 9.

4 is a plan view of a probe inspection apparatus according to an embodiment of the present invention.

Referring to FIG. 4, a probe inspection apparatus according to an exemplary embodiment of the present invention electrically connects a stage 116 on which a mother glass 112, which is a test object, is placed, and pixel electrodes and pads formed on the mother glass 112. A probe pin 122 for contacting and measuring the characteristics of the transistor, and a probe that mechanically supports the probe pin 122 and is moved in the X-axis or Y-axis to allow the probe pin 122 to contact each pad. A head 124, a plurality of linear motors 132 for transferring the probe head 124 to the X-axis or the Y-axis, attached to one side of the probe head 124, and the probe pin 122 and the pixel electrodes; The hot air blower 130 for spraying hot or cold air to the contact point of the pads is provided.

Although not shown in the drawings, one probe inspection apparatus is provided with three probe heads, and the first to third probe pins are supported by the first to third probe heads respectively by driving of a plurality of linear motors. It is moved to a designated position and contacts the horizontal line pad, the vertical line pad and the pixel electrode of the pixel cell, respectively. When the electrical test signal is applied to the horizontal line pad, the vertical line pad and the pixel electrode of the pixel cell, the probe pins check whether the thin film transistor and the circuit pattern are defective. In this case, for a more accurate inspection, the temperature and ambient conditions similar to the actual operating conditions of the thin film transistor should be made. For this purpose, the probe inspection device according to the embodiment of the present invention is heated under the glass 112. Unlike the method, the hot air or cold air is sprayed to the contact point of the glass 112 and the probe pin 122 through the hot air fan 130 attached to the probe head 124. This will be described later in detail with reference to FIG. 5. Although not shown in the drawings, a micro scope is attached to the probe head 124 so that the contact pad of the transistor on the glass 112 is very small (several um) so that it may be found or contacted with the probe pin 122. When the hot air blower 130 is used, it is used for setting the reference position of the reference temperature measuring point 146.

5 is a control block diagram of a hot air fan according to an embodiment of the present invention.

Referring to Figure 5, the probe inspection apparatus according to an embodiment of the present invention is attached to the probe head and the hot air blower 130 for injecting hot or cold air to the contact point of the probe pin and the glass, and power to the hot air blower 130 To control the power and air supplied to the power supply unit 140 for supplying, the air regulator 300 for controlling the air flowing into the hot air fan 130 through the air line 250, and the hot air fan 130 Temperature control to adjust the temperature by varying the amount of current supplied to the hot air blower 130 under the control of the control unit 200 and the hot air blower internal temperature information supplied from the hot air blower 130 for the control unit 200 Relay 160, which can cut off the power supply to the hot air fan 130 by the control signal 200 control signal and the flow measurement sensing value of the air control unit 300 separately from the unit 160, the temperature control unit 160, reference Measure the temperature at temperature measuring point 146 and It is provided with a reference temperature measuring unit 140 to link the control unit.

The heat fan 130 is provided with a heating element 136 that generates heat when power is applied, and an internal temperature measuring sensor 134 for measuring the room temperature of the air inside the heated heat fan 130 when the heat is generated. On the other hand, in order to examine the electrical characteristics of the glass in the cooled state, the cooling fan (not shown) may be provided inside the hot air blower 130 when the power is applied instead of the heating element 136. Since the control method is the same as the case in which the heating element 136 is provided even when the cooling element is provided, a case in which the heating element 136 is provided will be described as an example.

 The heating element 136 is connected to the power supply unit 150 with the relay 180 interposed therebetween. As the heating element 136, a vertical coil is used to suppress generation of magnetic noise. The internal temperature sensor 134 measures the actual temperature inside the hot air blower 130 and supplies it to the temperature controller 160.

The temperature controller 160 adjusts the temperature inside the hot air blower 130 by controlling the amount of current supplied from the power supply unit 150 to the heating element 136 according to the received internal temperature information. In addition, the temperature controller 160 links the supplied internal temperature information to the controller.

The power supply unit 150 uses a linear DC power supply instead of an AC power source in consideration of 60 Hz noise on the power source as the energy supply source of the heating element 136.

The control unit 200 communicates with the temperature control unit 160 to connect the internal temperature information, and also communicates with the reference temperature measuring unit 140 to receive the reference temperature of the reference temperature measuring point 146. Using this, the controller 160 calculates and stores a correlation between the reference temperature and the internal temperature to inform the user of a measurable time point.

Measuring the reference temperature in the reference temperature measuring unit 140 will be described later in detail with reference to FIG. 6.

The hot air fan 130 and the air supply source (not shown) are connected to each other through the air line 250, and the air conditioner 300 is provided between the two to control the air flowing into the hot air fan 130 from the air supply. Located. The air regulator 300 includes a solenoid valve 310 for controlling compressed air from an air supply source, a flow rate measuring sensor 320 for measuring the flow rate of the compressed air, and a flow regulator for adjusting the flow rate of the compressed air. 330 and a hydraulic regulator 340 for adjusting the hydraulic pressure of the compressed air. In order to keep the temperature of the hot air constant, the flow rate of the compressed air is very important. For this purpose, the flow rate sensor 320 accurately measures the flow rate of the compressed air and supplies it to the relay 180, and the relay 180 supplies the compressed air. When the pressure is lowered below the reference value based on the flow rate of air, the power supply to the heating element 136 is cut off.

Operation of the probe inspection apparatus according to an embodiment of the present invention having such a configuration, the reference temperature measurement process using the reference temperature measurement point in the state that the glass is unloaded largely, and the measured reference in the state of the actual glass loading It is divided into the process of heating and inspecting the glass using temperature. This will be described with reference to FIGS. 4 to 9.

First, to measure the temperature at the reference temperature measuring point 146 formed on the area of the stage 116 where the glass is not placed, as shown in FIG. 124 is located at the center of the reference temperature measuring point 146. At this time, the microscope attached to the probe head 124 allows the probe head 124 to be easily positioned at the center point of the reference temperature measurement point using the reference position. The hot air blower 130 attached to one side of the probe head 124 heats the contact point by spraying hot air on the contact point between the reference temperature measuring point 146 and the probe pin 122.

Here, the reference temperature measuring point 146 is formed of the same material as the actual glass 112, and has a separate reference temperature measuring sensor 142 therein to sense the temperature of the contact point when heating. The reference temperature sensing value at the reference temperature measuring point 146 is supplied to the controller 160 through the temperature measuring unit 144. The controller 160 calculates a correlation between the reference temperature and the internal temperature by executing a temperature measurement program using the supplied reference temperature sensing value and the supplied internal temperature sensing value of the hot air blower 130 (described in FIG. 5). Save it.

7 is a control screen of a temperature measurement program for performing a series of the above process, the surface of the glass 112 is impossible to directly measure through the execution of the program after contacting the probe pin 122 to the reference temperature measuring point 146. The temperature and the internal offset temperature of the hot air blower 130 which can be directly measured and controlled are measured, and the time for which the actual glass 112 is heated is calculated. The controller 160 then informs the user of a measurable time point by using the calculated and stored correlation in the heating test on the glass 112. As such, the reason for relatively measuring the surface temperature of the glass 112 using the reference temperature measuring point 146 is that when the glass 112 directly contacts the glass 112 using a temperature measuring sensor during the heating test of the glass 112, This is because the thin film transistor formed on the 112 is broken.

Next, when the reference temperature measurement of the probe inspection device is completed, the actual glass 112 is loaded on the stage 116. The linear motor 132 moves on the X axis or the Y axis so that the probe head 124 is positioned at the center of the cell under test. At this time, the microscope attached to the probe head 124 allows the probe pin 122 to easily contact the transistor of the cell under test using a reference position. When the probe pin 122 contacts the transistor, the user sets the measurement temperature on the temperature measurement program and presses the start button as shown in FIG. Accordingly, the hot air fan 130 attached to one side of the probe head 124 heats hot air to the contact point of the thin film transistor and the probe pin 122 so as to correspond to the calculated glass surface temperature. The internal temperature measuring sensor 130 of the hot air blower 130 continuously senses the internal temperature of the hot air blower 130 and supplies it to the temperature controller 160, and the controller 200 communicates with the temperature controller 160. When the sensed internal temperature value is linked to the calculated and displayed glass surface temperature value, a checkable indication is made. In addition, the controller 200 controls the amount of direct current supplied to the hot air blower 130 through the temperature control unit 160, and controls the flow rate and hydraulic pressure of the air supplied to the hot air blower 130 through the air control unit, probe inspection Ensure that the temperature of the hot air is kept constant. This enables the measurement in the heating state at any position on the glass desired by the user.

On the other hand, each of the specified values during the reference temperature measurement and inspection can be changed by the user as needed as shown in FIG.

For reference, the Calibration Temperature Option of FIG. 9 is a time and temperature option for controlling FIG. 7, and the Communiction Option is a time and temperature option for controlling FIG. 8.

The technical concept of the probe inspection apparatus according to the embodiment of the present invention is not limited to the inspection of the transistor of the flat panel display device, but also the inspection of the low noise inspection of other measurement equipment and automation equipment or when the direct temperature measurement is impossible. Can be used efficiently.

As described above, the probe inspection apparatus according to an embodiment of the present invention by spraying hot or cold air to the contact point between the probe pin and the glass using a hot air fan attached to one side of the probe head, any position on the glass desired by the user The measurement can be performed either at or under heating.

In addition, the probe inspection apparatus according to an embodiment of the present invention uses a linear DC power source instead of an AC power source to supply energy to a heating element or a cooling element in the hot air fan, without affecting noise on an AC power source of 60 Hz. The electrical characteristics of the thin film transistor can be accurately inspected.

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

Claims (7)

In the probe inspection device of the flat panel display device for inspecting the electrical characteristics of the glass, A stage having a reference temperature measuring region in an area where the glass is placed and an area where the glass is not placed; A reference temperature measurement point formed in an area where the glass is not placed on the stage; A probe pin for electrically contacting pixel electrodes and pads formed in the glass to measure characteristics of the transistor; A probe head which mechanically supports the probe pin and is moved on an X axis or a Y axis to allow the probe pin to contact the pixel electrodes and pads; A plurality of linear motors for feeding the probe head to an X axis or a Y axis; A hot air fan attached to one side of the probe head and configured to spray hot or cold air to a contact point between the probe pin, the pixel electrodes and the pads; A power supply unit for supplying power to the hot air fan to drive the hot air fan; An air control unit for adjusting the compressed air introduced into the hot air fan; A control unit for controlling power supply and compressed air inflow into the hot air fan; And a reference temperature measuring unit for measuring a reference temperature at a reference temperature measuring point formed in the reference temperature measuring region. The method of claim 1, The reference temperature measuring point is made of the same material as the glass; The hot air fan includes a heating element that generates heat by the power supplied from the power supply unit, and an internal temperature measuring sensor for measuring a room temperature of air heated by the heating element; And the power supply unit includes a DC power supply. The method of claim 2, Receiving a sensing value of the internal temperature measuring sensor and cooperating with the control unit, and further comprising a temperature control unit cooperating a control command according to the sensing value of the control unit with the power supply unit; And the temperature controller controls the amount of current of the DC power supplied to the heating element from the power supply unit. The method of claim 1, The reference temperature measuring point is made of the same material as the glass; The hot air fan includes a cooling body cooled by power supplied from the power supply unit, and an internal temperature measuring sensor for measuring a room temperature of air cooled by the cooling body; And the power supply unit includes a DC power supply. The method of claim 4, wherein Receiving a sensing value of the internal temperature measuring sensor and cooperating with the control unit, and further comprising a temperature control unit cooperating a control command according to the sensing value of the control unit with the power supply unit; And the temperature controller controls an amount of current of the DC power supplied to the cooling body from the power supply unit. The method according to claim 3 or 5, The reference temperature measuring unit includes a reference temperature measuring sensor for measuring a reference temperature, and a temperature measuring unit for linking a sensing value of the reference temperature measuring sensor to the controller; The air regulator is a solenoid valve for controlling the compressed air introduced into the hot air fan under the control of the controller, a flow rate measuring sensor for measuring the flow rate of the compressed air, and for adjusting the flow rate and hydraulic pressure of the compressed air Having a flow rate and hydraulic regulator; And the control unit indirectly measures the surface temperature of the glass by using the sensing value of the internal temperature measuring sensor and the sensing value of the reference temperature measuring sensor. The method of claim 6, And a relay capable of cutting off the DC power supplied to the heating element or the cooling element from the power supply unit according to the sensing value of the flow rate measuring sensor and the control command of the control unit.

Images