KR20100006207A - Substrate transfer robot - Google Patents

Abstract

PURPOSE: A substrate return robot is provided to improve the substrate throughput per unit time by simultaneously putting two substrates in the twin process chambers by simultaneously driving two en effectors. CONSTITUTION: A substrate return robot comprises an end effector and end effector operating module(500). The end effector is composed of first and second end effectors(300,400) and third and fourth effectors(600,700). The end effector operating module rotates one of the first and second effectors to rotate the remaining. The end effector operating module synchronously operates third and fourth end effectors to the rotating direction by interlocking third and fourth end effectors. The first and third end effectors and the second and fourth end effectors are independently rotated about the common center shaft.

Description

Substrate Transfer Robot {SUBSTRATE TRANSFER ROBOT}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer robot for transferring a substrate in a common transfer chamber for semiconductor processing on a substrate of a unit disk of a semiconductor wafer, a liquid crystal display panel, or a disk drive.

Robots are used for various purposes in various industries, for example, the use of a transfer robot to transport the substrate in the semiconductor manufacturing field. Here, the substrate refers to a semiconductor wafer, a liquid crystal display panel, a unit disk of a disk drive, or the like.

Such a substrate is generally placed in a load lock chamber provided on the side of the common transport chamber in a state of being spaced up and down in a transport container called a cassette (CASSETTE), and then inside the common transport chamber. The substrate is removed from the cassette in the load lock chamber by using the installed transfer robot and introduced into the process chamber provided on the side of the common transfer chamber to carry out the process of the process, and then the substrate in the process chamber is taken out and provided on the side of the common transfer chamber. Unload Lock It is fed into a cassette provided in a chamber.

As an example of the prior art for a transfer robot that performs the above functions, disclosed in Japanese Patent Laid-Open No. 7-142551 (hereinafter referred to as "prior art 1"), as shown in FIG. The center part is attached to the tip of the 1st arm 6 provided, the 2nd arm 8 provided so as to be able to bend to the tip of this 1st arm 6, and this 2nd arm 8. It is composed of a peak arm 10 that is rotatably installed and has an object placement unit 58A, 58B that serves to support and support the lower surface of the wafer W as an example of the object through both ends. have.

However, in the above-described prior art 1, since one long peak arm 10 is used, even if the length of the first and second arms 6 and 7 is reduced, the minimum turning radius of the transfer robot is large, and the robot carries the common. There was a problem that the area occupied in the room becomes large.

In addition, the above-described prior art 1 has a problem in that the substrate throughput per unit time cannot be improved because two substrates cannot be simultaneously introduced into two twin process chambers.

Accordingly, a number of Japanese Patent Application Laid-Open Nos. 2002-184834, Japanese Patent Laid-Open No. 2006-205264, and Japanese Patent Laying-Open No. 2008-2008, which are designed to convey a substrate in the same operation manner as another conventional technology, which can solve the problems inherent in the prior art 1. 16815 (hereinafter referred to as 'prior art 2').

In the patent document referred to in the prior art 2, Japanese Patent Laid-Open No. 2002-184834 will be described with reference to FIG. Here, it is mentioned that the member number shown in FIG. 13 is limited to FIG. 13 only.

As shown in FIG. 13, a fixed base 2, a first arm 3 pivotally connected to the fixed base, and a second arm 4 pivotably connected to the first arm 3. ) And a plurality of substrates having a fork connected to the second arm 4 so as to be pivotable, each having a fork as an independent first fork 5 and a second fork 6, respectively. The first fork 5 and the second fork 6 at the distal end of the second arm 4 coaxially and independently of each other at the distal end of the second arm 4, and at the same time The drive motor and the second fork drive motor are provided inside the robot.

The prior art as described above has a structure in which the first fork 5 and the second fork 6 are independently rotated about the concentric axis, so that the minimum rotation radius is fixed with respect to the fixed base 2 when the substrate is transported. In addition to being able to be reduced, there was an advantage of reducing the area occupied by the transport robot 1 in the common transport chamber.

However, since the conventional technique 2 has a two-axis drive structure by two separate drive motors for rotationally driving the first fork 5 and the second fork 6, the driving power consumption is increased and two expensive drive motors are provided. There is a problem that the manufacturing cost is increased according to the use and the waste of driving power consumption.

In the prior art 2, since the first and second forks 5 and 6 are individually driven by two drive motors, in order to simultaneously bring in and take out the substrate corresponding to the twin process chamber, the first fork 5 ) And the second fork 6 has to be precisely controlled the two drive motors to be precisely located in the twin process chamber.

Accordingly, a preferred embodiment of the present invention is a substrate transfer robot which is rotatably connected to each other so that each of the plurality of drive arms are articulated, and transports the substrate by an end effector mounted on the distal end drive arm of the plurality of drive arms. The end effector may include a pair of first and second end effectors spaced apart from each other to the left and right, and a pair of third and fourth end effectors spaced apart from each other to the left and right. By interlocking the first and second end effector with each other so that the rotation direction is synchronously reversed, any one of the first and second end effectors is rotationally driven to rotate the rest, and the third and fourth end effectors are rotated. Interlock with each other so that the rotation direction is synchronously reversed, and rotates any one of the third and fourth end effectors to rotate the rest. And an end effector operation module configured to be rotationally driven, wherein the first end effector and the third end effector are disposed up and down to rotate independently about a common central axis, and the second end effector and the fourth end. The effector is disposed up and down, characterized in that it is installed to rotate independently with respect to a common central axis.

According to the substrate transfer robot according to the present invention, the following effects can be expected.

First, it is possible to reduce the minimum rotation radius with respect to the robot body when transporting the substrate, and to reduce the area occupied by the transport robot in the common transport chamber. By driving two end effectors simultaneously using one drive motor, Two substrates can be simultaneously introduced into two twin process chambers provided in a common transfer chamber, thereby improving substrate throughput per unit time and reducing driving power consumption. The manufacturing cost can be reduced, and since a pair of first and second end effectors are synchronously rotated by a single drive motor, there is no operation error between them, and the first end effector and the second end effector are used. When the two substrates are simultaneously introduced into the twin chamber, the positions of the first end effector and the second end effector correspond to the twin chambers, respectively. The task of value is possible to easily conduct.

Second, the number of end effectors carrying the substrate can be doubled compared to the prior art 2 to double the carrying capacity of the substrate while reducing the minimum rotation radius with respect to the robot body during transfer of the substrate. In addition, it can reduce the area occupied by the transfer robot in the common transfer chamber, and simultaneously input two substrates into two twin process chambers provided in the common transfer chamber. Throughput can be improved, driving power consumption can be reduced, manufacturing costs can be reduced, and a single drive motor allows a pair of first and second end effectors to be synchronously rotated and another drive motor. Because of the synchronous rotation operation of the pair of third and fourth end effector operation error between them is not generated. Therefore, when two substrates are simultaneously introduced into the twin chamber by using the first end effector and the second end effector, the positions of the first end effector and the second end effector can be easily positioned corresponding to the twin chambers. By using the third end effector and the fourth end effector, two substrates processed in the twin process chamber can be taken out and loaded into the cassette provided in the unload lock chamber.

Third, and the present invention is characterized in that the end effector operation module is rotatably installed with respect to the distal drive arm, whereby a common transport chamber for processing the substrate and a process chamber and load lock formed therein are provided. The layout of the chamber and the unload lock chamber can be freely designed.

Fourthly, the present invention simultaneously removes and transports four unprocessed substrates provided in the loadlock chamber, processes the substrates, and shortens the time required to reload the processed substrates into the unload lock chamber. The substrate throughput per unit time can be improved.

Hereinafter, an embodiment of a substrate transfer robot according to the present invention will be described in detail with reference to the accompanying drawings.

1 is a plan view of a cylindrical transfer robot of a cylindrical coordinate type according to an embodiment of the present invention, FIG. 2 is a cross-sectional view of the leader line "AA" shown in FIG. 1, and FIG. 3 is a leader line "BB" shown in FIG. 4 is a cross-sectional view of the section “CC” of the leader line shown in FIG. 1, and FIGS. 5 to 7 are views illustrating an embodiment of a process of transferring a substrate by the substrate transfer robot shown in FIG. 1. FIG. 8 is a view illustrating another embodiment of a process of transferring a substrate by the substrate transfer robot shown in FIG. 1, and FIG. 9 illustrates a substrate transfer robot of a horizontal articulated type according to another embodiment of the present invention. Fig. 10 is a cross-sectional view showing the internal structure of the base conveying robot for installing the end effector operation module rotatably with respect to the distal end driving arm, showing a cross section cut in the direction of the “AA” portion in Fig. 10. Substrate according to the embodiment When the transfer robot is applied, it is a view showing the structure of the common transfer chamber and the substrate transfer operation that can be implemented, Figure 11 is a perspective view of the main portion showing another embodiment of the present invention.

As shown in FIG. 1, the plurality of driving arms 100 and 200 are rotatably connected to each other to perform joint movement, and the distal end portion of the plurality of driving arms 100 and 200 may be connected to each other. The present invention relates to a substrate transfer robot 800 configured to carry a substrate by an end effector mounted on the drive arm 200.

The plurality of driving arms 100 and 200 may be configured in two stages, for example, and the dual proximal end driving arm 100 may be rotated in the right direction (clockwise) around the axis center R1 of the robot body 810. Direction) or leftward direction (counterclockwise).

One end of the distal end driving arm 200 is disposed to overlap the upper end side of the proximal end driving arm 100 in a vertical direction, and is disposed in the right direction (clockwise) or left direction about the axis center R2. It is installed so as to be rotated in a counterclockwise direction. That is, after rotating the proximal end driving arm 100 with respect to the robot body 810 at a predetermined angle, the proximal end driving arm 100 and the proximal end driving arm 100 are rotated with respect to the proximal end driving arm 100. The distal end driving arm 200 is unfolded so as to be in a straight line with each other in a predetermined direction, so that the end effector can be positioned as far as possible from the robot body 810, and the proximal end driving arm 100 and the distal end driving arm 200 are moved up and down with each other. When it is completely or partially overlapped, it is possible to reduce the minimum rotation radius of the end effector to the axis center R1 when rotating the proximal end driving arm 100 with respect to the robot body 810.

1, the end effector includes a pair of first and second end effectors 300 and 400 spaced apart from each other from side to side.

The first and second end effectors 300 and 400 are interlocked with the distal driving arm 200 so that the rotation directions thereof are synchronized in opposite directions, but any one of the first and second end effectors 300 and 400 may be synchronized with each other. It is equipped with an end effector operation module 500 for driving one rotational rotation drive the other.

That is, the present invention is the first and second end effector (300, 400) constituting the end effector is rotated by receiving the power of the driving motor of any one of them in a state in which the left and right are spaced apart from each other. In addition, since the other one is configured to rotate synchronously in the opposite rotation direction, unlike the prior art 2, two substrates can be simultaneously transported without using two separate drive motors, thereby reducing manufacturing costs and driving consumption. The waste of power can be prevented.

In addition, the present invention, unlike the prior art of driving the first and second forks separately with two drive motors, two two first and second end effectors 300, 400 of one drive motor The first fork 5 (prior art) and the second fork 6 (prior art) for simultaneously importing and unloading the substrate into the twin process chambers 930 and 940 of the common transfer chamber 900 because the synchronous operation is performed. The conventional problem of precisely controlling the two drive motors to accurately position the twin process chamber is eliminated.

In other words, in the present invention, the first and second end effectors 300 and 400 are rotated in synchronization with each other even though one drive motor is operated, so that the unprocessed substrates of two sheets can be carried out. The first and second end effectors 300 and 400 can be easily positioned with respect to the load lock chamber 910 of the 900, and the two substrates taken out from the load lock chamber 910 are twin process chambers. The first and second end effectors 300 and 400 can be positioned very easily with respect to the twin process chambers 930 and 940 so that they can be re-inserted into the 930 and 940. The first and second end effectors 300 and 400 are fully mounted to the unload lock chamber 920 to take the substrate back out of the twin process chambers 930 and 940 and into the unload lock chamber 920. There is an advantage that it can be easily located.

On the other hand, in the present invention, unlike the prior art 1 using one long peak arm 10, even if the length of the first and second arms 6 and 7 is reduced, the minimum turning radius of the transfer robot is large, and the robot has a common transfer chamber. It is possible to reduce the minimum turning radius, which is a problem caused by the prior art 1, in which the area occupied within 900 is increased.

In addition, since the present invention is configured to rotate the two first and second end effectors 300 and 400 in synchronization with each other using one driving motor, two twin process chambers. The interval pitches of the first and second end effectors 300 and 400 may be flexibly changed to correspond to the separation distance between the chambers 930 and 940. Due to this effect, the simultaneous introduction of two substrates into two twin process chambers 930 and 940 can be achieved very smoothly. Can improve.

In addition, as shown in FIG. 1, the end effector further includes a pair of third and fourth end effectors 600 and 700 spaced apart from each other from side to side.

The end effector operation module 500 interlocks the third and fourth end effectors 600 and 700 to each other so that the rotation directions are synchronized with each other in opposite directions, and the third and fourth end effectors 600 and 700 are operated. Rotational drive any one of the) to be rotated to drive the rest, the first end effector 300 and the third end effector 600 is disposed up and down are installed to rotate independently on the basis of a common central axis, The second end effector 400 and the fourth end effector 700 are arranged up and down so as to be independently rotated based on a common central axis.

Therefore, in the present invention, compared to the prior art 2, the drive motor is provided with two drive motors individually, but the number of end effectors carrying the substrate is configured to double by 2 times compared to the prior art 2 While it is possible to double the transfer capacity of the substrate, it is possible to reduce the minimum radius of rotation during the transfer of the substrate and to reduce the area occupied by the transfer robot in the common transfer chamber 900.

In addition, two substrates can be simultaneously introduced into two twin process chambers 930 and 940 provided in a common transfer chamber, thereby doubling the substrate throughput per unit time. In addition, the driving power consumption and manufacturing cost can be reduced.

In addition, the pair of first and second end effectors 300 and 400 are synchronously rotated by a single drive motor, and the pair of third and fourth end effectors 600 and 700 by another drive motor. Because of the synchronous rotation operation, the operating error between the first and second end effectors 300 and 400 and the operating error between the third and fourth end effectors 600 and 700 are not generated.

Therefore, the first end effector 300 and the second end effector when two substrates are simultaneously introduced into the twin process chambers 930 and 940 using the first and second end effectors 300 and 400. It is possible to easily perform the operation of positioning the location of the 400 corresponding to the twin process chambers 930 and 940, respectively, as well as using the third end effector 600 and the fourth end effector 700 Since two substrates processed in the process chambers 930 and 940 can be taken out and loaded into a cassette provided in the unload lock chamber 920, the throughput per unit time for the substrate can be improved as much as possible.

That is, the present invention is configured to rotate the two first and second end effectors 300 and 400 in synchronization with each other using one drive motor, and the third and fourth end effectors 600. Since the 700 is configured to rotate in synchronization with each other using one driving motor, the first response corresponds to a separation distance between two twin process chambers 930 and 940. In addition, the pitch of the second end effectors 300 and 400 may be flexibly changed, and the pitch of the third and fourth end effectors 600 and 700 may be flexible. Can be changed. This effect makes it very easy to simultaneously introduce two substrates into two twin process chambers 930 and 940, and the substrate throughput per unit time. ) Can be improved.

Hereinafter, the detailed structure of the board | substrate conveyance robot by this invention is demonstrated.

First, the detailed configuration of the substrate transfer robot of the present invention will be described with reference to FIGS. 2 to 4.

The substrate transfer robot 800 according to the present invention includes a proximal end driving arm 100 and a proximal end driving arm 100 which are installed to be rotatable about a robot body 810, a center of the robot main body 810. A distal end driving arm 200 rotatably installed with respect to the distal end driving arm 200, and first, second, third, and fourth end effectors 300, 400, 600, and 700 installed on the distal end driving arm 200. And an end effector operation module 500 for the purpose of operation.

The robot body 810 has a substantially cylindrical shape with an open top.

Four drive shafts 811, 812, 813, 814 are arranged in the robot body 810 so as to be concentric.

The outermost first driving shaft 811 of the four driving shafts 811, 812, 813, 814 is formed in a cylindrical shape, and an upper end thereof protrudes through an upper opening of the robot body 810 to proximate a proximal end. The lower surface of the driving arm 100 is fixedly connected.

Here, the guide rail 810a is vertically formed on the inner wall surface of the robot body 810, and the guide member 810b is disposed between the guide rail 810a and the first drive shaft 811 so that the guide rail 810a is disposed. It is combined to be able to move up and down.

The guide member 810b is fixed to the outer surface of the housing 820 surrounding the outside of the first drive shaft 811, and the guide member 810b is provided at the bottom of the robot body 810 to guide rails 810a. The elevating drive motor 821 is fixedly installed so as to move up and down along (). The vertical movement screw 822 is screwed to the lower side of the housing 820, and the pulley 822a is fixed to the lower end of the vertical movement screw 822.

The pulley 822a of the vertical movement screw 822 is installed to transmit power through the pulley 821a and the belt 821b fixed to the motor shaft 821c of the driving motor 821 for lifting and lowering. 822 is rotated.

Therefore, when the driving motor 821 for lifting and lowering is driven, the vertical movement screw 822 is rotated, and the housing 820 which receives the rotational movement of the vertical movement screw 822 is guided with respect to the guide rail 810a. With the help of a linear guide of the member 810b, the robot body 810 moves up and down.

The first drive shaft 811 is rotatably installed inside the housing 820 via a bearing B. A pulley 811a is integrally formed at a lower end of the housing 820, and the pulley 811a is provided. Is installed via the pulley (P1) and the belt 811b installed on the motor shaft of the first drive motor (M1), when the first drive motor (M1) is driven, the first drive shaft (811) of the housing 820 It is rotatable inside, and as a result it is possible to rotate the base end driving arm 100 with respect to the center of the robot body 810.

The first driving shaft 811 is moved up and down with respect to the robot body 810 together with the housing 820 by driving the elevating driving motor 821, thereby driving the proximal end driving arm 100 and the distal end. The entire arm 200 may be moved up and down, thereby lifting the lower surface of the upper and lower substrates stacked up and down on the cassette disposed in the load lock chamber 910 with the end effector. The substrate can be carried out. In addition, not only the load lock chamber 910 but also the twin process chambers 930 and 940 and the unload lock chamber 920, when the substrate is added or removed, the substrate is lifted or the bottom surface of the substrate is supported. It can be returned.

Next, the second drive shaft 812 located inside the first drive shaft 811 among the four drive shafts 811, 812, 813, 814 is formed in a cylindrical shape like the first drive shaft 811. The upper end portion is positioned inside the proximal end driving arm 100 and the lower end portion has a length protruding from the lower end portion of the first driving shaft 811.

A bearing B is provided between the first drive shaft 811 and the second drive shaft 812 so as to be rotatable with each other.

A pulley 812a is formed at a lower end of the second drive shaft 812, and the pulley 812a is installed through a pulley P2 and a belt 812b provided on the motor shaft of the second drive motor M2. When the second driving motor M2 is driven, the second driving shaft 812 is rotated through the bearing B in the first driving shaft 811. A pulley 812c is provided at the upper end of the second drive shaft 812.

Next, the third drive shaft 813 located inside the second drive shaft 812 among the four drive shafts 811, 812, 813, 814 is formed in a cylindrical shape like the second drive shaft 812. The upper end portion is positioned inside the proximal end driving arm 100 to protrude from the second driving shaft 812, and the lower end portion has a length protruding from the lower end portion of the second driving shaft 812.

A bearing B is provided between the second drive shaft 812 and the third drive shaft 813 so as to be rotatable with each other.

A pulley 813a is formed at the lower end of the third drive shaft 813, and the pulley 813a is installed through the pulley P3 and the belt 813b provided on the motor shaft of the third drive motor M3. When the third driving motor M3 is driven, the third driving shaft 813 is rotated through the bearing B in the second driving shaft 812. A pulley 813c is formed at the upper end of the third drive shaft 813.

Next, the fourth driving shaft 814 located inside the third driving shaft 813 among the four driving shafts 811, 812, 813, 814 has an upper end extending into the proximal end driving arm 100, and It is rotatably coupled to the inner wall, the lower end has a length protruding from the lower end of the third drive shaft 813.

A bearing B is provided between the third drive shaft 813 and the fourth drive shaft 814 so as to be rotatable with each other.

A pulley 814a is formed at the lower end of the fourth drive shaft 814, and the pulley 814a is installed through the pulley P4 and the belt 814b provided on the motor shaft of the fourth drive motor M4. When the fourth driving motor M4 is driven, the fourth driving shaft 814 is rotated through the bearing B in the third driving shaft 813. A pulley 814c is formed on the upper end side of the fourth drive shaft 814.

On the other hand, the relationship between the rotational connection between the proximal end driving arm 100 and the distal end driving arm 200 is as follows.

A cylindrical hinge shaft 830 protrudes upward from an upper end of the proximal end driving arm 100, and an upper end of the hinge shaft 830 penetrates through a lower surface of one end of the distal end driving arm 200. Through 201).

A pulley 830a is formed at an upper end of the hinge shaft 830 located inside the distal end driving arm 200, and a bearing B is installed between the hinge shaft 830 and the installation hole 201.

Therefore, by the hinge shaft 830, the proximal end driving arm 100 and the distal end driving arm 200 can form a condition that can be rotated relative to each other, so that they can be superimposed on one another or unfolded in a straight line. do.

The inside of the hinge shaft 830 is provided with a cylindrical first power transmission shaft 831 rotatably installed via a bearing (B), the upper end of the first power transmission shaft 831 is hinged Protruding from the upper end of the shaft 830, the lower end is located inside the proximal end driving arm 100.

A pulley 831a is formed at an upper end of the first power transmission rotation shaft 831, and a pulley 814c formed at an upper end of the fourth driving shaft 814 and a pulley 831b that is powered by a belt BT are formed at the lower end of the first power transmission rotation shaft 831. Is formed, because of this, when the fourth drive shaft 814 is rotated, the first power transmission shaft 831 is to be rotated to operate.

Inside the first power transmission shaft 831 is provided a cylindrical second power transmission shaft 832 rotatably installed through the bearing (B), the second power transmission shaft 832 The upper end protrudes from the upper end of the first power transmission rotation shaft 831, and the lower end protrudes from the lower end of the first power transmission rotation shaft 831.

A pulley 832a is formed at an upper end of the second power transmission rotation shaft 832, and a pulley 813c formed at an upper end of the third drive shaft 813 and a pulley 832b that is powered by a belt BT are formed at the lower end. In this case, when the third driving shaft 813 is rotated, the second power transmission rotating shaft 832 is rotated.

A third power transmission rotation shaft 833 is installed inside the second power transmission rotation shaft 832 so as to be rotatable via a bearing B. An upper end of the third power transmission rotation shaft 833 is a distal driving arm ( It is fixed to the ceiling wall surface of the 200, the lower end portion is formed with a pulley 812c and a pulley 833b which is powered by the belt BT formed on the upper end of the second drive shaft 812, thereby, the second When the drive shaft 812 is rotated, the third power transmission rotation shaft 833 rotates, which causes the distal end drive arm 200 to rotate relative to the proximal end drive arm 100 so that they overlap each other vertically or in a straight line. You can implement the expanded state.

Meanwhile, the connection relationship between the distal end driving arm 200 and the end effect actuation module 500 is as follows.

A fourth power transmission shaft 844 having a cylindrical shape rotatably installed through the bearing B is installed in the through hole 202 formed through the end of the distal end driving arm 200. The upper end of the rotary shaft 844 is introduced into the inside through an installation hole 500A-1 formed through the lower surface of one end of the operation module case 500A constituting the end effector operation module 500, and the lower end is driven by a distal end driving arm ( 200 is drawn into the interior.

A pulley 844a is formed at an upper end of the fourth power transmission rotation shaft 844, and a pulley 844b that is powered by a pulley 832a and a belt BT formed at an upper end of the second power transmission rotation shaft 832. ) Is formed, and when the second power transmission rotation shaft 832 is rotated, the fourth power transmission rotation shaft 844 is rotated.

A fifth power transmission rotation shaft 845 is installed inside the fourth power transmission rotation shaft 844 so as to be rotatable through a bearing B. A pulley 845a is provided at an upper end of the fifth power transmission rotation shaft 845. And a pulley 845b connected to the pulley 831a and the belt BT formed at the upper end of the first power transmission rotation shaft 831 at a lower end thereof. For this reason, when the first power transmission shaft 831 is rotated, the fifth power transmission shaft 845 is rotated.

Inside the fifth power transmission shaft 845 is provided a sixth power transmission shaft 846 rotatably installed via a bearing (B), the upper end of the sixth power transmission shaft 846 is an end effector A pulley 846b installed on the inner wall of the ceiling of the operation module case 500A constituting the operation module 500, and having a lower end connected to a pulley 830a and a belt BT formed at an upper end of the hinge shaft 830. ) Is formed.

On the other hand, the end effector operation module 500, as shown in Figures 2 to 4, as described above has an operation module case 500A.

On one side of the operating module case 500A, which is spaced apart from the fourth power transmission shaft 844, a cylindrical first drive rotary shaft 511 for the end effector rotates about the axial direction via the bearing B. The upper end of the first drive rotary shaft 511 for the end effector protrudes above the operation module case 500A, and the lower end is located inside the operation module case 500A.

The first end effector 300 is formed at the upper end of the first drive rotation shaft 511 for the end effector, and the first rotational force transmission gear 511a having a gear type is formed at the lower end.

In addition, in the operation module case 500A at a position spaced left and right from the first drive rotary shaft 511 for the end effector, the cylindrical second drive rotary shaft 512 for the end effector has an axial direction through the bearing B. The upper end of the second drive rotary shaft 512 for the end effector protrudes to the upper part of the operating module case 500A, and the lower end is located inside the operating module case 500A.

A second end effector 400 is formed at an upper end of the second drive rotation shaft 512 for an end effector, and a second rotational force transmission gear 512a having a gear type is disposed at the lower end with the first rotational force transmission gear 511a. It is formed to be coupled.

A power transmission gear unit 512c is formed on an outer surface of any one of the first and second drive rotation shafts 511 and 512 for the end effector, and a bracket formed on one vertical wall of the operation module case 500A. Rotation shaft portion 512d is rotatably coupled up and down to 500A-2, and an upper end portion of the rotation shaft portion 512d is connected to the power transmission gear portion 512c and the belt BT by a medium. A pulley 512e is formed, and a pulley 512f connected to the lower end of the rotation shaft 512d to enable power transmission via a pulley 845a and a belt BT formed at the upper end of the fifth power transmission rotation shaft 845. ) Is formed.

Accordingly, as the fifth power transmission rotation shaft 845 is rotated, the rotation shaft portion 512d is rotated, and the first rotational force transmission gear 511a rotates by being engaged with each other by gear coupling by receiving the rotational force of the rotation shaft portion 512d. And the first and second drive rotation shafts 511 and 512 for the first and second end effectors 300 and 400 are rotated in the right direction (clockwise) or left by the second rotation force transmission gear 512a. Direction (counterclockwise), and the other is rotated in the opposite direction by the synchronous operation.

As a result, the first end effector 300 and the second end effector 400 are disposed in opposite directions as the first and second drive rotation shafts 511 and 512 for the left and right end effectors are synchronized with each other. Can be rotated to expand or contract the angle between them.

On the other hand, the third drive rotary shaft 513 for the end effector is rotatably installed through the bearing (B) inside the first drive rotary shaft 511 for the end effector, the third drive rotary shaft 513 for the end effector. The upper end of the protrudes from the upper portion of the first drive rotation shaft 511 for the end effector, the lower end protrudes from the lower portion of the first drive rotation shaft 511 for the end effector.

A third end effector 600 is formed at an upper end of the third drive rotation shaft 513 for the end effector, and a third rotational force transmission gear 513a having a gear type is formed at the lower end.

In addition, the fourth drive rotary shaft 514 for the end effector is connected to the inside of the second drive rotary shaft 512 for the end effector at a position spaced left and right from the third drive rotary shaft 513 for the end effector via the bearing B. It is rotatably installed, the upper end of the fourth drive rotary shaft 514 for the end effector protrudes from the top of the second drive rotary shaft 512 for the end effector, the lower end is the lower portion of the second drive rotary shaft 512 for the end effector Protrudes from.

A fourth end effector 700 is formed at an upper end of the fourth drive rotation shaft 514 for the end effector, and a fourth rotational force transmission gear 514a having a gear type is disposed at the lower end with a third rotational force transmission gear 513a. It is formed to be coupled.

Here, the first, second, third, and fourth end effector 300, 400, 600, 700, the first, second, third, and fourth drive rotary shaft 511 for the end effector to form different heights Preferably, the heights 512, 513, and 514 protrude from the operating module case 500A.

On the other hand, the pulley 513c is formed on the lower surface of any one of the third and fourth rotational force transmission gears 513a and 514a respectively formed at the lower ends of the third and fourth drive rotation shafts 513 and 514 for the end effector. It is formed, and the rotating shaft portion 513d is rotatably coupled to the bracket (500A-3) formed on the other vertical wall of the operation module case (500A), the upper and lower ends of the rotary shaft portion (513d) A pulley 513e connected to the pulley 513c and the belt BT is formed therein, and a pulley 844a and a belt formed at the upper end of the fourth power transmission rotating shaft 844 at the lower end of the rotating shaft 513d. A pulley 513f is formed to be connected to the power transmission via the BT.

Accordingly, as the fourth power transmission rotation shaft 844 is rotated, the rotation shaft portion 513d is rotated, and the third rotation force transmission gear 513a is rotated by being engaged with each other by gear coupling by receiving the rotational force of the rotation shaft portion 513d. And the fourth rotational force transmission gear 514a, one of the third and fourth drive rotation shafts 513 and 514 for the third and fourth end effectors 600 and 700 is in the right direction (clockwise) or the left direction. (Counterclockwise) and the rest are rotated in opposite directions by synchronous operation.

As a result, the third end effector 600 and the fourth end effector 700 are opposite to each other as the third and fourth driving rotation shafts 513 and 514 for the end effector arranged to the left and right are synchronized with each other. Can be rotated to expand or contract the angle between them.

Meanwhile, the first and second end effectors 300 and 400 according to the present invention described above are respectively formed in the arm portions 310 and 410 and the arm portions 310 and 410 to support the substrate. And 320 and 420, and the hand parts 320 and 420 are bent at an angle to the ends of the arm parts 310 and 320. Here, the angles of the hand parts 320 and 420 and the arm parts 310 and 320 are not limited and may be variously changed.

By doing so, it is easy to take out the unprocessed substrate from the cassette disposed in the load lock chamber 910, and the twin process chambers 930 and 940 and the first and the first process for processing the two substrates removed. The two end effectors 300 and 400 may correspond to the hand parts 320 and 420 one-to-one to easily input two substrates.

The third and fourth end effectors 600 and 700 may include arm parts 610 and 710; Each of the arm parts 610 and 710 extends to form a hand part 620 and 720 for supporting a substrate, and the hand parts 620 and 720 are formed at ends of the arm parts 610 and 710. It is formed to be bent at an angle. Here, the angles of the hand parts 620 and 720 and the arm parts 610 and 710 are not limited and may be variously changed.

By doing so, the two substrates which have been processed by one-to-one correspondence of the twin process chambers 930 and 940 and the hand parts 610 and 710 of the third and fourth end effectors 600 and 700 are transferred from the twin process chamber. The take-out operation can be easily performed, and it can be carried into the processed substrate unload lock chamber and can be reloaded up and down in the cassette.

Here, the first and second end effector (300) 400 and the arm (310, 410); Each of the arm parts 310 and 410 is formed to extend to each of the hand parts 320 and 420 supporting the substrate, and the third and fourth end effectors 600 and 700 are arm parts 610. 710; When the arm parts 610 and 710 are formed to extend to each of the hand parts 620 and 720 to support the substrate, the hand parts are aligned with the arm parts 310, 410, 610 and 710. It is possible to reduce the minimum rotation radius with respect to the robot body 810 when transferring the substrate than when the parts 320, 420, 620, and 720 are formed, and the entire robot assembly is integrated in the common transport chamber. It can reduce the area occupied by. In addition, when the twin process chambers 930 and 940 are arranged in parallel to the left and right, the operation of the end effector can be optimally realized so that the end effector can enter and exit the chamber 930 and 940. It becomes possible.

Meanwhile, in the present invention, any one of the first and second driving rotary shafts 511 and 512 for the first and second end effectors 300 and 400 is in a right direction (clockwise) or a left direction (counterclockwise). In addition to the configuration in which the first rotational force transmission gear 511a and the second rotational force transmission gear 512a are geared to each other in order to rotate in the opposite direction and to rotate the rest in the opposite direction by the synchronous operation, FIG. As shown in FIG. 1, the first rotational force transmission gear 511a and the second rotational force transmission gear 512a are configured as pulleys instead of gear types, but are arranged to be spaced apart from each other by a belt BT. ) Can be installed staggered.

In addition, in the present invention, any one of the third and fourth drive rotation shafts 513 and 514 for the third and fourth end effectors 600 and 700 may be rotated in a right direction (clockwise) or in a left direction (counterclockwise). In addition to the configuration in which the third rotational force transmission gear 513a and the fourth rotational force transmission gear 514a are geared to each other in order to be rotated and to be rotated in the opposite direction by the synchronous operation, FIG. As shown in the figure, the third rotational force transmission gear 513a and the fourth rotational force transmission gear 514a are configured as pulleys instead of gear types, but are arranged to be spaced apart from each other by a belt BT. Can be installed staggered.

The operation process for the detailed configuration of the transfer robot of the present invention described above will be described as follows.

(I) The process of lifting the substrate to carry in and take out the substrate placed on the upper surface of the hand portion

When driving the elevating drive motor 821, the rotational force of the pulley 821a of the drive motor 821 is transmitted to the pulley 822a formed at the lower end of the vertical movement screw 822 via the pulley 821b, The moving screw 822 is rotated. The housing 820 is not rotated by the rotational force of the vertical movement screw 822, but moves upward with the guide member 810b linearly moving upward along the guide rail 810a. Accordingly, the substrate is allowed to enter a predetermined height while supporting the lower surfaces of the substrates disposed in the load lock chamber 910 and the twin process chambers 930 and 940.

(II) Process of putting the substrate mounted on the end effector back to the twin process chamber 930 or 940 or the unload lock chamber 920.

When driving the elevating driving motor 821 in the opposite direction to the driving direction in the (I) process, the rotational force of the pulley 821a of the driving motor 821 is applied to the vertical movement screw 822 through the pulley 821b. It is transmitted to the pulley 822a formed at the lower end to rotate the vertical movement screw 822. The housing 820 is not rotated by the rotational force of the vertical movement screw 822, but moves downward with the guide member 810b linearly moving downward along the guide rail 810a. Accordingly, the substrate may be introduced into the unload lock chamber 920 and the twin process chambers 930 and 940.

(III) a process of rotating the proximal end driving arm 100, the distal end driving arm 200, and the end effector operation module 500 relative to the robot body 810.

 When the first drive motor M1 is driven to rotate the first drive shaft 811 through the belt 811b and the pulley 811a, the proximal end drive arm 100 and the distal end drive arm 200 and the end effector operation module ( The entirety of 500 may be rotated about the robot body 810 about the fourth drive shaft 814 about the axis.

(IV) a process of rotating the distal end driving arm 200 with respect to the proximal end driving arm 100

When the second drive motor M2 is driven to rotate the second drive shaft 812, the pulley 812c formed at the upper end of the second drive shaft 812 is rotated, and the rotational force of the pulley 812c is the belt BT. Is transmitted to the pulley 833b to rotate the third power transmission rotation shaft 833. Here, because the upper end of the third power transmission shaft 833 is fixed to the ceiling inner wall surface of the distal end driving arm 200, the distal end driving arm 200 has a third power transmission rotating shaft 833 with respect to the proximal end driving arm 100. ) Is rotated axially and the distal end driving arm 200 may be completely overlapped at the upper end of the proximal end driving arm 100, and may be aligned with each other according to the driving amount of the second driving motor. It may be in a bent state at a predetermined angle.

As a result, the proximal end drive arm 100 and the distal end drive arm 200 may jointly move with each other to position the entire end effector operation module 500 in close proximity to the robot body 810, and as far as possible from the robot body 810. To be spaced apart.

(V) Process of driving the first end effector and the second end effector

When the fourth driving motor M4 is driven, the fourth driving shaft 814 is rotated, and the rotational force of the fourth driving shaft 814 is applied to the pulley 814c, the belt BT, and the pulley 831b formed at the upper end thereof. The first power transmission rotation shaft 831 is rotated through the rotational force of the first power transmission rotation shaft 831 through the pulley 831a, belt BT, and pulley 845b formed at an upper end thereof. The rotating shaft 845 is rotated, and the rotational force of the fifth power transmission rotating shaft 845 is a pulley 845a, a belt BT and a pulley 512f, a rotating shaft portion 512d, and a pulley 512e formed at an upper end thereof. Finally, the belt BT and the power transmission gear unit 512c are finally delivered to rotate one of the first and second drive rotation shafts 511 and 512 for the end effector.

Subsequently, as one of the first and second driving rotary shafts 511 and 512 is rotated, the other parts are synchronized with each other and rotated in opposite directions.

Accordingly, the mutual angles of the first and second end effectors 300 and 400 provided on the first and second drive rotation shafts 511 and 512 in accordance with the driving direction of the fourth drive motor M4 are transferred to the substrate. You can change it to the required angle.

(VI) Driving the third end effector and the fourth end effector

When the third drive motor M3 is driven, the third drive shaft 813 is rotated, and the rotational force of the third drive shaft 813 is applied to the pulley 813c, the belt BR, and the pulley 832b formed at the upper end thereof. The second power transmission rotating shaft 832 is rotated through the rotational force of the second power transmission rotating shaft 832 through the pulley 832a, the belt BT, and the pulley 844b formed at an upper end thereof. The rotating shaft 844 is rotated, and the rotational force of the fourth power transmission rotating shaft 844 is the pulley 844a, the belt BT and the pulley 513f, the rotating shaft portion 513d, and the pulley 513e formed at the upper end thereof. ), The belt BT, and the power transmission gear unit 513c are finally delivered to rotate one of the third and fourth drive rotation shafts 513 and 514 for the end effector.

Subsequently, as one of the first and second driving rotation shafts 513 and 514 is rotated, the other is also synchronized with each other to rotate in opposite directions.

Accordingly, the mutual angles of the third and fourth end effectors 600 and 700 provided on the third and fourth drive rotation shafts 513 and 514 in accordance with the driving direction of the third drive motor M3 are transferred to the substrate. You can change it to the required angle.

As described above, the substrate transfer operation according to the exemplary embodiment of the present invention illustrated in FIG. 1 will be described with reference to FIGS. 5 to 7.

Here, before describing the substrate conveyance operation of the present invention, each of the twin process chambers 930 and 940 of the common conveyance chamber 900 is provided with a substrate W (circle indicated by a solid line) to be processed one by one. The following description will be given on the assumption that an unprocessed substrate (circled by a dashed-dotted line) is loaded in a cassette disposed in the load lock chamber 910.

First, as shown in Fig. 5 (a), the transfer robot 800 according to the present invention is set to the origin state. That is, the first and third end effectors 300 and 600 are vertically aligned, and the second and fourth end effectors 400 and 700 are vertically aligned, and the proximal end driving arm 100 is aligned with each other. The distal end driving arm 200 is rotated to position each other so as to be close to the robot body 810 with a minimum angle to each other, thereby setting to a home position which is a minimum rotation angle condition. The proximal end portion is driven so that the first, second, third, and fourth end effectors 300, 400, 600, and 700 face the load lock chamber 910 of the common transport chamber 900. The arm 100 is rotated relative to the robot body 810.

Subsequently, as shown in FIG. 5 (b), the proximal end driving arm 100 and the distal end driving arm 200 extend toward the load lock chamber 910 with respect to the robot body 810. The unprocessed substrate of the cassette disposed in the load lock chamber 910 by driving the distal drive arm 200 and operating a single drive motor to operate the first and second end effectors 300 and 400 in synchronization with each other. Support the lower surface of the circle (dotted dashed line).

In this case, two unprocessed substrates stored up and down in the cassette by the first and second end effectors 300 and 400 are brought out of the load lock chamber 910.

In this case, the third and fourth end effectors 600 and 700 may be synchronized with each other by the driving of another single driving motor, and thus, may not be drawn into the load lock chamber 910 and may be inserted into the common transport chamber 900. It is in a state to be located.

Next, as shown in FIG. 5C, the first and third end effectors 300 and 600 are matched up and down as well as the second and fourth end effectors 400 and 700. To be aligned up and down, and the proximal end driving arm 100 and the distal end driving arm 200 are rotated to position each other so as to be close to the robot body 810 by minimizing the mutual angle, and thus the original state of the minimum rotation angle. Set it back to.

In this case, the two substrates are taken out from the load lock chamber 910 by the first and second end effectors 300 and 400 to be as close to the robot body 810 as possible.

Subsequently, as shown in FIG. 5 (d), the proximal end driving arm 100 is rotated around the robot body 810 so that the first, second, third and fourth end effectors 300, 400, and 600 are rotated. 700 is positioned to face twin process chambers 930 and 940.

Meanwhile, while performing the processes of FIGS. 5A, 5B, and 5D, a predetermined semiconductor process is performed on the substrate W introduced into the twin process chambers 930 and 940.

Next, as shown in FIG. 5E, when the semiconductor process processing for the substrate is completed in the twin process chambers 930 and 940, the twin process chamber 930 is driven by driving a single drive motor. The third and fourth end effectors 600 and 700 are synchronized with each other so as to correspond one-to-one, and each unprocessed substrate W is mounted by driving a single drive motor. The first and second end effectors 300 and 400 are rotated synchronously to each other such that they are positioned opposite each other.

Thereafter, as shown in FIG. 6G, the proximal end driving arm 100 and the distal end driving arm 200 are extended toward the twin process chambers 930 and 940 with respect to the robot body 810. 100 and the end drive arm 200 are rotated to drive the third and fourth end effectors 600 and 700 into the twin process chambers 930 and 940 to support the bottom surface of the processed substrate, respectively. Do it.

Next, as shown in Figure 6 (h), by rotating the proximal end driving arm 100 and the distal end driving arm 200 to each other to minimize the angle between the robot body 810 by positioning The third and fourth end effectors 600, 700 are removed from the twin process chambers 930, 940.

In this case, each of the unprocessed substrates W is mounted on the first and second end effectors 300 and 400 in the common transport chamber 900 illustrated in FIG. And each of the processed substrates W (indicated by a hatched circle) is mounted on the fourth end effectors 600 and 700, respectively.

Thereafter, the first and second end effectors 300 and 400 supporting the unprocessed substrate W are directed toward the twin process chambers 930 and 940 through the process of FIG. 6 (i) (j). The third and fourth end effectors 600 and 700 supporting the processed substrate are directed in the opposite directions of the twin process chambers 930 and 940.

Next, as shown in FIG. 6 (k), the first and second end effectors 300 and 400 that support the substrate W (circled in solid lines) to be processed in an untreated state are twin-processed. The proximal end driving arm 100 and the distal end driving arm 200 are operated so as to be introduced into the chambers 930 and 940.

Thereafter, as shown in FIG. 6 (1), the proximal end driving arm 100 and the distal end driving arm 200 are operated to overlap each other at a minimum rotational angle, so as to be untreated in the twin process chambers 930 and 940. Substrate The substrate W to be processed (circle indicated by the solid line) is input, and then the first and second end effectors 300 and 400 are discharged from the twin process chambers 930 and 940.

Next, the proximal end driving arm 100 and the distal end driving arm 200 are rotated through the process of FIG. 7 (m) (n), respectively, to minimize the mutual angle and to position the robot main body 810 close to each other. In addition, the first and third end effectors 300 and 600 are folded up and down, and the second and fourth end effectors 400 and 700 are folded up and down, but the first, second, third, and fourth End effectors 300, 400, 500, 600 face the twin process chambers 930, 940.

At this time, the processed substrate W (circled circle) is mounted on the third and fourth end effectors 600 and 700.

Subsequently, as shown in FIG. 7 (o), the proximal end driving arm 100 is rotated about 180 ° with respect to the robot body 810 so as to rotate the first, second, third, and fourth end effector 300 ( 400, 500 and 600 are directed toward the unload lock chamber 920 side.

Next, as shown in FIG. 7 (p), the proximal end driving arm 100 and the distal end driving arm 200 are rotated with respect to the robot body 810 to be unfolded toward the unload lock chamber 920. A single drive motor is operated to synchronously operate the third and fourth end effectors 600 and 700 so that the processed substrate W (circled in a circle) is placed in a cassette disposed in the unload lock chamber 920. do. At this time, the first and second end effectors 300 and 400 are not retracted into the unload lock chamber 920 but are retracted into the common transfer chamber 900.

Subsequently, the proximal end driving arm 100 and the distal end driving arm 200 and the first, second, third and fourth end effectors 300 and 400 may be in the same state as that of FIG. 7 (o) in the state of FIG. 7 (p). After driving 600 and 700 to the state shown in FIG. 5 (q), the proximal end driving arm 100 is rotated by a predetermined angle around the main body 810 to rotate the predetermined angle. As shown in (a), the first, second, third and fourth end effectors 300, 400, 600 and 700 are changed to face the unload lock chamber 910 side.

As described above, in the embodiment of the present invention, the first and second end effectors 300 and 400 convey the unscheduled substrates of the load lock chamber 910 by the substrate conveying process illustrated in FIGS. 5 to 6. Afterwards, it may be introduced into the twin process chambers 930 and 940, and the third and fourth end effectors 600 and 700 may take out and unload the processed substrate from the twin process chambers 930 and 940. It may be introduced into the chamber 920.

In addition, in the exemplary embodiment of the present invention, the first and second end effectors 300 and 400 may be loaded into the load lock chamber 910 while a predetermined process process is performed on the substrate in the twin process chambers 930 and 940. After conveying the unsuccessful substrates of the < RTI ID = 0.0 >), < / RTI > Immediately after removing the processed substrate in the 940, the process proceeds to the process of injecting the untreated substrate into the twin process chambers 930 and 940, thereby improving substrate throughput per unit time for the substrate.

On the other hand, the present invention, as described above, the first, second, third, fourth end effector 300, 400, 600, 700, the height of the first end effector to be formed in all differently, As the 2, 3, 4 drive rotation shafts 511, 512, 513, 514 form different heights protruding from the operating module case 500A, as shown in FIG. The first, second, third, and fourth end effectors 300, 400, 600, and 700 are introduced into the load lock chamber 910, which is arranged in a plurality of layers, to convey four substrates simultaneously. Can be taken out of the load lock chamber 910.

Subsequently, the first and second end effectors 300 and 400 are driven to rotate in synchronization with each other, and the third and fourth end effectors 600 and 700 are driven to rotate in synchronization with each other. Switch to a state as shown in FIG.

In this case, each of the four first, second, third, and fourth end effectors 300, 400, 600, and 700 of the hand parts 320, 420, 620, and 720 has an untreated substrate. It is in a raised state.

Next, the first and second end effectors 300 and 400 are driven to rotate in synchronization with each other, and the third and fourth end effectors 600 and 700 are driven to rotate in synchronization with each other. Switch to the state as shown in c), but insert the hand parts 620 and 720 of the third and fourth end effectors 600 and 700 into the twin process chambers 930 and 940. The substrate of the is loaded. In this case, the first and second end effectors 300 and 400 may be in a standby state in the common transport chamber 900.

Thereafter, although not shown in the drawing, the third and fourth end effectors 600 and 700 are withdrawn from the twin process chambers 930 and 940 and then the two substrates in the twin process chambers 930 and 940. Proceed with process.

Next, after the processing of the two substrates is completed, the third and fourth end effectors 600 and 700 are advanced again into the twin process chambers 930 and 940 to process the two processed substrates. After taking out, it enters into the unload lock chamber 920.

Thereafter, the first and second end effectors 300 and 400 which are in the standby state are allowed to enter the twin process chambers 930 and 940 to load two substrates, and then the first and second end ends. The effectors 300 and 400 are withdrawn from the twin process chambers 930 and 940, and then the two process substrates are processed in the twin process chambers 930 and 940.

Next, after the processing of the two substrates is completed, the first and second end effectors 300 and 400 are moved back into the twin process chambers 930 and 940 to process the two processed substrates. After taking out, it enters into the unload lock chamber 920.

Accordingly, the present invention provides the first, second, third and fourth end effectors 300, 400 and 600 into the load lock chamber 910 as shown in FIGS. 8 (a) (b) (c). (700) by entering the four substrates at the same time take out and convey the process in the twin process chambers (930, 940), the time required to transport into the unload lock chamber 920 can be reduced as much as possible, and Throughput of the substrate can be improved.

On the other hand, the present invention, in the configuration of the above-described embodiment, it is possible to configure another embodiment in which the end effector operation module 500 is rotatably installed with respect to the distal end driving arm 200 using a separate drive motor.

According to another embodiment of the present invention, as shown in FIG. 9, two sets of twin process chambers 930 and 940 are formed on the upper side 901 of the common transfer chamber 900, and the common transfer chamber is shown. Two pairs of twin process chambers 930 and 940 may be configured at the lower side 902 of the 900, and two load lock chambers 910 at the side 903 perpendicular to the upper and lower side 901 and 902. ), And the unload lock chamber 920 may be configured at the side surfaces 904 facing the two load lock chambers 910.

That is, according to the exemplary embodiment of the present invention illustrated in FIG. 9, the throughput of the substrate may be improved by configuring the common transfer chamber 900 in an in-line form.

In the embodiment shown in Figure 9 of the present invention, as shown in Figure 9, because the end effector operation module 500 is a structure that is rotatably installed by the distal end driving arm 200 by a separate drive motor, The second and fourth end effectors 400 and 700 may be overlapped up and down so that two substrates can be taken out from a cassette disposed in any one of the two load lock chambers 910. In addition, the first and third end effectors 300 and 600 may overlap each other in a vertical manner so that two substrates may be taken out from the cassette disposed in the remaining load lock chamber 910. That is, the process of carrying out two substrates using the second and fourth end effectors 400 and 700 and the carrying out of two substrates using the first and third end effectors 300 and 600. If the process is carried out at the same time, four unprocessed substrates can be carried out at the same time.

Therefore, according to the present invention, the four substrates are simultaneously taken out, and the two untreated substrates W are processed by using the first and second end effectors 300 and 400 at the upper side of the common transfer chamber 900. 901 into two sets of twin process chambers 930 and 940 and then the third and fourth end effectors 600 and 700 are used to Into the twin process chambers 930 and 940.

In addition, according to the present invention, four substrates are simultaneously taken out, and two untreated substrates W are disposed on the upper and lower sides of the common transfer chamber 900 by using the first and second end effectors 300 and 400. 902 of the two sets of twin process chambers 930 and 940 into one set of twin process chambers 930 and 940 and then the remaining one set using the third and fourth end effectors 600 and 700. Into twin process chambers 930 and 940.

And this invention is two sets of twin process chambers 930 and 940 comprised in the upper side 901 of the common conveyance chamber 900, and two sets of twin processes comprised in the lower side 902 of the common conveyance chamber 900. The chambers 930 and 940 may be configured as process chambers for performing different semiconductor processes.

So far, the operating principle and the substrate conveying process according to the embodiment of the present invention have been described.

9 shows that the end effector operation module 500 of the configuration of the present invention is rotatably installed with respect to the distal end driving arm 200, and is provided in the common transport chamber 900 shown in FIG. It shows the configuration to apply.

2 shows a lift drive motor 821 and a first drive motor M1 to drive four first, second, third and fourth end effectors 300, 400, 600, and 700. ), The second driving motor M2, the third driving motor M3, and the fourth driving motor M4 are configured by using the minimum number of five driving motors.

The configuration of the present invention shown in FIG. 9 adds one drive motor M5 and employs six drive motors so that the end effector operation module 500 can be rotated relative to the distal drive arm 200. It is made up.

That is, as shown in FIG. 9, a fifth drive shaft 815 is further provided between the third drive shaft 813 and the fourth drive shaft 814, and the pulley 813a (the lower end side of the fifth drive shaft 815) ( The pulley 815a is provided between 814a, and the pulley 815c is provided between pulleys 813c and 814c on the upper end side of the fifth drive shaft 815.

In addition, the pulley 815a provided at the lower end of the fifth drive shaft 815 is provided via the pulley P5 and the belt 815b provided on the motor shaft of the fifth drive motor M5, and the fifth drive motor M5. ) Is driven, the fifth drive shaft 815 is rotated through the bearing B in the third drive shaft 813.

In addition, the pulley 815c installed at the upper end of the fifth drive shaft 815 is connected to the pulley 831b formed at the lower end of the first power transmission rotation shaft 831 via a belt BT, and the pulley 813c is formed at the upper end of the fifth drive shaft 815. 2 is connected to the pulley 832b formed at the lower end of the power transmission rotation shaft 832 via a belt BT, and the pulley 812c is connected to the pulley 833b formed at the lower end of the third power transmission rotation shaft 833. BT).

The hinge shaft 830 is rotatably installed on the proximal end driving arm 100 via the bearing B without being fixedly installed on the upper end of the proximal end driving arm 100 as shown in FIG. Then, the pulley 830b is installed to rotate by receiving the rotational force of the pulley 814c through the belt BT.

In addition, the pulley 830a installed at the upper end of the hinge shaft 830 is configured to transmit power to the pulley 846b through the belt BT as in FIG. The pulley 846b, which is rotated by the rotational force of the pulley 830a, is rotated together with the sixth power transmission shaft 846, thereby fixing the upper end of the sixth power transmission shaft 846 to the operation module case 500A. When the fourth drive shaft 814 is rotated, the rotational force rotates the hinge shaft 830, and the rotational force of the hinge shaft 830 is the sixth power transmission shaft 846 through the pulleys 830a and 836b. By rotating), the operation module case 500A constituting the end effector operation module 500 is rotated relative to the distal drive arm 200.

Hereinafter, the remaining configuration shown in FIG. 10 is the same as the configuration shown in FIG.

On the other hand, the substrate transfer robot according to the present invention described above should be implemented so as to be a condition in which communication between the inside and the outside of the common transfer chamber 900 is not possible when the substrate is to be transported and processed in a vacuum state. .

The configuration will be described below.

As shown in FIGS. 2 and 9, the member number 950 is a bottom portion of the common transfer chamber 900, and a through hole 951 having a diameter slightly smaller than that of the upper opening portion of the robot body 810 is formed. .

The upper side corresponds to the internal space of the common transfer chamber 900 based on the bottom portion 950 of the common transfer chamber 900, and the lower side is common based on the bottom portion 950 of the common transfer chamber 900. It corresponds to the outer space of the conveyance chamber 900.

The robot body 810 is fixed to the bottom surface of the bottom portion 950 of the common transport chamber 900.

Thus, the present invention is implemented between the first drive shaft 811 and the housing 820, the first drive shaft 811 in order to implement a condition that communication between the air between the inside / outside of the common transport chamber 900 is not possible. And magnetic fluid seal between the second drive shaft 812, between the second drive shaft 812 and the third drive shaft 813, and between the third drive shaft 813 and the fourth drive shaft 814. 960 is provided to prevent air from being communicated between the first drive shaft 811 and the housing 820.

Here, the magnetic fluid seal 960 is installed when it is necessary to maintain the common conveyance chamber 900 in a high vacuum state, and when it is necessary to maintain the common conveyance chamber 900 in a low vacuum state. Instead of the magnetic fluid seal 960, a leaf seal may be provided.

Then, an elastic bellows tube 961 of an elastic bellows type, which is installed by connecting the outer side of the housing 820 and the lower surface of the bottom portion 950 of the common transport chamber 900, is installed, and the housing 820 and the robot body ( The space between 810 prevents communication between the internal space of the common transport chamber 900 and the air.

Here, the bellows tube 961 is elastically compressed when the housing 820 is moved upward, and is stretched elastically when the housing 820 is moved downward.

Accordingly, the present invention can be applied to the case where the substrate is to be transported and processed in a vacuum state by further providing the magnetic fluid seal 960 and the bellows 961 as described above, but are not necessarily limited thereto. In the case of applying the substrate to the transfer process, the above-described configuration of the magnetic fluid chamber 960 and the bellows tube 961 may not be applied.

1 is a plan view of a substrate transfer robot of cylindrical coordinate type according to an embodiment of the present invention.

2 is a cross-sectional view of the leader line "A-A" shown in FIG.

3 is a cross-sectional view of the leader line "B-B" shown in FIG.

4 is a cross-sectional view of the leader line "C-C" shown in FIG.

5 to 7 is a view showing an embodiment of the process of the substrate is transferred by the substrate transfer robot shown in FIG.

8 is a view showing another embodiment of the process of the substrate is transferred by the substrate transfer robot shown in FIG.

FIG. 9 is a cross-sectional view of the horizontal articulated type substrate transfer robot cut in the direction of the “AA” portion in FIG. 1 according to another embodiment of the present invention, wherein the end effector operating module can be rotated with respect to the distal end driving arm. Sectional view showing the internal configuration of the base carrier robot for installation.

10 is a view showing the structure and the substrate transfer operation of the common transfer chamber that can be implemented when the substrate transfer robot according to the embodiment shown in FIG.

11 is a perspective view illustrating main parts of another embodiment of the present invention.

12 and 13 show a schematic configuration of the prior art 1,2.

<Explanation of symbols for the main parts of the drawings>

100: proximal end driving arm 200: distal end driving arm

300: first end effector 400: second end effector

500: end effector operation module 600: third end effector

700: fourth end effector 810: robot body

Claims (4)

In a substrate transfer robot, a plurality of drive arms are rotatably connected to each other for joint motion, and the substrate transfer robot is configured to carry a substrate by an end effector mounted on a distal end drive arm of the plurality of drive arms. The end effector is composed of a pair of first and second end effectors spaced apart from each other left and right, and a pair of third and fourth end effectors spaced apart from each other left and right, By interlocking the first and second end effector with each other on the distal end driving arm such that the rotation direction is synchronously reversed, one of the first and second end effectors is rotationally driven so that the other is rotationally driven, and the third And an end effector operation module for interlocking the fourth end effector with each other so that the rotation direction is synchronously reversed, and driving one of the third and fourth end effectors to rotate. The first end effector and the third end effector are arranged up and down so as to rotate independently about a common central axis, And the second end effector and the fourth end effector are disposed vertically and rotated independently with respect to a common central axis. The method according to claim 1, The end effector operation module, A first drive rotation shaft formed at an upper end of the first end effector, a first rotational force transmission gear formed at a lower end thereof, and rotating around an axial direction; A second drive rotation shaft formed at an upper end of the second end effector, a second rotation force transmission gear geared to the first rotational force transmission gear at a lower end thereof, and rotating around an axial direction; A third drive effector formed at an upper end of the third end effector, a third rotation force transmission gear formed at an end of the lower end, coupled to be concentric with the first drive rotational axis, and rotated about an axial direction; The fourth end effector is formed at the upper end, and the fourth rotational force transmission gear is geared to the third rotational force transmission gear at the lower end thereof. And a fourth drive rotating shaft which is rotated. The method according to claim 1, The end effector operation module, A first drive rotation shaft formed at an upper end of the first end effector, a first rotational force transmission pulley formed at a lower end thereof, and rotating around an axial direction; A second drive rotation shaft formed at an upper end of the second end effector, a second rotational force transmission pulley formed at a lower end thereof, and rotating around an axial direction; A belt connecting them so that rotation directions of the first rotational force transmission pulley and the second rotational force transmission pulley are opposite to each other; A third drive effector having a third end effector formed at an upper end thereof, a third rotational force transmission pulley formed at a lower end thereof, coupled to be concentric with the first drive rotational axis, and rotated about an axial direction; A fourth driving effect shaft formed at an upper end of the fourth end effector, a fourth rotational force transmission pulley formed at a lower end thereof, coupled to be concentric with the second driving rotation shaft, and rotated about an axial direction; And a belt connecting the third rotational force transmission pulley part and the fourth rotational force transmission pulley part so that rotation directions thereof are opposite to each other. The method according to any one of claims 1 to 3, The end effector operation module, The substrate transfer robot, characterized in that installed rotatably with respect to the distal end driving arm.

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