CN105448767B - Realize the vacuum carrying device and its method for carrying of the orthogonal transmission of substrate - Google Patents
Realize the vacuum carrying device and its method for carrying of the orthogonal transmission of substrate Download PDFInfo
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- CN105448767B CN105448767B CN201410239802.8A CN201410239802A CN105448767B CN 105448767 B CN105448767 B CN 105448767B CN 201410239802 A CN201410239802 A CN 201410239802A CN 105448767 B CN105448767 B CN 105448767B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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Abstract
The invention provides a kind of vacuum carrying device and its method for carrying for realizing the orthogonal transmission of substrate, on the one hand by by ball spline, skew gear mechanism, rotary flat moves the transmission mechanism that steering mechanism three collectively constitutes and carrys out motion conditions of the control base board in a direction, on the other hand motion conditions of another transmission mechanism come control base board on the other direction vertical with the direction are passed through, so that the vacuum carrying device can realize the translation for carrying out long range and excellent sealing effectiveness in vacuum carrying cavity, the high accuracy and high reliability in substrate transmission are in turn ensure that simultaneously.
Description
Technical field
The present invention relates to the technical field that board transport is carried out between two vacuum cavities or multiple functional modules.It is special
Not, it is related to the vacuum carrying device and its method for carrying for realizing the orthogonal transmission of substrate.
Background technology
In the industries such as solar energy, FPD, semiconductor, overlay film substrate is usually required in loading chamaer, unloading chamber, technique
Multiple different intermodules such as processing chamber are transmitted, and to require that requirement has huge for transmission of the different device structures to substrate
Difference.
Vacuum coated equipment common at present can probably be divided into cluster type (Cluster) by the position of each function cavity and set
Standby and linear (In-Line) equipment.And according to substrate be it is horizontal or it is upright place vacuum coated equipment can be divided into it is sleeping
Formula equipment and vertical equipment.As shown in fig.1, cluster type equipment, which is usually center, is provided with the polygon of vacuum carrying cavity 110
Shape structure, loading chamaer 120, unloading chamber 130, PROCESS FOR TREATMENT chamber 140 are connected on its polygon, wherein, vacuum is removed
Vacuum carrying device 150 is provided with fortune cavity 110, for realizing substrate in loading chamaer 120, unloading chamber 130, PROCESS FOR TREATMENT chamber
Transmission between 140.As shown in fig.2, linear equipment is usually loading chamaer 120, PROCESS FOR TREATMENT chamber 140, unloading chamber 130 edge
The linear combination of rectilinear direction, substrate can pass sequentially through above-mentioned each cavity in equipment running process.
Different device structures has different requirements to board transport, and usual cluster type equipment requirement is located at equipment center
Vacuum carrying device possess multi-angle rotary positioning and the flexible function of mechanical arm, it needs multi-power source and how free
Degree.And roller frictional drive is then usually taken in linear device, drive mechanism is relatively easy.
In addition, there is the device product of specific demand for some, many equipment vendors can also enter for these specific demands
Some special transfer function designs of row.
Patent US2013230370A1 discloses a kind of cluster type semiconductor equipment of optimization, due to each technique in the equipment
Cavity has the independently-controlled processing time, it is therefore desirable to which substrate has very fast transporting velocity, while the equipment requires again
With high integrated level and small floor space, so the Central Vacuum of its polygon carries cavity and is configured to have long side
Shape, and multiple PROCESS FOR TREATMENT chambers are connected in long edge position, so requirement to vacuum carrying device is different from traditional rotation
Positioning and arm Telescopic, but need it to realize linear translation along long side direction.Meanwhile vacuum carrying device also needs
There is spinfunction to take out or be sent into substrate from process cavity.This means the vacuum carrying device needs two
Independent power source and corresponding mechanical transmission mechanism, and require that transmission mechanism can not influence each other and be realized with vacuum cavity
Vacuum dynamic seal.The mode that the patent takes magnetic couple realizes above-mentioned function, by two magnetic outside vacuum and in vacuum
Extremely come through the magnetic field of vacuum cavity wallboard so as to realize power transmission, however, the mode of this magnetic driver can be held
The usual very little of torque received, easily produced rotation or rotated situation not in place, and greatly reduced the transmission accuracy of equipment
And reliability.
Patent US2007051314A1, which discloses one kind, can realize large substrate in Alternative process chambers and loading
The packaged type transfer cavity of substrate conveyance is carried out between unloading cavity.Patent US2007059129A1, which is disclosed, realizes this knot
The embodiment of structure, packaged type transfer cavity need by the vacuum carrying device of inside and outside vacuum cavity with
And all annexes in the functional module move on the track of outside together, and need to keep vacuum shape in moving process
State, then with corresponding linear PROCESS FOR TREATMENT cavity arranged in parallel and loading and unloading cavity be abutted against and realized vacuum later
Sealing.This structure moves integrally element quality and volume all very greatly, and it is difficult to ensure that elastic sealing element is (logical after being abutted against
Often be O-ring seal) decrement and mitigation impacted caused by when being abutted against, therefore, its vacuum-packed reliability is difficult to obtain
Ensure.
Patent CN102282664A discloses a kind of base plate processing system, and more particularly to one kind is in the linearly aligned work of two rows
The central substrate transmission cavity of substrate conveyance is realized between skill cavity.The vacuum carrying device of central substrate transmission cavity needs
Moved in parallel along arrangement of process chambers direction, and vacuum arm have perpendicular to PROCESS FOR TREATMENT chamber linear array direction it is double
To Telescopic.So, it is necessary to be related at least two sets of relatively independent transmission mechanisms.The patent is put down along linear orientation
Shifting movement uses linear electric machine, and the driving source of bi-directional expansion or does the driving source of elevating function and be arranged in vacuum cavity
Portion.However, selectively seldom and expensive suitable for the driving source of vacuum environment on the market at present, particularly power output is very
It is small, the requirement that the big quality substrate of large scale is transported in industrial production can not be met.
In addition, there is a kind of linear pattern substrate board treatment with translation functions as shown in Figure 3 in actual applications.
Such as：In PVD cavity film deposition is all carried out sometimes in the front 301 of same plate base 101 and the back side 302.
Now, after substrate 101 completes front film deposition in the first film layer processing array 310, the transfer frame for being loaded with substrate 101 can be
Carry out the translation of certain position in cavity 110 with translation functions and enter in the second film layer processing array 320 to carry out instead
The deposition of face mask layer, the load terminal of such substrate 101 and unloading end are in the homonymy of process cavity.Due to usual in this application
Using vertical structure, its stroke translated between the first film layer processing array 310 and second film layer processing array 302 generally compared with
It is short, such as common stroke be less than 300mm, therefore, in such cases the translation in cavity 110 and processing array direction biography
The combination of bellows and rotary dynamic seal is usually taken in dynamic Multidirectional motion, and if the stroke translated in cavity 110
Larger, such as larger than 500mm, then bellows and rotary dynamic seal combination will be because of less reliable, service life shortening and complexity
Too high etc. reason of cost caused by guiding mechanism and no longer be applicable.
Generally speaking, in vacuum coated equipment, when between two or more cavitys respectively along two orthogonal sides
During to transmission substrate, it can face that can not such as to carry out growing translation, transmission accuracy and reliability over long distances not high, close in the prior art
Seal it is ineffective, be difficult to carry a series of technology restrictions such as large-size substrate.
The content of the invention
In order to solve the above problems, the invention provides a kind of vacuum carrying device for realizing the orthogonal transmission of substrate and its remove
Transportation method, on the one hand by moving the transmission that steering mechanism three collectively constitutes by ball spline, skew gear mechanism, rotary flat
Mechanism carrys out motion conditions of the control base board in a direction, on the other hand by another transmission mechanism come control base board with the party
Motion conditions on vertical other direction so that the vacuum carrying device can be realized in vacuum carrying cavity into
The translation of row long range and excellent sealing effectiveness, while in turn ensure that high accuracy and high reliability in substrate transmission.
The invention provides a kind of vacuum carrying device for realizing the orthogonal transmission of substrate, and it is arranged at a vacuum carrying chamber
Internal portion, for completing the substrate transmission between two function cavitys, mechanical arm assembly is provided with the vacuum carrying device,
The direction of motion of its bearing substrate in vacuum carrying cavity is first direction, and substrate is captured and placed from the function cavity
The direction of motion be second direction, first direction is vertical with second direction, it is characterised in that：The vacuum carrying device also includes
The first transmission mechanism of first direction motion conditions and the second driver of control second direction motion can independently be controlled
Structure, there is a transmission mechanism to include in first transmission mechanism or the second transmission mechanism：It is provided with the ball of rotating nuts
Spline, rotary flat move steering mechanism, moved respectively with the rotating nuts and rotary flat a pair that steering mechanism is fixedly linked it is mutual
The skew gear mechanism of engagement, the rotary flat move steering mechanism and coupled skew gear to rotate coaxially.
Alternatively, another transmission mechanism includes in first transmission mechanism or second transmission mechanism：Deflecting list
Member, and the bevel gear mechanism or deflecting flexible clutch matched with the deflecting unit.
Alternatively, the rotary flat moves steering mechanism and the purpose of the deflecting unit is used to rotary motion being changed into
Linear motion, it can use any one in ball-screw, steel band wheeled steel, sprocket wheel chain, synchronizing wheel, worm gear structure
Kind.
Alternatively, the skew gear mechanism can be bevel gear mechanism or staggeredly cylindric spiral gear mechanism.
Alternatively, first transmission mechanism is driven by the first driving source, and second transmission mechanism is by the second driving source
Driving, first driving source are arranged on the vacuum carrying containment portion with least one in the second driving source.
Alternatively, positioned at the first driving source of the vacuum carrying containment portion or the second driving source and the vacuum carrying
Sealed between cavity using magnetic fluid mode.
Alternatively, the area of the substrate is more than 0.5m2, and the weight of the substrate is more than 5Kg.
Alternatively, the displacement range when mechanical arm assembly is in contraction state in the vacuum carrying inside cavity is big
In 0.5 meter.
Present invention also offers a kind of method for carrying for the vacuum carrying device for realizing the orthogonal transmission of substrate, it includes：Institute
State the motion conditions of mechanical arm assembly a direction in a first direction or in second direction：The ball spline is driven to rotate, then
A pair of skew gear structures being fixedly connected with the rotating nuts of the ball spline also can concomitant rotation, and drive phase therewith
Rotary flat even is transferred to mechanism kinematic, so as to realize the motion of the mechanical arm assembly in this direction；The manipulator group
The motion conditions of part other direction in a first direction or in second direction：Deflecting cell operation is driven, by the deflecting unit
Rotary motion transformation linear motion, so as to realize the motion of the mechanical arm assembly in this direction.
Alternatively, the rotary flat moves steering mechanism and the purpose of the deflecting unit is used to rotary motion being changed into
Linear motion, it can use any one in ball-screw, steel band wheeled steel, sprocket wheel chain, synchronizing wheel, worm gear structure
Kind.
Compared with prior art, the present invention has following technique effect：
1, two sets of transmission mechanisms that can be independently controlled are employed herein, the first transmission mechanism is used to control base
The motion conditions of plate in a first direction, the second transmission mechanism are used for the motion conditions of control base board in a second direction, due to
Substrate is relatively independent motion in both directions, not relevant between each other, therefore is avoided therebetween
Interference, improves the precision and reliability standard in vacuum carrying plant running.In addition, also it is not related to prior art in the present invention
In magnetic coupling transmission mode, without using magnetic element, normal process in processing chamber is done so as to avoid magnetic element
Disturb or other components are interfered, further increase the precision and reliability of vacuum carrying device.
2, the rotary flat in the present invention moves steering mechanism and deflecting unit from ball-screw, steel band wheeled steel, sprocket chain
The modes such as bar, synchronizing wheel, worm and gear are realized, wherein not relating to bellows commonly used in the prior art so that substrate exists
Stroke on first direction and second direction is no longer influenced by the limitation of shorter Bellows Length, for example, using ball-screw
In the case of moving rotating mechanism as rotary flat, the length of the stroke of substrate can reach the length of ball-screw, and ball wire
The length of thick stick can be made as random length according to being actually needed.
3, the first driving source or the second driving source can be placed on the outside of vacuum carrying cavity in the present invention, thus
Without using vacuum motor, so that driving source can use powerful motor, the long range fortune of substrate is on the one hand realized
Dynamic stroke, on the other hand can also save equipment cost.
4, in the alternative of the present invention, deflecting unit can use lower-cost ball screw arrangement, ball wire
Thick stick can keep quick and stable and high-precision motion in big stroke range, and because the friction very little of ball in leading screw is not easy
Dust is produced, so as to be advantageous to obtain the higher working environment of cleanliness factor.
5, in the alternative of the present invention, rotary flat, which moves steering mechanism, can use steel band steel band wheel construction, and its is relative
It is cheap in other modes, the production cost of equipment can be reduced, meanwhile, the installation accuracy of steel band structure is less demanding, dress
With relatively more easy.
6, for showing industry using the solar cell industry peace plate of big quality large-size substrate, its prior art
In the transmitting device that is related to be usually articulated structure, mechanical arm has larger sag of chain, it is difficult into the reaction of slot
Cavity, and this handling device of the present invention avoids multi-joint design, and have in the initiating terminal of mechanical arm and end
Guide supporting so that the depending condition of mechanical arm is greatly improved.
Brief description of the drawings
Fig. 1 is existing typical cluster type base plate processing system floor map.
Fig. 2 is existing linear base plate processing system floor map.
Fig. 3 is a kind of two-sided equipment for coating film floor map of linear pattern substrate with translation functions.
Fig. 4 is the base plate processing system floor map that substrate vacuum carrying is realized using first embodiment of the invention.
Fig. 5 is the base plate processing system schematic perspective view that substrate vacuum carrying is realized using first embodiment of the invention.
Fig. 6 is the schematic perspective view of the vacuum carrying device of first embodiment of the invention.
Fig. 7 is the sectional perspective schematic diagram of ball spline, splined nut and associated actuator structure.
Fig. 8 is the schematic perspective view of state after mechanical arm assembly stretches out.
Fig. 9 A- Fig. 9 D are that first embodiment of the invention mechanical arm assembly transports floor map of the substrate in different station.
Figure 10 is the base plate processing system floor map that substrate vacuum carrying is realized using second embodiment of the invention.
Figure 11 is the substrate vacuum carrying device schematic perspective view of second embodiment of the invention.
Figure 12 A, Figure 12 B are schematic perspective view of the second embodiment mechanical arm assembly in third direction diverse location.
Figure 13 is the substrate board treatment floor map that substrate vacuum carrying is realized using third embodiment of the invention.
Figure 14 is third embodiment of the invention board carrying functional chamber topology layout floor map.
Embodiment
In order to facilitate the understanding of the purposes, features and advantages of the present invention, below in conjunction with the accompanying drawings to the present invention
Embodiment be described in detail.
Many details are elaborated in the following description to facilitate a thorough understanding of the present invention, still the present invention can be with
It is different from other method described here using other to implement, therefore the present invention is not limited by following public specific embodiment
System.
The invention provides a kind of vacuum carrying device for realizing the orthogonal transmission of substrate, on the one hand by by roller bearing spline,
The collective effect that skew gear mechanism, rotary flat move steering mechanism three carrys out motion conditions of the control base board in a direction,
On the other hand by motion conditions of another transmission mechanism come control base board on the other direction vertical with the direction, so that
The translation of long range and excellent sealing effectiveness can be carried out in vacuum carrying cavity by obtaining the vacuum carrying device, while be protected again
The high accuracy and high reliability in substrate transmission are demonstrate,proved.
First embodiment：
Fig. 4 is the floor map of the base plate processing system of first embodiment.In this embodiment, the first direction
For " X " direction, the second direction is " Y " direction, and " X " direction is orthogonal with " Y " direction, " X " direction and " Y " direction each parallel to
Ground, specifically, the direction of motion of mechanical arm assembly bearing substrate is " X " direction in vacuum carrying cavity, mechanical arm assembly
The direction of motion for capturing and placing substrate from function cavity is " Y " direction.
The base plate processing system 500 mainly includes：Vacuum carrying cavity 110, it, which is internally provided with, to exist substrate 101
The vacuum carrying device 150a transmitted between two function cavitys, the area of the substrate are more than 0.5m2, the substrate
Weight is more than 5Kg.The vacuum carrying device 150a can be transmitted substrate 101 along " X " direction and " Y " direction respectively；
Described two function cavitys are respectively first substrate processing function cavity 140a and second substrate processing function cavity 140b, can be with
Carry out any one in thin film deposition, cleaning, etching, ion implanting handling process.The base plate processing system 500 also wraps
Include：Substrate loads cavity 120；Substrate unloads cavity 130；Atmospheric side substrate loading module 510；Atmospheric side substrate Unload module
520；And it is connected in and is used for the gate valve 102 for realizing vacuum insulation between foregoing each cavity.
The atmospheric side substrate loading module 510, substrate load cavity 120, first substrate processing function cavity 140a, door
Valve 102 collectively forms first substrate processing array 530a；The atmospheric side substrate Unload module 520, substrate unloading cavity 130,
Second substrate processing function cavity 140b, gate valve 102 collectively form second substrate processing array 530b.The first substrate processing
Array 530a and second substrate processing array 530b be arranged in parallel and are connected common structure with the vacuum carrying cavity 110
Into the base plate processing system of " U " type.The vacuum carrying device 110 needs in the interior edge of vacuum carrying cavity 110 " X " direction
Mobile distance is " D ".
Fig. 5 is that (air is not shown in the schematic perspective view of the base plate processing system for realizing substrate vacuum carrying corresponding with Fig. 4
Side base plate loading module 510 and atmospheric side substrate Unload module 520).
In the present embodiment, " U " type base plate processing system is used to complete to substrate 101 twice or at more subfunctions
Reason, and the loading of substrate 101 and unloading task are all carried out in the homonymy of " U " the type base plate processing system.This structure is advantageous to
The floor space of whole system is reduced, reduce the production space of high-cleanness, high requirement and improves the automatization level of production.
For the horizontal type structure that substrate level is placed, the first substrate processing array 530a and the second substrate
The distance " D " handled between array 530b is often larger, such as：The 5th generation substrate that area is 1100mm x 1300mm needs
Stroke " D " be about 2500mm, this requires vacuum carrying device 150a to allow for realizing the movement of big stroke.
Fig. 6 is the schematic perspective view corresponding to the vacuum carrying device 150a shown in Fig. 5.
As shown in fig. 6, the vacuum carrying device 150a includes：For crawl and the mechanical arm assembly of bearing substrate 101
410 and the first transmission mechanism and the second transmission mechanism that can be independently controlled respectively.
First transmission mechanism include by convert rotational motion for linear motion deflecting unit 702a, and with it is described
Meshing bevel gear mechanism 706a, 706b that deflecting unit is engaged.The deflecting unit can be known to those skilled in the art
Ball-screw, steel band, chain sprocket, synchronizing wheel, any one in the structure such as worm and gear.In the present embodiment, the change
Ball-screw 702a is used to unit.Intermeshing bevel gear mechanism 706a, 706b can also use the flexible connection of deflecting
Other mechanical structures that axle device etc. has identical function replace.First transmission mechanism also includes：Along the first of " X " direction
Direction translating rails 409a and 409b, first direction translating rails mounting seat 705, ball-screw mounting seat 704a, 704b.It is described
Ball-screw 702a is driven by the first driving source 707a, and transmission therebetween passes through the bevel gear mechanism engaged in pairs
706a, 706b are realized.The first driving source 707a can be located at vacuum carrying cavity cavity in or cavity outside, when positioned at
It can be sealed described in when outside cavity between the first driving source 707a and cavity by sealed faying face 715, specific sealing side
Formula can use magnetic fluid, O to enclose, the mode such as backbone sealing ring.First transmission mechanism is used to control the mechanical arm assembly
410 motion conditions on first direction the translating rails 409a and 409b.
The mechanical arm assembly 410 includes：For the mechanical arm 709 of bearing substrate, mechanical arm mounting seat 708 and machine
Tool hand component installation pedestal 703.
Fig. 7 is the sectional perspective schematic diagram of the second transmission mechanism described in Fig. 6, as shown in Figure 7, second transmission mechanism
Including：The rotary flat that ball spline 701 with rotating nuts 713, the driving mechanical arm assembly 410 move moves turning machine
Structure, respectively with the rotating nuts 713 of the ball spline and with rotary flat move a pair of intermeshings that steering mechanism is fixedly linked
Skew gear mechanism 706e and 706f.It can be the ball known to those skilled in the art that the rotary flat, which moves steering mechanism,
Any one in the structures such as leading screw, steel band, chain sprocket, synchronizing wheel, worm and gear, in the present embodiment, the rotary flat
Move steering mechanism and use the steel band structure being made up of steel belt 711 and wheeled steel 712.The steel band 711 and mechanical arm assembly
Mechanical arm mounting seat 708 on 410 is fixedly connected.Skew gear the structure 706e and 706f can be bevel gear or
Staggeredly cylindric spiral gear structure, it is preferably umbrella tooth wheel construction in this example.In addition, second transmission mechanism also includes：Along " Y " side
To second direction translating rails 408a and 408b, spline rotating nuts mounting seat 714, ball spline mounting seat 704c and
704d.Second transmission mechanism is driven by the second driving source 707b, for controlling the mechanical arm assembly 410 described
Motion conditions on second direction translating rails 408a and 408b.The second driving source 707b and the ball spline 701
Transmission is realized by mediating gear 706c, 706d in pairs.Second driving source can be located in the cavity of vacuum carrying cavity
Or outside cavity, it can be carried out described in when outside cavity between the first driving source 707a and cavity by sealed faying face 715
Sealing, specific sealing means can use magnetic fluid, O to enclose, and the mode such as backbone sealing ring is carried out.
The design feature of each part in first embodiment of the invention is expanded on further with reference to Fig. 6 and Fig. 7：The first party
It is be arranged in parallel to translating rails 409a and 409b, ball spline 701, ball-screw 702a, their direction is each perpendicular to described
First substrate handles array 530a and second substrate processing array 530b.The mechanical arm assembly installation pedestal 703 and
One direction translating rails 409a, 409b sliding block is fixedly connected, and described second direction translating rails 408a, 408b is along first substrate
Processing array 530a and second substrate processing array 530b direction set and are installed in mechanical arm assembly installation pedestal 703
Surface.The mechanical arm mounting seat 708 of the mechanical arm assembly 410 is fixedly connected with translating rails 408a, 408b sliding block.Institute
State wheeled steel 712 to be arranged in mechanical arm assembly installation pedestal 703, the bevel gear 706f is installed on same with wheeled steel 712
In rotary shaft, the bevel gear 706e is fixedly connected on the end of rotating nuts 713 of ball spline 701, the bevel gear 706e
It can be intermeshed with bevel gear 706f.The flange of the rotating nuts 713 is fixedly connected on spline rotating nuts mounting seat 714
On, the spline rotating nuts mounting seat 714 is fixedly connected in mechanical arm assembly installation pedestal 703.So described wheeled steel
712nd, bevel gear 706e is relative with the position of mechanical arm assembly installation pedestal 703 solid with bevel gear 706f, spline rotating nuts 712
It is fixed.
When mechanical arm assembly 410 needs to do first direction (" X " direction) motion, the first driving source 707a passes through into
Ball-screw 702a is passed motion to bevel gear 706a, 706b of kneading, so as to drive ball-screw 702a to rotate.Due to
Feed screw nut (not shown in Fig. 6) is connected with mechanical arm assembly installation pedestal 703, hence in so that ball-screw 702a rotation fortune
Turn becomes translational motion of the ball-screw nut along ball-screw direction.The translation of ball-screw nut can cause manipulator group
Part installation pedestal 703 and mechanical arm assembly 410 move in " X " direction, and mechanical arm assembly 410 described in the present embodiment is at " X "
Displacement range on direction is more than 0.5 meter.Simultaneously as the wheeled steel 712, bevel gear 706e and bevel gear 706f, spline
The position of rotating nuts 712 and mechanical arm assembly installation pedestal 703 is relatively fixed, so these parts meetings and mechanical arm assembly
The synchronous translational of installation pedestal 703 moves.Spline rotating nuts 713 are spent in ball all the time when mechanical arm assembly does the motion of " X " direction
Translation gliding on key 701.
When mechanical arm assembly needs to do second direction (" Y " direction) motion, the first driving source 707a is stopped,
The second driving source 707b passes motion to ball spline 701, ball flower by bevel gear 706c, 706d for mediating in pairs
Key 701 drives supporting spline rotating nuts 713, bevel gear 706e and bevel gear 706f to rotate.Finally wheeled steel 712 is revolved
Turn.The rotation of wheeled steel 712 causes steel band 711 just to be moved up at " Y ", and the movement driving mechanical hand component of steel band 711
410 just move up at " Y ".The principle of motion is realized in " Y " direction to further understand steel strip driving mechanical arm assembly 410,
Fig. 8 can be referred to, Fig. 8 is the schematic perspective view of state after mechanical arm assembly 410 stretches out.
, can be in conjunction with referring to Fig. 9 A to Fig. 9 D, Fig. 8 and Fig. 7 in order to be better understood from：
In Fig. 9 A to Fig. 9 D, the position that mechanical arm assembly 410 reaches is used respectively in " X " direction and " Y " direction "
X1 ", " X2 ", " Y1 ", " Y2 " expressions.Fig. 9 A are that mechanical arm assembly 410 is in " X1Y2 " position with substrate 101, now, machinery
Hand component 410 is in first substrate processing array 530a corresponding positions in " X " direction, and stretching state is in " Y " direction.Figure
9B is that mechanical arm assembly 410 is in " X1Y1 " position with substrate 101, and now, mechanical arm assembly 410 is in " X " direction in the
One processing substrate array 530a corresponding positions, retracted mode is in " Y " direction.Fig. 9 C are that mechanical arm assembly 410 carries base
Plate 101 is in " X2Y1 " position, and now, mechanical arm assembly 410 is in second substrate processing array 530b in " X " direction and corresponds to position
Place is put, retracted mode is kept in " Y " direction.Fig. 9 D are that mechanical arm assembly 410 is in " " X " 2Y2 " position with substrate 101, this
When, mechanical arm assembly 410 is in second substrate processing array 530b corresponding positions in " X " direction, is in and stretches out in " Y " direction
State.
Second embodiment：
Figure 10 is to realize that the plane of the base plate processing system 800 of substrate vacuum carrying is illustrated using second embodiment of the invention
Figure, in this embodiment, the first direction are " Z " direction, and the second direction is " Y " direction, " Z " direction and " Y " direction
Orthogonal, " Y " is oriented parallel to ground, and " Z " direction is perpendicular to ground, and specifically, mechanical arm assembly is held in vacuum carrying cavity
The direction of motion of carried base board is " Z " direction, and the direction of motion that mechanical arm assembly captured and placed substrate from function cavity is " Y "
Direction.
The each several part of base plate processing system 800 and base plate processing system 500 in first embodiment forms in second embodiment
And function is substantially similar, here is omitted, and the main distinction of the two is, first substrate processing function chamber in second embodiment
Body 140a and second substrate processing function cavity 140b vertically arrange not in same level, i.e. " U " type
Base plate processing system 800 is U-shape structure perpendicular to the ground, and correspondingly, mechanical arm assembly carries in vacuum carrying cavity 110
The direction of motion of substrate is vertical " Z " direction, and mechanical arm assembly captures and placed the motion side of substrate from function cavity
To for horizontal " Y " direction.
Figure 11 is the substrate vacuum carrying device schematic perspective view of second embodiment.
Figure 12 A are schematic perspective view of mechanical arm assembly when (" Z " direction) is high-order in a first direction.
Figure 12 B be mechanical arm assembly in a first direction (" Z " direction) low level when schematic perspective view.
As shown in Figure 11, Figure 12 A, Figure 12 B, the vacuum carrying device of second embodiment includes：For capturing and carrying base
The mechanical arm assembly 410 of plate 101, the first transmission mechanism, the energy for being capable of control machinery hand component motion conditions in a first direction
Second transmission mechanism of enough control machinery hand components motion conditions in a second direction.First transmission mechanism includes being provided with
Ball spline 701, the rotary flat of rotating nuts 713 move steering mechanism, the respectively rotating nuts 713 and rotary flat with ball spline
A pair intermeshing skew gear mechanism 706e and 706f that steering mechanism is fixedly linked are moved, the rotary flat moves turning machine
Structure and coupled skew gear is rotate coaxially, and in the present embodiment, the skew gear mechanism is bevel gear mechanism,
It is ball-screw 702b that the rotary flat, which moves steering mechanism,.First transmission mechanism includes：Deflecting unit 702a, and with institute
State bevel gear mechanism or the deflecting flexible clutch that deflecting unit matches, in the present embodiment, the deflecting unit is ball
Leading screw 702a.
The substrate vacuum carrying device also includes：First direction translating rails 802；First direction translating rails mounting seat
803；Second direction translating rails 408a, 408b；Second direction translating rails mounting seat 705；Mechanical arm assembly installation pedestal
703；Mechanical arm assembly 410；Ball spline and ball-screw mounting seat 704a, 704b, 704c, 704d；First driving source 707a；
Second driving source 707b；Mediated in pairs needed for first driving source 707a and ball-screw 702a power transmissions gear mechanism 706a,
706b；Gear 706c, 706d are mediated in pairs needed for second driving source 707b and the power transmission of ball spline 701；Spline rotates spiral shell
Female mounting seat 714；Ball-screw 702a adapteds feed screw nut 717；Ball-screw 702b adapteds feed screw nut 718；Wherein, it is mechanical
Hand component 410 includes：Mechanical arm mounting seat 708；Mechanical arm 709.715 and 716 be the first driving source 707a, the second driving
Source 707b and cavity sealed faying face；Ball spline rotating nuts 713；Spline rotating nuts mounting seat 714；First direction is transported
Dynamic drive bevel gear 706e, 706f.801a, 801b, 801c are the flange connector of cavity (" Z " direction) in the first direction.Rolling
Screw nut 717 is fixedly connected with mechanical arm assembly installation pedestal 703, ball-screw nut 718 and mechanical arm mounting seat
708 are fixedly connected.Ball spline rotating nuts 713 pass through spline rotating nuts mounting seat 714 and mechanical arm assembly installation pedestal
703 are connected.The mechanical arm mounting seat 708 of mechanical arm assembly 410 is fixed with the sliding block of first direction translating rails 802 to be connected
Connect.
The working method of second embodiment of the invention is expanded on further with reference to Figure 10, Figure 11, Figure 12 A and Figure 12 B.Second
Direction translating rails 408a, 408b；Ball spline 701；Ball-screw 702a be arranged in parallel, and its direction is mechanical arm assembly 410
Telescopic direction, mechanical arm assembly installation pedestal 703 is fixedly connected with second direction translating rails 408a, 408b sliding block.The
One direction translating rails translating rails 802 are set in the first direction, a translating rails are shown as in schematic diagram, but can take
More general translating rails be arranged in parallel in industry.First direction translating rails mounting seat 803 and mechanical arm assembly installation base
Seat 703 is fixedly connected.The ball-screw 702a of second direction (" Y " direction) ball nut 717 by nut mounting seat 806 with
Mechanical arm assembly installation pedestal 703 connects.The ball-screw 702b of first direction (" Z " direction) ball nut 718 and machinery
Arm mounting seat 708 connects.Bevel gear 706e is fixedly connected on the end of spline rotating nuts 713, bevel gear 706f and first party
Connected to (" Z " direction) ball-screw, bevel gear 706e mutually mediates with bevel gear 706f.So ball spline shaft 701, umbrella tooth
Wheel 706e and bevel gear 706f, spline rotating nuts 713 and mechanical arm assembly installation pedestal 703 position are relatively fixed.
When mechanical arm assembly needs to do second direction (" Y " direction) motion, with mechanical arm assembly 410 in first embodiment
Progress first direction (" X " direction) motion is similar, and the first driving source 707a will be transported by bevel gear 706a, the 706b mediated in pairs
It is dynamic to pass to ball-screw 702a, so as to drive ball-screw to rotate.Feed screw nut 715 and mechanical arm assembly installation pedestal 703
Connection.So, ball-screw 702a rotary motion is transformed into translation fortune of the ball-screw nut 717 along ball-screw direction
It is dynamic.The translation of ball-screw nut can cause mechanical arm assembly installation pedestal 703 and mechanical arm assembly 410 to be transported in " Y " direction
It is dynamic.Simultaneously as ball spline 701 noted earlier, bevel gear 706e and bevel gear 706f, spline rotating nuts 712 and machinery
The position of hand component installation pedestal 703 is relatively fixed, so these parts can be synchronous with mechanical arm assembly installation pedestal 703 flat
Shifting movement.The translation gliding on spline 701 all the time of spline rotating nuts 713 when mechanical arm assembly does the motion of " Y " direction.
When mechanical arm assembly needs to do first direction (" Z " direction) motion, the first driving source 707a is stopped, and second
Driving source 707b passes motion to ball spline 701 by bevel gear 706c, 706d for mediating in pairs, and ball spline 701 drives
Dynamic supporting spline rotating nuts 713, bevel gear 706e and bevel gear 706f rotate.Finally cause " Z " direction ball-screw
702b rotates.Ball-screw 702b rotary motions cause the linear motion that " Z " direction is done with the feed screw nut of its adapted 718.By
It is connected in mechanical arm mounting seat 708 with feed screw nut 718, therefore finally mechanical arm mounting seat 708 is done in " Z " direction
Linear motion.Also linear motion of the mechanical arm assembly 410 in " Z " direction is just realized.
Figure 12 A and Figure 12 B embody the signal of (" Z " direction) diverse location in a first direction of mechanical arm assembly 410 respectively
Figure.The mechanical arm 709 of mechanical arm assembly 410 is corresponding with the opening 801a on cavity in fig. 12, in Figure 12 B manipulator groups
The mechanical arm 709 of part 410 is corresponding with the opening 801c on cavity.Cavity hatch 801a, 801b, 801c can pass through gate valve
102 are attached extension with other function cavitys realizes the requirements of a variety of substrate processing process.
3rd embodiment：
The working method of third embodiment of the invention is expanded on further with reference to Figure 13, Figure 14, in this embodiment first
Direction is " X " direction, and second direction is " Y " direction.
The ball spline drive mechanism with rotating nuts has been mentioned in technical problem above and has been readily available derivative.
Such as it is further added by the ball spline cans of a set of rotating nuts and increases new motion mode.Above one is shown in Fig. 5 and Fig. 6
" U " that kind is formed with first substrate processing array 530a and second substrate processing array 530b and board carrying functional chamber 110
Type base plate processing system, if the opposite side of board carrying functional chamber 110 is equally set in " U " the type base plate processing system 500
3rd processing substrate array 530a ' and second substrate processing array 530b ', is just constituted at double " U " type substrates shown in Figure 13
Reason system 900.Double " U " type base plate processing systems 900 include：Vacuum carrying cavity 110；A side base plate load function chambers
120；A side base plate offloading functions chamber 130；A sides first substrate processing function chamber 140a；A sides second substrate processing function chamber 140b；
A sides atmospheric side substrate load function module 510；A sides atmospheric side substrate offloading functions module 520；B side base plate load function chambers
120’；B side base plate offloading functions chamber 130 '；B sides first substrate processing function chamber 140a '；B sides second substrate processing function chamber
140b’；B sides atmospheric side substrate load function module 510 '；B sides atmospheric side substrate offloading functions module 520 '；And it is connected each
The gate valve 102 of vacuum insulation is realized between functional compartments；Substrate 101.In the vacuum carrying cavity 110 have realize substrate " X " to
Vacuum carrying device 150c with " Y " to transmission, and vacuum carrying device 150c has into two sets of oppositely arranged manipulator groups
Part 410a and 410b.Wherein A sides atmospheric side substrate load function module 510, A side base plate load functions room 120, the base of A sides first
Plate processing function room 140a, gate valve 102 form first substrate processing array 530a；A sides atmospheric side substrate offloading functions module
520th, A side bases plate load function room 130, A sides second substrate processing function room 140b, gate valve 102 form second substrate processing battle array
Arrange 530b.B sides atmospheric side substrate load function module 510 ', B side base plate load functions room 120 ', B sides first substrate processing work(
Can room 140a ', the 3rd processing substrate array 530a ' of the composition of gate valve 102；B sides atmospheric side substrate offloading functions module 520 ', B sides
Substrate load function room 130 ', B sides second substrate processing function room 140b ', gate valve 102 form tetrabasal processing array
530b’.Processing substrate array 530a, 530b, 530a ', 530b ' and vacuum carrying cavity 110 connect and compose the substrate of double " U " types
Processing unit.It is " D " that vacuum carrying cavity 110, which needs mobile distance in " X " direction,.In device A sides processing substrate array
530a, 530b participate in the technological process of completing substrate processing jointly, and in device B sides, processing substrate array 530a ', 530b ' are common
Participate in the technological process of completing substrate processing.The substrate processing process of A sides and B sides can with it is identical can also be entirely different.Complete A
The whole technological process of side and B sides is required for using vacuum carrying cavity 110.So vacuum carrying cavity 110 is shared, this
Sample whole device can be compacter, and equipment cost is further reduced.
Figure 14 is the plane pie graph of the vacuum carrying cavity 110 of the base plate processing system of double " U " types, vacuum carrying in figure
Device 150c mainly includes：First direction (" X " direction) translating rails 409a, 409b；First transmission mechanism 710；Manipulator group
Part installation pedestal 703；A sides mechanical arm assembly 410a；B sides mechanical arm assembly 410b；A sides the second transmission mechanism 720a；B sides second
Transmission mechanism 720b；Second direction (" Y " direction) A sides translating rails 408a, 408b；The translation of second direction (" Y " direction) B sides is led
Rail 408c, 408d.Transmission mechanism 710 and 720a, 720b and first embodiment have identical structure and feature, no longer superfluous herein
State, and we are implemented based on the present invention first and is understood that the implementation method of the present embodiment.It should be noted that second
Direction (" Y " direction) translating rails 408a, 408b, 408c, 408d is arranged on above mechanical arm assembly installation pedestal 703, i.e.,
Mechanical arm assembly 410a, 410b are all disposed within above same installation pedestal 703, therefore, mechanical arm assembly in a first direction
410a, 410b can keep being synchronized with the movement.Mechanical arm assembly can use each independent driving source (not show in figure in a second direction
Go out) and the second transmission mechanism 710a or 710b realize picking and placeing for respective A sides or B side base plates.
Three embodiments of summary can be seen that：The invention provides a kind of vacuum carrying for realizing the orthogonal transmission of substrate
Device, on the one hand controlled by moving the collective effect of steering mechanism three by roller bearing spline, skew gear mechanism, rotary flat
Substrate a direction motion conditions, on the other hand by another transmission mechanism come control base board vertical with the direction another
Motion conditions on one direction, so that the vacuum carrying device can carry out the translation of long range in vacuum carrying cavity
With excellent sealing effectiveness, while in turn ensure that substrate transmission in high accuracy and high reliability.
Two sets of transmission mechanisms that can be independently controlled are employed herein, the first transmission mechanism is used for control base board
Motion conditions in a first direction, the second transmission mechanism is used for the motion conditions of control base board in a second direction, due to base
Plate is relatively independent motion in both directions, not relevant between each other, therefore avoids therebetween dry
Disturb, improve precision and reliability standard in vacuum carrying plant running.In addition, it is not related in the prior art in the present invention yet
Magnetic coupling transmission mode, without using magnetic element, so as to avoid interference of the magnetic element to normal process in processing chamber
Or other components are interfered, further increase the precision and reliability of vacuum carrying device.
Rotary flat in the present invention move steering mechanism and deflecting unit from ball-screw, steel band wheeled steel, sprocket wheel chain,
The modes such as synchronizing wheel, worm and gear are realized, wherein not relating to bellows commonly used in the prior art so that substrate is first
Stroke on direction and second direction is no longer influenced by the limitation of shorter Bellows Length, for example, using ball-screw conduct
In the case that rotary flat moves rotating mechanism, the length of the stroke of substrate can reach the length of ball-screw, and ball-screw
Length can be made as random length according to being actually needed.
The first driving source or the second driving source can be placed on the outside of vacuum carrying cavity in the present invention, thus without
Vacuum motor need to be used, so that driving source can use powerful motor, on the one hand realizes the long range motion of substrate
Stroke, it on the other hand can also save equipment cost.
In the alternative of the present invention, deflecting unit can use lower-cost ball screw arrangement, ball-screw
Quick and stable and high-precision motion can be kept in big stroke range, and because the friction very little of ball in leading screw is not easy to produce
Fecula dirt, so as to be advantageous to obtain the higher working environment of cleanliness factor.
The present invention alternative in, rotary flat move steering mechanism can use steel band steel band wheel construction, its relative to
Other modes are cheap, can reduce the production cost of equipment, meanwhile, the installation accuracy of steel band structure is less demanding, assembling
It is relatively more easy.
For showing industry using the solar cell industry peace plate of big quality large-size substrate, it is in the prior art
The transmitting device being related to is usually articulated structure, and mechanical arm has larger sag of chain, it is difficult into the reaction chamber of slot
Body, and this handling device of the present invention avoids multi-joint design, and led in the initiating terminal of mechanical arm and end
Rail is supported so that the depending condition of mechanical arm is greatly improved.
Although the present invention is disclosed as above with preferred embodiment, the present invention is not limited to this, any this area
Technical staff, without departing from the spirit and scope of the present invention, it can make various changes and modification, therefore the protection model of the present invention
Enclosing should be defined by claim limited range.
Claims (10)
1. a kind of vacuum carrying device for realizing the orthogonal transmission of substrate, it is arranged at a vacuum carrying inside cavity, for complete
Into the substrate transmission between two function cavitys, mechanical arm assembly is provided with the vacuum carrying device, it is in vacuum carrying
The direction of motion of bearing substrate is first direction in cavity, and the direction of motion that substrate is captured and placed from the function cavity is
Second direction, first direction are vertical with second direction, it is characterised in that：The vacuum carrying device also includes can be independently
The first transmission mechanism of first direction motion conditions and the second transmission mechanism of control second direction motion are controlled, described first passes
There is a transmission mechanism to include in motivation structure or the second transmission mechanism：It is provided with ball spline, the rotation translation of rotating nuts
Steering mechanism, a pair of intermeshing alternating axis teeth that steering mechanism is fixedly linked are moved with the rotating nuts and rotary flat respectively
Mechanism is taken turns, the rotary flat moves steering mechanism and coupled skew gear to rotate coaxially.
A kind of 2. vacuum carrying device for realizing the orthogonal transmission of substrate according to claim 1, it is characterised in that：Described
Another transmission mechanism includes in one transmission mechanism or second transmission mechanism：Deflecting unit, and with the deflecting unit
The bevel gear mechanism or deflecting flexible clutch matched.
A kind of 3. vacuum carrying device for realizing the orthogonal transmission of substrate according to claim 2, it is characterised in that：The rotation
The purpose for turning translation steering mechanism and the deflecting unit is used to rotary motion being changed into linear motion, using ball wire
Any one in thick stick, steel band wheeled steel, sprocket wheel chain, synchronizing wheel, worm gear structure.
A kind of 4. vacuum carrying device for realizing the orthogonal transmission of substrate according to claim 1, it is characterised in that：The friendship
Wrong shaft gear mechanism is bevel gear mechanism or staggeredly cylindric spiral gear mechanism.
A kind of 5. vacuum carrying device for realizing the orthogonal transmission of substrate according to claim 1, it is characterised in that：Described
One transmission mechanism is driven by the first driving source, and second transmission mechanism is driven by the second driving source, first driving source with
At least one in second driving source is arranged on the vacuum carrying containment portion.
A kind of 6. vacuum carrying device for realizing the orthogonal transmission of substrate according to claim 5, it is characterised in that：Positioned at institute
State vacuum carrying containment portion the first driving source or the second driving source and the vacuum carrying cavity between use magnetic fluid side
Formula is sealed.
A kind of 7. vacuum carrying device for realizing the orthogonal transmission of substrate according to claim 1, it is characterised in that：The base
The area of plate is more than 0.5m2, the weight of the substrate is more than 5Kg.
A kind of 8. vacuum carrying device for realizing the orthogonal transmission of substrate according to claim 1, it is characterised in that：The machine
Displacement range when tool hand component is in contraction state in the vacuum carrying inside cavity is more than 0.5 meter.
9. a kind of method for carrying of vacuum carrying device for realizing the orthogonal transmission of substrate according to claim 2, its feature
It is：
The motion conditions of mechanical arm assembly a direction in a first direction or in second direction：The ball spline is driven to turn
It is dynamic, then a pair of skew gear structures being fixedly connected with the rotating nuts of the ball spline also can concomitant rotation, and drive
The rotary flat being attached thereto is transferred to mechanism kinematic, so as to realize the motion of the mechanical arm assembly in this direction；
The motion conditions of mechanical arm assembly other direction in a first direction or in second direction：Deflecting cell operation is driven,
The rotary motion of the deflecting unit is changed into linear motion, so as to realize the motion of the mechanical arm assembly in this direction.
10. a kind of method for carrying of vacuum carrying device for realizing the orthogonal transmission of substrate according to claim 2, its feature
It is：The rotary flat moves steering mechanism and the purpose of the deflecting unit is used to rotary motion being changed into linear motion,
Using any one in ball-screw, steel band wheeled steel, sprocket wheel chain, synchronizing wheel, worm gear structure.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410239802.8A CN105448767B (en) | 2014-06-03 | 2014-06-03 | Realize the vacuum carrying device and its method for carrying of the orthogonal transmission of substrate |
| PCT/CN2014/082821 WO2015184676A1 (en) | 2014-06-03 | 2014-07-23 | Vacuum transportation device for realizing orthogonal transmission of substrate and transportation method therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410239802.8A CN105448767B (en) | 2014-06-03 | 2014-06-03 | Realize the vacuum carrying device and its method for carrying of the orthogonal transmission of substrate |
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| CN105448767A CN105448767A (en) | 2016-03-30 |
| CN105448767B true CN105448767B (en) | 2018-02-13 |
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| CN201410239802.8A Active CN105448767B (en) | 2014-06-03 | 2014-06-03 | Realize the vacuum carrying device and its method for carrying of the orthogonal transmission of substrate |
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| WO (1) | WO2015184676A1 (en) |
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| CN108242417B (en) * | 2016-12-26 | 2020-10-16 | 北京北方华创微电子装备有限公司 | Manual silicon chip conveying mechanism |
| CN106807578B (en) * | 2017-01-09 | 2019-07-02 | 金轮(佛山)新技术实业有限公司 | A kind of wood surface lines molding spray painting automation equipment |
| CN107845597A (en) * | 2017-12-05 | 2018-03-27 | 北京创昱科技有限公司 | A kind of fixation kit of transmission mechanism |
| CN108866504B (en) * | 2018-07-31 | 2024-01-30 | 湖南玉丰真空科学技术有限公司 | Substrate frame conveying system of vacuum coating machine |
| CN110405212B (en) * | 2019-07-19 | 2023-07-04 | 佛山科学技术学院 | Automatic blanking device in alloy cutter forming process |
| CN113838788A (en) * | 2020-06-24 | 2021-12-24 | 拓荆科技股份有限公司 | Automatic wafer bearing system and method for transferring wafer by adopting same |
| CN111775437B (en) * | 2020-07-04 | 2022-09-27 | 江海琦 | Pretreatment device for substrate |
| CN114527750B (en) * | 2022-01-21 | 2024-08-09 | 天津博迈科海洋工程有限公司 | Large equipment carrying multipoint collaborative operation method for rectangular electrical room of oil platform |
| CN217869073U (en) * | 2022-06-23 | 2022-11-22 | 拉普拉斯(无锡)半导体科技有限公司 | Transmission structure of vacuum cavity |
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| CN101090085A (en) * | 2005-08-18 | 2007-12-19 | 周星工程股份有限公司 | Movable transfer chamber and substrate-treating apparatus including the same |
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| CN105448767A (en) | 2016-03-30 |
| WO2015184676A1 (en) | 2015-12-10 |
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Effective date of registration: 20170401 Address after: 201203 Shanghai city Songjiang District Sixian Road No. 3255, building 3, Room 403 Applicant after: SHANGHAI LIXIANG WANLIHUI FILM EQUIPMENT CO., LTD. Address before: 201203 Pudong New Area Zhangjiang Road, Shanghai, No. 1 Curie Applicant before: SHANGHAI LIXIANG WANLIHUI FILM EQUIPMENT CO., LTD. Applicant before: Ideal Energy Equipment (Shanghai) Ltd. |
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Effective date of registration: 20180411 Address after: 225400 north side of Huan Xi Road, Taixing hi tech Industrial Development Zone, Taizhou, Jiangsu Patentee after: Ideal Wan Li Hui vacuum equipment (Taixing) Co., Ltd. Address before: 201203 Shanghai city Songjiang District Sixian Road No. 3255, building 3, Room 403 Patentee before: SHANGHAI LIXIANG WANLIHUI FILM EQUIPMENT CO., LTD. |