KR20100002984A - 산화아연계 스퍼터링 타겟, 그 제조 방법 및 그를 이용하여제조된 산화아연계 박막 - Google Patents
산화아연계 스퍼터링 타겟, 그 제조 방법 및 그를 이용하여제조된 산화아연계 박막 Download PDFInfo
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Abstract
Description
벌크저항 (mΩ) | 소결밀도 (g/cm3) | 색좌표 | |||
L* | a* | b* | |||
실시예 1 | 20 | 5.61 | 55.71 | -7.45 | 3.03 |
비교예 1 | 8*106 | 5.54 | 92.25 | -9.22 | 26.03 |
Claims (14)
- 산화아연 및 산화갈륨을 함유하는 산화아연계 소결체를 포함하되,상기 산화아연계 소결체에 상기 산화갈륨이 1.5 내지 3.5mol%로 함유된 산화아연계 스퍼터링 타겟.
- 제1항에 있어서,상기 산화아연계 소결체는, CIE L*a*b* 표색계에서 L*는 90 이하, a*는 -70 내지 10, b*는 -10 내지 90의 값을 갖는 표면색 및 단면색을 가지는 것을 특징으로 하는 산화아연계 스퍼터링 타겟.
- 제1항에 있어서,상기 산화아연계 소결체의 벌크저항은 100mΩ 이하인 것을 특징으로 하는 산화아연계 스퍼터링 타겟.
- 제1항에 있어서,상기 산화아연계 소결체의 소결밀도는 95% 이상인 것을 특징으로 하는 산화아연계 스퍼터링 타겟.
- 제1항에 있어서,DC 스퍼터링이 가능한 것을 특징으로 하는 산화아연계 스퍼터링 타겟.
- 다단계 습식밀링을 통해 산화아연 분말, 산화갈륨 분말, 분산제 및 분산매가 혼합된 혼합슬러리를 준비하는 단계;상기 혼합슬러리를 건조하여 과립분말을 준비하는 단계;상기 과립분말을 성형하여 성형체를 형성하는 단계; 및상기 성형체를 소결하는 단계를 포함하는 산화아연계 스퍼터링 타겟의 제조 방법.
- 제6항에 있어서,상기 과립분말을 준비하기 전에 상기 준비된 혼합슬러리에 바인더를 첨가하는 단계를 더 포함하는 산화아연계 스퍼터링 타겟의 제조 방법.
- 제6항에 있어서, 상기 혼합슬러리를 준비하는 단계는,상기 산화갈륨 분말, 제1 분산제 및 제1 분산매가 혼합된 제1 슬러리를 준비하는 단계;상기 제1 슬러리를 습식밀링하는 단계;상기 습식밀링된 제1 슬러리, 상기 산화아연 분말 및 제2 분산제가 혼합된 제2 슬러리를 준비하는 단계; 및상기 제2 슬러리를 습식밀링하는 단계를 포함하는 산화아연계 스퍼터링 타겟의 제조 방법.
- 제8항에 있어서,상기 제1 슬러리를 습식밀링하는 단계에 의해 상기 산화갈륨 분말의 평균 입경이 0.2 내지 0.5㎛가 되며, 상기 제2 슬러리를 습식밀링하는 단계에 의해 상기 산화아연 분말의 평균 입경이 0.1 내지 0.3㎛가 되는 것을 특징으로 하는 산화아연계 스퍼터링 타겟의 제조 방법.
- 제8항에 있어서,상기 제1 슬러리를 준비하는 단계는, 상기 산화갈륨 분말의 중량 대비 0.2 내지 0.9중량%의 상기 제1 분산제를 상기 제1 분산매에 투입하는 단계를 포함하고,상기 제2 슬러리를 준비하는 단계는, 상기 산화아연 분말의 중량 대비 0.3 내지 1.5중량%의 상기 제2 분산제를 상기 습식밀링된 제1 슬러리에 투입하는 단계를 포함하는 것을 특징으로 하는 산화아연계 스퍼터링 타겟의 제조 방법.
- 제6항에 있어서,상기 성형체의 소결은, 공기 분위기 및 무산소 가스 분위기가 교대로 제공되는 챔버 내에서 1300 내지 1450℃의 온도에서 수행되는 것을 특징으로 하는 산화아 연계 스퍼터링 타겟의 제조 방법.
- 제1항의 산화아연계 스퍼터링 타겟을 이용하여 DC 스퍼터링법으로 기판 상에 증착된 산화아연계 박막으로서, 550㎚의 파장에서 광투과율이 80% 이상인 것을 특징으로 하는 산화아연계 박막.
- 제12항에 있어서,1.5 내지 3.5mol%의 산화갈륨을 포함하는 것을 특징으로 하는 산화아연계 박막.
- 제12항에 있어서,비저항값이 3*10-4Ω·㎝ 이하인 것을 특징으로 하는 산화아연계 박막.
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120301710A1 (en) * | 2010-02-19 | 2012-11-29 | Lintec Corporation | Transparent conductive film, process for producing same, and electronic device employing transparent conductive film |
US20130230731A1 (en) * | 2010-10-15 | 2013-09-05 | Lintec Corporation | Transparent electrically conductive film and process for production thereof, member for electronic device, and electronic device |
WO2013183819A1 (ko) * | 2012-06-05 | 2013-12-12 | 한국세라믹기술원 | 갈륨 도핑량 증대에 의하여 출력인자가 향상된 산화아연의 제조방법 |
KR101404404B1 (ko) * | 2011-08-23 | 2014-06-10 | 코닝정밀소재 주식회사 | 산화아연 타겟 제조방법 및 이에 의해 제조된 산화아연 타겟 |
KR101446615B1 (ko) * | 2011-08-23 | 2014-10-06 | 코닝정밀소재 주식회사 | Igzo 타겟 제조방법 및 이에 의해 제조된 igzo 타겟 |
CN116813310A (zh) * | 2023-06-01 | 2023-09-29 | 先导薄膜材料(广东)有限公司 | 一种稀土元素掺杂氧化铟锡镓靶材及其制备方法 |
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JPH073443A (ja) * | 1993-06-16 | 1995-01-06 | Asahi Glass Co Ltd | スパッタリングターゲットとその製造方法 |
JPH10297966A (ja) * | 1997-04-28 | 1998-11-10 | Sumitomo Metal Mining Co Ltd | スパッタリングターゲット用ZnO−Ga2O3系焼結体の製造方法 |
JP2002363732A (ja) | 2001-03-15 | 2002-12-18 | Asahi Glass Co Ltd | 透明導電膜の製造方法および透明導電膜付き透明基板 |
KR20080110174A (ko) * | 2007-06-14 | 2008-12-18 | 삼성코닝정밀유리 주식회사 | 갈륨이 도핑된 산화아연 타겟, 그 제조 방법 및 그로부터제조된 산화아연 박막 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120301710A1 (en) * | 2010-02-19 | 2012-11-29 | Lintec Corporation | Transparent conductive film, process for producing same, and electronic device employing transparent conductive film |
US20130230731A1 (en) * | 2010-10-15 | 2013-09-05 | Lintec Corporation | Transparent electrically conductive film and process for production thereof, member for electronic device, and electronic device |
KR101404404B1 (ko) * | 2011-08-23 | 2014-06-10 | 코닝정밀소재 주식회사 | 산화아연 타겟 제조방법 및 이에 의해 제조된 산화아연 타겟 |
KR101446615B1 (ko) * | 2011-08-23 | 2014-10-06 | 코닝정밀소재 주식회사 | Igzo 타겟 제조방법 및 이에 의해 제조된 igzo 타겟 |
WO2013183819A1 (ko) * | 2012-06-05 | 2013-12-12 | 한국세라믹기술원 | 갈륨 도핑량 증대에 의하여 출력인자가 향상된 산화아연의 제조방법 |
CN116813310A (zh) * | 2023-06-01 | 2023-09-29 | 先导薄膜材料(广东)有限公司 | 一种稀土元素掺杂氧化铟锡镓靶材及其制备方法 |
CN116813310B (zh) * | 2023-06-01 | 2024-06-07 | 先导薄膜材料(广东)有限公司 | 一种稀土元素掺杂氧化铟锡镓靶材及其制备方法 |
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