KR20090010120A - Method and apparatus for manufacturing color filter - Google Patents

Abstract

[PROBLEMS] To speedily detect a discharge failure and specify an ink jet nozzle having the discharge abnormality. [MEANS FOR SOLVING PROBLEMS] On a glass substrate (2), a black matrix equivalent to an LCD panel screen and a color filter (CF) which is surrounded by the black matrix and is composed of pixels coated with coloring material are formed. Furthermore, on the glass substrate (2), at a prescribed position on the outside of the black matrix equivalent to the LCD panel, a test pattern (TP) is formed.

Description

Method for manufacturing color filter and apparatus therefor {METHOD AND APPARATUS FOR MANUFACTURING COLOR FILTER}

The present invention relates to a method and apparatus for producing a color filter on a glass substrate using an inkjet nozzle.

Conventionally, the method of manufacturing a color filter on a glass substrate using an inkjet nozzle is proposed (refer patent document 1).

Specifically, at least a transparent coloring material accommodating layer is provided on the transparent substrate, and an area to be between pixels of different colors is used as a non-colored area having color coloring properties, and pixels to be the same color are adjacent to each other. In the point to be described, a plurality of pixel portions which should be the same color are also included in the inter-pixel region to impart a coloring material without interruption to produce a color filter.

Moreover, it is proposed to detect the quantity of the ink droplet discharged from an inkjet head by weight, and to apply the applied voltage according to a detection result to the drive element of an inkjet head (refer patent document 2).

<Patent Document 1> Japanese Patent Application Laid-Open No. 9-68611

<Patent Document 2> Japanese Patent Application Laid-Open No. 11-248926

[Problem to Solve Invention]

Since the use frequency of an inkjet nozzle is high, the method of patent document 1 does not guarantee that discharge is always performed satisfactorily, and if discharge failure arises, manufacture is continued because manufacture continues until a defect is detected in an inspection process. There is a problem that the number of defective products becomes large.

In addition, the inspection step includes a process of performing chromaticity abnormality inspection, but since one pixel is provided with a colorant with a plurality of inkjet nozzles, there is a problem that it is not possible to immediately determine which inkjet nozzles are abnormal only by chromaticity abnormality inspection. have.

In addition, abnormalities in the ejection direction due to contamination of the inkjet nozzles and abnormalities in which droplets of the coloring material are dispersed cause contamination other than the pixels, such as contamination of the black matrix, but there is a problem that the sign cannot be determined.

Moreover, in the method of patent document 2, since the amount of one drop of droplets is very fine (several picoliters to several ten picoliters), the weight also becomes small (tens of several hundred micrograms-several hundred micrograms), and accurate measurement is difficult. And when this measurement is performed by electronic balance, it is necessary to clean the measuring part with a droplet every time, and the complicated apparatus for cleaning is needed. Moreover, when cleanliness is incomplete, a measurement will become inaccurate.

An object of the present invention is to provide a color filter manufacturing method and apparatus capable of quickly detecting a discharge failure and specifying which inkjet nozzles are discharged abnormally.

[Means for solving the problem]

The method of manufacturing a color filter according to claim 1, wherein the inkjet nozzles are arranged on the surface of the black matrix pixel by relatively moving the inkjet head bar having a plurality of inkjet heads having a plurality of inkjet nozzles and a glass substrate having a black matrix formed thereon. In the color filter manufacturing method which apply | coats a color material, as a preparation process of apply | coating a color material to the said glass substrate, a test pattern is previously drawn on a test substrate, and the coordinate of the impact trace of the color material of the said test pattern is detected. A discharge data table is created on the basis of the coordinates of the impact traces, and the discharge of the ink jet nozzle in the subsequent coating step is controlled.

The method of manufacturing a color filter according to claim 2, wherein the inkjet nozzles are arranged on a surface of the black matrix pixel by relatively moving the inkjet head bar having a plurality of inkjet heads having a plurality of inkjet nozzles and a glass substrate having a black matrix formed thereon. In the color filter manufacturing method which apply | coats a color material, it divides into several times, and apply | coats a color material to the said glass substrate, after test | inspection of the surplus area | region of the said glass substrate after drawing of the first path | route, the test pattern is applied by ear, It is a method of inspecting the shape of the impact trace of the color material of the test pattern while being present.

In this specification, a "surplus area" means the area | region except the area | region in which a color filter is formed among glass substrates, the area | region in which a color filter is formed corresponds to a display area, and the surplus area corresponds to a non-display area. .

The method of manufacturing a color filter according to claim 3, wherein the ink jet nozzles having a plurality of ink jet heads having a plurality of ink jet nozzles are moved to a pixel of the black matrix with the ink jet nozzles while relatively moving a glass substrate having a black matrix formed thereon. In the color filter manufacturing method which apply | coats a color material, a test pattern is drawn by apply | coating the said color material to the excess area | region of the said glass substrate with the said inkjet nozzle, and the coordinate of the impact trace of the color material of the said test pattern is examined. It is a method of performing discharge control of each inkjet nozzle based on the inspection result of the coordinate of the impact trace of the color material of the said test pattern.

The color filter manufacturing method of Claim 4 is a method of drawing a test pattern by setting the impact trace of the color material of the said test pattern to a zigzag arrangement.

The color filter manufacturing apparatus of Claim 5 includes the support member which supports the inkjet head bar which arranged the multiple inkjet head provided with the some inkjet nozzle, the adsorption table which adsorb | sucks and holds the glass substrate which formed the black matrix on the surface, and the inkjet head Manufacture of color filters, comprising: a movement means for relatively moving the bar and the glass substrate in a state of maintaining a predetermined gap; and an ejection control means for controlling the ejection operation of the inkjet nozzle to apply color material to the pixels of the black matrix. In the apparatus,

Test pattern drawing means for drawing a test pattern on the glass substrate with the inkjet nozzle, inspection means for inspecting the position of the impact trace of the color material of the test pattern, and calculation for calculating the coordinates of the impact trace based on the inspection result Means, and storage means for storing the operation result.

The color filter manufacturing apparatus of Claim 6 includes the support member which supports the inkjet head bar which arranged the plurality of inkjet heads provided with the some inkjet nozzle, the adsorption table which adsorbs and holds the glass substrate which formed the black matrix on the surface, and the inkjet head Manufacture of color filters, comprising: a movement means for relatively moving the bar and the glass substrate in a state of maintaining a predetermined gap; and an ejection control means for controlling the ejection operation of the inkjet nozzle to apply color material to the pixels of the black matrix. In the apparatus,

Test pattern drawing means for drawing a test pattern on the glass substrate with the inkjet nozzle, inspection means for inspecting the shape of the impact trace of the color material of the test pattern, and arithmetic means for calculating a change in discharge amount based on the inspection result And storage means for storing the operation result.

The color filter manufacturing apparatus of Claim 7 employ | adopts inspection by comparing the shape of the impact trace of the color material of the said test pattern with a reference shape as said inspection means.

The color filter manufacturing apparatus of Claim 8 employ | adopts what includes the line scan camera which scans in the direction orthogonal to an application | coating direction as said inspection means.

The color filter manufacturing apparatus of Claim 9 employ | adopts what includes the area camera which intermittently moves in the direction orthogonal to an application | coating direction, and image | photographs at the time of stop as said inspection means.

[Effects of the Invention]

Since the color filter manufacturing method of Claim 1 draws a test pattern on a test board beforehand, it can determine which inkjet nozzle has a discharge abnormality by examining the coordinate of the impact trace of the color material of a test pattern. have. As a result, even when discharge abnormality has arisen in an inkjet nozzle, manufacture of a defective product can be prevented.

Since the color filter manufacturing method of Claim 2 draws a test pattern on a glass substrate, it can quickly determine which inkjet nozzle has a discharge abnormality by examining the shape of the impact trace of the color material of a test pattern. . As a result, the number of defective products manufactured until it is determined that an ejection abnormality has occurred in the inkjet nozzle can be reduced to one.

In addition, by sequentially testing the test patterns with respect to the plurality of color filters, abnormality in the ejecting direction of the inkjet nozzle can be detected early, and generation of defective products can be prevented in advance.

Since the test pattern is drawn on a glass substrate, the color filter manufacturing method of Claim 3 can quickly determine which inkjet nozzle has a discharge abnormality by examining the coordinate of the impact trace of a test pattern. As a result, it is possible to reduce the number of defective products manufactured until it is determined that the ejection failure is occurring in the inkjet nozzle.

In addition, by sequentially testing the test patterns with respect to the plurality of color filters, abnormality in the ejecting direction of the inkjet nozzle can be detected early, and generation of defective products can be prevented in advance.

The color filter manufacturing method of Claim 4 can enlarge the space | interval of color materials which adjoin mutually, and can further improve an inspection precision.

Since the color filter manufacturing apparatus of Claim 5 draws a test pattern on a glass substrate by a test pattern drawing means, an inspection means examines the position of the impact trace of the color material of a test pattern, and calculates it based on a test result. By calculating the coordinates of the impact track by means, it is possible to quickly determine which ink jet nozzle has an ejection abnormality. As a result, it is possible to reduce the number of defective products manufactured until it is determined that the ejection failure is occurring in the inkjet nozzle. And, the calculation result can be stored in the storage means.

In addition, by inspecting the position of the impact trace of the color material of the test pattern sequentially by the inspection means with respect to the plurality of color filters, abnormality in the ejecting direction of the inkjet nozzle can be detected at an early stage, and the occurrence of defective products can be detected in advance. You can prevent it.

Since the color filter manufacturing apparatus of Claim 6 draws a test pattern on a glass substrate by a test pattern drawing means, an inspection means examines the shape of the impact trace of the color material of a test pattern, and calculates it based on a test result. By calculating the change in the shape of the impact track by means, it is possible to quickly determine which ink jet nozzle has an ejection abnormality. As a result, it is possible to reduce the number of defective products manufactured until it is determined that the ejection failure is occurring in the inkjet nozzle. And, the calculation result can be stored in the storage means.

In addition, by sequentially inspecting the shape of the impact traces of the color material of the test pattern by the inspection means with respect to the plurality of color filters, abnormality in the ejecting direction of the inkjet nozzle can be detected at an early stage, and the occurrence of defective products can be detected in advance. You can prevent it.

The color filter manufacturing apparatus of Claim 7 can improve the inspection precision of the shape of the impact trace of the color material of a test pattern.

The color filter manufacturing apparatus of Claim 8 can test the impact trace of the color material of a test pattern with a line scan camera.

The color filter manufacturing apparatus of Claim 9 can test the impact trace of the color material of a test pattern with an area camera.

BRIEF DESCRIPTION OF THE DRAWINGS It is a perspective view which shows one Embodiment of the color filter manufacturing apparatus of this invention.

2 is an enlarged view schematically showing the configuration of the inkjet head bar.

3 is a timing chart illustrating a color material application process and a test pattern inspection process.

4 is a schematic diagram showing a state in which a color material is applied in four application operations.

5 is a schematic view showing a state in which a color filter and a test pattern are formed on a glass substrate.

6 is an enlarged schematic view of a test pattern forming part.

7 is a flowchart for explaining an example of a test pattern inspection process.

8 is a flowchart for explaining an example of the color filter manufacturing process.

9 is a diagram illustrating an example of a discharge data table.

Fig. 10 is a diagram showing an example of impact traces from an inkjet nozzle.

[Description of the code]

2: glass substrate 5: inkjet head bar

9: scanning camera 51: inkjet head

52: inkjet nozzle CF: color filter

TP: Test Pattern

EMBODIMENT OF THE INVENTION Hereinafter, with reference to an accompanying drawing, embodiment of the color filter manufacturing method of this invention, its apparatus, and the substrate for color filters is described in detail.

BRIEF DESCRIPTION OF THE DRAWINGS It is a perspective view which shows one Embodiment of the color filter manufacturing apparatus of this invention.

This color filter manufacturing apparatus supports the adsorption table 3, the application | coating gantry 4, the camera gantry 6, etc. on the base 1. As shown in FIG.

The adsorption table 3 adsorbs and holds the glass substrate 2, and in order to achieve positioning of the glass substrate 2, it is rotationally driven in the θ direction by a drive mechanism and a guide mechanism (not shown). , Y direction is driven.

The application gantry 4 holds the inkjet head bar 5 and is driven in the X direction by a drive mechanism and a guide mechanism (not shown) in order to apply color materials to the glass substrate 2. Moreover, in order to adjust the relative position with respect to the glass substrate 2, the inkjet head bar 5 is driven by the Z direction and the Y direction by the drive mechanism and guide mechanism which are not shown in figure.

The camera gantry 6 detects impact marks (including test patterns to be described later) of color materials from the alignment cameras 7 and 8 for alignment of the glass substrate 2 and inkjet nozzles of the glass substrate 2. The scan camera 9 is held in the X direction by a drive mechanism and a guide mechanism (not shown) for alignment and pixel detection. Moreover, the alignment cameras 7 and 8 and the scan camera 9 are driven to a Y direction by the drive mechanism and guide mechanism which are not shown in figure. Here, as the scan camera 9, a line scan camera can be illustrated. However, instead of the scan camera, an area camera may be employed. In this case, the area camera may be intermittently moved to capture images at the time of stop.

The alignment cameras 7 and 8 detect the mark (not shown) of the glass substrate 2, and rotate the adsorption table 3 based on the mark detection result by the alignment cameras 7 and 8, and / Alternatively, alignment of the glass substrate 2 can be achieved by moving in the Y direction.

In addition, X and Y represent the directions orthogonal to each other set in order to define the plane parallel to the upper surface of the glass substrate 2 adsorbed-held by the adsorption table 3, Z is prescribed | regulated by X and Y The direction orthogonal to a plane is shown.

2 is a schematic diagram showing the configuration of the inkjet head bar 5.

The inkjet head bar 5 is made by aligning a plurality of inkjet heads 51, and each inkjet head 51 is made by aligning a plurality of inkjet nozzles 52. And the alignment of the some inkjet head 51 is set so that the space | interval of the all inkjet nozzles 52 and the space | interval of a Y-direction may become predetermined space | interval, respectively.

In addition, since the inkjet nozzles 52 are arranged in an inclined direction on the basis of a predetermined number, the inkjet nozzles 52 are sequentially operated while driving the application gantry 4 in the X direction, thereby linearly in the Y direction. The color material can be applied in an aligned state.

The inkjet head bar 5 shown in FIG. 2 is for applying any one of red (R), green (G), and blue (B) color materials, and is not particularly shown, but for applying other color materials An inkjet head bar is also provided. However, the inkjet head bars 5 for the red (R), green (G), and blue (B) color materials may be integrally arranged. Moreover, only the inkjet head bar 5 for one color material may be provided.

Next, the effect | action of the color filter manufacturing apparatus of the said structure is demonstrated.

3 is a timing chart illustrating a color material coating process and a test pattern inspection process, FIG. 7 is a flowchart illustrating an example of a test pattern inspection process, and FIG. 8 is a flowchart illustrating an example of a color filter production process. In addition, the process based on the flowchart of FIG. 7 is not shown in the timing chart of FIG.

First, the test pattern inspection process will be described.

In step SP1, after carrying in the test substrate to the adsorption table 3 by the carrying-out robot etc. which are not shown in figure, in step SP2, the outline positioning of a test board is performed by the external shape control means of illustration not shown. To achieve. Then, in step SP3, the substrate for test is adsorbed by the adsorption table 3, and then, in step SP4, the camera gantry 6 is sent, and in step SP5, the alignment mark of the test substrate is By detecting and positioning in the Y and θ directions, alignment of the test substrate is achieved, and the camera gantry 6 is brought in step SP6.

Next, in step SP7, the coating gantry 4 is brought to the door, and the X coordinate value of the coating gantry 4 is outputted, and in step SP8, the coating gantry 4 is tested based on the X coordinate value. It is determined whether or not the pattern application position has been reached. And if it has not reached the test pattern application position, the process of step SP7 is performed again.

In contrast, when it is determined in step SP8 that the coating gantry 4 has reached the test pattern application position, in step SP9, the movement of the coating gantry 4 is stopped, and all the inkjet nozzles of the inkjet head bar 5 are stopped. The droplet of color material is discharged from 52, and in step SP10, the application gantry 4 is brought to rest in the standby position.

FIG. 10 is a diagram showing an example of impact marks from the inkjet nozzles 52. As shown in FIG.

In FIG. 10, the impact traces determined by the nozzle row and the nozzle number are shown, P is the pixel pitch in the Y direction (the pitch of the inkjet nozzle 52), and L1 to L5 are the intervals in the nozzle row application direction.

Next, in step SP11, the camera gantry 6 is made to go, and in step SP12, it is determined whether the camera gantry 6 has reached the test pattern inspection position. If the test pattern inspection position has not been reached, the process of step SP11 is performed again.

On the contrary, when it is determined in step SP12 that the camera gantry 6 has reached the test pattern inspection position, in step SP13, the camera gantry 6 is stopped, and in step SP14, the scan camera 9 is turned off. Direction to detect the test pattern, and then return the scan camera 9 to the Y direction.

After the process of step SP14, in step SP15, the camera gantry 6 is brought to a stop in the standby position, and in step SP16, the adsorption of the glass substrate 2 is released and discharged, and the series of processes ends. .

In parallel with the processing of steps SP15 and SP16, in step SP17, the detection signal of the scan camera 9 is image processed, and X and Y coordinates are calculated, and in step SP18, the ink of the test pattern ( Color material) input the coordinate position information detected from the impact point, input the position information (coordinate value) of all the pixels on the glass substrate 2 in step SP19, and input other parameters in step SP20, In step SP21, calculation / creation of the data table is performed. In step SP22, the calculation result is stored in the discharge data table, and the series of processing is completed.

9 is a diagram showing an example of the discharge data table, in which the number of coating scans, the coating direction pixel number, the coating direction pixel position, the nozzle row, the coating gantry X coordinate value, and the discharge patterns of all the nozzles are set. X0 is the initial movement amount, Pg is the pixel pitch in the X direction (coating direction), L1 to Ln are the nozzle column application direction intervals, and m is the number of pixels in the application direction.

What is necessary is just to perform the process of the said flowchart at arbitrary timings before a color filter manufacture process.

Next, the color filter manufacturing process will be described.

In step SP1, after carrying in the glass substrate 2 to the adsorption table 3 by the carrying-out robot etc. which are not shown in figure, in step SP2, the outline of the glass substrate 2 by the outline control means of illustration is not shown. To achieve positioning. And in step SP3, the glass substrate 2 is adsorbed by the adsorption table 3, Then, in step SP4, the camera gantry 6 is let go, and in step SP5, the glass substrate 2 The alignment mark is detected, and the alignment of the glass substrate 2 is achieved by positioning in the Y direction and the θ direction, and the camera gantry 6 is brought in step SP6.

Then, in step SP7, it is determined whether the application is performed in the air or in the ear.

When it is determined in step SP7 that the coating of the path is carried out, in step SP8, the coating gantry 4 is moved, and the X coordinate value of the coating gantry 4 is output, and conversely, in step SP7, it is determined that the coating is by the ear. If yes, in step SP9, the application gantry 4 is brought.

And when the process of step SP8 or the process of step SP9 is performed, it is determined in step SP10 whether application | coating was performed to the end.

When it is determined in step SP10 that the coating is not performed to the end, in step SP11, the X coordinate output signal of the coating gantry 4 is compared with the discharge data table, and in step SP12, the X coordinate and the discharge data are It is determined whether or not they match, and if the X coordinate and the ejection data coincide, in step SP13, the droplets of the color material are ejected by the inkjet nozzle 52.

When it is determined in step SP12 that the X coordinate and the discharge data do not coincide, or when the process of step SP13 is performed, the determination of step SP10 is performed again.

If it is determined in the step SP10 that the coating is performed to the end, it is determined in step SP14 whether or not the first coating is the first route, and in the case of the first coating of the royal route, in step SP15, the coating gantry 4 is applied. ) Is moved to the test pattern application position, and in step SP16, the test pattern is formed by the inkjet head bar 5. Specifically, a zigzag test pattern is formed by moving the inkjet head bar 5 in the X direction and selecting the inkjet nozzle 52 that performs the ejection operation.

When it is determined in step SP14 that the application of the first path is not the first step, or when the process of step SP16 is performed, it is determined in step SP17 whether a predetermined number of coatings have been performed.

If it is determined in step SP17 that the number of coatings does not reach the predetermined number of times, in step 18, the coating gantry 4 is stopped, the inkjet head bar 5 is moved in the Y direction, and again in step SP7 The determination is made. The movement distance in the Y direction may be, for example, a distance determined according to the number of droplets of color material to be applied to one pixel region, but a distance obtained by adding an integer multiple of the pixel pitch in the Y direction to this distance. You may also. In the latter case, since the ink jet nozzle discharges ink to other pixels, even if there is a variation in the size of the impact trace for each ink jet nozzle, it can be averaged as a whole.

In addition, when it determines with application | coating of predetermined number of times in step SP17, in step SP19, an application | coating process is complete | finished and in step SP20, the adsorption | suction of the glass substrate 2 by the suction table 3 is released. Then, the glass substrate 2 is carried out by a carrying-out robot etc. which are not shown in figure, and a series of processes are complete as it is.

In summary,

After carrying in the glass substrate 2 to the adsorption table 3, based on the positioning by the external shape control means, and alignment mark detection of the glass substrate 2 by letting the camera gantry 6 go, based on a detection result Alignment of the glass substrate 2 is achieved by positioning in one Y direction and (theta) direction. Thereafter, the camera gantry 6 is brought into contact with the glass substrate 2 by the suction table 3.

Next, the coating gantry 4 is placed to apply the first path.

Thereafter, the coating gantry 4 is moved to the surplus region to form a test pattern.

Subsequently, the application is applied to the first ear by bringing the application gantry 4 with the inkjet head bar 5 slightly moved in the Y direction, during which the camera gantry 6 is directed to the scan camera 9. ), The test pattern of the glass substrate 2 is inspected, and then the camera gantry 6 is brought.

Here, the inspection of the test pattern may be a position inspection of the impact trace of the color material or the shape inspection of the impact trace of the color material. In the former case, the coordinate value can be calculated by performing a predetermined operation based on the inspected position. In the latter case, inspection of the shape can be achieved by comparing the shape with the reference shape.

Thereafter, the coating of the second path is performed by letting the coating gantry 4 be moved slightly in the Y direction.

Thereafter, the coating is applied to the second ear by bringing the coating gantry 4 in a state of slightly moving in the Y direction.

Thereafter, the adsorption holding of the glass substrate 2 is stopped and taken out from the adsorption table 3. Thereafter, by repeatedly performing the above series of processes, a desired long life color filter can be produced.

That is, when one color material is apply | coated, since the color material adheres at the same interval as the space | interval of inkjet nozzles 52, it does not become the state which apply | coated color material continuously.

However, when the processing according to the timing chart is performed, the coating is performed by slightly changing the position in the Y direction, and finally, as shown in FIG. 4, the black matrix 21 formed on the glass substrate 2. Color materials can be applied successively into the corresponding pixel region 22 of.

5 shows a state in which six color filters CF are formed on the glass substrate 2, and a test pattern TP for each color material is formed in a surplus region outside the color filter CF. It is.

FIG. 6 is an enlarged view of the test pattern TP forming unit, which is inspected by the camera gantry 6 and shows the test pattern TP formed by the inkjet nozzles 52 of three colors.

Therefore, the color materials are separated from each other and have a zigzag shape.

Then, the test pattern TP can be inspected by the scan camera 9 of the camera gantry 6, and when a discharge failure is detected, immediately necessary measures (manufacture of the color filter, the inkjet head 51, Replacement of the inkjet nozzles 52, etc. can be performed, and production of defective products can be minimized. If the number of the ink jet nozzles 52 is larger than the required number, the discharge of the color material from the ink jet nozzle 52 in which the discharge failure is detected is prevented, and the discharge of the color material from the surplus ink jet nozzle 52 is performed. It is preferable to perform the discharge control of the inkjet nozzle so that the manufacturing of the color filter of good quality can be continued without interrupting the manufacture of the color filter.

Moreover, by setting it as a zigzag shape, since the space | interval of color materials can be enlarged and an allowance can be made to image processing, inspection precision can be improved.

In addition, since the test | inspection of the test pattern TP by the scan camera 9 of the camera gantry 6 is performed during the application | coating operation | movement by operating the application | coating gantry 4, time for test | inspecting a test pattern TP. It is possible to prevent the problem that the tack time becomes long without needing extra.

However, you may test before application | coating, In this case, although the tack time becomes long, application | coating can be interrupted and the loss of a board | substrate can be minimized. In addition, you may test | inspect after completion | finish of application | coating, In this case, since it becomes the test | inspection in the next process of application | coating, it does not affect tack time, but the loss of a board | substrate becomes one or more sheets.

Moreover, since the test | inspection of the test pattern TP by the scan camera 9 of the camera gantry 6 is performed based on the test pattern TP formed in the glass substrate 2, how application | coating of a color material is performed is performed. Can check the precision. Of course, it can be quickly determined which inkjet head 51 is ejected abnormally.

In addition, when the inspection is performed with respect to the coordinates, the ejection control of the inkjet head 51 is performed based on the inspection result, so that the ejection of the color material can be achieved.

Moreover, since the said inspection is performed for every glass substrate in which a color filter is manufactured, it can detect that the deviation of a discharge direction becomes large gradually, etc. As a result, the abnormality of a discharge direction can be detected early.

In addition, when the inspection is performed on the shape of the impact trace of the color material, the ejection control of the inkjet head 51 can be performed on the basis of the inspection result, so that the ejection of the color material can be achieved.

Moreover, since said test | inspection is performed for every glass substrate in which a color filter is manufactured, a change of discharge amount can be detected and as a result, abnormality of a discharge amount can be detected early.

In addition, the test pattern TP can be inspected by an inspection apparatus provided separately, and a detailed inspection beyond the detection limit by the scan camera 9 can be achieved.

It is also conceivable to draw the test pattern on something different from the glass substrate 2, such as paper, but in this case, not only an extra material for drawing the test pattern is needed, but also an extra for drawing the test pattern. There is a problem that requires time. However, in the above embodiment, the extra material for drawing the test pattern is not necessary, and the extra time for drawing the test pattern is unnecessary.

As mentioned above, although embodiment which made the application | coating gantry 4 move in the X direction with respect to the adsorption table 2 was described, what is comprised is fixed so that the application | coating gantry 4 may be fixed and the adsorption table 3 may be moved. It is possible.

Claims (9)

The inkjet nozzle 52 is moved while relatively moving the inkjet head bar 5 having a plurality of inkjet heads 51 provided with a plurality of inkjet nozzles 52 and the glass substrate 2 having the black matrix formed on its surface. In the color filter manufacturing method of applying a color material to the pixel of the black matrix, As a preparation process of apply | coating a color material to the said glass substrate 2, the test pattern TP is previously drawn on the test substrate, the coordinate of the impact trace of the color material of the said test pattern TP is detected, and the said A discharge data table is created on the basis of the coordinates of the impact trace, and the discharge of the ink jet nozzle (52) in the subsequent coating step is controlled. The inkjet nozzle 52 is moved while relatively moving the inkjet head bar 5 having a plurality of inkjet heads 51 provided with a plurality of inkjet nozzles 52 and the glass substrate 2 having the black matrix formed on its surface. In the color filter manufacturing method of applying a color material to the pixel of the black matrix, In a plurality of times, a color material is applied to the glass substrate 2, the test pattern TP is drawn in the surplus region of the glass substrate 2 after the first end of the application, and the application is performed by the ear. The shape of the impact trace of the color material of the test pattern TP is inspected. The inkjet nozzle 52 is moved while relatively moving the inkjet head bar 5 having a plurality of inkjet heads 51 provided with a plurality of inkjet nozzles 52 and the glass substrate 2 having the black matrix formed on its surface. In the color filter manufacturing method of applying a color material to the pixel of the black matrix, By applying the color material to the surplus region of the glass substrate 2 with the inkjet nozzle 52, a test pattern TP is drawn, and the coordinates of the impact traces of the color material of the test pattern TP are inspected. And discharge control of each inkjet nozzle (52) on the basis of the inspection result of the coordinates of the impact traces of the color material of the test pattern (TP). The method according to claim 2, The color filter manufacturing method which draws a test pattern (TP) by setting the impact trace of the color material of the said test pattern (TP) to a zigzag arrangement. Adsorption table which adsorbs and holds the support member which supports the inkjet head bar 5 which arranged the several inkjet head 51 provided with the some inkjet nozzle 52, and the glass substrate 2 which formed the black matrix on the surface. (3), moving means for relatively moving the inkjet head bar 5 and the glass substrate 2 in a state of maintaining a predetermined gap, and controlling the ejection operation of the inkjet nozzle 52 to control the black matrix. A color filter manufacturing apparatus comprising ejection control means for applying a color material to a pixel of claim 1, comprising: test pattern drawing means for drawing a test pattern TP on the glass substrate 2 with the inkjet nozzle 52; And inspection means 9 for inspecting the position of the impact track of the color material of the test pattern TP, calculation means for calculating the coordinates of the impact track based on the inspection result, and storage means for storing the calculation result. Characteristic A color filter manufacturing apparatus. Adsorption table which adsorbs and holds the support member which supports the inkjet head bar 5 which arranged the several inkjet head 51 provided with the some inkjet nozzle 52, and the glass substrate 2 which formed the black matrix on the surface. (3), moving means for relatively moving the inkjet head bar 5 and the glass substrate 2 in a state of maintaining a predetermined gap, and controlling the ejection operation of the inkjet nozzle 52 to control the black matrix. A color filter manufacturing apparatus comprising ejection control means for applying a color material to a pixel of claim 1, comprising: test pattern drawing means for drawing a test pattern TP on the glass substrate 2 with the inkjet nozzle 52; And inspection means 9 for inspecting the shape of the impact traces of the color material of the test pattern TP, calculation means for calculating a change in discharge amount based on the inspection result, and storage means for storing the calculation result. Ugh Color filter manufacturing apparatus. The method according to claim 6, The said inspection means (9) is a color filter manufacturing apparatus which examines by comparing the shape of the impact trace of the color material of the said test pattern (TP) with a reference shape. The method according to claim 5 or 6, The inspection means (9) includes a color filter manufacturing apparatus for scanning in a direction orthogonal to the application direction. The method according to claim 5 or 6, The inspection means (9) includes an area camera that intermittently moves in a direction orthogonal to the application direction and captures images at rest.

Images