200906631 九、發明說明： 【發明所屬之技術領域】 本發明係關於使用喷墨喷嘴於玻璃基板上製造彩色濾光 片之方法及其裝置。 【先前技術】 先前以來，提出有使用喷墨噴嘴於玻璃基板上製造彩色 濾光片之方法（參照專利文獻U。 具體而言，於透明基板上至少設置有透明著色料吸收 層，使應成為不同顏色之像素間的區域為具有抗著色料性 之非著色區域，於應成為相同顏色之像素彼此相鄰處，對 該應成為相同顏色之複數個像素部分以及像素間區域，無 縫隙地賦予著色料，藉此著色而製造彩色濾光片。 又，提出有以重量檢測自噴墨頭所噴出之墨滴之量，將 對應於檢測結果的施加電壓施加至喷墨頭之驅動元件（來 照專利文獻2)。 [專利文獻1 ]曰本專利特開平9_686丨丨號公報 [專利文獻2]曰本專利特開平1丨_248926號公報 【發明内容】 [發明所欲解決之問題] 因噴墨喷嘴之使用頻率較高，故於專利文獻丨之方法 中，存在如下問題’#，當無法保證總是良好地進行嘴 出，從而產生喷出不良時，繼續製造直至於檢查步驟檢挪 出不良，因此導致所製造之次品之數量變多。 又’檢查步驟包括進行声序置夺-fc . 疋仃巴度異常檢查之步驟，由複數個 123445.doc 200906631 喷墨噴嘴將著色料賦予至一 ^ & . 素，因此存在僅由色度異 A查無法立即判斷哪個喷墨喷嘴異常之問題。 進而’存在無法提前判定以下問題，即，由噴墨噴嘴之 :垢而引起的喷出方向之異常、t色料之液滴分散之里常 f木巧垢4、以及給像素以外之部分帶來污 垢。 又，於專利文獻2之方法中，1滴之液滴量非常微細（數200906631 IX. Description of the Invention: [Technical Field] The present invention relates to a method and an apparatus for manufacturing a color filter on a glass substrate using an ink jet nozzle. [Prior Art] A method of manufacturing a color filter on a glass substrate using an inkjet nozzle has been proposed (refer to Patent Document U. Specifically, at least a transparent coloring material absorbing layer is provided on a transparent substrate, so that The area between the pixels of different colors is a non-colored area having anti-staining properties, and the pixels which should be the same color are adjacent to each other, and the plurality of pixel portions and the inter-pixel regions which should be the same color are given without gaps. A coloring material is used to produce a color filter by coloring. Further, it is proposed to apply an amount of ink droplets ejected from the inkjet head by weight, and apply an applied voltage corresponding to the detection result to the driving element of the inkjet head ( Patent Document 2) [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 9-686 No. [Patent Document 2] Japanese Patent Laid-Open Publication No. Hei No. Hei. The ink jet nozzle has a high frequency of use, so in the method of the patent document, there is the following problem '#, when it is impossible to ensure that the mouth is always good, and the discharge is generated. In case of failure, the manufacturing process continues until the inspection step is checked out, resulting in a large number of defective products. The 'inspection step includes performing the sound sequence capture-fc. The step of the abnormality check of the 疋仃巴度, from the plural 123445.doc 200906631 The inkjet nozzle imparts a coloring material to a ^ & . Therefore, there is a problem that it is impossible to immediately determine which inkjet nozzle is abnormal only by the chromaticity difference A. Further, there is a problem that the following problems cannot be determined in advance, that is, In the ink jet nozzle: the abnormality of the discharge direction caused by the scale, the dispersion of the droplets of the t color material, and the dirt in the portion other than the pixel. Further, in Patent Document 2 In the method, the amount of droplets of one drop is very fine (number
微微升（P^mer)〜數十微微升），因此重量亦微小（數十I 數百μθ’從而難以正確測定。而且，於利用電子天平進 行該測定之情料，必須每次清潔附著有㈣之測定部， 且必須使用用以清潔之複雜的裝置…若清潔不完全， 則導致測定不正確。 本發明之目的在於提供一種可迅速檢測喷出不良，而 且，可指出哪個喷墨噴嘴喷出異常之彩色遽光片製造方法 及其裝置。 [解決問題之技術手段] 請求項丨之彩色濾、光片製造方法，係一面使排列有複數 個具備複數個喷墨噴嘴之噴墨頭之噴墨頭橫桿與表面形成 有黑色矩陣之玻璃基板相對地移動，一面利用上述噴墨噴 嘴將彩色材料塗佈於上述黑色矩陣之像素者，且作為將彩 色材料塗佈於上述玻璃基板之準備步驟，事先於測試用基 板上描繪測試圖案，檢測上述測試圖案之彩色材料著落痕 跡之座彳示’根據上述著落痕跡之座標製成喷出資料表，押 制以後之塗佈步驟中的上述喷墨噴嘴之喷出。 123445.doc 200906631 請求項2之彩色濾光片製造方法，係一面使排列有複數 個具備複數個噴墨喷嘴之喷墨頭之喷墨頭橫桿與表面形成 有黑色矩陣之玻璃基板相對地移動，—面利用上述喷墨喷 嘴將彩色材料塗佈於上述黑色矩陣之像素者，且分成複數 次將彩色材料塗佈於上述玻璃基板，於最初之往程之塗佈 結束後於上述玻璃基板之剩餘區域描繪測試圖案，於進行 返程塗佈之期間檢查上述測試圖案之彩色材料著落痕跡的 形狀。 本說明書中所謂「剩餘區域」，係指玻璃基板中之除了 形成有彩色濾光片之區域以外的區域，形成有彩色濾光片 之區域對應顯示區域，剩餘區域對應非顯示區域。 請求項3之彩色濾光片製造方法，係一面使排列有複數 個具備複數個噴墨喷嘴之喷墨頭之噴墨頭橫桿與表面形成 有黑色矩陣之玻璃基板相對地移動，一面利用上述噴墨喷 嘴將彩色材料塗佈於上述黑色矩陣之像素者，且利用上述 噴墨噴嘴將上述彩色材料塗佈於上述玻璃基板之剩餘區 域，藉此描繪測試圖案，並檢查上述測試圖案之彩色材料 著落痕跡的座標，根據上述測試圖案之彩色材料著落痕跡 之座標的檢查結果，進行各喷墨噴嘴之噴出控制。 請求項4之彩色濾光片製造方法，係藉由將上述測試圖 案之彩色材料著落痕跡設定為交錯配置，而描繪測試圖案 的方法。 °月求項5之彩色濾光片製造裝置，係包括移動機構及噴 出抆制機構者，上述移動機構係使支持排列有複數個具備 123445.doc 200906631 複數個噴墨噴嘴之嗜 伴捭奈μ士 嗔墨頭橫桿的支持構件、吸附 保符表面形成有里辛拓 …、色矩陣之玻璃基板的吸附平臺、喷墨頭 ，及玻璃基板以保持特定間隙的狀態相對 嘴出控制機構係控制h、十、地@ 料塗佑μ + ]上述噴墨噴嘴之喷出動作而將彩色材 機矩陣之像素；其中包括：測試圖案描繪 …：利用上述噴墨嘴嘴於上述玻璃基板描•測試圖 ί 的位:其檢查上述測試圖案之彩色材料著落痕跡 抨·，運异機構’其根據檢查結果運算著落痕跡之座 不，及儲存機構，其儲存運算結果。 :求項6之彩色遽光片製造裝置，係包括移動機構及噴 工制機構者’上述移動機構係、使支持排列有複數個具備 複數個喷墨嘴嘴之噴墨頭之喷墨頭橫桿的支持構件、吸附 =表面形成有黑色矩陣之玻璃基板的吸附平臺、喷墨頭 橫桿及玻璃基板以保持特定間隙的狀態相對地移動，上述 噴出控制機構係控制上述喷㈣嘴之喷出動作而將彩色材 料塗佈於上述黑色矩陣之像素；其中包括：測試圖案描緣 機構，其利用上述喷墨喷嘴於上述玻璃基板描繪測試圖 案，，檢查機構，其檢查上述測試圖案之彩色材料著落痕跡 的形狀；運算機構，其根據檢查結果運算喷出量之變化，· 及儲存機構’其儲存運算結果。 請求項7之彩㈣光0造裝置，作為上述檢查機構， 係採用藉由將上述測試圖案之彩色材料著落痕跡的形狀與 基準形狀比較而進行檢查者。 請求項8之彩m片製造裝置，作為上述檢查機構， 123445.doc 200906631 係採用包括於與塗佈方向正交 機者。 之方向上掃描之線掃描攝像 請求項9之彩色濾光片製造裝置， 係採用包括於與塗佈方向正交之方j為上述檢查機構， 時攝像之區域攝像機者。 向上間歇移動，於停止 [發明之效果] 請求項1之彩色遽光片製造方法 a 描繪測试圖案’因此藉由檢查測試圖案之用基板上 跡的座標，可判定哪個喷墨喷嘴產生、/色^科著落痕 為，即使於嗔墨脅嘴產生喷出異一吊。其結果 造次品。 < 滑也¥ ’亦可防止製 請求項2之彩色濾光片製造方 試圖案，因此藉由檢查測㈣^、麵基板上描繪測 狀，可迅速判^ 〇 /、彩色材料著落痕跡的形 了、速〜哪個喷墨噴嘴產生噴㈣ 可使直至判定噴墨喷嘴產生噴出—果為， 次品之數量減少為丨個。 “止之期間所製造之 又’藉由對複數個彩色渡光片 前檢測喷墨嗔嘴之喷出方向之異常，且；預 產生。 且T預先防止次品之 請求項3之彩色據光片製造方法， 試圖案，因此藉 、璃基板上描繪測 因此藉由才双查測試圖案著落痕 判定哪個噴墨噴嘴產生喷出異常。其u迅速 減少。 噴出異吊為止之期間所製造之次品之數量 123445.doc -10- 200906631 a又，藉由對複數個彩色濾光片依次檢查測試圖案，可提 刖核測噴墨噴嘴之喷出方向之異常’且可預先防止次品之 產生。 ，項4之彩色濾光片製造方法，可使相鄰之彩色材料 彼此之間隔變大，而且，可提高檢查精度。 月求員5之彩色渡光片製造裝置，利用測試圖案描繪機 構於玻璃基板上描繪測試圖案，因此藉由檢查機構檢查測 試㈣之彩色材料著落痕跡的位置，根據檢查結果，藉由 運异機構運算著落痕跡之座標’藉此可迅速判定哪個噴墨 嘴嘴產生噴出異常。其結果為，可使直至判定噴墨噴嘴產 生喷出異常為止之期間所製造之次品之數量減少。而且， 可將運算結果儲存於儲存機構。 又：藉由檢查機構對複數個彩色濾光片依次檢查測試圖 案之衫色材料著落痕跡的位置’可提前檢測喷墨噴嘴之喷 出方向之異常，且可預先防止次品之產生。 請求項6之彩色遽光片製造裝置，利用測試圖案描緣機 構於玻璃基板上描繪測試圖案，因此藉由檢查機構檢查測 試圖案之彩色材料著落痕跡的形狀，根據檢查結果，藉由 運算機構運算著落痕跡之形狀變化，可迅速判定哪個二墨 喷嘴產生喷出異常。其結果為，可使直至判定喷墨噴嘴產 生喷出異常為止之期間所製造之次品之數量減少。而且， 可將運算結果儲存於儲存機構。 又，藉由檢查機構對複數個彩色遽以依次檢查測試圖 案之彩色材料著落痕跡的形狀，可提前檢測噴墨噴嘴之噴 123445.doc 200906631 出方向之異常，且可預先防止次品之產生。 請求項7之彩色濾光片製造裝置，可提高測試圖案之彩 色材料之著落痕跡的形狀之檢查精度。 a請求項8之彩色濾'光片製造裝置，可藉由線掃描攝像機 松查測喊圖案之彩色材料著落痕跡。 項9之彩色濾光片製造裝置，可藉由區域攝像機檢 一測試圖案之彩色材料著落痕跡。 【實施方式】 ，♦以下’參照隨附圖式，詳細說明本申請案發明之彩色濾 光片製造方法及其裝置及《色渡光片帛基板之實施形態: 圖1係表示本申請案發明之彩色濾光片製造裝置之一實 施形態之立體圖。 該彩色遽光片製造裝置中，於基座】上支承有吸附平臺 3、塗佈支架4、攝像機支架6等。 吸附平$ 3係吸附保持玻璃基板2者，且為了達成該玻璃 基板2之定位’而藉由未圖示之驅動機構、引導機構，於0 方向旋轉驅動吸附平臺3，並且於γ方向驅動吸附平臺3。 塗佈支架4係保持噴墨頭橫桿5者，且為了將彩色材料塗 布；玻璃基板2上’而藉由未圖示之驅動機構、引導機 構於X方向驅動塗佈支架4。又，為了調整與玻璃基板2 之相對位置，而藉由未圖示之驅動機構、引導機構，於ζ 方向、Υ方向驅動喷墨頭橫桿5。 攝像機支架6係保持對準攝像機7、8及掃描攝像機9者， 上述對準攝像機7、8用於玻璃基板2之對準，上述掃描攝 123445.doc -12· 200906631 像機9用以檢測玻璃基板2之來自噴墨噴嘴之彩色材料之著 落痕跡（包含下述測試圖案），為了對準、檢測像素，而藉 由未圖示之驅動機構、引導機構，於χ方向驅動攝像機支 架6。又，藉由未圖示之驅動機構、引導機構，於γ方向驅 動對準攝像機7、8及掃描攝像機9。此處’作為掃描攝像 機9，可例示線掃描攝像機。然而，亦可採用區域攝像機 代替線掃描攝像機，於此情形時，使區域攝像機間歇移 動，於停止時攝像即可。 對準攝像機7、8係檢測玻璃基板2之標記（未圖示）者， 根據對準攝像機7、8之標記檢測結果使吸附平臺3旋轉， 及/或使吸附平臺3於Υ方向上移動，藉此可達成玻璃基板2 之對準。 再者’ X、Υ表示為了規定與藉由吸附平臺3而吸附保持 之玻璃基板2之上表面平行的平面所設定之彼此正交之方 向，Ζ表示與藉由χ、γ而規定之平面正交之方向。 圖2係表示喷墨頭橫桿5之構成的概略圖。 該噴墨頭橫桿5係使複數個噴墨頭5 1排列而成者，且各 喷墨頭5 1係使複數個喷墨喷嘴52排列而成者。而且，以使 所有喷墨噴嘴52於X方向之間隔、於γ方向之間隔分別為 特定間隔的方式，設定複數個喷墨頭5丨之排列。 再者’噴墨喷嘴52以特定個數為單位斜向地排列，因此 藉由一面於X方向驅動塗佈支架4，一面使喷墨喷嘴52依次 動作’可以使之直線地排列於γ方向之狀態而塗佈彩色材 料。 123445.doc -13- 200906631 圖2所示之噴墨頭橫桿5係用以塗佈紅色（r)、綠色（G)、 藍色（B)之彩色材料之任一種顏色者，雖未特別圖示，但 亦可設置用以塗佈其他彩色材料之喷墨頭橫桿。然而，紅 色（R)、綠色（G)、藍色（B)之彩色材料用之喷墨頭橫桿5亦 可一體地排列。又’亦可僅設置1種顏色之彩色材料用之 噴墨頭橫桿5。 其次，說明上述構成之彩色濾光片製造裝置之作用。 圖3係說明彩色材料塗佈處理及測試圖案檢查處理之時 序圖，圖7係說明測試圖案檢查處理之一例的流程圖，圖8 係說明彩色濾光片製造處理之一例的流程圖。再者，圖3 之序圖中，未表示基於圖7之流程圖之處理。 首先’說明測試圖案檢查處理。 於步驟SP1中’藉由未圖示之搬人機器人等將測試用基 板搬入至吸附平臺3之後’於步驟SP2中，藉由未圖示之外 形規制機構，達成測試用基板之大致之定位。而且，於步 驟SP3中’利用吸附平臺3吸附測試用基板，其後，於步驟 SP4中，使攝像機支架6往程移動，於步驟sp5中，檢測測 試用基板之對準標記，進行γ方向、θ方向之Μ，藉此達 成測試用基板之對準，於步驟sp6中，使攝像機支架 移動。 其次，於步驟SP7中，使塗佈支架4往程移動/返程移 動，並且輸出塗佈支架4之父座標值，於步驟sp8中，根據 X座標值來判定塗佈支架4是否到達測試圖案塗佈位置。而 且’於未到達測t式圖案塗佈位置之情料，再次進行步驟 123445.doc •14- 200906631 SP7之處理。 置步驟SP8中判定塗佈支架4到達測試圖案塗佈位 _ 1 /日’，於步驟SP9中，使塗佈支架4停止移動，自噴 :==5之所有噴墨噴嘴52喷出彩色材料之液滴，於步 置。，使塗佈支架4返程移動，並使之停止於待機位 圖0係表不來自嘴墨噴嘴52之著落痕跡之一例的圖。 圖中表示有藉由喷嘴行、喷嘴編號而決定之著落痕 跡，p係Y方向之像素間距（喷墨喷嘴52之間距 喷嘴行塗佈方向間隔。 5係 其次，於步驟SP11中，使攝像機支架6往程移動，於步 驟SP12中’判定攝像機支架6是否到達測試圖案檢查位 置。而且’於未到達測試圖案檢查位置之情形時，再次進 行步驟SP11之處理。 相反，當步驟SP12中判定攝像機支架6到達測試圖案檢 查位置之情形時，於步驟SP13中，使攝像機支架6停止" 於步驟SP14中’使掃描攝像機9於丫方向上移動並檢測測 試圖案，其後，於γ方向使掃描攝像機9返回。 步細4之處理後’於步驟训5中，使攝像機支架⑼ 程移動而停止於待機位置，於步驟卯16中，解除玻璃基板 2之吸附，並搬出玻璃基板2，從而結束一系列處理。 又，使步驟SP15、步驟SP16之處理並列進行，於步驟 SP17中，對掃描攝像機9之檢測信號進行圖像處理，運算 X、Y座標，於步驟SP18中，輸入根據測試圖案之墨水（彩 123445.doc -15- 200906631 色材料）著落痕跡而檢測出之座標位置資訊，於步驟讣丄9 中，輸入玻璃基板2上之所有像素之位置資訊（座標值卜於 步驟SP20中，輸入其他參數，於步驟81>21中，進行資料表 之運算/製成，於步驟SP22中，將運算結果儲存於嘴出次 料表中，從而結束一系列處理。 、 圖9係表示喷出資料表之—例的圖，設定有塗佈掃描欠 數、塗佈方向像素編號、塗佈方向像素位置、喷 佈支架X座標值、所有喷嘴喷 塗 貝角又賀出圖案。再者，χ〇係初始 移動量，pg#x方向（塗佈方向）之像素間距，u〜Lnw 嘴行塗佈方向間隔，m係塗佈方向之像素之編號。“ 上述流程圖之處理，可於彩色據光片製造處理之前的任 意時序進行。 任 其次，說明彩色濾光片製造處理。 於步驟训中，藉由未圖示之搬入機器人等將玻 搬入至吸附平臺3之後，於步驟SP2中，藉由 規制機構’達成玻璃基板2之 ' 八双<疋位。而且，於舟驟 =3中’利用吸附平臺3吸附玻璃基板2，其後，於步_ 极2之對準仏δ己，進行γ方& Q . 璃基板2之㈣向之定位，藉此達成玻 動。土 於步驟抓中，使攝像機支架6返程移 而且，於步驟SP7中，剌宗B 4如人 當步驟奶令判定為塗佈還是返程塗佈。 使塗佈支架維程情形時，於步㈣8卜 卫且輸出塗佈支架4之X座標值， J23445.doc 200906631 =反，當步驟SP7中判定為返程塗佈之情形時，於步驟sp9 中’使塗佈支架4返程移動。 而且，於進仃步驟SP8之處理、或步驟sp9之處理之情形 時，於步驟spio中，判定塗佈是否進行至終端為止。月/ 當步驟SP10中判定為塗佈未進行至終端為止之情形時， 於步驟SP11中，將塗佈支架4之乂座標輸出信號與嗔出資料 表進行比較，於步驟_中，判定x座標與嘴出資料是否 -致，若X座標與喷出資料一致，則於步驟則3中，藉由 噴墨噴嘴52喷出彩色材料之液滴。 而且，當步驟SP12中判定為X座標與喷出資料不一致之 情形時，或進行了步驟SP13之處理之情形時，再 驟S P1 0之判定。 乂 當步驟SP10中判定為塗佈進行至終端為止之情形時，於 第=SP14中，判疋疋否為第J次往程之塗佈，當到定為係 ^久往程之塗佈之情形時，於步驟㈣中，使塗伟支架4 Γ至測試圖案塗佈位置’於步驟_中，利用喷墨頭橫 ^ 5$成測试圖案。具體而言’使噴墨頭橫桿$於X方向移 動，並且選擇進行噴出動作之噴 狀之測試圖案。 赁墨噴嘴〜藉此形成交錯 當步驟SP14中判定為非第卜女# 谁并w 塗佈之情形時，或 進仃了步驟SP 1 6之處理之情开彡拄狄止 之“時，於步驟SP17中，判定是 否進行特定次數之塗佈。 當步驟SP1 7中判定為塗怖士激 味“ 々言师'•人數未達到特定次數之情形 ，，於步㈣中，使塗佈支架4停止，使喷墨頭橫桿娜 123445.doc 17 200906631 方向上移動，再次進行步驟SP7之判定。再者，γ方向之 移動距離，例如，可係由欲塗佈於1個像素區域之彩色材 :夜滴的數量而決疋之距離，亦可係將該距離加上Υ方 向之像素間距之整數倍所得的距離。於為後者之情形時， +、墨噴嘴將墨水噴至不同的像素上，因此即使著落痕跡之 尺寸針對每個喷墨喷嘴而有差異，亦可使整體平均化。 又，當步驟SP17中判定為進行了特定次數之塗佈之情形 寺於步驟SP 19中，結束塗佈處理，於步驟Sp2〇中，解除 吸附平$3對玻璃基板2之吸附，並藉由未圖示之搬出機器 人等搬出玻璃基板2，直接結束一系列處理。 若概括以上内容，則如下： 於將玻璃基板2搬入至吸附平臺3之後，藉由外形規制機 構而定位’及使攝像機支架6往程移動，藉此檢測玻璃基 板2之對準標記，根據檢測結果進行γ方向、㊀方向之定 位’由此達成玻璃基板2之對準。其後’使攝像機支架6返 程移動，並且藉由吸附平臺3吸附保持玻璃基板2。 其次，使塗佈支架4往程移動而進行第丨次往程塗佈。 其後，使塗佈支架4移動至剩餘區域而形成測試圖案。 其後，以使喷墨頭橫桿5於丫方向上猶微移動之狀態而使 塗佈支架4返程移動，藉此進行第丨次返程塗佈，該期間， 使攝像機支架6往程移動，藉由掃描攝像機9進行玻 2之測試圖案之檢查，其後，使攝像機支架6返程移動^ 此處，測試圖案之檢查’可為彩色材料之著落痕跡之位 置的檢查，亦可為彩色材料之著落痕跡之形狀的檢查。於 123445.doc 200906631 為前者之情形時，可藉由根據經檢查之 算而算出座標值。於為後者之情形時，可藉之運 準形狀進行比較而達成形狀之檢查。 -狀與基 錄，以使塗佈支架4於¥方向稍微移動之狀態而往程移 動’藉此進行第2次往程塗佈。 其後，以使塗佈支架4於丫方向稍微移動之狀態而返 動，藉此進行第2次返程塗佈。Slightly liter (P^mer) ~ tens of picoliters), so the weight is also small (tens of thousands of hundreds of μθ' and thus difficult to measure correctly. Moreover, in the case of using the electronic balance for the measurement, it must be attached every time (4) The measuring unit, and must use a complicated device for cleaning... If the cleaning is incomplete, the measurement is incorrect. The object of the present invention is to provide a rapid detection of the ejection failure, and it is possible to indicate which inkjet nozzle is sprayed. A method for manufacturing an abnormal color light sheet and a device thereof [Technical means for solving the problem] The color filter and the light sheet manufacturing method of the request item are arranged such that a plurality of ink jet heads having a plurality of ink jet nozzles are arranged The inkjet head rail is moved relative to the glass substrate having the black matrix formed on the surface thereof, and the color material is applied to the pixels of the black matrix by the inkjet nozzle, and the color material is applied to the glass substrate. a step of drawing a test pattern on the test substrate in advance, and detecting the landing mark of the color material of the test pattern, indicating that the landing is based on the above The coordinates of the traces are made into a discharge data sheet, and the ink jet nozzles in the coating step are pressed. 123445.doc 200906631 The color filter manufacturing method of claim 2 is provided with a plurality of arranged ones. The ink jet head cross-bar of the ink jet head of the plurality of ink jet nozzles is moved relative to the glass substrate having the black matrix formed on the surface thereof, and the color material is applied to the pixels of the black matrix by the ink jet nozzle, and is divided into The color material is applied to the glass substrate at a plurality of times, and after the application of the first step, the test pattern is drawn on the remaining area of the glass substrate, and the color material landing mark of the test pattern is inspected during the return coating. In the present specification, the "remaining area" refers to a region other than the region in which the color filter is formed in the glass substrate, and the region in which the color filter is formed corresponds to the display region, and the remaining region corresponds to the non-display region. The color filter manufacturing method of item 3 is an ink jet in which a plurality of ink jet heads having a plurality of ink jet nozzles are arranged The head rail is moved relative to the glass substrate having the black matrix formed on the surface thereof, and the color material is applied to the pixels of the black matrix by the inkjet nozzle, and the color material is applied to the glass by the inkjet nozzle. The remaining area of the substrate is used to draw a test pattern, and the coordinates of the color material landing marks of the test pattern are inspected, and the ejection control of each ink jet nozzle is performed based on the inspection result of the coordinates of the color material landing marks of the test pattern. The color filter manufacturing method of 4 is a method of drawing a test pattern by setting a color material landing mark of the test pattern to a staggered arrangement. The color filter manufacturing apparatus of the item 5 includes a moving mechanism. And the squirting mechanism, the moving mechanism is configured to support a plurality of support members having a plurality of ink jet nozzles of 123445.doc 200906631, and an adsorption retaining surface formed therein. Xintuo..., the adsorption platform of the glass substrate of the color matrix, the inkjet head, and the glass substrate to maintain The state of the fixed gap is controlled by the mouth-out control mechanism to control the ejection operation of the ink-jet nozzle and the pixel of the matrix of the color material machine; wherein: the test pattern is drawn... The inkjet nozzle is in the position of the above-mentioned glass substrate drawing test chart ί: it checks the color material landing mark of the above test pattern ,·, the transporting mechanism 'calculates the position of the landing mark according to the inspection result, and the storage mechanism, which stores The result of the operation. The color ray sheet manufacturing apparatus of claim 6 includes a moving mechanism and a spray mechanism mechanism, wherein the moving mechanism system supports an ink jet head having a plurality of ink jet heads having a plurality of ink jet nozzles arranged in a horizontal direction. The support member of the rod, the adsorption platform of the glass substrate on which the black matrix is formed, the ink jet head rail and the glass substrate relatively move in a state of maintaining a specific gap, and the discharge control mechanism controls the discharge of the spray nozzle Acting to apply a color material to the pixels of the black matrix; the method includes: a test pattern framing mechanism for drawing a test pattern on the glass substrate by using the inkjet nozzle, and an inspection mechanism for inspecting the color material of the test pattern The shape of the trace; the arithmetic mechanism that calculates the change in the discharge amount based on the inspection result, and the storage mechanism 'stores the calculation result. The color (4) light-making device of claim 7 is used as the inspection means by comparing the shape of the color material landing mark of the test pattern with the reference shape. The color m sheet manufacturing apparatus of claim 8 is used as the above-mentioned inspection mechanism, 123445.doc 200906631, which is included in the machine orthogonal to the coating direction. Scanning and scanning of the line in the direction of the scanning The color filter manufacturing apparatus of the claim 9 is an area camera that is imaged when the j is orthogonal to the application direction and is the inspection mechanism. Intermittently moving upwards, stopping [Effect of the invention] The color enamel sheet manufacturing method a of claim 1 draws a test pattern. Therefore, by checking the coordinates of the substrate trace on the test pattern, it can be determined which ink jet nozzle is generated, The color ^ is a drop mark, even if the sputum ink mouth produces a sprinkling. The result is a defective product. < slip also ¥ 'can also prevent the color filter manufacturing test pattern of the request item 2, so by inspection (four) ^, the surface of the substrate on the test shape, can quickly determine the 〇 /, color material landing marks Shape, speed ~ Which inkjet nozzle produces the spray (4) can be determined until the inkjet nozzle is ejected - the result is that the number of defective products is reduced to one. The "manufactured during the period" detects the abnormality of the ejection direction of the inkjet nozzle before the plurality of color fascias, and pre-produces it; and T prevents the color data of the request item 3 of the defective product in advance. Since the sheet manufacturing method and the pattern are tested, it is determined by the drawing on the glass substrate, so that it is determined by the double-checking pattern that the ink-jet nozzle has a discharge abnormality. The u is rapidly reduced. The number of products 123445.doc -10- 200906631 a Further, by sequentially checking the test pattern on a plurality of color filters, it is possible to check the abnormality of the ejection direction of the ink jet nozzles and prevent the occurrence of defective products in advance. The color filter manufacturing method of item 4 can increase the interval between adjacent color materials, and can improve the inspection accuracy. The color light-passing sheet manufacturing apparatus of the month 5 is used by the test pattern drawing mechanism. The test pattern is drawn on the glass substrate, so the position of the landing mark of the color material of the test (4) is checked by the inspection mechanism, and according to the inspection result, the coordinates of the landing mark are calculated by the transport mechanism. It is determined rapidly which ink jet nozzle is abnormal in discharge. As a result, the number of defective products manufactured until the ink jet nozzle is abnormally detected can be reduced. Further, the calculation result can be stored in the storage mechanism. : By checking the position of the landing mark of the test pattern of the color pattern of the plurality of color filters in turn by the inspection mechanism, the abnormality of the ejection direction of the inkjet nozzle can be detected in advance, and the occurrence of defective products can be prevented in advance. In the color enamel sheet manufacturing apparatus, the test pattern is drawn on the glass substrate by the test pattern staking mechanism, so that the shape of the landing mark of the color material of the test pattern is inspected by the inspection mechanism, and the landing mark is calculated by the calculation mechanism according to the inspection result. When the shape is changed, it is possible to quickly determine which of the two ink nozzles is abnormal in discharge. As a result, the number of defective products manufactured until the ink jet nozzle is abnormally detected can be reduced. Further, the calculation result can be stored in a storage mechanism. In addition, by checking the plurality of color enamels to check the color of the test pattern in turn The shape of the color material landing mark can detect the abnormality of the inkjet nozzle spray 123445.doc 200906631 in the out direction, and can prevent the occurrence of defective products in advance. The color filter manufacturing device of claim 7 can improve the color of the test pattern. The inspection accuracy of the shape of the footprint of the material. A color filter manufacturing device of claim 8 can be used to check the color material landing marks of the shouting pattern by the line scanning camera. The color filter manufacturing device of item 9, The color material landing mark of the test pattern can be detected by the area camera. [Embodiment] ♦ Hereinafter, the color filter manufacturing method and apparatus of the invention of the present application and the color crossing light will be described in detail with reference to the accompanying drawings. Fig. 1 is a perspective view showing an embodiment of a color filter manufacturing apparatus according to the present invention. The color ray sheet manufacturing apparatus supports an adsorption platform 3 and a coating on a susceptor. Cloth bracket 4, camera bracket 6, and the like. The adsorption flat plate 3 adsorbs and holds the glass substrate 2, and in order to achieve the positioning of the glass substrate 2, the adsorption platform 3 is rotationally driven in the 0 direction by a drive mechanism and a guide mechanism (not shown), and the adsorption is driven in the γ direction. Platform 3. The coating holder 4 holds the ink jet head rail 5 and applies the coloring material to the glass substrate 2, and the coating holder 4 is driven in the X direction by a driving mechanism and a guiding mechanism (not shown). Further, in order to adjust the position with respect to the glass substrate 2, the ink jet head rail 5 is driven in the ζ direction and the Υ direction by a drive mechanism and a guide mechanism (not shown). The camera holder 6 is kept in alignment with the cameras 7, 8 and the scanning camera 9. The alignment cameras 7, 8 are used for alignment of the glass substrate 2, and the scanning camera 123445.doc -12·200906631 is used to detect the glass. The landing trace of the color material from the inkjet nozzle of the substrate 2 (including the test pattern described below) drives the camera holder 6 in the x direction by a drive mechanism and a guide mechanism (not shown) for aligning and detecting pixels. Further, the alignment cameras 7 and 8 and the scanning camera 9 are driven in the γ direction by a drive mechanism and a guide mechanism (not shown). Here, as the scanning camera 9, a line scan camera can be exemplified. However, it is also possible to use a zone camera instead of a line scan camera. In this case, the zone camera is intermittently moved and can be imaged at the time of stop. When the alignment cameras 7 and 8 detect the mark (not shown) of the glass substrate 2, the adsorption platform 3 is rotated according to the mark detection result of the alignment cameras 7 and 8, and/or the adsorption platform 3 is moved in the x direction. Thereby, the alignment of the glass substrate 2 can be achieved. Further, 'X, Υ denotes a direction orthogonal to each other in order to define a plane parallel to the upper surface of the glass substrate 2 adsorbed and held by the adsorption stage 3, and Ζ denotes a plane which is defined by χ and γ. The direction of the exchange. Fig. 2 is a schematic view showing the configuration of the ink jet head rail 5. The ink jet head rail 5 is formed by arranging a plurality of ink jet heads 51, and each of the ink jet heads 51 is formed by arranging a plurality of ink jet nozzles 52. Further, the arrangement of the plurality of ink jet heads 5 is set so that the interval between the ink jet nozzles 52 in the X direction and the interval in the γ direction are respectively a specific interval. Further, the 'inkjet nozzles 52 are arranged obliquely in a specific number of units. Therefore, the inkjet nozzles 52 are sequentially operated while the coating holder 4 is driven in the X direction, so that they can be linearly arranged in the gamma direction. The color material is coated in a state. 123445.doc -13- 200906631 The inkjet crossbar 5 shown in Fig. 2 is used to apply any color of red (r), green (G), blue (B) color materials, although not special The illustration, but it is also possible to provide an inkjet crossbar for coating other colored materials. However, the ink jet head rails 5 for the color materials of red (R), green (G), and blue (B) may be integrally arranged. Further, it is also possible to provide only the ink jet head rail 5 for a color material of one color. Next, the operation of the color filter manufacturing apparatus having the above configuration will be described. Fig. 3 is a timing chart for explaining a color material coating process and a test pattern inspection process, Fig. 7 is a flow chart for explaining an example of the test pattern inspection process, and Fig. 8 is a flow chart for explaining an example of the color filter manufacturing process. Furthermore, in the sequence diagram of FIG. 3, the processing based on the flowchart of FIG. 7 is not shown. First, the test pattern check processing will be described. In step SP1, the test substrate is carried into the adsorption stage 3 by a moving robot or the like (not shown). In step SP2, the outline of the test substrate is achieved by the external regulation mechanism (not shown). Further, in step SP3, 'the test substrate is adsorbed by the adsorption stage 3, and thereafter, in step SP4, the camera holder 6 is moved forward. In step sp5, the alignment mark of the test substrate is detected, and the gamma direction is performed. In the θ direction, the alignment of the test substrate is achieved, and in step sp6, the camera holder is moved. Next, in step SP7, the coating holder 4 is moved/returned, and the parent coordinate value of the coating holder 4 is output. In step sp8, it is determined whether the coating holder 4 reaches the test pattern according to the X coordinate value. Cloth location. And the process of step 123445.doc •14-200906631 SP7 is performed again without reaching the position where the t-pattern is applied. In step SP8, it is determined that the coating holder 4 reaches the test pattern coating position _ 1 / day ', in step SP9, the coating holder 4 is stopped from moving, and all the ink ejection nozzles 52 from the ejection: == 5 are ejected from the color material. Droplets, placed in steps. The coating holder 4 is moved back and stopped at the standby position. Fig. 0 is a view showing an example of the landing trace from the nozzle ink nozzle 52. The figure shows the landing marks determined by the nozzle row and the nozzle number, and p is the pixel pitch in the Y direction (the distance between the inkjet nozzles 52 in the nozzle row application direction is 5), and in step SP11, the camera holder is made. 6 moves to the path, and in step SP12, 'determines whether the camera holder 6 has reached the test pattern inspection position. And 'when the test pattern inspection position is not reached, the processing of step SP11 is performed again. Conversely, when the camera holder is determined in step SP12 6 When the test pattern inspection position is reached, in step SP13, the camera holder 6 is stopped " in step SP14, 'the scanning camera 9 is moved in the x direction and the test pattern is detected, and thereafter, the scanning camera is made in the gamma direction. 9 returns. After the processing of step 4, in step 5, the camera holder (9) is moved to stop at the standby position, and in step 卯16, the adsorption of the glass substrate 2 is released, and the glass substrate 2 is removed, thereby ending one. Further, the processing of steps SP15 and SP16 is performed in parallel, and in step SP17, the detection signal of the scanning camera 9 is entered. Image processing, calculating X and Y coordinates, in step SP18, inputting coordinate position information detected according to the landing mark of the ink of the test pattern (color 123445.doc -15-200906631 color material), in step 讣丄9, The position information of all the pixels on the glass substrate 2 is input (the coordinate value is input in step SP20, and other parameters are input. In step 81 > 21, the operation/production of the data table is performed, and in step SP22, the operation result is stored in The nozzle is discharged from the secondary material table to end a series of processes. Fig. 9 is a view showing an example of the discharge data table, which is provided with a coating scan undercount, a coating direction pixel number, a coating direction pixel position, and a spray cloth. The bracket X coordinate value, all the nozzles sprayed the corners and congratulated the pattern. Furthermore, the initial movement amount of the lanthanum, the pixel pitch of the pg#x direction (coating direction), u~Lnw the nozzle coating direction interval, m The number of the pixel in the coating direction. "The processing of the above flowchart can be performed at any timing before the color light film manufacturing process. Next, the color filter manufacturing process will be described. In the step training, by the After the loading robot or the like puts the glass into the adsorption platform 3, in step SP2, the regulation mechanism 'achieves the 'eight pairs' of the glass substrate 2. Moreover, in the boat=3, the 'adsorption platform' is utilized. 3 adsorbing the glass substrate 2, and then aligning the _ 己 己 , , , , , , , , , , 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位The camera holder 6 is moved back and, in step SP7, the scorpion B 4 is determined to be coated or returned during the step milk order. When the stent is coated, the step (4) 8 weiwei and the output coating bracket are output. The X coordinate value of 4, J23445.doc 200906631 = reverse, when it is determined in step SP7 that it is the return coating, the coating carriage 4 is moved back in step sp9. Further, in the case of the process of step SP8 or the process of step sp9, it is determined in step spio whether or not the coating is carried out to the terminal. Month / When it is determined in step SP10 that the coating is not performed to the terminal, in step SP11, the 乂 coordinate output signal of the coating holder 4 is compared with the sputum data table, and in step _, the x coordinate is determined. Whether or not the data is the same as the mouth-out data, if the X coordinate is consistent with the ejection data, in step 3, the ink droplets are ejected by the ink-jet nozzle 52. Further, when it is determined in step SP12 that the X coordinate does not coincide with the discharge data, or when the processing of step SP13 is performed, the determination of S P1 0 is repeated. When it is determined in step SP10 that the coating is carried out until the end of the coating, in the first = SP14, it is judged whether it is the coating of the Jth step, and when it is determined that the coating is applied for a long time. In the case, in the step (4), the Tuwei stent 4 is pulled to the test pattern coating position 'in the step _, and the test pattern is formed by using the inkjet head crosswise. Specifically, the ink jet head rail $ is moved in the X direction, and the test pattern of the spray pattern for performing the discharge operation is selected. The ink-filling nozzles are used to form an interlace when the determination in step SP14 is that the non-Wobu #ww and the w-coating is performed, or the processing of the step SP16 is performed. In step SP17, it is determined whether or not a certain number of times of coating is performed. When it is determined in step SP17 that the number of screaming screams "the slogan" does not reach a certain number of times, in step (4), the coating bracket 4 is caused. Stop, make the inkjet head cross bar Na. 445. Doc. 17 200906631 direction, and then proceed to step SP7. Furthermore, the moving distance in the γ direction may be, for example, the distance of the color material to be applied to one pixel region: the number of night drops, or the distance between the pixels in the Υ direction may be added. The distance obtained by an integer multiple. In the latter case, the ink nozzle sprays ink onto different pixels, so that even if the size of the landing mark differs for each ink jet nozzle, the whole can be averaged. Moreover, when it is determined in step SP17 that the coating has been performed for a certain number of times, in step SP19, the coating process is terminated, and in step Sp2, the adsorption of the glass substrate 2 by the adsorption flat is released, and by The unloading robot shown in the figure carries out the glass substrate 2 and directly ends a series of processes. If the above is summarized, the following is carried out: After the glass substrate 2 is carried into the adsorption platform 3, the positioning mechanism is positioned by the shape regulation mechanism and the camera holder 6 is moved forward, thereby detecting the alignment mark of the glass substrate 2, according to the detection. As a result, the positioning in the γ direction and the one direction is performed, thereby achieving the alignment of the glass substrate 2. Thereafter, the camera holder 6 is moved backward, and the glass substrate 2 is adsorbed and held by the adsorption platform 3. Next, the coating holder 4 is moved forward to perform the first coating. Thereafter, the coating holder 4 is moved to the remaining area to form a test pattern. Thereafter, the coating carriage 4 is moved backward by moving the inkjet head rail 5 in the 丫 direction, thereby performing the second return coating, during which the camera holder 6 is moved forward. The test pattern of the glass 2 is inspected by the scanning camera 9, and then the camera holder 6 is moved back. Here, the inspection of the test pattern can be the inspection of the position of the marking of the color material, or the color material. Check the shape of the landing mark. In the case of the former, 123645.doc 200906631, the coordinate value can be calculated by the calculation according to the inspection. In the case of the latter case, the shape can be checked by comparing the shape of the shape. The shape and the basis are moved so that the coating holder 4 is slightly moved in the direction of the ¥, thereby performing the second coating. Thereafter, the coating holder 4 is returned in a state in which the coating holder 4 is slightly moved in the 丫 direction, whereby the second return coating is performed.
其後，停止玻璃基板2之吸附保持，自吸附平臺3搬出玻 璃基板2。其後’藉由反覆進行上述一系列處理，可製迭 所需張數之彩色濾光片。 ^ +亦即’於進行-次彩色材料之塗佈之情形時，以與喷墨 喷嘴52彼此之間隔相等的間隔附著彩色材料，因此不會成 為連續塗佈彩色材料之狀態。 然而，於根據上述時序圖進行處理之情形時，使γ方向 之位置稍微變化而進行塗佈，因此，最終如圖4所示，可 於相當於玻璃基板2上所形成之黑色矩陣21之像素區域22 内連續塗佈彩色材料。 圖5表示於玻璃基板2上形成有6個彩色濾光片CF(c〇i〇r filter)之狀態，而且，於較彩色濾光片⑶外側之剩餘區域 形成有各彩色材料之測試圖案TP(test pattemj。 圖6係放大表示測試圖案TP形成部之圖，作為藉由攝像 機支架6而檢查者，表示藉由3種顏色之喷墨噴嘴52而形成 之測試圖案TP。 因此’彩色材料彼此分離並且形成為交錯狀。 123445.doc -19· 200906631 而且，可精由攝像機支架6之掃描攝 丁p，於檢測出噴出兀卢+法，士 戌概一叫。式圖案 、不良之知形時，可立即進行必要# _ ϊ? (中斷製造彩色嘑s 選仃乂要的處理 4忐片，更換噴墨頭51、嘴 且可使所製造之次品為最小限：墨嗔：524)， 度又，於噴墨噴嘴52之數 ^於㊉要數量之情形時，為了阻止自檢測出喷出不良之 喊’贺嘴52噴出彩色材料，使彩色材料自剩餘噴 喷出，較好的是，進行喑黑嗆磡>+山 疋進仃噴墨喷嘴之贺出控制，從而不會中 斷製造彩色濾光片，可繼靖喪 ^ T繼續製造成為良品之彩色濾光片。 又，藉由形成為交錯狀，可使彩色材料彼此之間隔變 大且可使圖像處理留有餘地，因此可提高檢查精度。 又，藉由攝像機支架6之掃描攝像機9而進行之測試圖案 了之檢查，於藉由使塗佈支架4動作而進行之塗佈動作過 程中進行，因此無須用以檢查測試圖案τρ之多餘時間，從 而可防止導致作業時間變長之不良情況。 然而，亦可於塗佈前進行檢查，於該情形時，雖然導致 作業時間變長，但是可中斷塗佈，且可使基板之損耗最 小。又，亦可於塗佈結束後進行檢查，於該情形時，於塗 佈之後的步驟進行檢查’因此不對作業時間帶來影響，但 是導致基板之損耗為1片以上。 又’藉由攝像機支架6之掃描攝像機9而進行之測試圖案 ΤΡ之檢查，根據於玻璃基板2所形成之測試圖案τρ而進 行’因此可高精度地檢查彩色材料之塗佈如何進行。當 然，可迅速判定哪個噴墨頭5 1噴出異常。 又’於對座標進行檢查之情形時，根據檢查結果進行嘴 123445.doc -20- 200906631 墨頭51之噴出控制 化。 藉此可達成彩色材料之噴出之合理 又’對製造有彩&、备 杳，m 濾光片之每片玻璃基板進行上述檢 笪，因此可檢測噴出 為’可提前檢測嗔出方向之異常。 一果 又，於對彩务从 時，根棱… 落痕跡之形狀進行檢查之情形 ^ —，0果控制噴墨頭51之喷出，藉此可達成彩色 材料之噴出之合理化。 運戚I色 皆製4有彩色濾光片之每片玻璃基板進行上述檢 二因此可檢測喷出量之變化，其結果為，可提前檢測喷 ®里之異常。 杳，。可利用另外設置之檢查裝置對測試圖案TP進行檢 —，且可達成超過掃描攝像機9之檢測界限之詳細的檢 查0 又，亦考慮於紙等與玻璃基板2不同者之上描繪測試圖 於°亥清形時，存在以下問題，不僅須要用以描繪測試 圖案之多餘的材料，而且須要用以描繪測試圖案之多餘的 時間。然而，上述實施形態中，不須要用以描繪測試圖案 之夕餘的材料，而且不須要用以描繪測試圖案之多餘的時 間。 以上’說明了使塗佈支架4相對於吸附平臺2於X方向上 移動之實施形態，但亦可構成為將塗佈支架4固定，而使 吸附平臺3移動。 【圖式簡單說明】 123445.doc -21 - 200906631 圖1係表示本申請案發明 施形態之立體圖。 七色)慮光片製造裝置之一實 圖2係概略性表示喷墨頭橫桿之構成的放大圖。 序圖 圖3係n兒明彩色材料塗佈處理及測試圖案檢查處理之時 圖 圖4係表示以4次塗佈動作塗佈有彩色材料之狀態的概略Thereafter, the adsorption and holding of the glass substrate 2 are stopped, and the glass substrate 2 is carried out from the adsorption stage 3. Thereafter, by performing the above-described series of processes in reverse, a desired number of color filters can be formed. ^ + That is, when the application of the secondary color material is performed, the color material is attached at intervals equal to the interval between the ink jet nozzles 52, and thus the state in which the color material is continuously applied is not obtained. However, in the case of processing according to the above-described timing chart, the position in the γ direction is slightly changed to be applied, and finally, as shown in FIG. 4, the pixel corresponding to the black matrix 21 formed on the glass substrate 2 can be used. The color material is continuously coated in the area 22. Fig. 5 shows a state in which six color filters CF (c〇i〇r filter) are formed on the glass substrate 2, and a test pattern TP of each color material is formed in the remaining area outside the color filter (3). (Test pattemj. Fig. 6 is an enlarged view of the test pattern TP forming portion, and as a examiner by the camera holder 6, the test pattern TP formed by the ink jet nozzles 52 of three colors is displayed. Separated and formed into a staggered shape. 123445.doc -19· 200906631 Moreover, the camera can be scanned by the camera holder 6 to detect the ejection of the 兀Lu+ method, and the gentry is called a pattern. When necessary, you can immediately perform the necessary # _ ϊ? (Interrupt the manufacturing of the color 嘑 s select the desired 4 , film, replace the inkjet head 51, the mouth and make the defective products to a minimum: ink 嗔: 524) In addition, when the number of the inkjet nozzles 52 is ten, the number of the inkjet nozzles 52 is prevented from being detected by the shouting of the nozzles, and the color material is ejected from the remaining jets. Yes, carry out black 呛磡 呛磡 + 疋 疋 疋 仃 仃 仃 仃 仃By controlling the control, the color filter can be manufactured without interrupting, and the color filter can be manufactured as a good product. Further, by forming the staggered shape, the color materials can be spaced apart from each other and Since the image processing can be left with a margin, the inspection accuracy can be improved. Further, the inspection pattern by the scanning camera 9 of the camera holder 6 is checked, and the coating operation is performed by operating the coating holder 4. It is carried out in the process, so there is no need to check the excess time of the test pattern τρ, thereby preventing the malfunction that causes the working time to become longer. However, it is also possible to perform inspection before coating, in which case the working time is prolonged. However, the coating can be interrupted and the loss of the substrate can be minimized. In addition, the inspection can be performed after the coating is completed. In this case, the inspection is performed after the coating step. Therefore, the operation time is not affected, but The loss of the substrate is one or more. Further, the inspection of the test pattern by the scanning camera 9 of the camera holder 6 is performed according to the glass substrate 2. The pattern τρ is tested to perform 'therefore, it is possible to check how the application of the color material is performed with high precision. Of course, it is possible to quickly determine which of the ink-jet heads 51 is ejected abnormally. Further, when the coordinates are inspected, the mouth is made according to the inspection result. 123445.doc -20- 200906631 The control of the ejection of the ink head 51. Thereby, it is possible to achieve the above-mentioned inspection of each glass substrate which is reasonable for the ejection of the color material and for the production of the color & Therefore, it is possible to detect the ejection as "an abnormality in which the direction of the ejection can be detected in advance. One fruit, in the case of the coloring from the time, the root edge... the shape of the falling mark is checked ^,, 0 control the ejection of the inkjet head 51 Therefore, the rationalization of the ejection of the color material can be achieved. Each of the glass substrates of the four color filters is subjected to the above-described inspection, so that the change in the discharge amount can be detected, and as a result, the abnormality in the spray can be detected in advance. dark and quiet,. The test pattern TP can be inspected by using an additionally provided inspection device, and a detailed inspection exceeding the detection limit of the scanning camera 9 can be achieved. Also, it is considered that the test pattern is drawn on a sheet other than the glass substrate 2 or the like. In the case of a clear shape, there are the following problems, not only the excess material used to depict the test pattern, but also the extra time required to depict the test pattern. However, in the above embodiment, it is not necessary to describe the material of the test pattern, and it is not necessary to describe the extra time of the test pattern. The above has described an embodiment in which the coating holder 4 is moved in the X direction with respect to the adsorption stage 2, but the coating holder 4 may be fixed to move the adsorption stage 3. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an embodiment of the present invention. Fig. 2 is an enlarged view schematically showing the configuration of the crosshead of the ink jet head. Fig. 3 is a view showing a state in which a coloring material coating process and a test pattern inspection process are performed. Fig. 4 is a view showing a state in which a color material is applied by four coating operations.
圖5係表示於玻璃基板上形成有彩色濾光片與測試圖案 之狀態的概略圖。 圖6係放大表示測試圖案形成部分之概略圖。 圖7係說明測試圖案檢查處理之一例的流程圖。 圖8係說明彩色濾光片製造處理之一例的流程圖。 圖9係表示唢·出資料表之一例的圖。 圖1 〇係表示自喷墨噴嘴之著落痕跡之一例的圖。 【主要元件符號說明】 2 玻璃基板 5 喷墨頭橫桿 9 掃描攝像機 51 喷墨頭 52 噴墨喷嘴 CF 彩色濾光片 TP 測試圖案 123445.doc -22-Fig. 5 is a schematic view showing a state in which a color filter and a test pattern are formed on a glass substrate. Fig. 6 is an enlarged view showing a portion of the test pattern forming portion. Fig. 7 is a flow chart showing an example of test pattern check processing. Fig. 8 is a flow chart showing an example of a process of manufacturing a color filter. Fig. 9 is a view showing an example of a data sheet. Fig. 1 is a view showing an example of a landing trace from an ink jet nozzle. [Main component symbol description] 2 Glass substrate 5 Inkjet crossbar 9 Scanning camera 51 Inkjet head 52 Inkjet nozzle CF Color filter TP Test pattern 123445.doc -22-