JPWO2007132726A1 - Color filter manufacturing method and apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To quickly detect a discharge failure and identify which inkjet nozzle discharge abnormality. A color filter CF is formed on a glass substrate 2 and includes a black matrix corresponding to an LCD panel screen and pixels surrounded by a black matrix and coated with a coloring material. A test pattern TP is formed at a predetermined position outside the black matrix corresponding to the LCD panel. [Selection] Figure 5

Description

  The present invention relates to a method and an apparatus for manufacturing a color filter on a glass substrate using an inkjet nozzle.

  Conventionally, a method of manufacturing a color filter on a glass substrate using an inkjet nozzle has been proposed (see Patent Document 1).

  Specifically, at least a transparent colorant-receiving layer is provided on a transparent substrate, a region that should be between pixels of different colors is a non-colored region having color repellent properties, and pixels that are to have the same color are In adjacent locations, a color filter is manufactured by coloring the plurality of pixel portions that should have the same color, including the inter-pixel regions, without any discontinuities.

In addition, it has been proposed to detect the amount of ink droplets ejected from an inkjet head by weight and to apply an applied voltage corresponding to the detection result to a drive element of the inkjet head (see Patent Document 2).
Japanese Patent Laid-Open No. 9-68611 Japanese Patent Laid-Open No. 11-248926

  Since the frequency of use of inkjet nozzles is high, there is no guarantee that the method of Patent Document 1 will always discharge well, and if a discharge failure occurs, the manufacturing process continues until a failure is detected in the inspection process. There is a problem that the number of defective products is increased.

  In addition, the inspection process includes a process of performing chromaticity abnormality inspection, but since one pixel is provided with a coloring material by a plurality of inkjet nozzles, it is possible to immediately determine which inkjet nozzle is abnormal by only chromaticity abnormality inspection. There is a problem that cannot be judged.

  In addition, abnormalities in the ejection direction due to dirt on the inkjet nozzles and abnormalities in the dispersion of the colorant droplets may cause dirt other than the pixels, such as dirt on the black matrix, but the precursor cannot be determined. There is.

  Further, in the method of Patent Document 2, since the amount of one droplet is very fine (several picoliters to several tens of picoliters), the weight is also very small (several tens of μg to several hundreds of μg), which is accurate. Measurement is difficult. When this measurement is performed with an electronic balance, it is necessary to clean the measurement unit to which the droplets are attached every time, and a complicated device for cleaning is required. Also, if the cleaning is incomplete, the measurement will be inaccurate.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a color filter manufacturing method and apparatus capable of quickly detecting a discharge failure and identifying which inkjet nozzle discharge is abnormal.

  The color filter manufacturing method according to claim 1, wherein the inkjet nozzles are moved while relatively moving an inkjet head bar in which a plurality of inkjet heads having a plurality of inkjet nozzles are arranged and a glass substrate on which a black matrix is formed. In the color filter manufacturing method of applying a color material to the pixels of the black matrix, as a preparatory step of applying the color material to the glass substrate, a test pattern is drawn on a test substrate in advance, and the color material of the test pattern is In this method, the coordinates of the landing marks are detected, a discharge data table is created based on the coordinates of the landing marks, and the discharge of the inkjet nozzles in the subsequent coating process is controlled.

  The color filter manufacturing method according to claim 2, wherein the inkjet nozzles are moved while relatively moving an inkjet head bar in which a plurality of inkjet heads each having a plurality of inkjet nozzles are arranged and a glass substrate on which a black matrix is formed. In the color filter manufacturing method of applying a color material to the pixels of the black matrix, the color material is applied to the glass substrate in a plurality of times, and the surplus area of the glass substrate is tested after the first forward application is completed. This is a method of inspecting the shape of the landing mark of the color material of the test pattern while drawing the pattern and performing the backward coating.

  In this specification, “excess area” means an area of the glass substrate excluding the area where the color filter is formed, the area where the color filter is formed corresponds to the display area, and the excess area is the non-display area. It corresponds to.

  According to a third aspect of the present invention, there is provided the color filter manufacturing method, wherein the inkjet nozzle is moved while relatively moving an inkjet head bar in which a plurality of inkjet heads having a plurality of inkjet nozzles are arranged and a glass substrate having a black matrix formed on a surface thereof. In the color filter manufacturing method of applying a color material to the pixels of the black matrix, a test pattern is drawn by applying the color material to an excess region of the glass substrate with the inkjet nozzle, and the color of the test pattern In this method, the coordinates of the landing marks of the material are inspected, and the ejection control of each inkjet nozzle is performed based on the inspection result of the coordinates of the landing marks of the color material of the test pattern.

  The color filter manufacturing method according to claim 4 is a method of drawing a test pattern by setting the landing marks of the color material of the test pattern in a staggered arrangement.

6. The color filter manufacturing apparatus according to claim 5, wherein a suction member that holds and supports a glass substrate having a black matrix formed thereon, and a support member that supports an inkjet head bar in which a plurality of inkjet heads each having a plurality of inkjet nozzles are arranged. And a moving means for relatively moving the ink jet head bar and the glass substrate while maintaining a predetermined gap, and discharging for applying a color material to the pixels of the black matrix by controlling the discharging operation of the ink jet nozzle In a color filter manufacturing apparatus including a control means,
Test pattern drawing means for drawing a test pattern on the glass substrate by the inkjet nozzle, inspection means for inspecting the position of the landing mark of the color material of the test pattern, and calculation for calculating the coordinates of the landing mark based on the inspection result Means and storage means for storing the calculation result.

7. The color filter manufacturing apparatus according to claim 6, wherein a suction member holds a glass substrate having a black matrix formed thereon by supporting a support member that supports an inkjet head bar in which a plurality of inkjet heads each having a plurality of inkjet nozzles are arranged. And a moving means for relatively moving the ink jet head bar and the glass substrate while maintaining a predetermined gap, and discharging for applying a color material to the pixels of the black matrix by controlling the discharging operation of the ink jet nozzle In a color filter manufacturing apparatus including a control means,
Test pattern drawing means for drawing a test pattern on the glass substrate by the inkjet nozzle, inspection means for inspecting the shape of the landing mark of the color material of the test pattern, and calculation for calculating a change in discharge amount based on the inspection result Means and storage means for storing the calculation result.

  The color filter manufacturing apparatus according to claim 7 employs, as the inspection means, one that performs inspection by comparing the shape of the landing mark of the color material of the test pattern with a reference shape.

  A color filter manufacturing apparatus according to an eighth aspect of the present invention employs an apparatus including a line scan camera that scans in a direction orthogonal to the coating direction as the inspection means.

  In the color filter manufacturing apparatus according to a ninth aspect, the inspection means includes an area camera that intermittently moves in a direction orthogonal to the coating direction and picks up an image when stopped.

  In the color filter manufacturing method according to the first aspect, since the test pattern is drawn on the test substrate in advance, the discharge abnormality is generated in which inkjet nozzle by inspecting the coordinates of the landing mark of the color material of the test pattern. Can be determined. As a result, it is possible to prevent defective products from being manufactured even when an ejection abnormality occurs in the inkjet nozzle.

  In the color filter manufacturing method according to claim 2, since the test pattern is drawn on the glass substrate, it is possible to quickly determine which inkjet nozzle has an ejection abnormality by inspecting the shape of the landing mark of the color material of the test pattern. Can be determined. As a result, it is possible to reduce the number of defective products manufactured until it is determined that an ejection abnormality has occurred in the inkjet nozzles to one.

  Further, by sequentially inspecting the test patterns for a plurality of color filters, an abnormality in the ejection direction of the inkjet nozzle can be detected at an early stage, and the occurrence of defective products can be prevented in advance.

  In the color filter manufacturing method according to claim 3, since the test pattern is drawn on the glass substrate, it is quickly determined which inkjet nozzle has an ejection abnormality by inspecting the coordinates of the landing mark of the test pattern. be able to. As a result, it is possible to reduce the number of defective products manufactured until it is determined that an ejection abnormality has occurred in the inkjet nozzle.

  Further, by sequentially inspecting the test patterns for a plurality of color filters, an abnormality in the ejection direction of the inkjet nozzle can be detected at an early stage, and the occurrence of defective products can be prevented in advance.

  According to the color filter manufacturing method of the fourth aspect, the interval between the adjacent color materials can be increased, and consequently the inspection accuracy can be increased.

  The color filter manufacturing apparatus according to claim 5 draws the test pattern on the glass substrate by the test pattern drawing means, so that the inspection means inspects the position of the landing mark of the color material of the test pattern and calculates based on the inspection result. By calculating the coordinates of the landing mark by the means, it is possible to quickly determine which inkjet nozzle has the ejection abnormality. As a result, it is possible to reduce the number of defective products manufactured until it is determined that an ejection abnormality has occurred in the inkjet nozzle. And a calculation result can be memorize | stored in a memory | storage means.

  In addition, by sequentially inspecting the position of the landing mark of the color material of the test pattern for the plurality of color filters by the inspection means, abnormalities in the ejection direction of the ink jet nozzle can be detected at an early stage, and the occurrence of defective products can be prevented. Can be prevented.

  The color filter manufacturing apparatus according to claim 6, because the test pattern is drawn on the glass substrate by the test pattern drawing means, the shape of the landing mark of the color material of the test pattern is inspected by the inspection means, and the calculation is performed based on the inspection result By calculating the change in the shape of the landing mark by the means, it is possible to quickly determine which inkjet nozzle has the ejection abnormality. As a result, it is possible to reduce the number of defective products manufactured until it is determined that an ejection abnormality has occurred in the inkjet nozzle. And a calculation result can be memorize | stored in a memory | storage means.

  In addition, by sequentially inspecting the shape of the landing marks of the color material of the test pattern for a plurality of color filters by the inspection means, it is possible to detect abnormalities in the ejection direction of the ink jet nozzles at an early stage and to prevent the occurrence of defective products. Can be prevented.

  The color filter manufacturing apparatus according to claim 7 can increase the inspection accuracy of the shape of the landing mark of the color material of the test pattern.

  The color filter manufacturing apparatus according to the eighth aspect can inspect the landing mark of the color material of the test pattern by the line scan camera.

  The color filter manufacturing apparatus according to the ninth aspect can inspect the landing mark of the color material of the test pattern by the area camera.

  Embodiments of a color filter manufacturing method and apparatus and a color filter substrate according to the present invention will be described below in detail with reference to the accompanying drawings.

  FIG. 1 is a perspective view showing an embodiment of a color filter manufacturing apparatus according to the present invention.

  This color filter manufacturing apparatus supports a suction table 3, a coating gantry 4, a camera gantry 6 and the like on a machine base 1.

  The suction table 3 holds the glass substrate 2 by suction. In order to achieve positioning of the glass substrate 2, the suction table 3 is rotated in the θ direction and driven in the Y direction by a drive mechanism and a guide mechanism (not shown). Is done.

  The application gantry 4 holds the inkjet head bar 5 and is driven in the X direction by a drive mechanism and a guide mechanism (not shown) in order to apply a color material to the glass substrate 2. Further, in order to adjust the relative position with respect to the glass substrate 2, the inkjet head bar 5 is driven in the Z direction and the Y direction by a drive mechanism and a guide mechanism (not shown).

  The camera gantry 6 includes an alignment camera 7 and 8 for alignment of the glass substrate 2, and a scan camera 9 for detecting an impact mark (including a test pattern described later) of the color material from the inkjet nozzles on the glass substrate 2. And is driven in the X direction by a drive mechanism and a guide mechanism (not shown) for alignment and pixel detection. Further, the alignment cameras 7 and 8 and the scan camera 9 are driven in the Y direction by a drive mechanism and a guide mechanism (not shown). Here, as the scan camera 9, a line scan camera can be exemplified. However, an area camera may be employed instead of the scan camera. In this case, the area camera may be intermittently moved and imaged when stopped.

  The alignment cameras 7 and 8 detect marks (not shown) on the glass substrate 2, and the suction table 3 is rotated and / or moved in the Y direction based on the mark detection results by the alignment cameras 7 and 8. Thus, alignment of the glass substrate 2 can be achieved.

  X and Y represent directions orthogonal to each other set to define a plane parallel to the upper surface of the glass substrate 2 held by suction by the suction table 3, and Z represents a plane defined by X and Y. An orthogonal direction is shown.

  FIG. 2 is a schematic view showing the configuration of the inkjet head bar 5.

  The inkjet head bar 5 is formed by aligning a plurality of inkjet heads 51, and each inkjet head 51 is formed by aligning a plurality of inkjet nozzles 52. The alignment of the plurality of inkjet heads 51 is set such that the intervals in the X direction and the Y direction of all the inkjet nozzles 52 are set to predetermined intervals.

  Since the inkjet nozzles 52 are arranged in an oblique direction with a predetermined number as a unit, the inkjet nozzles 52 are sequentially operated while driving the coating gantry 4 in the X direction, thereby linearly aligning in the Y direction. In this state, the color material can be applied.

  The ink jet head bar 5 shown in FIG. 2 is for applying any one of red (R), green (G), and blue (B) color materials. An inkjet head bar for applying the material is also provided. However, the inkjet head bars 5 for the red (R), green (G), and blue (B) color materials may be integrally arranged. Further, only the ink jet head bar 5 for one color material may be provided.

  Next, the operation of the color filter manufacturing apparatus having the above configuration will be described.

  FIG. 3 is a timing chart for explaining the color material application process and the test pattern inspection process, FIG. 7 is a flowchart for explaining an example of the test pattern inspection process, and FIG. 8 is a flowchart for explaining an example of the color filter manufacturing process. Note that the timing chart of FIG. 3 does not show processing based on the flowchart of FIG.

  First, the test pattern inspection process will be described.

  In step SP1, after the test substrate is carried into the suction table 3 by a carry-in robot (not shown) or the like, in step SP2, rough positioning of the test substrate is achieved by an external shape regulating means (not shown). In step SP3, the test substrate is sucked by the suction table 3, and then in step SP4, the camera gantry 6 is moved forward. In step SP5, the alignment mark of the test substrate is detected, and the Y direction and θ direction are detected. Thus, the alignment of the test substrate is achieved, and the camera gantry 6 is moved back in step SP6.

  Next, in step SP7, the coating gantry 4 is moved forward / backward, and the X coordinate value of the coating gantry 4 is output. In step SP8, the coating gantry 4 reaches the test pattern coating position based on the X coordinate value. It is determined whether or not. If the test pattern application position has not been reached, step SP7 is performed again.

  On the contrary, if it is determined in step SP8 that the coating gantry 4 has reached the test pattern coating position, the movement of the coating gantry 4 is stopped in step SP9, and all the inkjet nozzles 52 of the inkjet head bar 5 are colored. The droplet of material is discharged, and in step SP10, the coating gantry 4 is moved back and stopped at the standby position.

  FIG. 10 is a diagram illustrating an example of a landing mark from the inkjet nozzle 52.

  FIG. 10 shows landing marks determined by nozzle rows and nozzle numbers, P is a pixel pitch in the Y direction (pitch of inkjet nozzles 52), and L1 to L5 are intervals in the nozzle row application direction.

  Next, in step SP11, the camera gantry 6 is moved forward, and in step SP12, it is determined whether or not the camera gantry 6 has reached the test pattern inspection position. If the test pattern inspection position has not been reached, step SP11 is performed again.

  Conversely, if it is determined in step SP12 that the camera gantry 6 has reached the test pattern inspection position, the camera gantry 6 is stopped in step SP13, and the scan camera 9 is moved in the Y direction in step SP14. The test pattern is detected, and then the scan camera 9 is returned to the Y direction.

  After the process of step SP14, the camera gantry 6 is moved backward and stopped at the standby position in step SP15. In step SP16, the adsorption of the glass substrate 2 is released and discharged, and the series of processes is terminated.

  In parallel with the processing in steps SP15 and SP16, in step SP17, the detection signal from the scan camera 9 is subjected to image processing, X and Y coordinates are calculated, and in step SP18, ink (color material) for the test pattern is applied. The coordinate position information detected from the bullet holes is input, the position information (coordinate values) of all the pixels on the glass substrate 2 is input at step SP19, the other parameters are input at step SP20, and the data table at step SP21. In step SP22, the calculation result is stored in the ejection data table, and the series of processes is terminated.

  FIG. 9 is a diagram showing an example of the ejection data table, in which the number of times of application scanning, the application direction pixel number, the application direction pixel position, the nozzle row, the application gantry X coordinate value, and the discharge pattern of all nozzles are set. X0 is an initial movement amount, Pg is a pixel pitch in the X direction (application direction), L1 to Ln are nozzle row application direction intervals, and m is a pixel number in the application direction.

  The process of the above flowchart may be performed at an arbitrary timing before the color filter manufacturing process.

  Next, the color filter manufacturing process will be described.

  In step SP1, after the glass substrate 2 is carried into the suction table 3 by a carrying robot (not shown) or the like, in step SP2, the rough positioning of the glass substrate 2 is achieved by outer shape regulating means (not shown). In step SP3, the glass substrate 2 is sucked by the suction table 3, and then in step SP4, the camera gantry 6 is moved forward. In step SP5, the alignment mark of the glass substrate 2 is detected, and the Y direction and θ direction are detected. Thus, the alignment of the glass substrate 2 is achieved, and the camera gantry 6 is moved back in step SP6.

  In step SP7, it is determined whether the application is the forward pass application or the return pass application.

  If it is determined in step SP7 that the forward application is performed, in step SP8, the application gantry 4 is moved forward, and the X coordinate value of the application gantry 4 is output. If it is determined, the coating gantry 4 is moved back in step SP9.

  When the process of step SP8 or the process of step SP9 is performed, it is determined in step SP10 whether or not the application has been performed to the end.

  If it is determined in step SP10 that the application has not been performed to the end, in step SP11, the X coordinate output signal of the application gantry 4 is compared with the discharge data table, and in step SP12, the X coordinate and the discharge data are compared. Are coincident with each other, and if the X coordinate coincides with the ejection data, a droplet of the color material is ejected by the ink jet nozzle 52 in step SP13.

  If it is determined in step SP12 that the X coordinate does not match the ejection data, or if the process in step SP13 is performed, the determination in step SP10 is performed again.

  If it is determined in step SP10 that the application has been performed up to the end, it is determined in step SP14 whether or not the application is the first time in the forward path. If the application is the first time in the forward path, the application is performed in step SP15. The gantry 4 is moved to the test pattern application position, and a test pattern is formed by the inkjet head bar 5 in step SP16. Specifically, a staggered test pattern is formed by moving the inkjet head bar 5 in the X direction and selecting the inkjet nozzles 52 that perform the ejection operation.

  If it is determined in step SP14 that the application is not the first outbound pass, or if the process of step SP16 is performed, it is determined in step SP17 whether or not a predetermined number of times of application has been performed.

  If it is determined in step SP17 that the number of times of application has not reached the predetermined number, in step 18, the application gantry 4 is stopped, the inkjet head bar 5 is moved in the Y direction, and the determination in step SP7 is performed again. The moving distance in the Y direction may be a distance determined by the number of droplets of color material to be applied to one pixel area, for example, but an integral multiple of the pixel pitch in the Y direction is set to this distance. The added distance may be used. In the latter case, since the ink jet nozzles eject ink to different pixels, even if there is a variation in the size of the landing mark for each ink jet nozzle, it can be averaged as a whole.

  If it is determined in step SP17 that the coating has been performed a predetermined number of times, the coating process is terminated in step SP19, and the suction of the glass substrate 2 by the suction table 3 is canceled in step SP20, and unillustrated unloading is performed. The glass substrate 2 is unloaded by a robot or the like, and a series of processing is finished as it is.

In summary,
After the glass substrate 2 is carried into the suction table 3, the positioning by the outer shape regulating means, the alignment mark detection of the glass substrate 2 by moving the camera gantry 6, and the Y direction and θ direction based on the detection result The alignment of the glass substrate 2 is achieved by positioning. Thereafter, the camera gantry 6 is moved backward, and the glass substrate 2 is sucked and held by the suction table 3.

  Next, the application gantry 4 is moved forward to perform the first outward application.

  Thereafter, the coating gantry 4 is moved to the surplus area to form a test pattern.

  Thereafter, the coating gantry 4 is moved backward in a state where the ink jet head bar 5 is slightly moved in the Y direction to perform the first return coating. During this time, the camera gantry 6 is moved forward and the scan camera 9 moves the glass. The test pattern of the substrate 2 is inspected, and then the camera gantry 6 is moved back.

  Here, the inspection of the test pattern may be an inspection of the position of the landing mark of the color material or an inspection of the shape of the landing mark of the color material. In the former case, the coordinate value can be calculated by performing a predetermined calculation based on the inspected position. In the latter case, shape inspection can be achieved by comparing the shape with a reference shape.

  Thereafter, the second outward coating is performed by moving the coating gantry 4 in a state where the coating gantry 4 is slightly moved in the Y direction.

  Thereafter, the second return coating is performed by moving the coating gantry 4 backward in a state of being slightly moved in the Y direction.

Thereafter, the suction holding of the glass substrate 2 is stopped, and the glass substrate 2 is unloaded from the suction table 3.
Thereafter, a desired number of color filters can be manufactured by repeatedly performing the series of processes described above.

  That is, when the color material is applied once, the color material adheres at an interval equal to the interval between the ink jet nozzles 52, so that the color material is not continuously applied.

  However, when the processing according to the above timing chart is performed, since the coating is performed by slightly changing the position in the Y direction, it is finally formed on the glass substrate 2 as shown in FIG. In addition, the color material can be continuously applied to the corresponding pixel region 22 of the black matrix 21.

  FIG. 5 shows a state in which six color filters CF are formed on the glass substrate 2, and a test pattern TP for each color material is formed in a surplus area outside the color filter CF. .

  FIG. 6 is an enlarged view showing the test pattern TP forming portion, and shows the test pattern TP formed by the ink jet nozzles 52 for three colors as being inspected by the camera gantry 6.

  Therefore, the color materials are separated from each other and are staggered.

  Then, the test pattern TP can be inspected by the scan camera 9 of the camera gantry 6, and if a discharge failure is detected, the necessary countermeasures are immediately taken (interruption of color filter manufacturing, replacement of the inkjet head 51 and inkjet nozzle 52). Etc.) and the production of defective products can be minimized. Further, when the number of inkjet nozzles 52 is larger than the required number, ejection of the color material from the inkjet nozzle 52 in which ejection failure is detected is prevented, and ejection of the color material from the excess inkjet nozzle 52 is performed. In addition, it is preferable to perform ejection control of the ink jet nozzle, and the production of the good color filter can be continued without interrupting the production of the color filter.

  Further, by forming a staggered pattern, the interval between the color materials can be increased, and the image processing can be given a certain amount of space, so that the inspection accuracy can be increased.

  Further, since the test pattern TP is inspected by the scan camera 9 of the camera gantry 6 during the coating operation by operating the coating gantry 4, extra time is required for inspecting the test pattern TP. In addition, it is possible to prevent inconvenience that the tact time becomes long.

  However, the inspection may be performed before coating, and in this case, the tact time becomes long, but the coating can be interrupted and the loss of the substrate can be minimized. Further, the inspection may be performed after the application is completed. In this case, since the inspection is performed in the next process of the application, the tact time is not affected, but the loss of the substrate becomes one or more.

  In addition, since the test pattern TP is inspected by the scan camera 9 of the camera gantry 6 based on the test pattern TP formed on the glass substrate 2, it is inspected accurately how the color material is applied. be able to. Of course, it is possible to quickly determine which inkjet head 51 is ejecting abnormally.

  Further, when the inspection is performed on the coordinates, it is possible to achieve the appropriate discharge of the color material by performing the discharge control of the inkjet head 51 based on the inspection result.

  In addition, since the above-described inspection is performed for each glass substrate on which the color filter is manufactured, it is possible to detect a gradual increase in the displacement in the ejection direction, and as a result, an abnormality in the ejection direction can be detected early. be able to.

  Further, when the inspection is performed on the shape of the landing mark of the color material, it is possible to achieve the appropriate discharge of the color material by performing the discharge control of the inkjet head 51 based on the inspection result.

  Moreover, since said test | inspection is performed for every glass substrate in which a color filter is manufactured, the change of discharge amount can be detected, As a result, abnormality of discharge amount can be detected at an early stage.

  Furthermore, the test pattern TP can be inspected by an inspection apparatus provided separately, and a detailed inspection exceeding the detection limit by the scan camera 9 can be achieved.

  It is also conceivable to draw the test pattern on a paper or other material different from the glass substrate 2, but in this case, not only the extra material for drawing the test pattern is required, but also the test pattern There is a problem that extra time is required for drawing. However, in the above-described embodiment, an extra material for drawing the test pattern is not required, and an extra time for drawing the test pattern is not required.

  The embodiment in which the application gantry 4 is moved in the X direction with respect to the suction table 2 has been described above. However, the application gantry 4 can be fixed and the suction table 3 can be moved. is there.

It is a perspective view which shows one Embodiment of the color filter manufacturing apparatus of this invention. It is an enlarged view which shows the structure of an inkjet head bar roughly. It is a timing chart explaining a color material application process and a test pattern inspection process. It is the schematic which shows the state in which the color material was apply | coated by the application | coating operation | movement of 4 times. It is the schematic which shows the state in which the color filter and the test pattern were formed on the glass substrate. It is the schematic which expands and shows a test pattern formation part. It is a flowchart explaining an example of a test pattern inspection process. It is a flowchart explaining an example of a color filter manufacturing process. It is a figure which shows an example of a discharge data table. It is a figure which shows an example of the landing trace from an inkjet nozzle.

Explanation of symbols

2 Glass substrate 5 Inkjet head bar 9 Scan camera 51 Inkjet head 52 Inkjet nozzle CF Color filter TP Test pattern

Claims (9)

While relatively moving an inkjet head bar (5) in which a plurality of inkjet heads (51) having a plurality of inkjet nozzles (52) are arranged and a glass substrate (2) having a black matrix formed thereon, In a color filter manufacturing method in which a color material is applied to pixels of the black matrix with an inkjet nozzle (52),
As a preparatory step for applying a color material to the glass substrate (2), a test pattern (TP) is drawn in advance on a test substrate, the coordinates of the landing mark of the color material of the test pattern (TP) are detected, A method for producing a color filter, wherein a discharge data table is created based on the coordinates of landing marks, and the discharge of the inkjet nozzle (52) in a subsequent coating process is controlled. While relatively moving an inkjet head bar (5) in which a plurality of inkjet heads (51) having a plurality of inkjet nozzles (52) are arranged and a glass substrate (2) having a black matrix formed thereon, In a color filter manufacturing method in which a color material is applied to pixels of the black matrix with an inkjet nozzle (52),
The color material is applied to the glass substrate (2) in several steps, and after the first forward application is completed, a test pattern (TP) is drawn on the surplus area of the glass substrate (2), and the backward application is performed. A method for manufacturing a color filter, comprising: inspecting the shape of the landing mark of the color material of the test pattern (TP) during While relatively moving an inkjet head bar (5) in which a plurality of inkjet heads (51) having a plurality of inkjet nozzles (52) are arranged and a glass substrate (2) having a black matrix formed thereon, In a color filter manufacturing method in which a color material is applied to pixels of the black matrix with an inkjet nozzle (52),
By applying the color material to the surplus area of the glass substrate (2) with the inkjet nozzle (52), the test pattern (TP) is drawn, and the coordinates of the landing mark of the color material of the test pattern (TP) And a discharge control of each inkjet nozzle (52) is performed based on the inspection result of the coordinates of the landing marks of the color material of the test pattern (TP). The color filter manufacturing method according to claim 2, wherein the test pattern (TP) is drawn by setting the landing marks of the color material of the test pattern (TP) in a staggered arrangement. A support member for supporting an inkjet head bar (5) in which a plurality of inkjet heads (51) having a plurality of inkjet nozzles (52) are arranged, and a glass substrate (2) having a black matrix formed thereon are held by suction. The suction table (3), the inkjet head bar (5), and the glass substrate (2) are moved relative to each other while maintaining a predetermined gap, and the ejection operation of the inkjet nozzle (52) is controlled. Then, in a color filter manufacturing apparatus including a discharge control means for applying a color material to the pixels of the black matrix, test pattern drawing for drawing a test pattern (TP) on the glass substrate (2) by the inkjet nozzle (52) And the position of the landing mark of the color material of the test pattern (TP) That the inspection means (9), the inspection result and calculation means for calculating the coordinates of the landing mark based on the color filter manufacturing apparatus which comprises a storage means for storing the operation result. A support member for supporting an inkjet head bar (5) in which a plurality of inkjet heads (51) having a plurality of inkjet nozzles (52) are arranged, and a glass substrate (2) having a black matrix formed thereon are held by suction. The suction table (3), the inkjet head bar (5), and the glass substrate (2) are moved relative to each other while maintaining a predetermined gap, and the ejection operation of the inkjet nozzle (52) is controlled. Then, in a color filter manufacturing apparatus including a discharge control means for applying a color material to the pixels of the black matrix, test pattern drawing for drawing a test pattern (TP) on the glass substrate (2) by the inkjet nozzle (52) And the shape of the landing mark of the color material of the test pattern (TP) That the inspection means (9), the inspection result and calculation means for calculating a change in the discharge amount based on a color filter manufacturing apparatus which comprises a storage means for storing the operation result. The color filter manufacturing apparatus according to claim 6, wherein the inspection means (9) performs inspection by comparing the shape of the landing mark of the color material of the test pattern (TP) with a reference shape. The color filter manufacturing apparatus according to claim 5 or 6, wherein the inspection means (9) includes a line scan camera that scans in a direction orthogonal to the application direction. The color filter manufacturing apparatus according to claim 5 or 6, wherein the inspection means (9) includes an area camera that intermittently moves in a direction orthogonal to the application direction and picks up an image when stopped.